Microsystems & Nanoengineering

Article	Citations
Portable and wearable self-powered systems based on emerging energy harvesting technology	195
Microtechnology-based methods for organoid models	147
Recent progress in silk fibroin-based flexible electronics	112
Viscoelastic microfluidics: progress and challenges	109
Wearable and flexible electrochemical sensors for sweat analysis: a review	103
Tumor-on-a-chip: from bioinspired design to biomedical application	99
Integrated sensing and delivery of oxygen for next-generation smart wound dressings	97
High-resolution two-photon polymerization: the most versatile technique for the fabrication of microneedle arrays	95
An electronic nose using a single graphene FET and machine learning for water, methanol, and ethanol	91
Optical spin-symmetry breaking for high-efficiency directional helicity-multiplexed metaholograms	81
Design and implementation of a jellyfish otolith-inspired MEMS vector hydrophone for low-frequency detection	77
Self-sustainable and recyclable ternary Au@Cu2O–Ag nanocomposites: application in ultrasensitive SERS detection and highly efficient photocatalysis of organic dyes under visible light	71
Thermal scanning probe lithography—a review	71
Real-time pressure mapping smart insole system based on a controllable vertical pore dielectric layer	71
Wearable multi-sensing double-chain thermoelectric generator	65
Moisture-resistant, stretchable NOx gas sensors based on laser-induced graphene for environmental monitoring and breath analysis	65
Microneedle-based skin patch for blood-free rapid diagnostic testing	64
Continuous monitoring of diabetes with an integrated microneedle biosensing device through 3D printing	60
A wireless, implantable optoelectrochemical probe for optogenetic stimulation and dopamine detection	59
Low sample volume origami-paper-based graphene-modified aptasensors for label-free electrochemical detection of cancer biomarker-EGFR	55
A microfluidic platform for cultivating ovarian cancer spheroids and testing their responses to chemotherapies	55
AlN MEMS filters with extremely high bandwidth widening capability	55
MEMS-actuated metasurface Alvarez lens	52
Smartphone-powered iontophoresis-microneedle array patch for controlled transdermal delivery	51
A new strategy for the fabrication of a flexible and highly sensitive capacitive pressure sensor	49

Hierarchical highly ordered SnO2 nanobowl branched ZnO nanowires for ultrasensitive and selective hydrogen sulfide gas sensing	46
Microfluidics in cardiovascular disease research: state of the art and future outlook	46
A metal-electrode-free, fully integrated, soft triboelectric sensor array for self-powered tactile sensing	46
Patient-derived pancreatic cancer-on-a-chip recapitulates the tumor microenvironment	45
Ultralow detection limit and ultrafast response/recovery of the H2 gas sensor based on Pd-doped rGO/ZnO-SnO2 from hydrothermal synthesis	44
On-chip integrated optical stretching and electrorotation enabling single-cell biophysical analysis	44
Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications	43
Sensitive capacitive pressure sensors based on graphene membrane arrays	43
Nanodroplet-mediated catheter-directed sonothrombolysis of retracted blood clots	42
Plasmonic–perovskite solar cells, light emitters, and sensors	42
Capacitive micromachined ultrasound transducers for intravascular ultrasound imaging	42
How single-cell immunology is benefiting from microfluidic technologies	41
Highly integrated watch for noninvasive continual glucose monitoring	41
Generation of tumor spheroids using a droplet-based microfluidic device for photothermal therapy	41
Miura-origami-inspired electret/triboelectric power generator for wearable energy harvesting with water-proof capability	40
Flexible, diamond-based microelectrodes fabricated using the diamond growth side for neural sensing	39
Neurodevelopmental impairment induced by prenatal valproic acid exposure shown with the human cortical organoid-on-a-chip model	39
Voltage-controlled NiO/ZnO p–n heterojunction diode: a new approach towards selective VOC sensing	39
MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies	39
Wireless, battery-free, and fully implantable electrical neurostimulation in freely moving rodents	38
A reusable PMMA/paper hybrid plug-and-play microfluidic device for an ultrasensitive immunoassay with a wide dynamic range	38
Novel diamond shuttle to deliver flexible neural probe with reduced tissue compression	37
Electrochemical micro-aptasensors for exosome detection based on hybridization chain reaction amplification	36
Raindrop energy-powered autonomous wireless hyetometer based on liquid–solid contact electrification	35
Design rules for dense and rapid Lissajous scanning	34
Multiple-patterning colloidal lithography-implemented scalable manufacturing of heat-tolerant titanium nitride broadband absorbers in the visible to near-infrared	34
