Microsystems & Nanoengineering

Article	Citations
Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator	617
Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties	172
Correction of thermal airflow distortion in warpage measurements of microelectronic packaging structures via deep learning-based digital image correlation	171
A new electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels	170
Ultra-small millimeter-wave filter chips based on high-K single-crystal lithium niobate	149
Electromechanically reconfigurable plasmonic photodetector with a distinct shift in resonant wavelength	131
SV-SAW RF filters based on low-cost 128°Y LiNbO3/SiO2/poly-Si/Si substrate for 6G cmWave wireless communications	131
Broad tunability of ultrasonic tweezer for multi‑droplet manipulation	130
Vertical serpentine interconnect-enabled stretchable and curved electronics	119
Multifocal skull-compensated transcranial focused ultrasound system for neuromodulation applications based on acoustic holography	117
A temperature self-calibrated MEMS gyroscope with 0.007°/h/K bias drift coefficient using real-time parametric quality factor control and mode matching	116
An optically driven microstructure for torque measurement in rotary molecular motors	110
Self-synchronization of reinjected droplets for high-efficiency droplet pairing and merging	110
Broadband plasmon modulation and high-intensity nanofocusing for high-resolution nanoscale imaging using Fabry–Pérot probes	108
In vitro modelling of extracellular matrix changes during skin aging: from static 2D to 3D dynamic microphysiological systems	105
A 3D modeling framework for accurate trajectory-based prediction of critical diameter in deterministic lateral displacement microfluidics	103
Enhanced sensitivity in nonlinear parity-time symmetric silicon micromechanical resonators	92
Review for optical metalens based on metasurfaces: fabrication and applications	91
A programmable magnetic digital microfluidic platform integrated with electrochemical detection system	91
PEDOT:PSS-based bioelectronics for brain monitoring and modulation	75
Bone-inspired (GNEC/HAPAAm) hydrogel with fatigue-resistance for use in underwater robots and highly piezoresistive sensors	74
Paper battery powered iontophoresis microneedles patch for hypertrophic scar treatment	72
Moisture-resistant, stretchable NOx gas sensors based on laser-induced graphene for environmental monitoring and breath analysis	72
Stable manipulating objects with unknown surface morphology via integration of magnetic artificial muscle and adhesive structures	71
How channel elasticity enhances and directs flow in dendritic microfluidic networks	69

Ultra-resolution scalable microprinting	67
Ensemble-learning-assisted exhaled gas disease analysis based on in-situ construction of MOF-derived MOx/GaN heterojunction sensor arrays	66
Modular micro-PCR system for the onsite rapid diagnosis of COVID-19	66
Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging	65
Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams	65
C-MEMS-derived glassy carbon electrochemical biosensors for rapid detection of SARS-CoV-2 spike protein	65
A tip-coupled, two-cantilever, non-resonant microsystem for direct measurement of liquid viscosity	64
A new method of continuous blood pressure monitoring using multichannel sensing signals on the wrist	63
Nonlinear distortion of nonreciprocal transmission in parity-time-symmetric silicon micromechanical resonators	63
Effects of nanopillars and surface coating on dynamic traction force	61
Nonlinear restructuring of patterned thin films by residual stress engineering into out-of-plane wavy-shaped electrostatic microactuators for high-performance radio-frequency switches	61
A robust lateral shift free (LSF) electrothermal micromirror with flexible multimorph beams	59
A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging	58
4D-printed intelligent reflecting surface with improved beam resolution via both phase modulation and space modulation	58
Experimental measurement and numerical modeling of deformation behavior of breast cancer cells passing through constricted microfluidic channels	58
A wireless self-decoupling scheme for multimodal sensing	57
Critical aspects of droplet digital reverse transcription loop-mediated isothermal amplification (ddRT-LAMP) for viral pathogens detection	57
Root-inspired, template-confined additive printing for fabricating high-robust conformal electronics	52
Formation of sub-100-nm suspended nanowires with various materials using thermally adjusted electrospun nanofibers as templates	52
A flexible wireless skin patch for synchronized glucose monitoring and regulation	52
Iridium complex-loaded biomimetic vesicles enable enhanced photodynamic therapy and immune modulation	51
Fast multi-resolution 3D printing of microfluidics: enabling 2 μm channels and ultra-compact mixers	50
Freestanding region-responsive bilayer for functional packaging of ingestible devices	50
Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method	50
State-of-the-art micro- and nano-scale photonics research in Asia: devices, fabrication, manufacturing, and applications	50
