OOIR: Observatory of International Research

Papers

(The median citation count of Journal of Microelectromechanical Systems is 1. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-05-01 to 2025-05-01.)

Article	Citations
A Micro-Force Measurement System Based on Lorentz Force Particle Analyzer for the Cleanliness Inspection of Metal Materials	78
Front Cover	56
TechRxiv: Share Your Preprint Research with the World!	46
Front Cover	34
MEMS Pitch Gyroscope Based on (250-nm)² Gauges Achieving 0.12 °/hr Over 1000 dps Full-Scale	33
Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation	31
Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry	31
Optimization of MEMS Matching Network for the Sensitivity of GHz Low-Power Wake-Up Receivers	30
Journal of Microelectromechanical Systems Publication Information	26
Transducers 2023	26
Perovskite Nickelate Actuators	26
Design and Fabrication of a Micropillar-Pumped Polymer Loop Heat Pipe	25
A Novel Inline Near-Zero Thermopile RF MEMS Power Sensor	25
Microfluidic Biosensor for the In Vitro Electrophysiological Characterization of Actin Bundles	24
Journal of Microelectromechanical Systems Publication Information	24
Temperature Dependence Modeling and Thermal Sensitivity Reduction of Bulk Micromachined Silicon MEMS Lamé Resonators	24
MEMS Switching Voltage Regulator Using a Normally-On Electret Relay	23
Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator	23
A Reusable Pseudo-Liquid-to-Solid Inertial Switch Based on Hetero-Coated Galinstan Droplets	22
Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors	21
A Novel Parametric System-Level Modeling Method for MEMS Devices Combining Artificial Neural Networks and Behavior Description	20
2021 Index Journal of Microelectromechanical Systems Vol. 30	20
Parametric Resonators With a Floating Rotor: Sensing Strategy for Devices With an Increased Stiffness and Compact Design	19
A 2D MEMS Crosstalk-Free Electromagnetic Micromirror for LiDAR Application	19
Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression	19

Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field	19
A Suspended Metamaterial Mirror for Hyperspectral Shortwave Infrared Fabry-Perot Filters	18
Optical Characterization of Dynamic CMUTs Using Zygo Optical Profilometers: An Alternative to Laser Doppler Vibrometers	18
A Piezoelectric Micro Machined Ultrasonic Transducer Based Hybrid-Morph AlScN Film	18
The Establishment and Verification of the Sensitivity Model of the Piezoresistive Pressure Sensor Based on the New Peninsula Structure	18
Direct Growth and Fabrication of Tungsten Coated GaN Nanowire Probes on Cantilevers for Scanning Probe Microscopy	18
1.3 mm² Nav-Grade NEMS-Based Gyroscope	17
2022 Reviewers List	16
TechRxiv: Share Your Preprint Research with the World!	15
TechRxiv: Share Your Preprint Research with the World!	15
Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters	15
A Microfluidic Chip for Growth and Characterization of Adult Rat Hippocampal Progenitor Cell Neurospheroids	15
Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization	14
Investigation of Vapor HF Sacrificial Etching Characteristics Through Submicron Release Holes for Wafer-Level Vacuum Packaging Based on Silicon Migration Seal	14
Nanoporous Silicon Membrane Embedded With Dielectrophoresis (DEP) Electrodes for Ultrafiltration Improvement for Artificial Kidney	14
TC f Manipulation in AlScN Nanomechanical Resonators Using Dual-Mode Parametric Excitation	13
In-Plane Orientational Control of Electronic Components Using Pattern Complementarity in a Self-Assembling System	13
Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor	13
TechRxiv: Share Your Preprint Research with the World!	13
Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation	13
Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer	12
MEMS Air-Damped Isolator for Dual-Axis Micromirrors: Broad-Range Frequency Vibration Isolation	12
Design and Fabrication Method of a Large-Size Electromagnetic MEMS Two-Dimensional Scanning Micromirror	12
Journal of Microelectromechanical Systems	12
Critical Issues in MEMS Property Measurement and Variation Measured by Nanoindentation: Error Sources and Uncertainty	12
Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers	12
Integrated Microfluidic System for Mechanical Agitation-Based Cell Lysis and Fluorescence Detection Using Reduced Amount of Reagent	12
Journal of Microelectromechanical Systems	12
Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone	12
A Rapid Circuit Phase Error Identification and Compensation Method for MEMS QMG Achieving 99.7% Reduction in ZRO Drift	12
Journal of Microelectromechanical Systems	11
Wafer-Level Fabrication of FAIMS Chips Based on TGV Technology	11
Low-Energy Consumption Actuation for Microelectrothermal Actuators via Capacitive Discharge Excitation	11
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions	11
Characterization of Al and Ni-P Films as Hardmasks for the ICP-RIE Plasma Etching Bosch Process	11
Bimorph Pinned Piezoelectric Micromachined Ultrasonic Transducers for Space Imaging Applications	11
A Weakly Coupled Tuning Fork MEMS Electric Field Sensor With High Resolution and Wide Measurement Range	11
Front Cover	10
Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation	10
Piezoelectric Deactuation-Based Bi-Stable MEMS Switch: MEM-Z NVM	10
Turnover Temperature Point Adjustment in Mechanically Coupled Single-Crystal Silicon MEMS Resonators	10
Electronic Stethoscope Based on Triangular Cantilever Piezoelectric Bimorph MEMS Transducers	10
Fabrication of 32×32 2 D CMUT Arrays on a Borosilicate Glass Substrate With Silicon- Through-Wafer Interconnects Using Non- Aligned and Aligned Anodic Bonding	10
Crosstalk Analysis to GHz Bulk-Acoustic-Wave Array for Addressable Micro/Nanoscale Particle Trapping	10
Table of Contents	10
Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping	10
The Influences of Non-Volatile Surface Compound Layer on the Dry Etching of Borosilicate Glass	10
A Multilayered Structure for Packageless Acoustic- Wave Devices With Ultra-Small Sizes	10
Response Speed Characterization of a Thermally Actuated Programmable Metamaterial	9
Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film	9

Real-Time Phase Compensation for Scale Factor Nonlinearity Improvement Over Temperature Variations for MEMS Gyroscope	9
A Silicon Migration Model Incorporating Anisotropic Surface Energy and Non-Uniform Diffusivity	9
Toward 120 dB CMOS-MEMS Arrayed Accelerometers Measuring Through kg Shock Events	9
TechRxiv: Share Your Preprint Research with the World!	9
Front Cover	9
A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion	9
Glass-Based Micro-Hotplate With Low Power Consumption and TGV Structure Through Anodic Bonding and Glass Thermal Reflow	9
Phononic Integrated Circuit Component Design and Analysis for Surface Acoustic Waves in ScAlN on Silicon Carbide	9
A Review on MEMS Silicon Resonant Accelerometers	9
Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography	8
Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction	8
Bistability in Coupled Opto-Thermal Micro-Oscillators	8
A Silicon MEMS Quatrefoil Suspension Gyroscope	8
IEEE Access	8
Compact, High-Performance Positive Magnetophoresis Chip With Integrated Patterned Magnet for Efficient Particle Trapping	8
Electrowetting Ionic Liquid Flow Controller	8
Table of Contents	8
Phononic Frequency Combs in Atomically Thin Nanoelectromechanical Resonators Via 1:1 and 2:1 Internal Resonances	7
IEEE EDS Lester F. Eastman Award	7
