OOIR: Observatory of International Research

Papers

(The TQCC of Journal of Microelectromechanical Systems is 5. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-10-01 to 2025-10-01.)

Article	Citations
Front Cover	105
TechRxiv: Share Your Preprint Research with the World!	64
Front Cover	44
MEMS Pitch Gyroscope Based on (250-nm)² Gauges Achieving 0.12 °/hr Over 1000 dps Full-Scale	40
Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry	39
Optimization of MEMS Matching Network for the Sensitivity of GHz Low-Power Wake-Up Receivers	37
Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation	34
Front Cover	32
Journal of Microelectromechanical Systems Publication Information	31
Exploring Bias-Instability Noise Sources in Quadrature Error Compensation System for Mode-Split MEMS Gyroscopes	31
A Micro-Force Measurement System Based on Lorentz Force Particle Analyzer for the Cleanliness Inspection of Metal Materials	30
A Novel Inline Near-Zero Thermopile RF MEMS Power Sensor	29
Transducers 2023	29
A Novel Parametric System-Level Modeling Method for MEMS Devices Combining Artificial Neural Networks and Behavior Description	28
In Situ Reversible and Repeatable Actuation of the 3D-Printed Micro-Scale Cantilever Covered With a Light-Heat Converting Film as a New Approach Toward 4D Printing	28
Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors	28
Journal of Microelectromechanical Systems Publication Information	27
Microfluidic Biosensor for the In Vitro Electrophysiological Characterization of Actin Bundles	26
Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator	24
MEMS Switching Voltage Regulator Using a Normally-On Electret Relay	24
Design and Fabrication of a Micropillar-Pumped Polymer Loop Heat Pipe	22
60-g FSR, 6-μg Stability FM Time-Switched Accelerometers Through Shaped Comb Fingers	22
A Reusable Pseudo-Liquid-to-Solid Inertial Switch Based on Hetero-Coated Galinstan Droplets	22
Optical Characterization of Dynamic CMUTs Using Zygo Optical Profilometers: An Alternative to Laser Doppler Vibrometers	21
2021 Index Journal of Microelectromechanical Systems Vol. 30	21

