Journal of Microelectromechanical Systems

Papers
(The TQCC of Journal of Microelectromechanical Systems is 7. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2020-02-01 to 2024-02-01.)
ArticleCitations
A1 Resonators in 128° Y-cut Lithium Niobate with Electromechanical Coupling of 46.4%84
A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films83
MEMS Resonators for Frequency Reference and Timing Applications64
Epitaxial Aluminum Scandium Nitride Super High Frequency Acoustic Resonators58
High $Q$ Antisymmetric Mode Lithium Niobate MEMS Resonators With Spurious Mitigation41
A Parylene Neural Probe Array for Multi-Region Deep Brain Recordings40
Enabling Higher Order Lamb Wave Acoustic Devices With Complementarily Oriented Piezoelectric Thin Films39
A Sensitivity Tunable Accelerometer Based on Series-Parallel Electromechanically Coupled Resonators Using Mode Localization36
Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators34
Airborne Piezoelectric Micromachined Ultrasonic Transducers for Long-Range Detection33
Engineering a Compliant Mechanical Amplifier for MEMS Sensor Applications33
Aluminum Nitride Combined Overtone Resonators for the 5G High Frequency Bands32
CMOS-Integrated Aluminum Nitride MEMS: A Review31
X-Cut Lithium Niobate-Based Shear Horizontal Resonators for Radio Frequency Applications31
1.3 mm2 Nav-Grade NEMS-Based Gyroscope30
Microfabricated Neuroaccelerometer: Integrating Sensing and Reservoir Computing in MEMS26
A Miniaturized EHT Platform for Accurate Measurements of Tissue Contractile Properties25
Additive Assembly for PolyJet-Based Multi-Material 3D Printed Microfluidics23
Nonlinear Response of PZT-Actuated Resonant Micromirrors22
A Ceramic PZT-Based PMUT Array for Endoscopic Photoacoustic Imaging21
A Paper-Based Flexible Tactile Sensor Array for Low-Cost Wearable Human Health Monitoring21
DLP 3D Printed “Intelligent” Microneedle Array (iμNA) for Stimuli Responsive Release of Drugs and Its in Vitro and ex Vivo Characterization20
Geometric Imperfection Characterization and Precise Assembly of Micro Shell Resonators20
A Two-Step Fabrication Method for 3D Printed Microactuators: Characterization and Actuated Mechanisms20
Fabrication of Injectable Micro-Scale Opto- Electronically Transduced Electrodes (MOTEs) for Physiological Monitoring20
Measurement of Tidal Tilt by a Micromechanical Inertial Sensor Employing Quasi-Zero- Stiffness Mechanism19
Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single Resonator19
Acoustic Loss in Thin-Film Lithium Niobate: An Experimental Study19
Monolithic Multiband MEMS RF Front-End Module for 5G Mobile19
High Quality Co-Sputtering AlScN Thin Films for Piezoelectric Lamb-Wave Resonators18
Micromechanical Switch-Based Zero-Power Chemical Detectors for Plant Health Monitoring18
A 512-Channel Multi-Layer Polymer-Based Neural Probe Array18
Controlling Residual Stress and Suppression of Anomalous Grains in Aluminum Scandium Nitride Films Grown Directly on Silicon18
Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch17
Tunable Terahertz Free Spectra Range Using Electric Split-Ring Metamaterial17
A MEMS Resonant Accelerometer With High Relative Sensitivity Based on Sensing Scheme of Electrostatically Induced Stiffness Perturbation17
Fabrication of 2D Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays on Insulating Substrates With Through-Wafer Interconnects Using Sacrificial Release Process17
Piezoelectric Micromachined Ultrasonic Transducers With Pinned Boundary Structure17
Design, Fabrication and Experimental Validation of a Metaplate for Vibration Isolation in MEMS17
Surface Texture Detection With a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial Finger16
