Microsystems & Nanoengineering

Article	Citations
A programmable magnetic digital microfluidic platform integrated with electrochemical detection system	477
Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator	141
PEDOT:PSS-based bioelectronics for brain monitoring and modulation	134
Correction of thermal airflow distortion in warpage measurements of microelectronic packaging structures via deep learning-based digital image correlation	128
Ultra-small millimeter-wave filter chips based on high-K single-crystal lithium niobate	125
Paper battery powered iontophoresis microneedles patch for hypertrophic scar treatment	120
A magnetically enabled simulation of microgravity represses the auxin response during early seed germination on a microfluidic platform	109
Self-synchronization of reinjected droplets for high-efficiency droplet pairing and merging	106
Electromechanically reconfigurable plasmonic photodetector with a distinct shift in resonant wavelength	106
Review for optical metalens based on metasurfaces: fabrication and applications	105
A new electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels	94
Multifocal skull-compensated transcranial focused ultrasound system for neuromodulation applications based on acoustic holography	92
Bone-inspired (GNEC/HAPAAm) hydrogel with fatigue-resistance for use in underwater robots and highly piezoresistive sensors	91
Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties	90
Vertical serpentine interconnect-enabled stretchable and curved electronics	90
SV-SAW RF filters based on low-cost 128°Y LiNbO3/SiO2/poly-Si/Si substrate for 6G cmWave wireless communications	89
Moisture-resistant, stretchable NOx gas sensors based on laser-induced graphene for environmental monitoring and breath analysis	87
Acoustofluidics for simultaneous nanoparticle-based drug loading and exosome encapsulation	85
Nonlinear distortion of nonreciprocal transmission in parity-time-symmetric silicon micromechanical resonators	81
Nonlinear restructuring of patterned thin films by residual stress engineering into out-of-plane wavy-shaped electrostatic microactuators for high-performance radio-frequency switches	74
Critical aspects of droplet digital reverse transcription loop-mediated isothermal amplification (ddRT-LAMP) for viral pathogens detection	72
Stable manipulating objects with unknown surface morphology via integration of magnetic artificial muscle and adhesive structures	70
Experimental measurement and numerical modeling of deformation behavior of breast cancer cells passing through constricted microfluidic channels	69
C-MEMS-derived glassy carbon electrochemical biosensors for rapid detection of SARS-CoV-2 spike protein	68
A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging	67

Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams	66
Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging	65
4D-printed intelligent reflecting surface with improved beam resolution via both phase modulation and space modulation	64
Ultra-resolution scalable microprinting	64
A new method of continuous blood pressure monitoring using multichannel sensing signals on the wrist	62
A robust lateral shift free (LSF) electrothermal micromirror with flexible multimorph beams	60
A tip-coupled, two-cantilever, non-resonant microsystem for direct measurement of liquid viscosity	59
Stretchable and anti-impact iontronic pressure sensor with an ultrabroad linear range for biophysical monitoring and deep learning-aided knee rehabilitation	59
Modular micro-PCR system for the onsite rapid diagnosis of COVID-19	57
Highly integrated watch for noninvasive continual glucose monitoring	56
Microengineered platforms for characterizing the contractile function of in vitro cardiac models	56
Effects of nanopillars and surface coating on dynamic traction force	56
A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors	56
Infectious disease diagnostic device using rapid and efficient qPCR assays on a multi-target chip: idream-qPCR	55
Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method	55
Formation of sub-100-nm suspended nanowires with various materials using thermally adjusted electrospun nanofibers as templates	54
An ultra-stable MEMS resonator with ±14 ppb frequency stability realized by nonlinearity-mediated drift suppression	53
Freestanding region-responsive bilayer for functional packaging of ingestible devices	53
Root-inspired, template-confined additive printing for fabricating high-robust conformal electronics	51
High-performance flexible organic field effect transistors with print-based nanowires	51
Removal of the rate table: MEMS gyrocompass with virtual maytagging	49
6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes	48
