Microsystems & Nanoengineering

Article	Citations
Portable and wearable self-powered systems based on emerging energy harvesting technology	237
Wearable and flexible electrochemical sensors for sweat analysis: a review	196
Recent progress in silk fibroin-based flexible electronics	138
Viscoelastic microfluidics: progress and challenges	132
Tumor-on-a-chip: from bioinspired design to biomedical application	124
High-resolution two-photon polymerization: the most versatile technique for the fabrication of microneedle arrays	115
Optical spin-symmetry breaking for high-efficiency directional helicity-multiplexed metaholograms	95
Design and implementation of a jellyfish otolith-inspired MEMS vector hydrophone for low-frequency detection	92
Moisture-resistant, stretchable NOx gas sensors based on laser-induced graphene for environmental monitoring and breath analysis	91
Self-sustainable and recyclable ternary Au@Cu2O–Ag nanocomposites: application in ultrasensitive SERS detection and highly efficient photocatalysis of organic dyes under visible light	80
Continuous monitoring of diabetes with an integrated microneedle biosensing device through 3D printing	78
Microneedle-based skin patch for blood-free rapid diagnostic testing	74
Ultralow detection limit and ultrafast response/recovery of the H2 gas sensor based on Pd-doped rGO/ZnO-SnO2 from hydrothermal synthesis	71
A new strategy for the fabrication of a flexible and highly sensitive capacitive pressure sensor	68
Patient-derived pancreatic cancer-on-a-chip recapitulates the tumor microenvironment	65
Plasmonic–perovskite solar cells, light emitters, and sensors	65
Highly integrated watch for noninvasive continual glucose monitoring	62
Smartphone-powered iontophoresis-microneedle array patch for controlled transdermal delivery	59
Microfluidics in cardiovascular disease research: state of the art and future outlook	57
Sensitive capacitive pressure sensors based on graphene membrane arrays	52
Heteronanostructural metal oxide-based gas microsensors	50
Wireless, battery-free, and fully implantable electrical neurostimulation in freely moving rodents	50
Recent progress in three-terminal artificial synapses based on 2D materials: from mechanisms to applications	48
Nanodroplet-mediated catheter-directed sonothrombolysis of retracted blood clots	47
MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies	47

High-performance photodetector based on an interface engineering-assisted graphene/silicon Schottky junction	46
A thin-film temperature sensor based on a flexible electrode and substrate	46
Wearable multichannel pulse condition monitoring system based on flexible pressure sensor arrays	45
Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications	44
Integrated silicon photonic MEMS	44
An ultrafast-response and flexible humidity sensor for human respiration monitoring and noncontact safety warning	43
Raindrop energy-powered autonomous wireless hyetometer based on liquid–solid contact electrification	42
Electrochemical micro-aptasensors for exosome detection based on hybridization chain reaction amplification	41
Stretchable and anti-impact iontronic pressure sensor with an ultrabroad linear range for biophysical monitoring and deep learning-aided knee rehabilitation	41
Acoustofluidics for simultaneous nanoparticle-based drug loading and exosome encapsulation	41
Thin-film PMUTs: a review of over 40 years of research	40
A nanoforest-based humidity sensor for respiration monitoring	40
Design rules for dense and rapid Lissajous scanning	40
Advanced tools and methods for single-cell surgery	39
Implantable intracortical microelectrodes: reviewing the present with a focus on the future	38
Structural effects of 3D printing resolution on the gauge factor of microcrack-based strain gauges for health care monitoring	38
Multiple-patterning colloidal lithography-implemented scalable manufacturing of heat-tolerant titanium nitride broadband absorbers in the visible to near-infrared	38
Modular operation of microfluidic chips for highly parallelized cell culture and liquid dosing via a fluidic circuit board	37
Recent advances in acoustofluidic separation technology in biology	36
A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model	36
3D-printing-assisted flexible pressure sensor with a concentric circle pattern and high sensitivity for health monitoring	35
Microengineered platforms for characterizing the contractile function of in vitro cardiac models	35
Miura-ori structured flexible microneedle array electrode for biosignal recording	34
An ultrasensitive and stretchable strain sensor based on a microcrack structure for motion monitoring	34
Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration	34
DNA tetrahedron-mediated immune-sandwich assay for rapid and sensitive detection of PSA through a microfluidic electrochemical detection system	34
Miniaturization of mechanical actuators in skin-integrated electronics for haptic interfaces	33
A modular microfluidic system based on a multilayered configuration to generate large-scale perfusable microvascular networks	33