Temperature Dependence Modeling and Thermal Sensitivity Reduction of Bulk Micromachined Silicon MEMS Lamé Resonators	21
A Piezoelectric Micro Machined Ultrasonic Transducer Based Hybrid-Morph AlScN Film	20
Direct Growth and Fabrication of Tungsten Coated GaN Nanowire Probes on Cantilevers for Scanning Probe Microscopy	19
A Suspended Metamaterial Mirror for Hyperspectral Shortwave Infrared Fabry-Perot Filters	18
Thermally Stable, BEOL-Configured MEMS-Based One-Time Programmable (OTP) Memory for Cryogenic Embedded Application	17
TechRxiv: Share Your Preprint Research with the World!	17
2022 Reviewers List	17
Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field	17
TechRxiv: Share Your Preprint Research with the World!	16
In-Plane Orientational Control of Electronic Components Using Pattern Complementarity in a Self-Assembling System	15
Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization	15
Investigation of Vapor HF Sacrificial Etching Characteristics Through Submicron Release Holes for Wafer-Level Vacuum Packaging Based on Silicon Migration Seal	15
Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation	15
Nanoporous Silicon Membrane Embedded With Dielectrophoresis (DEP) Electrodes for Ultrafiltration Improvement for Artificial Kidney	15
TC f Manipulation in AlScN Nanomechanical Resonators Using Dual-Mode Parametric Excitation	14
A 2D MEMS Crosstalk-Free Electromagnetic Micromirror for LiDAR Application	14
Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters	14
Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor	14
The Establishment and Verification of the Sensitivity Model of the Piezoresistive Pressure Sensor Based on the New Peninsula Structure	14
A Microfluidic Chip for Growth and Characterization of Adult Rat Hippocampal Progenitor Cell Neurospheroids	14
Journal of Microelectromechanical Systems	13
Journal of Microelectromechanical Systems	13
Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression	13
Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers	12
Critical Issues in MEMS Property Measurement and Variation Measured by Nanoindentation: Error Sources and Uncertainty	12
MEMS Air-Damped Isolator for Dual-Axis Micromirrors: Broad-Range Frequency Vibration Isolation	12
Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone	12
A Weakly Coupled Tuning Fork MEMS Electric Field Sensor With High Resolution and Wide Measurement Range	12
Characterization of Al and Ni-P Films as Hardmasks for the ICP-RIE Plasma Etching Bosch Process	12
Wafer-Level Fabrication of FAIMS Chips Based on TGV Technology	12
Design of Spurious-Free Surface Acoustic Wave Resonators on LNOI Platform Using Machine Learning	12
Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer	12
Integrated Microfluidic System for Mechanical Agitation-Based Cell Lysis and Fluorescence Detection Using Reduced Amount of Reagent	12
Low-Energy Consumption Actuation for Microelectrothermal Actuators via Capacitive Discharge Excitation	12
Design and Fabrication Method of a Large-Size Electromagnetic MEMS Two-Dimensional Scanning Micromirror	11
Fabrication of 32×32 2 D CMUT Arrays on a Borosilicate Glass Substrate With Silicon- Through-Wafer Interconnects Using Non- Aligned and Aligned Anodic Bonding	11
Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation	11
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions	11
Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping	11
The Influences of Non-Volatile Surface Compound Layer on the Dry Etching of Borosilicate Glass	11
Journal of Microelectromechanical Systems	11
A Rapid Circuit Phase Error Identification and Compensation Method for MEMS QMG Achieving 99.7% Reduction in ZRO Drift	11
Crosstalk Analysis to GHz Bulk-Acoustic-Wave Array for Addressable Micro/Nanoscale Particle Trapping	11
Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film	10
Phononic Integrated Circuit Component Design and Analysis for Surface Acoustic Waves in ScAlN on Silicon Carbide	10
Piezoelectric Deactuation-Based Bi-Stable MEMS Switch: MEM-Z NVM	10
A Silicon Migration Model Incorporating Anisotropic Surface Energy and Non-Uniform Diffusivity	10
Electronic Stethoscope Based on Triangular Cantilever Piezoelectric Bimorph MEMS Transducers	10
A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion	10
Table of Contents	10

