Journal of Micromechanics and Microengineering

Papers
(The TQCC of Journal of Micromechanics and Microengineering is 5. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-05-01 to 2025-05-01.)
ArticleCitations
A comprehensive review on non-active micro-pumps for microfluidic platforms80
Regulating the electrical performance of contact-separation mode triboelectric nanogenerators based on double-sided groove textures72
Miniature and tunable high voltage-driven soft electroactive biconvex lenses for optical visual identification68
A long-stroke planar linear actuator equipped with magnetic guide68
Fabrication of an X-shaped micro-copper structure containing a merging joint based on localized electrochemical deposition48
An SOI-based post-fabrication process for compliant MEMS devices37
Design and fabrication of a low-cost microfluidic cartridge with integrated pressure-driven check valve for molecular diagnostics platforms34
PDMS-polyimide transcutaneous blood gas collector with self-folding out-of-plane heater elements29
Performance evaluation of a 3D split-and-recombination micromixer with asymmetric structures28
RF MEMS capacitive shunt switch for low loss applications28
On the PZT/Si unimorph cantilever design for the signal-to-noise ratio enhancement of piezoelectric MEMS microphone26
Conventional surface micromachining process for the fabrication of a linear optical phased array based on piston micromirrors24
The radial point interpolation method (RPIM) for analyzing a V-shaped electrothermal actuator22
Passive communication for low power distributed sensors using MEMS optical cavities22
Magnetically maneuverable micromixer using acoustically excited bubbles20
Recent advances in power supply strategies for untethered neural implants19
Bistable liquid shutter operated by DEW actuation for multifunctional miniature cameras19
Measurement and control of stiction force in in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts19
Wearable microfluidic sweat collection platform with a calorimetric flow rate sensor for realtime and long-term sweat rate measurements18
High density cleanroom-free microneedle arrays for pain-free drug delivery17
Micromechanics for energy generation16
A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design16
A high-sensitivity MEMS fluxgate sensor with double-layer induction coils fabricated by micro-casting16
Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics16
Fractional order zero phase error tracking control of a novel decoupled 2-DOF compliant micro-positioning stage16
Graphene resonant pressure sensor with ultrahigh responsivity-range product16
Development of microneedle based blood extraction device16
PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation15
Fabrication of grooved LGS resonators based high temperature SAW sensors and analysis with FEM simulation14
Distance sensor with a tunable aperture actuated by thermal expansion of silicon chevron beams14
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization13
A preparation technology of micro-structure glass based on mixed micro and nano powders13
Manufacturing and assembly of an all-glass OCT microendoscope13
Electric field sensing characteristics of ZnO/SiO2/Si surface acoustic wave devices13
Experimental study on acoustic-induced microbubbles fusion13
Bioinspired drag reduction surfaces via triple lithography method based on three-layer hybrid masks12
Etch the borosilicate glass to form a straight through-glass-via based on the FLACE technology12
Sub-miniature rolling thrust micro-bearing11
Producing micro impressions on Al6061 under alumina-mixed deionized water as dielectric during electric discharge machining11
The effect of quaternary ammonium salts with different chain lengths on copper filling behavior in blind holes of printed circuit board11
Near thermal-electric field controlled electrohydrodynamic 3D printing of high aspect ratio microstructures11
Micromachined threshold inertial switches: a review11
Numerical simulation of a nebulizer with multiple orifices11
Shape deviations of DLW microstructures in dependency of fabrication parameters11
A quantitative study of the dynamic response of compliant microfluidic chips in a microfluidics context11
RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook11
Edge smoothness enhancement of digital lithography based on the DMDs collaborative modulation11
Comparative analysis and tests for an improved frequency tuning area-varying electrode considering the influence of fringe capacitance10
Research on acoustic sensing device based on microfiber knot resonator10
High throughput microfluidic drug screening system for corneal epithelial wound healing10
Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors10
Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures10
Three-dimensional AC electroosmotic micropump with high power density10
Effects of rolled fibrous microstructure on fatigue properties of extruded Cu-5Al planar micro springs10
Reflective x-ray masks for x-ray lithography10
Corrigendum: Fabrication of FP-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process (2019 J. Micromech. Microeng. 29 025008)10
Flexible pressure/temperature sensors with heterogeneous integration of ultra-thin silicon and polymer9
