Microsystems & Nanoengineering

Article	Citations
Correction of thermal airflow distortion in warpage measurements of microelectronic packaging structures via deep learning-based digital image correlation	342
Spatiotemporal dynamics of nanowire growth in a microfluidic reactor	178
A magnetically enabled simulation of microgravity represses the auxin response during early seed germination on a microfluidic platform	170
A new electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels	149
Paper battery powered iontophoresis microneedles patch for hypertrophic scar treatment	119
Electromechanically reconfigurable plasmonic photodetector with a distinct shift in resonant wavelength	108
Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator	103
Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties	102
Bone-inspired (GNEC/HAPAAm) hydrogel with fatigue-resistance for use in underwater robots and highly piezoresistive sensors	92
Vertical serpentine interconnect-enabled stretchable and curved electronics	86
Moisture-resistant, stretchable NOx gas sensors based on laser-induced graphene for environmental monitoring and breath analysis	81
Acoustofluidics for simultaneous nanoparticle-based drug loading and exosome encapsulation	80
Self-synchronization of reinjected droplets for high-efficiency droplet pairing and merging	75
Multifocal skull-compensated transcranial focused ultrasound system for neuromodulation applications based on acoustic holography	73
Experimental measurement and numerical modeling of deformation behavior of breast cancer cells passing through constricted microfluidic channels	72
A robust lateral shift free (LSF) electrothermal micromirror with flexible multimorph beams	72
A new method of continuous blood pressure monitoring using multichannel sensing signals on the wrist	68
C-MEMS-derived glassy carbon electrochemical biosensors for rapid detection of SARS-CoV-2 spike protein	65
A tip-coupled, two-cantilever, non-resonant microsystem for direct measurement of liquid viscosity	62
Effects of nanopillars and surface coating on dynamic traction force	60
A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging	60
4D-printed intelligent reflecting surface with improved beam resolution via both phase modulation and space modulation	59
Nonlinear restructuring of patterned thin films by residual stress engineering into out-of-plane wavy-shaped electrostatic microactuators for high-performance radio-frequency switches	59
Ultra-resolution scalable microprinting	58
Modular micro-PCR system for the onsite rapid diagnosis of COVID-19	58

A thin-film temperature sensor based on a flexible electrode and substrate	58
Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams	57
Highly integrated watch for noninvasive continual glucose monitoring	57
Microengineered platforms for characterizing the contractile function of in vitro cardiac models	56
Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging	56
Stretchable and anti-impact iontronic pressure sensor with an ultrabroad linear range for biophysical monitoring and deep learning-aided knee rehabilitation	53
Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method	52
Correction to: Low limit of detection of the AlGaN/GaN-based sensor by the Kelvin connection detection technique	52
Self-template manufacturing of on-skin electrodes with 3D multi-channel structure for standard 3-limb-lead ECG suit	52
Formation of sub-100-nm suspended nanowires with various materials using thermally adjusted electrospun nanofibers as templates	51
6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes	50
A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors	50
Micro/nanofabrication of heat management materials for energy-efficient building facades	49
Advanced tools and methods for single-cell surgery	49
High-performance flexible organic field effect transistors with print-based nanowires	48
Microfluidic magnetic detection system combined with a DNA framework-mediated immune-sandwich assay for rapid and sensitive detection of tumor-derived exosomes	46
Graphene MEMS and NEMS	46
Freestanding region-responsive bilayer for functional packaging of ingestible devices	45
Root-inspired, template-confined additive printing for fabricating high-robust conformal electronics	45
Study of the protrusion of through-silicon vias in dual annealing-CMP processes for 3D integration	44
Removal of the rate table: MEMS gyrocompass with virtual maytagging	44
Microfabrication of functional polyimide films and microstructures for flexible MEMS applications	43
State-of-the-art micro- and nano-scale photonics research in Asia: devices, fabrication, manufacturing, and applications	43
Simultaneous photocatalytic degradation and SERS detection of tetracycline with self-sustainable and recyclable ternary PI/TiO2/Ag flexible microfibers	42
An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement	42
