OOIR: Observatory of International Research

Papers

(The median citation count of Journal of Microelectromechanical Systems is 1. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2020-11-01 to 2024-11-01.)

Article	Citations
CMOS-Integrated Aluminum Nitride MEMS: A Review	59
Airborne Piezoelectric Micromachined Ultrasonic Transducers for Long-Range Detection	49
Study of Thin Film LiNbO₃ Laterally Excited Bulk Acoustic Resonators	43
1.3 mm² Nav-Grade NEMS-Based Gyroscope	40
X-Cut Lithium Niobate-Based Shear Horizontal Resonators for Radio Frequency Applications	37
Nonlinear Response of PZT-Actuated Resonant Micromirrors	28
Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters	24
Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single Resonator	24
Acoustic Loss in Thin-Film Lithium Niobate: An Experimental Study	24
Monolithic Multiband MEMS RF Front-End Module for 5G Mobile	23
High Quality Co-Sputtering AlScN Thin Films for Piezoelectric Lamb-Wave Resonators	22
Bimorph Pinned Piezoelectric Micromachined Ultrasonic Transducers for Space Imaging Applications	22
A MEMS Resonant Accelerometer With High Relative Sensitivity Based on Sensing Scheme of Electrostatically Induced Stiffness Perturbation	21
Characterization and Compensation of Detection Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope	21
Controlling Residual Stress and Suppression of Anomalous Grains in Aluminum Scandium Nitride Films Grown Directly on Silicon	20
Long-Term Characterization of a New Wide-Angle Micromirror With PZT Actuation and PZR Sensing	20
Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch	19
A PMUT Integrated Microfluidic System for Fluid Density Sensing	19
Tunable Terahertz Free Spectra Range Using Electric Split-Ring Metamaterial	19
Quantification of Energy Dissipation Mechanisms in Toroidal Ring Gyroscope	19
Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism	19
A Novel Low-g MEMS Bistable Inertial Switch With Self-Locking and Reverse-Unlocking Functions	19
Non-Contact Ultrasonic Flow Measurement for Small Pipes Based on AlN Piezoelectric Micromachined Ultrasonic Transducer Arrays	19
Development of Dual-Frequency PMUT Arrays Based on Thin Ceramic PZT for Endoscopic Photoacoustic Imaging	18
Quad Mass Resonator With Frequency Mismatch of 3 ppm Trimmed by Focused Ion Beam	18

Numerical Modelling of Non-Linearities in MEMS Resonators	17
High-Stability Quartz Resonant Accelerometer With Micro-Leverages	17
ScAlN/AlN Film-Based Lamé Mode Resonator With High Effective Electromechanical Coupling Coefficient	17
Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators	17
A Low-Noise High-Order Mode-Localized MEMS Accelerometer	17
Three-Axis Capacitive Sensor Arrays for Local and Global Shear Force Detection	17
Sub-GHz X-Cut Lithium Niobate S₀ Mode MEMS Resonators	16
A Piezoelectric Micromachined Ultrasonic Transducer Using Thin-Film Lithium Niobate	16
A Pulsed Wave Doppler Ultrasound Blood Flowmeter by PMUTs	16
Fused Quartz Dual-Shell Resonator Gyroscope	16
A Self-Powered MEMS Inertial Switch for Potential Zero Power-Consumption Wake-Up Application	15
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions	15
Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation	15
SAW Filters With Excellent Temperature Stability and High Power Handling Using LiTaO₃/SiC Bonded Wafers	15
Design and Development of the MEMS-Based High-g Acceleration Threshold Switch	15
Highly Responsive Metal Oxide (V₂O₅)-Based NEMS Pirani Gauge for In-Situ Hermeticity Monitoring	14
High-Temperature Acoustic and Electric Characterization of Ferroelectric Al₀.₇Sc₀.₃N Films	14
Optimization of Inactive Regions of Lithium Niobate Shear Mode Resonator for Quality Factor Enhancement	14
Optimization of MEMS Vibration Energy Harvester With Perforated Electrode	14
