Journal of Vacuum Science & Technology B

Article	Citations
Physical vapor deposition of Yb-doped Cs2AgSbBr6 films	22
In situ electron-beam-induced mechanical loading and fracture of suspended strained silicon nanowires	18
Fabrication of microstructures on curved hydrogel substrates	17
High-temperature characteristics of GaN/InGaN multiple-quantum-well UV photodetectors fabricated on sapphire substrate: Analysis of photovoltaic and carrier transit time properties	17
Exploring oxide-nitride-oxide scalloping behavior with small gap structure and chemical analysis after fluorocarbon or hydrofluorocarbon plasma processing	16
Topological impact of a simple self-replication geometric structure with great application potential in vacuum pumping and photovoltaic industry	16
Selective metal-carbides hardmask strip with chlorine and oxygen plasma	15
Tungsten oxide nanowires prepared by thermal oxidation for application in cold cathode flat panel x-ray source	15
Determining the oxygen detection limit with magnetic sector dynamic secondary ion mass spectrometry (SIMS)	15
Experimental research on airflow efficiency of dynamic gas lock for extreme ultraviolet lithography	14
Physical vapor deposition simulator by graphical processor unit ray casting	14
Effect of the kinetic energy on particle ejection process from carbon nanotubes bombarded by kilo-electron-volt C60	14
Fabrication of pyramid-shaped gold tip for adiabatic nanofocusing of surface plasmon polaritons	14
A novel design of a retarding field electron energy analyzer with a cavity electrode providing extremely high energy resolution	11
Thickness dependent field emission study of LaB6 coated Si nanowire arrays	10
Low-macroscopic field emission structure: Using the shape of the conductor to identify a local difference in electric potential	9
Observing secondary-electron yield and charging in an insulating material by ultralow-voltage scanning electron microscope	9
Behavior of the field enhancement due to mutual depolarization on a pair of triangular emitters at short and large separations	9
X-ray photoelectron spectroscopy surface oxidation study of remote plasma-enhanced chemical vapor deposition-grown Ge1−xSnx/Si alloys	9
Accuracy requirements of the microarrayed Einzel lens	9
Sensitivity of thermal conductivity vacuum gauges for constant current and constant temperature operation	8
ZnO/Ag/graphene transparent conductive oxide film with ultrathin Ag layer	8
Computational analysis of vertical comb-drive microactuator with extended mirror for manipulation of light	8
Comparison of temperature, current density, and light intensity distributions of nano-resistor patterns for an improved solid state incandescent light emitting device simulation model	8
Formation of ideally ordered porous anodic zirconia by anodization of vacuum deposited Zr on molds	8

Trilayer process for T-gate and Γ-gate lithography using ternary developer and proximity effect correction superposition	8
Simplified CVD route to near-zero thickness silicon nitride films	8
Top electrode dependence of the write-once-read-many-times resistance switching in BiFeO3 films	7
Response to “Comment on ‘Restoration of the original depth distribution from the SIMS profile using the depth resolution function in framework of RMR model’” [J. Vac. Sci. Technol. B 41, 024003 (20	7
Degradation of GaN field emitter arrays induced by O2 exposure	7
Comment on “Restoration of the original depth distribution from the SIMS profile using the depth resolution function in framework of RMR model” [J. Vac. Sci. Technol. B 41, 024003 (2023)]	7
Experimental study of flake graphite large-area explosion electron emission cathode performance based on particle size discrepancy	7
Characterization of GeO2 films formed on Ge substrate using high pressure oxidation	7
Computational study of plasma dynamics and reactive chemistry in a low-pressure inductively coupled CF4/O2 plasma	7
Research on the improvement of the adhesion strength of the Cu films deposited on the Al2O3 films	7
Sodium adsorption on nanometer-thick TiO2 channel thin-film transistors for enhanced drain currents	7
Mechanism and solution of sharp defects in trench double-diffused metal-oxide semiconductor polysilicon recess etching	7