Nanoimprint-induced strain engineering of two-dimensional materials	41
Outperforming piezoelectric ultrasonics with high-reliability single-membrane CMUT array elements	39
A C-shaped hinge for displacement magnification in MEMS rotational structures	39
3D printable and myoelectrically sensitive hydrogel for smart prosthetic hand control	39
Nanofabricated high turn-density spiral coils for on-chip electromagneto-optical conversion	39
Low-cost optical sensors in electrified lab-on-a-disc platforms: liquid-phase boundary detection and automated diagnostics	38
Fully automated in vivo screening system for multi-organ imaging and pharmaceutical evaluation	37
Modeling gut neuro-epithelial connections in a novel microfluidic device	37
Metamaterial-enhanced near-field readout platform for passive microsensor tags	37
An interconnect-free micro-electromechanical 7-bit arithmetic device for multi-operand programmable computing	36
Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments	36
Iontophoresis-driven microneedle patch for the active transdermal delivery of vaccine macromolecules	36
Polymer interdigitated pillar electrostatic (PIPE) actuators	35
Ionic liquid multistate resistive switching characteristics in two terminal soft and flexible discrete channels for neuromorphic computing	34
Micro 3D printing of a functional MEMS accelerometer	34
The development of microfabricated solenoids with magnetic cores for micromagnetic neural stimulation	34
A piezoresistive-based 3-axial MEMS tactile sensor and integrated surgical forceps for gastrointestinal endoscopic minimally invasive surgery	34
A 3D-printed magnetic digital microfluidic diagnostic platform for rapid colorimetric sensing of carbapenemase-producing Enterobacteriaceae	34
Recent advances in microsystem approaches for mechanical characterization of soft biological tissues	33
Ultra-low-crosstalk silicon switches driven thermally and electrically	33
Wearable multichannel pulse condition monitoring system based on flexible pressure sensor arrays	33
Porous nanocomposites with enhanced intrinsic piezoresistive sensitivity for bioinspired multimodal tactile sensors	32
Thin-film PMUTs: a review of over 40 years of research	32
Flexible wide-range multidimensional force sensors inspired by bones embedded in muscle	31
Wireless, battery-free, and fully implantable electrical neurostimulation in freely moving rodents	31

Nanoscale plasma-activated aerosol generation for in situ surface pathogen disinfection	30
A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model	29
Integrated silicon photonic MEMS	28
Microfluidic QCM enables ultrahigh Q-factor: a new paradigm for in-liquid gravimetric sensing	28
Multimodal MEMS vibration energy harvester with cascaded flexible and silicon beams for ultralow frequency response	27
Power-free plasma separation based on negative magnetophoresis for rapid biochemical analysis	27
Very-high-frequency probes for atomic force microscopy with silicon optomechanics	27
Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator	27
Revolutionary self-powered transducing mechanism for long-lasting and stable glucose monitoring: achieving selective and sensitive bacterial endospore germination in microengineered paper-based platfo	27
Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator	27
Optofluidic paper-based analytical device for discriminative detection of organic substances via digital color coding	27
Sustainability inspired fabrication of next generation neurostimulation and cardiac rhythm management electrodes via reactive hierarchical surface restructuring	26
MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies	25
A skin-integrated device for neck posture monitoring and correction	25
Integration of multiple flexible electrodes for real-time detection of barrier formation with spatial resolution in a gut-on-chip system	25
High-throughput and simultaneous inertial separation of tumor cells and clusters from malignant effusions using spiral-contraction-expansion channels	25
Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption	25
Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches	25
An ultrafast-response and flexible humidity sensor for human respiration monitoring and noncontact safety warning	25
Length-based separation of Bacillus subtilis bacterial populations by viscoelastic microfluidics	25
Portable visual and electrochemical detection of hydrogen peroxide release from living cells based on dual-functional Pt-Ni hydrogels	25
On the design and fabrication of nanoliter-volume hanging drop networks	25
Highly conformable chip-in-foil implants for neural applications	25
Integrated microdevice with a windmill-like hole array for the clog-free, efficient, and self-mixing enrichment of circulating tumor cells	25
Droplet microreactor for high-throughput fluorescence-based measurements of single catalyst particle acidity	25
Four ribbons of double-layer graphene suspending masses for NEMS applications	24
