Microsystems & Nanoengineering

Article	Citations
Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator	637
Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties	177
Correction of thermal airflow distortion in warpage measurements of microelectronic packaging structures via deep learning-based digital image correlation	176
A new electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels	175
Electromechanically reconfigurable plasmonic photodetector with a distinct shift in resonant wavelength	152
Broad tunability of ultrasonic tweezer for multi‑droplet manipulation	136
A temperature self-calibrated MEMS gyroscope with 0.007°/h/K bias drift coefficient using real-time parametric quality factor control and mode matching	133
Enhanced sensitivity in nonlinear parity-time symmetric silicon micromechanical resonators	131
Bone-inspired (GNEC/HAPAAm) hydrogel with fatigue-resistance for use in underwater robots and highly piezoresistive sensors	126
An optically driven microstructure for torque measurement in rotary molecular motors	124
In vitro modelling of extracellular matrix changes during skin aging: from static 2D to 3D dynamic microphysiological systems	118
Self-synchronization of reinjected droplets for high-efficiency droplet pairing and merging	114
Broadband plasmon modulation and high-intensity nanofocusing for high-resolution nanoscale imaging using Fabry–Pérot probes	113
A 3D modeling framework for accurate trajectory-based prediction of critical diameter in deterministic lateral displacement microfluidics	112
Ultra-small millimeter-wave filter chips based on high-K single-crystal lithium niobate	110
Vertical serpentine interconnect-enabled stretchable and curved electronics	106
Moisture-resistant, stretchable NOx gas sensors based on laser-induced graphene for environmental monitoring and breath analysis	98
Paper battery powered iontophoresis microneedles patch for hypertrophic scar treatment	95
A programmable magnetic digital microfluidic platform integrated with electrochemical detection system	92
Detection of mitochondrial bioenergetics using a novel bimodal 3D microelectrode array (MEA)-based biosensor	79
Leveraging the microscale effect to enhance the overload capacity of a piezoresistive differential pressure sensor	78
SV-SAW RF filters based on low-cost 128°Y LiNbO3/SiO2/poly-Si/Si substrate for 6G cmWave wireless communications	75
Review for optical metalens based on metasurfaces: fabrication and applications	72
Multifocal skull-compensated transcranial focused ultrasound system for neuromodulation applications based on acoustic holography	72
PEDOT:PSS-based bioelectronics for brain monitoring and modulation	71

How channel elasticity enhances and directs flow in dendritic microfluidic networks	70
Stable manipulating objects with unknown surface morphology via integration of magnetic artificial muscle and adhesive structures	70
Modular micro-PCR system for the onsite rapid diagnosis of COVID-19	69
Ensemble-learning-assisted exhaled gas disease analysis based on in-situ construction of MOF-derived MOx/GaN heterojunction sensor arrays	68
C-MEMS-derived glassy carbon electrochemical biosensors for rapid detection of SARS-CoV-2 spike protein	67
Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging	66
A wireless self-decoupling scheme for multimodal sensing	65
A tip-coupled, two-cantilever, non-resonant microsystem for direct measurement of liquid viscosity	65
Effects of nanopillars and surface coating on dynamic traction force	64
A robust lateral shift free (LSF) electrothermal micromirror with flexible multimorph beams	61
Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams	59
A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging	59
Critical aspects of droplet digital reverse transcription loop-mediated isothermal amplification (ddRT-LAMP) for viral pathogens detection	59
Nonlinear distortion of nonreciprocal transmission in parity-time-symmetric silicon micromechanical resonators	58
Nonlinear restructuring of patterned thin films by residual stress engineering into out-of-plane wavy-shaped electrostatic microactuators for high-performance radio-frequency switches	58
4D-printed intelligent reflecting surface with improved beam resolution via both phase modulation and space modulation	56
Experimental measurement and numerical modeling of deformation behavior of breast cancer cells passing through constricted microfluidic channels	56
Extending the boundaries of ultraviolet-visible meta-optics via direct imprinting of tantalum pentoxide composite	55
Ultra-resolution scalable microprinting	54
A multi-region flexible neural interface for behavioral state decoding in freely moving mice	52