E-mode AlGaN/GaN HEMTs using p-NiO gates	7
Plasma-assisted thermal-cyclic atomic-layer etching of tungsten and control of its selectivity to titanium nitride	7
Highly selective GaAs/AlGaAs dry etching using HBr/SF6/He	7
Fabrication of black GaAs by maskless inductively coupled plasma etching in Cl2/BCl3/O2/Ar chemistry	6
Strong-field electron emission from gold needle tips	6
Heating samples to 2000 °C and above for scanning tunneling microscopy studies in ultrahigh vacuum	6
In situ determination of sputtered Ni–Cu film composition from emission intensities	6
Scanning electron microscope imaging by selective e-beaming using photoelectron beams from semiconductor photocathodes	6
Vacuum technique of nanodiamond dispersing on a substrate from an aqueous suspension	6
Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness	6
Impact of electrical aging on x-ray image quality and dose rate with vertically aligned carbon nanotube based cold cathode electron beam (C-beam)	6
Strain engineering in III-V photonic components through structuration of SiNx films	6
Roughness-generation mechanism of Ru etching using Cl2/O2-based plasma for advanced interconnect	6
Numerical investigation of flow and particles contamination in reticle mini environment for extreme ultraviolet lithography	6
In situ metrology of direct-write laser ablation using optical emission spectroscopy	6
Evolution of lithography-to-etch bias in multi-patterning processes	6
Modification of discharge sequences to control the random dispersion of flake particles during wafer etching	6
Rubbing-induced site-selective deposition of 2D material patterns on nanomembranes	6
Si-capping-induced surface roughening on the strip structures of Ge selectively grown on an Si substrate	6
Optical and electronic properties of Ge1−xSnx/Si alloys grown by remote plasma-enhanced chemical vapor deposition	6
Vacuum system of the Space Plasma Environment Research Facility	6
Chemical and electrical modifications of few-layer graphene films via sub-10 keV electron beam irradiation	6
Fluorescence alignment simulation for atomic-scale position adjustment in ultraviolet nanoimprint lithography	6
Impact of photovoltaic effect on performance enhancement of triboelectric nanogenerator for energy harvesting applications	6
Influence of thermal contact resistance on the field emission characteristics of a carbon nanotube	6
Cryogenic etching of positively tapered silicon pillars with controllable profiles	5
GaAs/GeSn/Ge n–i–p diodes and light emitting diodes formed via grafting	5
Field electron emission and field ion microscope images of layered material MoS2	5
Multiple electron beam generation from InGaN photocathode	5
Strain-tuned optical properties of bilayer silicon at midinfrared wavelengths	5
Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas	5
Investigation of the deposition of α-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit	5
Temperature dependence of the infrared dielectric function and the direct bandgap of InSb from 80 to 725 K	5
Ultralow impact energy dynamic secondary ion mass spectrometry with nonfully oxidizing surface conditions	5
Multi-step plasma etching of high aspect ratio silicon nanostructures for metalens fabrication	5
Ion-beam-assisted growth of cesium-antimonide photocathodes	5
Comparative study of thermal desorption and pumping performance for TiZrV-, Pd-, or Pd/TiZrV-coated copper tubes	5
Numerical analysis of high vacuum packaging efficiency for narrow structured devices	5

Comparison of GeSn alloy films prepared by ion implantation and remote plasma-enhanced chemical vapor deposition methods	5
Electron transport in macroscopic borosilicate capillaries with bending angles of 90° and 360°	5
Seesaw-type modulation of secondary electron emission characteristics of polytetrafluoroethylene-MgO composite coating	5
Numerical simulations of heterojunction GaN nanopillar light emitting diodes	5
High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining	5
Effects of graphene doping and gas adsorption on the peak positions of graphene plasmon resonance and adsorbate infrared absorption	5
Nonevaporable getter-MEMS for generating UHV conditions in small volumina	5