The multimodal motion along a solid–liquid interface of a soft microrobot driven by compound magnetic fields9
Hermetic chip-scale packaging using Au:Sn eutectic bonding for implantable devices9
Fast analysis of MEMS micromirror based on multi-physical electro-mechanical-damping coupling method9
A review of research on RF MEMS for metaverse interactions9
Noninvasive measurement of temperature for simulated tissue based on piezoelectric micromachined ultrasonic transducers9
Quadrant kirigami-type electrothermal MEMS actuator with multi-degree-of-freedom morphing capability9
Study of super flexible mixed phase piezoresistive pressure sensor9
Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer9
In-situ measurement of anisotropic Young’s modulus in fused deposition modeling printed cantilevers9
Direct current triboelectric nanogenerators: a review9
A rapid method for fabricating and replicating microlens array structures9
Temperature and pressure effects on microchannels dimensions in hot embossing9
Highly responsive screen-printed asymmetric pressure sensor based on laser-induced graphene9
Evaluation of Bosch processing and C4F8 plasma deposition at cryogenic temperatures8
Carbon dioxide reduction utilizing a bismuth halide perovskite as immobilized photocatalyst in a 3D printed microreactor8
A highly accurate analytical method for determination of the vibrational frequency of N/MEMS with electrostatic and van der Waals interaction forces8
Fabrication of high-aspect-ratio polydimethylsiloxane microstructures by reducing the interfacial adhesion in soft lithography8
Nonlinear design, analysis, and testing of a single-stage compliant orthogonal displacement amplifier with a single input force for microgrippers8
Non-faradaic electrochemical impedance spectroscopy analysis of C-MEMS derived bio-modified glassy carbon electrode8
Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer8
Knudsen force based double beam MEMS vacuum pressure sensor8
Design, development, and testing of active valve piezo-hydraulic pump8
Flexible flow sensors-enabled intelligent life8
Unsealed piezoelectric MEMS speaker with rigid-flexible composite membrane8
Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application8
Performance of aluminum nitride-based piezoelectric micromachined ultrasonic transducers under different readout configurations8
Efficient annular aperture array (AAA) filter for thermophotovoltaic by sidewall lithography8
A penetration efficiency model for the optimization of solid conical microneedles’ geometry8
Fabrication and characterization of annular-shaped piezoelectric micromachined ultrasonic transducer mounted with Pb(Zr,Ti)O3-based monocrystalline thin film8
Performance analysis of synthetic jet micropump based on double piezoelectric actuators8
Semi-reflective visor-based compact head-worn light field display8
A novel approach to determining the hydrodynamic resistance of droplets in microchannels using active control and grey-box system identification8
Micromachining of nickel and nickel-based alloy surfaces using composite signal7
RF MEMS electrostatically actuated tunable capacitors and their applications: a review7
Micromechanical piezoelectric micromachined ultrasonic transducer array package enhancement with integrated frontliners7
Review of scaling effects on physical properties and practicalities of cantilever sensors7
Nanofluidic gas/liquid switching utilizing a nanochannel open/close valve based on glass deformation7
Diversified plasmonic metallic nanostructures with high aspect ratio based on templated electrochemical deposition7
Microfluidic multicolor display by juxtapositional color mixing with a pattern of primary color pixels7
Phase noise modelling of MEMS resonant accelerometer with non-AGC-driven circuit7
Highly sensitive flexible capacitive pressure sensor with structured elastomeric dielectric layers7
Dynamic behaviours of double-ended tuning fork based comb-driven microelectromechanical resonators for modulating magnetic flux synchronously7
Development of piezoresistive flexible sensor with dual-height cylindrical microstructure surfaces to achieve vehicle vibration monitoring7
Manufacturing of hydraulically steerable actuator using closed molding and core template for vascular intervention guidewires7
Precise in-situ fabrication of perovskite single crystal arrays via cosolvent based electrohydrodynamic printing7
Design optimization and experimental verification of ultrasonic stack for micro hot embossing of polymers7
Efficient strategy for frequency design and bandwidth extension of curved piezoelectric ultrasonic micromachined transducers7
Thermal and hydraulic performance of Al alloy-based 3D printed triangular microchannel heatsink governed by rough walls with graphene and alumina nanofluids as working liquid7
Mixed particles separation based on a cylindrical microfluidic centrifuge7
Investigating capacitive flexible tactile sensor with a wide measuring range using PVDF and conductive sponge7
Hierarchical integration of nanopillars and nanochannels in a nanofluidic device for single-nanoparticle detection7
Influence of process parameters on the characteristics of electrohydrodynamic-printed UV-curing conductive lines on the fabric7
