Journal of Micromechanics and Microengineering

(The TQCC of Journal of Micromechanics and Microengineering is 5. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2020-07-01 to 2024-07-01.)
Silicon electro-optic micro-modulator fabricated in standard CMOS technology as components for all silicon monolithic integrated optoelectronic systems *331
RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook61
Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era55
Technology evolution from micro-scale energy harvesters to nanogenerators54
Silicon MEMS inertial sensors evolution over a quarter century49
Advances in precision micro/nano-electroforming: a state-of-the-art review42
Development of in vitro 2D and 3D microelectrode arrays and their role in advancing biomedical research39
Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators37
Terahertz MEMS metadevices35
Fabrication and characterization of a fully conventionally machined, high-performance porous-media electrospray thruster34
Real-time physiological sensor-based liver-on-chip device for monitoring drug toxicity30
Development of high-sensitivity piezoresistive pressure sensors for −0.5…+0.5 kPa27
CMOS-MEMS technologies for the applications of environment sensors and environment sensing hubs24
Recent advances on fabrication of microneedles on the flexible substrate23
Ultra-low power signal conditioning system for effective biopotential signal recording23
A review of MEMS-based metal oxide semiconductors gas sensor in Mainland China22
Monitoring of physiological sounds with wearable device based on piezoelectric MEMS acoustic sensor21
Integrated 3D printed microfluidic circuitry and soft microrobotic actuators via in situ direct laser writing19
RF MEMS electrostatically actuated tunable capacitors and their applications: a review19
Induced-charge electrokinetics in microfluidics: a review on recent advancements18
Highly responsive screen-printed asymmetric pressure sensor based on laser-induced graphene17
Advances in micro lithium-ion batteries for on-chip and wearable applications17
An ultrasonic flowmeter for liquid flow measurement in small pipes using AlN piezoelectric micromachined ultrasonic transducer arrays17
High-sensitivity liquid-metal-based contact lens sensor for continuous intraocular pressure monitoring17
Numerical simulations of 22% efficient all-perovskite tandem solar cell utilizing lead-free and low lead content halide perovskites17
Evaluation of the impact of abnormal grains on the performance of Sc0.15Al0.85N-based BAW resonators and filters17
A high-stability triboelectric nanogenerator with mechanical transmission module and efficient power management system16
The impact of laser energy on the photoresponsive characteristics of CdO/Si visible light photodetector15
A stiffness-tunable MEMS accelerometer15
Modeling and fabrication of electrostatically actuated diaphragms for on-chip valving of MEMS-compatible microfluidic systems13
Sensing performance of room temperature operated MEMS gas sensor for ppb level detection of hydrogen sulfide: a review13
Power enhancement of MEMS vibrational electrostatic energy harvester by stray capacitance reduction13
Programmable droplet actuating platform using liquid dielectrophoresis13
Design and investigation of dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal pocket TFET device as a label-free biosensor13
An Integrative 3D printing method for rapid additive manufacturing of a capacitive force sensor12
Oscillation FPCB micromirror based triangulation laser rangefinder12
Flexible ZnO thin film acoustic wave device for gas flow rate measurement12
Non-intrusive DC voltage measurement based on resonant electric field microsensors12
Development of MEMS composite sensor with temperature compensation for tire pressure monitoring system12
Three-dimensional Fabry–Pérot cavities sculpted on fiber tips using a multiphoton polymerization process12
A reconfigurable and portable acoustofluidic system based on flexible printed circuit board for the manipulation of microspheres12
Piezoelectric approaches for wearable continuous blood pressure monitoring: a review12
Ultrafast laser in fabrication of micro hemispherical resonators with quality factor over millions12
Microfluidic chip fabrication and performance analysis of 3D printed material for use in microfluidic nucleic acid amplification applications11
Direct current triboelectric nanogenerators: a review11
Extracting white blood cells from blood on microfluidics platform: a review of isolation techniques and working mechanisms11
A dielectrophoresis-based microfluidic chip for trapping circulating tumor cells using a porous membrane11
Fabrication and characterization of micro electromagnetic linear actuators11
Development of 4D-printed shape memory polymer large-stroke XY micropositioning stages11
Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics11
From CAD to microfluidic chip within one day: rapid prototyping of lab-on-chip cartridges using generic polymer parts10
MEMS piezoelectric resonant microphone array for lung sound classification10
Vibration analysis of MEMS vibrating mesh atomizer10
A novel rare cell sorting microfluidic chip based on magnetic nanoparticle labels10
An implantable microelectrode array for chronic in vivo epiretinal stimulation of the rat retina10
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection10
A dual-frequency piezoelectric micromachined ultrasound transducer array with low inter-element coupling effects10
SAW-driven self-cleaning drop free glass for automotive sensors10
Imaging of simulated muscle based on single chip of AlN piezoelectric micromachined ultrasonic transducer10
High-accuracy differential resonant pressure sensor with linear fitting method9
