Microsystems & Nanoengineering

Article	Citations
Self-synchronization of reinjected droplets for high-efficiency droplet pairing and merging	684
Enhanced sensitivity in nonlinear parity-time symmetric silicon micromechanical resonators	201
An optically driven microstructure for torque measurement in rotary molecular motors	163
Ultra-small millimeter-wave filter chips based on high-K single-crystal lithium niobate	148
Leveraging the microscale effect to enhance the overload capacity of a piezoresistive differential pressure sensor	143
A 3D modeling framework for accurate trajectory-based prediction of critical diameter in deterministic lateral displacement microfluidics	140
Fully flexible large-area MEMS-based triaxial force sensor compatible with flat panel display manufacturing	139
Bone-inspired (GNEC/HAPAAm) hydrogel with fatigue-resistance for use in underwater robots and highly piezoresistive sensors	139
Multifocal skull-compensated transcranial focused ultrasound system for neuromodulation applications based on acoustic holography	133
Broad tunability of ultrasonic tweezer for multi‑droplet manipulation	129
Detection of mitochondrial bioenergetics using a novel bimodal 3D microelectrode array (MEA)-based biosensor	119
SV-SAW RF filters based on low-cost 128°Y LiNbO3/SiO2/poly-Si/Si substrate for 6G cmWave wireless communications	115
Vertical serpentine interconnect-enabled stretchable and curved electronics	112
A programmable magnetic digital microfluidic platform integrated with electrochemical detection system	111
Electromechanically reconfigurable plasmonic photodetector with a distinct shift in resonant wavelength	102
PEDOT:PSS-based bioelectronics for brain monitoring and modulation	100
Correction of thermal airflow distortion in warpage measurements of microelectronic packaging structures via deep learning-based digital image correlation	91
Broadband plasmon modulation and high-intensity nanofocusing for high-resolution nanoscale imaging using Fabry–Pérot probes	86
Wafer-scalable artificial synapses and logic gate circuits based on coplanar self-aligned-gate organic transistors for artificial vision applications	82
ViraLite: an ultracompact HIV viral load self-testing system with internal quality control	81
Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator	79
Paper battery powered iontophoresis microneedles patch for hypertrophic scar treatment	79
In vitro modelling of extracellular matrix changes during skin aging: from static 2D to 3D dynamic microphysiological systems	78
A temperature self-calibrated MEMS gyroscope with 0.007°/h/K bias drift coefficient using real-time parametric quality factor control and mode matching	76
Review for optical metalens based on metasurfaces: fabrication and applications	75

C-MEMS-derived glassy carbon electrochemical biosensors for rapid detection of SARS-CoV-2 spike protein	73
How channel elasticity enhances and directs flow in dendritic microfluidic networks	73
A wireless self-decoupling scheme for multimodal sensing	72
A robust lateral shift free (LSF) electrothermal micromirror with flexible multimorph beams	71
Nonlinear distortion of nonreciprocal transmission in parity-time-symmetric silicon micromechanical resonators	69
Nonlinear restructuring of patterned thin films by residual stress engineering into out-of-plane wavy-shaped electrostatic microactuators for high-performance radio-frequency switches	68
4D-printed intelligent reflecting surface with improved beam resolution via both phase modulation and space modulation	65
Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams	64
Experimental measurement and numerical modeling of deformation behavior of breast cancer cells passing through constricted microfluidic channels	62
Extending the boundaries of ultraviolet-visible meta-optics via direct imprinting of tantalum pentoxide composite	62
Stable manipulating objects with unknown surface morphology via integration of magnetic artificial muscle and adhesive structures	62
A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging	61
Critical aspects of droplet digital reverse transcription loop-mediated isothermal amplification (ddRT-LAMP) for viral pathogens detection	61
Ultra-resolution scalable microprinting	60
Effects of nanopillars and surface coating on dynamic traction force	59