A 5.3 GHz Al_0.76Sc_0.24N Two-Dimensional Resonant Rods Resonator With a k_t² of 23.9%	14
Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges	14
Highly Selective Guiding Springs for Large Displacements in Surface MEMS	13
On Enhancing the Sensitivity of Resonant Thermometers Based on Parametric Modulation	13
Design, Fabrication, and Characterization of Aluminum Scandium Nitride-Based Thin Film Bulk Acoustic Wave Filter	13
Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication	13
Acoustic Loss of GHz Higher-Order Lamb Waves in Thin-Film Lithium Niobate: A Comparative Study	12
Modeling of Beam Electrothermal Actuators	12
Uncooled Infrared Detector Based on an Aluminum Nitride Piezoelectric Fishnet Metasurface	12
On the Effect of Water-Induced Degradation of Thin-Film Piezoelectric Microelectromechanical Systems	12
Directional Sound Sensor With Consistent Directivity and Sensitivity in the Audible Range	12
Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW	12
A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped Structure	12
Direct Phase Measurement and Compensation to Enhance MEMS Gyroscopes ZRO Stability	11
Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators	11
Fused Silica Gyroscope Resonator Manufactured With Femtosecond Laser Assisted Wet Etching	11
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride	11
Tactile Sensing With Scalable Capacitive Sensor Arrays on Flexible Substrates	11
Electromechanical Equivalent Circuit Model for Axisymmetric PMUTs With Elastic Boundary Conditions	10
Crossover/Veering in V-Shaped MEMS Resonators	10
High-Intensity Airborne CMUT Transmitter Array With Beam Steering	10
Design and Fabrication of a MEMS Capacitance Vacuum Sensor Based on Silicon Buffer Block	10
An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer	10
Dynamic Performance Improvement of Piezoelectrically Driven Micro-Lens Actuators	10
Eye-Tracking Monitoring Based on PMUT Arrays	10
Modeling and Characterization of a Novel In-Plane Dual-Axis MEMS Accelerometer Based on Self-Support Piezoresistive Beam	10
Polymer/Ceramic MEMS: A Nanomechanical Sensor Platform With Low Temperature High Gauge Factor ITO for Electromechanical Transduction	10
Fully Flexible PMUT Based on Polymer Materials and Stress Compensation by Adaptive Frequency Driving	9
Design and Fabrication of a MEMS-Based Break Junction Device for Mechanical Strain-Correlated Optical Characterization of a Single-Molecule	9
Piezoelectric Disk Gyroscope Fabricated With Single-Crystal Lithium Niobate	9
Vibration Mode Suppression in Micromechanical Resonators Using Embedded Anti- Resonating Structures	9

Rigorous Model-Based Mask Data Preparation Algorithm Applied to Grayscale Lithography for the Patterning at the Micrometer Scale	9
A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion	9
Wafer-Level Low-Temperature Solid-Liquid Inter-Diffusion Bonding With Thin Au-Sn Layers for MEMS Encapsulation	9
Miniature Electrodynamic Wireless Power Transmission Receiver Using a Micromachined Silicon Suspension	9
A Non-Linear Lumped Model for the Electro-Mechanical Coupling in Capacitive MEMS Microphones	9
Thermal Response and TC f of GaN/AlN Heterostructure Multimode Micro String Resonators From −10 °C Up to 325 °C	9
Design, Modeling and Characterization of High-Performance Bulk-Mode Piezoelectric MEMS Resonators	9
A Ring Gyroscope With On-Chip Capacitive Stress Compensation	9
A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles	9
Fabrication of Bloch Long Range Surface Plasmon Waveguides Integrating Counter Electrodes and Microfluidic Channels for Multimodal Biosensing	9
Microscale Devices for Biomimetic Sound Source Localization: A Review	8
A Resonant Lorentz-Force Magnetometer Featuring Slotted Double-Ended Tuning Fork Capable of Operating in a Bias Magnetic Field	8
Shock Destructive Reliability Analysis of Electromagnetic MEMS Micromirror for Automotive LiDAR	8
