Journal of Vacuum Science & Technology B

Article	Citations
Heating samples to 2000 °C and above for scanning tunneling microscopy studies in ultrahigh vacuum	26
Scanning electron microscope imaging by selective e-beaming using photoelectron beams from semiconductor photocathodes	26
Comparing the properties and growth of graphene on electrolytic and rolled Cu foils by chemical vapor deposition	26
Current–voltage characteristics of Ag/Nb:SrTiO3/Ag and Au/Nb:SrTiO3/Ag heterostructures	21
Numerical analysis of high vacuum packaging efficiency for narrow structured devices	19
Influence of thermal contact resistance on the field emission characteristics of a carbon nanotube	17
In-plasma photo-assisted etching of Si with chlorine aided by an external vacuum ultraviolet source	17
Photoassisted electron emission from planar-type electron source based on graphene/oxide/silicon structure	17
High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining	16
Characterization of GeO2 films formed on Ge substrate using high pressure oxidation	15
Numerical simulations of heterojunction GaN nanopillar light emitting diodes	14
In situ electron-beam-induced mechanical loading and fracture of suspended strained silicon nanowires	13
Thickness dependent field emission study of LaB6 coated Si nanowire arrays	13
Stacked hydrogel-based brain-on-chips utilizing capillary force flow pinning	11
Top electrode dependence of the write-once-read-many-times resistance switching in BiFeO3 films	11
Tungsten oxide nanowires prepared by thermal oxidation for application in cold cathode flat panel x-ray source	11
Exploring oxide-nitride-oxide scalloping behavior with small gap structure and chemical analysis after fluorocarbon or hydrofluorocarbon plasma processing	11
Piezoelectric effect of crystal nanodomains on the friction force	10
Wet and dry etching of ultrawide bandgap LiGa5O8 and LiGaO2	9
Fluorescent flow analysis of in situ material exchange in two-photon 3D printing	9
Novel excitation structure to improve the performance of a miniature radio frequency ion thruster	9
Investigation on the heat transfer characteristics of flexible vacuum glass based on cross-laminated microcavities	9
Compositional dependence of direct transition energies in SixGe1−x−ySny alloys lattice-matched to Ge/GaAs	9
Evaluation of dry stored disposable sensor strip on rapid SARS-CoV-2 detection platform	9
Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies	9

Investigation into the effect of a PECVD-deposited SiOx chamber coating on the selective, radical-based NF3 etching of TaN with respect to BEOL low-k	9
Overlay control solution for high aspect ratio etch process induced overlay error	9
Heat transfer mechanism of electrostatic chuck surface and wafer backside to improve wafer temperature uniformity	9
Effect of ultraviolet light on field emission performance and lifetime of lateral field emitter devices	9
Electron emission properties of titanium nitride coated volcano-structured silicon emitters	8
Understanding 3D anisotropic reactive ion etching of oxide-metal stacks	8
Digital biosensor for human cerebrospinal fluid detection with single-use sensing strips	8
Resistive switching of two-dimensional Ag2S nanowire networks for neuromorphic applications	8
Effect of inductively coupled plasma etch on the interface barrier behavior of (001) β-Ga2O3 Schottky barrier diode	8
Electroforming and threshold switching characteristics of NbOx films with crystalline NbO2 phase	8
Absolute measurement of vacuum ultraviolet photon flux in an inductively coupled plasma using a Au thin film	8
All field emission models are wrong, … but are any of them useful?	8
Fabrication of silicon W and G center embedded light-emitting diodes for electroluminescence	8
Effects of thickness on the wettability and electrical properties of Sn thin films	8
Fabrication of sub-micrometer 3D structures for terahertz oscillators by electron beam gray-tone lithography	8
Selective growth of graphene films on gallium-focused ion beam irradiated domains	7
Electrical characteristics of tungsten-doped InZnSnO thin film transistors by RF magnetron sputtering	7
Investigation of polymer template removal techniques in three-dimensional thin-shell nanolattices	7
Nanofabricating neural networks: Strategies, advances, and challenges	7
Novel wet transfer technology of manufacturing flexible suspended two-dimensional material devices	7
Outgassing rate testbed for in-operation analysis of powered and heated assemblies	7
Silicon etching by chlorine plasma: Validation of surface reactions mechanism	7
Microsphere photolithography using reusable microsphere array mask for low-cost infrared metasurface fabrication	7
Micromirror fabrication for co-packaged optics using 3D nanoimprint technology	7
Effects of athermal carrier injection on Co-60 gamma-ray damage in SiC merged-PiN Schottky diodes	7
Effect of water vapor pressure on positive and negative tone electron-beam patterning of poly(methyl methacrylate)	7
Practical guide for in-house solid-state nanopore fabrication and characterization	7
Numerical analysis of Gaussian potential patches model depending on the substrate doping in inhomogeneous Schottky barrier diodes over a wide temperature range	7
