OOIR: Observatory of International Research

Papers

(The median citation count of Journal of Microelectromechanical Systems is 2. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2020-03-01 to 2024-03-01.)

Article	Citations
A1 Resonators in 128° Y-cut Lithium Niobate with Electromechanical Coupling of 46.4%	87
A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films	85
MEMS Resonators for Frequency Reference and Timing Applications	67
Epitaxial Aluminum Scandium Nitride Super High Frequency Acoustic Resonators	61
High $Q$ Antisymmetric Mode Lithium Niobate MEMS Resonators With Spurious Mitigation	42
A Parylene Neural Probe Array for Multi-Region Deep Brain Recordings	40
Enabling Higher Order Lamb Wave Acoustic Devices With Complementarily Oriented Piezoelectric Thin Films	39
Airborne Piezoelectric Micromachined Ultrasonic Transducers for Long-Range Detection	38
CMOS-Integrated Aluminum Nitride MEMS: A Review	36
Study of Thin Film LiNbO₃ Laterally Excited Bulk Acoustic Resonators	36
Engineering a Compliant Mechanical Amplifier for MEMS Sensor Applications	33
Aluminum Nitride Combined Overtone Resonators for the 5G High Frequency Bands	33
1.3 mm² Nav-Grade NEMS-Based Gyroscope	31
X-Cut Lithium Niobate-Based Shear Horizontal Resonators for Radio Frequency Applications	31
Microfabricated Neuroaccelerometer: Integrating Sensing and Reservoir Computing in MEMS	28
A Miniaturized EHT Platform for Accurate Measurements of Tissue Contractile Properties	25
Nonlinear Response of PZT-Actuated Resonant Micromirrors	25
Additive Assembly for PolyJet-Based Multi-Material 3D Printed Microfluidics	23
A Paper-Based Flexible Tactile Sensor Array for Low-Cost Wearable Human Health Monitoring	22
A Ceramic PZT-Based PMUT Array for Endoscopic Photoacoustic Imaging	22
Geometric Imperfection Characterization and Precise Assembly of Micro Shell Resonators	22
DLP 3D Printed “Intelligent” Microneedle Array (iμNA) for Stimuli Responsive Release of Drugs and Its in Vitro and ex Vivo Characterization	21
A Two-Step Fabrication Method for 3D Printed Microactuators: Characterization and Actuated Mechanisms	21
Fabrication of Injectable Micro-Scale Opto- Electronically Transduced Electrodes (MOTEs) for Physiological Monitoring	20
Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single Resonator	20

Measurement of Tidal Tilt by a Micromechanical Inertial Sensor Employing Quasi-Zero- Stiffness Mechanism	20
Piezoelectric Micromachined Ultrasonic Transducers With Pinned Boundary Structure	19
Acoustic Loss in Thin-Film Lithium Niobate: An Experimental Study	19
A MEMS Resonant Accelerometer With High Relative Sensitivity Based on Sensing Scheme of Electrostatically Induced Stiffness Perturbation	19
Low-Power Dual Mode MEMS Resonators With PPB Stability Over Temperature	19
Monolithic Multiband MEMS RF Front-End Module for 5G Mobile	19
Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch	18
High Quality Co-Sputtering AlScN Thin Films for Piezoelectric Lamb-Wave Resonators	18
Controlling Residual Stress and Suppression of Anomalous Grains in Aluminum Scandium Nitride Films Grown Directly on Silicon	18
Fabrication of 2D Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays on Insulating Substrates With Through-Wafer Interconnects Using Sacrificial Release Process	18
Micromechanical Switch-Based Zero-Power Chemical Detectors for Plant Health Monitoring	18
A 512-Channel Multi-Layer Polymer-Based Neural Probe Array	18
Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters	17
Design, Fabrication and Experimental Validation of a Metaplate for Vibration Isolation in MEMS	17
Bimorph Pinned Piezoelectric Micromachined Ultrasonic Transducers for Space Imaging Applications	17
Tunable Terahertz Free Spectra Range Using Electric Split-Ring Metamaterial	17