Ensemble-learning-assisted exhaled gas disease analysis based on in-situ construction of MOF-derived MOx/GaN heterojunction sensor arrays	59
A tip-coupled, two-cantilever, non-resonant microsystem for direct measurement of liquid viscosity	59
A new method of continuous blood pressure monitoring using multichannel sensing signals on the wrist	57
Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging	57
Fast multi-resolution 3D printing of microfluidics: enabling 2 μm channels and ultra-compact mixers	57
High-uniformity miniaturized PMUT array with broadband and high-sensitivity for wearable ultrasound imaging	56
Root-inspired, template-confined additive printing for fabricating high-robust conformal electronics	55
A multi-region flexible neural interface for behavioral state decoding in freely moving mice	55
State-of-the-art micro- and nano-scale photonics research in Asia: devices, fabrication, manufacturing, and applications	55
Exploring the synergic effect of thermal tuning and mode-coupling for frequency stabilization in micromechanical resonators	54
Iridium complex-loaded biomimetic vesicles enable enhanced photodynamic therapy and immune modulation	54
Freestanding region-responsive bilayer for functional packaging of ingestible devices	54
Formation of sub-100-nm suspended nanowires with various materials using thermally adjusted electrospun nanofibers as templates	54
Soft sensor for omnidirectional posture perception in humanoid dexterous hands	53
Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method	53
A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors	52
Highly stable diamagnetically levitated mechanical resonators with large masses exceeding 1.5 gram	52
Self-template manufacturing of on-skin electrodes with 3D multi-channel structure for standard 3-limb-lead ECG suit	52
Infectious disease diagnostic device using rapid and efficient qPCR assays on a multi-target chip: idream-qPCR	51
Alleviating optical pumping inhomogeneity using a polarization-encoded metasurface in NMR co-magnetometers	51
High-performance flexible organic field effect transistors with print-based nanowires	51
Intelligent label-free droplet microfluidic sorting system for single-cell encapsulation and morphology-guided screening	50
6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes	50
Micro/nanofabrication of heat management materials for energy-efficient building facades	50
Nanoimprint-induced strain engineering of two-dimensional materials	49
Removal of the rate table: MEMS gyrocompass with virtual maytagging	49
Microfluidic magnetic detection system combined with a DNA framework-mediated immune-sandwich assay for rapid and sensitive detection of tumor-derived exosomes	49
A flexible wireless skin patch for synchronized glucose monitoring and regulation	47
An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement	46
Simultaneous photocatalytic degradation and SERS detection of tetracycline with self-sustainable and recyclable ternary PI/TiO2/Ag flexible microfibers	46
An ultra-stable MEMS resonator with ±14 ppb frequency stability realized by nonlinearity-mediated drift suppression	46
Microfabrication of functional polyimide films and microstructures for flexible MEMS applications	46
Graphene MEMS and NEMS	45
Study of the protrusion of through-silicon vias in dual annealing-CMP processes for 3D integration	43
A contamination-free and low-leakage-current Cu-TSV technology enabled by engineered double-sided processing	43

Nanofabricated high turn-density spiral coils for on-chip electromagneto-optical conversion	42
Correction: Heterojunction interface-engineered SnO2-CuO SAW sensor for room-temperature CO2 detection with fast response and high selectivity	42
Optimizing fatigue resistance and lifetime of MEMS scanning mirrors with a novel coupled parameter distribution structural framework	42
A C-shaped hinge for displacement magnification in MEMS rotational structures	42
Low-cost optical sensors in electrified lab-on-a-disc platforms: liquid-phase boundary detection and automated diagnostics	42
Iontophoresis-driven microneedle patch for the active transdermal delivery of vaccine macromolecules	41
Differential migratory phenotypes of human neutrophils and breast cancer cells in a wireless unidirectional electric field platform	41
Patterning silver nanowire network via the Gibbs–Thomson effect	40