Vibrating Mesh Atomizer for Spin-Spray Deposition	8
On Sampling Rate Limits in Bistable Microbeam Sensors	8
A MEMS Inertial Switch With Large Scale Bi-Directional Adjustable Threshold Function	8
Effect of Metallization on Quality Factor and Noise Characteristics in Fused Silica Dual-Shell Gyroscopes	8
Sub-Deg-per-Hour Edge-Anchored Bulk Acoustic Wave Micromachined Disk Gyroscope	8
A Closed-Loop System for Resonant MEMS Sensors Subject to Blue-Sideband Excitation	8
Ultra-Low Relative Frequency Split Piezoelectric Ring Resonator Designed for High-Performance Mode-Matching Gyroscope	8
A Continuous, Impedimetric Parylene Flow Sensor	8
A Microtissue Platform to Simultaneously Actuate and Detect Mechanical Forces via Non-Contact Magnetic Approach	8
Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone	8
Radially Pleated Disk Resonator for Gyroscopic Application	7
Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications	7
Phononic Frequency Combs in Atomically Thin Nanoelectromechanical Resonators Via 1:1 and 2:1 Internal Resonances	7
Micro-Patterning of Electret Charge Distribution by Selective Liquid-Solid Contact Electrification	7
A Multilayered Structure for Packageless Acoustic- Wave Devices With Ultra-Small Sizes	7
Accurate Identification of the Evolution of MEMS Resonant Accelerometer Residual Stresses at the Wafer-Die-Chip Level	7
A MEMS Nanopositioner With Integrated Tip for Scanning Tunneling Microscopy	7
Fully Additive Fabrication of Electrically Anisotropic Multilayer Materials Based on Sequential Electrodeposition	7
Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS Mirrors	7
Simulation and Experiments on a Valveless Micropump With Fluidic Diodes Based on Topology Optimization	7
Accurate Analytic Model of a Parametrically Driven Resonant MEMS Mirror With a Fourier Series-Based Torque Approximation	7
Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression	7
The Establishment and Verification of the Sensitivity Model of the Piezoresistive Pressure Sensor Based on the New Peninsula Structure	7
Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators	7
A 100 nm Thick, 32 kHz X-Cut Lithium Niobate Piezoelectric Nanoscale Ultrasound Transducer for Airborne Ultrasound Communication	7
An Electromagnetic Translational Vibration Energy Harvester Fabricated in MP35N Alloy	7
Implementation of Dual-Nonlinearity Mechanism for Bandwidth Extension of MEMS Multi-Modal Energy Harvester	7
A MEMS Optical Phased Array Based on Pitch Tunable Silicon Micromirrors for LiDAR Scanners	7
Design and Fabrication of a Metal-Silicon Actuator With Low Voltage, Low Power Consumption and Large Displacement	7
Electronic Stethoscope Based on Triangular Cantilever Piezoelectric Bimorph MEMS Transducers	6
Sacrificial Materials and Release Etchants for Metal MEMS That Reduce or Eliminate Hydrogen-Induced Residual Stress Change	6
Performance of MEMS-Based Monopropellant Microthruster With Insulating Effect	6
Two-Dimensional Theoretical Modeling and Experimental Investigations of Micromachined Thermal Expansion-Based Angular Motion Sensor	6
Compact, High-Performance Positive Magnetophoresis Chip With Integrated Patterned Magnet for Efficient Particle Trapping	6
Bias Thermal Stability Improvement of Mode-Matching MEMS Gyroscope Using Mode Deflection	6
Acoustic Bubble-Induced Microstreaming for Biochemical Droplet Mixing Enhancement in Electrowetting (EW) Microfluidic Platforms	6
A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor	6
UV LED Assisted Printing Platform for Fabrication of Micro-Scale Polymer Pillars	6
Modeling and Analysis of a MEMS Vibrating Ring Gyroscope Subject to Imperfections	6
Biocompatible a-SiC:H-Based Bistable MEMS Membranes With Piezoelectric Switching Capability in Fluids	6