Numerical Modelling of Non-Linearities in MEMS Resonators	16
Miniaturized Electronic Circuit Design Challenges for Ingestible Devices	16
Surface Texture Detection With a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial Finger	16
Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism	16
Long-Term Characterization of a New Wide-Angle Micromirror With PZT Actuation and PZR Sensing	16
Quantification of Energy Dissipation Mechanisms in Toroidal Ring Gyroscope	15
A PMUT Integrated Microfluidic System for Fluid Density Sensing	15
ScAlN/AlN Film-Based Lamé Mode Resonator With High Effective Electromechanical Coupling Coefficient	15
Considerations for an 8-inch Wafer-Level CMOS Compatible AlN Pyroelectric 5–14 μm Wavelength IR Detector Towards Miniature Integrated Photonics Gas Sensors	15
A Novel Low-g MEMS Bistable Inertial Switch With Self-Locking and Reverse-Unlocking Functions	15
Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators	15
Development of Dual-Frequency PMUT Arrays Based on Thin Ceramic PZT for Endoscopic Photoacoustic Imaging	15
Characterization and Compensation of Detection Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope	15
Electron Beam Lithography Fabrication of SU-8 Polymer Structures for Cell Studies	14
Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation	14
Three-Axis Capacitive Sensor Arrays for Local and Global Shear Force Detection	14
Engineering Efficient Acoustic Power Transfer in HBARs and Other Composite Resonators	14
Miniaturized PMUT-Based Receiver for Underwater Acoustic Networking	14
Optimization of MEMS Vibration Energy Harvester With Perforated Electrode	14
Quad Mass Resonator With Frequency Mismatch of 3 ppm Trimmed by Focused Ion Beam	14
Sub-GHz X-Cut Lithium Niobate S₀ Mode MEMS Resonators	14
Piezoelectric RF MEMS Switches on Si-on-Sapphire Substrates	14
Reconfigurable Multiband Terahertz Metamaterial Using Triple-Cantilevers Resonator Array	13
Multiphysics Analysis and Practical Implementation of a Soft μ-Actuator- Based Microfluidic Micromixer	13
Dynamics of V-Shaped Electrothermal MEMS-Based Resonators	13
High Dynamic Range AFM Cantilever With a Collocated Piezoelectric Actuator-Sensor Pair	13
Ultra-High-Q Gallium Nitride SAW Resonators for Applications With Extreme Temperature Swings	13
Low Loss Acoustic Delay Lines Based on Solidly Mounted Lithium Niobate Thin Film	13
De-Icing Device With Self-Adjusting Power Consumption and Ice Sensing Capabilities	13
A Piezoelectric Micromachined Ultrasonic Transducer Using Thin-Film Lithium Niobate	13
A Low-Noise High-Order Mode-Localized MEMS Accelerometer	13
Fundamental Noise Limits and Sensitivity of Piezoelectrically Driven Magnetoelastic Cantilevers	13
Low Phase Noise RF Oscillators Based on Thin-Film Lithium Niobate Acoustic Delay Lines	13
A Novel MEMS Speaker With Peripheral Electrostatic Actuation	13

Highly Selective Guiding Springs for Large Displacements in Surface MEMS	12
Flow Velocity Gradient Sensing Using a Single Curved Bistable Microbeam	12
Optimization of Inactive Regions of Lithium Niobate Shear Mode Resonator for Quality Factor Enhancement	12
Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography	12
A Self-Powered MEMS Inertial Switch for Potential Zero Power-Consumption Wake-Up Application	12
Polysilicon Grating Switches for LiDAR	12
Design and Development of the MEMS-Based High-g Acceleration Threshold Switch	12
Bendable Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays Based on Silicon-On-Insulator (SOI) Technology	12
A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor	12
On the Effect of Water-Induced Degradation of Thin-Film Piezoelectric Microelectromechanical Systems	12
Thickness-Lamé Thin-Film Piezoelectric-on-Silicon Resonators	12
Non-Contact Ultrasonic Flow Measurement for Small Pipes Based on AlN Piezoelectric Micromachined Ultrasonic Transducer Arrays	12
