Microsystems & Nanoengineering

Article	Citations
Correction of thermal airflow distortion in warpage measurements of microelectronic packaging structures via deep learning-based digital image correlation	342
Spatiotemporal dynamics of nanowire growth in a microfluidic reactor	178
A magnetically enabled simulation of microgravity represses the auxin response during early seed germination on a microfluidic platform	170
A new electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels	149
Paper battery powered iontophoresis microneedles patch for hypertrophic scar treatment	119
Electromechanically reconfigurable plasmonic photodetector with a distinct shift in resonant wavelength	108
Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator	103
Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties	102
Bone-inspired (GNEC/HAPAAm) hydrogel with fatigue-resistance for use in underwater robots and highly piezoresistive sensors	92
Vertical serpentine interconnect-enabled stretchable and curved electronics	86
Moisture-resistant, stretchable NOx gas sensors based on laser-induced graphene for environmental monitoring and breath analysis	81
Acoustofluidics for simultaneous nanoparticle-based drug loading and exosome encapsulation	80
Self-synchronization of reinjected droplets for high-efficiency droplet pairing and merging	75
Multifocal skull-compensated transcranial focused ultrasound system for neuromodulation applications based on acoustic holography	73
A robust lateral shift free (LSF) electrothermal micromirror with flexible multimorph beams	72
Experimental measurement and numerical modeling of deformation behavior of breast cancer cells passing through constricted microfluidic channels	72
A new method of continuous blood pressure monitoring using multichannel sensing signals on the wrist	68
C-MEMS-derived glassy carbon electrochemical biosensors for rapid detection of SARS-CoV-2 spike protein	65
A tip-coupled, two-cantilever, non-resonant microsystem for direct measurement of liquid viscosity	62
A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging	60
Effects of nanopillars and surface coating on dynamic traction force	60
Nonlinear restructuring of patterned thin films by residual stress engineering into out-of-plane wavy-shaped electrostatic microactuators for high-performance radio-frequency switches	59
4D-printed intelligent reflecting surface with improved beam resolution via both phase modulation and space modulation	59
A thin-film temperature sensor based on a flexible electrode and substrate	58
Ultra-resolution scalable microprinting	58

Modular micro-PCR system for the onsite rapid diagnosis of COVID-19	58
Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams	57
Highly integrated watch for noninvasive continual glucose monitoring	57
Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging	56
Microengineered platforms for characterizing the contractile function of in vitro cardiac models	56
Stretchable and anti-impact iontronic pressure sensor with an ultrabroad linear range for biophysical monitoring and deep learning-aided knee rehabilitation	53
Self-template manufacturing of on-skin electrodes with 3D multi-channel structure for standard 3-limb-lead ECG suit	52
Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method	52
Correction to: Low limit of detection of the AlGaN/GaN-based sensor by the Kelvin connection detection technique	52
Formation of sub-100-nm suspended nanowires with various materials using thermally adjusted electrospun nanofibers as templates	51
6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes	50
A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors	50
Advanced tools and methods for single-cell surgery	49
Micro/nanofabrication of heat management materials for energy-efficient building facades	49
High-performance flexible organic field effect transistors with print-based nanowires	48
Graphene MEMS and NEMS	46
Microfluidic magnetic detection system combined with a DNA framework-mediated immune-sandwich assay for rapid and sensitive detection of tumor-derived exosomes	46
Root-inspired, template-confined additive printing for fabricating high-robust conformal electronics	45
Freestanding region-responsive bilayer for functional packaging of ingestible devices	45
Study of the protrusion of through-silicon vias in dual annealing-CMP processes for 3D integration	44
Removal of the rate table: MEMS gyrocompass with virtual maytagging	44
State-of-the-art micro- and nano-scale photonics research in Asia: devices, fabrication, manufacturing, and applications	43
Microfabrication of functional polyimide films and microstructures for flexible MEMS applications	43
Simultaneous photocatalytic degradation and SERS detection of tetracycline with self-sustainable and recyclable ternary PI/TiO2/Ag flexible microfibers	42
An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement	42
Nanoimprint-induced strain engineering of two-dimensional materials	41
3D printable and myoelectrically sensitive hydrogel for smart prosthetic hand control	39
Nanofabricated high turn-density spiral coils for on-chip electromagneto-optical conversion	39
Outperforming piezoelectric ultrasonics with high-reliability single-membrane CMUT array elements	39
A C-shaped hinge for displacement magnification in MEMS rotational structures	39
Low-cost optical sensors in electrified lab-on-a-disc platforms: liquid-phase boundary detection and automated diagnostics	38
Metamaterial-enhanced near-field readout platform for passive microsensor tags	37
