Microsystems & Nanoengineering

Article	Citations
Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties	524
A magnetically enabled simulation of microgravity represses the auxin response during early seed germination on a microfluidic platform	153
Vertical serpentine interconnect-enabled stretchable and curved electronics	148
Bone-inspired (GNEC/HAPAAm) hydrogel with fatigue-resistance for use in underwater robots and highly piezoresistive sensors	134
Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator	128
A new electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels	126
Ultra-small millimeter-wave filter chips based on high-K single-crystal lithium niobate	116
Paper battery powered iontophoresis microneedles patch for hypertrophic scar treatment	112
Acoustofluidics for simultaneous nanoparticle-based drug loading and exosome encapsulation	109
Correction of thermal airflow distortion in warpage measurements of microelectronic packaging structures via deep learning-based digital image correlation	102
Electromechanically reconfigurable plasmonic photodetector with a distinct shift in resonant wavelength	101
SV-SAW RF filters based on low-cost 128°Y LiNbO3/SiO2/poly-Si/Si substrate for 6G cmWave wireless communications	100
Self-synchronization of reinjected droplets for high-efficiency droplet pairing and merging	99
Review for optical metalens based on metasurfaces: fabrication and applications	99
A programmable magnetic digital microfluidic platform integrated with electrochemical detection system	97
Multifocal skull-compensated transcranial focused ultrasound system for neuromodulation applications based on acoustic holography	97
PEDOT:PSS-based bioelectronics for brain monitoring and modulation	96
Moisture-resistant, stretchable NOx gas sensors based on laser-induced graphene for environmental monitoring and breath analysis	96
Enhanced sensitivity in nonlinear parity-time symmetric silicon micromechanical resonators	78
Stable manipulating objects with unknown surface morphology via integration of magnetic artificial muscle and adhesive structures	77
A robust lateral shift free (LSF) electrothermal micromirror with flexible multimorph beams	76
A tip-coupled, two-cantilever, non-resonant microsystem for direct measurement of liquid viscosity	76
Effects of nanopillars and surface coating on dynamic traction force	73
Critical aspects of droplet digital reverse transcription loop-mediated isothermal amplification (ddRT-LAMP) for viral pathogens detection	73
A wireless self-decoupling scheme for multimodal sensing	69

Experimental measurement and numerical modeling of deformation behavior of breast cancer cells passing through constricted microfluidic channels	67
A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging	67
Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging	67
C-MEMS-derived glassy carbon electrochemical biosensors for rapid detection of SARS-CoV-2 spike protein	64
Nonlinear restructuring of patterned thin films by residual stress engineering into out-of-plane wavy-shaped electrostatic microactuators for high-performance radio-frequency switches	64
Ultra-resolution scalable microprinting	63
Modular micro-PCR system for the onsite rapid diagnosis of COVID-19	62
How channel elasticity enhances and directs flow in dendritic microfluidic networks	62
Nonlinear distortion of nonreciprocal transmission in parity-time-symmetric silicon micromechanical resonators	61
4D-printed intelligent reflecting surface with improved beam resolution via both phase modulation and space modulation	61
Highly integrated watch for noninvasive continual glucose monitoring	60
A new method of continuous blood pressure monitoring using multichannel sensing signals on the wrist	59
Microengineered platforms for characterizing the contractile function of in vitro cardiac models	58
Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams	57
A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors	55
Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method	54
Infectious disease diagnostic device using rapid and efficient qPCR assays on a multi-target chip: idream-qPCR	54
An ultra-stable MEMS resonator with ±14 ppb frequency stability realized by nonlinearity-mediated drift suppression	53
Freestanding region-responsive bilayer for functional packaging of ingestible devices	51
Root-inspired, template-confined additive printing for fabricating high-robust conformal electronics	50
State-of-the-art micro- and nano-scale photonics research in Asia: devices, fabrication, manufacturing, and applications	50
An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement	49
Alleviating optical pumping inhomogeneity using a polarization-encoded metasurface in NMR co-magnetometers	49
Nanoimprint-induced strain engineering of two-dimensional materials	48
Self-template manufacturing of on-skin electrodes with 3D multi-channel structure for standard 3-limb-lead ECG suit	48
6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes	48