A new method of continuous blood pressure monitoring using multichannel sensing signals on the wrist	52
A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors	52
Removal of the rate table: MEMS gyrocompass with virtual maytagging	52
Root-inspired, template-confined additive printing for fabricating high-robust conformal electronics	51
State-of-the-art micro- and nano-scale photonics research in Asia: devices, fabrication, manufacturing, and applications	50
A flexible wireless skin patch for synchronized glucose monitoring and regulation	50
Freestanding region-responsive bilayer for functional packaging of ingestible devices	50
Simultaneous photocatalytic degradation and SERS detection of tetracycline with self-sustainable and recyclable ternary PI/TiO2/Ag flexible microfibers	49
Iridium complex-loaded biomimetic vesicles enable enhanced photodynamic therapy and immune modulation	49
Exploring the synergic effect of thermal tuning and mode-coupling for frequency stabilization in micromechanical resonators	49
Formation of sub-100-nm suspended nanowires with various materials using thermally adjusted electrospun nanofibers as templates	49
An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement	48
Alleviating optical pumping inhomogeneity using a polarization-encoded metasurface in NMR co-magnetometers	48
Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method	48
An ultra-stable MEMS resonator with ±14 ppb frequency stability realized by nonlinearity-mediated drift suppression	47
Soft sensor for omnidirectional posture perception in humanoid dexterous hands	47
Study of the protrusion of through-silicon vias in dual annealing-CMP processes for 3D integration	47
6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes	47
Highly stable diamagnetically levitated mechanical resonators with large masses exceeding 1.5 gram	47
Fast multi-resolution 3D printing of microfluidics: enabling 2 μm channels and ultra-compact mixers	46
High-uniformity miniaturized PMUT array with broadband and high-sensitivity for wearable ultrasound imaging	46
Infectious disease diagnostic device using rapid and efficient qPCR assays on a multi-target chip: idream-qPCR	46
High-performance flexible organic field effect transistors with print-based nanowires	46
A contamination-free and low-leakage-current Cu-TSV technology enabled by engineered double-sided processing	45
Micro/nanofabrication of heat management materials for energy-efficient building facades	45
Nanoimprint-induced strain engineering of two-dimensional materials	44
Graphene MEMS and NEMS	43
Microfabrication of functional polyimide films and microstructures for flexible MEMS applications	42
Microfluidic magnetic detection system combined with a DNA framework-mediated immune-sandwich assay for rapid and sensitive detection of tumor-derived exosomes	41
A C-shaped hinge for displacement magnification in MEMS rotational structures	41

Self-template manufacturing of on-skin electrodes with 3D multi-channel structure for standard 3-limb-lead ECG suit	41
Nanofabricated high turn-density spiral coils for on-chip electromagneto-optical conversion	40
Correction: Heterojunction interface-engineered SnO2-CuO SAW sensor for room-temperature CO2 detection with fast response and high selectivity	40
Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments	40
Modeling gut neuro-epithelial connections in a novel microfluidic device	40
Differential migratory phenotypes of human neutrophils and breast cancer cells in a wireless unidirectional electric field platform	39
Fully automated in vivo screening system for multi-organ imaging and pharmaceutical evaluation	39
Metalens for passive generation of a droplet Bessel beam	39
3D nanoprinting of embryo microinjection needles with anti-clogging features	39
Patterning silver nanowire network via the Gibbs–Thomson effect	38
3D printable and myoelectrically sensitive hydrogel for smart prosthetic hand control	38
Optimizing fatigue resistance and lifetime of MEMS scanning mirrors with a novel coupled parameter distribution structural framework	37
0.003°/h bias instability of honeycomb disk resonator gyroscope achieved by mode reversal combined mode deflection control method	37
Ultra-sensitive ethanol detection using a chemiresistive SnO2 thin-film gas sensor functionalized with RuO2 nanosheets	36
Low-cost optical sensors in electrified lab-on-a-disc platforms: liquid-phase boundary detection and automated diagnostics	36
Nucleic acid amplification tests in digital microfluidics: the promise of next-generation point-of-care diagnostics	36