Enhancement of performance and reliability in MOSFETs via high-pressure microwave annealing	4
Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications	4
Optoelectronic performance characterization of MoS2 photodetectors for low frequency sensing applications	4
Integrated silicon electron source for high vacuum microelectromechanical system devices	4
Erratum: “Electronic structure of InSb (001), (110), and (111)B surfaces” [J. Vac. Sci. Technol. B 41, 032808 (2023)]	4
Fundamental study on the selective etching of SiGe and Si in ClF3 gas for nanosheet gate-all-around transistor manufacturing: A first principle study	4
Morphology of Ge thin films crystallized by Au-induced layer exchange at low temperature (220 °C)	4
Fabrication of ultrahigh aspect ratio Si nanopillar and nanocone arrays	4
Enhancing performance of microbolometers by utilizing low-temperature polycrystalline silicon	4
Device feasibility and performance improvement methodologies for thin film transistors using In-Ga-Sn-O channels prepared by atomic-layer deposition	4
Photoassisted electron emission from planar-type electron source based on graphene/oxide/silicon structure	4
Comparing the properties and growth of graphene on electrolytic and rolled Cu foils by chemical vapor deposition	4
Rapid detection of radiation susceptible regions in electronics	4
Graphene-based capacitive monolithic microphone with optimized air gap thickness and damping	4
4H-SiC layer with multiple trenches in lateral double-diffused metal-oxide-semiconductor transistors for high temperature and high voltage applications	4
Rapid SARS-CoV-2 diagnosis using disposable strips and a metal-oxide-semiconductor field-effect transistor platform	4
Wet and dry etching of ultrawide bandgap LiGa5O8 and LiGaO2	4
Optical metasurface fabricated using 3D nanoimprint lithography	4
Measurements of He-Ar, He-N2, and He-air thermal creep slip and accommodation coefficients at high temperatures	4
Field emission arrays from graphite fabricated by laser micromachining	4
Monitoring of rapid thermal anneal with secondary ion mass spectrometry	4
Nanofabrication of high transition temperature superconductive electronics with focused helium ion irradiation	4
Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies	4
Engineering of ZrO2-based RRAM devices for low power in-memory computing	4
Exploring electromechanical utility of GaAs interdigitated transducers; using finite-element-method-based parametric analysis and experimental comparison	4
In-plasma photo-assisted etching of Si with chlorine aided by an external vacuum ultraviolet source	4
Synthesis of silver-decorated titanium dioxide nanostructured films for enhanced visible light photocatalysis	4
Heat-transfer modeling of the gas gap under a wafer	4
Effect of ultraviolet light on field emission performance and lifetime of lateral field emitter devices	4
Electron emission performance analysis and application of carbon nanotube cold cathode prepared by cold pressing process	4
Modeling basic tip forms and its effective field emission parameters	4
Stacked hydrogel-based brain-on-chips utilizing capillary force flow pinning	4
Preface for the Special Topic Collection Honoring Dr. Gary McGuire’s Research and Leadership as Editor of the Journal of Vacuum Science & Technology for Three Decades	4
Current–voltage characteristics of Ag/Nb:SrTiO3/Ag and Au/Nb:SrTiO3/Ag heterostructures	4
Analytic study of exposure contrast over feature edge in electron-beam lithography	4
Temperature dependence of the optical phonon reflection band in GaP	4
Long term field emission current stability characterization of planar field emitter devices	4
Atomic-resolution lithography with an on-chip scanning tunneling microscope	4
MeV proton and neutron damage effects on deep-ultraviolet light-emitting diodes	4
Time response measurement of pulsed electron beam from InGaN photocathode	4
Comparative studies of metamorphic and strained InGaAs p-type semiconductor - intrinsic absorption layer - n-type semiconductor photodetector for low-temperature CH4 detection	4
Self-aligned fabrication of vertical, fin-based structures	3
Fabrication of blazed gratings by tilted reactive ion beam etching with the side mask for augmented reality applications	3