A thin-film temperature sensor based on a flexible electrode and substrate	34
Capillary-force-induced collapse lithography for controlled plasmonic nanogap structures	34
Knudsen pumps: a review	34
Modular operation of microfluidic chips for highly parallelized cell culture and liquid dosing via a fluidic circuit board	33
Wearable multichannel pulse condition monitoring system based on flexible pressure sensor arrays	33
Heteronanostructural metal oxide-based gas microsensors	33
Programmable synchronization enhanced MEMS resonant accelerometer	32
An ultrafast-response and flexible humidity sensor for human respiration monitoring and noncontact safety warning	32
Development and optimization of thermal contrast amplification lateral flow immunoassays for ultrasensitive HIV p24 protein detection	32
Capabilities and limitations of 3D printed microserpentines and integrated 3D electrodes for stretchable and conformable biosensor applications	31
3D-Printed electrochemical sensor-integrated transwell systems	31
High-performance photodetector based on an interface engineering-assisted graphene/silicon Schottky junction	31
Phase-controlled field-effect micromixing using AC electroosmosis	31
DNA tetrahedron-mediated immune-sandwich assay for rapid and sensitive detection of PSA through a microfluidic electrochemical detection system	30
Biological receptor-inspired flexible artificial synapse based on ionic dynamics	30
An active self-cleaning surface system for photovoltaic modules using anisotropic ratchet conveyors and mechanical vibration	30
Stretchable and anti-impact iontronic pressure sensor with an ultrabroad linear range for biophysical monitoring and deep learning-aided knee rehabilitation	30
Directly addressable GaN-based nano-LED arrays: fabrication and electro-optical characterization	30
Generic sensor platform based on electro-responsive molecularly imprinted polymer nanoparticles (e-NanoMIPs)	29
A nanoforest-based humidity sensor for respiration monitoring	28
Infrared neural stimulation and inhibition using an implantable silicon photonic microdevice	28
Advanced tools and methods for single-cell surgery	27
Parylene photonics: a flexible, broadband optical waveguide platform with integrated micromirrors for biointerfaces	27
Wafer-scale transfer route for top–down III-nitride nanowire LED arrays based on the femtosecond laser lift-off technique	27

A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model	27
Wearable multimode sensor with a seamless integrated structure for recognition of different joint motion states with the assistance of a deep learning algorithm	27
Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration	27
Single-electron detection utilizing coupled nonlinear microresonators	26
Miura-ori structured flexible microneedle array electrode for biosignal recording	26
Acoustofluidics for simultaneous nanoparticle-based drug loading and exosome encapsulation	26
Miniaturization of mechanical actuators in skin-integrated electronics for haptic interfaces	25
Single-cell individualized electroporation with real-time impedance monitoring using a microelectrode array chip	25
A 3D-printed modular magnetic digital microfluidic architecture for on-demand bioanalysis	25
Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications	25
UV-LED projection photolithography for high-resolution functional photonic components	24
Covalently grafting first-generation PAMAM dendrimers onto MXenes with self-adsorbed AuNPs for use as a functional nanoplatform for highly sensitive electrochemical biosensing of cTnT	24
3D microfluidic gradient generator for combination antimicrobial susceptibility testing	24
A novel polymer-based nitrocellulose platform for implementing a multiplexed microfluidic paper-based enzyme-linked immunosorbent assay	24
Microfluidics for interrogating live intact tissues	24
Highly stretchable and reliable graphene oxide-reinforced liquid gating membranes for tunable gas/liquid transport	24
Spray-coated electret materials with enhanced stability in a harsh environment for an MEMS energy harvesting device	23
Integrated microfluidic single-cell immunoblotting chip enables high-throughput isolation, enrichment and direct protein analysis of circulating tumor cells	23
Self-powered ammonia synthesis under ambient conditions via N2 discharge driven by Tesla turbine triboelectric nanogenerators	23
Optimization of the fused deposition modeling-based fabrication process for polylactic acid microneedles	23
A modular microfluidic system based on a multilayered configuration to generate large-scale perfusable microvascular networks	23
Flexible and reconfigurable radio frequency electronics realized by high-throughput screen printing of vanadium dioxide switches	23
Oil-mediated high-throughput generation and sorting of water-in-water droplets	23
Micro 3D printing of a functional MEMS accelerometer	22