A novel polymer-based nitrocellulose platform for implementing a multiplexed microfluidic paper-based enzyme-linked immunosorbent assay	33
A silk-based self-adaptive flexible opto-electro neural probe	33
Wearable multimode sensor with a seamless integrated structure for recognition of different joint motion states with the assistance of a deep learning algorithm	32
Si nanowire Bio-FET for electrical and label-free detection of cancer cell-derived exosomes	32
Wafer-scale transfer route for top–down III-nitride nanowire LED arrays based on the femtosecond laser lift-off technique	32
Scalable batch fabrication of ultrathin flexible neural probes using a bioresorbable silk layer	31
Acoustofluidic separation enables early diagnosis of traumatic brain injury based on circulating exosomes	31
Microfabrication of functional polyimide films and microstructures for flexible MEMS applications	31
A flexible and wearable NO2 gas detection and early warning device based on a spraying process and an interdigital electrode at room temperature	30
Optimization of the fused deposition modeling-based fabrication process for polylactic acid microneedles	30
Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications	29
Dual-signal readout paper-based wearable biosensor with a 3D origami structure for multiplexed analyte detection in sweat	29
Hydrodynamic constraints on the energy efficiency of droplet electricity generators	28
Label-free impedimetric immunosensor for point-of-care detection of COVID-19 antibodies	28
Micro 3D printing of a functional MEMS accelerometer	28
A comparative review of artificial muscles for microsystem applications	28
RapidET: a MEMS-based platform for label-free and rapid demarcation of tumors from normal breast biopsy tissues	28
Covalently grafting first-generation PAMAM dendrimers onto MXenes with self-adsorbed AuNPs for use as a functional nanoplatform for highly sensitive electrochemical biosensing of cTnT	27
3D microfluidic gradient generator for combination antimicrobial susceptibility testing	27
Geometric structure design of passive label-free microfluidic systems for biological micro-object separation	27
Hydrogel electrodes with conductive and substrate-adhesive layers for noninvasive long-term EEG acquisition	26
Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging	26

Integrated microfluidic single-cell immunoblotting chip enables high-throughput isolation, enrichment and direct protein analysis of circulating tumor cells	26
Spray-coated electret materials with enhanced stability in a harsh environment for an MEMS energy harvesting device	26
UV-LED projection photolithography for high-resolution functional photonic components	26
Low-hysteresis, pressure-insensitive, and transparent capacitive strain sensor for human activity monitoring	25
Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging	25
Iontophoresis-driven microneedle patch for the active transdermal delivery of vaccine macromolecules	25
Self-powered ammonia synthesis under ambient conditions via N2 discharge driven by Tesla turbine triboelectric nanogenerators	25
Self-cleaning semiconductor heterojunction substrate: ultrasensitive detection and photocatalytic degradation of organic pollutants for environmental remediation	24
Single-cell sorting based on secreted products for functionally defined cell therapies	24
Strong internal resonance in a nonlinear, asymmetric microbeam resonator	24
Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√Hz noise floor	23
Distributed implantation of a flexible microelectrode array for neural recording	22
A double-layered liquid metal-based electrochemical sensing system on fabric as a wearable detector for glucose in sweat	21
Eigenmode operation of piezoelectric resonant gyroscopes	21
Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology	21
Touchable cell biophysics property recognition platforms enable multifunctional blood smart health care	21
0.79 ppm scale-factor nonlinearity whole-angle microshell gyroscope realized by real-time calibration of capacitive displacement detection	20
Acoustic radiation-free surface phononic crystal resonator for in-liquid low-noise gravimetric detection	20
Micro/nanodevices for assessment and treatment in stomatology and ophthalmology	20
Length-based separation of Bacillus subtilis bacterial populations by viscoelastic microfluidics	20
Gut-on-a-chip for exploring the transport mechanism of Hg(II)	20
Flexible multifunctional platform based on piezoelectric acoustics for human–machine interaction and environmental perception	20
Thermally-curable nanocomposite printing for the scalable manufacturing of dielectric metasurfaces	20
Polarized holographic lithography system for high-uniformity microscale patterning with periodic tunability	19
Scalable and automated CRISPR-based strain engineering using droplet microfluidics	19
Sperm quality metrics were improved by a biomimetic microfluidic selection platform compared to swim-up methods	19
