Journal of Micromechanics and Microengineering

Article	Citations
A long-stroke planar linear actuator equipped with magnetic guide	90
Miniature and tunable high voltage-driven soft electroactive biconvex lenses for optical visual identification	43
PDMS-polyimide transcutaneous blood gas collector with self-folding out-of-plane heater elements	34
Passive communication for low power distributed sensors using MEMS optical cavities	31
Magnetically maneuverable micromixer using acoustically excited bubbles	26
The radial point interpolation method (RPIM) for analyzing a V-shaped electrothermal actuator	26
Bistable liquid shutter operated by DEW actuation for multifunctional miniature cameras	25
Wearable microfluidic sweat collection platform with a calorimetric flow rate sensor for realtime and long-term sweat rate measurements	24
Regulating the electrical performance of contact-separation mode triboelectric nanogenerators based on double-sided groove textures	22
An SOI-based post-fabrication process for compliant MEMS devices	21
Performance evaluation of a 3D split-and-recombination micromixer with asymmetric structures	21
Enabling water-based EVA adhesives for solvent-free aerosol jet printing in microfabrication	20
Measurement and control of stiction force in in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts	20
Deep silicon etching technology and applications: a review	20
High density cleanroom-free microneedle arrays for pain-free drug delivery	19
RF MEMS capacitive shunt switch for low loss applications	19
Fabrication of an X-shaped micro-copper structure containing a merging joint based on localized electrochemical deposition	19
Shape deviations of DLW microstructures in dependency of fabrication parameters	18
Design and fabrication of a low-cost microfluidic cartridge with integrated pressure-driven check valve for molecular diagnostics platforms	18
Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics	18
Microfluidic cells for the 1–102 MPa pressure range	18
Development of microneedle based blood extraction device	17
A high-sensitivity MEMS fluxgate sensor with double-layer induction coils fabricated by micro-casting	17
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization	17
Near thermal-electric field controlled electrohydrodynamic 3D printing of high aspect ratio microstructures	16

PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation	16
A quantitative study of the dynamic response of compliant microfluidic chips in a microfluidics context	16
Experimental study on acoustic-induced microbubbles fusion	16
Fabrication of grooved LGS resonators based high temperature SAW sensors and analysis with FEM simulation	15
A preparation technology of micro-structure glass based on mixed micro and nano powders	15
Electric field sensing characteristics of ZnO/SiO2/Si surface acoustic wave devices	15
A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design	14
Manufacturing and assembly of an all-glass OCT microendoscope	14
Etch the borosilicate glass to form a straight through-glass-via based on the FLACE technology	14
Graphene resonant pressure sensor with ultrahigh responsivity-range product	14
Micromechanics for energy generation	14
Sub-miniature rolling thrust micro-bearing	14
Micromachined threshold inertial switches: a review	14
Bioinspired drag reduction surfaces via triple lithography method based on three-layer hybrid masks	14
Producing micro impressions on Al6061 under alumina-mixed deionized water as dielectric during electric discharge machining	13
Temperature and pressure effects on microchannels dimensions in hot embossing	13
Efficient heat dissipation with hybrid composite-based microfluidic heat sinks in flexible electronics	13
Support-free fabrication of elastic silicone microstructures via direct ink writing for soft robotic applications	12
A review of research on RF MEMS for metaverse interactions	12
High throughput microfluidic drug screening system for corneal epithelial wound healing	12
In-situ measurement of anisotropic Young’s modulus in fused deposition modeling printed cantilevers	12
Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors	12
Effects of rolled fibrous microstructure on fatigue properties of extruded Cu-5Al planar micro springs	12
Reflective x-ray masks for x-ray lithography	12
Research on the measurement of wet etching rates and Level Set simulation of patterned sapphire substrates	12
Numerical simulation of a nebulizer with multiple orifices	11
Low-voltage electrostatic manipulation of microparticles using a single carbon fiber probe	11
Study of super flexible mixed phase piezoresistive pressure sensor	11
A rapid method for fabricating and replicating microlens array structures	11
Corrigendum: Fabrication of FP-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process (2019 J. Micromech. Microeng. 29 025008)	11
Comparative analysis and tests for an improved frequency tuning area-varying electrode considering the influence of fringe capacitance	11
Variational-based data-driven model identification of micro resonator systems	11
The multimodal motion along a solid–liquid interface of a soft microrobot driven by compound magnetic fields	11
Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures	10
Flexible pressure/temperature sensors with heterogeneous integration of ultra-thin silicon and polymer	10
