Journal of Vacuum Science & Technology B

Article	Citations
Evidence of improved power conversion efficiency in lead-free CsGeI3 based perovskite solar cell heterostructure via scaps simulation	96
Atomic force microscopy for nanoscale mechanical property characterization	23
Temperature dependence of barrier height inhomogeneity in β-Ga2O3 Schottky barrier diodes	22
Development of microfabricated planar slow-wave structures on dielectric substrates for miniaturized millimeter-band traveling-wave tubes	22
Temperature effects on gated silicon field emission array performance	18
Optical realization of the pascal—Characterization of two gas modulated refractometers	17
Characterization of cathode-electrolyte interface in all-solid-state batteries using TOF-SIMS, XPS, and UPS/LEIPS	17
Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks	16
Fast SARS-CoV-2 virus detection using disposable cartridge strips and a semiconductor-based biosensor platform	16
Molecular dynamics study of silicon atomic layer etching by chlorine gas and argon ions	15
Determining the field enhancement factors of various field electron emitters with high numerical accuracy	15
Optical emission intensity overshoot and electron heating mechanisms during the re-ignition of pulsed capacitively coupled Ar plasmas	15
Incorporating photoemission into the theoretical unification of electron emission and space-charge limited current	14
Patterning challenges for direct metal etch of ruthenium and molybdenum at 32 nm metal pitch and below	14
Ultraviolet light stimulated water desorption effect on emission performance of gated field emitter array	14
Molecular dynamics simulation for reactive ion etching of Si and SiO2 by SF5+ ions	14
Effect of oxygen vacancy gradient on ion-irradiated Ca-doped YMnO3 thin films	11
Neuromorphic computing: From devices to integrated circuits	11
All field emission models are wrong, … but are any of them useful?	11
Stabilization of cold-field-emission current from a CeB6 single-crystal emitter by using a faceted (100) plane	10
Temperature dependence of the optical phonon reflection band in GaP	10
PHIDL: Python-based layout and geometry creation for nanolithography	9
Effect of low frequency voltage waveform on plasma uniformity in a dual-frequency capacitively coupled plasma	9
Outgassing rate comparison of seven geometrically similar vacuum chambers of different materials and heat treatments	9
nanolithography toolbox—Simplifying the design complexity of microfluidic chips	9

Design of a remote plasma-enhanced chemical vapor deposition system for growth of tin containing group-IV alloys	9
Information extraction from Murphy–Good plots of tungsten field electron emitters	9
Hollow cathode enhanced capacitively coupled plasmas in Ar/N2/H2 mixtures and implications for plasma enhanced ALD	9
Intrinsic excitation-dependent room-temperature internal quantum efficiency of AlGaN nanowires with varying Al contents	8
Self-powered ultraviolet photodiode based on lateral polarity structure GaN films	8
Virtual metrology modeling of reactive ion etching based on statistics-based and dynamics-inspired spectral features	8
Long term field emission current stability characterization of planar field emitter devices	8
Design of a large nonevaporable getter pump for the full size ITER beam source prototype	8
Novel physics-based tool-prototype for electromigration assessment in commercial-grade power delivery networks	8
Oxygen-free transport of samples in silane-doped inert gas atmospheres for surface analysis	8
Thermal sensing capability and current–voltage–temperature characteristics in Pt/n-GaP/Al/Ti Schottky diodes	8
Optimization of a continuous hot embossing process for fabrication of micropyramid structures in thermoplastic sheets	8
Characterization of nanoscale vertical-channel charge-trap memory thin film transistors using oxide semiconducting active and trap layers	7
Effective polymerization technique for plasma-treated multiwalled carbon nanotubes to maximize wear resistance of composite polyurethane	7
Improving detection of plasma etching end point using light compensation on optical emission spectra	7
Computational study of plasma dynamics and reactive chemistry in a low-pressure inductively coupled CF4/O2 plasma	7
Advances in secondary ion mass spectrometry for N-doped niobium	7
Silicon field emitters fabricated by dicing-saw and wet-chemical-etching	7
Gate offset and emitter design effects of triode cold cathode electron beams on focal spot sizes for x-ray imaging techniques	7
Atomic-resolution lithography with an on-chip scanning tunneling microscope	7
Planar figure-8 coils for ultra-focal and directional micromagnetic brain stimulation	7
Transitions between field emission and vacuum breakdown in nanoscale gaps	7
AlGaN nanowire deep ultraviolet LEDs with polarization enhanced tunnel junction and p-AlGaN layer by molecular beam epitaxy	7
