Journal of Vacuum Science & Technology B

Article	Citations
High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining	131
Simplifying in vacuo optical measurements of CVD processes using vacuum-compatible optical fibers	26
Stacked hydrogel-based brain-on-chips utilizing capillary force flow pinning	26
Thickness dependent field emission study of LaB6 coated Si nanowire arrays	19
Heating samples to 2000 °C and above for scanning tunneling microscopy studies in ultrahigh vacuum	18
Secondary ion mass spectrometry as a tool to analyze semiconductor opening switch diodes	15
Current–voltage characteristics of Ag/Nb:SrTiO3/Ag and Au/Nb:SrTiO3/Ag heterostructures	14
In situ electron-beam-induced mechanical loading and fracture of suspended strained silicon nanowires	14
Top electrode dependence of the write-once-read-many-times resistance switching in BiFeO3 films	13
Photoassisted electron emission from planar-type electron source based on graphene/oxide/silicon structure	12
Angular emission evolution of the ZrO/W(100) Schottky emitter	12
Tungsten oxide nanowires prepared by thermal oxidation for application in cold cathode flat panel x-ray source	11
Numerical simulations of heterojunction GaN nanopillar light emitting diodes	11
Exploring oxide-nitride-oxide scalloping behavior with small gap structure and chemical analysis after fluorocarbon or hydrofluorocarbon plasma processing	10
Epoxy outgassing analysis by thermal desorption gas chromatography	10
Research on ultralow-energy high-flux ion beam propagation for ground-based simulation of space low-energy particle beam	10
Broadband optical enhancement of suspended Ge-on-Si infrared absorbers by using backside etching holes and a metallic reflector	10
Scanning electron microscope imaging by selective e-beaming using photoelectron beams from semiconductor photocathodes	10
Comparing the properties and growth of graphene on electrolytic and rolled Cu foils by chemical vapor deposition	10
Influence of thermal contact resistance on the field emission characteristics of a carbon nanotube	10
All water based nanoscale electron beam lithography using polyacrylic acid hydrogel as a resist	10
Numerical analysis of high vacuum packaging efficiency for narrow structured devices	10
Novel excitation structure to improve the performance of a miniature radio frequency ion thruster	9
Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies	9
Piezoelectric effect of crystal nanodomains on the friction force	9

Tandem mass spectrometry dissociation of large oligomer ions produced by argon cluster ion beams secondary ion mass spectrometry	9
Effect of ultraviolet light on field emission performance and lifetime of lateral field emitter devices	9
Design and optimization of a novel nonevaporable getter pump geometry	9
Investigation on the heat transfer characteristics of flexible vacuum glass based on cross-laminated microcavities	9
Correction model for photoresist shrinkage in critical dimension scanning electron microscopy based on improved spider wasp optimizer—Optimized support vector regression	9
Study of zinc doped In0.53Ga0.47As/InP/InAlAs/InP heterostructures by time-of-flight; magnetic secondary ion spectrometry and high-energy x-ray photoelectron spectroscopy	8
Effect of glow cleaning bias voltage on microstructure and properties of ion nitriding/multiarc ion plating CrTiAlN composite coatings	8
Overlay control solution for high aspect ratio etch process induced overlay error	8
Effect of the TiN-coating-layer properties on the electron emission of volcano-structured silicon field emitter arrays	8
Investigation into the effect of a PECVD-deposited SiOx chamber coating on the selective, radical-based NF3 etching of TaN with respect to BEOL low-k	8
Compositional dependence of direct transition energies in SixGe1−x−ySny alloys lattice-matched to Ge/GaAs	8
Effect of inductively coupled plasma etch on the interface barrier behavior of (001) β-Ga2O3 Schottky barrier diode	8
Diffusion-isolated pressure equilibration for multigas refractometry	8
Effects of athermal carrier injection on Co-60 gamma-ray damage in SiC merged-PiN Schottky diodes	8
Wet and dry etching of ultrawide bandgap LiGa5O8 and LiGaO2	8
Accelerating multiple patterning lithography layout decomposition with a stochastic analog Boolean satisfiability solver	8
Fabrication of silicon W and G center embedded light-emitting diodes for electroluminescence	8
Fluorescent flow analysis of in situ material exchange in two-photon 3D printing	8
Evaluation of dry stored disposable sensor strip on rapid SARS-CoV-2 detection platform	8
Deep cryogenic silicon etching for 3D integrated capacitors: A numerical perspective	8
Electron emission properties of titanium nitride coated volcano-structured silicon emitters	8