Mechano-optically co-designed highly-scalable silicon photonic MEMS switches with quasi-buckling-free 2 × 2 horizontal adiabatic directional couplers	40
An integrated framework TSV-INet for arbitrarily distributed TSV interposer wafer warpage simulation	40
Hybrid additive manufacturing-based assembly of sacrificial isomalt scaffolds and gas exchange membranes for microfluidic artificial lung development	40
On-demand rotational manipulation of microparticles and zebrafish larvae via orthogonally phased BAW acoustofluidics	40
Fully automated in vivo screening system for multi-organ imaging and pharmaceutical evaluation	40
Ultra-sensitive ethanol detection using a chemiresistive SnO2 thin-film gas sensor functionalized with RuO2 nanosheets	39
Modeling gut neuro-epithelial connections in a novel microfluidic device	39
Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments	39
3D nanoprinting of embryo microinjection needles with anti-clogging features	39
Metalens for passive generation of a droplet Bessel beam	39
Nucleic acid amplification tests in digital microfluidics: the promise of next-generation point-of-care diagnostics	38
0.003°/h bias instability of honeycomb disk resonator gyroscope achieved by mode reversal combined mode deflection control method	37
A textile-based alignment-free electrophysiological sensing sleeve for comprehensive cardiovascular monitoring	37
3D printable and myoelectrically sensitive hydrogel for smart prosthetic hand control	37
Electrohydrodynamic printed ultra-high performance liquid metal strain sensor	36
An interconnect-free micro-electromechanical 7-bit arithmetic device for multi-operand programmable computing	36
Dean migration mechanisms: facilitating the control of microbial contaminants in cell therapy product manufacturing	36
Ion–electron synergy-enhanced flexible highly sensitive wireless sensing system with wide strain range	36
Low-dimensional materials for intracellular electrophysiology: advances from synthesis to applications	35
Skin-conformal PMN-PT ultrasonic sensor for cuffless blood pressure sensing via eutectic solder integration	35
A local de-insulation method and its application in neural microneedle array	34
Sideband injection locking of microwave frequency combs in a superconducting optomechanical circuit	34
Porous nanocomposites with enhanced intrinsic piezoresistive sensitivity for bioinspired multimodal tactile sensors	34
A curved-beam piezoelectric MEMS resonator featuring multiple temperature plateaus with enhanced stability	34
Flexible wide-range multidimensional force sensors inspired by bones embedded in muscle	34
A streamlined set-up for Lloyd’s mirror interference lithography, using a single-mode-fibre-coupled laser	34
A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model	33
A piezoresistive-based 3-axial MEMS tactile sensor and integrated surgical forceps for gastrointestinal endoscopic minimally invasive surgery	33
Enhanced electromechanical coupling in piezoelectric MEMS vibration energy harvesters via strain-induced phase transition in Mn-doped bismuth ferrite epitaxial films	33
Fine-tuned multimodal large language model for autonomous state cognition system of shape-recognition 6-bar tensegrity integrated with flexible sensors	33
Micro 3D printing of a functional MEMS accelerometer	33
Study on polishing mechanisms of BEOL metal interconnects based on chemical and mechanical synergy	33
High-throughput chip-calorimeter using a Bi2Te3 thermopile heat flux sensor array	33
SPL and THD improvement of a cantilever-diaphragm piezoelectric MEMS loudspeaker with Double-S actuators	32
Thin-film PMUTs: a review of over 40 years of research	32
Sensitivity enhancement of surface plasmon resonance biosensors based on versatile nanostructures: principle, fabrication, and illustrative applications	32
Integrated silicon photonic MEMS	32
Ultra-low-crosstalk silicon switches driven thermally and electrically	32
Revolutionary self-powered transducing mechanism for long-lasting and stable glucose monitoring: achieving selective and sensitive bacterial endospore germination in microengineered paper-based platfo	31
Integration of multiple flexible electrodes for real-time detection of barrier formation with spatial resolution in a gut-on-chip system	31
Wafer-level self-packaged MEMS infrared emitters with high-emissivity black silicon surface	31
Droplet microreactor for high-throughput fluorescence-based measurements of single catalyst particle acidity	31
Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator	31
Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator	30
Reconfigurable assembly, disassembly, and self-propulsion of microparticles via optoelectronic tweezers	30
Optimizing MEMS inertial switches for efficient event-based environmental interaction: motivation, approaches, and purposes	30
Optofluidic paper-based analytical device for discriminative detection of organic substances via digital color coding	30
Multimodal MEMS vibration energy harvester with cascaded flexible and silicon beams for ultralow frequency response	30
Power-free plasma separation based on negative magnetophoresis for rapid biochemical analysis	30
High-throughput and simultaneous inertial separation of tumor cells and clusters from malignant effusions using spiral-contraction-expansion channels	30
A stretchable frequency reconfigurable antenna controlled by compressive buckling for W-band applications	29
Sustainability inspired fabrication of next generation neurostimulation and cardiac rhythm management electrodes via reactive hierarchical surface restructuring	29
Beyond binary patterning: polypropylene carbonate as a versatile thermal resist for high-fidelity grayscale Nanofabrication	29
Microfluidic QCM enables ultrahigh Q-factor: a new paradigm for in-liquid gravimetric sensing	28
A comprehensive review of hydrogen sensor for thermal runaway monitoring: fundamentals, recent advancements, and challenges	28
Highly conformable chip-in-foil implants for neural applications	27
Recent advances in spike-based neural coding for tactile perception	27
Embedded glass fan-out integration method for high-performance Ka-band RF microsystem	27
High-precision transdermal drug delivery enabled by a dual-pump parallel valveless piezoelectric micropump integrated with hollow microneedles	27
Portable visual and electrochemical detection of hydrogen peroxide release from living cells based on dual-functional Pt-Ni hydrogels	27
The FTR dual-loop architecture based on SID–NLMS can achieve a threshold of 0.0001°/s and an ARW of 0.006°/√h for MEMS QMG	26
Correction: A spiral microfluidic device for rapid sorting, trapping, and long-term live imaging of Caenorhabditis elegans embryos	26
Magnetic-induced deformation driving triboelectric sensor with dual-mode perception for magnetic field and contacting pressure	26
Piezoelectric stepped-plate resonators vibrating at lateral modes for direct viscosity determination in liquids	26
Design of an automated cell batch microinjection system based on magnetic tweezers for zebrafish embryos	26
Research on unit circuits based on cathode modulated vacuum/air channel electron tube	26
Long-term high-temperature aging mechanism of copper-metallized through-glass vias: a combined nanoindentation test and hybrid Potts-phase field simulation study	26
Non-elastic membrane dual-actuation liquid lens for continuous focus and zoom	26
Open micro-valley chip reveals long-term viscosity-induced glioblastoma cellular invasion states	26
Four ribbons of double-layer graphene suspending masses for NEMS applications	25
Nanojet visualization and dark-field imaging of optically trapped vaterite capsules with endoscopic illumination	25
Zero-power infrared switch with two-phase microfluidic flow and a 2D material thermal isolation layer	25

Multi-sized microelectrode array coupled with micro-electroporation for effective recording of intracellular action potential	25
Pre-snapback mode operation of CMUT for enhanced acoustic performance	25
A laser-engraved wearable gait recognition sensor system for exoskeleton robots	25
Boron nitride-enabled printing of a highly sensitive and flexible iontronic pressure sensing system for spatial mapping	25
Universal bioinspired adhesives for arbitrary unknown surfaces toward dexterous robotic manipulation	25
Electrohydrodynamic printing technology: mechanisms, control, and applications	24
Thermally activated excess noise by subgap density-of-states in Si-doped ZnSnO thin-film transistor-type gas sensor	24
A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity	24
A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications	24
Ultra-sensitive fluorescence-activated droplet single-cell sorting based on Tetramer-HCR-EvaGreen amplification	24
AlGaN/GaN HEMT H₂ sensor with integrated Wheatstone bridge and on-chip microheater for 0.1-ppm detection	24
Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption	24
High temperature heat flux sensor with ITO/In2O3 thermopile for extreme environment sensing	24
Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging	23
MEMS reservoir computing system with stiffness modulation for multi-scene data processing at the edge	23
High sensitivity SAW hydrogen gas sensor based on thermal conductivity effect	23
A high selectivity and low detection limit carbon monoxide sensor based on Au-GO/Co-ZnO composite material	23
Highly stable integration of graphene Hall sensors on a microfluidic platform for magnetic sensing in whole blood	23
Microfluidic encapsulation of the human gut microbiota—a tool for research and beyond	23
On the design and fabrication of nanoliter-volume hanging drop networks	23
A skin-integrated device for neck posture monitoring and correction	23
A wearable, rapidly manufacturable, stability-enhancing microneedle patch for closed-loop diabetes management	23
A synergistic CoO/MXene heterostructure anode with facilitated interfacial charge transfer for high-rate micro lithium-ion batteries	23
Digital light processing 3D printing of flexible devices: actuators, sensors and energy devices	23
High pressure transcranial focused ultrasound stimulation induces parameter-dependent cell-type specific effects	23
Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches	23
III-Nitride MEMS drum resonators on flexible metal substrates	22
Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates	22
Achieving consistency of flexible surface acoustic wave sensors with artificial intelligence	22
UNIQUE: ultrasound non-destructive in-situ quantitative evaluation of stem cell spheroid deformability during differentiation into specific lineages	22
Vapor-induced porosity in graphene/PDMS: a scalable route to high-performance pressure sensors	22
Internal flow in sessile droplets induced by substrate oscillation: towards enhanced mixing and mass transfer in microfluidic systems	22
Sensing-actuating integrated asymmetric multilayer hydrogel muscle for soft robotics	22
Cellular shape micromachined actuator ribbons	22
Carbon nanotube fiber electrodes modified with surface-arrayed nanowires for enhanced mass transport in electrochemical nanofabrication	22
Large-scale high uniform optoelectronic synapses array for artificial visual neural network	22
Extracting mechanical quality factor and eliminating feedthrough using harmonics of thermal-piezoresistive micromechanical resonators	22
Enhancing the rectification effect of hydrogel-based stretchable ionic diodes through incorporating cations with high valence	21
Stretchable multifunctional wearable system for real-time and on-demand thermotherapy of arthritis	21
A hot-humid tolerant and antibacterial MXene-based hydrogel sensor for real-time cardiorespiratory monitoring in endurance sports	21
Fully flexible implantable neural probes for electrophysiology recording and controlled neurochemical modulation	21
piRT-IFC: Physics-informed real-time impedance flow cytometry for the characterization of cellular intrinsic electrical properties	21
Nanomaterials in PCR: exploring light-to-heat conversion mechanisms and microfluidic integration	21
An implantable, wireless, battery-free system for tactile pressure sensing	21
Elasto-inertial focusing and particle migration in high aspect ratio microchannels for high-throughput separation	20
A near-zero quiescent power breeze wake-up anemometer based on a rolling-bearing triboelectric nanogenerator	20
Fluid drawing printing 3D conductive structures for flexible circuit manufacturing	20
From single cell analysis to 3D micro physiological systems: microfluidic tools integrating cancer cell targets for delineating natural killer cell biology	20
Exceptional points enhance sensing in silicon micromechanical resonators	20
Batch-fabrication of all-dielectric vapor cells enabling optically addressed Rydberg atom electrometry	20
A tip-tilt-piston electrothermal micromirror array with integrated position sensors	20
Wafer-scale fabrication of solid-state nanopore array with a novel SpacerX process	20
Closed-crown packaging system for stable, long-term neural recording in group-housed mice	20
AI‑driven photonic noses: from conventional sensors to cloud‑to-edge intelligent microsystems	20
