Microsystems & Nanoengineering

Article	Citations
Controllable tip exposure of ultramicroelectrodes coated by diamond-like carbon via direct microplasma jet for enhanced stability and fidelity in single-cell recording	319
Ultra-sensitive fluorescence-activated droplet single-cell sorting based on Tetramer-HCR-EvaGreen amplification	175
Transparent, flexible graphene–ITO-based neural microelectrodes for simultaneous electrophysiology recording and calcium imaging of intracortical neural activity in freely moving mice	165
Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications	148
A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity	115
Paper battery powered iontophoresis microneedles patch for hypertrophic scar treatment	106
Mechanically resilient, alumina-reinforced carbon nanotube arrays for in-plane shock absorption in micromechanical devices	100
Smart mid-infrared metasurface microspectrometer gas sensing system	98
Visualizing hypoxic modulation of beta cell secretions via a sensor augmented oxygen gradient	92
Gas-assisted microfluidic step-emulsification for generating micron- and submicron-sized droplets	85
Dynamic response of the cell traction force to osmotic shock	78
Enhancing single-cell encapsulation in droplet microfluidics with fine-tunable on-chip sample enrichment	76
A skin-integrated device for neck posture monitoring and correction	71
Monolithic integrated optoelectronic chip for vector force detection	70
An acoustofluidic device for the automated separation of platelet-reduced plasma from whole blood	68
High temperature heat flux sensor with ITO/In2O3 thermopile for extreme environment sensing	65
Self-aligned single-electrode actuation of tangential and wineglass modes using PMN-PT	62
A Drosophila-inspired intelligent olfactory biomimetic sensing system for gas recognition in complex environments	57
Numerical investigation of the dynamics of a rigid spherical particle in a vortical cross-slot flow at moderate inertia	57
Fiber optics-based surface enhanced Raman Spectroscopy sensors for rapid multiplex detection of foodborne pathogens in raw poultry	56
Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches	56
Electromechanically reconfigurable plasmonic photodetector with a distinct shift in resonant wavelength	56
Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator	55
Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption	55
On the design and fabrication of nanoliter-volume hanging drop networks	54

Artificial-intelligence-assisted mass fabrication of nanocantilevers from randomly positioned single carbon nanotubes	54
Multiple virus sorting based on aptamer-modified microspheres in a TSAW device	54
MEMS reservoir computing system with stiffness modulation for multi-scene data processing at the edge	52
Correction: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones	52
MXene-based all-solid flexible electrochromic microsupercapacitor	51
Constructing origami power generator from one piece of electret thin film and application in AI-enabled transmission line vibration monitoring	51
Magnetically actuated glaucoma drainage device for regulating intraocular pressure after implantation	51
Overcoming thermo-optical dynamics in broadband nanophotonic sensing	48
On-demand zero-drag hydrodynamic cloaks resolve D'Alembert paradox in viscous potential flows	48
Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity	48
Nonlinear coupling of closely spaced modes in atomically thin MoS2 nanoelectromechanical resonators	47
A high aspect ratio surface micromachined accelerometer based on a SiC-CNT composite material	47
Optically levitated micro gyroscopes with an MHz rotational vaterite rotor	46
Correction: A spiral microfluidic device for rapid sorting, trapping, and long-term live imaging of Caenorhabditis elegans embryos	45
Hydrodynamic function and spring constant calibration of FluidFM micropipette cantilevers	44
A 14 μHz/√Hz resolution and 32 μHz bias instability MEMS quartz resonant accelerometer with a low-noise oscillating readout circuit	43
Portable dielectrophoresis for biology: ADEPT facilitates cell trapping, separation, and interactions	43
Correction of thermal airflow distortion in warpage measurements of microelectronic packaging structures via deep learning-based digital image correlation	43
Monolithic integration of nanorod arrays on microfluidic chips for fast and sensitive one-step immunoassays	42
Zero-power infrared switch with two-phase microfluidic flow and a 2D material thermal isolation layer	42
Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications	42
Soft and flexible: core-shell ionic liquid resistive memory for electronic synapses	41
Spatiotemporal dynamics of nanowire growth in a microfluidic reactor	41
Exploiting rotational asymmetry for sub-50 nm mechanical nanocalligraphy	41
A magnetically enabled simulation of microgravity represses the auxin response during early seed germination on a microfluidic platform	40