Specific Sensing Mechanism Investigation of Surface Acoustic Wave Humidity Sensors Coated With Uniform Graphene Oxide Membrane	11
Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication	11
A Monolithic Forward-View MEMS Laser Scanner With Decoupled Raster Scanning and Enlarged Scanning Angle for Micro LiDAR Applications	11
Highly Responsive Metal Oxide (V₂O₅)-Based NEMS Pirani Gauge for In-Situ Hermeticity Monitoring	11
Design and Fabrication of a MEMS Capacitance Vacuum Sensor Based on Silicon Buffer Block	10
A Pulsed Wave Doppler Ultrasound Blood Flowmeter by PMUTs	10
On Enhancing the Sensitivity of Resonant Thermometers Based on Parametric Modulation	10
Two-Dimensional CMOS MEMS Thermal Flow Sensor With High Sensitivity and Improved Accuracy	10
Miniature MEMS: Novel Key Components Toward Terahertz Reconfigurability	10
Bi-Stable Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducer (PMUT)	10
Design and Characterization of 3-Stack MEMS-Based Passive Flow Regulators for Implantable and Ambulatory Infusion Pumps	10
Nanostructured Spacers for Thermionic and Thermophotovoltaic Energy Converters	10
Systematic Characterization of Hydrophilized Polydimethylsiloxane	10
Modeling of Beam Electrothermal Actuators	10
SAW Filters With Excellent Temperature Stability and High Power Handling Using LiTaO₃/SiC Bonded Wafers	10
Fused Quartz Dual-Shell Resonator Gyroscope	10
Dynamic Performance Improvement of Piezoelectrically Driven Micro-Lens Actuators	10
Eye-Tracking Monitoring Based on PMUT Arrays	10
1-Port Piezoelectric Resonators With > 100 V/V Gain	10
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions	10
On the Discharge Transport Mechanisms Through the Dielectric Film in MEMS Capacitive Switches	10
High-Stability Quartz Resonant Accelerometer With Micro-Leverages	10
A Low Power Micro-Electromechanical Resonator-Based Digital to Analog Converter	10
High-Temperature Acoustic and Electric Characterization of Ferroelectric Al₀.₇Sc₀.₃N Films	9
High-Intensity Airborne CMUT Transmitter Array With Beam Steering	9
Fabrication of Bloch Long Range Surface Plasmon Waveguides Integrating Counter Electrodes and Microfluidic Channels for Multimodal Biosensing	9
Design and Fabrication of a MEMS-Based Break Junction Device for Mechanical Strain-Correlated Optical Characterization of a Single-Molecule	9
Electronic Immunoaffinity Assay for Differential Leukocyte Counts	9
A 5.3 GHz Al_0.76Sc_0.24N Two-Dimensional Resonant Rods Resonator With a k_t² of 23.9%	9
FPCB Masked One-Step Etching Large Aperture Mirror for LiDAR	9
Analytical Study and Thermal Compensation for Capacitive MEMS Accelerometer With Anti-Spring Structure	9
Uncooled Infrared Detector Based on an Aluminum Nitride Piezoelectric Fishnet Metasurface	9
Direct Phase Measurement and Compensation to Enhance MEMS Gyroscopes ZRO Stability	9
Evidence of Smaller 1/F Noise in AlScN-Based Oscillators Compared to AlN-Based Oscillators	9
Hierarchical Integration of Thin-Film NiTi Actuators Using Additive Manufacturing for Microrobotics	9
Low Offset and Noise in High Biased GaN 2DEG Hall-Effect Plates Investigated With Infrared Microscopy	9
Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators	9
Acoustic Loss of GHz Higher-Order Lamb Waves in Thin-Film Lithium Niobate: A Comparative Study	9
A Novel Thermistor-Based RF Power Sensor With Wheatstone Bridge Fabricating on MEMS Membrane	9
A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped Structure	9
Direct Laser Writing for Deterministic Lateral Displacement of Submicron Particles	8
Tactile Sensing With Scalable Capacitive Sensor Arrays on Flexible Substrates	8
The Model of Etch Rates of Crystallographic Planes of Sapphire Based on Step Flow Mechanism	8