Modular micro-PCR system for the onsite rapid diagnosis of COVID-19	19
3D-assembled microneedle ion sensor-based wearable system for the transdermal monitoring of physiological ion fluctuations	19
A tactile and airflow motion sensor based on flexible double-layer magnetic cilia	19
Origami-inspired folding assembly of dielectric elastomers for programmable soft robots	19
Highly efficient passive Tesla valves for microfluidic applications	19
Soft and flexible: core-shell ionic liquid resistive memory for electronic synapses	19
Investigation of a complete squeeze-film damping model for MEMS devices	19
Multilayer CVD graphene electrodes using a transfer-free process for the next generation of optically transparent and MRI-compatible neural interfaces	19
The electrochemical detection of bioterrorism agents: a review of the detection, diagnostics, and implementation of sensors in biosafety programs for Class A bioweapons	19
Novel nondelay-based reservoir computing with a single micromechanical nonlinear resonator for high-efficiency information processing	18
Flexible thermoelectric generator and energy management electronics powered by body heat	18
A flexible protruding microelectrode array for neural interfacing in bioelectronic medicine	18
A 3D-printed magnetic digital microfluidic diagnostic platform for rapid colorimetric sensing of carbapenemase-producing Enterobacteriaceae	18
A 3D flexible neural interface based on a microfluidic interconnection cable capable of chemical delivery	18
A dynamical approach to generate chaos in a micromechanical resonator	18
1ppm-detectable hydrogen gas sensors by using highly sensitive P+/N+ single-crystalline silicon thermopiles	18
A flexible neural implant with ultrathin substrate for low-invasive brain–computer interface applications	18
Droplet digital microfluidic system for screening filamentous fungi based on enzymatic activity	18
Development of a highly controlled system for large-area, directional printing of quasi-1D nanomaterials	17
Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments	17
A metallic anti-biofouling surface with a hierarchical topography containing nanostructures on curved micro-riblets	17
Aerosol jet printing of piezoelectric surface acoustic wave thermometer	17
An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement	17
Computer vision meets microfluidics: a label-free method for high-throughput cell analysis	17
Neuron devices: emerging prospects in neural interfaces and recognition	17
Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm	17
Deep learning for non-parameterized MEMS structural design	16
A monolithic single-chip point-of-care platform for metabolomic prostate cancer detection	16
MRBLES 2.0: High-throughput generation of chemically functionalized spectrally and magnetically encoded hydrogel beads using a simple single-layer microfluidic device	16
Manipulation of single cells via a Stereo Acoustic Streaming Tunnel (SteAST)	16
Assembly of multicomponent structures from hundreds of micron-scale building blocks using optical tweezers	16
MyCTC chip: microfluidic-based drug screen with patient-derived tumour cells from liquid biopsies	15
Ionic liquid multistate resistive switching characteristics in two terminal soft and flexible discrete channels for neuromorphic computing	15
Analysis of a Casimir-driven parametric amplifier with resilience to Casimir pull-in for MEMS single-point magnetic gradiometry	15
Progress of shrink polymer micro- and nanomanufacturing	15
Micromechanical mode-localized electric current sensor	15
Propagating acoustic waves on a culture substrate regulate the directional collective cell migration	15
A wide-field and high-resolution lensless compound eye microsystem for real-time target motion perception	15
Monolithic integration of nanorod arrays on microfluidic chips for fast and sensitive one-step immunoassays	15
Nanoscale plasma-activated aerosol generation for in situ surface pathogen disinfection	15
Thermally-actuated microfluidic membrane valve for point-of-care applications	15
Nanomaterial-based microelectrode arrays for in vitro bidirectional brain–computer interfaces: a review	15
Research progress of electronic nose technology in exhaled breath disease analysis	14
Ultra-resolution scalable microprinting	14
A microwell-based impedance sensor on an insertable microneedle for real-time in vivo cytokine detection	14
Small footprint optoelectrodes using ring resonators for passive light localization	14
Biomimetic cell-actuated artificial muscle with nanofibrous bundles	14
A miniaturized mechanical antenna based on FEP/THV unipolar electrets for extremely low frequency transmission	13
Electrochemical and biological performance of hierarchical platinum-iridium electrodes structured by a femtosecond laser	13
Fabrication of freestanding Pt nanowires for use as thermal anemometry probes in turbulence measurements	13
Design of a large-range rotary microgripper with freeform geometries using a genetic algorithm	13
Fabrication and in vivo 2-photon microscopy validation of transparent PEDOT:PSS microelectrode arrays	13
Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties	13
Polymeric and biological membranes for organ-on-a-chip devices	13

The development of microfabricated solenoids with magnetic cores for micromagnetic neural stimulation	13
Double emulsion-pretreated microwell culture for the in vitro production of multicellular spheroids and their in situ analysis	13
Cardiomyocyte electrical-mechanical synchronized model for high-content, dose-quantitative and time-dependent drug assessment	13
Self-assembled microtubular electrodes for on-chip low-voltage electrophoretic manipulation of charged particles and macromolecules	13
Recent developments in multifunctional neural probes for simultaneous neural recording and modulation	13
Acoustofluidic localization of sparse particles on a piezoelectric resonant sensor for nanogram-scale mass measurements	13
Integrated impedance sensing of liquid sample plug flow enables automated high throughput NMR spectroscopy	13
DropLab: an automated magnetic digital microfluidic platform for sample-to-answer point-of-care testing—development and application to quantitative immunodiagnostics	13
Field-emission electron gun for a MEMS electron microscope	13
DMD-based hyperspectral microscopy with flexible multiline parallel scanning	13
Thin ceramic PZT dual- and multi-frequency pMUT arrays for photoacoustic imaging	13
An infrared photothermoelectric detector enabled by MXene and PEDOT:PSS composite for noncontact fingertip tracking	13
A two-stage amplified PZT sensor for monitoring lung and heart sounds in discharged pneumonia patients	13
Synaptic transistor with multiple biological functions based on metal-organic frameworks combined with the LIF model of a spiking neural network to recognize temporal information	13
Chip-scale optical airflow sensor	12
On-screen fingerprint sensor with optically and electrically tailored transparent electrode patterns for use on high-resolution mobile displays	12
A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications	12
Curved display based on programming origami tessellations	12
Gradient wettability induced by deterministically patterned nanostructures	12
Thermal property evaluation of a 2.5D integration method with device level microchannel direct cooling for a high-power GaN HEMT device	12
MXene/PPy@PDMS sponge-based flexible pressure sensor for human posture recognition with the assistance of a convolutional neural network in deep learning	12
A laser-engraved wearable gait recognition sensor system for exoskeleton robots	12
Integrated hybrid sensing and microenergy for compact active microsystems	11
Nanofiber self-consistent additive manufacturing process for 3D microfluidics	11
Low limit of detection of the AlGaN/GaN-based sensor by the Kelvin connection detection technique	11
Using intracellular plasmonics to characterize nanomorphology in human cells	11
U-IMPACT: a universal 3D microfluidic cell culture platform	11
Piezoelectric-AlN resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids	11
Demonstration of tantalum as a structural material for MEMS thermal actuators	11
Microdevice for directional axodendritic connectivity between micro 3D neuronal cultures	11
Enhancing metabolic activity and differentiation potential in adipose mesenchymal stem cells via high-resolution surface-acoustic-wave contactless patterning	11
Current research status of tumor cell biomarker detection	11
Multifocal skull-compensated transcranial focused ultrasound system for neuromodulation applications based on acoustic holography	11
A new strategy to minimize humidity influences on acoustic wave ultraviolet sensors using ZnO nanowires wrapped with hydrophobic silica nanoparticles	11
Very-high-frequency probes for atomic force microscopy with silicon optomechanics	11
Design and fabrication of a vigorous “cavitation-on-a-chip” device with a multiple microchannel configuration	11
Self-sensing intelligent microrobots for noninvasive and wireless monitoring systems	11
A dual-mode fiber-shaped flexible capacitive strain sensor fabricated by direct ink writing technology for wearable and implantable health monitoring applications	11
Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity	11
Systematic review of centrifugal valving based on digital twin modeling towards highly integrated lab-on-a-disc systems	10
A versatile acoustically active surface based on piezoelectric microstructures	10
Molecular bridge-mediated ultralow-power gas sensing	10
Boron nitride-enabled printing of a highly sensitive and flexible iontronic pressure sensing system for spatial mapping	10
Hydrogels for active photonics	10
Polymer interdigitated pillar electrostatic (PIPE) actuators	10
Modeling and measuring glucose diffusion and consumption by colorectal cancer spheroids in hanging drops using integrated biosensors	10
Muscle-inspired soft robots based on bilateral dielectric elastomer actuators	10
Wafer-level vapor cells filled with laser-actuated hermetic seals for integrated atomic devices	10