In-depth feasibility study of extreme ultraviolet damascene extension: Patterning, dielectric etch, and metallization	7
Deep cryogenic silicon etching for 3D integrated capacitors: A numerical perspective	7
Lithographically patterned stretchable metallic microwiring on electrospun nanofiber mats	6
Influence of O content on exothermic and self-propagating characteristics of Ti/SiOx multilayer films	6
Scanning anode field emission microscopy of a single Si emitter	6
Chaos-enhanced self-adaptive particle swarm optimization with simulated annealing for digital lithography mask optimization	6
Interfacial reactivity in the Co/CuO samples as investigated by x-ray photoelectron spectroscopy	6
Modeling the initial monolayer formation in thermally localized surface deposition	6
Identifying extreme ultraviolet lithography attenuated phase shifting mask absorber materials using effective media approximation modeling	6
Suppressing oxygen vacancy formation in ZrO2 to improve electrical properties by employing MoO2 bottom electrode	6
Effect of atomic-scale microstructures on TiZrV non-evaporable getter film activation	6
Role of electron and ion irradiation in a reliable lift-off process with electron beam evaporation and a bilayer PMMA resist system	6
Methods for automatically obtaining the sputtering-induced roughness upon depth profiling of polycrystalline films	6
Characteristics of a hybrid radio frequency capacitively and inductively coupled plasma using hydrogen gas	6
Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks	6
Realizing GaN-based blue laser diode with 7.5 W output power via electron blocking layer thickness adjustment	6
Maximizing the performance of a field emission device by profiling the emitter’s height distribution	6
Computational study of mechanical stresses in a cell interacting with micromechanical cues and microfabrication of such cues in Nervous system-on-Chips	6
Through-chip porous layer fabrication by plasma etching with protective film deposition	6
Enhancement of electrical properties of a-IGZO thin film transistor by low temperature (150 °C) microwave annealing for flexible electronics	6
Diffusion of zirconium on the surface of Schottky electron sources	6
Tailoring of structual, optical, and electrical properties of Cu films by sputtering power and deposition atmosphere	5

Evaluation of electron currents from cesium-coated tungsten emitter arrays with inclusion of space charge effects, workfunction changes, and screening	5
Dysprosium liquid metal alloy ion source for magnetic nanostructures	5
Plasma confinement by an optoelectronic system	5
Investigation of tilted etching of Si3N4 using CF4/O2 plasma: Process development and mechanism study	5
All field emission experiments are noisy, … are any meaningful?	5
Effect of quality improvement in active region on temperature characteristics of GaN-based ultraviolet laser diode	5
TiN and TaN cointegration for 300 mm superconducting back end of line	5
Experimental investigation of the feasibility of in situ plasma cleaning in normal-conducting copper cavities	5
Si nanocone structure fabricated by a relatively high-pressure hydrogen plasma in the range of 3.3–27 kPa	5
Distribution of trace impurities in microvolumes and analysis of concentration using laser sputtered neutral mass spectrometry	5
Combined ultraviolet- and electron-beam lithography with Micro-Resist-Technology GmbH ma-N1400 resist	5
Vertical silicon nanowedge formation by repetitive dry and wet anisotropic etching combined with 3D self-aligned sidewall nanopatterning	5
Electrochemical imaging correlated to hydrogen evolution reaction on transition metal dichalcogenide, WS2	5
Study of simulations of double graded InGaN solar cell structures	5
Effects of high-temperature annealing on vacancy complexes and luminescence properties in multilayer periodic structures with elastically strained GeSiSn layers	5
Multiple criteria optimization of electrostatic electron lenses using multiobjective genetic algorithms	5
Spatial variation of the elemental components of thin films from BiSrCaCuO target deposited using low energy femtosecond pulsed laser deposition in high background gas pressure	5
Nondestructive x-ray reflectivity analysis of Al distributions of ultraviolet-cured spin-coated resist films hybridized with trimethylaluminum	5
Electron beam deposition of cobalt on the silicon substrate: Experiment and simulation	5
Predicting the effects of plasma-induced damage on p–n junction leakage and its application in the characterization of defect distribution	5
Measuring and understanding the nanomechanical properties of halide perovskites and their correlation to structure—A perspective	5
Fabrication of plasmonic Au nanostructures on dielectric supports using 10 keV electron beam lithography and tests for SERS biodetection	5
Enhancement in neuromorphic NbO2 threshold switching at cryogenic temperatures	5
Improved impedance matching speed with gradient descent for advanced RF plasma system	5
Effect of low-pressure postannealing on the electrical properties of VO2 thin films	5
Design of plasma strip chamber for uniform gas supply with fluid flow simulation	5