Edge smoothness enhancement of digital lithography based on the DMDs collaborative modulation	10
Quadrant kirigami-type electrothermal MEMS actuator with multi-degree-of-freedom morphing capability	10
Research on acoustic sensing device based on microfiber knot resonator	10
Nonlinear design, analysis, and testing of a single-stage compliant orthogonal displacement amplifier with a single input force for microgrippers	9
A penetration efficiency model for the optimization of solid conical microneedles’ geometry	9
Evaluation of Bosch processing and C4F8 plasma deposition at cryogenic temperatures	9
Highly responsive screen-printed asymmetric pressure sensor based on laser-induced graphene	9
Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer	9
A novel approach to determining the hydrodynamic resistance of droplets in microchannels using active control and grey-box system identification	9
Efficient annular aperture array (AAA) filter for thermophotovoltaic by sidewall lithography	9
Noninvasive measurement of temperature for simulated tissue based on piezoelectric micromachined ultrasonic transducers	9
Semi-reflective visor-based compact head-worn light field display	9
Performance of aluminum nitride-based piezoelectric micromachined ultrasonic transducers under different readout configurations	9
A highly accurate analytical method for determination of the vibrational frequency of N/MEMS with electrostatic and van der Waals interaction forces	9
Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application	9

Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer	9
Direct current triboelectric nanogenerators: a review	9
Fast analysis of MEMS micromirror based on multi-physical electro-mechanical-damping coupling method	9
Non-faradaic electrochemical impedance spectroscopy analysis of C-MEMS derived bio-modified glassy carbon electrode	9
The effect of quaternary ammonium salts with different chain lengths on copper filling behavior in blind holes of printed circuit board	9
Knudsen force based double beam MEMS vacuum pressure sensor	9
Flexible flow sensors-enabled intelligent life	9
Unsealed piezoelectric MEMS speaker with rigid-flexible composite membrane	9
Three-dimensional AC electroosmotic micropump with high power density	9
Microfluidic multicolor display by juxtapositional color mixing with a pattern of primary color pixels	8
Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application	8
Precise in-situ fabrication of perovskite single crystal arrays via cosolvent based electrohydrodynamic printing	8
Formation of silver wires embedded in hydrogels using femtosecond laser ablation and electroplating for strain sensing	8
Influence of process parameters on the characteristics of electrohydrodynamic-printed UV-curing conductive lines on the fabric	8
Carbon dioxide reduction utilizing a bismuth halide perovskite as immobilized photocatalyst in a 3D printed microreactor	8
Diversified plasmonic metallic nanostructures with high aspect ratio based on templated electrochemical deposition	8
Manufacturing of hydraulically steerable actuator using closed molding and core template for vascular intervention guidewires	8
Fabrication and characterization of annular-shaped piezoelectric micromachined ultrasonic transducer mounted with Pb(Zr,Ti)O3-based monocrystalline thin film	8
Design, development, and testing of active valve piezo-hydraulic pump	8
Efficient strategy for frequency design and bandwidth extension of curved piezoelectric ultrasonic micromachined transducers	7
Investigating capacitive flexible tactile sensor with a wide measuring range using PVDF and conductive sponge	7
Development of piezoresistive flexible sensor with dual-height cylindrical microstructure surfaces to achieve vehicle vibration monitoring	7
Performance analysis of synthetic jet micropump based on double piezoelectric actuators	7
Hierarchical integration of nanopillars and nanochannels in a nanofluidic device for single-nanoparticle detection	7
Phase noise modelling of MEMS resonant accelerometer with non-AGC-driven circuit	7
A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance	7
Design optimization and experimental verification of ultrasonic stack for micro hot embossing of polymers	7
Micromachining of nickel and nickel-based alloy surfaces using composite signal	7
Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation	7
Nanofluidic gas/liquid switching utilizing a nanochannel open/close valve based on glass deformation	7
Review of scaling effects on physical properties and practicalities of cantilever sensors	7
A Si-based suspended tunnel structure with trapezoidal section by two-step etching	7
Micromechanical piezoelectric micromachined ultrasonic transducer array package enhancement with integrated frontliners	7
Thermal and hydraulic performance of Al alloy-based 3D printed triangular microchannel heatsink governed by rough walls with graphene and alumina nanofluids as working liquid	7
RF MEMS electrostatically actuated tunable capacitors and their applications: a review	7
Highly sensitive flexible capacitive pressure sensor with structured elastomeric dielectric layers	7
Studies on drug delivery from dissolving microneedle and its uptake in tissue	7
Micro- and nanoscale patterning of fluorescent materials via coaxial electrohydrodynamic jet printing	7
