Journal of Vacuum Science & Technology B

Article	Citations
Evidence of improved power conversion efficiency in lead-free CsGeI3 based perovskite solar cell heterostructure via scaps simulation	78
Polyphosphazene polymers: The next generation of biomaterials for regenerative engineering and therapeutic drug delivery	25
Atomic force microscopy for nanoscale mechanical property characterization	22
Development of microfabricated planar slow-wave structures on dielectric substrates for miniaturized millimeter-band traveling-wave tubes	21
Temperature dependence of barrier height inhomogeneity in β-Ga2O3 Schottky barrier diodes	20
Angular dependence of secondary electron yield from microporous gold surfaces	18
Stability of TiO2-coated ZnO photocatalytic thin films for photodegradation of methylene blue	18
Optical realization of the pascal—Characterization of two gas modulated refractometers	16
Temperature effects on gated silicon field emission array performance	16
Procedure for robust assessment of cavity deformation in Fabry–Pérot based refractometers	15
Extending the metal-induced gap state model of Schottky barriers	15
Electron dynamics during the reignition of pulsed capacitively-coupled radio-frequency discharges	15
Comparison of macroscopic and microscopic emission characteristics of large area field emitters based on carbon nanotubes and graphene	15
Determining the field enhancement factors of various field electron emitters with high numerical accuracy	14
Ultraviolet light stimulated water desorption effect on emission performance of gated field emitter array	14
Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks	13
Incorporating photoemission into the theoretical unification of electron emission and space-charge limited current	13
Sol-gel synthesized indium tin oxide as a transparent conducting oxide with solution-processed black phosphorus for its integration into solar-cells	13
Characterization of cathode-electrolyte interface in all-solid-state batteries using TOF-SIMS, XPS, and UPS/LEIPS	13
Inkjet-printed MoS2-based field-effect transistors with graphene and hexagonal boron nitride inks	13
Fast SARS-CoV-2 virus detection using disposable cartridge strips and a semiconductor-based biosensor platform	12
Thermal degradation behavior of self-assembled monolayer surfactant on silicon substrate	12
Dry etching strategy of spin-transfer-torque magnetic random access memory: A review	11
Synthesis of TiN/N-doped TiO2 composite films as visible light active photocatalyst	11
Optical emission intensity overshoot and electron heating mechanisms during the re-ignition of pulsed capacitively coupled Ar plasmas	10

Molecular dynamics study of silicon atomic layer etching by chlorine gas and argon ions	10
Effect of oxygen vacancy gradient on ion-irradiated Ca-doped YMnO3 thin films	10
Hybrid approach to modeling large area field emitters	9
All field emission models are wrong, … but are any of them useful?	9
Molecular dynamics simulation for reactive ion etching of Si and SiO2 by SF5+ ions	9
Temperature dependence of the optical phonon reflection band in GaP	9
Neuromorphic computing: From devices to integrated circuits	9
Intrinsic excitation-dependent room-temperature internal quantum efficiency of AlGaN nanowires with varying Al contents	8
Oxygen-free transport of samples in silane-doped inert gas atmospheres for surface analysis	8
Self-powered ultraviolet photodiode based on lateral polarity structure GaN films	8
Outgassing rate comparison of seven geometrically similar vacuum chambers of different materials and heat treatments	8
One-dimensional simulation of Couette–Poiseuille flow with variable cross section for the full range of gas rarefaction	8
Novel physics-based tool-prototype for electromigration assessment in commercial-grade power delivery networks	8
Atomic spectroscopy and laser frequency stabilization with scalable micrometer and sub-micrometer vapor cells	8
Stabilization of cold-field-emission current from a CeB6 single-crystal emitter by using a faceted (100) plane	8
Effective polymerization technique for plasma-treated multiwalled carbon nanotubes to maximize wear resistance of composite polyurethane	7