Breakdown and Healing of Tungsten-Oxide Films on Microelectromechanical Relay Contacts	7
High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance	7
Disposable Piezoresistive MEMS Airflow Sensor for Chronic Respiratory Disease Detection	7
Member ad suite	7
Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications	7
TechRxiv: Share Your Preprint Research with the World!	7
High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror	7
C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz	7
Activation Model of Nano Getter for MEMS Devices Based on Sandwich Structures of Au-Porous Ti-Dense Ti Film	7
Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism	7
Synchronized Opto-Electro-Mechanical Measurements for Estimation of Energy Dissipation in Thin-Film-Piezoelectricon-Substrate MEMS/NEMS Devices	7
An Air-Coupled Electrostatic Ultrasound Transducer Using a MEMS Microphone Architecture	7
Transducers 2025	7
Whisker Sensor With Extended Measurement Range Through Jamming Effects Using 3D-Printed Tetrapod Particles	7
Coupled Thin Film Hydrogenated Amorphous Silicon Microresonator Arrays	6
Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory	6
TechRxiv: Share Your Preprint Research with the World!	6
Highly Selective Etching of Silicon Dioxide Over Aluminum Using Mixtures of Sulfuric Acid and Hydrofluoric Acid	6
Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators	6
Sensing Voltage at Electrically Floating Nodes: A Path Toward Enhancing Performance and Robustness in Capacitive MEMS Resonators	6
Exploring Ru Compatibility With Al-Ge Eutectic Wafer Bonding	6
High-Temperature Acoustic and Electric Characterization of Ferroelectric Al₀.₇Sc₀.₃N Films	6
Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching	6
Passive Vibration Control and Tunable Damping of MEMS Resonators via Electrical Autoparametric Resonance	6
Front Cover	6
Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors	6
High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays	6
Front Cover	6
Continuous and Non-Invasive Monitoring of Blood Pressure Based on Wearable Piezoelectric Micromachined Ultrasonic Transducers Array	6
Prestressing-Based Thermal Budget Study of MEMS Cantilever and Its Application in Package Processes	6
A Monolithic Forward-View Optical Scanner by a Pair of Upright MEMS Mirrors on a SiOB for LiDAR Applications	6
2024 Index Journal of Microelectromechanical Systems Vol. 33	6
Piezoelectric Disk Gyroscope Fabricated With Single-Crystal Lithium Niobate	5
MEMS-Oriented Single-Crystalline-Silicon Through-Silicon-Via Based on Filling and Oxidation of Silicon Powders	5
Journal of Microelectromechanical Systems	5
Introducing IEEE Collabratec	5
IEEE Access	5
Front Cover	5
Lock-In Amplified Fluorescence Spectroscopy in a Digital Microfluidic Configuration for Antibiotic Detection of Ciprofloxacin in Milk	5
Fabrication of a Novel GaAs Thermopile Sensor for RF Amplitude Demodulation	5
Fabrication of Capacitive Micromachined Ultrasonic Transducers With High-k Insulation Layer Using Silicon Fusion Bonding	5
Front cover	5
Synchronization in Pairs of Opto-Thermally Driven Mechanically Coupled Micro-Oscillators	5
A Tunable Two-Stage Bandpass Filter Incorporating Two Electromagnetically Coupled Curved Beams	5
Table of Contents	5
37th Annual IEEE Conference on Micro Electro Mechanical Systems	5
Accurate Identification of the Evolution of MEMS Resonant Accelerometer Residual Stresses at the Wafer-Die-Chip Level	5
Widely-Tunable MEMS Phononic Frequency Combs by Multistage Bifurcations Under a Single-Tone Excitation	5
Roll to Roll Imprinting PDMS Microstructures Under Reduced Ambient Pressures	5
Front Cover	5
A 3 Degrees-of-Freedom Electrothermal Micro-Positioner for Optical Chip-to-Chip Alignment	5