Recent advances in acoustofluidic separation technology in biology	22
A comparative review of artificial muscles for microsystem applications	22
Implantable intracortical microelectrodes: reviewing the present with a focus on the future	22
Electrochemical measurement of serotonin by Au-CNT electrodes fabricated on microporous cell culture membranes	22
Strong internal resonance in a nonlinear, asymmetric microbeam resonator	22
Acoustofluidic separation enables early diagnosis of traumatic brain injury based on circulating exosomes	22
Continuous roll-to-roll patterning of three-dimensional periodic nanostructures	22
Recent progress in three-terminal artificial synapses based on 2D materials: from mechanisms to applications	22
Investigation of cell mechanics using single-beam acoustic tweezers as a versatile tool for the diagnosis and treatment of highly invasive breast cancer cell lines: an in vitro study	21
Structural effects of 3D printing resolution on the gauge factor of microcrack-based strain gauges for health care monitoring	21
Si nanowire Bio-FET for electrical and label-free detection of cancer cell-derived exosomes	21
An ultrasensitive and stretchable strain sensor based on a microcrack structure for motion monitoring	21
Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications	21
Integrated silicon photonic MEMS	21
Microengineered platforms for characterizing the contractile function of in vitro cardiac models	21
Spatially resolved and multiplexed MicroRNA quantification from tissue using nanoliter well arrays	20
Self-cleaning semiconductor heterojunction substrate: ultrasensitive detection and photocatalytic degradation of organic pollutants for environmental remediation	20
Hydrodynamic constraints on the energy efficiency of droplet electricity generators	20
RapidET: a MEMS-based platform for label-free and rapid demarcation of tumors from normal breast biopsy tissues	20
Thin-film PMUTs: a review of over 40 years of research	20
Eigenmode operation of piezoelectric resonant gyroscopes	19
Micro/nanodevices for assessment and treatment in stomatology and ophthalmology	19
“Top-down” and “bottom-up” strategies for wafer-scaled miniaturized gas sensors design and fabrication	19
Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging	19
Anti-biofouling NH3 gas sensor based on reentrant thorny ZnO/graphene hybrid nanowalls	19
Label-free impedimetric immunosensor for point-of-care detection of COVID-19 antibodies	19
Length-based separation of Bacillus subtilis bacterial populations by viscoelastic microfluidics	18
Acoustic radiation-free surface phononic crystal resonator for in-liquid low-noise gravimetric detection	18
Triboelectric effect-modulated varifocal liquid lens	18
A silk-based self-adaptive flexible opto-electro neural probe	18
Touchable cell biophysics property recognition platforms enable multifunctional blood smart health care	18
Geometric structure design of passive label-free microfluidic systems for biological micro-object separation	18
Inkjet printing-based fabrication of microscale 3D ice structures	18
The electrochemical detection of bioterrorism agents: a review of the detection, diagnostics, and implementation of sensors in biosafety programs for Class A bioweapons	18
Picoliter droplet array based on bioinspired microholes for in situ single-cell analysis	18
Polarized holographic lithography system for high-uniformity microscale patterning with periodic tunability	17
Scalable batch fabrication of ultrathin flexible neural probes using a bioresorbable silk layer	17
Development of a highly controlled system for large-area, directional printing of quasi-1D nanomaterials	17
Thermally-curable nanocomposite printing for the scalable manufacturing of dielectric metasurfaces	17
3D-printing-assisted flexible pressure sensor with a concentric circle pattern and high sensitivity for health monitoring	17
Scalable nanolaminated SERS multiwell cell culture assay	17
Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology	16
Microfabrication of functional polyimide films and microstructures for flexible MEMS applications	16
A double-layered liquid metal-based electrochemical sensing system on fabric as a wearable detector for glucose in sweat	16
Dual-signal readout paper-based wearable biosensor with a 3D origami structure for multiplexed analyte detection in sweat	16
A flexible and wearable NO2 gas detection and early warning device based on a spraying process and an interdigital electrode at room temperature	16
Automated phenotyping of Caenorhabditis elegans embryos with a high-throughput-screening microfluidic platform	16
Nanovolcano microelectrode arrays: toward long-term on-demand registration of transmembrane action potentials by controlled electroporation	16
Single-cell sorting based on secreted products for functionally defined cell therapies	16
MRBLES 2.0: High-throughput generation of chemically functionalized spectrally and magnetically encoded hydrogel beads using a simple single-layer microfluidic device	16