Miniaturized Electronic Circuit Design Challenges for Ingestible Devices16
Micromachined Thermopile Based High Heat Flux Sensor16
Long-Term Characterization of a New Wide-Angle Micromirror With PZT Actuation and PZR Sensing16
Low-Power Dual Mode MEMS Resonators With PPB Stability Over Temperature16
Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism16
Bimorph Pinned Piezoelectric Micromachined Ultrasonic Transducers for Space Imaging Applications15
Characterization and Compensation of Detection Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope15
Numerical Modelling of Non-Linearities in MEMS Resonators15
Considerations for an 8-inch Wafer-Level CMOS Compatible AlN Pyroelectric 5–14 μm Wavelength IR Detector Towards Miniature Integrated Photonics Gas Sensors15
Nanostrain Resolution Strain Sensing by Monocrystalline 3C-SiC on SOI Electrostatic MEMS Resonators15
A Novel Low-g MEMS Bistable Inertial Switch With Self-Locking and Reverse-Unlocking Functions15
Quantification of Energy Dissipation Mechanisms in Toroidal Ring Gyroscope14
Development of Dual-Frequency PMUT Arrays Based on Thin Ceramic PZT for Endoscopic Photoacoustic Imaging14
Piezoelectric RF MEMS Switches on Si-on-Sapphire Substrates14
Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators14
Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters14
Study on Fusion Mechanisms for Sensitivity Improvement and Measurable Pressure Limit Extension of Pirani Vacuum Gauges With Multi Heat Sinks14
ScAlN/AlN Film-Based Lamé Mode Resonator With High Effective Electromechanical Coupling Coefficient14
Sealing of MEMS Atomic Vapor Cells Using Cu-Cu Thermocompression Bonding14
Optimization of MEMS Vibration Energy Harvester With Perforated Electrode14
Low Phase Noise RF Oscillators Based on Thin-Film Lithium Niobate Acoustic Delay Lines13
Reconfigurable Multiband Terahertz Metamaterial Using Triple-Cantilevers Resonator Array13
Fundamental Noise Limits and Sensitivity of Piezoelectrically Driven Magnetoelastic Cantilevers13
De-Icing Device With Self-Adjusting Power Consumption and Ice Sensing Capabilities13
Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation13
Dynamics of V-Shaped Electrothermal MEMS-Based Resonators13
A PMUT Integrated Microfluidic System for Fluid Density Sensing13
Three-Axis Capacitive Sensor Arrays for Local and Global Shear Force Detection13
Low Loss Acoustic Delay Lines Based on Solidly Mounted Lithium Niobate Thin Film13
Flow Velocity Gradient Sensing Using a Single Curved Bistable Microbeam12
Ultra-High-Q Gallium Nitride SAW Resonators for Applications With Extreme Temperature Swings12
Design and Development of the MEMS-Based High-g Acceleration Threshold Switch12
Miniaturized PMUT-Based Receiver for Underwater Acoustic Networking12
A Novel MEMS Speaker With Peripheral Electrostatic Actuation12
Polysilicon Grating Switches for LiDAR12
A Low-Noise High-Order Mode-Localized MEMS Accelerometer12
Thickness-Lamé Thin-Film Piezoelectric-on-Silicon Resonators12
Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography12
A Piezoelectric Micromachined Ultrasonic Transducer Using Thin-Film Lithium Niobate12
A Self-Powered MEMS Inertial Switch for Potential Zero Power-Consumption Wake-Up Application12
On the Effect of Water-Induced Degradation of Thin-Film Piezoelectric Microelectromechanical Systems12
Optimization of Inactive Regions of Lithium Niobate Shear Mode Resonator for Quality Factor Enhancement12
Multiphysics Analysis and Practical Implementation of a Soft μ-Actuator- Based Microfluidic Micromixer12
Quad Mass Resonator With Frequency Mismatch of 3 ppm Trimmed by Focused Ion Beam12