A mosquito mouthpart-like bionic neural probe	10
An ultrahigh sensitivity acoustic sensor system for weak signal detection based on an ultrahigh-Q CaF2 resonator	10
Mapping inertial migration in the cross section of a microfluidic channel with high-speed imaging	10
High-speed identification of suspended carbon nanotubes using Raman spectroscopy and deep learning	10
Multimodal MEMS vibration energy harvester with cascaded flexible and silicon beams for ultralow frequency response	10
Assessment of the electrical penetration of cell membranes using four-frequency impedance cytometry	9
Cu-doped SnO2/rGO nanocomposites for ultrasensitive H2S detection at low temperature	9
Correction: Development of a highly controlled system for large-area, directional printing of quasi-1D nanomaterials	9
Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates	9
Predicting flows through microfluidic circuits with fluid walls	9
Development of single-cell-level microfluidic technology for long-term growth visualization of living cultures of Mycobacterium smegmatis	9
Rapid nanomolding of nanotopography on flexible substrates to control muscle cell growth with enhanced maturation	9
Outperforming piezoelectric ultrasonics with high-reliability single-membrane CMUT array elements	9
Controlled growth of a single carbon nanotube on an AFM probe	9
Analytical and experimental study of a valveless piezoelectric micropump with high flowrate and pressure load	9
Multiplexed detection of respiratory pathogens with a portable analyzer in a “raw-sample-in and answer-out” manner	9
A customizable, low-power, wireless, embedded sensing platform for resistive nanoscale sensors	9
Digital light processing 3D printing for microfluidic chips with enhanced resolution via dosing- and zoning-controlled vat photopolymerization	9
High-fidelity and clean nanotransfer lithography using structure-embedded and electrostatic-adhesive carriers	9
MEMS ultrasonic transducers for safe, low-power and portable eye-blinking monitoring	9
A batch microfabrication of a self-cleaning, ultradurable electrochemical sensor employing a BDD film for the online monitoring of free chlorine in tap water	9
Multiplexed DNA-functionalized graphene sensor with artificial intelligence-based discrimination performance for analyzing chemical vapor compositions	9
A biosensing system employing nanowell microelectrode arrays to record the intracellular potential of a single cardiomyocyte	9
Nondestructive monitoring of annealing and chemical–mechanical planarization behavior using ellipsometry and deep learning	8
Thermoelastic damping in MEMS gyroscopes at high frequencies	8
MEMS development focusing on collaboration using common facilities: a retrospective view and future directions	8
Self-synchronization of reinjected droplets for high-efficiency droplet pairing and merging	8
Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation	8
Multicomponent SF6 decomposition product sensing with a gas-sensing microchip	8
Electrospun carbon nanofibre-assisted patterning of metal oxide nanostructures	8
Hybrid gold/DNA nanowire circuit with sub-10 nm nanostructure arrays	8
Highly sensitive piezoresistive and thermally responsive fibrous networks from the in situ growth of PEDOT on MWCNT-decorated electrospun PU fibers for pressure and temperature sensing	8
Double-antibody-based nano-biosensing system for the onsite monitoring of SARS-CoV-2 variants	8
Measurement of oxygen consumption rates of human renal proximal tubule cells in an array of organ-on-chip devices to monitor drug-induced metabolic shifts	8
Probing the subcellular nanostructure of engineered human cardiomyocytes in 3D tissue	8
Microphysiological systems for solid tumor immunotherapy: opportunities and challenges	8
Detection of neuronal defensive discharge information transmission and characteristics in periaqueductal gray double-subregions using PtNP/PEDOT:PSS modified microelectrode arrays	8
Pico-washing: simultaneous liquid addition and removal for continuous-flow washing of microdroplets	8
Fabrication of 3D-printed molds for polydimethylsiloxane-based microfluidic devices using a liquid crystal display-based vat photopolymerization process: printing quality, drug response and 3D invasio	8
Solution-processable electrode-material embedding in dynamically inscribed nanopatterns (SPEEDIN) for continuous fabrication of durable flexible devices	8
Electromechanically reconfigurable plasmonic photodetector with a distinct shift in resonant wavelength	8
3D designed battery-free wireless origami pressure sensor	8
SU-8 cantilever with integrated pyrolyzed glass-like carbon piezoresistor	8
Portable comprehensive two-dimensional micro-gas chromatography using an integrated flow-restricted pneumatic modulator	8
Exploring the potential and safety of quantum dots in allergy diagnostics	8
High-performance hybrid nanogenerator for self-powered wireless multi-sensing microsystems	8
Hydrodynamic metasurface for programming electromagnetic beam scanning on the Azimuth and elevation planes	7