In-plasma photo-assisted etching of Si with chlorine aided by an external vacuum ultraviolet source	7
Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint	6
Systematic study of the outgassing behavior of different ceramic materials	6
Demonstration of a silicon gated field emitter array based low frequency Colpitts oscillator at 400 °C	6
Proposal that interpretation of field emission current–voltage characteristics should be treated as a specialized form of electrical engineering	6
Strain engineering in III-V photonic components through structuration of SiNx films	6
Time-resolved ion energy distribution in pulsed inductively coupled argon plasma with/without DC bias	6
Lithium source for focused ion beam implantation and analysis	6
Electromigrated nanogaps: A review on the fabrications and applications	6
Plasma processing and annealing for defect management at SiO2/Si interface	6
Electroforming and threshold switching characteristics of NbOx films with crystalline NbO2 phase	6
Ultrafast method for scanning tunneling spectroscopy	6
Close-packed silicon field emitter arrays with integrated anode fabricated by electron-beam lithography	6
High signal-to-noise ratio differential conductance spectroscopy	6
Si-capping-induced surface roughening on the strip structures of Ge selectively grown on an Si substrate	6
Improve photo-to-dark current ratio of p-Si/SiO2/n-Ga2O3 heterojunction solar-blind photodetector by inserting SiO2 barrier layer	6
All field emission experiments are noisy, … are any meaningful?	6
Rare earth doped CaWO4 and CaMoO4 thin films for white light emission	6
100 keV vacuum sealed field emission gun for high resolution electron microscopy	6
Reliability and resistance projections for rhodium and iridium interconnects from first-principles	6
Digital biosensor for human cerebrospinal fluid detection with single-use sensing strips	6
Pyroelectric lithium niobate electron emission-based ion-pump	6
Thermal sensitivity and current-voltage-temperature characteristics in Pt/epitaxy n-Si/n+Si structures as a function of Schottky contact area	6
Field emission arrays from graphite fabricated by laser micromachining	6
Low trap density of oxygen-rich HfO2/GaN interface for GaN MIS-HEMT applications	6
On the brightness, transverse emittance, and transverse coherence of field emission beam	6
Subradiant resonances in Au and Ag bipartite lattices in the visible spectrum	6

Comparative study on the molecular beam epitaxial growth and characterization of AlGaN nanowire structures on AlN buffer layer and on Si	6
Fabrication of high aspect ratio and tilted nanostructures using extreme ultraviolet and soft x-ray interference lithography	5
III–V semiconductor devices grown by metalorganic chemical vapor deposition—The development of the Swiss Army Knife for semiconductor epitaxial growth	5
Combined ultraviolet- and electron-beam lithography with Micro-Resist-Technology GmbH ma-N1400 resist	5
Cr and CrOx etching using SF6 and O2 plasma	5
Magnetron co-sputtered μm-thick Mo–Cu films as structural material with low heat extension for key parts of high-power millimeter-band vacuum microelectronic devices	5
High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining	5
ZnO piezoelectric coatings used for the ultrasonic excitation of longitudinal-transverse waves and their application for smart bolts	5
Fabrication of high quality X-ray source by gated vertically aligned carbon nanotube field emitters	5
Electrochemical imaging correlated to hydrogen evolution reaction on transition metal dichalcogenide, WS2	5
Fabrication of three-dimensional opal nanolattices using template-directed colloidal assembly	5
Selective volatile organic compound gas sensor based on carbon nanotubes functionalized with ZnO nanoparticles	5
Role of electron and ion irradiation in a reliable lift-off process with electron beam evaporation and a bilayer PMMA resist system	5
Superhydrophobic SnO2 nanowire/graphene heterostructure-based ultraviolet detectors	5
Radiation damage in GaN/AlGaN and SiC electronic and photonic devices	5
Synthesis and detailed characterizations of Ag nanoparticles coated In2O3 nanostructured devices: An analytical and experimental approach	5
Evaluation of electron currents from cesium-coated tungsten emitter arrays with inclusion of space charge effects, workfunction changes, and screening	5
Growth mode and characterizations of electrodeposited Re thick films from aqueous solutions with additives on Cu (110) + (311) substrates	5
Hydrogen etching of the SiC(0001) surface at moderate temperature	5
Plasma atomic layer etching for titanium nitride at low temperatures	5
On the chemistry mechanism for low-pressure chlorine process plasmas	5
Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga2O3 with neutron irradiation and forming gas anneals	5