Ultra-sensitive fluorescence-activated droplet single-cell sorting based on Tetramer-HCR-EvaGreen amplification	24
A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications	24
Correction: A spiral microfluidic device for rapid sorting, trapping, and long-term live imaging of Caenorhabditis elegans embryos	24
High temperature heat flux sensor with ITO/In2O3 thermopile for extreme environment sensing	24
Fabrication of crystalline submicro-to-nano carbon wire for achieving high current density and ultrastable current	23
Optimization of the fused deposition modeling-based fabrication process for polylactic acid microneedles	23
A laser-engraved wearable gait recognition sensor system for exoskeleton robots	23
Assembly of multicomponent structures from hundreds of micron-scale building blocks using optical tweezers	23
A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity	23
Digital light processing 3D printing of flexible devices: actuators, sensors and energy devices	22
Zero-power infrared switch with two-phase microfluidic flow and a 2D material thermal isolation layer	22
Boron nitride-enabled printing of a highly sensitive and flexible iontronic pressure sensing system for spatial mapping	22
MEMS reservoir computing system with stiffness modulation for multi-scene data processing at the edge	22
A wearable, rapidly manufacturable, stability-enhancing microneedle patch for closed-loop diabetes management	22
Extracting mechanical quality factor and eliminating feedthrough using harmonics of thermal-piezoresistive micromechanical resonators	21
Cellular shape micromachined actuator ribbons	21
Fully flexible implantable neural probes for electrophysiology recording and controlled neurochemical modulation	21
Highly stable integration of graphene Hall sensors on a microfluidic platform for magnetic sensing in whole blood	21
Sensing-actuating integrated asymmetric multilayer hydrogel muscle for soft robotics	21
An implantable, wireless, battery-free system for tactile pressure sensing	21
Surface-modified elastomeric nanofluidic devices for single nanoparticle trapping	21
Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates	20
A double-layered liquid metal-based electrochemical sensing system on fabric as a wearable detector for glucose in sweat	20
High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate	20
Mechanical memory operations in piezotransistive GaN microcantilevers using Au nanoparticle-enhanced photoacoustic excitation	20
Internal flow in sessile droplets induced by substrate oscillation: towards enhanced mixing and mass transfer in microfluidic systems	20
A tip-tilt-piston electrothermal micromirror array with integrated position sensors	20
Dynamic tuning of terahertz atomic lattice vibration via cross-scale mode coupling to nanomechanical resonance in WSe2 membranes	20
Large-scale high uniform optoelectronic synapses array for artificial visual neural network	20
Achieving consistency of flexible surface acoustic wave sensors with artificial intelligence	20
Fabrication of Mie-resonant silicon nanoparticles using laser annealing for surface-enhanced fluorescence spectroscopy	20
Microdissection tools to generate organoids for modeling the tumor immune microenvironment	19
A near-zero quiescent power breeze wake-up anemometer based on a rolling-bearing triboelectric nanogenerator	19
piRT-IFC: Physics-informed real-time impedance flow cytometry for the characterization of cellular intrinsic electrical properties	19
Wireless ultrasonic power transfer using a pre-charged CMUT structure with a built-in charge storage capacitor	19
Exceptional points enhance sensing in silicon micromechanical resonators	19
Correction: Development of a highly controlled system for large-area, directional printing of quasi-1D nanomaterials	19
Single-cell sorting based on secreted products for functionally defined cell therapies	19
Bifunctional nanoprobe for simultaneous detection of intracellular reactive oxygen species and temperature in single cells	18
Self-sensing intelligent microrobots for noninvasive and wireless monitoring systems	18
A handheld HIV detection platform using paper-based sample preparation and real-time isothermal amplification	18
5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications	18
Integrated microfluidic single-cell immunoblotting chip enables high-throughput isolation, enrichment and direct protein analysis of circulating tumor cells	18
Pico-washing: simultaneous liquid addition and removal for continuous-flow washing of microdroplets	18
Widely accessible method for 3D microflow mapping at high spatial and temporal resolutions	18
Elasto-inertial focusing and particle migration in high aspect ratio microchannels for high-throughput separation	18
A microsystem for in vivo wireless monitoring of plastic biliary stents using magnetoelastic sensors	18