Iontophoresis-driven microneedle patch for the active transdermal delivery of vaccine macromolecules	36
Outperforming piezoelectric ultrasonics with high-reliability single-membrane CMUT array elements	36
An interconnect-free micro-electromechanical 7-bit arithmetic device for multi-operand programmable computing	35
A textile-based alignment-free electrophysiological sensing sleeve for comprehensive cardiovascular monitoring	35
Dean migration mechanisms: facilitating the control of microbial contaminants in cell therapy product manufacturing	35
Skin-conformal PMN-PT ultrasonic sensor for cuffless blood pressure sensing via eutectic solder integration	35
A local de-insulation method and its application in neural microneedle array	35
High-throughput chip-calorimeter using a Bi2Te3 thermopile heat flux sensor array	34
Integrated silicon photonic MEMS	34
Sideband injection locking of microwave frequency combs in a superconducting optomechanical circuit	34
Enhanced electromechanical coupling in piezoelectric MEMS vibration energy harvesters via strain-induced phase transition in Mn-doped bismuth ferrite epitaxial films	34
Low-dimensional materials for intracellular electrophysiology: advances from synthesis to applications	34
SPL and THD improvement of a cantilever-diaphragm piezoelectric MEMS loudspeaker with Double-S actuators	33
Thin-film PMUTs: a review of over 40 years of research	33
Porous nanocomposites with enhanced intrinsic piezoresistive sensitivity for bioinspired multimodal tactile sensors	33
Ion–electron synergy-enhanced flexible highly sensitive wireless sensing system with wide strain range	32
Electrohydrodynamic printed ultra-high performance liquid metal strain sensor	32
Study on polishing mechanisms of BEOL metal interconnects based on chemical and mechanical synergy	32
Flexible wide-range multidimensional force sensors inspired by bones embedded in muscle	31
Sensitivity enhancement of surface plasmon resonance biosensors based on versatile nanostructures: principle, fabrication, and illustrative applications	31
Optofluidic paper-based analytical device for discriminative detection of organic substances via digital color coding	31
A piezoresistive-based 3-axial MEMS tactile sensor and integrated surgical forceps for gastrointestinal endoscopic minimally invasive surgery	31
Ultra-low-crosstalk silicon switches driven thermally and electrically	31
Recent advances in microsystem approaches for mechanical characterization of soft biological tissues	31
Micro 3D printing of a functional MEMS accelerometer	31
A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model	31
A curved-beam piezoelectric MEMS resonator featuring multiple temperature plateaus with enhanced stability	31
Sustainability inspired fabrication of next generation neurostimulation and cardiac rhythm management electrodes via reactive hierarchical surface restructuring	30
Highly conformable chip-in-foil implants for neural applications	30
A stretchable frequency reconfigurable antenna controlled by compressive buckling for W-band applications	30
Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator	29
Long-term high-temperature aging mechanism of copper-metallized through-glass vias: a combined nanoindentation test and hybrid Potts-phase field simulation study	29
Microfluidic QCM enables ultrahigh Q-factor: a new paradigm for in-liquid gravimetric sensing	29
Optimizing MEMS inertial switches for efficient event-based environmental interaction: motivation, approaches, and purposes	29
The FTR dual-loop architecture based on SID–NLMS can achieve a threshold of 0.0001°/s and an ARW of 0.006°/√h for MEMS QMG	29
Droplet microreactor for high-throughput fluorescence-based measurements of single catalyst particle acidity	29
Wafer-level self-packaged MEMS infrared emitters with high-emissivity black silicon surface	28
Portable visual and electrochemical detection of hydrogen peroxide release from living cells based on dual-functional Pt-Ni hydrogels	28
Recent advances in spike-based neural coding for tactile perception	28
Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator	28
Power-free plasma separation based on negative magnetophoresis for rapid biochemical analysis	28
Revolutionary self-powered transducing mechanism for long-lasting and stable glucose monitoring: achieving selective and sensitive bacterial endospore germination in microengineered paper-based platfo	28
High-precision transdermal drug delivery enabled by a dual-pump parallel valveless piezoelectric micropump integrated with hollow microneedles	28
Multimodal MEMS vibration energy harvester with cascaded flexible and silicon beams for ultralow frequency response	27
