OOIR: Observatory of International Research

Papers

(The median citation count of Journal of Microelectromechanical Systems is 1. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-09-01 to 2025-09-01.)

Article	Citations
Front Cover	100
TechRxiv: Share Your Preprint Research with the World!	64
Front Cover	44
Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry	37
MEMS Pitch Gyroscope Based on (250-nm)² Gauges Achieving 0.12 °/hr Over 1000 dps Full-Scale	37
Optimization of MEMS Matching Network for the Sensitivity of GHz Low-Power Wake-Up Receivers	34
Journal of Microelectromechanical Systems Publication Information	32
A Micro-Force Measurement System Based on Lorentz Force Particle Analyzer for the Cleanliness Inspection of Metal Materials	32
Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation	30
Exploring Bias-Instability Noise Sources in Quadrature Error Compensation System for Mode-Split MEMS Gyroscopes	30
Front Cover	30
Transducers 2023	28
Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors	27
In Situ Reversible and Repeatable Actuation of the 3D-Printed Micro-Scale Cantilever Covered With a Light-Heat Converting Film as a New Approach Toward 4D Printing	27
A Novel Inline Near-Zero Thermopile RF MEMS Power Sensor	27
A Novel Parametric System-Level Modeling Method for MEMS Devices Combining Artificial Neural Networks and Behavior Description	26
Journal of Microelectromechanical Systems Publication Information	25
MEMS Switching Voltage Regulator Using a Normally-On Electret Relay	24
Microfluidic Biosensor for the In Vitro Electrophysiological Characterization of Actin Bundles	24
Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator	23
A Reusable Pseudo-Liquid-to-Solid Inertial Switch Based on Hetero-Coated Galinstan Droplets	22
Design and Fabrication of a Micropillar-Pumped Polymer Loop Heat Pipe	21
60-g FSR, 6-μg Stability FM Time-Switched Accelerometers Through Shaped Comb Fingers	21
Optical Characterization of Dynamic CMUTs Using Zygo Optical Profilometers: An Alternative to Laser Doppler Vibrometers	20
2021 Index Journal of Microelectromechanical Systems Vol. 30	20

Temperature Dependence Modeling and Thermal Sensitivity Reduction of Bulk Micromachined Silicon MEMS Lamé Resonators	20
Direct Growth and Fabrication of Tungsten Coated GaN Nanowire Probes on Cantilevers for Scanning Probe Microscopy	19
A Piezoelectric Micro Machined Ultrasonic Transducer Based Hybrid-Morph AlScN Film	19
A Suspended Metamaterial Mirror for Hyperspectral Shortwave Infrared Fabry-Perot Filters	18
TechRxiv: Share Your Preprint Research with the World!	17
2022 Reviewers List	17
Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression	17
TechRxiv: Share Your Preprint Research with the World!	16
Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization	15
A Microfluidic Chip for Growth and Characterization of Adult Rat Hippocampal Progenitor Cell Neurospheroids	15
Investigation of Vapor HF Sacrificial Etching Characteristics Through Submicron Release Holes for Wafer-Level Vacuum Packaging Based on Silicon Migration Seal	15
Nanoporous Silicon Membrane Embedded With Dielectrophoresis (DEP) Electrodes for Ultrafiltration Improvement for Artificial Kidney	15
Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field	14
In-Plane Orientational Control of Electronic Components Using Pattern Complementarity in a Self-Assembling System	14
Thermally Stable, BEOL-Configured MEMS-Based One-Time Programmable (OTP) Memory for Cryogenic Embedded Application	14
TC f Manipulation in AlScN Nanomechanical Resonators Using Dual-Mode Parametric Excitation	14
Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation	14
Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters	13
A 2D MEMS Crosstalk-Free Electromagnetic Micromirror for LiDAR Application	13