Polymer/Ceramic MEMS: A Nanomechanical Sensor Platform With Low Temperature High Gauge Factor ITO for Electromechanical Transduction	8
A SiN Microcalorimeter and a Non-Contact Precision Method of Temperature Calibration	8
3D Nanoprinted Liquid-Core-Shell Microparticles	8
Miniature Electrodynamic Wireless Power Transmission Receiver Using a Micromachined Silicon Suspension	8
Vibration Mode Suppression in Micromechanical Resonators Using Embedded Anti- Resonating Structures	8
Directional Sound Sensor With Consistent Directivity and Sensitivity in the Audible Range	8
Piezoelectric Disk Gyroscope Fabricated With Single-Crystal Lithium Niobate	8
Ultra-Low Relative Frequency Split Piezoelectric Ring Resonator Designed for High-Performance Mode-Matching Gyroscope	8
An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer	8
Sidewall Metallization on CMOS MEMS by Platinum ALD Patterning	8
Inkjet-Printed Hydrogen Peroxide Sensor With Sensitivity Enhanced by Plasma Activated Inorganic Metal Salt Inks	7
Characterization and Clinical Serum Test of a Molecular Imprinted Polymer (MIP)-Based Cardiac Troponin T Sensing Electrode for Patient Monitoring Applications	7
An 8-Bit Digitally Operated Micromachined Accelerometer	7
A Resonant Lorentz-Force Magnetometer Featuring Slotted Double-Ended Tuning Fork Capable of Operating in a Bias Magnetic Field	7
Fully Flexible PMUT Based on Polymer Materials and Stress Compensation by Adaptive Frequency Driving	7
A Scalable, Hierarchical Rib Design for Larger-Area, Higher-Porosity Nanoporous Membranes for the Implantable Bio-Artificial Kidney	7
Electromechanical Equivalent Circuit Model for Axisymmetric PMUTs With Elastic Boundary Conditions	7
Implementation of Dual-Nonlinearity Mechanism for Bandwidth Extension of MEMS Multi-Modal Energy Harvester	7
A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles	7
Vibrating Mesh Atomizer for Spin-Spray Deposition	7
Radially Pleated Disk Resonator for Gyroscopic Application	7
Crossover/Veering in V-Shaped MEMS Resonators	7
A Non-Linear Lumped Model for the Electro-Mechanical Coupling in Capacitive MEMS Microphones	7
Thermal Response and TC f of GaN/AlN Heterostructure Multimode Micro String Resonators From −10 °C Up to 325 °C	7
Hybrid and Passive Tissue-Anchoring Mechanism for Ingestible Resident Devices	7

AFM Microcantilever With a Collocated AlN Sensor-Actuator Pair: Enabling Efficient Q-Control for Dynamic Imaging	7
Wafer-Level Low-Temperature Solid-Liquid Inter-Diffusion Bonding With Thin Au-Sn Layers for MEMS Encapsulation	7
A Multilayered Structure for Packageless Acoustic- Wave Devices With Ultra-Small Sizes	7
Sub-Deg-per-Hour Edge-Anchored Bulk Acoustic Wave Micromachined Disk Gyroscope	7
Anchor Design Affects Dominant Energy Loss Mechanism in a Lamé Mode MEM Resonator	7
Fully Additive Fabrication of Electrically Anisotropic Multilayer Materials Based on Sequential Electrodeposition	7
Modeling and Characterization of a Novel In-Plane Dual-Axis MEMS Accelerometer Based on Self-Support Piezoresistive Beam	7
Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges	7
Modified Coefficient of Equivalent Mass to Explain Decreased Relative Sensitivity of Piezoelectric Cantilever Humidity Sensor in High Mode	7
A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion	7
Multi-Layer Micro-Nanofluidic Device for Isolation and Capture of Extracellular Vesicles Derived From Liposarcoma Cell Conditioned Media	7
A Ring Gyroscope With On-Chip Capacitive Stress Compensation	7
Printed Electroceutical Dressings for the Inhibition of Biofilms and Treatment of Chronic Wounds	7
Crystal Orientation Dependent Dual Frequency Ovenized MEMS Resonator With Temperature Stability and Shock Robustness	7
Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators	6
Rigorous Model-Based Mask Data Preparation Algorithm Applied to Grayscale Lithography for the Patterning at the Micrometer Scale	6