Heat transfer mechanism of electrostatic chuck surface and wafer backside to improve wafer temperature uniformity	8
Understanding 3D anisotropic reactive ion etching of oxide-metal stacks	8
Field emission properties of large-area flexible emitter based on polyvinyl alcohol–carbon nanotube nanocomposite	8
Novel wet transfer technology of manufacturing flexible suspended two-dimensional material devices	7
Dry etching characteristics of titanium dioxide grown by different physical vapor deposition processes	7
Maxwell design of the magnetic field in an unbalanced magnetron system for optimization toward sputtering of Al-Si alloy	7
Numerical analysis of Gaussian potential patches model depending on the substrate doping in inhomogeneous Schottky barrier diodes over a wide temperature range	7
Effect of water vapor pressure on positive and negative tone electron-beam patterning of poly(methyl methacrylate)	7
Methods for automatically obtaining the sputtering-induced roughness upon depth profiling of polycrystalline films	7
Investigation of polymer template removal techniques in three-dimensional thin-shell nanolattices	7
Outgassing rate testbed for in-operation analysis of powered and heated assemblies	7
Through-chip porous layer fabrication by plasma etching with protective film deposition	7
Resistive switching of two-dimensional Ag2S nanowire networks for neuromorphic applications	7
Numerical simulation study of the flow and diffusion characteristics of trace gas in a gas mixture based on the ellipsoidal statistical Bhatnagar–Gross–Krook model	7
Microsphere photolithography using reusable microsphere array mask for low-cost infrared metasurface fabrication	7
High-precision CD extraction for silver-layered photoresists using Monte Carlo simulation	7
Selective growth of graphene films on gallium-focused ion beam irradiated domains	7
Practical guide for in-house solid-state nanopore fabrication and characterization	7
Highly selective anisotropic dry etching of smooth SiO2 nanostructures using SF6 plasma and Cr hard mask: Toward sustainable plasma etching	7
Micromirror fabrication for co-packaged optics using 3D nanoimprint technology	7
Silicon etching by chlorine plasma: Validation of surface reactions mechanism	7
Enhancement of electrical properties of a-IGZO thin film transistor by low temperature (150 °C) microwave annealing for flexible electronics	6
Computational study of mechanical stresses in a cell interacting with micromechanical cues and microfabrication of such cues in Nervous system-on-Chips	6
Analysis for roughness-generation mechanism in Ru etching using Cl2/O2-based plasma for advanced interconnect	6
Study of the structural and electronic properties of Zn1−x−yMgxTiyO structures	6
Effects of high-temperature annealing on vacancy complexes and luminescence properties in multilayer periodic structures with elastically strained GeSiSn layers	6
Fabrication of plasmonic Au nanostructures on dielectric supports using 10 keV electron beam lithography and tests for SERS biodetection	6
Characterization of TaxO5−y thin films grown by HiPIMS reactive sputtering for temperature sensing applications	6
Experimental investigation of the feasibility of in situ plasma cleaning in normal-conducting copper cavities	6

Influence of O content on exothermic and self-propagating characteristics of Ti/SiOx multilayer films	6
Electrochemical pipette-based analysis on anisotropy in rutile TiO2 for photoelectrochemical hydrogen revolution	6
TiN and TaN cointegration for 300 mm superconducting back end of line	6
Interfacial reactivity in the Co/CuO samples as investigated by x-ray photoelectron spectroscopy	6
Chaos-enhanced self-adaptive particle swarm optimization with simulated annealing for digital lithography mask optimization	6
Effect of atomic-scale microstructures on TiZrV non-evaporable getter film activation	6
Effect of quality improvement in active region on temperature characteristics of GaN-based ultraviolet laser diode	6
Preface to the Special Topic Collection Celebrating the Achievements and Life of Paul H. Holloway	6
Spectro-ellipsometric probing of wetting, nucleation, and dot/island formation during photo-excited chemical vapor deposition of Ge on SiO2 substrate	6
Dysprosium liquid metal alloy ion source for magnetic nanostructures	6
New approach of local critical dimension uniformity improvement for via/contact hole etch with direct current superposition	6
Suppressing oxygen vacancy formation in ZrO2 to improve electrical properties by employing MoO2 bottom electrode	6
Scanning anode field emission microscopy of a single Si emitter	6
Realizing GaN-based blue laser diode with 7.5 W output power via electron blocking layer thickness adjustment	6
Characteristics of a hybrid radio frequency capacitively and inductively coupled plasma using hydrogen gas	6