The Establishment and Verification of the Sensitivity Model of the Piezoresistive Pressure Sensor Based on the New Peninsula Structure	13
Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor	13
Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone	12
Integrated Microfluidic System for Mechanical Agitation-Based Cell Lysis and Fluorescence Detection Using Reduced Amount of Reagent	12
Characterization of Al and Ni-P Films as Hardmasks for the ICP-RIE Plasma Etching Bosch Process	12
Wafer-Level Fabrication of FAIMS Chips Based on TGV Technology	12
Low-Energy Consumption Actuation for Microelectrothermal Actuators via Capacitive Discharge Excitation	12
Critical Issues in MEMS Property Measurement and Variation Measured by Nanoindentation: Error Sources and Uncertainty	12
Journal of Microelectromechanical Systems	12
MEMS Air-Damped Isolator for Dual-Axis Micromirrors: Broad-Range Frequency Vibration Isolation	12
A Rapid Circuit Phase Error Identification and Compensation Method for MEMS QMG Achieving 99.7% Reduction in ZRO Drift	12
Journal of Microelectromechanical Systems	12
A Weakly Coupled Tuning Fork MEMS Electric Field Sensor With High Resolution and Wide Measurement Range	11
Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer	11
Journal of Microelectromechanical Systems	11
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions	11
Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers	11
Design of Spurious-Free Surface Acoustic Wave Resonators on LNOI Platform Using Machine Learning	11
Design and Fabrication Method of a Large-Size Electromagnetic MEMS Two-Dimensional Scanning Micromirror	11
Fabrication of 32×32 2 D CMUT Arrays on a Borosilicate Glass Substrate With Silicon- Through-Wafer Interconnects Using Non- Aligned and Aligned Anodic Bonding	10
Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping	10
Response Speed Characterization of a Thermally Actuated Programmable Metamaterial	10
Front Cover	10
Crosstalk Analysis to GHz Bulk-Acoustic-Wave Array for Addressable Micro/Nanoscale Particle Trapping	10
The Influences of Non-Volatile Surface Compound Layer on the Dry Etching of Borosilicate Glass	10
A Silicon Migration Model Incorporating Anisotropic Surface Energy and Non-Uniform Diffusivity	10
Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation	10
Piezoelectric Deactuation-Based Bi-Stable MEMS Switch: MEM-Z NVM	10
Table of Contents	10
Turnover Temperature Point Adjustment in Mechanically Coupled Single-Crystal Silicon MEMS Resonators	10
Phononic Integrated Circuit Component Design and Analysis for Surface Acoustic Waves in ScAlN on Silicon Carbide	9

Electronic Stethoscope Based on Triangular Cantilever Piezoelectric Bimorph MEMS Transducers	9
Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film	9
Toward 120 dB CMOS-MEMS Arrayed Accelerometers Measuring Through kg Shock Events	9
A Review on MEMS Silicon Resonant Accelerometers	9
Real-Time Phase Compensation for Scale Factor Nonlinearity Improvement Over Temperature Variations for MEMS Gyroscope	9
Nonlinearity Reduction in Three-End Serpentine Torsion Bar of MEMS Mirror	9
Glass-Based Micro-Hotplate With Low Power Consumption and TGV Structure Through Anodic Bonding and Glass Thermal Reflow	9
A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion	9
Activation Model of Nano Getter for MEMS Devices Based on Sandwich Structures of Au-Porous Ti-Dense Ti Film	8
Table of Contents	8
Member ad suite	8
Whisker Sensor With Extended Measurement Range Through Jamming Effects Using 3D-Printed Tetrapod Particles	8
TechRxiv: Share Your Preprint Research with the World!	8
Compact, High-Performance Positive Magnetophoresis Chip With Integrated Patterned Magnet for Efficient Particle Trapping	8
Near-Spurious-Free 6.5 GHz XBARs With Dimension-Matched and Response-Averaged Electrodes	8
IEEE Access	8
Electrowetting Ionic Liquid Flow Controller	8
Front Cover	8
Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism	7
Breakdown and Healing of Tungsten-Oxide Films on Microelectromechanical Relay Contacts	7
Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction	7
Phononic Frequency Combs in Atomically Thin Nanoelectromechanical Resonators Via 1:1 and 2:1 Internal Resonances	7
A Silicon MEMS Quatrefoil Suspension Gyroscope	7
TechRxiv: Share Your Preprint Research with the World!	7
Spurious Mode Suppression in LiNbO₃ A1 Resonators and Filters Beyond 6 GHz With Through-Holes	7
Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography	7
Temporal Dynamics of GHz Acoustic Waves in Chipscale Phononic Integrated Circuits	7
High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance	7
Bistability in Coupled Opto-Thermal Micro-Oscillators	7
Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications	7
C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz	6
Q-Factor Enhancement of Micro Hemispherical Resonators via Optimization of Film Distribution	6
Synchronized Opto-Electro-Mechanical Measurements for Estimation of Energy Dissipation in Thin-Film-Piezoelectricon-Substrate MEMS/NEMS Devices	6
TechRxiv: Share Your Preprint Research with the World!	6
Continuous and Non-Invasive Monitoring of Blood Pressure Based on Wearable Piezoelectric Micromachined Ultrasonic Transducers Array	6
High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror	6
Table of Contents	6
Frequency Split Tuning by Joule Heating in Fused Silica Inductive Vibrating Ring Gyroscopes	6
Front Cover	6
Transducers 2025	6
Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory	6
An Air-Coupled Electrostatic Ultrasound Transducer Using a MEMS Microphone Architecture	6
High-Temperature Acoustic and Electric Characterization of Ferroelectric Al₀.₇Sc₀.₃N Films	6
Disposable Piezoresistive MEMS Airflow Sensor for Chronic Respiratory Disease Detection	6
Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching	5
A Tunable Two-Stage Bandpass Filter Incorporating Two Electromagnetically Coupled Curved Beams	5
A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles	5
Front Cover	5
Lock-In Amplified Fluorescence Spectroscopy in a Digital Microfluidic Configuration for Antibiotic Detection of Ciprofloxacin in Milk	5
Prestressing-Based Thermal Budget Study of MEMS Cantilever and Its Application in Package Processes	5
Coupled Thin Film Hydrogenated Amorphous Silicon Microresonator Arrays	5
Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators	5
Highly Selective Etching of Silicon Dioxide Over Aluminum Using Mixtures of Sulfuric Acid and Hydrofluoric Acid	5
37th Annual IEEE Conference on Micro Electro Mechanical Systems	5
A Monolithic Forward-View Optical Scanner by a Pair of Upright MEMS Mirrors on a SiOB for LiDAR Applications	5
Phase-Flip Lattice Bulk Acoustic Wave Filter With Unbalanced Terminals Using Hybrid Heterogeneous Integration Technology	5
Exploring Ru Compatibility With Al-Ge Eutectic Wafer Bonding	5
Passive Vibration Control and Tunable Damping of MEMS Resonators via Electrical Autoparametric Resonance	5
Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors	5
Table of Contents	5
Accurate Identification of the Evolution of MEMS Resonant Accelerometer Residual Stresses at the Wafer-Die-Chip Level	5
Synchronization in Pairs of Opto-Thermally Driven Mechanically Coupled Micro-Oscillators	5
Sensing Voltage at Electrically Floating Nodes: A Path Toward Enhancing Performance and Robustness in Capacitive MEMS Resonators	5
A 3 Degrees-of-Freedom Electrothermal Micro-Positioner for Optical Chip-to-Chip Alignment	5
2024 Index Journal of Microelectromechanical Systems Vol. 33	5
High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays	5
Front Cover	5
Fabrication of a Novel GaAs Thermopile Sensor for RF Amplitude Demodulation	4
Rapid Prototyping of Tape-Based Microfluidic Chips With Versatile On-Chip Fluidic Functions	4