Electro-Thermally Actuated Non-Volatile Mechanical Memory With CMOS-Level Operation Voltage and Low Contact Resistance	6
Experimental and Modeling Based Investigations of Process Parameters on a Novel, 3D Printed and Self-Insulated 24-Well, High-Throughput 3D Microelectrode Array Device for Biological Applications	6
Assembled Comb-Drive XYZ-Microstage With Large Displacements and Low Crosstalk for Scanning Force Microscopy	6
Feedforward Control Algorithms for MEMS Galvos and Scanners	6
Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory	5
Triple Mass Resonator for Electrostatic Quality Factor Tuning	5
Free Suspended Thin-Walled Nickel Electroplated Tubes for Microfluidic Density and Mass Flow Sensors	5
A Microfluidic Device With Optically-Controlled Electrodes for On-Demand Electrical Impedance Measurement of Targeted Single Cells	5
Mitigating the Insufficient Etching Selectivity in the Wet Release Process of CMOS-MEMS Metal Resonators Via Diffusion Control	5
On the Design and Modeling of a Full-Range Piezoelectric MEMS Loudspeaker for In-Ear Applications	5
Nanometer Order Separation Control of Large Working Area Nanogap Created by Cleavage of Single-Crystal Silicon Along {111} Planes Using a MEMS Device	5
Development of ScAlN PMUTs for Medical Applications	5
Portable Dielectrophoresis Microfluidic Chip Integrated With Microscopic Platform for Water Blooms Monitoring	5
A Biaxially Stretchable and Washable LED Display Enabled by a Wavy-Structured Metal Grid	5
A Resonant Lorentz-Force Magnetometer Exploiting Blue Sideband Actuation to Enhance Sensitivity and Resolution	5
Deep Etching of LiNbO₃ Using Inductively Coupled Plasma in SF₆-Based Gas Mixture	5
Aluminum Nitride Based Film Bulk Acoustic Resonator With Anchor Column Structure	5
Lock-In Amplified Fluorescence Spectroscopy in a Digital Microfluidic Configuration for Antibiotic Detection of Ciprofloxacin in Milk	5
Transfer Learning for Test Time Reduction of Parameter Extraction in MEMS Accelerometers	5
Study of MEM Relay Contact Design and Body-Bias Effects on on-State Resistance Stability	5
Perovskite Nickelate Actuators	5
Thick Germanium-on-Nothing Structures by Annealing Microscale Hole Arrays With Straight Sidewall Profiles	5
Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation	5
Nozzleless Acoustic Droplet Ejector With Electrically Tunable Droplet Size for Picking and Placing Semiconductor Chips	5
Self-Actuating Isothermal Nanomechanical Test Platform for Tensile Creep Measurement of Freestanding Thin Films	5
Highly-Conformal Sputtered Through-Silicon Vias With Sharp Superconducting Transition	5
Analysis and Compensation of Bias Drift of Force-to-Rebalanced Micro-Hemispherical Resonator Gyroscope Caused by Assembly Eccentricity Error	5

Continuous Mode-Reversal FM Accelerometer With 60-g FSR, 10-μg/K Drift, and VRE Rejection	4
An Air-Coupled Electrostatic Ultrasound Transducer Using a MEMS Microphone Architecture	4
On the Dynamic Range and Resolution of Thermal-Piezoresistive Resonant Mass Sensors	4
Optimization of Anchor Placement in TPoS MEMS Resonators: Modeling and Experimental Validation	4
Precision Wet Etching of ZnO Using Buffer Solutions	4
Multilayer Masking Technology for Fabricating Airborne CMUTs With Multi-Depth Fluidic Trenches	4
Fabrication of a Multilayer Implantable Cortical Microelectrode Probe to Improve Recording Potential	4
Parametric Model Identification of Axisymmetric MEMS Resonators	4
Ejected Droplet-Directed Transportation and Self-Alignment of Microfibers to Micro Trenches	4
Analytical Deflection Profiles and Pull-In Voltage Calculations of Prestressed Electrostatic Actuated MEMS Structures	4
Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching	4
Design, Modeling and Fabrication of TPoS MEMS Resonators With Improved Performance at 1 GHz	4
Silicon MEMS Nanomechanical Membrane Flexure Sensor With Integrated High Gauge Factor ITO	4
