Journal of Microelectromechanical Systems

Papers
(The TQCC of Journal of Microelectromechanical Systems is 5. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-05-01 to 2025-05-01.)
ArticleCitations
A Micro-Force Measurement System Based on Lorentz Force Particle Analyzer for the Cleanliness Inspection of Metal Materials78
Front Cover56
TechRxiv: Share Your Preprint Research with the World!46
Front Cover34
MEMS Pitch Gyroscope Based on (250-nm)² Gauges Achieving 0.12 °/hr Over 1000 dps Full-Scale33
Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry31
Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation31
Optimization of MEMS Matching Network for the Sensitivity of GHz Low-Power Wake-Up Receivers30
Perovskite Nickelate Actuators26
Journal of Microelectromechanical Systems Publication Information26
Transducers 202326
A Novel Inline Near-Zero Thermopile RF MEMS Power Sensor25
Design and Fabrication of a Micropillar-Pumped Polymer Loop Heat Pipe25
Temperature Dependence Modeling and Thermal Sensitivity Reduction of Bulk Micromachined Silicon MEMS Lamé Resonators24
Microfluidic Biosensor for the In Vitro Electrophysiological Characterization of Actin Bundles24
Journal of Microelectromechanical Systems Publication Information24
MEMS Switching Voltage Regulator Using a Normally-On Electret Relay23
Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator23
A Reusable Pseudo-Liquid-to-Solid Inertial Switch Based on Hetero-Coated Galinstan Droplets22
Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors21
2021 Index Journal of Microelectromechanical Systems Vol. 3020
A Novel Parametric System-Level Modeling Method for MEMS Devices Combining Artificial Neural Networks and Behavior Description20
Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field19
Parametric Resonators With a Floating Rotor: Sensing Strategy for Devices With an Increased Stiffness and Compact Design19
A 2D MEMS Crosstalk-Free Electromagnetic Micromirror for LiDAR Application19
Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression19
The Establishment and Verification of the Sensitivity Model of the Piezoresistive Pressure Sensor Based on the New Peninsula Structure18
Direct Growth and Fabrication of Tungsten Coated GaN Nanowire Probes on Cantilevers for Scanning Probe Microscopy18
A Suspended Metamaterial Mirror for Hyperspectral Shortwave Infrared Fabry-Perot Filters18
Optical Characterization of Dynamic CMUTs Using Zygo Optical Profilometers: An Alternative to Laser Doppler Vibrometers18
A Piezoelectric Micro Machined Ultrasonic Transducer Based Hybrid-Morph AlScN Film18
1.3 mm2 Nav-Grade NEMS-Based Gyroscope17
2022 Reviewers List16
A Microfluidic Chip for Growth and Characterization of Adult Rat Hippocampal Progenitor Cell Neurospheroids15
TechRxiv: Share Your Preprint Research with the World!15
TechRxiv: Share Your Preprint Research with the World!15
Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters15
Nanoporous Silicon Membrane Embedded With Dielectrophoresis (DEP) Electrodes for Ultrafiltration Improvement for Artificial Kidney14
Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization14
Investigation of Vapor HF Sacrificial Etching Characteristics Through Submicron Release Holes for Wafer-Level Vacuum Packaging Based on Silicon Migration Seal14
TechRxiv: Share Your Preprint Research with the World!13
Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation13
TC f Manipulation in AlScN Nanomechanical Resonators Using Dual-Mode Parametric Excitation13
In-Plane Orientational Control of Electronic Components Using Pattern Complementarity in a Self-Assembling System13
Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor13
Journal of Microelectromechanical Systems12
Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone12
A Rapid Circuit Phase Error Identification and Compensation Method for MEMS QMG Achieving 99.7% Reduction in ZRO Drift12
Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer12
MEMS Air-Damped Isolator for Dual-Axis Micromirrors: Broad-Range Frequency Vibration Isolation12
Design and Fabrication Method of a Large-Size Electromagnetic MEMS Two-Dimensional Scanning Micromirror12
Journal of Microelectromechanical Systems12
Critical Issues in MEMS Property Measurement and Variation Measured by Nanoindentation: Error Sources and Uncertainty12
Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers12
Integrated Microfluidic System for Mechanical Agitation-Based Cell Lysis and Fluorescence Detection Using Reduced Amount of Reagent12
Bimorph Pinned Piezoelectric Micromachined Ultrasonic Transducers for Space Imaging Applications11
A Weakly Coupled Tuning Fork MEMS Electric Field Sensor With High Resolution and Wide Measurement Range11
Journal of Microelectromechanical Systems11
Wafer-Level Fabrication of FAIMS Chips Based on TGV Technology11
Low-Energy Consumption Actuation for Microelectrothermal Actuators via Capacitive Discharge Excitation11
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions11
Characterization of Al and Ni-P Films as Hardmasks for the ICP-RIE Plasma Etching Bosch Process11
Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping10
The Influences of Non-Volatile Surface Compound Layer on the Dry Etching of Borosilicate Glass10
A Multilayered Structure for Packageless Acoustic- Wave Devices With Ultra-Small Sizes10
Front Cover10
Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation10
Piezoelectric Deactuation-Based Bi-Stable MEMS Switch: MEM-Z NVM10
Turnover Temperature Point Adjustment in Mechanically Coupled Single-Crystal Silicon MEMS Resonators10