Exploring the synergic effect of thermal tuning and mode-coupling for frequency stabilization in micromechanical resonators	49
Self-template manufacturing of on-skin electrodes with 3D multi-channel structure for standard 3-limb-lead ECG suit	48
Alleviating optical pumping inhomogeneity using a polarization-encoded metasurface in NMR co-magnetometers	48
Highly stable diamagnetically levitated mechanical resonators with large masses exceeding 1.5 gram	48
Nanoimprint-induced strain engineering of two-dimensional materials	48
Simultaneous photocatalytic degradation and SERS detection of tetracycline with self-sustainable and recyclable ternary PI/TiO2/Ag flexible microfibers	48
A contamination-free and low-leakage-current Cu-TSV technology enabled by engineered double-sided processing	47
An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement	47
Soft sensor for omnidirectional posture perception in humanoid dexterous hands	46
Microfabrication of functional polyimide films and microstructures for flexible MEMS applications	46
A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors	46
High-performance flexible organic field effect transistors with print-based nanowires	45
Microfluidic magnetic detection system combined with a DNA framework-mediated immune-sandwich assay for rapid and sensitive detection of tumor-derived exosomes	45
A multi-region flexible neural interface for behavioral state decoding in freely moving mice	45
An ultra-stable MEMS resonator with ±14 ppb frequency stability realized by nonlinearity-mediated drift suppression	45
Infectious disease diagnostic device using rapid and efficient qPCR assays on a multi-target chip: idream-qPCR	44
Removal of the rate table: MEMS gyrocompass with virtual maytagging	43
6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes	43
Graphene MEMS and NEMS	43
Study of the protrusion of through-silicon vias in dual annealing-CMP processes for 3D integration	43
Patterning silver nanowire network via the Gibbs–Thomson effect	42
Micro/nanofabrication of heat management materials for energy-efficient building facades	42
Iontophoresis-driven microneedle patch for the active transdermal delivery of vaccine macromolecules	42
A C-shaped hinge for displacement magnification in MEMS rotational structures	39
Modeling gut neuro-epithelial connections in a novel microfluidic device	39

Ultra-sensitive ethanol detection using a chemiresistive SnO2 thin-film gas sensor functionalized with RuO2 nanosheets	39
Correction: Heterojunction interface-engineered SnO2-CuO SAW sensor for room-temperature CO2 detection with fast response and high selectivity	39
Nucleic acid amplification tests in digital microfluidics: the promise of next-generation point-of-care diagnostics	38
Low-cost optical sensors in electrified lab-on-a-disc platforms: liquid-phase boundary detection and automated diagnostics	38
3D printable and myoelectrically sensitive hydrogel for smart prosthetic hand control	38
Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments	38
Fully automated in vivo screening system for multi-organ imaging and pharmaceutical evaluation	37
Outperforming piezoelectric ultrasonics with high-reliability single-membrane CMUT array elements	37
Metalens for passive generation of a droplet Bessel beam	37
Nanofabricated high turn-density spiral coils for on-chip electromagneto-optical conversion	37
3D nanoprinting of embryo microinjection needles with anti-clogging features	37
Differential migratory phenotypes of human neutrophils and breast cancer cells in a wireless unidirectional electric field platform	37
Dean migration mechanisms: facilitating the control of microbial contaminants in cell therapy product manufacturing	36
A textile-based alignment-free electrophysiological sensing sleeve for comprehensive cardiovascular monitoring	36
Thin-film PMUTs: a review of over 40 years of research	36
0.003°/h bias instability of honeycomb disk resonator gyroscope achieved by mode reversal combined mode deflection control method	36
A local de-insulation method and its application in neural microneedle array	36
Skin-conformal PMN-PT ultrasonic sensor for cuffless blood pressure sensing via eutectic solder integration	36
Micro 3D printing of a functional MEMS accelerometer	35
Low-dimensional materials for intracellular electrophysiology: advances from synthesis to applications	35
Ultra-low-crosstalk silicon switches driven thermally and electrically	35
High-throughput chip-calorimeter using a Bi2Te3 thermopile heat flux sensor array	35
Sideband injection locking of microwave frequency combs in a superconducting optomechanical circuit	34
Electrohydrodynamic printed ultra-high performance liquid metal strain sensor	34
A piezoresistive-based 3-axial MEMS tactile sensor and integrated surgical forceps for gastrointestinal endoscopic minimally invasive surgery	34
Enhanced electromechanical coupling in piezoelectric MEMS vibration energy harvesters via strain-induced phase transition in Mn-doped bismuth ferrite epitaxial films	34
An interconnect-free micro-electromechanical 7-bit arithmetic device for multi-operand programmable computing	34
Study on polishing mechanisms of BEOL metal interconnects based on chemical and mechanical synergy	34