Beyond binary patterning: polypropylene carbonate as a versatile thermal resist for high-fidelity grayscale Nanofabrication	27
Multi-sized microelectrode array coupled with micro-electroporation for effective recording of intracellular action potential	27
High-throughput and simultaneous inertial separation of tumor cells and clusters from malignant effusions using spiral-contraction-expansion channels	27
Piezoelectric stepped-plate resonators vibrating at lateral modes for direct viscosity determination in liquids	27
Integration of multiple flexible electrodes for real-time detection of barrier formation with spatial resolution in a gut-on-chip system	27
A comprehensive review of hydrogen sensor for thermal runaway monitoring: fundamentals, recent advancements, and challenges	27
Four ribbons of double-layer graphene suspending masses for NEMS applications	26
Design of an automated cell batch microinjection system based on magnetic tweezers for zebrafish embryos	26
Correction: A spiral microfluidic device for rapid sorting, trapping, and long-term live imaging of Caenorhabditis elegans embryos	26
On the design and fabrication of nanoliter-volume hanging drop networks	26
Open micro-valley chip reveals long-term viscosity-induced glioblastoma cellular invasion states	26
High sensitivity SAW hydrogen gas sensor based on thermal conductivity effect	25
MEMS reservoir computing system with stiffness modulation for multi-scene data processing at the edge	25
A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity	25
A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications	25
Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption	25
Magnetic-induced deformation driving triboelectric sensor with dual-mode perception for magnetic field and contacting pressure	25
Electrohydrodynamic printing technology: mechanisms, control, and applications	25
Ultra-sensitive fluorescence-activated droplet single-cell sorting based on Tetramer-HCR-EvaGreen amplification	24
Pre-snapback mode operation of CMUT for enhanced acoustic performance	24

Thermally activated excess noise by subgap density-of-states in Si-doped ZnSnO thin-film transistor-type gas sensor	24
Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches	24
High temperature heat flux sensor with ITO/In2O3 thermopile for extreme environment sensing	24
A high selectivity and low detection limit carbon monoxide sensor based on Au-GO/Co-ZnO composite material	24
Digital light processing 3D printing of flexible devices: actuators, sensors and energy devices	24
Research on unit circuits based on cathode modulated vacuum/air channel electron tube	24
A laser-engraved wearable gait recognition sensor system for exoskeleton robots	24
Nanojet visualization and dark-field imaging of optically trapped vaterite capsules with endoscopic illumination	24
III-Nitride MEMS drum resonators on flexible metal substrates	23
Large-scale high uniform optoelectronic synapses array for artificial visual neural network	23
A skin-integrated device for neck posture monitoring and correction	23
Vapor-induced porosity in graphene/PDMS: a scalable route to high-performance pressure sensors	23
Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates	23
Boron nitride-enabled printing of a highly sensitive and flexible iontronic pressure sensing system for spatial mapping	23
An implantable, wireless, battery-free system for tactile pressure sensing	23
Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging	23
A wearable, rapidly manufacturable, stability-enhancing microneedle patch for closed-loop diabetes management	23
Zero-power infrared switch with two-phase microfluidic flow and a 2D material thermal isolation layer	23
Highly stable integration of graphene Hall sensors on a microfluidic platform for magnetic sensing in whole blood	22
A synergistic CoO/MXene heterostructure anode with facilitated interfacial charge transfer for high-rate micro lithium-ion batteries	22
Enhancing the rectification effect of hydrogel-based stretchable ionic diodes through incorporating cations with high valence	22
Cellular shape micromachined actuator ribbons	22
Nanomaterials in PCR: exploring light-to-heat conversion mechanisms and microfluidic integration	22
Extracting mechanical quality factor and eliminating feedthrough using harmonics of thermal-piezoresistive micromechanical resonators	22
UNIQUE: ultrasound non-destructive in-situ quantitative evaluation of stem cell spheroid deformability during differentiation into specific lineages	22
Achieving consistency of flexible surface acoustic wave sensors with artificial intelligence	22