Long-term brain-on-chip: Multielectrode array recordings in 3D neural cell cultures	5
Lithographically patterned stretchable metallic microwiring on electrospun nanofiber mats	4
Improved quantitation of SIMS depth profile measurements of niobium via sample holder design improvements and characterization of grain orientation effects	4
Deposition and morphology of direct current plasma-polymerized aniline	4
Sb2Se3 solar cells fabricated via close-space sublimation	4
Gamma radiation on gallium nitride high electron mobility transistors at ON, OFF, and prestressed conditions	4
Heat transfer mechanism of electrostatic chuck surface and wafer backside to improve wafer temperature uniformity	4
Multiple connected artificial synapses based on electromigrated Au nanogaps	4
Overlay control solution for high aspect ratio etch process induced overlay error	4
Particle-in-cell simulation of an industrial magnetron with electron population analysis	4
Rapid SARS-CoV-2 diagnosis using disposable strips and a metal-oxide-semiconductor field-effect transistor platform	4
On modeling the induced charge in density-functional calculations for field emitters	4
Multiple electron beam generation from InGaN photocathode	4
Effect of room air exposure on the field emission performance of UV light irradiated Si-gated field emitter arrays	4
Experimental considerations in electron beam transport on a nanophotonic chip using alternating phase focusing	4
Atomic precision imaging with an on-chip scanning tunneling microscope integrated into a commercial ultrahigh vacuum STM system	4
Reaching homogeneous field emission current from clusters of emitters with nonuniform heights	4
Characterization and optimization of bonding and interconnect technology for 3D stacking thin dies	4
Design and fabrication of a micro-opto-mechanical-systems accelerometer based on intensity modulation of light fabricated by a modified deep-reactive-ion-etching process using silicon-on-insulator waf	4
Scanning anode field emission microscopy of a single Si emitter	4
Photoinduced carrier transport mechanism in pn- and nn-GaN/GaON heterojunctions	4
High sensitivity saliva-based biosensor in detection of breast cancer biomarkers: HER2 and CA15-3	4
Gate engineering in metal insulator semiconductor capacitors on native gallium nitride substrates for applications with high lifetime requirements	4
Understanding plasma enhanced chemical vapor deposition mechanisms in tetraethoxysilane-based plasma	4
Device feasibility and performance improvement methodologies for thin film transistors using In-Ga-Sn-O channels prepared by atomic-layer deposition	4
Comparison of the effective parameters of single-tip tungsten emitter using Fowler–Nordheim and Murphy–Good plots	4
Analysis of LiCoO2 electrodes through principal component analysis of current–voltage datacubes measured using atomic force microscopy	4
Modeling the effect of stochastic heating and surface chemistry in a pure CF4 inductively coupled plasma	4
Enhancement of thermionic emission and conversion characteristics using polarization- and band-engineered n-type AlGaN/GaN cathodes	4
Stress reduction and wafer bow accommodation for the fabrication of thin film lithium niobate on oxidized silicon	4
Field emitter electrostatics: Efficient improved simulation technique for highly precise calculation of field enhancement factors	4
Influence of primary electron incident angle and electron bombardment on the secondary electron yield of laser-treated copper	4
Absolute measurement of vacuum ultraviolet photon flux in an inductively coupled plasma using a Au thin film	4
Novel technique to control the focal spot size using carbon nanotube based cold cathode electron beam (C-beam) architecture	4
Tensile-strained self-assembly of InGaAs on InAs(111)A	4
Diffusive separation in rarefied plume interaction	4
Electronic structure of InSb (001), (110), and (111)B surfaces	4
Selective plasma etching of silicon-containing high chi block copolymer for directed self-assembly (DSA) application	4
Interferometric in-situ III/V semiconductor dry-etch depth-control with ±0.8 nm best accuracy using a quadruple-Vernier-scale measurement	4
Time response measurement of pulsed electron beam from InGaN photocathode	4
Maintaining atomically smooth GaAs surfaces after high-temperature processing for precise interdiffusion analysis and materials engineering	4
Scanning electron microscope imaging by selective e-beaming using photoelectron beams from semiconductor photocathodes	4
Plasma-based area selective deposition for extreme ultraviolet resist defectivity reduction and process window improvement	4
Optimization of photoresist plating mold fabrication for metal mask patterning	3
Effects of gases on the field emission performance of silicon gated field emitter array	3
Improvement of silicon microdisk resonators with movable waveguides by hydrogen annealing treatment	3
