OOIR: Observatory of International Research

Papers

(The TQCC of Journal of Microelectromechanical Systems is 5. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-03-01 to 2025-03-01.)

Article	Citations
Activation Model of Nano Getter for MEMS Devices Based on Sandwich Structures of Au-Porous Ti-Dense Ti Film	72
Front Cover	53
J. J. Ebers Award	42
Journal of Microelectromechanical Systems Publication Information	31
Fused Silica Micro Shell Resonators by a Wafer-Level Thermal Reflow Process	29
Journal of Microelectromechanical Systems	27
Front Cover	27
Table of Contents	25
IEEE Access	25
Journal of Microelectromechanical Systems	24
TechRxiv: Share Your Preprint Research with the World!	23
Front Cover	23
Table of Contents	23
TechRxiv: Share Your Preprint Research with the World!	23
Table of Contents	22
TechRxiv: Share Your Preprint Research with the World!	22
Member ad suite	21
TechRxiv: Share Your Preprint Research with the World!	21
A 100 nm Thick, 32 kHz X-Cut Lithium Niobate Piezoelectric Nanoscale Ultrasound Transducer for Airborne Ultrasound Communication	20
Front Cover	20
A Non-Linear Lumped Model for the Electro-Mechanical Coupling in Capacitive MEMS Microphones	19
Portable Dielectrophoresis Microfluidic Chip Integrated With Microscopic Platform for Water Blooms Monitoring	19
Perovskite Nickelate Actuators	19
Non-Contact Ultrasonic Flow Measurement for Small Pipes Based on AlN Piezoelectric Micromachined Ultrasonic Transducer Arrays	19
Directional Sound Sensor With Consistent Directivity and Sensitivity in the Audible Range	19

Quad Mass Resonator With Frequency Mismatch of 3 ppm Trimmed by Focused Ion Beam	19
Tunable Terahertz Free Spectra Range Using Electric Split-Ring Metamaterial	19
Feedforward Control Algorithms for MEMS Galvos and Scanners	18
Rigorous Model-Based Mask Data Preparation Algorithm Applied to Grayscale Lithography for the Patterning at the Micrometer Scale	18
Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism	17
Fabrication of Bloch Long Range Surface Plasmon Waveguides Integrating Counter Electrodes and Microfluidic Channels for Multimodal Biosensing	17
Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS Mirrors	17
A Micro-Force Measurement System Based on Lorentz Force Particle Analyzer for the Cleanliness Inspection of Metal Materials	16
Fabrication of 32 × 32 2D Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays on a Borosilicate Glass Substrate With Silicon-Through-Wafer Interconnects Using Sacrificial Release Process	16
JMEMS Letters Fabrication of Self-Sealed Circular Microfluidic Channels in Glass by Thermal Blowing Method	15
Chipping Energy Threshold in MEMS Sensors	15
Multilayer Masking Technology for Fabricating Airborne CMUTs With Multi-Depth Fluidic Trenches	15
Triple Mass Resonator for Electrostatic Quality Factor Tuning	15
MEMS-Scale Angular Position Sensor Based on Ultracapacitor Technology	15
Bistability in Coupled Opto-Thermal Micro-Oscillators	14