Study of the protrusion of through-silicon vias in dual annealing-CMP processes for 3D integration	48
Removal of the rate table: MEMS gyrocompass with virtual maytagging	47
Microfluidic magnetic detection system combined with a DNA framework-mediated immune-sandwich assay for rapid and sensitive detection of tumor-derived exosomes	46
Micro/nanofabrication of heat management materials for energy-efficient building facades	46
Formation of sub-100-nm suspended nanowires with various materials using thermally adjusted electrospun nanofibers as templates	46
High-performance flexible organic field effect transistors with print-based nanowires	46
Advanced tools and methods for single-cell surgery	45
A contamination-free and low-leakage-current Cu-TSV technology enabled by engineered double-sided processing	45
Nanofabricated high turn-density spiral coils for on-chip electromagneto-optical conversion	44
Simultaneous photocatalytic degradation and SERS detection of tetracycline with self-sustainable and recyclable ternary PI/TiO2/Ag flexible microfibers	44
0.003°/h bias instability of honeycomb disk resonator gyroscope achieved by mode reversal combined mode deflection control method	44
Microfabrication of functional polyimide films and microstructures for flexible MEMS applications	44
Graphene MEMS and NEMS	44
Patterning silver nanowire network via the Gibbs–Thomson effect	42
Low-cost optical sensors in electrified lab-on-a-disc platforms: liquid-phase boundary detection and automated diagnostics	42
Outperforming piezoelectric ultrasonics with high-reliability single-membrane CMUT array elements	41
Fully automated in vivo screening system for multi-organ imaging and pharmaceutical evaluation	41
A C-shaped hinge for displacement magnification in MEMS rotational structures	41
Iontophoresis-driven microneedle patch for the active transdermal delivery of vaccine macromolecules	40
Metamaterial-enhanced near-field readout platform for passive microsensor tags	40
Ultra-sensitive ethanol detection using a chemiresistive SnO2 thin-film gas sensor functionalized with RuO2 nanosheets	40
Metalens for passive generation of a droplet Bessel beam	39
Modeling gut neuro-epithelial connections in a novel microfluidic device	38
Study on polishing mechanisms of BEOL metal interconnects based on chemical and mechanical synergy	38

3D nanoprinting of embryo microinjection needles with anti-clogging features	38
3D printable and myoelectrically sensitive hydrogel for smart prosthetic hand control	38
Nucleic acid amplification tests in digital microfluidics: the promise of next-generation point-of-care diagnostics	38
Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments	38
A textile-based alignment-free electrophysiological sensing sleeve for comprehensive cardiovascular monitoring	38
Sideband injection locking of microwave frequency combs in a superconducting optomechanical circuit	37
High-throughput chip-calorimeter using a Bi2Te3 thermopile heat flux sensor array	37
Ultra-low-crosstalk silicon switches driven thermally and electrically	36
Polymer interdigitated pillar electrostatic (PIPE) actuators	36
Recent advances in microsystem approaches for mechanical characterization of soft biological tissues	36
Flexible wide-range multidimensional force sensors inspired by bones embedded in muscle	35
A local de-insulation method and its application in neural microneedle array	35
A piezoresistive-based 3-axial MEMS tactile sensor and integrated surgical forceps for gastrointestinal endoscopic minimally invasive surgery	34
An interconnect-free micro-electromechanical 7-bit arithmetic device for multi-operand programmable computing	34
Nanoscale plasma-activated aerosol generation for in situ surface pathogen disinfection	34
Thin-film PMUTs: a review of over 40 years of research	33
Wearable multichannel pulse condition monitoring system based on flexible pressure sensor arrays	33
Integrated silicon photonic MEMS	33
Porous nanocomposites with enhanced intrinsic piezoresistive sensitivity for bioinspired multimodal tactile sensors	33
SPL and THD improvement of a cantilever-diaphragm piezoelectric MEMS loudspeaker with Double-S actuators	33
High-precision transdermal drug delivery enabled by a dual-pump parallel valveless piezoelectric micropump integrated with hollow microneedles	32
A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model	32
Ionic liquid multistate resistive switching characteristics in two terminal soft and flexible discrete channels for neuromorphic computing	32
Optofluidic paper-based analytical device for discriminative detection of organic substances via digital color coding	32
Skin-conformal PMN-PT ultrasonic sensor for cuffless blood pressure sensing via eutectic solder integration	32
Microfluidic QCM enables ultrahigh Q-factor: a new paradigm for in-liquid gravimetric sensing	32
Micro 3D printing of a functional MEMS accelerometer	32
