Journal of Microelectromechanical Systems

Papers
(The H4-Index of Journal of Microelectromechanical Systems is 19. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2020-11-01 to 2024-11-01.)
ArticleCitations
CMOS-Integrated Aluminum Nitride MEMS: A Review59
Airborne Piezoelectric Micromachined Ultrasonic Transducers for Long-Range Detection49
Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators43
1.3 mm2 Nav-Grade NEMS-Based Gyroscope40
X-Cut Lithium Niobate-Based Shear Horizontal Resonators for Radio Frequency Applications37
Nonlinear Response of PZT-Actuated Resonant Micromirrors28
Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters24
Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single Resonator24
Acoustic Loss in Thin-Film Lithium Niobate: An Experimental Study24
Monolithic Multiband MEMS RF Front-End Module for 5G Mobile23
High Quality Co-Sputtering AlScN Thin Films for Piezoelectric Lamb-Wave Resonators22
Bimorph Pinned Piezoelectric Micromachined Ultrasonic Transducers for Space Imaging Applications22
A MEMS Resonant Accelerometer With High Relative Sensitivity Based on Sensing Scheme of Electrostatically Induced Stiffness Perturbation21
Characterization and Compensation of Detection Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope21
Controlling Residual Stress and Suppression of Anomalous Grains in Aluminum Scandium Nitride Films Grown Directly on Silicon20
Long-Term Characterization of a New Wide-Angle Micromirror With PZT Actuation and PZR Sensing20
Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch19
A PMUT Integrated Microfluidic System for Fluid Density Sensing19
Tunable Terahertz Free Spectra Range Using Electric Split-Ring Metamaterial19
Quantification of Energy Dissipation Mechanisms in Toroidal Ring Gyroscope19
Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism19
A Novel Low-g MEMS Bistable Inertial Switch With Self-Locking and Reverse-Unlocking Functions19
Non-Contact Ultrasonic Flow Measurement for Small Pipes Based on AlN Piezoelectric Micromachined Ultrasonic Transducer Arrays19
0.6343400478363