Journal of Microelectromechanical Systems

Papers
(The H4-Index of Journal of Microelectromechanical Systems is 19. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-02-01 to 2025-02-01.)
ArticleCitations
JMEMS Letters Fabrication of Self-Sealed Circular Microfluidic Channels in Glass by Thermal Blowing Method68
Tunable Terahertz Free Spectra Range Using Electric Split-Ring Metamaterial49
Activation Model of Nano Getter for MEMS Devices Based on Sandwich Structures of Au-Porous Ti-Dense Ti Film46
Front Cover40
Non-Contact Ultrasonic Flow Measurement for Small Pipes Based on AlN Piezoelectric Micromachined Ultrasonic Transducer Arrays24
Journal of Microelectromechanical Systems Publication Information24
J. J. Ebers Award24
Multilayer Masking Technology for Fabricating Airborne CMUTs With Multi-Depth Fluidic Trenches23
Fabrication of 32 × 32 2D Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays on a Borosilicate Glass Substrate With Silicon-Through-Wafer Interconnects Using Sacrificial Release Process22
A Biaxially Stretchable and Washable LED Display Enabled by a Wavy-Structured Metal Grid22
Front Cover21
Manipulating Etch Selectivities in XeF₂ Vapour Etching21
Journal of Microelectromechanical Systems20
Lab-on-PCB With Pre-Stored Reagents at Low Temperature and Automatic Microfluidic Handling20
A Silicon MEMS Quatrefoil Suspension Gyroscope19
Quad Mass Resonator With Frequency Mismatch of 3 ppm Trimmed by Focused Ion Beam19
Phononic Frequency Combs in Atomically Thin Nanoelectromechanical Resonators Via 1:1 and 2:1 Internal Resonances19
A 100 nm Thick, 32 kHz X-Cut Lithium Niobate Piezoelectric Nanoscale Ultrasound Transducer for Airborne Ultrasound Communication19
Modeling and Analysis of a MEMS Vibrating Ring Gyroscope Subject to Imperfections19
Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation19
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