Optimization of a continuous hot embossing process for fabrication of micropyramid structures in thermoplastic sheets	7
Quantum and transport lifetimes in optically induced GaN/AlGaN 2DEGs grown on bulk GaN	7
Study of a linear surface wave plasma source for tin removal in an extreme ultraviolet source	7
Aluminum metallization of III–V semiconductors for the study of proximity superconductivity	7
PHIDL: Python-based layout and geometry creation for nanolithography	7
nanolithography toolbox—Simplifying the design complexity of microfluidic chips	7
Controlled removal of hydrogen atoms from H-terminated silicon surfaces	7
Information extraction from Murphy–Good plots of tungsten field electron emitters	7
Virtual metrology modeling of reactive ion etching based on statistics-based and dynamics-inspired spectral features	7
Computational study of plasma dynamics and reactive chemistry in a low-pressure inductively coupled CF4/O2 plasma	7
Firing voltage reduction in thermally annealed Ge–As–Te thin film with ovonic threshold switching	7
Deterministic and stochastic modeling of rarefied gas flows in fusion particle exhaust systems	7
Effect of low frequency voltage waveform on plasma uniformity in a dual-frequency capacitively coupled plasma	7
Silicon field emitters fabricated by dicing-saw and wet-chemical-etching	7
Long term field emission current stability characterization of planar field emitter devices	7
Boron liquid metal alloy ion sources for special focused ion beam applications	7
Advances in secondary ion mass spectrometry for N-doped niobium	7
Patterning challenges for direct metal etch of ruthenium and molybdenum at 32 nm metal pitch and below	7
Characterization of nanoscale vertical-channel charge-trap memory thin film transistors using oxide semiconducting active and trap layers	6
Thermal sensing capability and current–voltage–temperature characteristics in Pt/n-GaP/Al/Ti Schottky diodes	6
Carbonization of 3D printed polymer structures for CMOS-compatible electrochemical sensors	6
Hollow cathode enhanced capacitively coupled plasmas in Ar/N2/H2 mixtures and implications for plasma enhanced ALD	6
Si-capping-induced surface roughening on the strip structures of Ge selectively grown on an Si substrate	6
Planar figure-8 coils for ultra-focal and directional micromagnetic brain stimulation	6
Subradiant resonances in Au and Ag bipartite lattices in the visible spectrum	6
Fusion data analysis of imaging data of hydrogen-permeated steel obtained by complementary methods	6
Improving detection of plasma etching end point using light compensation on optical emission spectra	6
Strain engineering in III-V photonic components through structuration of SiNx films	6
Postdeposition annealing effect on the reliability of atomic-layer-deposited Al2O3 films on GaN	6
100 keV vacuum sealed field emission gun for high resolution electron microscopy	6
Electroforming and threshold switching characteristics of NbOx films with crystalline NbO2 phase	6
In-plasma photo-assisted etching of Si with chlorine aided by an external vacuum ultraviolet source	6
Design of a large nonevaporable getter pump for the full size ITER beam source prototype	5
Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint	5

Electrical characterization of Si-doped conductive AlInN films grown nearly lattice-matched to c-plane GaN on sapphire by metalorganic chemical vapor deposition	5
Gate offset and emitter design effects of triode cold cathode electron beams on focal spot sizes for x-ray imaging techniques	5
Thermal sensitivity and current-voltage-temperature characteristics in Pt/epitaxy n-Si/n+Si structures as a function of Schottky contact area	5
Preparation of clean MgO surface by oxygen plasma: Comparison with standard substrate cleaning procedures	5
Comparative study on the molecular beam epitaxial growth and characterization of AlGaN nanowire structures on AlN buffer layer and on Si	5
Time-resolved ion energy distribution in pulsed inductively coupled argon plasma with/without DC bias	5
Demonstration of a silicon gated field emitter array based low frequency Colpitts oscillator at 400 °C	5
Dependence of growth temperature on the electrical properties and microstructure of MBE-grown AlN/GaN resonant tunneling diodes on sapphire	5
Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga2O3 with neutron irradiation and forming gas anneals	5
Atomic-resolution lithography with an on-chip scanning tunneling microscope	5
Electromigrated nanogaps: A review on the fabrications and applications	5
Pyroelectric lithium niobate electron emission-based ion-pump	5
Transitions between field emission and vacuum breakdown in nanoscale gaps	5
On the chemistry mechanism for low-pressure chlorine process plasmas	5
Advanced modeling of field enhanced thermionic emission	5
Au-free low-temperature ohmic contacts for AlGaN/AlN/GaN heterostructures	5
High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining	5
Electromigration simulation and design considerations for integrated circuit power grids	5
Integrated in situ self-aligned double patterning process with fluorocarbon as spacer layer	4
Experimental considerations in electron beam transport on a nanophotonic chip using alternating phase focusing	4
Field emission arrays from graphite fabricated by laser micromachining	4
Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy	4
Improved quantitation of SIMS depth profile measurements of niobium via sample holder design improvements and characterization of grain orientation effects	4
Stress reduction and wafer bow accommodation for the fabrication of thin film lithium niobate on oxidized silicon	4
Reaching homogeneous field emission current from clusters of emitters with nonuniform heights	4
Systematic study of the outgassing behavior of different ceramic materials	4
Characterization and optimization of bonding and interconnect technology for 3D stacking thin dies	4
Design and fabrication of a micro-opto-mechanical-systems accelerometer based on intensity modulation of light fabricated by a modified deep-reactive-ion-etching process using silicon-on-insulator waf	4
Cr and CrOx etching using SF6 and O2 plasma	4
Effects of arsenic implantation and rapid thermal annealing on ZnO nanorods for p-type doping	4
Au-free recessed Ohmic contacts to AlGaN/GaN high electron mobility transistor: Study of etch chemistry and metal scheme	4
Rapid SARS-CoV-2 diagnosis using disposable strips and a metal-oxide-semiconductor field-effect transistor platform	4
Thickness dependence of infrared lattice absorption and excitonic absorption in ZnO layers on Si and SiO2 grown by atomic layer deposition	4
Adsorption behavior of cobalt phthalocyanine submonolayer coverages on B-Si(111)-3×3R30°	4
Maintaining atomically smooth GaAs surfaces after high-temperature processing for precise interdiffusion analysis and materials engineering	4
Fabrication of high aspect ratio and tilted nanostructures using extreme ultraviolet and soft x-ray interference lithography	4
Combined ultraviolet- and electron-beam lithography with Micro-Resist-Technology GmbH ma-N1400 resist	4
Selective volatile organic compound gas sensor based on carbon nanotubes functionalized with ZnO nanoparticles	4
Organotrialkoxysilane-mediated controlled synthesis of noble metal nanoparticles and their impact on selective fluorescence enhancement and quenching	4
Superhydrophobic SnO2 nanowire/graphene heterostructure-based ultraviolet detectors	4
Plasma atomic layer etching for titanium nitride at low temperatures	4
Low-temperature AlN film deposition using magnetic mirror-type magnetron cathode for low gas pressure operation	4
AlGaN nanowire deep ultraviolet LEDs with polarization enhanced tunnel junction and p-AlGaN layer by molecular beam epitaxy	4
Strain-dependent luminescence and piezoelectricity in monolayer transition metal dichalcogenides	4
Low trap density of oxygen-rich HfO2/GaN interface for GaN MIS-HEMT applications	4
Device feasibility and performance improvement methodologies for thin film transistors using In-Ga-Sn-O channels prepared by atomic-layer deposition	4
Long-term brain-on-chip: Multielectrode array recordings in 3D neural cell cultures	4
Multiple electron beam generation from InGaN photocathode	4
Ionization probability of sputtered indium atoms under impact of slow highly charged ions	4
Photoassisted chemical smoothing of AlGaN surface after laser lift-off	4
Rare earth doped CaWO4 and CaMoO4 thin films for white light emission	4
