Journal of Microelectromechanical Systems

Article	Citations
Front Cover	145
Optimization of MEMS Matching Network for the Sensitivity of GHz Low-Power Wake-Up Receivers	61
Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation	55
Front Cover	52
Journal of Microelectromechanical Systems Publication Information	49
Table of Contents	48
Design and Characterization of Micro-Oven-Controlled MEMS Resonators With Two-Dimensional Honeycomb-Lattice Phononic Crystals for Anchor Loss Suppression	44
Vacuum-Packaged 30%-Doped ScAlN Resonators With AlN Absorbers for IR Spectroscopy	43
MEMS Pitch Gyroscope Based on (250-nm)² Gauges Achieving 0.12 °/hr Over 1000 dps Full-Scale	39
Exploring Bias-Instability Noise Sources in Quadrature Error Compensation System for Mode-Split MEMS Gyroscopes	39
Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry	34
Front Cover	32
Journal of Microelectromechanical Systems Publication Information	30
Transducers 2023	30
A Novel Parametric System-Level Modeling Method for MEMS Devices Combining Artificial Neural Networks and Behavior Description	29
In Situ Reversible and Repeatable Actuation of the 3D-Printed Micro-Scale Cantilever Covered With a Light-Heat Converting Film as a New Approach Toward 4D Printing	29
Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors	26
Temperature Dependence Modeling and Thermal Sensitivity Reduction of Bulk Micromachined Silicon MEMS Lamé Resonators	25
A Reusable Pseudo-Liquid-to-Solid Inertial Switch Based on Hetero-Coated Galinstan Droplets	23
Design and Fabrication of a Micropillar-Pumped Polymer Loop Heat Pipe	23
Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator	22
60-g FSR, 6-μg Stability FM Time-Switched Accelerometers Through Shaped Comb Fingers	21
Direct Growth and Fabrication of Tungsten Coated GaN Nanowire Probes on Cantilevers for Scanning Probe Microscopy	20
A Novel Inline Near-Zero Thermopile RF MEMS Power Sensor	20
Microfluidic Biosensor for the In Vitro Electrophysiological Characterization of Actin Bundles	20

Super-Aligned Carbon Nanotube-Based Resistor Array for High-Speed and Polarization Infrared Scene Simulation	20
2022 Reviewers List	19
A Suspended Metamaterial Mirror for Hyperspectral Shortwave Infrared Fabry-Perot Filters	19
TechRxiv: Share Your Preprint Research with the World!	18
Interfacial Electrical and Microstructural Characterization of a Conductive Polysilicon Direct Bonding for MEMS Wafer-Level Packaging	17
In-Plane Orientational Control of Electronic Components Using Pattern Complementarity in a Self-Assembling System	17
A 2D MEMS Crosstalk-Free Electromagnetic Micromirror for LiDAR Application	17
Nanoporous Silicon Membrane Embedded With Dielectrophoresis (DEP) Electrodes for Ultrafiltration Improvement for Artificial Kidney	17
Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization	17
Investigation of Vapor HF Sacrificial Etching Characteristics Through Submicron Release Holes for Wafer-Level Vacuum Packaging Based on Silicon Migration Seal	17
Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression	16
TC f Manipulation in AlScN Nanomechanical Resonators Using Dual-Mode Parametric Excitation	16
A Piezoelectric Micro Machined Ultrasonic Transducer Based Hybrid-Morph AlScN Film	16
Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field	16
TechRxiv: Share Your Preprint Research with the World!	16
Extending MEMS Resonator Performance Through Inductive Feedthrough Cancellation	15
Mechanical Mode Coupled Piezo-on-Silicon Bulk Acoustic Wave MEMS Resonators in Tank Configuration for Q-Enhancement	15
Thermally Stable, BEOL-Configured MEMS-Based One-Time Programmable (OTP) Memory for Cryogenic Embedded Application	15
A Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducer Operating in Thickness-Field-Excitation Mode With Enhanced Acoustic Emission	15
Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation	14
Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor	14
Optical Characterization of Dynamic CMUTs Using Zygo Optical Profilometers: An Alternative to Laser Doppler Vibrometers	14
Integrated Microfluidic System for Mechanical Agitation-Based Cell Lysis and Fluorescence Detection Using Reduced Amount of Reagent	13
Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone	12
Low-Energy Consumption Actuation for Microelectrothermal Actuators via Capacitive Discharge Excitation	12
Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer	12
Wafer-Level Fabrication of FAIMS Chips Based on TGV Technology	12
A Rapid Circuit Phase Error Identification and Compensation Method for MEMS QMG Achieving 99.7% Reduction in ZRO Drift	11
A Weakly Coupled Tuning Fork MEMS Electric Field Sensor With High Resolution and Wide Measurement Range	11
Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers	11
Journal of Microelectromechanical Systems	11
Design of Spurious-Free Surface Acoustic Wave Resonators on LNOI Platform Using Machine Learning	11
MEMS Air-Damped Isolator for Dual-Axis Micromirrors: Broad-Range Frequency Vibration Isolation	11
Characterization of Al and Ni-P Films as Hardmasks for the ICP-RIE Plasma Etching Bosch Process	11
Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping	11
Anchor Fin Explored as an Important Design Parameter for Lamb Wave Resonators	11
Design and Fabrication Method of a Large-Size Electromagnetic MEMS Two-Dimensional Scanning Micromirror	11
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions	11
Sub-30 nm Silicon Nanopatterning: Toward Reduced Reflectance and Enhanced Sensitivity in CMOS Image Sensors	10
Front Cover	10
Analysis of Vibration Characteristics of Clamped–Clamped Shallow Arch Beam Subjected to Heat for Micromechanical Resonant Optical Sensing	10
Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation	10
Journal of Microelectromechanical Systems Publication Information	10
High Performance MEMS Magnetic Actuator Based on FeGa and FeGaCr Thin Films	10
Performance Enhancement of the DMS Filter on SiC Substrate Using Intermediate Reflecting Grating	10
Fabrication of 32×32 2 D CMUT Arrays on a Borosilicate Glass Substrate With Silicon- Through-Wafer Interconnects Using Non- Aligned and Aligned Anodic Bonding	10
Turnover Temperature Point Adjustment in Mechanically Coupled Single-Crystal Silicon MEMS Resonators	10
Vertically-Excited High-Order Guided Shear Vertical Surface Acoustic Wave Resonators for 5G and Beyond	10
A Silicon Migration Model Incorporating Anisotropic Surface Energy and Non-Uniform Diffusivity	9
Nonlinearity Reduction in Three-End Serpentine Torsion Bar of MEMS Mirror	9

High-Dynamic-Range Bulk-Mode Piezoelectric MEMS Resonators via Crystal Orientation Tuning for Duffing Nonlinearity Suppression	9
Non-Hermitian MEMS Disk Resonator Based on Thermoelastic Damping Regulation	9
Front Cover	9
A Quasi-Zero Stiffness MEMS Accelerometer With Wide Open-Loop Dynamic Range	9
Table of Contents	9
Table of Contents	9
Response Speed Characterization of a Thermally Actuated Programmable Metamaterial	9
A Center-Bound Type Piezoelectric MEMS Speaker With Flexible Supporting Layer	9
Toward 120 dB CMOS-MEMS Arrayed Accelerometers Measuring Through kg Shock Events	9
TechRxiv: Share Your Preprint Research with the World!	8
A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion	8
Phononic Integrated Circuit Component Design and Analysis for Surface Acoustic Waves in ScAlN on Silicon Carbide	8
Real-Time Phase Compensation for Scale Factor Nonlinearity Improvement Over Temperature Variations for MEMS Gyroscope	8
Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film	8
Front Cover	8
A Review on MEMS Silicon Resonant Accelerometers	8
Glass-Based Micro-Hotplate With Low Power Consumption and TGV Structure Through Anodic Bonding and Glass Thermal Reflow	8
Member ad suite	7
Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography	7
Activation Model of Nano Getter for MEMS Devices Based on Sandwich Structures of Au-Porous Ti-Dense Ti Film	7
Self-Aligned, High-Aspect Ratio Electrodes for Fused Silica Resonators Digitally Defined by Laser Modification of Material	7
Phononic Frequency Combs in Atomically Thin Nanoelectromechanical Resonators Via 1:1 and 2:1 Internal Resonances	7
A Silicon MEMS Quatrefoil Suspension Gyroscope	7
Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications	7
Compact, High-Performance Positive Magnetophoresis Chip With Integrated Patterned Magnet for Efficient Particle Trapping	7
Whisker Sensor With Extended Measurement Range Through Jamming Effects Using 3D-Printed Tetrapod Particles	7
Temporal Dynamics of GHz Acoustic Waves in Chipscale Phononic Integrated Circuits	7
Electrowetting Ionic Liquid Flow Controller	7
Table of Contents	7
Bistability in Coupled Opto-Thermal Micro-Oscillators	7