SPL and THD improvement of a cantilever-diaphragm piezoelectric MEMS loudspeaker with Double-S actuators	33
Sensitivity enhancement of surface plasmon resonance biosensors based on versatile nanostructures: principle, fabrication, and illustrative applications	33
Ion–electron synergy-enhanced flexible highly sensitive wireless sensing system with wide strain range	33
A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model	32
Porous nanocomposites with enhanced intrinsic piezoresistive sensitivity for bioinspired multimodal tactile sensors	32
Integrated silicon photonic MEMS	32
Recent advances in microsystem approaches for mechanical characterization of soft biological tissues	31
Ionic liquid multistate resistive switching characteristics in two terminal soft and flexible discrete channels for neuromorphic computing	31
Flexible wide-range multidimensional force sensors inspired by bones embedded in muscle	31
Optofluidic paper-based analytical device for discriminative detection of organic substances via digital color coding	31
Sustainability inspired fabrication of next generation neurostimulation and cardiac rhythm management electrodes via reactive hierarchical surface restructuring	30
The FTR dual-loop architecture based on SID–NLMS can achieve a threshold of 0.0001°/s and an ARW of 0.006°/√h for MEMS QMG	30
Highly conformable chip-in-foil implants for neural applications	30
Long-term high-temperature aging mechanism of copper-metallized through-glass vias: a combined nanoindentation test and hybrid Potts-phase field simulation study	30
Revolutionary self-powered transducing mechanism for long-lasting and stable glucose monitoring: achieving selective and sensitive bacterial endospore germination in microengineered paper-based platfo	30
A stretchable frequency reconfigurable antenna controlled by compressive buckling for W-band applications	30
Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator	29
A comprehensive review of hydrogen sensor for thermal runaway monitoring: fundamentals, recent advancements, and challenges	29
Wafer-level self-packaged MEMS infrared emitters with high-emissivity black silicon surface	29
Portable visual and electrochemical detection of hydrogen peroxide release from living cells based on dual-functional Pt-Ni hydrogels	29
Microfluidic QCM enables ultrahigh Q-factor: a new paradigm for in-liquid gravimetric sensing	29
High-throughput and simultaneous inertial separation of tumor cells and clusters from malignant effusions using spiral-contraction-expansion channels	29
Recent advances in spike-based neural coding for tactile perception	29
Optimizing MEMS inertial switches for efficient event-based environmental interaction: motivation, approaches, and purposes	28
Beyond binary patterning: polypropylene carbonate as a versatile thermal resist for high-fidelity grayscale Nanofabrication	28
Power-free plasma separation based on negative magnetophoresis for rapid biochemical analysis	28
Droplet microreactor for high-throughput fluorescence-based measurements of single catalyst particle acidity	28
Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator	27
Multimodal MEMS vibration energy harvester with cascaded flexible and silicon beams for ultralow frequency response	27
Correction: A spiral microfluidic device for rapid sorting, trapping, and long-term live imaging of Caenorhabditis elegans embryos	27
Integration of multiple flexible electrodes for real-time detection of barrier formation with spatial resolution in a gut-on-chip system	27
Nanojet visualization and dark-field imaging of optically trapped vaterite capsules with endoscopic illumination	27
Zero-power infrared switch with two-phase microfluidic flow and a 2D material thermal isolation layer	27
High-precision transdermal drug delivery enabled by a dual-pump parallel valveless piezoelectric micropump integrated with hollow microneedles	27
Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches	27
A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity	26
Design of an automated cell batch microinjection system based on magnetic tweezers for zebrafish embryos	26
Open micro-valley chip reveals long-term viscosity-induced glioblastoma cellular invasion states	26
High sensitivity SAW hydrogen gas sensor based on thermal conductivity effect	26
Ultra-sensitive fluorescence-activated droplet single-cell sorting based on Tetramer-HCR-EvaGreen amplification	26
On the design and fabrication of nanoliter-volume hanging drop networks	26
Four ribbons of double-layer graphene suspending masses for NEMS applications	25
A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications	25
Electrohydrodynamic printing technology: mechanisms, control, and applications	25
Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption	25
Boron nitride-enabled printing of a highly sensitive and flexible iontronic pressure sensing system for spatial mapping	25
A high selectivity and low detection limit carbon monoxide sensor based on Au-GO/Co-ZnO composite material	24
Piezoelectric stepped-plate resonators vibrating at lateral modes for direct viscosity determination in liquids	24
