Journal of Microelectromechanical Systems

(The TQCC of Journal of Microelectromechanical Systems is 7. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2020-07-01 to 2024-07-01.)
A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films93
MEMS Resonators for Frequency Reference and Timing Applications76
Epitaxial Aluminum Scandium Nitride Super High Frequency Acoustic Resonators67
CMOS-Integrated Aluminum Nitride MEMS: A Review48
Airborne Piezoelectric Micromachined Ultrasonic Transducers for Long-Range Detection46
A Parylene Neural Probe Array for Multi-Region Deep Brain Recordings45
Enabling Higher Order Lamb Wave Acoustic Devices With Complementarily Oriented Piezoelectric Thin Films44
Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators40
1.3 mm2 Nav-Grade NEMS-Based Gyroscope38
X-Cut Lithium Niobate-Based Shear Horizontal Resonators for Radio Frequency Applications36
A Miniaturized EHT Platform for Accurate Measurements of Tissue Contractile Properties28
Nonlinear Response of PZT-Actuated Resonant Micromirrors26
DLP 3D Printed “Intelligent” Microneedle Array (iμNA) for Stimuli Responsive Release of Drugs and Its in Vitro and ex Vivo Characterization25
A Ceramic PZT-Based PMUT Array for Endoscopic Photoacoustic Imaging24
Additive Assembly for PolyJet-Based Multi-Material 3D Printed Microfluidics24
Geometric Imperfection Characterization and Precise Assembly of Micro Shell Resonators24
Piezoelectric Micromachined Ultrasonic Transducers With Pinned Boundary Structure23
Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single Resonator23
A Paper-Based Flexible Tactile Sensor Array for Low-Cost Wearable Human Health Monitoring23
Measurement of Tidal Tilt by a Micromechanical Inertial Sensor Employing Quasi-Zero- Stiffness Mechanism23
A Two-Step Fabrication Method for 3D Printed Microactuators: Characterization and Actuated Mechanisms23
Acoustic Loss in Thin-Film Lithium Niobate: An Experimental Study22
A 512-Channel Multi-Layer Polymer-Based Neural Probe Array22
Bimorph Pinned Piezoelectric Micromachined Ultrasonic Transducers for Space Imaging Applications22
A MEMS Resonant Accelerometer With High Relative Sensitivity Based on Sensing Scheme of Electrostatically Induced Stiffness Perturbation21
Monolithic Multiband MEMS RF Front-End Module for 5G Mobile21
Controlling Residual Stress and Suppression of Anomalous Grains in Aluminum Scandium Nitride Films Grown Directly on Silicon20
Fabrication of Injectable Micro-Scale Opto- Electronically Transduced Electrodes (MOTEs) for Physiological Monitoring20
Micromechanical Switch-Based Zero-Power Chemical Detectors for Plant Health Monitoring20
Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters20
Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch19
A PMUT Integrated Microfluidic System for Fluid Density Sensing19
Considerations for an 8-inch Wafer-Level CMOS Compatible AlN Pyroelectric 5–14 μm Wavelength IR Detector Towards Miniature Integrated Photonics Gas Sensors19
Design, Fabrication and Experimental Validation of a Metaplate for Vibration Isolation in MEMS19
High Quality Co-Sputtering AlScN Thin Films for Piezoelectric Lamb-Wave Resonators19
Quantification of Energy Dissipation Mechanisms in Toroidal Ring Gyroscope18
Fabrication of 2D Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays on Insulating Substrates With Through-Wafer Interconnects Using Sacrificial Release Process18
Surface Texture Detection With a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial Finger18
Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism18
Long-Term Characterization of a New Wide-Angle Micromirror With PZT Actuation and PZR Sensing18
A Low-Noise High-Order Mode-Localized MEMS Accelerometer17
Three-Axis Capacitive Sensor Arrays for Local and Global Shear Force Detection17
ScAlN/AlN Film-Based Lamé Mode Resonator With High Effective Electromechanical Coupling Coefficient17
A Novel Low-g MEMS Bistable Inertial Switch With Self-Locking and Reverse-Unlocking Functions17