A review of geometric and structural design for reliable flexible electronics9
Development of mechanically-robust piezoelectric micromachined ultrasonic transducer based on island-shaped monocrystalline PZT thin film partially covered with polyimide9
Application of the evolutionary kinetic Monte Carlo method for the simulation of anisotropic wet etching of sapphire9
Hybrid electrical and optical neural interfaces9
Bipolar resistive switching properties of TiO x /graphene oxide doped PVP based bilayer ReRAM8
Surface activation of poly(methyl methacrylate) for microfluidic device bonding through a H2O plasma treatment linked with a low-temperature annealing8
Curved passive mixing structures: a robust design to obtain efficient mixing and mass transfer in microfluidic channels8
An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators8
Investigations on piezo actuated micro XY stage for vibration-assisted micro milling8
A pulsed freestanding triboelectric nanogenerator and power management circuit to harvest rotation energy from an automobile brake8
Mode localized artificial hair sensor with enhanced linearity applied for dual-axis air flow sensing8
Micromachined threshold inertial switches: a review8
Development of a piezoelectric pump with unfixed valve8
Process and device simulations aimed at improving the emitter region performance of silicon PERC solar cells8
High-performance transparent electromagnetic interference shielding film based on metal meshes8
Enhancement of passive mixing via arc microchannel with sharp corner structure8
On-chip micro pressure sensor for microfluidic pressure monitoring8
On the PZT/Si unimorph cantilever design for the signal-to-noise ratio enhancement of piezoelectric MEMS microphone8
A novel piezoelectric RF-MEMS resonator with enhanced quality factor7
An efficient macro model for CMOS-MEMS thermal wind speed sensor7
An on-chip test structure to measure the Seebeck coefficient of thermopile sensors7
Micromechanical resonant cantilever sensors actuated by fringing electrostatic fields7
Low cost technology for the fabrication of anti-counterfeiting microtaggants7
Material strategies to enhance the performance of piezoelectric energy harvesters based on lead-free materials7
Underwater anechoic layer with parallel metallic plate insertions: theoretical modelling7
A dual-driven biomimetic microrobot based on optical and magnetic propulsion7
Micromechanics for energy generation7
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization7
Derivation of analytical expressions for the stress/strain distributions, bending plane and curvature radius in multilayer thin-film composites7
Design, modeling and experimental validation of a micro cantilever beam with an electro-controllable twisting ability7
Effects of both the drive- and sense-mode circuit phase delay on MEMS gyroscope performance and real-time suppression of the residual fluctuation phase error7
A perspective of active microfluidic platforms as an enabling tool for applications in other fields7
A resonant high-pressure sensor based on dual cavities7
Recent trends in structures and applications of valveless piezoelectric pump—a review7
Research on acoustic sensing device based on microfiber knot resonator7
Design and manufacture of a micro-tensile testing machine for in situ optical observation and DIC analysis: application to 3D-printed and compression-molded ABS7
Design and material for a patternable polysiloxane acrylate-based penetrating intracortical neural probe7
Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control7
A comprehensive review on non-active micro-pumps for microfluidic platforms7
Micro electric discharge machining (μ-EDM) of polymer nanocomposites modified by graphene nanoplatelets/carbon using rotating electrode tool7
Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding7
Temperature stable rare earth magnetic powder Sm-Fe-N based micro magnets with remanence enhanced by easy axis alignment and its application in MEMS actuator7
A microfluidic chip integrated with 3D sidewall electrodes and wavy microchannel for cell focusing and separation7
Micro-wrinkle strategy for stable soft neural interface with optimized electroplated PEDOT:PSS7
Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application6
Fused silica microchannel fabrication with smooth surface and high etching selectivity6
Integration of buried piezoresistive sensors and PZT thin film for dynamic and static position sensing of MEMS actuator6
Flexible pressure and temperature dual-modality sensor based on stretchable electrode for human–machine interaction6
Atmospheric micro-sized cold plasma jet created by a long and ultra-flexible generator with sputtered gold thin film electrode6
Micro/nanofiber fabrication technologies for wearable sensors: a review6
Solving curing-protocol-dependent shape errors in PDMS replication6
A programmable 3D printing method for magnetically driven micro soft robots based on surface tension6
Microfluidic biochip platform sensitized by AgNPs for SERS based rapid detection of uric acid6
Leak-free integrated microfluidic channel fabrication for surface plasmon resonance applications6
Acoustic wave amplification with thin film silicon bonded on lithium niobate6
Hermetic chip-scale packaging using Au:Sn eutectic bonding for implantable devices6
PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation6
Optimization of x-ray lithography conditions for fabrication of large arrays of high-aspect-ratio submicron pores6
Adhesion enhancement strategy for Parylene C substrate by nanograss technique6
Basic concepts of biological microparticles isolation by inertia spiral microchannels in simple terms: a review6