Dynamic behaviours of double-ended tuning fork based comb-driven microelectromechanical resonators for modulating magnetic flux synchronously	7
Damping of 3D-printed polymer microbeam resonators	7
Ultra-low power signal conditioning system for effective biopotential signal recording	6
Mixed particles separation based on a cylindrical microfluidic centrifuge	6
Numerical simulation of wet etching for R angle of fine metal mask	6
Displacement-controlled coining of large arrays of gold stud bumps	6
Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001)	6
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection	6
Advances in micro lithium-ion batteries for on-chip and wearable applications	6
Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout	6
CMOS microsensor packaging for use in aqueous media	6
Micro/nano-transfer printing of gold thin films via atomic diffusion bonding: effects of air-exposure time and stamp modulus	6
PDMS micro check valve with 3D valve disk for reducing fluid resistance	6
Effect of SiO2 protective layer on LiNbO3 structured SAW resonators and temperature characteristics study	6
A multi-scale E-jet 3D printing regulated by structured multi-physics field	6
A simple way to predict the flip–chip gap	6
Electrohydrodynamic jet printed templates for hot embossing of microfluidic devices	6
A low-cost 3D-printing based rapid fabrication procedure for modular microfluidic platform	6
Splashing of droplet under the vibration effect of flexible membrane	6
Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application	6
Design and analysis of a dual-actuator force-balanced MEMS pressure sensor	6
An analytical model of three-hot-wire acoustic particle velocity sensors	6
A novel electromagnetic microactuator with a stainless steel mas-spring structure	6
Fabrication and characterization of suspended La0.7Sr0.3MnO3 nanofibers for high-sensitive and fast-responsive infrared bolometer	6
The effect of DRIE notching on field emission enhanced breakdown in SOI based MEMS electrodes	6
High-performance transparent heater with Ag paste-based nanomesh electrodes	6
Wafer level hermetic bonding and packaging using recrystallized parylene	6
Improvement on the uniformity of deep reactive ion etch for electrically isolated silicon-based substrates	5
Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study	5
RF MEMS filter based on dual liquid variations	5
High-frequency and low-loss SAW devices based on LiTaO3/Sapphire hetero-structure	5
Design and fabrication of lithium niobate asymmetrical mode resonators toward C-band and Ku-band	5
Experimental and simulation investigation for imprinting and buckling of V-groove/wrinkles hierarchical array	5
Laser drilling of stainless steel foil with reduced sidelobe ablation using a spatially filtered Bessel–Gauss beam	5
Noncontact MEMS thermal flow sensors integrated in glass microfluidic chemical chip	5
A numerical modeling approach to estimate the piezoresistance of diffused resistors with experimental validation	5
Large area nanoscale patterning of functional materials using organosilicate ink based nanotransfer printing	5
Surface reaction between immobilized magnetic microbead-tagged antibodies and electroosmotic flow-driven antigens in a microfluidic device for a realistic higher Damkohler number – a numerical approac	5
Active vibration reduction of tool holder in hole turning process using machine learning with the assistance of magnetic force	5
Heterogeneous micro-architectonic integration of SU-8 and highly entangled polyacrylamide hydrogel to realize cut-resistant soft superhydrophobic surfaces	5
Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure	5
Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation	5

Large stroke electromagnetic redundant actuated six degrees-of-freedom parallel compliant micropositioning stage	5
A 3D-printed spiral actuator for focus adjustment in circumferential scanning endomicroscopy	5
Recent trends in structures and applications of valveless piezoelectric pump—a review	5
Utilization of n-dodecane as coupling layer for reusable acoustofluidic microchips	5
A microchannel device for root hair isolation and behavior analysis	5
Fabrication of microneedles using wire electric discharge machining and improving surface quality by electrochemical polishing	5
Fabrication and integration of diffraction gratings on electrostatic stepper motor for imaging spectrometer applications	5
A compact and reconfigurable C-band DGS-based power divider using RF MEMS capacitive switch	5
Self-calibration of micro-components based on manipulator guidance	5
Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system	5
Micromachined piezoelectric Lamb wave resonators: a review	5
Development of an EGFET microsensor with 3D structure for high-specificity cardiac troponin I detection	5
Investigation on drag reduction of micro-structured PDMS film with self-replenishing bubble using water electrolysis	5
3D printing-based microfluidic devices in fabric	5
Nanosecond pulsed laser transmission welding of cyclic olefin copolymer	5
Ultra-high precision passive particle sorting chip coupling inertial microfluidics and single row micropillar arrays	5
Micromixing strategies for efficient mixing processes: a comprehensive review	5
Fused silica microchannel fabrication with smooth surface and high etching selectivity	5