OOIR: Observatory of International Research

Papers

(The TQCC of Journal of Microelectromechanical Systems is 5. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-02-01 to 2025-02-01.)

Article	Citations
JMEMS Letters Fabrication of Self-Sealed Circular Microfluidic Channels in Glass by Thermal Blowing Method	68
Tunable Terahertz Free Spectra Range Using Electric Split-Ring Metamaterial	49
Activation Model of Nano Getter for MEMS Devices Based on Sandwich Structures of Au-Porous Ti-Dense Ti Film	46
Front Cover	40
Non-Contact Ultrasonic Flow Measurement for Small Pipes Based on AlN Piezoelectric Micromachined Ultrasonic Transducer Arrays	24
Journal of Microelectromechanical Systems Publication Information	24
J. J. Ebers Award	24
Multilayer Masking Technology for Fabricating Airborne CMUTs With Multi-Depth Fluidic Trenches	23
Fabrication of 32 × 32 2D Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays on a Borosilicate Glass Substrate With Silicon-Through-Wafer Interconnects Using Sacrificial Release Process	22
A Biaxially Stretchable and Washable LED Display Enabled by a Wavy-Structured Metal Grid	22
Front Cover	21
Manipulating Etch Selectivities in XeF₂ Vapour Etching	21
Journal of Microelectromechanical Systems	20
Lab-on-PCB With Pre-Stored Reagents at Low Temperature and Automatic Microfluidic Handling	20
Quad Mass Resonator With Frequency Mismatch of 3 ppm Trimmed by Focused Ion Beam	19
Phononic Frequency Combs in Atomically Thin Nanoelectromechanical Resonators Via 1:1 and 2:1 Internal Resonances	19
A 100 nm Thick, 32 kHz X-Cut Lithium Niobate Piezoelectric Nanoscale Ultrasound Transducer for Airborne Ultrasound Communication	19
Modeling and Analysis of a MEMS Vibrating Ring Gyroscope Subject to Imperfections	19
Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation	19
A Silicon MEMS Quatrefoil Suspension Gyroscope	19
IEEE Access	18
Table of Contents	18
Development of Programmable UV-LED Microlithography System for 3D Microfabrication	17
Compact, High-Performance Positive Magnetophoresis Chip With Integrated Patterned Magnet for Efficient Particle Trapping	17
Stability and Failure Analysis of a W-Based Microhotplate	17

Triple Mass Resonator for Electrostatic Quality Factor Tuning	17
Journal of Microelectromechanical Systems	17
MEMS-Scale Angular Position Sensor Based on Ultracapacitor Technology	16
TechRxiv: Share Your Preprint Research with the World!	16
Front Cover	16
A Q-factor Boost Strategy for High-Order Width-Extensional Mode MEMS Resonators by Varied Unit Length	15
Theoretical Analysis and Verification on ScAlN-Based Piezoelectric Micromachined Ultrasonic Transducers With DC Bias	15
Table of Contents	15
TechRxiv: Share Your Preprint Research with the World!	15
TechRxiv: Share Your Preprint Research with the World!	15
Fused Silica Micro Shell Resonators by a Wafer-Level Thermal Reflow Process	15
A “Smart” Gas Sensing System Composed of Micro-Hotplates and Artificial Neural Network	14
Table of Contents	14
A ScAlN-Based Piezoelectric MEMS Microphone With Sector-Connected Cantilevers	14
Fused Quartz Dual-Shell Resonator Gyroscope	14
Chipping Energy Threshold in MEMS Sensors	14
Polymer/Ceramic MEMS: A Nanomechanical Sensor Platform With Low Temperature High Gauge Factor ITO for Electromechanical Transduction	13
High-Quality Light Field Microscope Imaging Based on Microlens Arrays	13
Member ad suite	13
Phase Noise Optimization of MEMS Resonant Accelerometer Based on AC Polarization	13
TechRxiv: Share Your Preprint Research with the World!	12
Front Cover	12
A PZT Thin-Film Traveling-Wave Micro-Motor With Stator Teeth Based on MEMS Technology	12
Feedforward Control Algorithms for MEMS Galvos and Scanners	12
A Radiofrequency Threshold Temperature Sensor Using a Hf_0.5Zr_0.5O₂ Device and a Microacoustic Piezoelectric Resonant Sensor	12
Directional Sound Sensor With Consistent Directivity and Sensitivity in the Audible Range	12
Electrowetting Ionic Liquid Flow Controller	12
Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry	11
A Micro-Force Measurement System Based on Lorentz Force Particle Analyzer for the Cleanliness Inspection of Metal Materials	11
Bistability in Coupled Opto-Thermal Micro-Oscillators	11
Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography	11
Erratum to “Thin-Film Silicon MEMS for Dynamic Mass Sensing in Vacuum and Air: Phase Noise, Allan Deviation, Mass Sensitivity and Limits of Detection” [Jun 19 390-400]	10
Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction	10
Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications	10
Whisker Sensor With Extended Measurement Range Through Jamming Effects Using 3D-Printed Tetrapod Particles	10
Characterization and Optimization of PZT-Based PMUTs With Wide Range Frequency Tuning	10
MEMS Pitch Gyroscope Based on (250-nm)² Gauges Achieving 0.12 °/hr Over 1000 dps Full-Scale	10
Perovskite Nickelate Actuators	9
Single-Wafer Combinatorial Optimization of Border Rings for Bulk Acoustic Wave Filters	9
Optimization of MEMS Matching Network for the Sensitivity of GHz Low-Power Wake-Up Receivers	9
Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges	9
Portable Dielectrophoresis Microfluidic Chip Integrated With Microscopic Platform for Water Blooms Monitoring	9
Rigorous Model-Based Mask Data Preparation Algorithm Applied to Grayscale Lithography for the Patterning at the Micrometer Scale	9
18 GHz Solidly Mounted Resonator in Scandium Aluminum Nitride on SiO₂/Ta₂O₅ Bragg Reflector	9
A Non-Linear Lumped Model for the Electro-Mechanical Coupling in Capacitive MEMS Microphones	9
Characterization and Compensation of Detection Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope	9
Thermal Flow Sensor With a Bidirectional Thermal Reference	9
Fabrication of Bloch Long Range Surface Plasmon Waveguides Integrating Counter Electrodes and Microfluidic Channels for Multimodal Biosensing	9
Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism	9
On-Chip Generation Method of Shock Load and Characterization of Microstructure Shock Process	9

Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS Mirrors	9
Silicon-Based Stretchable Structure via Parylene Kirigami Interconnection	8
HF Under-Etching Prevention for Advanced THz Micromachined Waveguide Devices	8
Rapid Makerspace Microfabrication and Characterization of 3D Microelectrode Arrays (3D MEAs) for Organ-on-a-Chip Models	8
Exploration and Realization of Novel High-Q Bulk Modes Using Support Transducer Topology	8
IEEE Access	8
Fabrication of Polymer Membrane-Suspended Microstructures on Printed Circuit Boards	8
Journal of Microelectromechanical Systems Publication Information	8
Enhanced Performance in Energy of Low Frequency Triboelectric-Nanogenerator Systems	8
Aluminum Nitride 4-Beam Piezoelectric Nanoscale Ultrasound Transducer (pNUT)	8
MEMS Switching Voltage Regulator Using a Normally-On Electret Relay	8
TechRxiv: Share Your Preprint Research with the World!	8
Folded MEMS Platform Based on Polymeric Flexible Hinges for 3D Integration of Spatially-Distributed Sensors	8
Introducing IEEE Collabratec	8
High-Stability Quartz Resonant Accelerometer With Micro-Leverages	7
TechRxiv: Share Your Preprint Research with the World!	7
High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance	7
On-Chip Frequency Tuning of Fast Resonant MEMS Scanner	7
Journal of Microelectromechanical Systems	7
Determining the Nonlinear Motion of MEMS Gyroscopes Using the Harmonic Balancing Method	7
IEEE EDS Lester F. Eastman Award	7
TechRxiv: Share Your Preprint Research with the World!	7
Silicon Micro-Channel Definition via ICP-RIE Plasma Etching Process Using Different Aluminum Hardmasks	7
A Microfabricated Nanobubble-Based Sensor for Physiological Pressure Monitoring	7
A Reusable Pseudo-Liquid-to-Solid Inertial Switch Based on Hetero-Coated Galinstan Droplets	7
Resource Allocation in Vibration Energy Harvesters	7
Piezoelectric Micromachined Ultrasonic Transducers With Superior Frequency Control	7
On Sampling Rate Limits in Bistable Microbeam Sensors	7
TechRxiv: Share Your Preprint Research with the World!	7
Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator	6
Design and Fabrication of a Micropillar-Pumped Polymer Loop Heat Pipe	6
Atomization of High Viscous Liquids Using a MEMS Vibrating Mesh With Integrated Microheater	6
Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory	6
Introducing IEEE Collabratec	6
TechRxiv: Share Your Preprint Research with the World!	6
TechRxiv: Share Your Preprint Research with the World!	6
Temperature Dependence Modeling and Thermal Sensitivity Reduction of Bulk Micromachined Silicon MEMS Lamé Resonators	6
A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film	6
Journal of Microelectromechanical Systems	6
Remote Actuation of Silicon Nitride Nanomechanical Resonators Using On-Chip Substrate Capacitors	6
Table of Contents	6
Front Cover	6
Crossover/Veering in V-Shaped MEMS Resonators	6
Modeling Temperature Effects in a MEMS Ring Gyroscope: Toward Physics-Aware Drift Compensation	5
Nonlinear Micro-Resonator-Based Comparator With Linear Hysteresis Tuning	5
Study of Thin Film LiNbO₃ Laterally Excited Bulk Acoustic Resonators	5
Study of Stiction Mitigation in Micromachine Structures via Naphthalene Sublimation	5
On the Dynamic Range and Resolution of Thermal-Piezoresistive Resonant Mass Sensors	5
Development of ScAlN PMUTs for Medical Applications	5
Pressure Sensor Embedded Inductive Coil Toward a Wireless Pressure Sensing Stent	5
Breakdown and Healing of Tungsten-Oxide Films on Microelectromechanical Relay Contacts	5
Experimental Study of Electrical Breakdown in MEMS/NEMS Devices With Deep Submicron Gaps	5
Design, Modeling and Fabrication of TPoS MEMS Resonators With Improved Performance at 1 GHz	5
Continuous and Non-Invasive Monitoring of Blood Pressure Based on Wearable Piezoelectric Micromachined Ultrasonic Transducers Array	5
Optimization of MEMS Vibration Energy Harvester With Perforated Electrode	5
Investigation of Thermal Creep in Metal-Based MEMS Cantilevers	5
Transducers 2023	5
Soft Contact Lens With Embedded Moiré Patterns-Based Intraocular Pressure Sensors	5
Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single Resonator	5
IEEE Access	5
A Defect-Based MEMS Phononic Crystal Slab Waveguide in Electronic Circuits	5
Continuous Mode-Reversal FM Accelerometer With 60-g FSR, 10-μg/K Drift, and VRE Rejection	5
Transfer Learning for Test Time Reduction of Parameter Extraction in MEMS Accelerometers	5