Hydrodynamic metasurface for programming electromagnetic beam scanning on the Azimuth and elevation planes	39
A micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes	39
Development of single-cell-level microfluidic technology for long-term growth visualization of living cultures of Mycobacterium smegmatis	39
A new electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels	38
Magnetic force microscopy of an operational spin nano-oscillator	38
Wafer-level vapor cells filled with laser-actuated hermetic seals for integrated atomic devices	37
Measurement of oxygen consumption rates of human renal proximal tubule cells in an array of organ-on-chip devices to monitor drug-induced metabolic shifts	37
MyCTC chip: microfluidic-based drug screen with patient-derived tumour cells from liquid biopsies	35
A flexible protruding microelectrode array for neural interfacing in bioelectronic medicine	34
Recent advances and research progress on microsystems and bioeffects of terahertz neuromodulation	34
Piezoelectric-AlN resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids	34
A customizable, low-power, wireless, embedded sensing platform for resistive nanoscale sensors	34
Small-size temperature/high-pressure integrated sensor via flip-chip method	33
Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis	33
A biosensing system employing nanowell microelectrode arrays to record the intracellular potential of a single cardiomyocyte	33
High-density, high-frequency and large-scale electrohydrodynamic drop-on-demand jetting via a protruding polymer-based printhead design	33
A monolithically integrated microcantilever biosensor based on partially depleted SOI CMOS technology	33
DNA tetrahedron-mediated immune-sandwich assay for rapid and sensitive detection of PSA through a microfluidic electrochemical detection system	33
Ultra-sensitive nitrate-ion detection via transconductance-enhanced graphene ion-sensitive field-effect transistors	33
Enabling direct microcalorimetric measurement of metabolic activity and exothermic reactions onto microfluidic platforms via heat flux sensor integration	31
A two-stage amplified PZT sensor for monitoring lung and heart sounds in discharged pneumonia patients	30
Wearable multichannel-active pressurized pulse sensing platform	30
MEMS development focusing on collaboration using common facilities: a retrospective view and future directions	30
High-performance broadband flexible photodetector based on Gd3Fe5O12-assisted double van der Waals heterojunctions	28
Digital light processing 3D printing of flexible devices: actuators, sensors and energy devices	28

Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties	28
Fabrication of crystalline submicro-to-nano carbon wire for achieving high current density and ultrastable current	28
Computer vision meets microfluidics: a label-free method for high-throughput cell analysis	27
UV-LED projection photolithography for high-resolution functional photonic components	27
Self-synchronization of reinjected droplets for high-efficiency droplet pairing and merging	27
Electrostatic generator enhancements for powering IoT nodes via efficient energy management	26
A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications	26
A wearable, rapidly manufacturable, stability-enhancing microneedle patch for closed-loop diabetes management	26
A one-step, tunable method of selective reactive sputter deposition as a wrinkling approach for silver/polydimethylsiloxane for electrically conductive pliable surfaces	26
Double-antibody-based nano-biosensing system for the onsite monitoring of SARS-CoV-2 variants	26
Molecularly imprinted fluorescence sensor chip for lactate measurement	26
U-IMPACT: a universal 3D microfluidic cell culture platform	25
Scalable batch fabrication of ultrathin flexible neural probes using a bioresorbable silk layer	25
Shape-position perceptive fusion electronic skin with autonomous learning for gesture interaction	25
Acoustofluidic localization of sparse particles on a piezoelectric resonant sensor for nanogram-scale mass measurements	25
Multiplexed detection of respiratory pathogens with a portable analyzer in a “raw-sample-in and answer-out” manner	25
Raindrop energy-powered autonomous wireless hyetometer based on liquid–solid contact electrification	24
Progress of shrink polymer micro- and nanomanufacturing	24
Acoustofluidics for simultaneous nanoparticle-based drug loading and exosome encapsulation	24
3D-assembled microneedle ion sensor-based wearable system for the transdermal monitoring of physiological ion fluctuations	24
Vertical serpentine interconnect-enabled stretchable and curved electronics	24
Predicting flows through microfluidic circuits with fluid walls	24
Gut-on-a-chip for exploring the transport mechanism of Hg(II)	24
Artificial intelligence-enabled multipurpose smart detection in active-matrix electrowetting-on-dielectric digital microfluidics	23
Noninvasive fluid bubble detection based on capacitive micromachined ultrasonic transducers	23