High temperature heat flux sensor with ITO/In2O3 thermopile for extreme environment sensing	24
Research on unit circuits based on cathode modulated vacuum/air channel electron tube	24
Multi-sized microelectrode array coupled with micro-electroporation for effective recording of intracellular action potential	24
MEMS reservoir computing system with stiffness modulation for multi-scene data processing at the edge	24

Magnetic-induced deformation driving triboelectric sensor with dual-mode perception for magnetic field and contacting pressure	23
A wearable, rapidly manufacturable, stability-enhancing microneedle patch for closed-loop diabetes management	23
Internal flow in sessile droplets induced by substrate oscillation: towards enhanced mixing and mass transfer in microfluidic systems	23
A skin-integrated device for neck posture monitoring and correction	23
Highly stable integration of graphene Hall sensors on a microfluidic platform for magnetic sensing in whole blood	23
Sensing-actuating integrated asymmetric multilayer hydrogel muscle for soft robotics	23
Digital light processing 3D printing of flexible devices: actuators, sensors and energy devices	23
A laser-engraved wearable gait recognition sensor system for exoskeleton robots	23
Enhancing the rectification effect of hydrogel-based stretchable ionic diodes through incorporating cations with high valence	23
A hot-humid tolerant and antibacterial MXene-based hydrogel sensor for real-time cardiorespiratory monitoring in endurance sports	23
III-Nitride MEMS drum resonators on flexible metal substrates	22
Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates	22
Vapor-induced porosity in graphene/PDMS: a scalable route to high-performance pressure sensors	22
Achieving consistency of flexible surface acoustic wave sensors with artificial intelligence	22
Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging	22
Cellular shape micromachined actuator ribbons	22
An implantable, wireless, battery-free system for tactile pressure sensing	22
Extracting mechanical quality factor and eliminating feedthrough using harmonics of thermal-piezoresistive micromechanical resonators	22
A double-layered liquid metal-based electrochemical sensing system on fabric as a wearable detector for glucose in sweat	22
Large-scale high uniform optoelectronic synapses array for artificial visual neural network	22
AI‑driven photonic noses: from conventional sensors to cloud‑to-edge intelligent microsystems	21
Nanomaterials in PCR: exploring light-to-heat conversion mechanisms and microfluidic integration	21
Nanocomposite biosensor tracks honokiol-induced oxidative stress dynamics in 3D hydrogel-cultured lung cancer cells	21
Bifunctional nanoprobe for simultaneous detection of intracellular reactive oxygen species and temperature in single cells	21
Diffraction-limit-breaking digital projection lithography via multi-exposure strategies for high-density nanopatterning	21
Stretchable multifunctional wearable system for real-time and on-demand thermotherapy of arthritis	21
High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate	21
Advancing non-faradaic impedance biosensors: sensitivity enhancement strategies using microfluidics, multiscale labeling, and CMOS technology	21
A near-zero quiescent power breeze wake-up anemometer based on a rolling-bearing triboelectric nanogenerator	21
Fully flexible implantable neural probes for electrophysiology recording and controlled neurochemical modulation	21
High-precision neural information detection of multiple brain regions in mice under different concentrations of isoflurane anesthesia based on microelectrode arrays	21
Wafer-scale fabrication of solid-state nanopore array with a novel SpacerX process	21
Single-cell sorting based on secreted products for functionally defined cell therapies	21
Fabrication of Mie-resonant silicon nanoparticles using laser annealing for surface-enhanced fluorescence spectroscopy	20
Elasto-inertial focusing and particle migration in high aspect ratio microchannels for high-throughput separation	20
Dynamic tuning of terahertz atomic lattice vibration via cross-scale mode coupling to nanomechanical resonance in WSe2 membranes	20
Microdissection tools to generate organoids for modeling the tumor immune microenvironment	20
Fluid drawing printing 3D conductive structures for flexible circuit manufacturing	20
A microsystem for in vivo wireless monitoring of plastic biliary stents using magnetoelastic sensors	20
Self-sensing intelligent microrobots for noninvasive and wireless monitoring systems	20
Exceptional points enhance sensing in silicon micromechanical resonators	20
Wireless ultrasonic power transfer using a pre-charged CMUT structure with a built-in charge storage capacitor	20
A tip-tilt-piston electrothermal micromirror array with integrated position sensors	20
piRT-IFC: Physics-informed real-time impedance flow cytometry for the characterization of cellular intrinsic electrical properties	20
Electrospun carbon nanofibre-assisted patterning of metal oxide nanostructures	19
Laser-upgraded coal tar for smart pavements in road and bridge monitoring applications	19
Twisted fiber microfluidics: a cutting-edge approach to 3D spiral devices	19