Designing MoS2 channel properties for analog memory in neuromorphic applications	3
New SIMS method to characterize hydrogen in polysilicon films	3
Thermal-field emission from cones and wires	3
Si nanocone structure fabricated by a relatively high-pressure hydrogen plasma in the range of 3.3–27 kPa	3
Optimization of silicon etch rate in a CF4/Ar/O2 inductively coupled plasma	3
Deviation of photoelectron intensity from Beer-Lambert law in near-ambient pressure hard x-ray photoelectron spectroscopy	3
Temperature dependence of the infrared dielectric function and the direct bandgap of InSb from 80 to 725 K	3
Scaling in large area field emitters and the emission dimension	3
Evolution of lithography-to-etch bias in multi-patterning processes	3
Minimizing filling time for ultraviolet nanoimprint lithography with templates with multiple structures	3
Opportunities for ionic liquid/ionogel gating of emerging transistor architectures	3
Interpreting the field emission equation for large area field emitters	3

Multifractal wavefunctions of charge carriers in graphene with folded deformations, ripples, or uniaxial flexural modes: Analogies to the quantum Hall effect under random pseudomagnetic fields	3
Effects of thickness on the wettability and electrical properties of Sn thin films	3
Surface polarity dependence of thermionic emission and conversion characteristics of n-type GaN cathodes	3
Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies	3
Optical and electronic spin properties of fluorescent micro- and nanodiamonds upon prolonged ultrahigh-temperature annealing	3
Fabrication of ultrahigh aspect ratio Si nanopillar and nanocone arrays	3
In situ quantitative field emission imaging using a low-cost CMOS imaging sensor	3
Application of deep-learning based techniques for automatic metrology on scanning and transmission electron microscopy images	3
Investigation of Rb+ milling rates using an ultracold focused ion beam	3
Postdeposition annealing effect on atomic-layer-deposited Al2O3 gate insulator on (001) β-Ga2O3	3
Solar-thermal cold-wall chemical vapor deposition reactor design and characterization for graphene synthesis	3
Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?	3
Theoretical model for fast calculations of the electrical resistivity of thin metallic films with rough surfaces	3
Morphology of Ge thin films crystallized by Au-induced layer exchange at low temperature (220 °C)	3
High current silicon nanowire field emitter arrays	3
Investigation of the deposition of α-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit	3
Nanofabricating neural networks: Strategies, advances, and challenges	3
Processing of experimental current-voltage characteristics of single tip emitters taking into account the functional dependence of the emission area on the applied voltage	3
Micromirror fabrication for co-packaged optics using 3D nanoimprint technology	3
An Invar-based dual Fabry–Perot cavity refractometer for assessment of pressure with a pressure independent uncertainty in the sub-mPa region	3
Resistive switching of two-dimensional Ag2S nanowire networks for neuromorphic applications	3
Miniature touch mode capacitance vacuum gauge with circular diaphragm	3
Field emission: Applying the “magic emitter” validity test to a recent paper, and related research-literature integrity issues	3
Bridging the gap: Perspectives of nanofabrication technologies for application-oriented research	3
Optoelectronic performance characterization of MoS2 photodetectors for low frequency sensing applications	3
Analysis of diffraction-based wafer alignment rejection for thick aluminum process	3
Hardmask engineering by mask encapsulation for enabling next generation reactive ion etch scaling	3
High sensitivity CIP2A detection for oral cancer using a rapid transistor-based biosensor module	3
Modeling basic tip forms and its effective field emission parameters	3
Stochastic defect removal coating for high-performance extreme ultraviolet lithography	3
High current field emission from Si nanowires on pillar structures	3
Implementation of high-performance and high-yield nanoscale hafnium zirconium oxide based ferroelectric tunnel junction devices on 300 mm wafer platform	3
Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas	3
Chemical mechanical planarization for Ta-based superconducting quantum devices	3
Microsphere photolithography using reusable microsphere array mask for low-cost infrared metasurface fabrication	3
Plasma kinetics of c-C4F8 inductively coupled plasma revisited	3
Theoretical research on suppression ratio of dynamic gas lock for extreme ultraviolet lithography contamination control	3
Supercapacitor characteristics of MoS2 and MoOx coated onto honeycomb-shaped carbon nanotubes	3
Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation	3
Rubidium focused ion beam induced platinum deposition	3