Investigation of a complete squeeze-film damping model for MEMS devices	16
Distributed implantation of a flexible microelectrode array for neural recording	15
Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√Hz noise floor	15
Modular micro-PCR system for the onsite rapid diagnosis of COVID-19	15
0.79 ppm scale-factor nonlinearity whole-angle microshell gyroscope realized by real-time calibration of capacitive displacement detection	15
A 3D-printed magnetic digital microfluidic diagnostic platform for rapid colorimetric sensing of carbapenemase-producing Enterobacteriaceae	15

Sliding walls: a new paradigm for fluidic actuation and protocol implementation in microfluidics	15
Soft and flexible: core-shell ionic liquid resistive memory for electronic synapses	15
Low-hysteresis, pressure-insensitive, and transparent capacitive strain sensor for human activity monitoring	15
A 3D flexible neural interface based on a microfluidic interconnection cable capable of chemical delivery	15
A metallic anti-biofouling surface with a hierarchical topography containing nanostructures on curved micro-riblets	15
A monolithic single-chip point-of-care platform for metabolomic prostate cancer detection	14
Pyrrhotite Fe1−xS microcubes as a new anode material in potassium-ion batteries	14
Force microscopy of the Caenorhabditis elegans embryonic eggshell	14
Novel nondelay-based reservoir computing with a single micromechanical nonlinear resonator for high-efficiency information processing	14
Bioinspired microcone-array-based living biointerfaces: enhancing the anti-inflammatory effect and neuronal network formation	14
Origami-inspired folding assembly of dielectric elastomers for programmable soft robots	14
A dynamical approach to generate chaos in a micromechanical resonator	14
Propagating acoustic waves on a culture substrate regulate the directional collective cell migration	13
Flexible multifunctional platform based on piezoelectric acoustics for human–machine interaction and environmental perception	13
Progress of shrink polymer micro- and nanomanufacturing	13
Manipulation of single cells via a Stereo Acoustic Streaming Tunnel (SteAST)	13
Thermally-actuated microfluidic membrane valve for point-of-care applications	13
Double emulsion-pretreated microwell culture for the in vitro production of multicellular spheroids and their in situ analysis	13
100 pT/cm single-point MEMS magnetic gradiometer from a commercial accelerometer	13
Low motional impedance distributed Lamé mode resonators for high frequency timing applications	13
Scalable and automated CRISPR-based strain engineering using droplet microfluidics	13
Droplet digital microfluidic system for screening filamentous fungi based on enzymatic activity	13
Fusing MEMS technology with lab-on-chip: nanoliter-scale silicon microcavity arrays for digital DNA quantification and multiplex testing	13
A Rubik’s microfluidic cube	13
Handheld endomicroscope using a fiber-optic harmonograph enables real-time and in vivo confocal imaging of living cell morphology and capillary perfusion	13
An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement	12
Sacrificial layer-assisted nanoscale transfer printing	12
The development of microfabricated solenoids with magnetic cores for micromagnetic neural stimulation	12
Biomimetic cell-actuated artificial muscle with nanofibrous bundles	12
MyCTC chip: microfluidic-based drug screen with patient-derived tumour cells from liquid biopsies	12
Deep learning for non-parameterized MEMS structural design	12
A wide-field and high-resolution lensless compound eye microsystem for real-time target motion perception	12
A flexible protruding microelectrode array for neural interfacing in bioelectronic medicine	12
Very-high-frequency probes for atomic force microscopy with silicon optomechanics	11
Ionic liquid multistate resistive switching characteristics in two terminal soft and flexible discrete channels for neuromorphic computing	11
Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments	11
Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm	11
Acoustofluidic localization of sparse particles on a piezoelectric resonant sensor for nanogram-scale mass measurements	11
A two-stage amplified PZT sensor for monitoring lung and heart sounds in discharged pneumonia patients	11
Integrated impedance sensing of liquid sample plug flow enables automated high throughput NMR spectroscopy	11
Field-emission electron gun for a MEMS electron microscope	11
A microwell-based impedance sensor on an insertable microneedle for real-time in vivo cytokine detection	11
Monolithic integration of nanorod arrays on microfluidic chips for fast and sensitive one-step immunoassays	11
Gut-on-a-chip for exploring the transport mechanism of Hg(II)	11
Micromechanical mode-localized electric current sensor	11