Characterization and Compensation of Detection Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope	14
Fused Quartz Dual-Shell Resonator Gyroscope	14
Modeling and Analysis of a MEMS Vibrating Ring Gyroscope Subject to Imperfections	14
Development of Programmable UV-LED Microlithography System for 3D Microfabrication	14
Thermal Flow Sensor With a Bidirectional Thermal Reference	13
Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation	13
A Biaxially Stretchable and Washable LED Display Enabled by a Wavy-Structured Metal Grid	13
On-Chip Generation Method of Shock Load and Characterization of Microstructure Shock Process	13
Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges	12
Stability and Failure Analysis of a W-Based Microhotplate	12
Compact, High-Performance Positive Magnetophoresis Chip With Integrated Patterned Magnet for Efficient Particle Trapping	12
Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications	12
Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography	12
Lab-on-PCB With Pre-Stored Reagents at Low Temperature and Automatic Microfluidic Handling	12
A ScAlN-Based Piezoelectric MEMS Microphone With Sector-Connected Cantilevers	11
Phase Noise Optimization of MEMS Resonant Accelerometer Based on AC Polarization	11
Phononic Frequency Combs in Atomically Thin Nanoelectromechanical Resonators Via 1:1 and 2:1 Internal Resonances	11
Theoretical Analysis and Verification on ScAlN-Based Piezoelectric Micromachined Ultrasonic Transducers With DC Bias	11
A Silicon MEMS Quatrefoil Suspension Gyroscope	11
Electrowetting Ionic Liquid Flow Controller	10
A Q-factor Boost Strategy for High-Order Width-Extensional Mode MEMS Resonators by Varied Unit Length	10
Erratum to “Thin-Film Silicon MEMS for Dynamic Mass Sensing in Vacuum and Air: Phase Noise, Allan Deviation, Mass Sensitivity and Limits of Detection” [Jun 19 390-400]	10
Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry	10
A Radiofrequency Threshold Temperature Sensor Using a Hf_0.5Zr_0.5O₂ Device and a Microacoustic Piezoelectric Resonant Sensor	10
High-Quality Light Field Microscope Imaging Based on Microlens Arrays	10
A “Smart” Gas Sensing System Composed of Micro-Hotplates and Artificial Neural Network	10
A PZT Thin-Film Traveling-Wave Micro-Motor With Stator Teeth Based on MEMS Technology	10
Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction	10
Characterization and Optimization of PZT-Based PMUTs With Wide Range Frequency Tuning	9
MEMS Pitch Gyroscope Based on (250-nm)² Gauges Achieving 0.12 °/hr Over 1000 dps Full-Scale	9
The Dynamic Characteristics of a Mode-Localized Resonant Accelerometer	9
Whisker Sensor With Extended Measurement Range Through Jamming Effects Using 3D-Printed Tetrapod Particles	9
Single-Wafer Combinatorial Optimization of Border Rings for Bulk Acoustic Wave Filters	9
18 GHz Solidly Mounted Resonator in Scandium Aluminum Nitride on SiO₂/Ta₂O₅ Bragg Reflector	9
Introducing IEEE Collabratec	9