High Dynamic Range AFM Cantilever With a Collocated Piezoelectric Actuator-Sensor Pair12
Specific Sensing Mechanism Investigation of Surface Acoustic Wave Humidity Sensors Coated With Uniform Graphene Oxide Membrane11
Bendable Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays Based on Silicon-On-Insulator (SOI) Technology11
Highly Selective Guiding Springs for Large Displacements in Surface MEMS11
Sub-GHz X-Cut Lithium Niobate S₀ Mode MEMS Resonators11
Engineering Efficient Acoustic Power Transfer in HBARs and Other Composite Resonators11
Highly Responsive Metal Oxide (V2O5)-Based NEMS Pirani Gauge for In-Situ Hermeticity Monitoring11
On-Chip CMOS-MEMS-Based Electroosmotic Flow Micropump Integrated With High-Voltage Generator11
Non-Contact Ultrasonic Flow Measurement for Small Pipes Based on AlN Piezoelectric Micromachined Ultrasonic Transducer Arrays11
A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor11
Design and Characterization of 3-Stack MEMS-Based Passive Flow Regulators for Implantable and Ambulatory Infusion Pumps10
1-Port Piezoelectric Resonators With > 100 V/V Gain10
On Enhancing the Sensitivity of Resonant Thermometers Based on Parametric Modulation10
Modeling of Beam Electrothermal Actuators10
Miniature MEMS: Novel Key Components Toward Terahertz Reconfigurability10
Bi-Stable Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducer (PMUT)10
Acoustic Loss of GHz Higher-Order Lamb Waves in Thin-Film Lithium Niobate: A Comparative Study10
Systematic Characterization of Hydrophilized Polydimethylsiloxane10
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions10
Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication10
A Monolithic Forward-View MEMS Laser Scanner With Decoupled Raster Scanning and Enlarged Scanning Angle for Micro LiDAR Applications10
A Low Power Micro-Electromechanical Resonator-Based Digital to Analog Converter10
Design and Fabrication of a MEMS Capacitance Vacuum Sensor Based on Silicon Buffer Block10
Nanostructured Spacers for Thermionic and Thermophotovoltaic Energy Converters10
Zero-Level Packaged RF-MEMS Switched Capacitors on Glass Substrates10
On the Discharge Transport Mechanisms Through the Dielectric Film in MEMS Capacitive Switches10
Two-Dimensional CMOS MEMS Thermal Flow Sensor With High Sensitivity and Improved Accuracy10
Dynamic Performance Improvement of Piezoelectrically Driven Micro-Lens Actuators10
SAW Filters With Excellent Temperature Stability and High Power Handling Using LiTaO3/SiC Bonded Wafers9
High-Stability Quartz Resonant Accelerometer With Micro-Leverages9
Fused Quartz Dual-Shell Resonator Gyroscope9
Low Offset and Noise in High Biased GaN 2DEG Hall-Effect Plates Investigated With Infrared Microscopy9
A Novel Thermistor-Based RF Power Sensor With Wheatstone Bridge Fabricating on MEMS Membrane9
A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped Structure9
Hierarchical Integration of Thin-Film NiTi Actuators Using Additive Manufacturing for Microrobotics9
FPCB Masked One-Step Etching Large Aperture Mirror for LiDAR9
Fabrication of Bloch Long Range Surface Plasmon Waveguides Integrating Counter Electrodes and Microfluidic Channels for Multimodal Biosensing9
Analytical Study and Thermal Compensation for Capacitive MEMS Accelerometer With Anti-Spring Structure9
Uncooled Infrared Detector Based on an Aluminum Nitride Piezoelectric Fishnet Metasurface9
Direct Phase Measurement and Compensation to Enhance MEMS Gyroscopes ZRO Stability9
A 5.3 GHz Al0.76Sc0.24N Two-Dimensional Resonant Rods Resonator With a kt2 of 23.9%9
High-Temperature Acoustic and Electric Characterization of Ferroelectric Al₀.₇Sc₀.₃N Films9
High-Intensity Airborne CMUT Transmitter Array With Beam Steering9
Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators9
Eye-Tracking Monitoring Based on PMUT Arrays9
Evidence of Smaller 1/F Noise in AlScN-Based Oscillators Compared to AlN-Based Oscillators9
Direct Laser Writing for Deterministic Lateral Displacement of Submicron Particles8
Design and Fabrication of a MEMS-Based Break Junction Device for Mechanical Strain-Correlated Optical Characterization of a Single-Molecule8
Design Considerations for Micro-Glassblown Atomic Vapor Cells8
A SiN Microcalorimeter and a Non-Contact Precision Method of Temperature Calibration8
Electronic Immunoaffinity Assay for Differential Leukocyte Counts8
Tactile Sensing With Scalable Capacitive Sensor Arrays on Flexible Substrates8
Directional Sound Sensor With Consistent Directivity and Sensitivity in the Audible Range8
Scalable Superomniphobic Surfaces8
Piezoelectric Disk Gyroscope Fabricated With Single-Crystal Lithium Niobate8
Sidewall Metallization on CMOS MEMS by Platinum ALD Patterning8
A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles7
Crystal Orientation Dependent Dual Frequency Ovenized MEMS Resonator With Temperature Stability and Shock Robustness7
Radially Pleated Disk Resonator for Gyroscopic Application7
Crossover/Veering in V-Shaped MEMS Resonators7
An 8-Bit Digitally Operated Micromachined Accelerometer7
Modified Coefficient of Equivalent Mass to Explain Decreased Relative Sensitivity of Piezoelectric Cantilever Humidity Sensor in High Mode7
A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion7
A Multilayered Structure for Packageless Acoustic- Wave Devices With Ultra-Small Sizes7
Wafer-Level Low-Temperature Solid-Liquid Inter-Diffusion Bonding With Thin Au-Sn Layers for MEMS Encapsulation7
Printed Electroceutical Dressings for the Inhibition of Biofilms and Treatment of Chronic Wounds7
Miniature Electrodynamic Wireless Power Transmission Receiver Using a Micromachined Silicon Suspension7
Vibrating Mesh Atomizer for Spin-Spray Deposition7
Inkjet-Printed Hydrogen Peroxide Sensor With Sensitivity Enhanced by Plasma Activated Inorganic Metal Salt Inks7
Modeling and Characterization of a Novel In-Plane Dual-Axis MEMS Accelerometer Based on Self-Support Piezoresistive Beam7
Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges7
Thermal Response and TC f of GaN/AlN Heterostructure Multimode Micro String Resonators From −10 °C Up to 325 °C7
A Scalable, Hierarchical Rib Design for Larger-Area, Higher-Porosity Nanoporous Membranes for the Implantable Bio-Artificial Kidney7
Implementation of Dual-Nonlinearity Mechanism for Bandwidth Extension of MEMS Multi-Modal Energy Harvester7
Electromechanical Equivalent Circuit Model for Axisymmetric PMUTs With Elastic Boundary Conditions7
A Ring Gyroscope With On-Chip Capacitive Stress Compensation7
Anchor Design Affects Dominant Energy Loss Mechanism in a Lamé Mode MEM Resonator7
Ultra-Low Relative Frequency Split Piezoelectric Ring Resonator Designed for High-Performance Mode-Matching Gyroscope7
The Model of Etch Rates of Crystallographic Planes of Sapphire Based on Step Flow Mechanism7
Polymer/Ceramic MEMS: A Nanomechanical Sensor Platform With Low Temperature High Gauge Factor ITO for Electromechanical Transduction7
A Non-Linear Lumped Model for the Electro-Mechanical Coupling in Capacitive MEMS Microphones7
Hybrid and Passive Tissue-Anchoring Mechanism for Ingestible Resident Devices7
AFM Microcantilever With a Collocated AlN Sensor-Actuator Pair: Enabling Efficient Q-Control for Dynamic Imaging7
A Pulsed Wave Doppler Ultrasound Blood Flowmeter by PMUTs7
3D Nanoprinted Liquid-Core-Shell Microparticles7
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