Micro/nanofabrication of heat management materials for energy-efficient building facades	48
Simultaneous photocatalytic degradation and SERS detection of tetracycline with self-sustainable and recyclable ternary PI/TiO2/Ag flexible microfibers	47
An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement	46
Graphene MEMS and NEMS	45
Study of the protrusion of through-silicon vias in dual annealing-CMP processes for 3D integration	45
Self-template manufacturing of on-skin electrodes with 3D multi-channel structure for standard 3-limb-lead ECG suit	45
State-of-the-art micro- and nano-scale photonics research in Asia: devices, fabrication, manufacturing, and applications	44
A contamination-free and low-leakage-current Cu-TSV technology enabled by engineered double-sided processing	44
Microfluidic magnetic detection system combined with a DNA framework-mediated immune-sandwich assay for rapid and sensitive detection of tumor-derived exosomes	44
Advanced tools and methods for single-cell surgery	44
Nanoimprint-induced strain engineering of two-dimensional materials	43
Microfabrication of functional polyimide films and microstructures for flexible MEMS applications	43
Nucleic acid amplification tests in digital microfluidics: the promise of next-generation point-of-care diagnostics	42
3D printable and myoelectrically sensitive hydrogel for smart prosthetic hand control	41
3D nanoprinting of embryo microinjection needles with anti-clogging features	41
0.003°/h bias instability of honeycomb disk resonator gyroscope achieved by mode reversal combined mode deflection control method	41
Modeling gut neuro-epithelial connections in a novel microfluidic device	40
Low-cost optical sensors in electrified lab-on-a-disc platforms: liquid-phase boundary detection and automated diagnostics	40
Nanofabricated high turn-density spiral coils for on-chip electromagneto-optical conversion	40
Iontophoresis-driven microneedle patch for the active transdermal delivery of vaccine macromolecules	39
Outperforming piezoelectric ultrasonics with high-reliability single-membrane CMUT array elements	39
Patterning silver nanowire network via the Gibbs–Thomson effect	39
Metamaterial-enhanced near-field readout platform for passive microsensor tags	38
A C-shaped hinge for displacement magnification in MEMS rotational structures	38
Porous nanocomposites with enhanced intrinsic piezoresistive sensitivity for bioinspired multimodal tactile sensors	37
Fully automated in vivo screening system for multi-organ imaging and pharmaceutical evaluation	37
Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments	37
Micro 3D printing of a functional MEMS accelerometer	36

An interconnect-free micro-electromechanical 7-bit arithmetic device for multi-operand programmable computing	36
Polymer interdigitated pillar electrostatic (PIPE) actuators	35
Thin-film PMUTs: a review of over 40 years of research	35
A local de-insulation method and its application in neural microneedle array	35
Flexible wide-range multidimensional force sensors inspired by bones embedded in muscle	35
A piezoresistive-based 3-axial MEMS tactile sensor and integrated surgical forceps for gastrointestinal endoscopic minimally invasive surgery	35
Integrated silicon photonic MEMS	35
Study on polishing mechanisms of BEOL metal interconnects based on chemical and mechanical synergy	33
A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model	33
Ultra-low-crosstalk silicon switches driven thermally and electrically	32
The development of microfabricated solenoids with magnetic cores for micromagnetic neural stimulation	31
SPL and THD improvement of a cantilever-diaphragm piezoelectric MEMS loudspeaker with Double-S actuators	31
Wearable multichannel pulse condition monitoring system based on flexible pressure sensor arrays	31
Recent advances in microsystem approaches for mechanical characterization of soft biological tissues	31
Nanoscale plasma-activated aerosol generation for in situ surface pathogen disinfection	31
Ionic liquid multistate resistive switching characteristics in two terminal soft and flexible discrete channels for neuromorphic computing	31
Very-high-frequency probes for atomic force microscopy with silicon optomechanics	30
Power-free plasma separation based on negative magnetophoresis for rapid biochemical analysis	30
Sustainability inspired fabrication of next generation neurostimulation and cardiac rhythm management electrodes via reactive hierarchical surface restructuring	30
Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator	30
Microfluidic QCM enables ultrahigh Q-factor: a new paradigm for in-liquid gravimetric sensing	30
Droplet microreactor for high-throughput fluorescence-based measurements of single catalyst particle acidity	30