Fully automated in vivo screening system for multi-organ imaging and pharmaceutical evaluation	37
Modeling gut neuro-epithelial connections in a novel microfluidic device	37
Iontophoresis-driven microneedle patch for the active transdermal delivery of vaccine macromolecules	36
An interconnect-free micro-electromechanical 7-bit arithmetic device for multi-operand programmable computing	36
Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments	36
Polymer interdigitated pillar electrostatic (PIPE) actuators	35
A piezoresistive-based 3-axial MEMS tactile sensor and integrated surgical forceps for gastrointestinal endoscopic minimally invasive surgery	34
A 3D-printed magnetic digital microfluidic diagnostic platform for rapid colorimetric sensing of carbapenemase-producing Enterobacteriaceae	34
Ionic liquid multistate resistive switching characteristics in two terminal soft and flexible discrete channels for neuromorphic computing	34
Micro 3D printing of a functional MEMS accelerometer	34
The development of microfabricated solenoids with magnetic cores for micromagnetic neural stimulation	34
Wearable multichannel pulse condition monitoring system based on flexible pressure sensor arrays	33
Recent advances in microsystem approaches for mechanical characterization of soft biological tissues	33
Ultra-low-crosstalk silicon switches driven thermally and electrically	33
Thin-film PMUTs: a review of over 40 years of research	32
Porous nanocomposites with enhanced intrinsic piezoresistive sensitivity for bioinspired multimodal tactile sensors	32
Flexible wide-range multidimensional force sensors inspired by bones embedded in muscle	31
Wireless, battery-free, and fully implantable electrical neurostimulation in freely moving rodents	31

Nanoscale plasma-activated aerosol generation for in situ surface pathogen disinfection	30
A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model	29
Microfluidic QCM enables ultrahigh Q-factor: a new paradigm for in-liquid gravimetric sensing	28
Integrated silicon photonic MEMS	28
Optofluidic paper-based analytical device for discriminative detection of organic substances via digital color coding	27
Multimodal MEMS vibration energy harvester with cascaded flexible and silicon beams for ultralow frequency response	27
Power-free plasma separation based on negative magnetophoresis for rapid biochemical analysis	27
Very-high-frequency probes for atomic force microscopy with silicon optomechanics	27
Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator	27
Revolutionary self-powered transducing mechanism for long-lasting and stable glucose monitoring: achieving selective and sensitive bacterial endospore germination in microengineered paper-based platfo	27
Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator	27
Sustainability inspired fabrication of next generation neurostimulation and cardiac rhythm management electrodes via reactive hierarchical surface restructuring	26
MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies	25
A skin-integrated device for neck posture monitoring and correction	25
Integration of multiple flexible electrodes for real-time detection of barrier formation with spatial resolution in a gut-on-chip system	25
High-throughput and simultaneous inertial separation of tumor cells and clusters from malignant effusions using spiral-contraction-expansion channels	25
Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption	25
Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches	25
An ultrafast-response and flexible humidity sensor for human respiration monitoring and noncontact safety warning	25
Length-based separation of Bacillus subtilis bacterial populations by viscoelastic microfluidics	25
On the design and fabrication of nanoliter-volume hanging drop networks	25
Highly conformable chip-in-foil implants for neural applications	25
Integrated microdevice with a windmill-like hole array for the clog-free, efficient, and self-mixing enrichment of circulating tumor cells	25
Droplet microreactor for high-throughput fluorescence-based measurements of single catalyst particle acidity	25
Portable visual and electrochemical detection of hydrogen peroxide release from living cells based on dual-functional Pt-Ni hydrogels	25
Four ribbons of double-layer graphene suspending masses for NEMS applications	24
Ultra-sensitive fluorescence-activated droplet single-cell sorting based on Tetramer-HCR-EvaGreen amplification	24
A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications	24
Correction: A spiral microfluidic device for rapid sorting, trapping, and long-term live imaging of Caenorhabditis elegans embryos	24
High temperature heat flux sensor with ITO/In2O3 thermopile for extreme environment sensing	24
Fabrication of crystalline submicro-to-nano carbon wire for achieving high current density and ultrastable current	23
Optimization of the fused deposition modeling-based fabrication process for polylactic acid microneedles	23
A laser-engraved wearable gait recognition sensor system for exoskeleton robots	23
Assembly of multicomponent structures from hundreds of micron-scale building blocks using optical tweezers	23
A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity	23
Digital light processing 3D printing of flexible devices: actuators, sensors and energy devices	22
Zero-power infrared switch with two-phase microfluidic flow and a 2D material thermal isolation layer	22
Boron nitride-enabled printing of a highly sensitive and flexible iontronic pressure sensing system for spatial mapping	22