Electronic Stethoscope Based on Triangular Cantilever Piezoelectric Bimorph MEMS Transducers10
Fabrication of 32×32 2 D CMUT Arrays on a Borosilicate Glass Substrate With Silicon- Through-Wafer Interconnects Using Non- Aligned and Aligned Anodic Bonding10
Crosstalk Analysis to GHz Bulk-Acoustic-Wave Array for Addressable Micro/Nanoscale Particle Trapping10
Table of Contents10
A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion9
Glass-Based Micro-Hotplate With Low Power Consumption and TGV Structure Through Anodic Bonding and Glass Thermal Reflow9
Phononic Integrated Circuit Component Design and Analysis for Surface Acoustic Waves in ScAlN on Silicon Carbide9
A Review on MEMS Silicon Resonant Accelerometers9
Response Speed Characterization of a Thermally Actuated Programmable Metamaterial9
Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film9
Real-Time Phase Compensation for Scale Factor Nonlinearity Improvement Over Temperature Variations for MEMS Gyroscope9
A Silicon Migration Model Incorporating Anisotropic Surface Energy and Non-Uniform Diffusivity9
Toward 120 dB CMOS-MEMS Arrayed Accelerometers Measuring Through kg Shock Events9
TechRxiv: Share Your Preprint Research with the World!9
Front Cover9
Table of Contents8
Electrowetting Ionic Liquid Flow Controller8
Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography8
Bistability in Coupled Opto-Thermal Micro-Oscillators8
Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction8
IEEE Access8
A Silicon MEMS Quatrefoil Suspension Gyroscope8
Compact, High-Performance Positive Magnetophoresis Chip With Integrated Patterned Magnet for Efficient Particle Trapping8
An Air-Coupled Electrostatic Ultrasound Transducer Using a MEMS Microphone Architecture7
Transducers 20257
Whisker Sensor With Extended Measurement Range Through Jamming Effects Using 3D-Printed Tetrapod Particles7
Phononic Frequency Combs in Atomically Thin Nanoelectromechanical Resonators Via 1:1 and 2:1 Internal Resonances7
IEEE EDS Lester F. Eastman Award7
Breakdown and Healing of Tungsten-Oxide Films on Microelectromechanical Relay Contacts7
High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance7
Disposable Piezoresistive MEMS Airflow Sensor for Chronic Respiratory Disease Detection7
Member ad suite7
Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications7
TechRxiv: Share Your Preprint Research with the World!7
High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror7
C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz7
Activation Model of Nano Getter for MEMS Devices Based on Sandwich Structures of Au-Porous Ti-Dense Ti Film7
Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism7
Synchronized Opto-Electro-Mechanical Measurements for Estimation of Energy Dissipation in Thin-Film-Piezoelectricon-Substrate MEMS/NEMS Devices7
High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays6
Front Cover6
Continuous and Non-Invasive Monitoring of Blood Pressure Based on Wearable Piezoelectric Micromachined Ultrasonic Transducers Array6
Prestressing-Based Thermal Budget Study of MEMS Cantilever and Its Application in Package Processes6
A Monolithic Forward-View Optical Scanner by a Pair of Upright MEMS Mirrors on a SiOB for LiDAR Applications6
2024 Index Journal of Microelectromechanical Systems Vol. 336
Coupled Thin Film Hydrogenated Amorphous Silicon Microresonator Arrays6
Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory6
TechRxiv: Share Your Preprint Research with the World!6
Highly Selective Etching of Silicon Dioxide Over Aluminum Using Mixtures of Sulfuric Acid and Hydrofluoric Acid6
Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators6
Sensing Voltage at Electrically Floating Nodes: A Path Toward Enhancing Performance and Robustness in Capacitive MEMS Resonators6
Exploring Ru Compatibility With Al-Ge Eutectic Wafer Bonding6
High-Temperature Acoustic and Electric Characterization of Ferroelectric Al₀.₇Sc₀.₃N Films6
Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching6
Passive Vibration Control and Tunable Damping of MEMS Resonators via Electrical Autoparametric Resonance6
Front Cover6
Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors6
Front Cover5
A 3 Degrees-of-Freedom Electrothermal Micro-Positioner for Optical Chip-to-Chip Alignment5
A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles5
On Enhancing the Sensitivity of Resonant Thermometers Based on Parametric Modulation5
Piezoelectric Disk Gyroscope Fabricated With Single-Crystal Lithium Niobate5
MEMS-Oriented Single-Crystalline-Silicon Through-Silicon-Via Based on Filling and Oxidation of Silicon Powders5
Journal of Microelectromechanical Systems5
Introducing IEEE Collabratec5
IEEE Access5
Front Cover5
Lock-In Amplified Fluorescence Spectroscopy in a Digital Microfluidic Configuration for Antibiotic Detection of Ciprofloxacin in Milk5
Fabrication of a Novel GaAs Thermopile Sensor for RF Amplitude Demodulation5
Fabrication of Capacitive Micromachined Ultrasonic Transducers With High-k Insulation Layer Using Silicon Fusion Bonding5
Front cover5
Synchronization in Pairs of Opto-Thermally Driven Mechanically Coupled Micro-Oscillators5
A Tunable Two-Stage Bandpass Filter Incorporating Two Electromagnetically Coupled Curved Beams5
Table of Contents5
37th Annual IEEE Conference on Micro Electro Mechanical Systems5
Accurate Identification of the Evolution of MEMS Resonant Accelerometer Residual Stresses at the Wafer-Die-Chip Level5
Widely-Tunable MEMS Phononic Frequency Combs by Multistage Bifurcations Under a Single-Tone Excitation5
Roll to Roll Imprinting PDMS Microstructures Under Reduced Ambient Pressures5
0.10633087158203