Movable surface acoustic wave tweezers: a versatile toolbox for micromanipulation	18
Deep learning for non-parameterized MEMS structural design	17
Twisted fiber microfluidics: a cutting-edge approach to 3D spiral devices	17
Thermally-actuated microfluidic membrane valve for point-of-care applications	17
A force measurement platform for a vitreoretinal surgical simulator using an artificial eye module integrated with a quartz crystal resonator	17
Ultra-compact dual-channel integrated CO2 infrared gas sensor	17
Atomic Nb-doping of WS2 for high-performance synaptic transistors in neuromorphic computing	17

Direct electrification of silicon microfluidics for electric field applications	17
Fabrication and modulation of flexible electromagnetic metamaterials	17
A nanonewton-scale biomimetic mechanosensor	17
MRI and CT compatible asymmetric bilayer hydrogel electrodes for EEG-based brain activity monitoring	17
Designing magnetic microcapsules for cultivation and differentiation of stem cell spheroids	17
Laser-upgraded coal tar for smart pavements in road and bridge monitoring applications	16
Hydrogel electrodes with conductive and substrate-adhesive layers for noninvasive long-term EEG acquisition	16
Component library creation and pixel array generation with micromilled droplet microfluidics	16
Electrospun carbon nanofibre-assisted patterning of metal oxide nanostructures	16
Correction: Enabling direct microcalorimetric measurement of metabolic activity and exothermic reactions onto microfluidic platforms via heat flux sensor integration	16
Plasmonic–perovskite solar cells, light emitters, and sensors	16
Dual-functional Cu2O/g-C3N4 heterojunctions: a high-performance SERS sensor and photocatalytic self-cleaning system for water pollution detection and remediation	16
Triboelectric nanogenerator based on silane-coupled LTA/PDMS for physiological monitoring and biomechanical energy harvesting	16
Multimodal response characteristics of convective liquid metal sensitive layers in flexible pressure sensor	15
Chip-scale optical airflow sensor	15
Thermal property evaluation of a 2.5D integration method with device level microchannel direct cooling for a high-power GaN HEMT device	15
A bioinspired bubble removal method in microchannels based on angiosperm xylem embolism repair	15
Diffusion-free valve for preprogrammed immunoassay with capillary microfluidics	15
Dual-signal readout paper-based wearable biosensor with a 3D origami structure for multiplexed analyte detection in sweat	15
Toolkit for integrating millimeter-sized microfluidic biomedical devices with multiple membranes and electrodes	15
Aerosol jet printing of surface acoustic wave microfluidic devices	15
A microgripper based on electrothermal Al–SiO2 bimorphs	15
Sperm quality metrics were improved by a biomimetic microfluidic selection platform compared to swim-up methods	15
Fast frequency relocking for synchronization enhanced resonant accelerometer	15
A passive wireless surface acoustic wave (SAW) sensor system for detecting warfare agents based on fluoroalcohol polysiloxane film	14
Stable diffusion gradients in microfluidic conduits bounded by fluid walls	14
A MEMS electro-mechanical co-optimization platform featuring freeform geometry optimization based on a genetic algorithm	14
Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators	14
Unraveling the nature of sensing in electrostatic MEMS gas sensors	14
Evaluating the efficacy and cardiotoxicity of EGFR-TKI AC0010 with a novel multifunctional biosensor	14
Switch mode capacitive pressure sensors	14
A new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors	14
Harnessing exceptional points for ultrahigh sensitive acoustic wave sensing	14
Scalable and automated CRISPR-based strain engineering using droplet microfluidics	14
Tight focusing of fractional-order topological charge vector beams by cascading metamaterials and metalens	14
Hydrodynamic constraints on the energy efficiency of droplet electricity generators	13
Portable dielectrophoresis for biology: ADEPT facilitates cell trapping, separation, and interactions	13
Manipulation of single cells via a Stereo Acoustic Streaming Tunnel (SteAST)	13
Nonvolatile chirality switching in terahertz chalcogenide metasurfaces	13
An in vitro demonstration of a passive, acoustic metamaterial as a temperature sensor with mK resolution for implantable applications	13
0.79 ppm scale-factor nonlinearity whole-angle microshell gyroscope realized by real-time calibration of capacitive displacement detection	13
Overcoming thermo-optical dynamics in broadband nanophotonic sensing	13
High-resolution two-photon polymerization: the most versatile technique for the fabrication of microneedle arrays	13
An underwater vest containing an antioxidant MXene hydrogel for sensitive recognition of fish locomotion	13
A tactile and airflow motion sensor based on flexible double-layer magnetic cilia	13
Predicting flows through microfluidic circuits with fluid walls	13