Maximizing the performance of a field emission device by profiling the emitter’s height distribution	6
Spatial variation of the elemental components of thin films from BiSrCaCuO target deposited using low energy femtosecond pulsed laser deposition in high background gas pressure	6
Vertical silicon nanowedge formation by repetitive dry and wet anisotropic etching combined with 3D self-aligned sidewall nanopatterning	6
Effect of low-pressure postannealing on the electrical properties of VO2 thin films	6
Predicting the effects of plasma-induced damage on p–n junction leakage and its application in the characterization of defect distribution	6
Combined ultraviolet- and electron-beam lithography with Micro-Resist-Technology GmbH ma-N1400 resist	6
Dual-gate Hf-doped InZnO field-effect transistors with sub-0.1 V threshold voltage shift under bias stress	5
Measuring and understanding the nanomechanical properties of halide perovskites and their correlation to structure—A perspective	5
High-precision thermal characterization technique with dual-laser Raman thermometry	5
Improvement of electrical characteristics of flexible AZO/Ag/Cu/AZO transparent conductive films by Cu deposition	5
Novel surface wave technique for moderate-pressure plasma measurements	5
AC thin-film electroluminescence: A historical overview with a look ahead	5
Characterization of pulsed laser deposited La2O2S:Eu3+ thin films and effect of coating with graphene oxide layers	5
Optical and electronic spin properties of fluorescent micro- and nanodiamonds upon prolonged ultrahigh-temperature annealing	5
Electrochemical bulk and film-type oxygen sensors: Strategies for detecting extremely low concentration in hydrogen environments	5
MeV-SIMS measurement of negative electrode surface of lithium ion battery after charging and discharging	5
Investigation of Rb+ milling rates using an ultracold focused ion beam	5
Effect of substrate rotation speed on AlGaN nanowire deep ultraviolet light-emitting diodes by molecular beam epitaxy	5
Plasma confinement by an optoelectronic system	5
All field emission experiments are noisy, … are any meaningful?	5
Experimental current-voltage-temperature and thermal sensitivity behaviors of an ideal Schottky barrier diode over a wide temperature range	5
Metal-pattern preparation based on selective deposition using soft organofluorine surfaces	5
SiMiC: Context-aware silicon microstructure characterization using attention-based convolutional neural networks for field-emission tip analysis	5
Improved optical and electrical response by glancing angle synthesized Al2O3 nanorod array device	5
Transition from the regime of thermionic emission to the space-charge limited current regime under strong Shottky effects	5
Investigation of tilted etching of Si3N4 using CF4/O2 plasma: Process development and mechanism study	5
Tabletop extreme ultraviolet test platform for optical property evaluation of lithography materials	5
Improved impedance matching speed with gradient descent for advanced RF plasma system	5
Design of plasma strip chamber for uniform gas supply with fluid flow simulation	5
Electrochemical imaging correlated to hydrogen evolution reaction on transition metal dichalcogenide, WS2	5
Multiplicity features of carbon nanotube emitters	5
Thermal evaporation of thin Li films	5
Novel inspection technology for detecting via open using parallel e-beam scanning and graphic design system	5
Membrane-electrode junction properties for optimum potentiometric hydrogen sensor response	5
Novel approach for KrF chemically amplified resist optimization assisted by deep learning	5
Enhancement in neuromorphic NbO2 threshold switching at cryogenic temperatures	5
Study of simulations of double graded InGaN solar cell structures	5
Impact of interparticle contact on discharge capacity in all-solid-state batteries: A 3D simulation approach	4
Enhancing plasma uniformity in SiH4/NH3 capacitively coupled plasmas via dielectric structure adjustment positioning adjacent to the power electrode	4
Role of tin clustering in band structure and thermodynamic stability of GeSn by atomistic modeling	4
Improvement and optimization of AZO/Ag/Ni/AZO multilayer transparent conductive films	4
Effects of gases on the field emission performance of silicon gated field emitter array	4
Integrated silicon electron source for high vacuum microelectromechanical system devices	4
Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy	4
Thermal sensitivity and current-voltage-temperature characteristics in Pt/epitaxy n-Si/n+Si structures as a function of Schottky contact area	4
Effect of the kinetic energy on particle ejection process from carbon nanotubes bombarded by kilo-electron-volt C60	4
Experimental study of flake graphite large-area explosion electron emission cathode performance based on particle size discrepancy	4