Surface wetting on micromilled and laser-etched aluminum with ion-beam postprocessing	3
Multipurpose active scanning probe cantilevers for near-field spectroscopy, scanning tunnel imaging, and atomic-resolution lithography	3
Review on remote phonon scattering in transistors with metal-oxide-semiconductor structures adopting high-k gate dielectrics	3
Compositional dependence of direct transition energies in SixGe1−x−ySny alloys lattice-matched to Ge/GaAs	3
Gate offset and emitter design effects of triode cold cathode electron beams on focal spot sizes for x-ray imaging techniques	3
Electron emission properties of titanium nitride coated volcano-structured silicon emitters	3
Retraction: “Dependence of structural and optical properties of In0.23Ga0.77As/GaAs quantum wells on misfit dislocations: Different critical thickness for dislocation generation and degradation of opt	3
Selective plasma etching of silicon-containing high chi block copolymer for directed self-assembly (DSA) application	3
Selectively patterned Mg-doped GaN by SiNx-driven hydrogen injection	3
Bilayer metal etch mask strategy for deep diamond etching	3
Organotrialkoxysilane-mediated synthesis of Ni–Pd nanocatalysts at lower concentrations of noble metal: Catalysts for faster hydrogen evolution kinetics	3
Rapid preparation of amorphous Al2O3 on graphene surface by plasma electrolysis technology	3
Tapered quantum cascade lasers with isolated channel emitting at 9 μm	3
Novel excitation structure to improve the performance of a miniature radio frequency ion thruster	3
Spectroscopic, structural, and strain-dependent analysis of suspended bulk WSe2 sheets	3
Calibrated in-vacuum quantum efficiency system for metallic and III-V thin-film photocathodes	3
Effects of H+ ion bombardment on GaAs photocathode surface with Cs-O and Cs-F activation layers	3
In situ mass spectrometric investigation to probe GeSn growth dynamics and mechanisms in the chemical vapor deposition processes	3
Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy	3
Low power silicon evaporation source—Construction, performances, and applications	3
Defect formation in InGaAs/AlSb/InAs memory devices	3
Hafnium oxide films grown on silicon substrates by electron beam-induced deposition	3
Microstructure, creep properties, and electrical resistivity of magnetron sputtering deposited SAC305 thin films	3
Dynamic switching operation of diamond MOSFETs with NO2 p-type doping and Al2O3 gate insulation and passivation	3
Roll-to-roll reactive ion etching of large-area nanostructure arrays in Si: Process development, characterization, and optimization	3
Investigation on the heat transfer characteristics of flexible vacuum glass based on cross-laminated microcavities	3
Leakage rate detection of ConFlat seals in aluminum and stainless steel flanges under mechanical loads for quantum optical experiments in space	3
Fabrication of ultrathin suspended membranes from atomic layer deposition films	3
Electrical characterization of gate stack charge traps in floating body gate-all-around field-effect-transistors	3
Hybrid cross correlation and line-scan alignment strategy for CMOS chips electron-beam lithography processing	3

Diagnostics of target-cavity confined plasmas produced by nanosecond pulsed laser ablation of graphite	3
Heat transfer mechanism of electrostatic chuck surface and wafer backside to improve wafer temperature uniformity	3
On the charge density and potential near the surface of a field emitter	3
In situ plasma pin-up clean process for backside bevel polymer removal, defect reduction, and queue time relaxation	3
Optical metrology of characterizing wetting states	3
Noise reduction and peak detection in x-ray diffraction data by linear and nonlinear methods	3
Radiation damage in GaN/AlGaN and SiC electronic and photonic devices	3
Photoinduced carrier transport mechanism in pn- and nn-GaN/GaON heterojunctions	3
Morphologic and electronic changes induced by thermally supported hydrogen cleaning of GaAs(110) facets	3
Application of deep-learning based techniques for automatic metrology on scanning and transmission electron microscopy images	3
Modeling and algorithm of three-dimensional metrology with critical dimension scanning electron microscope	3