Highly conformable chip-in-foil implants for neural applications	30
An ultrafast-response and flexible humidity sensor for human respiration monitoring and noncontact safety warning	30
Multimodal MEMS vibration energy harvester with cascaded flexible and silicon beams for ultralow frequency response	30
Optimizing MEMS inertial switches for efficient event-based environmental interaction: motivation, approaches, and purposes	29
High-throughput and simultaneous inertial separation of tumor cells and clusters from malignant effusions using spiral-contraction-expansion channels	29
Portable visual and electrochemical detection of hydrogen peroxide release from living cells based on dual-functional Pt-Ni hydrogels	29
Optofluidic paper-based analytical device for discriminative detection of organic substances via digital color coding	28
Integration of multiple flexible electrodes for real-time detection of barrier formation with spatial resolution in a gut-on-chip system	28
The FTR dual-loop architecture based on SID–NLMS can achieve a threshold of 0.0001°/s and an ARW of 0.006°/√h for MEMS QMG	28
Revolutionary self-powered transducing mechanism for long-lasting and stable glucose monitoring: achieving selective and sensitive bacterial endospore germination in microengineered paper-based platfo	28
A stretchable frequency reconfigurable antenna controlled by compressive buckling for W-band applications	28
High-precision transdermal drug delivery enabled by a dual-pump parallel valveless piezoelectric micropump integrated with hollow microneedles	28
Length-based separation of Bacillus subtilis bacterial populations by viscoelastic microfluidics	28
Integrated microdevice with a windmill-like hole array for the clog-free, efficient, and self-mixing enrichment of circulating tumor cells	28
Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator	28
On the design and fabrication of nanoliter-volume hanging drop networks	27
Fabrication of crystalline submicro-to-nano carbon wire for achieving high current density and ultrastable current	27
Ultra-sensitive fluorescence-activated droplet single-cell sorting based on Tetramer-HCR-EvaGreen amplification	27
Correction: A spiral microfluidic device for rapid sorting, trapping, and long-term live imaging of Caenorhabditis elegans embryos	27
Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption	27
Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches	26
MEMS reservoir computing system with stiffness modulation for multi-scene data processing at the edge	26
Digital light processing 3D printing of flexible devices: actuators, sensors and energy devices	26
A high selectivity and low detection limit carbon monoxide sensor based on Au-GO/Co-ZnO composite material	26
Nanojet visualization and dark-field imaging of optically trapped vaterite capsules with endoscopic illumination	26
Multi-sized microelectrode array coupled with micro-electroporation for effective recording of intracellular action potential	25
High temperature heat flux sensor with ITO/In2O3 thermopile for extreme environment sensing	25
A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications	25
Zero-power infrared switch with two-phase microfluidic flow and a 2D material thermal isolation layer	25
Cellular shape micromachined actuator ribbons	24
A wearable, rapidly manufacturable, stability-enhancing microneedle patch for closed-loop diabetes management	24
Boron nitride-enabled printing of a highly sensitive and flexible iontronic pressure sensing system for spatial mapping	24
Achieving consistency of flexible surface acoustic wave sensors with artificial intelligence	24
A skin-integrated device for neck posture monitoring and correction	24
A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity	24
Four ribbons of double-layer graphene suspending masses for NEMS applications	24
A laser-engraved wearable gait recognition sensor system for exoskeleton robots	24
Highly stable integration of graphene Hall sensors on a microfluidic platform for magnetic sensing in whole blood	23
Vapor-induced porosity in graphene/PDMS: a scalable route to high-performance pressure sensors	23
Stretchable multifunctional wearable system for real-time and on-demand thermotherapy of arthritis	23
Large-scale high uniform optoelectronic synapses array for artificial visual neural network	23
Sensing-actuating integrated asymmetric multilayer hydrogel muscle for soft robotics	23
A double-layered liquid metal-based electrochemical sensing system on fabric as a wearable detector for glucose in sweat	23
Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates	23