Thank you to our 2024 reviewers!	4
High off-state voltage (4266 V) diamond metal oxide semiconductor field effect transistors	4
Yellow luminescence band defect related photocurrent instability of GaN p-i-n ultraviolet photodetectors	4
Evolution of lithography-to-etch bias in multi-patterning processes	4
Characterizing the stability of poly-ethylene glycol surface coatings as a function of environmental conditions for micropatterning applications	4
4H-SiC layer with multiple trenches in lateral double-diffused metal-oxide-semiconductor transistors for high temperature and high voltage applications	4
Selectively patterned Mg-doped GaN by SiNx-driven hydrogen injection	4
Fabrication of ultrahigh aspect ratio Si nanopillar and nanocone arrays	4
Si content in methacrylamide-containing A- b -(B- r -C) block copolymers and its impact on reactive ion et	4
Selective wet etching of atomic layer deposited ferroelectric hafnium zirconium oxide and hafnium oxide thin films	4
Roughness-generation mechanism of Ru etching using Cl2/O2-based plasma for advanced interconnect	4
Heating of Cs2Te photocathode via field emission and radiofrequency pulsed heating: Implication toward breakdown	4
Characterization of iron-based alloy catalysts for atmospheric pressure chemical vapor deposition of carbon nanofibers via in situ transmission electron microscopy	4
Structural, surface, and upconversion luminescence properties of pulsed laser-deposited Y2O3:Ho3+,Yb3+ thin films	4
Optimizing photoresist linewidth roughness in ion beam shaping: A systematic study of stage angular configuration	4
Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications	4
Mechanisms of stress control in SiNx membranes under gas cluster ion beam irradiation	4
Study on the etching mechanism of quartz using dual-frequency (60 MHz/400 KHz) capacitively coupled C4F8/Ar/O2 plasma	4

Physics based model of an AlGaN/GaN vacuum field effect transistor	4
In situ mass spectrometric investigation to probe GeSn growth dynamics and mechanisms in the chemical vapor deposition processes	4
Dynamic switching operation of diamond MOSFETs with NO2 p-type doping and Al2O3 gate insulation and passivation	4
Surface deposition of nanometer scale carbon structures on Bi2Sr2CaCu2O8 + δ using a low-cost scanning electron microscope	4
Magnetized, radiofrequency-driven hollow cathode chemical-vapor deposition of ultrathick hydrogenated amorphous carbon	4
Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness	4
MeV proton and neutron damage effects on deep-ultraviolet light-emitting diodes	4
Research on the improvement of the adhesion strength of the Cu films deposited on the Al2O3 films	4
Method for monitoring high aspect ratio contact dry etching process using calibration and normalization method for optical emission spectroscopy	4
Secondary ion mass spectrometry in the transmission mode: Update and outlook	3
Cu1−xAlx films as alternatives to copper for advanced interconnect metallization	3
Effects of ion implantation with arsenic and boron in germanium-tin layers	3
Tracing degradation mechanisms of epitaxially grown GaAsSb on InP by InSb formation at elevated temperatures	3
Self-alignment of whole wafers using patterning for capillary forces	3
Resistivity improvement of flexible transparent conductive films with Cu inserted intermediate layer	3
Random graphene adlayer morphologies grown on microfaceted Cu surfaces for physical unclonable functions	3
Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography	3
Epitaxial SiGeSn grown on Si by ion implantation	3
Comparison of surface morphology and roughness of silicon surfaces etched using pulsed and continuous flow XeF	3
Effect of sputter power on red-shifted optoelectronic properties in magnetron sputtered Ag/ZnO thin films	3
Hybrid sputtering approach for reliable TOF-SIMS depth profiling of inorganic–organic multilayer films	3
Cluster-induced desorption/ionization mass spectrometry of Ir(ppy)3	3
Future of plasma etching for microelectronics: Challenges and opportunities	3
Multiple connected artificial synapses based on electromigrated Au nanogaps	3
Effects of iCVD organic passivation in oxide thin-film transistors under repetitive bending stress for electrical and mechanical stability	3
Generation of broadband optical chaos at mid-infrared wavelength with an interband cascade laser	3
Fabrication and characteristics of double-gate zinc oxide nanowire field emitter arrays	3
Upgrading of the modified Knudsen equation and its verification for calculating the gas flow rate through cylindrical tubes	3
Real-time determination of sputtered TiC film composition using optical emission spectroscopy	3
Transitions between field emission and vacuum breakdown in nanoscale gaps	3