Droplet microreactor for high-throughput fluorescence-based measurements of single catalyst particle acidity	31
Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator	31
Recent advances in spike-based neural coding for tactile perception	31
Integrated microdevice with a windmill-like hole array for the clog-free, efficient, and self-mixing enrichment of circulating tumor cells	31
Revolutionary self-powered transducing mechanism for long-lasting and stable glucose monitoring: achieving selective and sensitive bacterial endospore germination in microengineered paper-based platfo	31
Very-high-frequency probes for atomic force microscopy with silicon optomechanics	30
A stretchable frequency reconfigurable antenna controlled by compressive buckling for W-band applications	30
Highly conformable chip-in-foil implants for neural applications	30
Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator	30
Power-free plasma separation based on negative magnetophoresis for rapid biochemical analysis	30
Sustainability inspired fabrication of next generation neurostimulation and cardiac rhythm management electrodes via reactive hierarchical surface restructuring	30
Integration of multiple flexible electrodes for real-time detection of barrier formation with spatial resolution in a gut-on-chip system	30
Multimodal MEMS vibration energy harvester with cascaded flexible and silicon beams for ultralow frequency response	29
Length-based separation of Bacillus subtilis bacterial populations by viscoelastic microfluidics	29
The FTR dual-loop architecture based on SID–NLMS can achieve a threshold of 0.0001°/s and an ARW of 0.006°/√h for MEMS QMG	29
High-throughput and simultaneous inertial separation of tumor cells and clusters from malignant effusions using spiral-contraction-expansion channels	29
Portable visual and electrochemical detection of hydrogen peroxide release from living cells based on dual-functional Pt-Ni hydrogels	29
Optimizing MEMS inertial switches for efficient event-based environmental interaction: motivation, approaches, and purposes	29
On the design and fabrication of nanoliter-volume hanging drop networks	28
Correction: A spiral microfluidic device for rapid sorting, trapping, and long-term live imaging of Caenorhabditis elegans embryos	28
Fabrication of crystalline submicro-to-nano carbon wire for achieving high current density and ultrastable current	28
Zero-power infrared switch with two-phase microfluidic flow and a 2D material thermal isolation layer	27
Nanojet visualization and dark-field imaging of optically trapped vaterite capsules with endoscopic illumination	27
Multi-sized microelectrode array coupled with micro-electroporation for effective recording of intracellular action potential	27
MEMS reservoir computing system with stiffness modulation for multi-scene data processing at the edge	27
A wearable, rapidly manufacturable, stability-enhancing microneedle patch for closed-loop diabetes management	27
A laser-engraved wearable gait recognition sensor system for exoskeleton robots	26
A high selectivity and low detection limit carbon monoxide sensor based on Au-GO/Co-ZnO composite material	26
Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches	26
Boron nitride-enabled printing of a highly sensitive and flexible iontronic pressure sensing system for spatial mapping	25
Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption	25
Four ribbons of double-layer graphene suspending masses for NEMS applications	25
High temperature heat flux sensor with ITO/In2O3 thermopile for extreme environment sensing	25
A skin-integrated device for neck posture monitoring and correction	25
Ultra-sensitive fluorescence-activated droplet single-cell sorting based on Tetramer-HCR-EvaGreen amplification	25
A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications	24
Digital light processing 3D printing of flexible devices: actuators, sensors and energy devices	24
Cellular shape micromachined actuator ribbons	24
A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity	24
Extracting mechanical quality factor and eliminating feedthrough using harmonics of thermal-piezoresistive micromechanical resonators	24
Stretchable multifunctional wearable system for real-time and on-demand thermotherapy of arthritis	23
An implantable, wireless, battery-free system for tactile pressure sensing	23
Enhancing the rectification effect of hydrogel-based stretchable ionic diodes through incorporating cations with high valence	23
A double-layered liquid metal-based electrochemical sensing system on fabric as a wearable detector for glucose in sweat	23
Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging	23
Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates	23
III-Nitride MEMS drum resonators on flexible metal substrates	23
Nanomaterials in PCR: exploring light-to-heat conversion mechanisms and microfluidic integration	22
Large-scale high uniform optoelectronic synapses array for artificial visual neural network	22
