OOIR: Observatory of International Research

Papers

(The TQCC of Journal of Microelectromechanical Systems is 6. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-08-01 to 2025-08-01.)

Article	Citations
Front Cover	91
TechRxiv: Share Your Preprint Research with the World!	59
Front Cover	49
MEMS Pitch Gyroscope Based on (250-nm)² Gauges Achieving 0.12 °/hr Over 1000 dps Full-Scale	41
Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry	36
Optimization of MEMS Matching Network for the Sensitivity of GHz Low-Power Wake-Up Receivers	34
A Micro-Force Measurement System Based on Lorentz Force Particle Analyzer for the Cleanliness Inspection of Metal Materials	34
Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation	31
Journal of Microelectromechanical Systems Publication Information	31
Exploring Bias-Instability Noise Sources in Quadrature Error Compensation System for Mode-Split MEMS Gyroscopes	30
Front Cover	30
Transducers 2023	29
60-g FSR, 6-μg Stability FM Time-Switched Accelerometers Through Shaped Comb Fingers	29
A Novel Inline Near-Zero Thermopile RF MEMS Power Sensor	28
In Situ Reversible and Repeatable Actuation of the 3D-Printed Micro-Scale Cantilever Covered With a Light-Heat Converting Film as a New Approach Toward 4D Printing	27
Journal of Microelectromechanical Systems Publication Information	26
Microfluidic Biosensor for the In Vitro Electrophysiological Characterization of Actin Bundles	26
MEMS Switching Voltage Regulator Using a Normally-On Electret Relay	26
Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator	25
A Reusable Pseudo-Liquid-to-Solid Inertial Switch Based on Hetero-Coated Galinstan Droplets	23
A Novel Parametric System-Level Modeling Method for MEMS Devices Combining Artificial Neural Networks and Behavior Description	22
Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors	22
Design and Fabrication of a Micropillar-Pumped Polymer Loop Heat Pipe	22
Temperature Dependence Modeling and Thermal Sensitivity Reduction of Bulk Micromachined Silicon MEMS Lamé Resonators	21
A Piezoelectric Micro Machined Ultrasonic Transducer Based Hybrid-Morph AlScN Film	20

Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field	20
Optical Characterization of Dynamic CMUTs Using Zygo Optical Profilometers: An Alternative to Laser Doppler Vibrometers	20
Direct Growth and Fabrication of Tungsten Coated GaN Nanowire Probes on Cantilevers for Scanning Probe Microscopy	20
2021 Index Journal of Microelectromechanical Systems Vol. 30	20
A Suspended Metamaterial Mirror for Hyperspectral Shortwave Infrared Fabry-Perot Filters	19
2022 Reviewers List	19
TechRxiv: Share Your Preprint Research with the World!	18
TechRxiv: Share Your Preprint Research with the World!	18
Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization	17
Nanoporous Silicon Membrane Embedded With Dielectrophoresis (DEP) Electrodes for Ultrafiltration Improvement for Artificial Kidney	17
A Microfluidic Chip for Growth and Characterization of Adult Rat Hippocampal Progenitor Cell Neurospheroids	17
In-Plane Orientational Control of Electronic Components Using Pattern Complementarity in a Self-Assembling System	16
Investigation of Vapor HF Sacrificial Etching Characteristics Through Submicron Release Holes for Wafer-Level Vacuum Packaging Based on Silicon Migration Seal	16
Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation	16
Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor	15
TC f Manipulation in AlScN Nanomechanical Resonators Using Dual-Mode Parametric Excitation	15
Thermally Stable, BEOL-Configured MEMS-Based One-Time Programmable (OTP) Memory for Cryogenic Embedded Application	14
Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression	14
Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters	14
A 2D MEMS Crosstalk-Free Electromagnetic Micromirror for LiDAR Application	14
The Establishment and Verification of the Sensitivity Model of the Piezoresistive Pressure Sensor Based on the New Peninsula Structure	13
Journal of Microelectromechanical Systems	13
1.3 mm² Nav-Grade NEMS-Based Gyroscope	13
Journal of Microelectromechanical Systems	13
Low-Energy Consumption Actuation for Microelectrothermal Actuators via Capacitive Discharge Excitation	12
A Rapid Circuit Phase Error Identification and Compensation Method for MEMS QMG Achieving 99.7% Reduction in ZRO Drift	12
Wafer-Level Fabrication of FAIMS Chips Based on TGV Technology	12
Critical Issues in MEMS Property Measurement and Variation Measured by Nanoindentation: Error Sources and Uncertainty	12
A Weakly Coupled Tuning Fork MEMS Electric Field Sensor With High Resolution and Wide Measurement Range	12
MEMS Air-Damped Isolator for Dual-Axis Micromirrors: Broad-Range Frequency Vibration Isolation	12
Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers	12
Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone	12
Integrated Microfluidic System for Mechanical Agitation-Based Cell Lysis and Fluorescence Detection Using Reduced Amount of Reagent	12
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions	11
Characterization of Al and Ni-P Films as Hardmasks for the ICP-RIE Plasma Etching Bosch Process	11
Bimorph Pinned Piezoelectric Micromachined Ultrasonic Transducers for Space Imaging Applications	11
Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer	11
Design and Fabrication Method of a Large-Size Electromagnetic MEMS Two-Dimensional Scanning Micromirror	11
Table of Contents	10
Crosstalk Analysis to GHz Bulk-Acoustic-Wave Array for Addressable Micro/Nanoscale Particle Trapping	10
Fabrication of 32×32 2 D CMUT Arrays on a Borosilicate Glass Substrate With Silicon- Through-Wafer Interconnects Using Non- Aligned and Aligned Anodic Bonding	10
Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping	10
Electronic Stethoscope Based on Triangular Cantilever Piezoelectric Bimorph MEMS Transducers	10
Front Cover	10
Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation	10
The Influences of Non-Volatile Surface Compound Layer on the Dry Etching of Borosilicate Glass	10
Turnover Temperature Point Adjustment in Mechanically Coupled Single-Crystal Silicon MEMS Resonators	10
A Multilayered Structure for Packageless Acoustic- Wave Devices With Ultra-Small Sizes	10
Piezoelectric Deactuation-Based Bi-Stable MEMS Switch: MEM-Z NVM	10
Journal of Microelectromechanical Systems	10