Shape tuning of large area silicon nanotip arrays through reactive ion etching	3
Thermal dynamics and stability of metallic emitters	3
Identification of dust particles on a periodic nanostructured substrate using scanning electron microscope imaging	3
Erratum: “Electronic structure of InSb (001), (110), and (111)B surfaces” [J. Vac. Sci. Technol. B 41, 032808 (2023)]	3
Synthesis and characterization of electron beam irradiation-induced damage in polycrystalline metal thin films	3
Electron transport mechanisms in amorphous zinc oxysulfide thin films	3
Structure optimization of Spindt-type emitter fabricated by triode high power pulsed magnetron sputtering	3
Permeation of oxygen and water into a plasma-enhanced chemical vapor deposited silicon nitride film as function of deposition pressure	3
Molecular beam epitaxy growth and characterization of GePb alloys	3
Extreme contact shrink for back end of line connectivity	3
High sensitivity CIP2A detection for oral cancer using a rapid transistor-based biosensor module	3
Development for high-aspect-ratio hole etching with hydrogen fluoride gas based cryogenic process	3
Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices	3
Influence of electron beam irradiation on nanoscale adhesion during colloidal probe experiments inside the scanning electron microscope	3
Cost-effective fabrication of RF AlGaN/GaN HEMTs on surface activated bonding-bonded SiC-SiC substrate	3
Energy distribution of electrons emitted from a thermionic-field emission cathode operating under space-charge limitation	3
Growth of CdS heterojunctions on Cd0.9Zn0.1Te single crystals with H2S	3
Depth-resolved characterization of mechanically weakened surface layers in vacuum ultraviolet-irradiated cycloolefin polymer films using micro slurry-jet erosion test and ToF-SIMS analysis	3
Role of the oxidation conditions on the orientation of TiNxOy grown by atomic layer deposition: Impact on the optical and electrical properties	3
Radio frequency side-gate nanoscale vacuum channel triode	3
Zernike model for overlay control and tool monitor for lithography and etch process	3
Excitonic effects in the optical absorption of gapless semiconductor α-tin near the direct bandgap	3
Atmospheric pressure plasma treatment of chitosan-acrylic acid blends	3
Electronic and optical properties of lithium-doped boron nitride nanoribbons using density functional theory	3
Direct writing immersion laser lithography on graphene monolayers using two-photon absorption	3
Insights into the native structure of polyurea thickened lubricating grease via a multi-technique approach	3
Cryomicroscopy of low melting point metals	3
Machine learning aided optimization of drag pump performance	3
Physical modeling of side wall deposition by inclined electron beam evaporation	3
Gap distance dependence on field emission at the nanogap between silicon cleavage surfaces	3
Plasmon resonance-based study of the peroxidaselike catalytic effect of gold nanoparticles	3
Solar-thermal cold-wall chemical vapor deposition reactor design and characterization for graphene synthesis	3
3D structure of box-and-grid electron multiplier with higher electron collection efficiency	3
Nanoimprint lithography guiding templates for advanced magnetic media fabrication	3
Mitigation of electronic crosstalk interference in graphene transistor biosensors	3
Ferroelectricity in amorphous aluminum oxynitride films synthesized by inductively coupled plasma assisted atomic layer deposition	3
Thermal sensing capability and current–voltage–temperature characteristics in Pt/n-GaP/Al/Ti Schottky diodes	3
Plasma enhanced activation of ion implanted dopants	3
Grain growth of Cu wires during Joule heat welding	3
Secondary ion mass spectrometry analysis of metal oxides using 70 keV argon, carbon dioxide, and water gas cluster ion beams	3
Phase-shifted counterpropagating atmospheric pressure plasma jets: Characterization and interaction with materials	3
Fabrication of hierarchical nanostructures using binary colloidal nanosphere assembly	3
Magneto-transport study on Sn-rich Sn1−xGex thin films enabled by CdTe buffer layer	3
Scalable fabrication of vertically arranged Bi2Se3 crossbar arrays for memristive device applications	3
Controlling the etch selectivity of silicon using low-RF power HBr reactive ion etching	3
Modeling of water outgassing from polymers incorporating surface adsorption and desorption	3
Is the linear relationship between the slope and intercept observed in field emission S-K plots an artifact?	3
Honeycomb-shaped vertically aligned carbon nanotubes decorated with molybdenum trioxide as an electrochemical sensor for glucose	3
Desorption model of volatile Ru species induced by partial chlorination on Ru(0001) under an O2/Cl2-based plasma process	3
Electronic structure of InSb (001), (110), and (111)B surfaces	3