A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles	5
On Enhancing the Sensitivity of Resonant Thermometers Based on Parametric Modulation	5
Design, Modeling and Characterization of High-Performance Bulk-Mode Piezoelectric MEMS Resonators	4
Journal of Microelectromechanical Systems	4
TechRxiv: Share Your Preprint Research With the World!	4
Transmission Target for a MEMS X-Ray Source	4
Journal of Microelectromechanical Systems Publication Information	4
Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW	4
Passive and Wireless Anemometer Based on Inductor Bending Effect	4
Introducing IEEE Collabratec	4

Nonlinear Dynamics of Large-Angle Circular Scanning With an Aluminum Nitride Micro-Mirror	4
Simulation and Experiments on a Valveless Micropump With Fluidic Diodes Based on Topology Optimization	4
Ejected Droplet-Directed Transportation and Self-Alignment of Microfibers to Micro Trenches	4
Journal of Microelectromechanical Systems Publication Information	4
Characterization of a Wafer-Level Packaged Au−Ru/AlCu Contact for Micro-Switches	4
Optimization of Anchor Placement in TPoS MEMS Resonators: Modeling and Experimental Validation	4
Multiphase Bipolar Electret Rotary Generator for Energy Harvesting and Rotation Monitoring	4
Chipping Energy Threshold in MEMS Sensors	4
500-750 GHz Contactless Rotating MEMS Single-Pole Double-Throw Waveguide Switch	4
2023 Reviewers List	4
Journal of Microelectromechanical Systems Publication Information	4
Heat-Depolymerizable Tethers for Microelectromechanical System Assembly	4
Member ad suite	4
Table of Contents	4
A Mechanically Coupled Piezoelectric MEMS Filter With Tiny Percent Bandwidth and Low Insertion Loss	4
MEMS-Scale Angular Position Sensor Based on Ultracapacitor Technology	4
Electrofusion Device With High-Aspect-Ratio Electrodes for the Controlled Fusion of Lipid Vesicles	4
An In-Situ Self-Test Method for Measuring Absorptivity of Film-Type Uncooled Infrared Detectors	4
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride	4
Table of Contents	4
Direct Phase Measurement and Compensation to Enhance MEMS Gyroscopes ZRO Stability	4
Phase Noise Optimization of MEMS Resonant Accelerometer Based on AC Polarization	3
Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges	3
Investigation of Thermal Creep in Metal-Based MEMS Cantilevers	3
Table of Contents	3
Member ad suite	3
Analysis and Compensation of Bias Drift of Force-to-Rebalanced Micro-Hemispherical Resonator Gyroscope Caused by Assembly Eccentricity Error	3
Nonlinear Micro-Resonator-Based Comparator With Linear Hysteresis Tuning	3
Resource Allocation in Vibration Energy Harvesters	3
TechRxiv: Share Your Preprint Research with the World!	3
Quad Mass Resonator With Frequency Mismatch of 3 ppm Trimmed by Focused Ion Beam	3
TechRxiv: Share Your Preprint Research with the World!	3
Thermal Flow Sensor With a Bidirectional Thermal Reference	3
Folded MEMS Platform Based on Polymeric Flexible Hinges for 3D Integration of Spatially-Distributed Sensors	3
Soft Contact Lens With Embedded Moiré Patterns-Based Intraocular Pressure Sensors	3
Journal of Microelectromechanical Systems Publication Information	3
An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer	3
Continuous Mode-Reversal FM Accelerometer With 60-g FSR, 10-μg/K Drift, and VRE Rejection	3
Experimental Study of Electrical Breakdown in MEMS/NEMS Devices With Deep Submicron Gaps	3
Lateral Glow Discharge Ion Source for the Integrated MEMS Quadrupole Mass Spectrometer	3
TechRxiv: Share Your Preprint Research with the World!	3
JMEMS Letters Fabrication of Self-Sealed Circular Microfluidic Channels in Glass by Thermal Blowing Method	3
A “Smart” Gas Sensing System Composed of Micro-Hotplates and Artificial Neural Network	3
Aluminum Nitride 4-Beam Piezoelectric Nanoscale Ultrasound Transducer (pNUT)	3