Assembly of multicomponent structures from hundreds of micron-scale building blocks using optical tweezers	23
Multifocal skull-compensated transcranial focused ultrasound system for neuromodulation applications based on acoustic holography	23
Optimization of the fused deposition modeling-based fabrication process for polylactic acid microneedles	22
Thermally-curable nanocomposite printing for the scalable manufacturing of dielectric metasurfaces	22
Flux focusing with a superconducting nanoneedle for scanning SQUID susceptometry	22
A laser-engraved wearable gait recognition sensor system for exoskeleton robots	22
3D printed energy devices: generation, conversion, and storage	22
Electrochemical protein biosensors for disease marker detection: progress and opportunities	22
Moisture-resistant, stretchable NOx gas sensors based on laser-induced graphene for environmental monitoring and breath analysis	21
Four ribbons of double-layer graphene suspending masses for NEMS applications	21
Recent progress in three-terminal artificial synapses based on 2D materials: from mechanisms to applications	21
Boron nitride-enabled printing of a highly sensitive and flexible iontronic pressure sensing system for spatial mapping	21
Bone-inspired (GNEC/HAPAAm) hydrogel with fatigue-resistance for use in underwater robots and highly piezoresistive sensors	21
A comparative review of artificial muscles for microsystem applications	21
Geometric structure design of passive label-free microfluidic systems for biological micro-object separation	20
Automated and collision-free navigation of multiple micro-objects in obstacle-dense microenvironments using optoelectronic tweezers	20
A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging	20
Snapshot Mueller spectropolarimeter imager	20
3D designed battery-free wireless origami pressure sensor	20
Highly efficient passive Tesla valves for microfluidic applications	20
Effects of nanopillars and surface coating on dynamic traction force	20
Micro-3D sculptured metastructures with deep trenches for sub-10 μm resolution	20
Cellular shape micromachined actuator ribbons	20
A new strategy for the fabrication of a flexible and highly sensitive capacitive pressure sensor	20
A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach	20
An ultra-deep TSV technique enabled by the dual catalysis-based electroless plating of combined barrier and seed layers	19
Analysis of the acoustoelectric response of SAW gas sensors using a COM model	19
Sensing-actuating integrated asymmetric multilayer hydrogel muscle for soft robotics	19
Alignment error modeling and control of a double-sided microlens array during precision glass molding	19
Multichannel microneedle dry electrode patches for minimally invasive transdermal recording of electrophysiological signals	19
Nanoplasmonic SERS on fidget spinner for digital bacterial identification	19
Universal droplet propulsion by dynamic surface-charge wetting	19
Highly sensitive piezoresistive and thermally responsive fibrous networks from the in situ growth of PEDOT on MWCNT-decorated electrospun PU fibers for pressure and temperature sensing	19
Comparative analysis of nanomechanical resonators: sensitivity, response time, and practical considerations in photothermal sensing	19
Highly stable integration of graphene Hall sensors on a microfluidic platform for magnetic sensing in whole blood	18
Through-polymer, via technology-enabled, flexible, lightweight, and integrated devices for implantable neural probes	18
A tabletop X-ray tomography instrument for nanometer-scale imaging: reconstructions	18
Sensitivity enhancement of nonlinear micromechanical sensors using parametric symmetry breaking	18
Nondestructive monitoring of annealing and chemical–mechanical planarization behavior using ellipsometry and deep learning	18
Strain sensor on a chip for quantifying the magnitudes of tensile stress on cells	18
Size-selective microfluidics delineate the effects of combinatorial immunotherapy on T-cell response dynamics at the single-cell level	17
Metasurface-integrated elliptically polarized laser-pumped SERF magnetometers	17
Correction: Integrated silicon photonic MEMS	17
Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates	17
Surface-modified elastomeric nanofluidic devices for single nanoparticle trapping	17
Putting piezoelectric sensors into Fano resonances	17
A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope	17
4D-printed intelligent reflecting surface with improved beam resolution via both phase modulation and space modulation	17
Solution-processable electrode-material embedding in dynamically inscribed nanopatterns (SPEEDIN) for continuous fabrication of durable flexible devices	17
Achieving consistency of flexible surface acoustic wave sensors with artificial intelligence	17
All-inorganic ultrathin high-sensitivity transparent temperature sensor based on a Mn-Co-Ni-O nanofilm	17
An acoustofluidic scanning nanoscope using enhanced image stacking and processing	16