Electrofusion Device With High-Aspect-Ratio Electrodes for the Controlled Fusion of Lipid Vesicles	4
An In-Situ Self-Test Method for Measuring Absorptivity of Film-Type Uncooled Infrared Detectors	4
Multiphase Bipolar Electret Rotary Generator for Energy Harvesting and Rotation Monitoring	4
Journal of Microelectromechanical Systems Publication Information	4
Characterization of a Wafer-Level Packaged Au−Ru/AlCu Contact for Micro-Switches	4
Design, Modeling and Characterization of High-Performance Bulk-Mode Piezoelectric MEMS Resonators	4
Member ad suite	4
2023 Reviewers List	4
MEMS-Oriented Single-Crystalline-Silicon Through-Silicon-Via Based on Filling and Oxidation of Silicon Powders	4
Roll to Roll Imprinting PDMS Microstructures Under Reduced Ambient Pressures	4
Introducing IEEE Collabratec	4

Direct Phase Measurement and Compensation to Enhance MEMS Gyroscopes ZRO Stability	4
Nonlinear Dynamics of Large-Angle Circular Scanning With an Aluminum Nitride Micro-Mirror	4
Passive and Wireless Anemometer Based on Inductor Bending Effect	4
Table of Contents	4
Simulation and Experiments on a Valveless Micropump With Fluidic Diodes Based on Topology Optimization	4
TechRxiv: Share Your Preprint Research With the World!	4
Journal of Microelectromechanical Systems	4
Front cover	4
Widely-Tunable MEMS Phononic Frequency Combs by Multistage Bifurcations Under a Single-Tone Excitation	4
Heat-Depolymerizable Tethers for Microelectromechanical System Assembly	4
A Novel All-Fused Silica MEMS Gyroscope With an Aspect Ratio Exceeding 50:1	4
Elimination of Temperature Drift for MEMS Thermal Wind Sensor With On-Chip Surrounding Thermistor	4
Introducing IEEE Collabratec	4
Transmission Target for a MEMS X-Ray Source	4
Table of Contents	4
A 27-nW Wake-Up Receiver With a Quartz Transformer Matching Network Achieving −71.9-dBm Sensitivity and −46-dB SIR at 0.8% Offset	4
Ejected Droplet-Directed Transportation and Self-Alignment of Microfibers to Micro Trenches	4
Journal of Microelectromechanical Systems Publication Information	4
Front Cover	4
Fabrication of Capacitive Micromachined Ultrasonic Transducers With High-k Insulation Layer Using Silicon Fusion Bonding	4
Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges	3
Experimental Study of Electrical Breakdown in MEMS/NEMS Devices With Deep Submicron Gaps	3
A “Smart” Gas Sensing System Composed of Micro-Hotplates and Artificial Neural Network	3
Phase Noise Optimization of MEMS Resonant Accelerometer Based on AC Polarization	3
MEMS-Scale Angular Position Sensor Based on Ultracapacitor Technology	3
Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW	3
JMEMS Letters Fabrication of Self-Sealed Circular Microfluidic Channels in Glass by Thermal Blowing Method	3
Folded MEMS Platform Based on Polymeric Flexible Hinges for 3D Integration of Spatially-Distributed Sensors	3
Table of Contents	3
Front Cover	3
Continuous Mode-Reversal FM Accelerometer With 60-g FSR, 10-μg/K Drift, and VRE Rejection	3
Defect Excitation and Failure Analysis of MEMS Gas Sensors Based on FTA and RET Methods	3
Analysis and Compensation of Bias Drift of Force-to-Rebalanced Micro-Hemispherical Resonator Gyroscope Caused by Assembly Eccentricity Error	3
Characterization and Compensation of Detection Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope	3
Investigation of Thermal Creep in Metal-Based MEMS Cantilevers	3
TechRxiv: Share Your Preprint Research with the World!	3
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride	3
Journal of Microelectromechanical Systems Publication Information	3
500-750 GHz Contactless Rotating MEMS Single-Pole Double-Throw Waveguide Switch	3
Resource Allocation in Vibration Energy Harvesters	3
Aluminum Nitride 4-Beam Piezoelectric Nanoscale Ultrasound Transducer (pNUT)	3
Journal of Microelectromechanical Systems Publication Information	3
Member ad suite	3