Development of Dual-Frequency PMUT Arrays Based on Thin Ceramic PZT for Endoscopic Photoacoustic Imaging17
Tunable Terahertz Free Spectra Range Using Electric Split-Ring Metamaterial17
Numerical Modelling of Non-Linearities in MEMS Resonators16
High-Stability Quartz Resonant Accelerometer With Micro-Leverages16
Fundamental Noise Limits and Sensitivity of Piezoelectrically Driven Magnetoelastic Cantilevers16
Piezoelectric RF MEMS Switches on Si-on-Sapphire Substrates16
Flow Velocity Gradient Sensing Using a Single Curved Bistable Microbeam16
Miniaturized PMUT-Based Receiver for Underwater Acoustic Networking16
Miniaturized Electronic Circuit Design Challenges for Ingestible Devices16
A Self-Powered MEMS Inertial Switch for Potential Zero Power-Consumption Wake-Up Application15
Design and Development of the MEMS-Based High-g Acceleration Threshold Switch15
Characterization and Compensation of Detection Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope15
Quad Mass Resonator With Frequency Mismatch of 3 ppm Trimmed by Focused Ion Beam15
Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation15
SAW Filters With Excellent Temperature Stability and High Power Handling Using LiTaO3/SiC Bonded Wafers15
A Piezoelectric Micromachined Ultrasonic Transducer Using Thin-Film Lithium Niobate15
A Novel MEMS Speaker With Peripheral Electrostatic Actuation15
Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators15
Sub-GHz X-Cut Lithium Niobate S₀ Mode MEMS Resonators15
Non-Contact Ultrasonic Flow Measurement for Small Pipes Based on AlN Piezoelectric Micromachined Ultrasonic Transducer Arrays15
Optimization of MEMS Vibration Energy Harvester With Perforated Electrode14
Ultra-High-Q Gallium Nitride SAW Resonators for Applications With Extreme Temperature Swings14
Fused Quartz Dual-Shell Resonator Gyroscope14
Highly Responsive Metal Oxide (V2O5)-Based NEMS Pirani Gauge for In-Situ Hermeticity Monitoring14
Dynamics of V-Shaped Electrothermal MEMS-Based Resonators14
Engineering Efficient Acoustic Power Transfer in HBARs and Other Composite Resonators14
A Pulsed Wave Doppler Ultrasound Blood Flowmeter by PMUTs14
Optimization of Inactive Regions of Lithium Niobate Shear Mode Resonator for Quality Factor Enhancement13
De-Icing Device With Self-Adjusting Power Consumption and Ice Sensing Capabilities13
Reconfigurable Multiband Terahertz Metamaterial Using Triple-Cantilevers Resonator Array13
Low Loss Acoustic Delay Lines Based on Solidly Mounted Lithium Niobate Thin Film13
Polysilicon Grating Switches for LiDAR13
Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography13
Direct Phase Measurement and Compensation to Enhance MEMS Gyroscopes ZRO Stability12
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions12
Miniature MEMS: Novel Key Components Toward Terahertz Reconfigurability12
On the Effect of Water-Induced Degradation of Thin-Film Piezoelectric Microelectromechanical Systems12
Modeling of Beam Electrothermal Actuators12
Highly Selective Guiding Springs for Large Displacements in Surface MEMS12
On Enhancing the Sensitivity of Resonant Thermometers Based on Parametric Modulation12
Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication12
Uncooled Infrared Detector Based on an Aluminum Nitride Piezoelectric Fishnet Metasurface11
Directional Sound Sensor With Consistent Directivity and Sensitivity in the Audible Range11
A Novel Thermistor-Based RF Power Sensor With Wheatstone Bridge Fabricating on MEMS Membrane11
High-Temperature Acoustic and Electric Characterization of Ferroelectric Al₀.₇Sc₀.₃N Films11
Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges11
Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW11
Nanostructured Spacers for Thermionic and Thermophotovoltaic Energy Converters11
A Monolithic Forward-View MEMS Laser Scanner With Decoupled Raster Scanning and Enlarged Scanning Angle for Micro LiDAR Applications11