Internal flow in sessile droplets induced by substrate oscillation: towards enhanced mixing and mass transfer in microfluidic systems	22
A hot-humid tolerant and antibacterial MXene-based hydrogel sensor for real-time cardiorespiratory monitoring in endurance sports	22
Sensing-actuating integrated asymmetric multilayer hydrogel muscle for soft robotics	21
High-precision neural information detection of multiple brain regions in mice under different concentrations of isoflurane anesthesia based on microelectrode arrays	21
Diffraction-limit-breaking digital projection lithography via multi-exposure strategies for high-density nanopatterning	21
Fully flexible implantable neural probes for electrophysiology recording and controlled neurochemical modulation	21
Dynamic tuning of terahertz atomic lattice vibration via cross-scale mode coupling to nanomechanical resonance in WSe2 membranes	21
Bifunctional nanoprobe for simultaneous detection of intracellular reactive oxygen species and temperature in single cells	21
Stretchable multifunctional wearable system for real-time and on-demand thermotherapy of arthritis	21
Nanocomposite biosensor tracks honokiol-induced oxidative stress dynamics in 3D hydrogel-cultured lung cancer cells	21
Microdissection tools to generate organoids for modeling the tumor immune microenvironment	21
Heterogeneous integration of micro-LEDs via multiple simultaneous transfer and bonding	20
Wafer-scale fabrication of solid-state nanopore array with a novel SpacerX process	20
Self-sensing intelligent microrobots for noninvasive and wireless monitoring systems	20
Exceptional points enhance sensing in silicon micromechanical resonators	20
Advancing non-faradaic impedance biosensors: sensitivity enhancement strategies using microfluidics, multiscale labeling, and CMOS technology	20
Wireless ultrasonic power transfer using a pre-charged CMUT structure with a built-in charge storage capacitor	20
Fluid drawing printing 3D conductive structures for flexible circuit manufacturing	20
Closed-crown packaging system for stable, long-term neural recording in group-housed mice	20
A near-zero quiescent power breeze wake-up anemometer based on a rolling-bearing triboelectric nanogenerator	20
Atomic Nb-doping of WS2 for high-performance synaptic transistors in neuromorphic computing	19
Single-cell sorting based on secreted products for functionally defined cell therapies	19
AI‑driven photonic noses: from conventional sensors to cloud‑to-edge intelligent microsystems	19
Portable and label-free optical detection of sweat glucose using functionalized plasmonic nanopillar array	19
A nanonewton-scale biomimetic mechanosensor	19
A force measurement platform for a vitreoretinal surgical simulator using an artificial eye module integrated with a quartz crystal resonator	19
A tip-tilt-piston electrothermal micromirror array with integrated position sensors	19
High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate	19
Elasto-inertial focusing and particle migration in high aspect ratio microchannels for high-throughput separation	19
A microsystem for in vivo wireless monitoring of plastic biliary stents using magnetoelastic sensors	19
Electrospun carbon nanofibre-assisted patterning of metal oxide nanostructures	19
Fabrication of Mie-resonant silicon nanoparticles using laser annealing for surface-enhanced fluorescence spectroscopy	19
piRT-IFC: Physics-informed real-time impedance flow cytometry for the characterization of cellular intrinsic electrical properties	19
5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications	19
Twisted fiber microfluidics: a cutting-edge approach to 3D spiral devices	19
Deep learning for non-parameterized MEMS structural design	18
Wide field of view multifunctional solar sensor for photovoltaic power management via measurement of solar angle and intensity	18
Triboelectric horology: escapement-inspired design strategy for prolonged energy harvesting under irregular mechanical inputs	18
A handheld HIV detection platform using paper-based sample preparation and real-time isothermal amplification	18
Laser-upgraded coal tar for smart pavements in road and bridge monitoring applications	18
Gate-tunable flexible photodetector with wavelength-selective response based on asymmetric 2D heterostructures	18
Designing magnetic microcapsules for cultivation and differentiation of stem cell spheroids	18
Direct electrification of silicon microfluidics for electric field applications	18
Movable surface acoustic wave tweezers: a versatile toolbox for micromanipulation	18
Programmable viscoelastic hydrogels exhibit antimicrobial and regenerative properties to promote cell migration, wound healing, and tissue remodeling	18