Fabrication of freestanding Pt nanowires for use as thermal anemometry probes in turbulence measurements	11
Using intracellular plasmonics to characterize nanomorphology in human cells	11
3D-assembled microneedle ion sensor-based wearable system for the transdermal monitoring of physiological ion fluctuations	11
Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity	11
Fabrication and in vivo 2-photon microscopy validation of transparent PEDOT:PSS microelectrode arrays	10
Demonstration of tantalum as a structural material for MEMS thermal actuators	10
Hydrogel electrodes with conductive and substrate-adhesive layers for noninvasive long-term EEG acquisition	10
Design of a large-range rotary microgripper with freeform geometries using a genetic algorithm	10
Analysis of a Casimir-driven parametric amplifier with resilience to Casimir pull-in for MEMS single-point magnetic gradiometry	10
Assembly of multicomponent structures from hundreds of micron-scale building blocks using optical tweezers	10
A miniaturized mechanical antenna based on FEP/THV unipolar electrets for extremely low frequency transmission	10
Nanoscale plasma-activated aerosol generation for in situ surface pathogen disinfection	10
On-screen fingerprint sensor with optically and electrically tailored transparent electrode patterns for use on high-resolution mobile displays	10
A microfluidic approach for synchronous and nondestructive study of the permeability of multiple oocytes	10
Recent developments in multifunctional neural probes for simultaneous neural recording and modulation	10
Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties	10
Multilayer CVD graphene electrodes using a transfer-free process for the next generation of optically transparent and MRI-compatible neural interfaces	10
Microdevice for directional axodendritic connectivity between micro 3D neuronal cultures	10
Design and fabrication of a vigorous “cavitation-on-a-chip” device with a multiple microchannel configuration	10
Cardiomyocyte electrical-mechanical synchronized model for high-content, dose-quantitative and time-dependent drug assessment	10
Small footprint optoelectrodes using ring resonators for passive light localization	9
Mapping inertial migration in the cross section of a microfluidic channel with high-speed imaging	9
A flexible neural implant with ultrathin substrate for low-invasive brain–computer interface applications	9
Self-assembled microtubular electrodes for on-chip low-voltage electrophoretic manipulation of charged particles and macromolecules	9
Nanomaterial-based microelectrode arrays for in vitro bidirectional brain–computer interfaces: a review	9
Aerosol jet printing of piezoelectric surface acoustic wave thermometer	9
Low limit of detection of the AlGaN/GaN-based sensor by the Kelvin connection detection technique	9
A micropore array-based solid lift-off method for highly efficient and controllable cell alignment and spreading	9
Thin ceramic PZT dual- and multi-frequency pMUT arrays for photoacoustic imaging	9
Curved display based on programming origami tessellations	9
Iontophoresis-driven microneedle patch for the active transdermal delivery of vaccine macromolecules	9
Molecular bridge-mediated ultralow-power gas sensing	9
Highly efficient passive Tesla valves for microfluidic applications	9
Enhancing metabolic activity and differentiation potential in adipose mesenchymal stem cells via high-resolution surface-acoustic-wave contactless patterning	8
MEMS development focusing on collaboration using common facilities: a retrospective view and future directions	8
Assessment of the electrical penetration of cell membranes using four-frequency impedance cytometry	8
Polymer interdigitated pillar electrostatic (PIPE) actuators	8
A versatile acoustically active surface based on piezoelectric microstructures	8
Bubble entrapment during the recoil of an impacting droplet	8
High-speed identification of suspended carbon nanotubes using Raman spectroscopy and deep learning	8
Probing the subcellular nanostructure of engineered human cardiomyocytes in 3D tissue	8
A tactile and airflow motion sensor based on flexible double-layer magnetic cilia	8
Pico-washing: simultaneous liquid addition and removal for continuous-flow washing of microdroplets	8
DMD-based hyperspectral microscopy with flexible multiline parallel scanning	8
Gradient wettability induced by deterministically patterned nanostructures	8
An infrared photothermoelectric detector enabled by MXene and PEDOT:PSS composite for noncontact fingertip tracking	8
Predicting flows through microfluidic circuits with fluid walls	8
Sperm quality metrics were improved by a biomimetic microfluidic selection platform compared to swim-up methods	8
Flexible thermoelectric generator and energy management electronics powered by body heat	8
Modeling and measuring glucose diffusion and consumption by colorectal cancer spheroids in hanging drops using integrated biosensors	8