Large-scale high uniform optoelectronic synapses array for artificial visual neural network	16
Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√Hz noise floor	16
Periodically poled aluminum scandium nitride bulk acoustic wave resonators and filters for communications in the 6G era	16

A batch microfabrication of a self-cleaning, ultradurable electrochemical sensor employing a BDD film for the online monitoring of free chlorine in tap water	16
The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers	16
3D free-assembly modular microfluidics inspired by movable type printing	16
Nonlinear restructuring of patterned thin films by residual stress engineering into out-of-plane wavy-shaped electrostatic microactuators for high-performance radio-frequency switches	15
Controlled growth of a single carbon nanotube on an AFM probe	15
Design, simulation, and testing of a tunable MEMS multi-threshold inertial switch	15
Ultralow detection limit and ultrafast response/recovery of the H2 gas sensor based on Pd-doped rGO/ZnO-SnO2 from hydrothermal synthesis	15
Internal flow in sessile droplets induced by substrate oscillation: towards enhanced mixing and mass transfer in microfluidic systems	15
Recent advances in acoustofluidic separation technology in biology	15
A wide-field and high-resolution lensless compound eye microsystem for real-time target motion perception	15
Recent developments in multifunctional neural probes for simultaneous neural recording and modulation	15
Polarized holographic lithography system for high-uniformity microscale patterning with periodic tunability	15
Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging	15
Tunable parity-time symmetry vortex laser from a phase change material-based microcavity	15
A force-compensated compliant MEMS-amplifier with electrostatic anti-springs	15
Acoustofluidic separation of prolate and spherical micro-objects	15
A thin-film temperature sensor based on a flexible electrode and substrate	15
C-MEMS-derived glassy carbon electrochemical biosensors for rapid detection of SARS-CoV-2 spike protein	15
An implantable, wireless, battery-free system for tactile pressure sensing	14
Experimental measurement and numerical modeling of deformation behavior of breast cancer cells passing through constricted microfluidic channels	14
Analytical and experimental study of a valveless piezoelectric micropump with high flowrate and pressure load	14
A double-layered liquid metal-based electrochemical sensing system on fabric as a wearable detector for glucose in sweat	14
Fabrication and in vivo 2-photon microscopy validation of transparent PEDOT:PSS microelectrode arrays	14
A metallic anti-biofouling surface with a hierarchical topography containing nanostructures on curved micro-riblets	14
A tip-coupled, two-cantilever, non-resonant microsystem for direct measurement of liquid viscosity	14
A dual-mode fiber-shaped flexible capacitive strain sensor fabricated by direct ink writing technology for wearable and implantable health monitoring applications	14
Deep learning-assisted object recognition with hybrid triboelectric-capacitive tactile sensor	14
Structural effects of 3D printing resolution on the gauge factor of microcrack-based strain gauges for health care monitoring	14
Patient-derived pancreatic cancer-on-a-chip recapitulates the tumor microenvironment	13
Thermoelastic damping in MEMS gyroscopes at high frequencies	13
High-speed identification of suspended carbon nanotubes using Raman spectroscopy and deep learning	13
Thermogalvanic hydrogel-based e-skin for self-powered on-body dual-modal temperature and strain sensing	13
Extracting mechanical quality factor and eliminating feedthrough using harmonics of thermal-piezoresistive micromechanical resonators	13
Advanced operation of heated fluidic resonators via mechanical and thermal loss reduction in vacuum	13
Brainmask: an ultrasoft and moist micro-electrocorticography electrode for accurate positioning and long-lasting recordings	13
An infrared photothermoelectric detector enabled by MXene and PEDOT:PSS composite for noncontact fingertip tracking	13
Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams	13
Label-free impedimetric immunosensor for point-of-care detection of COVID-19 antibodies	13
Fully flexible implantable neural probes for electrophysiology recording and controlled neurochemical modulation	13
Bacterial nanotechnology as a paradigm in targeted cancer therapeutic delivery and immunotherapy	13
Microengineered platforms for characterizing the contractile function of in vitro cardiac models	13
Ultra-resolution scalable microprinting	13
Programmable directional color dynamics using plasmonics	13
A robust lateral shift free (LSF) electrothermal micromirror with flexible multimorph beams	13
Machine learning-driven discovery of high-performance MEMS disk resonator gyroscope structural topologies	12
Nanomaterial-based microelectrode arrays for in vitro bidirectional brain–computer interfaces: a review	12