AlGaN nanowire deep ultraviolet LEDs with polarization enhanced tunnel junction and p-AlGaN layer by molecular beam epitaxy	3
Overlay control solution for high aspect ratio etch process induced overlay error	3
Reduction of exposing time in massively-parallel E-beam systems	3
Synthesis of NiS2 nanomaterial as wide range pressure sensor	3
Comparison of single and concentric split-ring resonator generated microplasmas	3
Investigating the pattern transfer fidelity of Norland Optical Adhesive 81 for nanogrooves by microtransfer molding	3
Enhanced optoelectronic properties of magnetron sputtered ITO/Ag/ITO multilayers by electro-annealing	3
Optical properties of Mo and amorphous MoOx, and application to antireflection coatings for metals	3
Thin films residual stress profile evaluation using test microstructures: Illustrated on an example of AlN film	3
Oxygen-free transport of samples in silane-doped inert gas atmospheres for surface analysis	2
Field emission: Applying the “magic emitter” validity test to a recent paper, and related research-literature integrity issues	2
Coaxial ion source: Pressure dependence of gas flow and field ion emission	2
Development of GeSn epitaxial films with strong direct bandgap luminescence in the mid-wave infrared region using a commercial chemical vapor deposition reactor	2
Understanding 3D anisotropic reactive ion etching of oxide-metal stacks	2
Investigating pathways for deep-UV photolithography of large-area nanopost-based metasurfaces with high feature-size contrast	2
Postdeposition annealing effect on atomic-layer-deposited Al2O3 gate insulator on (001) β-Ga2O3	2
Nanometer-scale capillary-driven flow and molecular weight govern polymer nanostructure deposition from a heated tip	2
Effects of gases on the field emission performance of silicon gated field emitter array	2
Thermally stable radio frequency power and noise behaviors of AlGaN/GaN high electron mobility transistor without voltage-blocking buffer layer design	2
Selective growth of graphene films on gallium-focused ion beam irradiated domains	2
Ordered silicon nanocone fabrication by using pseudo-Bosch process and maskless etching	2
Transmission conductance of a cylindrical tube with wall pumping	2
Investigation into the effect of a PECVD-deposited SiOx chamber coating on the selective, radical-based NF3 etching of TaN with respect to BEOL low-k	2
Physics based model of an AlGaN/GaN vacuum field effect transistor	2
Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet	2
Temperature effects on gated silicon field emission array performance	2
Optimization of silicon etch rate in a CF4/Ar/O2 inductively coupled plasma	2
Designing MoS2 channel properties for analog memory in neuromorphic applications	2
Measurement of field emission array current distributions by metal-coated CMOS image sensors	2
Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga2O3 with neutron irradiation and forming gas anneals	2
Proposal that interpretation of field emission current–voltage characteristics should be treated as a specialized form of electrical engineering	2
Improving detection of plasma etching end point using light compensation on optical emission spectra	2
Outgassing rate comparison of seven geometrically similar vacuum chambers of different materials and heat treatments	2
Acquisition of field ion microscope image using deflector during atom probe analysis	2
Grain growth of Cu wires during Joule heat welding	2
Simulation analyses of carrier dynamics in npn-type GaN-heterojunction bipolar transistors with different hole-concentration p-base layers	2
Thermal-field emission from cones and wires	2
Spongy TiO2 layers deposited by gig-lox sputtering processes: Contact angle measurements	2
Model for the current plateau observed on the (310) plane of a room temperature W field electron source	2
High current field emission from Si nanowires on pillar structures	2
Observation of ground loop signals in GaN monolithically integrated devices	2
Thermal sensitivity and current-voltage-temperature characteristics in Pt/epitaxy n-Si/n+Si structures as a function of Schottky contact area	2
Film characteristics of atmospheric pressure plasma-treated chitosan solution	2