MEMS reservoir computing system with stiffness modulation for multi-scene data processing at the edge	22
A wearable, rapidly manufacturable, stability-enhancing microneedle patch for closed-loop diabetes management	22
Extracting mechanical quality factor and eliminating feedthrough using harmonics of thermal-piezoresistive micromechanical resonators	21
Cellular shape micromachined actuator ribbons	21
Fully flexible implantable neural probes for electrophysiology recording and controlled neurochemical modulation	21
Highly stable integration of graphene Hall sensors on a microfluidic platform for magnetic sensing in whole blood	21
Sensing-actuating integrated asymmetric multilayer hydrogel muscle for soft robotics	21
An implantable, wireless, battery-free system for tactile pressure sensing	21
Surface-modified elastomeric nanofluidic devices for single nanoparticle trapping	21
Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates	20
A double-layered liquid metal-based electrochemical sensing system on fabric as a wearable detector for glucose in sweat	20
High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate	20
Mechanical memory operations in piezotransistive GaN microcantilevers using Au nanoparticle-enhanced photoacoustic excitation	20
Internal flow in sessile droplets induced by substrate oscillation: towards enhanced mixing and mass transfer in microfluidic systems	20
A tip-tilt-piston electrothermal micromirror array with integrated position sensors	20
Dynamic tuning of terahertz atomic lattice vibration via cross-scale mode coupling to nanomechanical resonance in WSe2 membranes	20
Large-scale high uniform optoelectronic synapses array for artificial visual neural network	20
Achieving consistency of flexible surface acoustic wave sensors with artificial intelligence	20
Fabrication of Mie-resonant silicon nanoparticles using laser annealing for surface-enhanced fluorescence spectroscopy	20
Microdissection tools to generate organoids for modeling the tumor immune microenvironment	19
A near-zero quiescent power breeze wake-up anemometer based on a rolling-bearing triboelectric nanogenerator	19
piRT-IFC: Physics-informed real-time impedance flow cytometry for the characterization of cellular intrinsic electrical properties	19
Wireless ultrasonic power transfer using a pre-charged CMUT structure with a built-in charge storage capacitor	19
Exceptional points enhance sensing in silicon micromechanical resonators	19
Correction: Development of a highly controlled system for large-area, directional printing of quasi-1D nanomaterials	19
Single-cell sorting based on secreted products for functionally defined cell therapies	19
Bifunctional nanoprobe for simultaneous detection of intracellular reactive oxygen species and temperature in single cells	18
Self-sensing intelligent microrobots for noninvasive and wireless monitoring systems	18
A handheld HIV detection platform using paper-based sample preparation and real-time isothermal amplification	18
5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications	18
Integrated microfluidic single-cell immunoblotting chip enables high-throughput isolation, enrichment and direct protein analysis of circulating tumor cells	18
Pico-washing: simultaneous liquid addition and removal for continuous-flow washing of microdroplets	18
Widely accessible method for 3D microflow mapping at high spatial and temporal resolutions	18
Elasto-inertial focusing and particle migration in high aspect ratio microchannels for high-throughput separation	18
A microsystem for in vivo wireless monitoring of plastic biliary stents using magnetoelastic sensors	18
Movable surface acoustic wave tweezers: a versatile toolbox for micromanipulation	18
Deep learning for non-parameterized MEMS structural design	17
Twisted fiber microfluidics: a cutting-edge approach to 3D spiral devices	17
Thermally-actuated microfluidic membrane valve for point-of-care applications	17
A force measurement platform for a vitreoretinal surgical simulator using an artificial eye module integrated with a quartz crystal resonator	17
Ultra-compact dual-channel integrated CO2 infrared gas sensor	17
Atomic Nb-doping of WS2 for high-performance synaptic transistors in neuromorphic computing	17

Direct electrification of silicon microfluidics for electric field applications	17
Fabrication and modulation of flexible electromagnetic metamaterials	17
A nanonewton-scale biomimetic mechanosensor	17
MRI and CT compatible asymmetric bilayer hydrogel electrodes for EEG-based brain activity monitoring	17
Designing magnetic microcapsules for cultivation and differentiation of stem cell spheroids	17
Laser-upgraded coal tar for smart pavements in road and bridge monitoring applications	16
Hydrogel electrodes with conductive and substrate-adhesive layers for noninvasive long-term EEG acquisition	16
Component library creation and pixel array generation with micromilled droplet microfluidics	16
Electrospun carbon nanofibre-assisted patterning of metal oxide nanostructures	16
Correction: Enabling direct microcalorimetric measurement of metabolic activity and exothermic reactions onto microfluidic platforms via heat flux sensor integration	16
Plasmonic–perovskite solar cells, light emitters, and sensors	16
Dual-functional Cu2O/g-C3N4 heterojunctions: a high-performance SERS sensor and photocatalytic self-cleaning system for water pollution detection and remediation	16
Triboelectric nanogenerator based on silane-coupled LTA/PDMS for physiological monitoring and biomechanical energy harvesting	16