Self-supporting 3D printed flexible liquid metal electrodes for electrostatically microfluidic valves6
A piezoelectric micromachined ultrasonic transducer with mechanical grooves6
Removal of recast layer in the laser drilled film cooling holes by a two-step inner streaming electrochemical technique6
Decomposition of pattern distortions by the Spread polynomial model in roll-to-sheet reverse offset printing6
A cantilever-based resonator for reconfigurable nanomechanical computing6
Motion of generated dumbbell-shaped satellite droplets during liquid dielectrophoresis6
Electrofluidic displays based on inkjet printing and phase change filling6
Facile fabrication of sensitivity-tunable strain sensors based on laser-patterned micro-nano structures6
MEMS triaxial gyroscope using surface and sidewall doping piezoresistors6
Mechanical characteristics of laminated film vibrator using an ultra-thin MEMS actuator6
Geometry effects on flow characteristics of micro-scale planar nozzles6
Room temperature operated flexible La-ZnO/MWCNTs sensor for ppb level carbon monoxide detection5
MEMS device for applying shear and tension to an epithelium combined with fluorescent live cell imaging5
Feasibility study of a micro-electro-mechanical-systems threshold-pressure sensor based on parametric resonance: experimental and theoretical investigations5
Shoulder fillet effects in strength distributions of microelectromechanical system components5
A thermal microfluidic actuator based on a novel microheater5
A review of rarefied gas flow in irregular micro/nanochannels5
An ultrafast response and precisely controllable soft electromagnet actuator based on Ecoflex rubber film filled with neodymium-iron-boron5
Sub-micrometer plasma-enhanced chemical vapor deposition using an atmospheric pressure plasma jet localized by a nanopipette scanning probe microscope5
A review of assembly techniques for fabricating twisted bilayer graphene5
A predictive model for electrostatic energy harvesters with impact-based frequency up-conversion5
Stable 3D inertial focusing by high aspect ratio curved microfluidics5
The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification5
Unapodization: a method to produce laterally uniform surface acoustic waves for acoustofluidics5
Fabrication, modeling, and characterization of soft twisting electrothermal actuators with directly printed oblique heater5
Development of microfluidic cartridge for culture-free detection of Staphylococcus aureus in blood5
Development of MEMS-based piezoresistive 3D stress/strain sensor using strain technology and smart temperature compensation5
Active real-time electric field control of the e-jet in near-field electrospinning using an auxiliary electrode5
A flexible and highly sensitive capacitive pressure sensor with fast response based on a hierarchically micro-structured PDMS dielectric layer5
2D FPCB micromirror for scanning LIDAR5
A monolithic Si-micromachined four-stage Knudsen pump for µGC applications5
Silicon monolithic microflow sensors: a review5
The development of a pressure sensor using a technique for patterning silver nanowires on 3-dimensional curved PDMS membranes5
A wireless passive pressure sensor using microstructured ferromagnetic films with tunable effective permeability5
An ultra-thin transparent multi-functional sensor based on silk hydrogel for health monitoring5
Fluid control with hydrophobic pillars in paper-based microfluidics5
Fabrication of ultra-high-aspect-ratio nano-walls and nano-structures on silicon substrates5
Impact of support material deformation in MEMS bulk micromachined diaphragm pressure sensors5
Picoliter liquid handling at gas/liquid interface by surface and geometry control in a micro-nanofluidic device5
Volume-preserving strategies to improve the mixing efficiency of serpentine micromixers5
Shock-free ion transmission in a skimmer-based MEMS mass spectrometer vacuum interface5
Mechanical reliability of silicon microstructures5
Review of scaling effects on physical properties and practicalities of cantilever sensors5
Burr removal from high-aspect-ratio micro-pillars using ultrasonic-assisted abrasive micro-deburring5
Elastic-plastic properties of mesoscale electrodeposited LIGA nickel alloy films: microscopy and mechanics5
A multi-scale E-jet 3D printing regulated by structured multi-physics field5
A microfluidic platform enabling real-time control of dynamic biochemical stimuli to biological cells5
Fractional order zero phase error tracking control of a novel decoupled 2-DOF compliant micro-positioning stage5
Dynamic behaviours of double-ended tuning fork based comb-driven microelectromechanical resonators for modulating magnetic flux synchronously5
Recent advances in power supply strategies for untethered neural implants5
Optimization of the co-axial dispensing nozzle of a 3D bioprinter for the fabrication of tubular structures with micro-channel encapsulation5
Conventional surface micromachining process for the fabrication of a linear optical phased array based on piston micromirrors5
Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application5
Development of droplet microfluidics capable of quantitative estimation of single-cell multiplex proteins5
Experimental amplitude and frequency control of a self-excited microcantilever by linear and nonlinear feedback5
Electromicrofluidic device with integrated PDMS microchannel and laser-induced graphene electrodes for electrochemical detection of cardiac biomarker in a point-of-care platform5
Strain engineering of graphene nano-resonator5
Xurography as a tool for fabrication of microfluidic devices5
Rapid prototyping of noncontact microwave microfluidic devices for sensing applications5
High-throughput acoustofluidic microchannels for single cell rotation5