Spurious Mode Suppression in LiNbO3 A1 Resonators and Filters Beyond 6 GHz With Through-Holes	7
Uniform Whole Wafer Anisotropic Etching of Structural Ta Thin Films	7
Near-Spurious-Free 6.5 GHz XBARs With Dimension-Matched and Response-Averaged Electrodes	7
Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction	7
High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays	6
High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance	6
Table of Contents	6
High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror	6
Incorporating 3-D-Printed Polymer Scaffolds Onto MEMS Resonant Chemical Sensors for Enhanced Performance	6
Analysis of Brittle Fracture Characteristics Under Static/Dynamic Loads in Silicon-Based MEMS Cantilevers	6
TechRxiv: Share Your Preprint Research with the World!	6
C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz	6
Frequency Split Tuning by Joule Heating in Fused Silica Inductive Vibrating Ring Gyroscopes	6
Synchronized Opto-Electro-Mechanical Measurements for Estimation of Energy Dissipation in Thin-Film-Piezoelectricon-Substrate MEMS/NEMS Devices	6
Disposable Piezoresistive MEMS Airflow Sensor for Chronic Respiratory Disease Detection	6
Continuous and Non-Invasive Monitoring of Blood Pressure Based on Wearable Piezoelectric Micromachined Ultrasonic Transducers Array	6
Synchronization Dynamics of MEMS Oscillators With Sub-Harmonic Injection Locking (SHIL) for Emulating Artificial Ising Spins	6
Front Cover	6
Toward Mem-Re-Sensors: Memristor-Like Pinched Hysteresis in an Open-Loop MEMS Resonator Using Third-Order Duffing Nonlinearity	6
An Air-Coupled Electrostatic Ultrasound Transducer Using a MEMS Microphone Architecture	6
Transducers 2025	6
Journal of Microelectromechanical Systems Publication Information	6
Q-Factor Enhancement of Micro Hemispherical Resonators via Optimization of Film Distribution	6
Coupled Thin Film Hydrogenated Amorphous Silicon Microresonator Arrays	6
Table of Contents	5
Front Cover	5
A Novel Optimization and Yield Analysis Method for MEMS Devices Combining Bi-Fidelity Deep Neural Network and Active Subspace	5
Zero-Rate-Output Instability Phenomena in MEMS Gyroscopes With and Without Quadrature Nulling	5
A Tunable Two-Stage Bandpass Filter Incorporating Two Electromagnetically Coupled Curved Beams	5
MEMS-Oriented Single-Crystalline-Silicon Through-Silicon-Via Based on Filling and Oxidation of Silicon Powders	5
Continuously Wearable Stethoscope Based on MEMS Resonant Microphone Array	5
Compact, Scan-Pattern-Switchable 2-D Piezoelectric MEMS Mirror With 1-D Addressable Scanning	5
A 3 Degrees-of-Freedom Electrothermal Micro-Positioner for Optical Chip-to-Chip Alignment	5
Exploring Ru Compatibility With Al-Ge Eutectic Wafer Bonding	5
Prestressing-Based Thermal Budget Study of MEMS Cantilever and Its Application in Package Processes	5
Flexible Fishbone Waveguides Made of Single-Crystal Silicon for Terahertz-Wave Path Switching	5
Roll to Roll Imprinting PDMS Microstructures Under Reduced Ambient Pressures	5
Rapid and Precise Testing Techniques for MEMS Pressure Sensors Without Input Stabilization	5
Widely-Tunable MEMS Phononic Frequency Combs by Multistage Bifurcations Under a Single-Tone Excitation	5
Sensing Voltage at Electrically Floating Nodes: A Path Toward Enhancing Performance and Robustness in Capacitive MEMS Resonators	5
Lock-In Amplified Fluorescence Spectroscopy in a Digital Microfluidic Configuration for Antibiotic Detection of Ciprofloxacin in Milk	5
Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching	5
Phase-Flip Lattice Bulk Acoustic Wave Filter With Unbalanced Terminals Using Hybrid Heterogeneous Integration Technology	5
Highly Selective Etching of Silicon Dioxide Over Aluminum Using Mixtures of Sulfuric Acid and Hydrofluoric Acid	5
37th Annual IEEE Conference on Micro Electro Mechanical Systems	5
The Research of a Miniaturized Ammunition With Built-In MEMS Safety-and-Arming Device for Micro Drones	5
Synchronization in Pairs of Opto-Thermally Driven Mechanically Coupled Micro-Oscillators	5
Effects of Residual Stress on Vibrational Characteristics of Hemispherical Resonators	5
Fabrication of a Novel GaAs Thermopile Sensor for RF Amplitude Demodulation	5
Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors	5

Temperature-Stable CMOS-MEMS Resonators via Arc-Beam-Induced Electrical Stiffness Tuning	5
Front Cover	5
2024 Index Journal of Microelectromechanical Systems Vol. 33	5