A hot-humid tolerant and antibacterial MXene-based hydrogel sensor for real-time cardiorespiratory monitoring in endurance sports	22
Fully flexible implantable neural probes for electrophysiology recording and controlled neurochemical modulation	22
Vapor-induced porosity in graphene/PDMS: a scalable route to high-performance pressure sensors	22
Sensing-actuating integrated asymmetric multilayer hydrogel muscle for soft robotics	22

Highly stable integration of graphene Hall sensors on a microfluidic platform for magnetic sensing in whole blood	22
Mechanical memory operations in piezotransistive GaN microcantilevers using Au nanoparticle-enhanced photoacoustic excitation	21
Achieving consistency of flexible surface acoustic wave sensors with artificial intelligence	21
Fluid drawing printing 3D conductive structures for flexible circuit manufacturing	21
Wafer-scale fabrication of solid-state nanopore array with a novel SpacerX process	21
Nanocomposite biosensor tracks honokiol-induced oxidative stress dynamics in 3D hydrogel-cultured lung cancer cells	21
Internal flow in sessile droplets induced by substrate oscillation: towards enhanced mixing and mass transfer in microfluidic systems	21
AI‑driven photonic noses: from conventional sensors to cloud‑to-edge intelligent microsystems	20
Fabrication of Mie-resonant silicon nanoparticles using laser annealing for surface-enhanced fluorescence spectroscopy	20
Integrated microfluidic single-cell immunoblotting chip enables high-throughput isolation, enrichment and direct protein analysis of circulating tumor cells	20
High-precision neural information detection of multiple brain regions in mice under different concentrations of isoflurane anesthesia based on microelectrode arrays	19
Self-sensing intelligent microrobots for noninvasive and wireless monitoring systems	19
Dynamic tuning of terahertz atomic lattice vibration via cross-scale mode coupling to nanomechanical resonance in WSe2 membranes	19
Exceptional points enhance sensing in silicon micromechanical resonators	19
Microdissection tools to generate organoids for modeling the tumor immune microenvironment	19
Wireless ultrasonic power transfer using a pre-charged CMUT structure with a built-in charge storage capacitor	19
A tip-tilt-piston electrothermal micromirror array with integrated position sensors	19
Single-cell sorting based on secreted products for functionally defined cell therapies	19
High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate	19
A force measurement platform for a vitreoretinal surgical simulator using an artificial eye module integrated with a quartz crystal resonator	19
A near-zero quiescent power breeze wake-up anemometer based on a rolling-bearing triboelectric nanogenerator	19
Bifunctional nanoprobe for simultaneous detection of intracellular reactive oxygen species and temperature in single cells	19
Elasto-inertial focusing and particle migration in high aspect ratio microchannels for high-throughput separation	19
piRT-IFC: Physics-informed real-time impedance flow cytometry for the characterization of cellular intrinsic electrical properties	19
Pico-washing: simultaneous liquid addition and removal for continuous-flow washing of microdroplets	19
Atomic Nb-doping of WS2 for high-performance synaptic transistors in neuromorphic computing	18
Twisted fiber microfluidics: a cutting-edge approach to 3D spiral devices	18
Laser-upgraded coal tar for smart pavements in road and bridge monitoring applications	18
Designing magnetic microcapsules for cultivation and differentiation of stem cell spheroids	18
A nanonewton-scale biomimetic mechanosensor	18
Movable surface acoustic wave tweezers: a versatile toolbox for micromanipulation	18
Recent advances in bio-microsystem integration and Lab-on-PCB technology	18
Direct electrification of silicon microfluidics for electric field applications	18
MRI and CT compatible asymmetric bilayer hydrogel electrodes for EEG-based brain activity monitoring	18
Deep learning for non-parameterized MEMS structural design	18
Plasmonic–perovskite solar cells, light emitters, and sensors	18
Fabrication and modulation of flexible electromagnetic metamaterials	18
A handheld HIV detection platform using paper-based sample preparation and real-time isothermal amplification	18
Gate-tunable flexible photodetector with wavelength-selective response based on asymmetric 2D heterostructures	18
Widely accessible method for 3D microflow mapping at high spatial and temporal resolutions	18
A microsystem for in vivo wireless monitoring of plastic biliary stents using magnetoelastic sensors	18
Electrospun carbon nanofibre-assisted patterning of metal oxide nanostructures	18
Ultra-compact dual-channel integrated CO2 infrared gas sensor	18
Multimodal response characteristics of convective liquid metal sensitive layers in flexible pressure sensor	17
Chip-scale optical airflow sensor	17
Component library creation and pixel array generation with micromilled droplet microfluidics	17