Design, Modeling and Characterization of High-Performance Bulk-Mode Piezoelectric MEMS Resonators	6
Accurate Analytic Model of a Parametrically Driven Resonant MEMS Mirror With a Fourier Series-Based Torque Approximation	6
Shock Destructive Reliability Analysis of Electromagnetic MEMS Micromirror for Automotive LiDAR	6
Microscale Devices for Biomimetic Sound Source Localization: A Review	6
Dielectric Transfer Process for 3D Printed Metal Microsystems	6
Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS Mirrors	6
An Alternative Approach to Investigate V-Shaped Electrothermal Microactuators in Vacuum	6
Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW	6
Simulation and Experiments on a Valveless Micropump With Fluidic Diodes Based on Topology Optimization	6
Fast Selective Sensing of Nitrogen-Based Gases Utilizing δ-MnO₂-Epitaxial Graphene-Silicon Carbide Heterostructures for Room Temperature Gas Sensing	6
Reactive Ion Etching of Cytop and Investigation of Residual Microstructures	6
The Establishment and Verification of the Sensitivity Model of the Piezoresistive Pressure Sensor Based on the New Peninsula Structure	6
UV LED Assisted Printing Platform for Fabrication of Micro-Scale Polymer Pillars	6
Micropatterning and Integration of Electrospun PVDF Membrane Into Microdevice	6
Quality Factor Extraction and Enhancement Across Temperature in Ring Resonators	6
A 100 nm Thick, 32 kHz X-Cut Lithium Niobate Piezoelectric Nanoscale Ultrasound Transducer for Airborne Ultrasound Communication	6
Magnetic Field-Induced Recoverable Dynamic Morphological Change of Gallium-Based Liquid Metal	6
A MEMS Optical Phased Array Based on Pitch Tunable Silicon Micromirrors for LiDAR Scanners	6
Design and Fabrication of Reliable Power Efficient Bistable MEMS Switch Using Single Mask Process	6
A Self-Powered, Biodegradable Dissolved Oxygen Microsensor	6
Negative Nonlinear Dissipation in Microelectromechanical Beams	6
Near-Carrier Phase Noise Suppression at Turnover Temperature in a Thin-Film Piezoelectric-on-Silicon Oscillator	5
A MEMS Nanopositioner With Integrated Tip for Scanning Tunneling Microscopy	5
Study of MEM Relay Contact Design and Body-Bias Effects on on-State Resistance Stability	5
An Integrated, Optofluidic System With Aligned Optical Waveguides, Microlenses, and Coupling Prisms for Fluorescence Sensing	5
Triple Mass Resonator for Electrostatic Quality Factor Tuning	5
A MEMS Inertial Switch With Large Scale Bi-Directional Adjustable Threshold Function	5
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride	5
Zero-Balance Method for Evaluation of Sealed Cavity Pressure Down to Single Digit Pa Using Thin Silicon Diaphragm	5
Effect of Metallization on Quality Factor and Noise Characteristics in Fused Silica Dual-Shell Gyroscopes	5
A Microfluidic Device With Optically-Controlled Electrodes for On-Demand Electrical Impedance Measurement of Targeted Single Cells	5
Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone	5
Experimental and Modeling Based Investigations of Process Parameters on a Novel, 3D Printed and Self-Insulated 24-Well, High-Throughput 3D Microelectrode Array Device for Biological Applications	5
Nanometer Order Separation Control of Large Working Area Nanogap Created by Cleavage of Single-Crystal Silicon Along {111} Planes Using a MEMS Device	5
Actuation Dependency of Frequency Tuning in MEMS Resonators	5
Development of a 3D Printed, Self-Insulated, High-Throughput 3D Microelectrode Array (HT-3DMEA)	5
Ring-Focusing Fresnel Acoustic Lens for Long Depth-of-Focus Focused Ultrasound With Multiple Trapping Zones	5
Acoustic Bubble-Induced Microstreaming for Biochemical Droplet Mixing Enhancement in Electrowetting (EW) Microfluidic Platforms	5
A Self-Sealing Spray Nozzle for Aerosol Drug Delivery	5