A 5.3 GHz Al0.76Sc0.24N Two-Dimensional Resonant Rods Resonator With a kt2 of 23.9%11
Analytical Study and Thermal Compensation for Capacitive MEMS Accelerometer With Anti-Spring Structure11
Acoustic Loss of GHz Higher-Order Lamb Waves in Thin-Film Lithium Niobate: A Comparative Study11
Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators11
Systematic Characterization of Hydrophilized Polydimethylsiloxane11
A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped Structure11
Bi-Stable Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducer (PMUT)11
1-Port Piezoelectric Resonators With > 100 V/V Gain10
An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer10
Dynamic Performance Improvement of Piezoelectrically Driven Micro-Lens Actuators10
Eye-Tracking Monitoring Based on PMUT Arrays10
Tactile Sensing With Scalable Capacitive Sensor Arrays on Flexible Substrates10
Modeling and Characterization of a Novel In-Plane Dual-Axis MEMS Accelerometer Based on Self-Support Piezoresistive Beam10
Design and Fabrication of a MEMS Capacitance Vacuum Sensor Based on Silicon Buffer Block10
Hierarchical Integration of Thin-Film NiTi Actuators Using Additive Manufacturing for Microrobotics10
FPCB Masked One-Step Etching Large Aperture Mirror for LiDAR10
Design, Fabrication, and Characterization of Aluminum Scandium Nitride-Based Thin Film Bulk Acoustic Wave Filter10
A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion9
Wafer-Level Low-Temperature Solid-Liquid Inter-Diffusion Bonding With Thin Au-Sn Layers for MEMS Encapsulation9
Piezoelectric Disk Gyroscope Fabricated With Single-Crystal Lithium Niobate9
The Model of Etch Rates of Crystallographic Planes of Sapphire Based on Step Flow Mechanism9
Polymer/Ceramic MEMS: A Nanomechanical Sensor Platform With Low Temperature High Gauge Factor ITO for Electromechanical Transduction9
Low Offset and Noise in High Biased GaN 2DEG Hall-Effect Plates Investigated With Infrared Microscopy9
Hybrid and Passive Tissue-Anchoring Mechanism for Ingestible Resident Devices9
Design and Fabrication of a MEMS-Based Break Junction Device for Mechanical Strain-Correlated Optical Characterization of a Single-Molecule9
3D Nanoprinted Liquid-Core-Shell Microparticles9
A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles9
Crossover/Veering in V-Shaped MEMS Resonators9
A SiN Microcalorimeter and a Non-Contact Precision Method of Temperature Calibration9
High-Intensity Airborne CMUT Transmitter Array With Beam Steering9
Direct Laser Writing for Deterministic Lateral Displacement of Submicron Particles9
Electronic Immunoaffinity Assay for Differential Leukocyte Counts9
A Ring Gyroscope With On-Chip Capacitive Stress Compensation9
Miniature Electrodynamic Wireless Power Transmission Receiver Using a Micromachined Silicon Suspension9
Active Noise Cancellation With MEMS Resonant Microphone Array9
Fabrication of Bloch Long Range Surface Plasmon Waveguides Integrating Counter Electrodes and Microfluidic Channels for Multimodal Biosensing9
A Self-Powered, Biodegradable Dissolved Oxygen Microsensor8
Microscale Devices for Biomimetic Sound Source Localization: A Review8
On Sampling Rate Limits in Bistable Microbeam Sensors8
Sidewall Metallization on CMOS MEMS by Platinum ALD Patterning8
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride8
Thermal Response and TC f of GaN/AlN Heterostructure Multimode Micro String Resonators From −10 °C Up to 325 °C8
Effect of Metallization on Quality Factor and Noise Characteristics in Fused Silica Dual-Shell Gyroscopes8
Vibrating Mesh Atomizer for Spin-Spray Deposition8
Ultra-Low Relative Frequency Split Piezoelectric Ring Resonator Designed for High-Performance Mode-Matching Gyroscope8
Nonlinear Dissipation in Epitaxial SCS and Polysilicon MEMS Driven at Large Amplitudes8
A Scalable, Hierarchical Rib Design for Larger-Area, Higher-Porosity Nanoporous Membranes for the Implantable Bio-Artificial Kidney8