Direct and residue-free patterning of sub-5 µm CVD monolayer graphene with highly enhanced conductivity and pattern fidelity	17
Sperm quality metrics were improved by a biomimetic microfluidic selection platform compared to swim-up methods	17
Correction: Enabling direct microcalorimetric measurement of metabolic activity and exothermic reactions onto microfluidic platforms via heat flux sensor integration	17
Mechanically robust and self-cleanable encapsulated metalens via spin-on-glass packaging	17
Controllable-pore porous microneedles for high-speed extraction and biomarker detection of interstitial fluid	17
A bioinspired bubble removal method in microchannels based on angiosperm xylem embolism repair	17
Fast frequency relocking for synchronization enhanced resonant accelerometer	17
Hydrogel electrodes with conductive and substrate-adhesive layers for noninvasive long-term EEG acquisition	17
5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications	17
Aerosol jet printing of surface acoustic wave microfluidic devices	17
A nonlinear stiffness softening mechanism for low-bias, high-sensitivity MEMS accelerometers with extended dynamic range	17
Toolkit for integrating millimeter-sized microfluidic biomedical devices with multiple membranes and electrodes	17
RBFNN-Based PPy/GaN sensor array with wide dynamic range and sub-ppb detection for accurate ammonia identification in human exhaled breath	16
Dual-signal readout paper-based wearable biosensor with a 3D origami structure for multiplexed analyte detection in sweat	16
Dual-functional Cu2O/g-C3N4 heterojunctions: a high-performance SERS sensor and photocatalytic self-cleaning system for water pollution detection and remediation	16
Force balanced chip scale gravimeter achieving record low self noise of 0.1 μGal/√Hz	16
Triboelectric nanogenerator based on silane-coupled LTA/PDMS for physiological monitoring and biomechanical energy harvesting	16
A microgripper based on electrothermal Al–SiO2 bimorphs	16
A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator	16
Diffusion-free valve for preprogrammed immunoassay with capillary microfluidics	16
Thermal property evaluation of a 2.5D integration method with device level microchannel direct cooling for a high-power GaN HEMT device	15
Nonvolatile chirality switching in terahertz chalcogenide metasurfaces	15
Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators	15
Monolithically integrated triaxial high-performance high-g accelerometer for high shock vibration signal measurements	15
Uncooled, broadband terahertz bolometers using SOI MEMS beam resonators with piezoresistive readout	15
An underwater vest containing an antioxidant MXene hydrogel for sensitive recognition of fish locomotion	15
A new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors	15
Surface-engineered porous MXene-elastomer composites-based ultra-sensitive pressure sensor assembled via electrostatic interaction for human-machine interface	15
A MEMS electro-mechanical co-optimization platform featuring freeform geometry optimization based on a genetic algorithm	15
Switch mode capacitive pressure sensors	15
Tight focusing of fractional-order topological charge vector beams by cascading metamaterials and metalens	15
Manipulation of single cells via a Stereo Acoustic Streaming Tunnel (SteAST)	15
One-step generation of luminescent core-shell microspheres for cell encapsulation via pulsed operation in centrifugal microfluidics	15
An enhanced-performance multisensing progressive cellular μGC: design advances and blind test results	15
Harnessing exceptional points for ultrahigh sensitive acoustic wave sensing	15
Engineering in vitro vascular microsystems	15
Stable diffusion gradients in microfluidic conduits bounded by fluid walls	15
Evaluating the efficacy and cardiotoxicity of EGFR-TKI AC0010 with a novel multifunctional biosensor	15
DropLab: an automated magnetic digital microfluidic platform for sample-to-answer point-of-care testing—development and application to quantitative immunodiagnostics	14
Artificial-intelligence-assisted mass fabrication of nanocantilevers from randomly positioned single carbon nanotubes	14
Portable dielectrophoresis for biology: ADEPT facilitates cell trapping, separation, and interactions	14
An integrated microfluidic platform for nucleic acid testing	14
Unraveling the nature of sensing in electrostatic MEMS gas sensors	14
A micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes	14
Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping	14
An in vitro demonstration of a passive, acoustic metamaterial as a temperature sensor with mK resolution for implantable applications	14
A passive wireless surface acoustic wave (SAW) sensor system for detecting warfare agents based on fluoroalcohol polysiloxane film	14
Electrostatic generator enhancements for powering IoT nodes via efficient energy management	14
A tactile and airflow motion sensor based on flexible double-layer magnetic cilia	14