Front Cover	3
Table of Contents	3
2022 Index IEEE Journal of Microelectromechanical Systems Vol. 31	3
High-Performance, Low-Cost On-Chip Fabry-Perot Interferometer With Microfluidic Channel Using Single Anisotropic Wet Etching	3
Introducing IEEE Collabratec	3
Characterization and Compensation of Detection Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope	3
Member ad suite	3
Design, Fabrication, and Characterization of High-Stiffness Suspended Microcalorimeters With Nanowatt Power Resolution	3
Journal of Microelectromechanical Systems	3
Table of Contents	3
Three-Degree-of-Freedom Electromagnetic Microactuator With Powder-Based Sm-Fe-N Magnets and Parylene Beams	2
Characterization of a Wake-Up Nano-Gap Gas Sensor for Ultra Low Power Operation	2
Serial and Parallel Connections of Micromechanical Resonators for Sensing: Theories and Applications	2
Polycrystalline LPCVD 3C-SiC Thin Films on SiO₂ Using Alternating Supply Deposition	2
Feedthrough Engineering to Enable Resonant Sensors Working in Conductive Medium for Bio Applications	2
Journal of Microelectromechanical Systems	2
A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor	2
Sub-Deg-per-Hour Edge-Anchored Bulk Acoustic Wave Micromachined Disk Gyroscope	2
A Compact Reconfigurable Resonator-Based Direct Current Sensing System	2
Self-Actuating Isothermal Nanomechanical Test Platform for Tensile Creep Measurement of Freestanding Thin Films	2
2023 Index Journal of Microelectromechanical Systems Vol. 31	2
Three-Axis Capacitive Sensor Arrays for Local and Global Shear Force Detection	2
Root-Causes of Bias Instability Noise in Mode-Split MEMS Gyroscopes	2
Tiny-Gap Titanium-Nitride-Composite MEMS Resonator Designs With High Power Handling Capability	2
Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators	2
Suspended Silicon Nitride Platforms for Thermal Sensing Applications in the Limit of Minimized Membrane Thickness	2
Gold Nanorod-Embedded PDMS Micro-Pillar Array for Localized Photothermal Stimulation	2
TechRxiv: Share Your Preprint Research with the World!	2
Development of PMUT-Based High Sensitivity Gas Flow Sensor	2
JMEMS Letters.1pt Fabrication of LCE Microactuator Arrays Through Soft Lithography With Surface Alignment	2
Evaluation of Polymer Materials for MEMS Microphones	2
Member ad suite	2
Journal of Microelectromechanical Systems	2
Analytical Deflection Profiles and Pull-In Voltage Calculations of Prestressed Electrostatic Actuated MEMS Structures	2
Experimental and Modeling Based Investigations of Process Parameters on a Novel, 3D Printed and Self-Insulated 24-Well, High-Throughput 3D Microelectrode Array Device for Biological Applications	2
Front Cover	2
Thermomechanical Modeling and Optimization of Zero-Power Micromechanical Photoswitch	2
Vacuum-Sealed MEMS Resonators Based on Silicon Migration Sealing and Hydrogen Diffusion	2
Table of Contents	2
2021 EDS Education Award call for nominations	2
K-Band LiNbO₃ A3 Lamb-Wave Resonators With Through-Holes	2
Aluminum Nitride Based Film Bulk Acoustic Resonator With Anchor Column Structure	2
Shock Destructive Reliability Analysis of Electromagnetic MEMS Micromirror for Automotive LiDAR	2
Front Cover	2
SAW Filters With Excellent Temperature Stability and High Power Handling Using LiTaO₃/SiC Bonded Wafers	2
A Non-Linear Lumped Model for the Electro-Mechanical Coupling in Capacitive MEMS Microphones	1
Table of Contents	1
Multilayer Masking Technology for Fabricating Airborne CMUTs With Multi-Depth Fluidic Trenches	1
18 GHz Solidly Mounted Resonator in Scandium Aluminum Nitride on SiO₂/Ta₂O₅ Bragg Reflector	1
Development of Programmable UV-LED Microlithography System for 3D Microfabrication	1
Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS Mirrors	1