Formation of silver wires embedded in hydrogels using femtosecond laser ablation and electroplating for strain sensing7
Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application7
Damping of 3D-printed polymer microbeam resonators6
Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation6
Ultra-low power signal conditioning system for effective biopotential signal recording6
Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001)6
Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system6
A multi-scale E-jet 3D printing regulated by structured multi-physics field6
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection6
Effect of SiO2 protective layer on LiNbO3 structured SAW resonators and temperature characteristics study6
Surface micromachining of chip-edge silicon microcantilevers using xenon difluoride etching of silicon-on-insulator6
A Si-based suspended tunnel structure with trapezoidal section by two-step etching6
Studies on drug delivery from dissolving microneedle and its uptake in tissue6
A review of geometric and structural design for reliable flexible electronics6
Micro/nano-transfer printing of gold thin films via atomic diffusion bonding: effects of air-exposure time and stamp modulus6
A simple way to predict the flip–chip gap6
A compact and reconfigurable C-band DGS-based power divider using RF MEMS capacitive switch6
The effect of DRIE notching on field emission enhanced breakdown in SOI based MEMS electrodes6
PDMS micro check valve with 3D valve disk for reducing fluid resistance6
Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout6
An analytical model of three-hot-wire acoustic particle velocity sensors6
Displacement-controlled coining of large arrays of gold stud bumps6
Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding6
Advances in micro lithium-ion batteries for on-chip and wearable applications6
Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application6
Electrohydrodynamic jet printed templates for hot embossing of microfluidic devices6
A novel electromagnetic microactuator with a stainless steel mas-spring structure6
Fabrication and characterization of suspended La0.7Sr0.3MnO3 nanofibers for high-sensitive and fast-responsive infrared bolometer6
Wafer level hermetic bonding and packaging using recrystallized parylene6
Splashing of droplet under the vibration effect of flexible membrane6
Micromachining of polymers using atmospheric pressure inductively coupled helium plasma localized by a scanning nanopipette probe microscope6
A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance6
Large area nanoscale patterning of functional materials using organosilicate ink based nanotransfer printing5
Motion of generated dumbbell-shaped satellite droplets during liquid dielectrophoresis5
Ultra-high precision passive particle sorting chip coupling inertial microfluidics and single row micropillar arrays5
Fused silica microchannel fabrication with smooth surface and high etching selectivity5
Fabrication of micro-ultrasonic phased array electrode via electric field-driven printing method5
Sub-10 nm metal nanogaps with high SERS performance via a novel conformal coating process5
A microchannel device for root hair isolation and behavior analysis5
Accurate holographic cytometry using three-dimensional hydrodynamic focusing5
Self-calibration of micro-components based on manipulator guidance5
RF MEMS filter based on dual liquid variations5
High-performance transparent heater with Ag paste-based nanomesh electrodes5
Improvement on the uniformity of deep reactive ion etch for electrically isolated silicon-based substrates5
Large stroke electromagnetic redundant actuated six degrees-of-freedom parallel compliant micropositioning stage5
Nanosecond pulsed laser transmission welding of cyclic olefin copolymer5
A 3D-printed spiral actuator for focus adjustment in circumferential scanning endomicroscopy5
Laser drilling of stainless steel foil with reduced sidelobe ablation using a spatially filtered Bessel–Gauss beam5
Design and fabrication of lithium niobate asymmetrical mode resonators toward C-band and Ku-band5
Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study5
Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation5
Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure5
A low-cost 3D-printing based rapid fabrication procedure for modular microfluidic platform5
Nanoscale directional etching features and mechanism of HF/HNO3etchant5
Micromachined piezoelectric Lamb wave resonators: a review5
A numerical modeling approach to estimate the piezoresistance of diffused resistors with experimental validation5
Integrated cooling system for microfluidic PDMS devices used in biological microscopy studies5
Experimental and simulation investigation for imprinting and buckling of V-groove/wrinkles hierarchical array5
Fabrication of microneedles using wire electric discharge machining and improving surface quality by electrochemical polishing5
Heterogeneous micro-architectonic integration of SU-8 and highly entangled polyacrylamide hydrogel to realize cut-resistant soft superhydrophobic surfaces5
Design, analysis, and experimental performance of a novel micro-nozzle based liquid metal direct writing system5
0.07440710067749