Internal flow in sessile droplets induced by substrate oscillation: towards enhanced mixing and mass transfer in microfluidic systems	22
III-Nitride MEMS drum resonators on flexible metal substrates	22
Extracting mechanical quality factor and eliminating feedthrough using harmonics of thermal-piezoresistive micromechanical resonators	22
An implantable, wireless, battery-free system for tactile pressure sensing	22
Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging	22
Enhancing the rectification effect of hydrogel-based stretchable ionic diodes through incorporating cations with high valence	21
Mechanical memory operations in piezotransistive GaN microcantilevers using Au nanoparticle-enhanced photoacoustic excitation	21
Nanomaterials in PCR: exploring light-to-heat conversion mechanisms and microfluidic integration	21
Wafer-scale fabrication of solid-state nanopore array with a novel SpacerX process	21
Fully flexible implantable neural probes for electrophysiology recording and controlled neurochemical modulation	21
Correction: Development of a highly controlled system for large-area, directional printing of quasi-1D nanomaterials	20
Microdissection tools to generate organoids for modeling the tumor immune microenvironment	20
Self-sensing intelligent microrobots for noninvasive and wireless monitoring systems	20
piRT-IFC: Physics-informed real-time impedance flow cytometry for the characterization of cellular intrinsic electrical properties	20

Elasto-inertial focusing and particle migration in high aspect ratio microchannels for high-throughput separation	20
Fabrication of Mie-resonant silicon nanoparticles using laser annealing for surface-enhanced fluorescence spectroscopy	20
A tip-tilt-piston electrothermal micromirror array with integrated position sensors	20
Nanocomposite biosensor tracks honokiol-induced oxidative stress dynamics in 3D hydrogel-cultured lung cancer cells	20
Wireless ultrasonic power transfer using a pre-charged CMUT structure with a built-in charge storage capacitor	19
Dynamic tuning of terahertz atomic lattice vibration via cross-scale mode coupling to nanomechanical resonance in WSe2 membranes	19
Integrated microfluidic single-cell immunoblotting chip enables high-throughput isolation, enrichment and direct protein analysis of circulating tumor cells	19
Bifunctional nanoprobe for simultaneous detection of intracellular reactive oxygen species and temperature in single cells	19
High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate	19
Single-cell sorting based on secreted products for functionally defined cell therapies	19
Fluid drawing printing 3D conductive structures for flexible circuit manufacturing	19
A near-zero quiescent power breeze wake-up anemometer based on a rolling-bearing triboelectric nanogenerator	19
High-precision neural information detection of multiple brain regions in mice under different concentrations of isoflurane anesthesia based on microelectrode arrays	19
Exceptional points enhance sensing in silicon micromechanical resonators	19
Pico-washing: simultaneous liquid addition and removal for continuous-flow washing of microdroplets	18
A microsystem for in vivo wireless monitoring of plastic biliary stents using magnetoelastic sensors	18
Laser-upgraded coal tar for smart pavements in road and bridge monitoring applications	18
Designing magnetic microcapsules for cultivation and differentiation of stem cell spheroids	18
A nanonewton-scale biomimetic mechanosensor	18
A force measurement platform for a vitreoretinal surgical simulator using an artificial eye module integrated with a quartz crystal resonator	18
Deep learning for non-parameterized MEMS structural design	18
A handheld HIV detection platform using paper-based sample preparation and real-time isothermal amplification	18
Movable surface acoustic wave tweezers: a versatile toolbox for micromanipulation	17
Direct electrification of silicon microfluidics for electric field applications	17
Ultra-compact dual-channel integrated CO2 infrared gas sensor	17
Fabrication and modulation of flexible electromagnetic metamaterials	17
Electrospun carbon nanofibre-assisted patterning of metal oxide nanostructures	17
Twisted fiber microfluidics: a cutting-edge approach to 3D spiral devices	17
5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications	17
Atomic Nb-doping of WS2 for high-performance synaptic transistors in neuromorphic computing	17
Hydrogel electrodes with conductive and substrate-adhesive layers for noninvasive long-term EEG acquisition	17
Plasmonic–perovskite solar cells, light emitters, and sensors	17
MRI and CT compatible asymmetric bilayer hydrogel electrodes for EEG-based brain activity monitoring	17
Recent advances in bio-microsystem integration and Lab-on-PCB technology	17