Fully Flexible PMUT Based on Polymer Materials and Stress Compensation by Adaptive Frequency Driving8
Multi-Layer Micro-Nanofluidic Device for Isolation and Capture of Extracellular Vesicles Derived From Liposarcoma Cell Conditioned Media8
Sub-Deg-per-Hour Edge-Anchored Bulk Acoustic Wave Micromachined Disk Gyroscope8
Vibration Mode Suppression in Micromechanical Resonators Using Embedded Anti- Resonating Structures8
A Non-Linear Lumped Model for the Electro-Mechanical Coupling in Capacitive MEMS Microphones8
A Resonant Lorentz-Force Magnetometer Featuring Slotted Double-Ended Tuning Fork Capable of Operating in a Bias Magnetic Field8
Fused Silica Gyroscope Resonator Manufactured With Femtosecond Laser Assisted Wet Etching8
A Microtissue Platform to Simultaneously Actuate and Detect Mechanical Forces via Non-Contact Magnetic Approach7
Printed Electroceutical Dressings for the Inhibition of Biofilms and Treatment of Chronic Wounds7
Accurate Identification of the Evolution of MEMS Resonant Accelerometer Residual Stresses at the Wafer-Die-Chip Level7
Crystal Orientation Dependent Dual Frequency Ovenized MEMS Resonator With Temperature Stability and Shock Robustness7
Design and Fabrication of a Metal-Silicon Actuator With Low Voltage, Low Power Consumption and Large Displacement7
Inkjet-Printed Hydrogen Peroxide Sensor With Sensitivity Enhanced by Plasma Activated Inorganic Metal Salt Inks7
A MEMS Inertial Switch With Large Scale Bi-Directional Adjustable Threshold Function7
Characterization and Clinical Serum Test of a Molecular Imprinted Polymer (MIP)-Based Cardiac Troponin T Sensing Electrode for Patient Monitoring Applications7
Quality Factor Extraction and Enhancement Across Temperature in Ring Resonators7
AFM Microcantilever With a Collocated AlN Sensor-Actuator Pair: Enabling Efficient Q-Control for Dynamic Imaging7
Moisture-Responsive Paper Robotics7
Accurate Analytic Model of a Parametrically Driven Resonant MEMS Mirror With a Fourier Series-Based Torque Approximation7
Fast Selective Sensing of Nitrogen-Based Gases Utilizing δ-MnO2-Epitaxial Graphene-Silicon Carbide Heterostructures for Room Temperature Gas Sensing7
Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone7
Anchor Design Affects Dominant Energy Loss Mechanism in a Lamé Mode MEM Resonator7
The Establishment and Verification of the Sensitivity Model of the Piezoresistive Pressure Sensor Based on the New Peninsula Structure7
Radially Pleated Disk Resonator for Gyroscopic Application7
Magnetic Field-Induced Recoverable Dynamic Morphological Change of Gallium-Based Liquid Metal7
Fully Additive Fabrication of Electrically Anisotropic Multilayer Materials Based on Sequential Electrodeposition7
An 8-Bit Digitally Operated Micromachined Accelerometer7
Implementation of Dual-Nonlinearity Mechanism for Bandwidth Extension of MEMS Multi-Modal Energy Harvester7
Design, Modeling and Characterization of High-Performance Bulk-Mode Piezoelectric MEMS Resonators7
Electromechanical Equivalent Circuit Model for Axisymmetric PMUTs With Elastic Boundary Conditions7
Shock Destructive Reliability Analysis of Electromagnetic MEMS Micromirror for Automotive LiDAR7
Design and Fabrication of Reliable Power Efficient Bistable MEMS Switch Using Single Mask Process7
A MEMS Nanopositioner With Integrated Tip for Scanning Tunneling Microscopy7
Paraffin-Based Reconfigurable Antenna Operating at 100 GHz7
A Continuous, Impedimetric Parylene Flow Sensor7
Negative Nonlinear Dissipation in Microelectromechanical Beams7
Modified Coefficient of Equivalent Mass to Explain Decreased Relative Sensitivity of Piezoelectric Cantilever Humidity Sensor in High Mode7
A 100 nm Thick, 32 kHz X-Cut Lithium Niobate Piezoelectric Nanoscale Ultrasound Transducer for Airborne Ultrasound Communication7
Rigorous Model-Based Mask Data Preparation Algorithm Applied to Grayscale Lithography for the Patterning at the Micrometer Scale7
A Multilayered Structure for Packageless Acoustic- Wave Devices With Ultra-Small Sizes7