Modular micro-PCR system for the onsite rapid diagnosis of COVID-19	12
Highly integrated watch for noninvasive continual glucose monitoring	12
Multiplexed DNA-functionalized graphene sensor with artificial intelligence-based discrimination performance for analyzing chemical vapor compositions	12
Sequential storage and release of microdroplets	12
A new method of continuous blood pressure monitoring using multichannel sensing signals on the wrist	12
Stretchable and anti-impact iontronic pressure sensor with an ultrabroad linear range for biophysical monitoring and deep learning-aided knee rehabilitation	12
Highly efficient AlGaN-based deep-ultraviolet light-emitting diodes: from bandgap engineering to device craft	12
Investigation of sorptive interactions between volatile organic compounds and supramolecules at dynamic oscillation using bulk acoustic wave resonator virtual sensor arrays	11
Self-sensing intelligent microrobots for noninvasive and wireless monitoring systems	11
A 96-wells fluidic system for high-throughput screenings under laminar high wall shear stress conditions	11
Fabrication and in vivo testing of a sub-mm duckbill valve for hydrocephalus treatment	11
Root-inspired, template-confined additive printing for fabricating high-robust conformal electronics	11
Continuously superior-strong carbon nanofibers by additive nanostructuring and carbonization of polyacrylonitrile jetting	11
Nanomechanical hydrodynamic force sensing using suspended microfluidic channels	11
Synchronization bandwidth enhancement induced by a parametrically excited oscillator	11
Rapid-response, low-detection-limit, positive-negative air pressure sensing: GaN chips integrated with hydrophobic PDMS films	11
A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors	11
Dynamic 3D metasurface holography via cascaded polymer dispersed liquid crystal	11
High-performance flexible organic field effect transistors with print-based nanowires	11
piRT-IFC: Physics-informed real-time impedance flow cytometry for the characterization of cellular intrinsic electrical properties	11
High-throughput extraction on a dynamic solid phase for low-abundance biomarker isolation from biological samples	10
Correction: A tactile and airflow motion sensor based on flexible double-layer magnetic cilia	10
Organic-inorganic hybrid piezotronic bipolar junction transistor for pressure sensing	10
State-of-the-art micro- and nano-scale photonics research in Asia: devices, fabrication, manufacturing, and applications	10
Low-noise fluorescent detection of cardiac troponin I in human serum based on surface acoustic wave separation	10
Analysis of a Casimir-driven parametric amplifier with resilience to Casimir pull-in for MEMS single-point magnetic gradiometry	10
Coupling the thermal acoustic modes of a bubble to an optomechanical sensor	10
On-chip dielectrophoretic single-cell manipulation	10
Bifunctional nanoprobe for simultaneous detection of intracellular reactive oxygen species and temperature in single cells	10
High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate	10
An artificial intelligence-assisted digital microfluidic system for multistate droplet control	10
Correction: Stretchable and durable HD-sEMG electrodes for accurate recognition of swallowing activities on complex epidermal surfaces	10
RapidET: a MEMS-based platform for label-free and rapid demarcation of tumors from normal breast biopsy tissues	10
Design of an automated robotic microinjection system for batch injection of zebrafish embryos and larvae	10
Noncontact excitation of multi-GHz lithium niobate electromechanical resonators	10
Sound innovations for biofabrication and tissue engineering	10
A programmable microfluidic platform to monitor calcium dynamics in microglia during inflammation	10
Formation of sub-100-nm suspended nanowires with various materials using thermally adjusted electrospun nanofibers as templates	10
Nanoimprint-induced strain engineering of two-dimensional materials	10
A flexible resistive strain gauge with reduced temperature effect via thermal expansion anisotropic composite substrate	10
A microexplosive shockwave-based drug delivery microsystem for treating hard-to-reach areas in the human body	9
A microfluidic biosensor for the diagnosis of chronic wasting disease	9
Measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonator	9
A novel progressive wave gyroscope based on acousto-optic effects	9
Mechanical memory operations in piezotransistive GaN microcantilevers using Au nanoparticle-enhanced photoacoustic excitation	9
A MEMS traveling-wave micromotor-based miniature gyrocompass	9
Accurate modulation of photoprinting under stiffness imaging feedback for engineering ECMs with high-fidelity mechanical properties	9
Freestanding region-responsive bilayer for functional packaging of ingestible devices	9
Study of the protrusion of through-silicon vias in dual annealing-CMP processes for 3D integration	9