Lithium source for focused ion beam implantation and analysis	4
Deposition and morphology of direct current plasma-polymerized aniline	4
Close-packed silicon field emitter arrays with integrated anode fabricated by electron-beam lithography	4
Design of a remote plasma-enhanced chemical vapor deposition system for growth of tin containing group-IV alloys	4
Scanning anode field emission microscopy of a single Si emitter	4
Interferometric in-situ III/V semiconductor dry-etch depth-control with ±0.8 nm best accuracy using a quadruple-Vernier-scale measurement	4
Magnetron co-sputtered μm-thick Mo–Cu films as structural material with low heat extension for key parts of high-power millimeter-band vacuum microelectronic devices	4
Selective plasma etching of silicon-containing high chi block copolymer for directed self-assembly (DSA) application	4
Simple O-ring sealed Brewster-angle window for ultrahigh vacuum applications	4
Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation	3
Role of substrate temperature and tellurium flux on the electrical and optical properties of MBE grown GeTe and Sb2Te3 thin films on GaAs (100)	3
On the brightness, transverse emittance, and transverse coherence of field emission beam	3
Plasma kinetics of c-C4F8 inductively coupled plasma revisited	3
Effect of room air exposure on the field emission performance of UV light irradiated Si-gated field emitter arrays	3
Interpreting the field emission equation for large area field emitters	3
Calibration of matrix-dependent biases in isotope and trace element analyses of carbonate minerals	3
Gate engineering in metal insulator semiconductor capacitors on native gallium nitride substrates for applications with high lifetime requirements	3
Theoretical model for fast calculations of the electrical resistivity of thin metallic films with rough surfaces	3
Designing MoS2 channel properties for analog memory in neuromorphic applications	3
Evaluation of electron currents from cesium-coated tungsten emitter arrays with inclusion of space charge effects, workfunction changes, and screening	3
Improvement of ionization yield in sputtered neutral mass spectrometry using pulsed infrared and ultraviolet lasers	3
Plasma processing and annealing for defect management at SiO2/Si interface	3
Investigation of the deposition of α-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit	3
Fabrication of three-dimensional opal nanolattices using template-directed colloidal assembly	3
Band offsets at amorphous hydrogenated boron nitride/high-k oxide interfaces from x-ray photoelectron spectroscopy with charging effects analysis	3
Multiple connected artificial synapses based on electromigrated Au nanogaps	3
Energy distributions of secondary ions for the Ar ion beam sputtering of indium tin oxide	3
Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy	3
Dielectric breakdown in epitaxial BaTiO3 thin films	3

Direct molecular quantification of electronic disorder in N,N′-Di-[(1-naphthyl)-N,N′-diphenyl]-1,1′-biphenyl)-4,4′-diamine on Au(111)	3
Particle-in-cell simulation of an industrial magnetron with electron population analysis	3
Digital biosensor for human cerebrospinal fluid detection with single-use sensing strips	3
Tensile-strained self-assembly of InGaAs on InAs(111)A	3
Resistive switching of two-dimensional Ag2S nanowire networks for neuromorphic applications	3
On modeling the induced charge in density-functional calculations for field emitters	3
Investigation of the electrical behavior of AlGaN/GaN high electron mobility transistors grown with underlying GaN:Mg layer	3
All field emission experiments are noisy, … are any meaningful?	3
Role of electron and ion irradiation in a reliable lift-off process with electron beam evaporation and a bilayer PMMA resist system	3
Fabrication of topological insulator nanostructures	3
Reliability and resistance projections for rhodium and iridium interconnects from first-principles	3
Stochastic defect removal coating for high-performance extreme ultraviolet lithography	3
Proposal that interpretation of field emission current–voltage characteristics should be treated as a specialized form of electrical engineering	3
Modeling the effect of stochastic heating and surface chemistry in a pure CF4 inductively coupled plasma	3