Multiphase Bipolar Electret Rotary Generator for Energy Harvesting and Rotation Monitoring	4
Rapid Makerspace Microfabrication and Characterization of 3D Microelectrode Arrays (3D MEAs) for Organ-on-a-Chip Models	4
Characterization of Accelerated Fatigue in Thick Epi-Polysilicon Vacuum Encapsulated MEMS Resonators	4
Characterization of a Wafer-Level Packaged Au−Ru/AlCu Contact for Micro-Switches	4
JMEMS Letters Fabrication of Self-Sealed Circular Microfluidic Channels in Glass by Thermal Blowing Method	4
Ultra-High Sensitivity Surface-Micromachined Capacitive Differential Pressure Sensor for Low-Pressure Applications	4
Thermomechanical Modeling and Optimization of Zero-Power Micromechanical Photoswitch	4
Serial and Parallel Connections of Micromechanical Resonators for Sensing: Theories and Applications	4
A Monolithic Micromachined Thermocouple Probe With Electroplating Nickel for Micro-LED Inspection	4
Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters	4
Pressure Sensor Embedded Inductive Coil Toward a Wireless Pressure Sensing Stent	4
High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance	4
Silicon Micro-Channel Definition via ICP-RIE Plasma Etching Process Using Different Aluminum Hardmasks	4
A Side-Viewing Endoscopic Probe With Distal Micro Rotary Scanner for Multimodal Luminal Imaging and Analysis	4
Aluminum Nitride 4-Beam Piezoelectric Nanoscale Ultrasound Transducer (pNUT)	4
Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation	4
Asymmetric Microelectrodes for Nanoliter Bubble Generation via Electrolysis	4
Transversal Spurious Mode Suppression in Ultra-Large-Coupling SH0 Acoustic Resonators on YX36°-Cut Lithium Niobate	4
Piezoelectric Deactuation-Based Bi-Stable MEMS Switch: MEM-Z NVM	4
Characterization of a Wake-Up Nano-Gap Gas Sensor for Ultra Low Power Operation	4
A Microfluidic Chip for Growth and Characterization of Adult Rat Hippocampal Progenitor Cell Neurospheroids	4
Parametric Resonators With a Floating Rotor: Sensing Strategy for Devices With an Increased Stiffness and Compact Design	4
Continuous and Non-Invasive Monitoring of Blood Pressure Based on Wearable Piezoelectric Micromachined Ultrasonic Transducers Array	3
A Defect-Based MEMS Phononic Crystal Slab Waveguide in Electronic Circuits	3
Fabrication of 32 × 32 2D Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays on a Borosilicate Glass Substrate With Silicon-Through-Wafer Interconnects Using Sacrificial Release Process	3
Frequency Tuning Method on Teeth-Like Tines of the Fused Silica Micro-Hemispherical Resonator Using Femtosecond Laser	3
An In-Situ Self-Test Method for Measuring Absorptivity of Film-Type Uncooled Infrared Detectors	3
Physical Parameter Extraction and Modeling of Metallized Deeply-Etched Vertical Mirrors	3
High Energy Density Cellular Electrostatic In-Plane 2-Axis Actuators	3
Tiny-Gap Titanium-Nitride-Composite MEMS Resonator Designs With High Power Handling Capability	3
Evaluation of Polymer Materials for MEMS Microphones	3
Three-Degree-of-Freedom Electromagnetic Microactuator With Powder-Based Sm-Fe-N Magnets and Parylene Beams	3
Temperature Dependence Modeling and Thermal Sensitivity Reduction of Bulk Micromachined Silicon MEMS Lamé Resonators	3
Breakdown and Healing of Tungsten-Oxide Films on Microelectromechanical Relay Contacts	3
Silicon-Based Stretchable Structure via Parylene Kirigami Interconnection	3
Theoretical Modeling of Piezoelectric Micromachined Ultrasonic Transducers With Honeycomb Structure	3
Integrated Stress Sensors for Humidity Performance Drift Analysis and Compensation in Inertial Measurement Units	3
Circuit Simulator Compatible Model for the Ring-Dot Piezoelectric Transformer	3
Sensitivity Enhancement of Thermal Piezoresistive Resonant MEMS Sensors Using Mechanical Coupling and DC Tuning	3
