OOIR: Observatory of International Research

Papers

(The TQCC of Journal of Microelectromechanical Systems is 6. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2022-06-01 to 2026-06-01.)

Article	Citations
TechRxiv: Share Your Preprint Research with the World!	136
Front Cover	58
Front Cover	52
Optimization of MEMS Matching Network for the Sensitivity of GHz Low-Power Wake-Up Receivers	51
Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation	49
Front Cover	46
Journal of Microelectromechanical Systems Publication Information	45
Table of Contents	43
Design and Characterization of Micro-Oven-Controlled MEMS Resonators With Two-Dimensional Honeycomb-Lattice Phononic Crystals for Anchor Loss Suppression	40
Vacuum-Packaged 30%-Doped ScAlN Resonators With AlN Absorbers for IR Spectroscopy	39
MEMS Pitch Gyroscope Based on (250-nm)² Gauges Achieving 0.12 °/hr Over 1000 dps Full-Scale	38
Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry	34
Exploring Bias-Instability Noise Sources in Quadrature Error Compensation System for Mode-Split MEMS Gyroscopes	30
Transducers 2023	28
Journal of Microelectromechanical Systems Publication Information	27
Microfluidic Biosensor for the In Vitro Electrophysiological Characterization of Actin Bundles	27
In Situ Reversible and Repeatable Actuation of the 3D-Printed Micro-Scale Cantilever Covered With a Light-Heat Converting Film as a New Approach Toward 4D Printing	27
A Novel Parametric System-Level Modeling Method for MEMS Devices Combining Artificial Neural Networks and Behavior Description	25
Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors	22
Temperature Dependence Modeling and Thermal Sensitivity Reduction of Bulk Micromachined Silicon MEMS Lamé Resonators	22
A Reusable Pseudo-Liquid-to-Solid Inertial Switch Based on Hetero-Coated Galinstan Droplets	21
Design and Fabrication of a Micropillar-Pumped Polymer Loop Heat Pipe	21
Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator	20
60-g FSR, 6-μg Stability FM Time-Switched Accelerometers Through Shaped Comb Fingers	20
A Suspended Metamaterial Mirror for Hyperspectral Shortwave Infrared Fabry-Perot Filters	19

A Novel Inline Near-Zero Thermopile RF MEMS Power Sensor	19
Direct Growth and Fabrication of Tungsten Coated GaN Nanowire Probes on Cantilevers for Scanning Probe Microscopy	19
MEMS Switching Voltage Regulator Using a Normally-On Electret Relay	19
TechRxiv: Share Your Preprint Research with the World!	18
2022 Reviewers List	18
Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization	17
Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters	17
TechRxiv: Share Your Preprint Research with the World!	17
Thermally Stable, BEOL-Configured MEMS-Based One-Time Programmable (OTP) Memory for Cryogenic Embedded Application	17
Investigation of Vapor HF Sacrificial Etching Characteristics Through Submicron Release Holes for Wafer-Level Vacuum Packaging Based on Silicon Migration Seal	17
Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation	17
Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field	16
A Piezoelectric Micro Machined Ultrasonic Transducer Based Hybrid-Morph AlScN Film	16
TC f Manipulation in AlScN Nanomechanical Resonators Using Dual-Mode Parametric Excitation	16
Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression	16
A Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducer Operating in Thickness-Field-Excitation ModeWith Enhanced Acoustic Emission	15
Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor	15
Extending MEMS Resonator Performance Through Inductive Feedthrough Cancellation	15
Optical Characterization of Dynamic CMUTs Using Zygo Optical Profilometers: An Alternative to Laser Doppler Vibrometers	15
In-Plane Orientational Control of Electronic Components Using Pattern Complementarity in a Self-Assembling System	14
A 2D MEMS Crosstalk-Free Electromagnetic Micromirror for LiDAR Application	14
Mechanical Mode Coupled Piezo-on-Silicon Bulk Acoustic Wave MEMS Resonators in Tank Configuration for Q-Enhancement	14
Nanoporous Silicon Membrane Embedded With Dielectrophoresis (DEP) Electrodes for Ultrafiltration Improvement for Artificial Kidney	14
Integrated Microfluidic System for Mechanical Agitation-Based Cell Lysis and Fluorescence Detection Using Reduced Amount of Reagent	13
Journal of Microelectromechanical Systems	13
Design of Spurious-Free Surface Acoustic Wave Resonators on LNOI Platform Using Machine Learning	13
Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone	13
Low-Energy Consumption Actuation for Microelectrothermal Actuators via Capacitive Discharge Excitation	13
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions	12
Wafer-Level Fabrication of FAIMS Chips Based on TGV Technology	12
A Weakly Coupled Tuning Fork MEMS Electric Field Sensor With High Resolution and Wide Measurement Range	11
Design and Fabrication Method of a Large-Size Electromagnetic MEMS Two-Dimensional Scanning Micromirror	11
Anchor Fin Explored as an Important Design Parameter for Lamb Wave Resonators	11
Characterization of Al and Ni-P Films as Hardmasks for the ICP-RIE Plasma Etching Bosch Process	11
MEMS Air-Damped Isolator for Dual-Axis Micromirrors: Broad-Range Frequency Vibration Isolation	11
Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer	11
Journal of Microelectromechanical Systems	11
Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers	11
A Rapid Circuit Phase Error Identification and Compensation Method for MEMS QMG Achieving 99.7% Reduction in ZRO Drift	11
Performance Enhancement of the DMS Filter on SiC Substrate Using Intermediate Reflecting Grating	10
Vertically-Excited High-Order Guided Shear Vertical Surface Acoustic Wave Resonators for 5G and Beyond	10
Front Cover	10
High Performance MEMS Magnetic Actuator Based on FeGa and FeGaCr Thin Films	10
Journal of Microelectromechanical Systems Publication Information	10
Turnover Temperature Point Adjustment in Mechanically Coupled Single-Crystal Silicon MEMS Resonators	10
Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping	10
Fabrication of 32×32 2 D CMUT Arrays on a Borosilicate Glass Substrate With Silicon- Through-Wafer Interconnects Using Non- Aligned and Aligned Anodic Bonding	10
Sub-30 nm Silicon Nanopatterning: Toward Reduced Reflectance and Enhanced Sensitivity in CMOS Image Sensors	9
Front Cover	9
Electronic Stethoscope Based on Triangular Cantilever Piezoelectric Bimorph MEMS Transducers	9

Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation	9
Table of Contents	9
Nonlinearity Reduction in Three-End Serpentine Torsion Bar of MEMS Mirror	9
High-Dynamic-Range Bulk-Mode Piezoelectric MEMS Resonators via Crystal Orientation Tuning for Duffing Nonlinearity Suppression	9
Analysis of Vibration Characteristics of Clamped–Clamped Shallow Arch Beam Subjected to Heat for Micromechanical Resonant Optical Sensing	9
A Silicon Migration Model Incorporating Anisotropic Surface Energy and Non-Uniform Diffusivity	9
A Quasi-Zero Stiffness MEMS Accelerometer With Wide Open-Loop Dynamic Range	9
Response Speed Characterization of a Thermally Actuated Programmable Metamaterial	9
Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film	8
A Center-Bound Type Piezoelectric MEMS Speaker With Flexible Supporting Layer	8
Front Cover	8
A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion	8
A Review on MEMS Silicon Resonant Accelerometers	8
Toward 120 dB CMOS-MEMS Arrayed Accelerometers Measuring Through kg Shock Events	8
TechRxiv: Share Your Preprint Research with the World!	8
Real-Time Phase Compensation for Scale Factor Nonlinearity Improvement Over Temperature Variations for MEMS Gyroscope	8
Phononic Integrated Circuit Component Design and Analysis for Surface Acoustic Waves in ScAlN on Silicon Carbide	8
Glass-Based Micro-Hotplate With Low Power Consumption and TGV Structure Through Anodic Bonding and Glass Thermal Reflow	8
Bistability in Coupled Opto-Thermal Micro-Oscillators	7
Spurious Mode Suppression in LiNbO₃ A1 Resonators and Filters Beyond 6 GHz With Through-Holes	7
Uniform Whole Wafer Anisotropic Etching of Structural Ta Thin Films	7
Activation Model of Nano Getter for MEMS Devices Based on Sandwich Structures of Au-Porous Ti-Dense Ti Film	7
Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction	7
Electrowetting Ionic Liquid Flow Controller	7
Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography	7
Compact, High-Performance Positive Magnetophoresis Chip With Integrated Patterned Magnet for Efficient Particle Trapping	7
Near-Spurious-Free 6.5 GHz XBARs With Dimension-Matched and Response-Averaged Electrodes	7
Self-Aligned, High-Aspect Ratio Electrodes for Fused Silica Resonators Digitally Defined by Laser Modification of Material	7
Table of Contents	7
Whisker Sensor With Extended Measurement Range Through Jamming Effects Using 3D-Printed Tetrapod Particles	7
Temporal Dynamics of GHz Acoustic Waves in Chipscale Phononic Integrated Circuits	7
Phononic Frequency Combs in Atomically Thin Nanoelectromechanical Resonators Via 1:1 and 2:1 Internal Resonances	7
Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications	7
A Silicon MEMS Quatrefoil Suspension Gyroscope	7
Member ad suite	7
High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror	6
Transducers 2025	6
Analysis of Brittle Fracture Characteristics Under Static/Dynamic Loads in Silicon-Based MEMS Cantilevers	6
Table of Contents	6
Q-Factor Enhancement of Micro Hemispherical Resonators via Optimization of Film Distribution	6
High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays	6
Front Cover	6
Frequency Split Tuning by Joule Heating in Fused Silica Inductive Vibrating Ring Gyroscopes	6
Synchronized Opto-Electro-Mechanical Measurements for Estimation of Energy Dissipation in Thin-Film-Piezoelectricon-Substrate MEMS/NEMS Devices	6
Synchronization Dynamics of MEMS Oscillators With Sub-Harmonic Injection Locking (SHIL) for Emulating Artificial Ising Spins	6
An Air-Coupled Electrostatic Ultrasound Transducer Using a MEMS Microphone Architecture	6
2024 Index Journal of Microelectromechanical Systems Vol. 33	6
Coupled Thin Film Hydrogenated Amorphous Silicon Microresonator Arrays	6
C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz	6
Disposable Piezoresistive MEMS Airflow Sensor for Chronic Respiratory Disease Detection	6
Continuous and Non-Invasive Monitoring of Blood Pressure Based on Wearable Piezoelectric Micromachined Ultrasonic Transducers Array	6
Incorporating 3-D-Printed Polymer Scaffolds Onto MEMS Resonant Chemical Sensors for Enhanced Performance	6
High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance	6
Front Cover	6
Lock-In Amplified Fluorescence Spectroscopy in a Digital Microfluidic Configuration for Antibiotic Detection of Ciprofloxacin in Milk	6
TechRxiv: Share Your Preprint Research with the World!	6