Hardmask engineering by mask encapsulation for enabling next generation reactive ion etch scaling	2
Publisher’s Note: “Silicon field emitters fabricated by dicing-saw and wet-chemical-etching” [J. Vac. Sci. Technol. B 39, 013205 (2021)]	2
Large-area fabrication of nanometer-scale features on GaN using e-beam lithography	2
Facile fabrication of nanoporous structure on β titanium alloy to eliminate stress shielding for bone implant	2
Evaluation of dry stored disposable sensor strip on rapid SARS-CoV-2 detection platform	2
Electrochemically fabricated ultrafine nickel masks for the fabrication of MoS2-based devices	2
Diffusive separation in rarefied plume interaction	2
Multiple material stack grayscale patterning using electron-beam lithography and a single plasma etching step	2
Magnetron co-sputtered μm-thick Mo–Cu films as structural material with low heat extension for key parts of high-power millimeter-band vacuum microelectronic devices	2
Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?	2
Piezoelectric effect of crystal nanodomains on the friction force	2
Design, modeling, and fabrication of high frequency Oersted lines for electron spin manipulation in silicon based quantum devices	2
Observation of interfacial strain relaxation and electron beam damage thresholds in Al0.3In0.7N/GaN heterostructures by transmission electron microscopy	2
Near zero-field magnetoresistance and defects in gallium nitride pn junctions	2
Threshold switching stabilization of NbO2 films via nanoscale devices	2
Using block-copolymer nanolithography as a tool to sensitively evaluate variation in chemical dry etching rates of semiconductor materials with sub-5 nm resolution	2
Volatile vapor knife of immersion lithography hood using solutal Marangoni effect	2
Flexible refractive and diffractive micro-optical films shaped by fitting aspherical microprofiles with featured aperture and depth and their spatial arrangement for imaging applications	2
A novel thermionic crystal electron emission effect similar to Kikuchi lines	2
Blue and near infrared luminescence degradation by electron beam irradiation in Y2O3:Tm3+ nanophosphors	2
Rate-controlled cycle etching of GaN by cycle exposure to BCl3 and F2-added Ar plasma at a substrate temperature of 400 °C	2
Thermal analysis with high accuracy of multi-beam mask fabrication	2
Integrated interferometry for in-process monitoring of critical dimension in vertical NAND flash memory dry etch	2
Effect of inductively coupled plasma etch on the interface barrier behavior of (001) β-Ga2O3 Schottky barrier diode	2
Fabrication of silicon W and G center embedded light-emitting diodes for electroluminescence	2
Role of tin clustering in band structure and thermodynamic stability of GeSn by atomistic modeling	2
Endoscope-assisted manipulator for precooling and deposition in low-temperature scanning tunneling microscope systems	2
All field emission models are wrong, … but are any of them useful?	1
Cr and CrOx etching using SF6 and O2 plasma	1
In situ monitoring of sapphire nanostructure etching using optical emission spectroscopy	1
Patterning characteristic control of sol-gel-derived random-structure oligomeric silsesquioxanes having a diazonaphthoquinone derivative	1
Novel wet transfer technology of manufacturing flexible suspended two-dimensional material devices	1
Microsphere photolithography using reusable microsphere array mask for low-cost infrared metasurface fabrication	1
Pyroelectric lithium niobate electron emission-based ion-pump	1
Novel technique to control the focal spot size using carbon nanotube based cold cathode electron beam (C-beam) architecture	1
Evolution of hard carbon layers on Ti-45Al-2Nb-2Mn-1B by plasma enhanced chemical vapor deposition of hydrocarbons and hydrogen	1
Method for improving dry etching end point detection based on change in time accumulation correlation of plasma emitting wavelengths	1
Effects of athermal carrier injection on Co-60 gamma-ray damage in SiC merged-PiN Schottky diodes	1
Nanofabricating neural networks: Strategies, advances, and challenges	1
Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography	1
Influence of structure and composition of diamond-like nanocomposite coatings on cell viability	1