Overlay control solution for high aspect ratio etch process induced overlay error	3
Growth mode and characterizations of electrodeposited Re thick films from aqueous solutions with additives on Cu (110) + (311) substrates	3
Modeling basic tip forms and its effective field emission parameters	3
High current silicon nanowire field emitter arrays	3
High signal-to-noise ratio differential conductance spectroscopy	3
Improve photo-to-dark current ratio of p-Si/SiO2/n-Ga2O3 heterojunction solar-blind photodetector by inserting SiO2 barrier layer	3
Scaling in large area field emitters and the emission dimension	3
Mechanically reliable hybrid organosilicate glasses for advanced interconnects	3
ZnO piezoelectric coatings used for the ultrasonic excitation of longitudinal-transverse waves and their application for smart bolts	3
Absorption, discharge, and internal partitioning behavior of hydrogen in the tantalum and tantalum oxide system investigated by in situ oxidation SIMS and ab initio calculations	3
Field emission scanning probe lithography with GaN nanowires on active cantilevers	3
Bridging the gap: Perspectives of nanofabrication technologies for application-oriented research	3
Real-time monitoring of photocatalytic methanol decomposition over Cu2O-loaded TiO2 nanotube arrays in high vacuum	3
Synthesis and detailed characterizations of Ag nanoparticles coated In2O3 nanostructured devices: An analytical and experimental approach	3
Novel technique to control the focal spot size using carbon nanotube based cold cathode electron beam (C-beam) architecture	3
Folated curcumin-gold nanoformulations: A nanotherapeutic strategy for breast cancer therapy	3
Gamma radiation on gallium nitride high electron mobility transistors at ON, OFF, and prestressed conditions	3
Advanced methodology for assessing chip package interaction effects on chip performance and reliability after chip assembly and during chip operation	3
Ultrafast method for scanning tunneling spectroscopy	3
Comparison of the effective parameters of single-tip tungsten emitter using Fowler–Nordheim and Murphy–Good plots	3
Processing of experimental current-voltage characteristics of single tip emitters taking into account the functional dependence of the emission area on the applied voltage	3
Solar-thermal cold-wall chemical vapor deposition reactor design and characterization for graphene synthesis	3
Etching of Si3N4 induced by electron beam plasma from hollow cathode plasma in a downstream reactive environment	3
Development of two-color resonant ionization sputtered neutral mass spectrometry and microarea imaging for Sr	3
Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?	3
Fabrication of high quality X-ray source by gated vertically aligned carbon nanotube field emitters	3
Photoinduced carrier transport mechanism in pn- and nn-GaN/GaON heterojunctions	3
Atomic precision imaging with an on-chip scanning tunneling microscope integrated into a commercial ultrahigh vacuum STM system	3
Individual arc-discharge synthesized multiwalled carbon nanotubes probed with multiple measurement techniques	3
Improvement of extra low impact energy SIMS data reduction algorithm for process control	3
Observation of light and secondary ion emissions from surfaces irradiated with highly charged ions	3
Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas	3
Electronic structure of InSb (001), (110), and (111)B surfaces	3
3D-electrode integrated microsieve structure as a rapid and cost-effective single neuron detector	3
Analysis of LiCoO2 electrodes through principal component analysis of current–voltage datacubes measured using atomic force microscopy	3
Miniature touch mode capacitance vacuum gauge with circular diaphragm	3
Direct imprinting of TiO2 patterns on highly curved substrates	3
Synthesis and up-conversion properties of Er3+ doped ZnTiO3-Zn2TiO4 composite phosphor	3
Minimizing filling time for ultraviolet nanoimprint lithography with templates with multiple structures	3
Growth-induced temperature changes during transition metal nitride epitaxy on transparent SiC substrates	3
Influence of primary electron incident angle and electron bombardment on the secondary electron yield of laser-treated copper	3