Spectro-ellipsometric probing of wetting, nucleation, and dot/island formation during photo-excited chemical vapor deposition of Ge on SiO2 substrate	5
Yellow luminescence band defect related photocurrent instability of GaN p-i-n ultraviolet photodetectors	4
Investigation of Rb+ milling rates using an ultracold focused ion beam	4
Comparative study of thermal desorption and pumping performance for TiZrV-, Pd-, or Pd/TiZrV-coated copper tubes	4
Bilayer metal etch mask strategy for deep diamond etching	4
Fabrication of ultrahigh aspect ratio Si nanopillar and nanocone arrays	4
Electrochemical bulk and film-type oxygen sensors: Strategies for detecting extremely low concentration in hydrogen environments	4
Surface wetting on micromilled and laser-etched aluminum with ion-beam postprocessing	4
Novel inspection technology for detecting via open using parallel e-beam scanning and graphic design system	4
Effects of gases on the field emission performance of silicon gated field emitter array	4
Transition from the regime of thermionic emission to the space-charge limited current regime under strong Shottky effects	4
Morphology of Ge thin films crystallized by Au-induced layer exchange at low temperature (220 °C)	4
Optical and electronic spin properties of fluorescent micro- and nanodiamonds upon prolonged ultrahigh-temperature annealing	4
Roughness-generation mechanism of Ru etching using Cl2/O2-based plasma for advanced interconnect	4
Improvement of electrical characteristics of flexible AZO/Ag/Cu/AZO transparent conductive films by Cu deposition	4
Selective wet etching of atomic layer deposited ferroelectric hafnium zirconium oxide and hafnium oxide thin films	4
AC thin-film electroluminescence: A historical overview with a look ahead	4
Experimental current-voltage-temperature and thermal sensitivity behaviors of an ideal Schottky barrier diode over a wide temperature range	4
Characterization of pulsed laser deposited La2O2S:Eu3+ thin films and effect of coating with graphene oxide layers	4
MeV proton and neutron damage effects on deep-ultraviolet light-emitting diodes	4
4H-SiC layer with multiple trenches in lateral double-diffused metal-oxide-semiconductor transistors for high temperature and high voltage applications	4
Grain growth of Cu wires during Joule heat welding	4
Improved optical and electrical response by glancing angle synthesized Al2O3 nanorod array device	4
Selective plasma etching of silicon-containing high chi block copolymer for directed self-assembly (DSA) application	4
High-precision thermal characterization technique with dual-laser Raman thermometry	4
Using block-copolymer nanolithography as a tool to sensitively evaluate variation in chemical dry etching rates of semiconductor materials with sub-5 nm resolution	4
Novel surface wave technique for moderate-pressure plasma measurements	4
Evolution of lithography-to-etch bias in multi-patterning processes	4
Effect of substrate rotation speed on AlGaN nanowire deep ultraviolet light-emitting diodes by molecular beam epitaxy	4
Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness	4
Study on the etching mechanism of quartz using dual-frequency (60 MHz/400 KHz) capacitively coupled C4F8/Ar/O2 plasma	4
Retraction: “Fabry–Perot-cavity-based refractometry without influence of mirror penetration depth” [J. Vac. Sci. Technol. B 39, 065001 (2021)]	4
Thermal evaporation of thin Li films	4
New approach of local critical dimension uniformity improvement for via/contact hole etch with direct current superposition	4
Research on the improvement of the adhesion strength of the Cu films deposited on the Al2O3 films	4
Selectively patterned Mg-doped GaN by SiNx-driven hydrogen injection	4
Experimental study of flake graphite large-area explosion electron emission cathode performance based on particle size discrepancy	4
Physics based model of an AlGaN/GaN vacuum field effect transistor	4
Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications	4
Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy	4
Membrane-electrode junction properties for optimum potentiometric hydrogen sensor response	4
Integrated silicon electron source for high vacuum microelectromechanical system devices	4
Metal-pattern preparation based on selective deposition using soft organofluorine surfaces	4
Effect of the kinetic energy on particle ejection process from carbon nanotubes bombarded by kilo-electron-volt C60	4
Structural, surface, and upconversion luminescence properties of pulsed laser-deposited Y2O3:Ho3+,Yb3+ thin films	4
Thank you to our 2024 reviewers!	4
Novel approach for KrF chemically amplified resist optimization assisted by deep learning	4
Electrical conductivity across the alumina support layer following carbon nanotube growth	3
Solar-thermal cold-wall chemical vapor deposition reactor design and characterization for graphene synthesis	3
Dynamic switching operation of diamond MOSFETs with NO2 p-type doping and Al2O3 gate insulation and passivation	3
Thermochemical prediction of runaway energetic reactions involving organometallic (Al, In) and silane precursors in deposition tools	3
Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography	3
Cluster-induced desorption/ionization mass spectrometry of Ir(ppy)3	3