Thick Germanium-on-Nothing Structures by Annealing Microscale Hole Arrays With Straight Sidewall Profiles	5
Micro-Patterning of Electret Charge Distribution by Selective Liquid-Solid Contact Electrification	5
An Electromagnetic Translational Vibration Energy Harvester Fabricated in MP35N Alloy	5
A Double-Sided Comb-Drive Actuator With a Floating Rotor: Achieving a Strong Response While Eliminating the DC Bias	5
Fabrication of Freestanding Metallic Ni-Mo-W Microcantilever Beams With High Dimensional Stability	5
Paraffin-Based Reconfigurable Antenna Operating at 100 GHz	5
On Sampling Rate Limits in Bistable Microbeam Sensors	5
Nonlinear Dissipation in Epitaxial SCS and Polysilicon MEMS Driven at Large Amplitudes	5
Active Noise Cancellation With MEMS Resonant Microphone Array	5
Free Suspended Thin-Walled Nickel Electroplated Tubes for Microfluidic Density and Mass Flow Sensors	5
Electro-Thermally Actuated Non-Volatile Mechanical Memory With CMOS-Level Operation Voltage and Low Contact Resistance	5
Graphene-Based Ion Sensitive-FET Sensor With Porous Anodic Aluminum Oxide Substrate for Nitrate Detection	5
Deep Etching of LiNbO₃ Using Inductively Coupled Plasma in SF₆-Based Gas Mixture	5
Two-Dimensional Theoretical Modeling and Experimental Investigations of Micromachined Thermal Expansion-Based Angular Motion Sensor	5
Assembled Comb-Drive XYZ-Microstage With Large Displacements and Low Crosstalk for Scanning Force Microscopy	5
4 W Power MEMS Relay With Extremely Low Contact Resistance: Theoretical Analysis, Design and Demonstration	4
Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications	4
Microfabricated Foldable Wings for Centimeter-Scale Microflyers	4
Feedforward Control Algorithms for MEMS Galvos and Scanners	4
Lock-In Amplified Fluorescence Spectroscopy in a Digital Microfluidic Configuration for Antibiotic Detection of Ciprofloxacin in Milk	4
Analytical Deflection Profiles and Pull-In Voltage Calculations of Prestressed Electrostatic Actuated MEMS Structures	4
Additive Manufacturing of Living Electrodes	4
Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory	4
A MEMS Turbopump for High-Temperature Rankine Micro Heat Engines—Part II: Experimental Demonstration	4
Compact, High-Performance Positive Magnetophoresis Chip With Integrated Patterned Magnet for Efficient Particle Trapping	4
Precision Wet Etching of ZnO Using Buffer Solutions	4
A Biaxially Stretchable and Washable LED Display Enabled by a Wavy-Structured Metal Grid	4
SeedEZ^TMInterdigitated Electrodes and Multifunctional Layered Biosensor Composites (MLBCs): A Paradigm Shift in the Development ofIn VitroBioMicrosystems	4
Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters	4
Ultrasonic Inspection and Self-Healing of Ge and 3C-SiC Semiconductor Membranes	4
Enhanced Capture of Aerosol Particles on Resonator-Based PM Mass Sensors Using Staggered Arrays of Micro-Pillars	4
Aluminum Nitride 4-Beam Piezoelectric Nanoscale Ultrasound Transducer (pNUT)	4
Transfer Learning for Test Time Reduction of Parameter Extraction in MEMS Accelerometers	4
Directional Droplet Transport and Fog Removal on Textured Surfaces Using Liquid Dielectrophoresis	4
Portable Dielectrophoresis Microfluidic Chip Integrated With Microscopic Platform for Water Blooms Monitoring	4
Electromechanical Tuning of Piecewise Stiffness and Damping for Long-Range and High-Precision Piezoelectric Ultrasonic Transducers	4
Mitigating the Insufficient Etching Selectivity in the Wet Release Process of CMOS-MEMS Metal Resonators Via Diffusion Control	4
Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression	4
A Fouling-Resistant Voltammetric Sensing System for Wearable Electroactive Biomarker Monitoring	4
Fabrication and Demonstration of a Self-Adaptive Microvalve Array for Distributed Liquid Cooling in Microelectronic Interposers	4