Reduction of Motional Resistance Using Piezoelectric on Silicon MEMS Disk Arrays for Ambient Air Applications	3
Table of Contents	3
Nonlinear Micro-Resonator-Based Comparator With Linear Hysteresis Tuning	3
TechRxiv: Share Your Preprint Research with the World!	3
Soft Contact Lens With Embedded Moiré Patterns-Based Intraocular Pressure Sensors	3
Thermal Flow Sensor With a Bidirectional Thermal Reference	3
Chipping Energy Threshold in MEMS Sensors	3
A Mechanically Coupled Piezoelectric MEMS Filter With Tiny Percent Bandwidth and Low Insertion Loss	3
Optimization of Anchor Placement in TPoS MEMS Resonators: Modeling and Experimental Validation	3
Lateral Glow Discharge Ion Source for the Integrated MEMS Quadrupole Mass Spectrometer	3
Introducing IEEE Collabratec	3
Table of Contents	3
2022 Index IEEE Journal of Microelectromechanical Systems Vol. 31	3
Member ad suite	3
Design, Fabrication, and Characterization of High-Stiffness Suspended Microcalorimeters With Nanowatt Power Resolution	3
K-Band LiNbO₃ A3 Lamb-Wave Resonators With Through-Holes	2
Three-Axis Capacitive Sensor Arrays for Local and Global Shear Force Detection	2
Member ad suite	2
An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer	2
Tiny-Gap Titanium-Nitride-Composite MEMS Resonator Designs With High Power Handling Capability	2
Fabrication of LCE Microactuator Arrays Through Soft Lithography With Surface Alignment	2
Feedthrough Engineering to Enable Resonant Sensors Working in Conductive Medium for Bio Applications	2
Journal of Microelectromechanical Systems	2
On the Design of Low Voltage One-Dimensional Piezoelectric MEMS Scanning Micromirror	2
Root-Causes of Bias Instability Noise in Mode-Split MEMS Gyroscopes	2
Shock Destructive Reliability Analysis of Electromagnetic MEMS Micromirror for Automotive LiDAR	2
Three-Degree-of-Freedom Electromagnetic Microactuator With Powder-Based Sm-Fe-N Magnets and Parylene Beams	2
Aluminum Nitride Based Film Bulk Acoustic Resonator With Anchor Column Structure	2
2023 Index Journal of Microelectromechanical Systems Vol. 31	2
High-Performance, Low-Cost On-Chip Fabry-Perot Interferometer With Microfluidic Channel Using Single Anisotropic Wet Etching	2
Front Cover	2
Frequency Split Modulation in Micro Hemispherical Resonator Based on Rim Width	2
Deep Wet Etching of a Z-Cut α-Quartz Wafer by Fluorine-Based Solutions: Experiment, Mechanism, and Application	2
Thermomechanical Modeling and Optimization of Zero-Power Micromechanical Photoswitch	2
Table of Contents	2
Characterization of a Wake-Up Nano-Gap Gas Sensor for Ultra Low Power Operation	2
Evaluation of Polymer Materials for MEMS Microphones	2
Modeling and Characterization of Pulse-Width Modulation Driving of Electrostatic Actuators With Polar Dielectrics	2
Experimental and Modeling Based Investigations of Process Parameters on a Novel, 3D Printed and Self-Insulated 24-Well, High-Throughput 3D Microelectrode Array Device for Biological Applications	2
Sub-Deg-per-Hour Edge-Anchored Bulk Acoustic Wave Micromachined Disk Gyroscope	2
Journal of Microelectromechanical Systems	2
SAW Filters With Excellent Temperature Stability and High Power Handling Using LiTaO₃/SiC Bonded Wafers	2
Front Cover	2
Serial and Parallel Connections of Micromechanical Resonators for Sensing: Theories and Applications	2
Suspended Silicon Nitride Platforms for Thermal Sensing Applications in the Limit of Minimized Membrane Thickness	2
Polycrystalline LPCVD 3C-SiC Thin Films on SiO₂ Using Alternating Supply Deposition	2
Self-Actuating Isothermal Nanomechanical Test Platform for Tensile Creep Measurement of Freestanding Thin Films	2
A Compact Reconfigurable Resonator-Based Direct Current Sensing System	2
A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor	2
TechRxiv: Share Your Preprint Research with the World!	2
Table of Contents	1
Journal of Microelectromechanical Systems	1