Influence of structure and composition of diamond-like nanocomposite coatings on cell viability	3

Is the linear relationship between the slope and intercept observed in field emission S-K plots an artifact?	3
Role of tin clustering in band structure and thermodynamic stability of GeSn by atomistic modeling	3
Epitaxial SiGeSn grown on Si by ion implantation	3
High current silicon nanowire field emitter arrays	3
Growth of CdS heterojunctions on Cd0.9Zn0.1Te single crystals with H2S	3
Molecular beam epitaxy growth and characterization of GePb alloys	3
Electronic and optical properties of lithium-doped boron nitride nanoribbons using density functional theory	3
Ferroelectricity in amorphous aluminum oxynitride films synthesized by inductively coupled plasma assisted atomic layer deposition	3
On the brightness, transverse emittance, and transverse coherence of field emission beam	3
Influence of electron beam irradiation on nanoscale adhesion during colloidal probe experiments inside the scanning electron microscope	3
Maintaining atomically smooth GaAs surfaces after high-temperature processing for precise interdiffusion analysis and materials engineering	3
Optimization of silicon etch rate in a CF4/Ar/O2 inductively coupled plasma	3
Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices	3
Atmospheric pressure plasma treatment of chitosan-acrylic acid blends	3
Plasmon resonance-based study of the peroxidaselike catalytic effect of gold nanoparticles	3
Identification of dust particles on a periodic nanostructured substrate using scanning electron microscope imaging	3
Direct writing immersion laser lithography on graphene monolayers using two-photon absorption	3
Structure optimization of Spindt-type emitter fabricated by triode high power pulsed magnetron sputtering	3
Zernike model for overlay control and tool monitor for lithography and etch process	3
Hybrid cross correlation and line-scan alignment strategy for CMOS chips electron-beam lithography processing	3
Magneto-transport study on Sn-rich Sn1−xGex thin films enabled by CdTe buffer layer	3
Magnetron co-sputtered μm-thick Mo–Cu films as structural material with low heat extension for key parts of high-power millimeter-band vacuum microelectronic devices	3
Experimental considerations in electron beam transport on a nanophotonic chip using alternating phase focusing	3
3D structure of box-and-grid electron multiplier with higher electron collection efficiency	3
Phase-shifted counterpropagating atmospheric pressure plasma jets: Characterization and interaction with materials	3
Desorption model of volatile Ru species induced by partial chlorination on Ru(0001) under an O2/Cl2-based plasma process	3
Transitions between field emission and vacuum breakdown in nanoscale gaps	3
Molecular dynamics study of silicon atomic layer etching by chlorine gas and argon ions	3
Nanoimprint lithography guiding templates for advanced magnetic media fabrication	3
Role of the oxidation conditions on the orientation of TiNxOy grown by atomic layer deposition: Impact on the optical and electrical properties	3
Mitigation of electronic crosstalk interference in graphene transistor biosensors	3
Effect of sputter power on red-shifted optoelectronic properties in magnetron sputtered Ag/ZnO thin films	3
High sensitivity CIP2A detection for oral cancer using a rapid transistor-based biosensor module	3
Effects of ion implantation with arsenic and boron in germanium-tin layers	3
Extreme contact shrink for back end of line connectivity	3
Self-alignment of whole wafers using patterning for capillary forces	3
Shape tuning of large area silicon nanotip arrays through reactive ion etching	3
Negative differential resistance in photoassisted field emission from Si nanowires	3
Controlling the etch selectivity of silicon using low-RF power HBr reactive ion etching	3
In situ mass spectrometric investigation to probe GeSn growth dynamics and mechanisms in the chemical vapor deposition processes	3
Future of plasma etching for microelectronics: Challenges and opportunities	3
Thermal sensitivity and current-voltage-temperature characteristics in Pt/epitaxy n-Si/n+Si structures as a function of Schottky contact area	3
Review of synthesis and sensing applications of anisotropic silver and gold nanostructures	3
Effects of iCVD organic passivation in oxide thin-film transistors under repetitive bending stress for electrical and mechanical stability	3
Upgrading of the modified Knudsen equation and its verification for calculating the gas flow rate through cylindrical tubes	3
Cost-effective fabrication of RF AlGaN/GaN HEMTs on surface activated bonding-bonded SiC-SiC substrate	3
Temperature dependence of barrier height inhomogeneity in β-Ga2O3 Schottky barrier diodes	3
Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint	3
Effect of thermodynamic parameters on properties of silicon-carbon films prepared by radio-frequency plasma-enhanced chemical vapor deposition for anti-reflective and photo-luminescent coatings	3
Fabrication and characteristics of double-gate zinc oxide nanowire field emitter arrays	3
Thermal sensing capability and current–voltage–temperature characteristics in Pt/n-GaP/Al/Ti Schottky diodes	3