Microdissection tools to generate organoids for modeling the tumor immune microenvironment	20
High-precision neural information detection of multiple brain regions in mice under different concentrations of isoflurane anesthesia based on microelectrode arrays	20
Heterogeneous integration of micro-LEDs via multiple simultaneous transfer and bonding	20
Dynamic tuning of terahertz atomic lattice vibration via cross-scale mode coupling to nanomechanical resonance in WSe2 membranes	20
High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate	20
Fabrication of Mie-resonant silicon nanoparticles using laser annealing for surface-enhanced fluorescence spectroscopy	20
Nanocomposite biosensor tracks honokiol-induced oxidative stress dynamics in 3D hydrogel-cultured lung cancer cells	20
Advancing non-faradaic impedance biosensors: sensitivity enhancement strategies using microfluidics, multiscale labeling, and CMOS technology	19
Laser-upgraded coal tar for smart pavements in road and bridge monitoring applications	19
Bifunctional nanoprobe for simultaneous detection of intracellular reactive oxygen species and temperature in single cells	19
Self-sensing intelligent microrobots for noninvasive and wireless monitoring systems	19
Twisted fiber microfluidics: a cutting-edge approach to 3D spiral devices	19
A microsystem for in vivo wireless monitoring of plastic biliary stents using magnetoelastic sensors	19
Wireless ultrasonic power transfer using a pre-charged CMUT structure with a built-in charge storage capacitor	19
5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications	19
A nanonewton-scale biomimetic mechanosensor	19
Diffraction-limit-breaking digital projection lithography via multi-exposure strategies for high-density nanopatterning	19
MRI and CT compatible asymmetric bilayer hydrogel electrodes for EEG-based brain activity monitoring	18
Wide field of view multifunctional solar sensor for photovoltaic power management via measurement of solar angle and intensity	18
Intelligent soft robotic gripper for non-destructive grasping and attribute recognition via multi-modal waveguide tactile sensors	18
Gate-tunable flexible photodetector with wavelength-selective response based on asymmetric 2D heterostructures	18
A novel high-sensitivity triaxial accelerometer based on 3-D phononic crystals	18
Deep learning for non-parameterized MEMS structural design	18
An integrated nanophotonic SPRM microsystem for real-time, label-free quantification of single-cell adhesion dynamics	18
Direct electrification of silicon microfluidics for electric field applications	18
Programmable viscoelastic hydrogels exhibit antimicrobial and regenerative properties to promote cell migration, wound healing, and tissue remodeling	18
Designing magnetic microcapsules for cultivation and differentiation of stem cell spheroids	18
Triboelectric horology: escapement-inspired design strategy for prolonged energy harvesting under irregular mechanical inputs	18
Movable surface acoustic wave tweezers: a versatile toolbox for micromanipulation	17
Fabrication and modulation of flexible electromagnetic metamaterials	17
Toolkit for integrating millimeter-sized microfluidic biomedical devices with multiple membranes and electrodes	17
Thermal property evaluation of a 2.5D integration method with device level microchannel direct cooling for a high-power GaN HEMT device	17
Correction: Enabling direct microcalorimetric measurement of metabolic activity and exothermic reactions onto microfluidic platforms via heat flux sensor integration	17
Portable and label-free optical detection of sweat glucose using functionalized plasmonic nanopillar array	17
Hydrogel electrodes with conductive and substrate-adhesive layers for noninvasive long-term EEG acquisition	17
Chip-scale packaged in-line polarization-resolved detector for optically pumped magnetometers	17
Direct and residue-free patterning of sub-5 µm CVD monolayer graphene with highly enhanced conductivity and pattern fidelity	17
Atomic Nb-doping of WS2 for high-performance synaptic transistors in neuromorphic computing	17
Recent advances in bio-microsystem integration and Lab-on-PCB technology	17
Controllable-pore porous microneedles for high-speed extraction and biomarker detection of interstitial fluid	17
Sperm quality metrics were improved by a biomimetic microfluidic selection platform compared to swim-up methods	17