Optimization of MEMS Matching Network for the Sensitivity of GHz Low-Power Wake-Up Receivers	9
Journal of Microelectromechanical Systems Publication Information	9
IEEE Access	9
TechRxiv: Share Your Preprint Research with the World!	8
TechRxiv: Share Your Preprint Research with the World!	8
Pressure Sensor Embedded Inductive Coil Toward a Wireless Pressure Sensing Stent	8
TechRxiv: Share Your Preprint Research with the World!	8
Journal of Microelectromechanical Systems	8
TechRxiv: Share Your Preprint Research with the World!	8
High-Stability Quartz Resonant Accelerometer With Micro-Leverages	8
IEEE EDS Lester F. Eastman Award	8
Journal of Microelectromechanical Systems	8
TechRxiv: Share Your Preprint Research with the World!	8
Table of Contents	8
Transducers 2023	8
Transfer Learning for Test Time Reduction of Parameter Extraction in MEMS Accelerometers	7
Silicon Micro-Channel Definition via ICP-RIE Plasma Etching Process Using Different Aluminum Hardmasks	7
Resource Allocation in Vibration Energy Harvesters	7
Design, Modeling and Fabrication of TPoS MEMS Resonators With Improved Performance at 1 GHz	7
HF Under-Etching Prevention for Advanced THz Micromachined Waveguide Devices	7
Exploration and Realization of Novel High-Q Bulk Modes Using Support Transducer Topology	7
Rapid Makerspace Microfabrication and Characterization of 3D Microelectrode Arrays (3D MEAs) for Organ-on-a-Chip Models	7
Optimization of MEMS Vibration Energy Harvester With Perforated Electrode	7
Determining the Nonlinear Motion of MEMS Gyroscopes Using the Harmonic Balancing Method	7
Aluminum Nitride 4-Beam Piezoelectric Nanoscale Ultrasound Transducer (pNUT)	7
A PMUT Integrated Microfluidic System for Fluid Density Sensing	7
An Air-Coupled Electrostatic Ultrasound Transducer Using a MEMS Microphone Architecture	6
Modeling and Characterization of a Novel In-Plane Dual-Axis MEMS Accelerometer Based on Self-Support Piezoresistive Beam	6
Soft Contact Lens With Embedded Moiré Patterns-Based Intraocular Pressure Sensors	6
MEMS Switching Voltage Regulator Using a Normally-On Electret Relay	6
Crossover/Veering in V-Shaped MEMS Resonators	6
Breakdown and Healing of Tungsten-Oxide Films on Microelectromechanical Relay Contacts	6
Silicon MEMS Nanomechanical Membrane Flexure Sensor With Integrated High Gauge Factor ITO	6
Folded MEMS Platform Based on Polymeric Flexible Hinges for 3D Integration of Spatially-Distributed Sensors	6
Silicon-Based Stretchable Structure via Parylene Kirigami Interconnection	6
Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator	6
A Reusable Pseudo-Liquid-to-Solid Inertial Switch Based on Hetero-Coated Galinstan Droplets	6
Fabrication of Polymer Membrane-Suspended Microstructures on Printed Circuit Boards	6
On the Dynamic Range and Resolution of Thermal-Piezoresistive Resonant Mass Sensors	6
Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators	6
High-Temperature Acoustic and Electric Characterization of Ferroelectric Al₀.₇Sc₀.₃N Films	6
High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance	6
On-Chip Frequency Tuning of Fast Resonant MEMS Scanner	6
Continuous Mode-Reversal FM Accelerometer With 60-g FSR, 10-μg/K Drift, and VRE Rejection	6
Study of Thin Film LiNbO₃ Laterally Excited Bulk Acoustic Resonators	6
On Sampling Rate Limits in Bistable Microbeam Sensors	6
Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory	6
A Defect-Based MEMS Phononic Crystal Slab Waveguide in Electronic Circuits	5
Nonlinear Micro-Resonator-Based Comparator With Linear Hysteresis Tuning	5
Remote Actuation of Silicon Nitride Nanomechanical Resonators Using On-Chip Substrate Capacitors	5
Development of ScAlN PMUTs for Medical Applications	5
Design and Fabrication of a Micropillar-Pumped Polymer Loop Heat Pipe	5
A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film	5
An Approach to Near Zero Power Bi-Stable Driving With a Simple Pulse Signal for RF MEMS Switch	5
Continuous and Non-Invasive Monitoring of Blood Pressure Based on Wearable Piezoelectric Micromachined Ultrasonic Transducers Array	5
Piezoelectric Micromachined Ultrasonic Transducers With Superior Frequency Control	5
Temperature Dependence Modeling and Thermal Sensitivity Reduction of Bulk Micromachined Silicon MEMS Lamé Resonators	5
Experimental Study of Electrical Breakdown in MEMS/NEMS Devices With Deep Submicron Gaps	5
Enhanced Performance in Energy of Low Frequency Triboelectric-Nanogenerator Systems	5
Infrared-Driven Rapid Quantification of Magnetophoretically Trapped Drug	5
Microfluidic Biosensor for the In Vitro Electrophysiological Characterization of Actin Bundles	5
Atomization of High Viscous Liquids Using a MEMS Vibrating Mesh With Integrated Microheater	5
High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror	5
Analysis and Compensation of Bias Drift of Force-to-Rebalanced Micro-Hemispherical Resonator Gyroscope Caused by Assembly Eccentricity Error	5
Investigation of Thermal Creep in Metal-Based MEMS Cantilevers	5
Optimization of Hemispherical Shell Resonator Structure Based on Thermoelastic Dissipation	5
Improvement of MEMS Thermomechanical Actuation Efficiency by Focused Ion Beam-Induced Deposition	5
A Microfabricated Nanobubble-Based Sensor for Physiological Pressure Monitoring	5