Development of single-cell-level microfluidic technology for long-term growth visualization of living cultures of Mycobacterium smegmatis	13
An integrated microfluidic platform for nucleic acid testing	13
DropLab: an automated magnetic digital microfluidic platform for sample-to-answer point-of-care testing—development and application to quantitative immunodiagnostics	13
Visualizing hypoxic modulation of beta cell secretions via a sensor augmented oxygen gradient	12
A two-stage amplified PZT sensor for monitoring lung and heart sounds in discharged pneumonia patients	12
A one-step, tunable method of selective reactive sputter deposition as a wrinkling approach for silver/polydimethylsiloxane for electrically conductive pliable surfaces	12
Monolithic integration of nanorod arrays on microfluidic chips for fast and sensitive one-step immunoassays	12
Artificial-intelligence-assisted mass fabrication of nanocantilevers from randomly positioned single carbon nanotubes	12
A micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes	12
High-density, high-frequency and large-scale electrohydrodynamic drop-on-demand jetting via a protruding polymer-based printhead design	12
Multiple virus sorting based on aptamer-modified microspheres in a TSAW device	12
Electrostatic generator enhancements for powering IoT nodes via efficient energy management	12
A flexible protruding microelectrode array for neural interfacing in bioelectronic medicine	11
Double-antibody-based nano-biosensing system for the onsite monitoring of SARS-CoV-2 variants	11
A comparative review of artificial muscles for microsystem applications	11
Through-polymer, via technology-enabled, flexible, lightweight, and integrated devices for implantable neural probes	11
Electrochemical protein biosensors for disease marker detection: progress and opportunities	11
Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications	11
Recent progress in three-terminal artificial synapses based on 2D materials: from mechanisms to applications	11
A force-compensated compliant MEMS-amplifier with electrostatic anti-springs	11
Virtually coupled resonators with modal dominance for improved sensitivity and bandwidth	11
Monolithic integrated optoelectronic chip for vector force detection	11
Recent advances and research progress on microsystems and bioeffects of terahertz neuromodulation	11
3D-assembled microneedle ion sensor-based wearable system for the transdermal monitoring of physiological ion fluctuations	11
A wide-field and high-resolution lensless compound eye microsystem for real-time target motion perception	11
Highly efficient passive Tesla valves for microfluidic applications	11
Low-noise fluorescent detection of cardiac troponin I in human serum based on surface acoustic wave separation	10
A microfluidic biosensor for the diagnosis of chronic wasting disease	10
Fabrication and in vivo 2-photon microscopy validation of transparent PEDOT:PSS microelectrode arrays	10
Recent developments in multifunctional neural probes for simultaneous neural recording and modulation	10
Accurate modulation of photoprinting under stiffness imaging feedback for engineering ECMs with high-fidelity mechanical properties	10
Synchronization bandwidth enhancement induced by a parametrically excited oscillator	10
Thermo-optical tweezers based on photothermal waveguides	10
Enhancing the performance of porous silicon biosensors: the interplay of nanostructure design and microfluidic integration	10
Deep learning-assisted object recognition with hybrid triboelectric-capacitive tactile sensor	10
Ultra-sensitive micro thermoelectric device for energy harvesting and ultra-low airflow detection	10
Self-assembled microtubular electrodes for on-chip low-voltage electrophoretic manipulation of charged particles and macromolecules	10
High-performance hybrid nanogenerator for self-powered wireless multi-sensing microsystems	10
Noncontact excitation of multi-GHz lithium niobate electromechanical resonators	10
Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers	10
A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach	10
Highly efficient AlGaN-based deep-ultraviolet light-emitting diodes: from bandgap engineering to device craft	10
Nondestructive monitoring of annealing and chemical–mechanical planarization behavior using ellipsometry and deep learning	10
Fabrication and in vivo testing of a sub-mm duckbill valve for hydrocephalus treatment	10
Nanomechanical hydrodynamic force sensing using suspended microfluidic channels	10
An ingestible bioimpedance sensing device for wireless monitoring of epithelial barriers	9
Self-powered temperature-changing system driven by wind energy	9
Electrochemical and biological performance of hierarchical platinum-iridium electrodes structured by a femtosecond laser	9
A large-area single-filament infrared emitter and its application in a spectroscopic ethanol gas sensing system	9