Response Speed Characterization of a Thermally Actuated Programmable Metamaterial	10
Glass-Based Micro-Hotplate With Low Power Consumption and TGV Structure Through Anodic Bonding and Glass Thermal Reflow	10
Turnover Temperature Point Adjustment in Mechanically Coupled Single-Crystal Silicon MEMS Resonators	10
Front Cover	10
Toward 120 dB CMOS-MEMS Arrayed Accelerometers Measuring Through kg Shock Events	9
Nonlinearity Reduction in Three-End Serpentine Torsion Bar of MEMS Mirror	9
Real-Time Phase Compensation for Scale Factor Nonlinearity Improvement Over Temperature Variations for MEMS Gyroscope	9
Compact, High-Performance Positive Magnetophoresis Chip With Integrated Patterned Magnet for Efficient Particle Trapping	9
A Quasi-Zero Stiffness MEMS Accelerometer With Wide Open-Loop Dynamic Range	9
IEEE Access	9
TechRxiv: Share Your Preprint Research with the World!	9
A Review on MEMS Silicon Resonant Accelerometers	9
Front Cover	9
Table of Contents	9
Electrowetting Ionic Liquid Flow Controller	8
Temporal Dynamics of GHz Acoustic Waves in Chipscale Phononic Integrated Circuits	8
Spurious Mode Suppression in LiNbO₃ A1 Resonators and Filters Beyond 6 GHz With Through-Holes	8
Whisker Sensor With Extended Measurement Range Through Jamming Effects Using 3D-Printed Tetrapod Particles	8
Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications	8
Phononic Frequency Combs in Atomically Thin Nanoelectromechanical Resonators Via 1:1 and 2:1 Internal Resonances	8
Member ad suite	8
Activation Model of Nano Getter for MEMS Devices Based on Sandwich Structures of Au-Porous Ti-Dense Ti Film	8
Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism	7
A Silicon MEMS Quatrefoil Suspension Gyroscope	7
Breakdown and Healing of Tungsten-Oxide Films on Microelectromechanical Relay Contacts	7
Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography	7
Bistability in Coupled Opto-Thermal Micro-Oscillators	7
TechRxiv: Share Your Preprint Research with the World!	7
Near-Spurious-Free 6.5 GHz XBARs With Dimension-Matched and Response-Averaged Electrodes	7
Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction	7
High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance	7
Transducers 2025	7
Q-Factor Enhancement of Micro Hemispherical Resonators via Optimization of Film Distribution	6
Disposable Piezoresistive MEMS Airflow Sensor for Chronic Respiratory Disease Detection	6
High-Temperature Acoustic and Electric Characterization of Ferroelectric Al₀.₇Sc₀.₃N Films	6
Coupled Thin Film Hydrogenated Amorphous Silicon Microresonator Arrays	6
Passive Vibration Control and Tunable Damping of MEMS Resonators via Electrical Autoparametric Resonance	6
High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror	6
Continuous and Non-Invasive Monitoring of Blood Pressure Based on Wearable Piezoelectric Micromachined Ultrasonic Transducers Array	6
Frequency Split Tuning by Joule Heating in Fused Silica Inductive Vibrating Ring Gyroscopes	6
Front Cover	6
High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays	6
Synchronized Opto-Electro-Mechanical Measurements for Estimation of Energy Dissipation in Thin-Film-Piezoelectricon-Substrate MEMS/NEMS Devices	6
An Air-Coupled Electrostatic Ultrasound Transducer Using a MEMS Microphone Architecture	6
Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory	6
Table of Contents	6
TechRxiv: Share Your Preprint Research with the World!	6
Exploring Ru Compatibility With Al-Ge Eutectic Wafer Bonding	6
Prestressing-Based Thermal Budget Study of MEMS Cantilever and Its Application in Package Processes	6
C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz	6
Phase-Flip Lattice Bulk Acoustic Wave Filter With Unbalanced Terminals Using Hybrid Heterogeneous Integration Technology	5
A Monolithic Forward-View Optical Scanner by a Pair of Upright MEMS Mirrors on a SiOB for LiDAR Applications	5
Sensing Voltage at Electrically Floating Nodes: A Path Toward Enhancing Performance and Robustness in Capacitive MEMS Resonators	5
A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles	5
Fabrication of Capacitive Micromachined Ultrasonic Transducers With High-k Insulation Layer Using Silicon Fusion Bonding	5
Table of Contents	5
Fabrication of a Novel GaAs Thermopile Sensor for RF Amplitude Demodulation	5
Front Cover	5
Highly Selective Etching of Silicon Dioxide Over Aluminum Using Mixtures of Sulfuric Acid and Hydrofluoric Acid	5
Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching	5
Lock-In Amplified Fluorescence Spectroscopy in a Digital Microfluidic Configuration for Antibiotic Detection of Ciprofloxacin in Milk	5
Front Cover	5
Rapid and Precise Testing Techniques for MEMS Pressure Sensors Without Input Stabilization	5
Accurate Identification of the Evolution of MEMS Resonant Accelerometer Residual Stresses at the Wafer-Die-Chip Level	5
Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors	5
A 3 Degrees-of-Freedom Electrothermal Micro-Positioner for Optical Chip-to-Chip Alignment	5
2024 Index Journal of Microelectromechanical Systems Vol. 33	5
Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators	5
MEMS-Oriented Single-Crystalline-Silicon Through-Silicon-Via Based on Filling and Oxidation of Silicon Powders	5
Widely-Tunable MEMS Phononic Frequency Combs by Multistage Bifurcations Under a Single-Tone Excitation	5
37th Annual IEEE Conference on Micro Electro Mechanical Systems	5