5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications	19
MRI and CT compatible asymmetric bilayer hydrogel electrodes for EEG-based brain activity monitoring	19
Direct electrification of silicon microfluidics for electric field applications	19
Wide field of view multifunctional solar sensor for photovoltaic power management via measurement of solar angle and intensity	19
Recent advances in bio-microsystem integration and Lab-on-PCB technology	19
A nanonewton-scale biomimetic mechanosensor	19
Movable surface acoustic wave tweezers: a versatile toolbox for micromanipulation	19
Widely accessible method for 3D microflow mapping at high spatial and temporal resolutions	19
Atomic Nb-doping of WS2 for high-performance synaptic transistors in neuromorphic computing	19
Deep learning for non-parameterized MEMS structural design	19
Portable and label-free optical detection of sweat glucose using functionalized plasmonic nanopillar array	19
Hydrogel electrodes with conductive and substrate-adhesive layers for noninvasive long-term EEG acquisition	18
Gate-tunable flexible photodetector with wavelength-selective response based on asymmetric 2D heterostructures	18
A handheld HIV detection platform using paper-based sample preparation and real-time isothermal amplification	18
Designing magnetic microcapsules for cultivation and differentiation of stem cell spheroids	18
Programmable viscoelastic hydrogels exhibit antimicrobial and regenerative properties to promote cell migration, wound healing, and tissue remodeling	18
Ultra-compact dual-channel integrated CO2 infrared gas sensor	18
Fabrication and modulation of flexible electromagnetic metamaterials	18
RBFNN-Based PPy/GaN sensor array with wide dynamic range and sub-ppb detection for accurate ammonia identification in human exhaled breath	17
A nonlinear stiffness softening mechanism for low-bias, high-sensitivity MEMS accelerometers with extended dynamic range	17
Controllable-pore porous microneedles for high-speed extraction and biomarker detection of interstitial fluid	17
Force balanced chip scale gravimeter achieving record low self noise of 0.1 μGal/√Hz	17
Diffusion-free valve for preprogrammed immunoassay with capillary microfluidics	17
Chip-scale packaged in-line polarization-resolved detector for optically pumped magnetometers	17
Correction: Enabling direct microcalorimetric measurement of metabolic activity and exothermic reactions onto microfluidic platforms via heat flux sensor integration	17
A force measurement platform for a vitreoretinal surgical simulator using an artificial eye module integrated with a quartz crystal resonator	17
Component library creation and pixel array generation with micromilled droplet microfluidics	17
Triboelectric horology: escapement-inspired design strategy for prolonged energy harvesting under irregular mechanical inputs	17
Toolkit for integrating millimeter-sized microfluidic biomedical devices with multiple membranes and electrodes	17
Laser-induced selective metallization of conductive patterns on silicone via copper carbonate hydroxide coating	16
Mechanically robust and self-cleanable encapsulated metalens via spin-on-glass packaging	16
Insect-scale flapping-wing MAVs with variable transmission ratio and wingspan: achieving payload adaptability, and self-stabilizing hovering	16
Aerosol jet printing of surface acoustic wave microfluidic devices	16
High sensitivity acoustic flow sensing based on bio-inspired web-like structure for panoramic acoustic perception	16
Fast frequency relocking for synchronization enhanced resonant accelerometer	16
Dual-signal readout paper-based wearable biosensor with a 3D origami structure for multiplexed analyte detection in sweat	16
Thermal property evaluation of a 2.5D integration method with device level microchannel direct cooling for a high-power GaN HEMT device	16
Multifunctional bilayer radiative cooling dressing for regenerative wound healing under heat stress	16
Dual-functional Cu2O/g-C3N4 heterojunctions: a high-performance SERS sensor and photocatalytic self-cleaning system for water pollution detection and remediation	16
Direct and residue-free patterning of sub-5 µm CVD monolayer graphene with highly enhanced conductivity and pattern fidelity	16
Sperm quality metrics were improved by a biomimetic microfluidic selection platform compared to swim-up methods	16
Electrostatically actuated MEMS resonators for magnetic and electric field sensing: a review	16
Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators	15
An underwater vest containing an antioxidant MXene hydrogel for sensitive recognition of fish locomotion	15
Unraveling the nature of sensing in electrostatic MEMS gas sensors	15
Coupling inertial, viscoelastic, and enhanced secondary flow in a composite microchannel: achieving high-precision multi-sized particle 3D central co-focusing	15
A MEMS electro-mechanical co-optimization platform featuring freeform geometry optimization based on a genetic algorithm	15
DropLab: an automated magnetic digital microfluidic platform for sample-to-answer point-of-care testing—development and application to quantitative immunodiagnostics	15