Impact of Frequency Mismatch on the Quality Factor of Large Arrays of X-Cut Lithium Niobate MEMS Resonators	3
Critical Issues in MEMS Property Measurement and Variation Measured by Nanoindentation: Error Sources and Uncertainty	3
Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers	3
A Suspended Metamaterial Mirror for Hyperspectral Shortwave Infrared Fabry-Perot Filters	3
Atomization of High Viscous Liquids Using a MEMS Vibrating Mesh With Integrated Microheater	3
On-Chip Frequency Tuning of Fast Resonant MEMS Scanner	3
Exploration and Realization of Novel High-Q Bulk Modes Using Support Transducer Topology	3
Mechanically Coupled Single-Crystal Silicon MEMS Resonators for TCF Manipulation	3
Multi-Gate In-Plane Actuated NEMS Relays for Effective Complementary Logic Gate Designs	3
Microfabrication of On-Demand Tapered Glass Capillaries by Etching Combined With Polishing	3
Shape-Recognizable Origami Sheet Device With Single Walled Carbon Nanotube Strain Sensor	3
An Ultrathin Internal Dielectric Actuator for Extended Range Deflection Pull-in Free Actuation	3
A Bulk-Type High-Pressure MEMS Pressure Sensor With Dual-Cavity Induced Mechanical Amplification	3
A Subwavelength-Grating-Mirror-Based MEMS Tunable Fabry-Perot Filter for Hyperspectral Infrared Imaging	3
3D-Printing Enables Fabrication of Swirl Nozzles for Fast Aerosolization of Water-Based Drugs	3
Fabrication of Polymer Membrane-Suspended Microstructures on Printed Circuit Boards	2
A ScAlN-Based Piezoelectric MEMS Microphone With Sector-Connected Cantilevers	2
Manipulating Etch Selectivities in XeF₂ Vapour Etching	2
Thermoelectric and Thermoresistive Effect in Bi₂Se₃: A Novel Dual-Mode Temperature and Heat Flux Sensor	2
Transmission Target for a MEMS X-Ray Source	2
Large Displacement Actuators With Multi-Point Stability for a MEMS-Driven THz Beam Steering Concept	2
Investigation of Vapor HF Sacrificial Etching Characteristics Through Submicron Release Holes for Wafer-Level Vacuum Packaging Based on Silicon Migration Seal	2
A Monolithic Forward-View Optical Scanner by a Pair of Upright MEMS Mirrors on a SiOB for LiDAR Applications	2
Ultra-Low Stress Die Attachment Based on a Stacked Multilayer Substrate	2
Optimization of Hemispherical Shell Resonator Structure Based on Thermoelastic Dissipation	2
Thermal Flow Sensor With a Bidirectional Thermal Reference	2
Chipping Energy Threshold in MEMS Sensors	2
Modeling on RF Circuit and Thermal Conduction of a MEMS Amplitude Demodulator	2
Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping	2
A Compact Reconfigurable Resonator-Based Direct Current Sensing System	2
A Piezoelectric Micro Machined Ultrasonic Transducer Based Hybrid-Morph AlScN Film	2
Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators	2
Folded MEMS Platform Based on Polymeric Flexible Hinges for 3D Integration of Spatially-Distributed Sensors	2
Piezoelectric Micromachined Ultrasonic Transducers With Superior Frequency Control	2
A Micro-Force Measurement System Based on Lorentz Force Particle Analyzer for the Cleanliness Inspection of Metal Materials	2
A Silicon MEMS Quatrefoil Suspension Gyroscope	2
Phononic Graded Meta-MEMS for Elastic Wave Amplification and Filtering	2
Experimental Investigation of Moisture Induced Offset Drifts on Plastic Packaged MEMS Sensor Devices	2
Experimental and Simulative Correlations of the Influence of Solder Volume and Receptor Size on the Capillary Self-Alignment of Micro Solar Cells	2
High-Performance, Low-Cost On-Chip Fabry-Perot Interferometer With Microfluidic Channel Using Single Anisotropic Wet Etching	2
Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization	2
Nanoporous Silicon Membrane Embedded With Dielectrophoresis (DEP) Electrodes for Ultrafiltration Improvement for Artificial Kidney	2
Determining the Nonlinear Motion of MEMS Gyroscopes Using the Harmonic Balancing Method	2