A Silicon Migration Model Incorporating Anisotropic Surface Energy and Non-Uniform Diffusivity	10
Nonlinearity Reduction in Three-End Serpentine Torsion Bar of MEMS Mirror	9
Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film	9
Table of Contents	9
TechRxiv: Share Your Preprint Research with the World!	9
Front Cover	9
Response Speed Characterization of a Thermally Actuated Programmable Metamaterial	9
A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion	9
IEEE Access	9
Toward 120 dB CMOS-MEMS Arrayed Accelerometers Measuring Through kg Shock Events	9
Glass-Based Micro-Hotplate With Low Power Consumption and TGV Structure Through Anodic Bonding and Glass Thermal Reflow	9
Phononic Integrated Circuit Component Design and Analysis for Surface Acoustic Waves in ScAlN on Silicon Carbide	9
A Review on MEMS Silicon Resonant Accelerometers	9
Real-Time Phase Compensation for Scale Factor Nonlinearity Improvement Over Temperature Variations for MEMS Gyroscope	9
Whisker Sensor With Extended Measurement Range Through Jamming Effects Using 3D-Printed Tetrapod Particles	8
Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction	8
A Silicon MEMS Quatrefoil Suspension Gyroscope	8
Electrowetting Ionic Liquid Flow Controller	8
Phononic Frequency Combs in Atomically Thin Nanoelectromechanical Resonators Via 1:1 and 2:1 Internal Resonances	8
Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography	8
Near-Spurious-Free 6.5 GHz XBARs With Dimension-Matched and Response-Averaged Electrodes	8
Compact, High-Performance Positive Magnetophoresis Chip With Integrated Patterned Magnet for Efficient Particle Trapping	8
Spurious Mode Suppression in LiNbO₃ A1 Resonators and Filters Beyond 6 GHz With Through-Holes	8
Activation Model of Nano Getter for MEMS Devices Based on Sandwich Structures of Au-Porous Ti-Dense Ti Film	8
Member ad suite	8
Frequency Split Tuning by Joule Heating in Fused Silica Inductive Vibrating Ring Gyroscopes	7
Bistability in Coupled Opto-Thermal Micro-Oscillators	7
Transducers 2025	7
C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz	7
High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance	7
Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications	7
Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism	7
High-Temperature Acoustic and Electric Characterization of Ferroelectric Al₀.₇Sc₀.₃N Films	7
Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory	7
Breakdown and Healing of Tungsten-Oxide Films on Microelectromechanical Relay Contacts	7
TechRxiv: Share Your Preprint Research with the World!	7
High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror	7
Synchronized Opto-Electro-Mechanical Measurements for Estimation of Energy Dissipation in Thin-Film-Piezoelectricon-Substrate MEMS/NEMS Devices	6
TechRxiv: Share Your Preprint Research with the World!	6
High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays	6
A Monolithic Forward-View Optical Scanner by a Pair of Upright MEMS Mirrors on a SiOB for LiDAR Applications	6
2024 Index Journal of Microelectromechanical Systems Vol. 33	6
Lock-In Amplified Fluorescence Spectroscopy in a Digital Microfluidic Configuration for Antibiotic Detection of Ciprofloxacin in Milk	6
Table of Contents	6
An Air-Coupled Electrostatic Ultrasound Transducer Using a MEMS Microphone Architecture	6
Front Cover	6
Coupled Thin Film Hydrogenated Amorphous Silicon Microresonator Arrays	6
Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators	6
Highly Selective Etching of Silicon Dioxide Over Aluminum Using Mixtures of Sulfuric Acid and Hydrofluoric Acid	6
Prestressing-Based Thermal Budget Study of MEMS Cantilever and Its Application in Package Processes	6
Disposable Piezoresistive MEMS Airflow Sensor for Chronic Respiratory Disease Detection	6
Continuous and Non-Invasive Monitoring of Blood Pressure Based on Wearable Piezoelectric Micromachined Ultrasonic Transducers Array	6
Exploring Ru Compatibility With Al-Ge Eutectic Wafer Bonding	6
Passive Vibration Control and Tunable Damping of MEMS Resonators via Electrical Autoparametric Resonance	6
Front Cover	6
Sensing Voltage at Electrically Floating Nodes: A Path Toward Enhancing Performance and Robustness in Capacitive MEMS Resonators	6