Journal of Micromechanics and Microengineering

Papers
(The TQCC of Journal of Micromechanics and Microengineering is 5. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-10-01 to 2025-10-01.)
ArticleCitations
A long-stroke planar linear actuator equipped with magnetic guide90
Miniature and tunable high voltage-driven soft electroactive biconvex lenses for optical visual identification43
PDMS-polyimide transcutaneous blood gas collector with self-folding out-of-plane heater elements34
Passive communication for low power distributed sensors using MEMS optical cavities31
Magnetically maneuverable micromixer using acoustically excited bubbles26
The radial point interpolation method (RPIM) for analyzing a V-shaped electrothermal actuator26
Bistable liquid shutter operated by DEW actuation for multifunctional miniature cameras25
Wearable microfluidic sweat collection platform with a calorimetric flow rate sensor for realtime and long-term sweat rate measurements24
Regulating the electrical performance of contact-separation mode triboelectric nanogenerators based on double-sided groove textures22
An SOI-based post-fabrication process for compliant MEMS devices21
Performance evaluation of a 3D split-and-recombination micromixer with asymmetric structures21
Enabling water-based EVA adhesives for solvent-free aerosol jet printing in microfabrication20
Measurement and control of stiction force in in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts20
Deep silicon etching technology and applications: a review20
High density cleanroom-free microneedle arrays for pain-free drug delivery19
RF MEMS capacitive shunt switch for low loss applications19
Fabrication of an X-shaped micro-copper structure containing a merging joint based on localized electrochemical deposition19
Shape deviations of DLW microstructures in dependency of fabrication parameters18
Design and fabrication of a low-cost microfluidic cartridge with integrated pressure-driven check valve for molecular diagnostics platforms18
Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics18
Microfluidic cells for the 1–102 MPa pressure range18
Development of microneedle based blood extraction device17
A high-sensitivity MEMS fluxgate sensor with double-layer induction coils fabricated by micro-casting17
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization17
Near thermal-electric field controlled electrohydrodynamic 3D printing of high aspect ratio microstructures16
PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation16
A quantitative study of the dynamic response of compliant microfluidic chips in a microfluidics context16
Experimental study on acoustic-induced microbubbles fusion16
Fabrication of grooved LGS resonators based high temperature SAW sensors and analysis with FEM simulation15
A preparation technology of micro-structure glass based on mixed micro and nano powders15
Electric field sensing characteristics of ZnO/SiO2/Si surface acoustic wave devices15
A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design14
Manufacturing and assembly of an all-glass OCT microendoscope14
Etch the borosilicate glass to form a straight through-glass-via based on the FLACE technology14
Graphene resonant pressure sensor with ultrahigh responsivity-range product14
Micromechanics for energy generation14
Sub-miniature rolling thrust micro-bearing14
Micromachined threshold inertial switches: a review14
Bioinspired drag reduction surfaces via triple lithography method based on three-layer hybrid masks14
Producing micro impressions on Al6061 under alumina-mixed deionized water as dielectric during electric discharge machining13
Temperature and pressure effects on microchannels dimensions in hot embossing13
Efficient heat dissipation with hybrid composite-based microfluidic heat sinks in flexible electronics13
Support-free fabrication of elastic silicone microstructures via direct ink writing for soft robotic applications12
A review of research on RF MEMS for metaverse interactions12
High throughput microfluidic drug screening system for corneal epithelial wound healing12
In-situ measurement of anisotropic Young’s modulus in fused deposition modeling printed cantilevers12
Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors12
Effects of rolled fibrous microstructure on fatigue properties of extruded Cu-5Al planar micro springs12
Reflective x-ray masks for x-ray lithography12
Research on the measurement of wet etching rates and Level Set simulation of patterned sapphire substrates12
Numerical simulation of a nebulizer with multiple orifices11
Low-voltage electrostatic manipulation of microparticles using a single carbon fiber probe11
Study of super flexible mixed phase piezoresistive pressure sensor11
A rapid method for fabricating and replicating microlens array structures11
Corrigendum: Fabrication of FP-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process (2019 J. Micromech. Microeng. 29 025008)11
Comparative analysis and tests for an improved frequency tuning area-varying electrode considering the influence of fringe capacitance11
Variational-based data-driven model identification of micro resonator systems11
The multimodal motion along a solid–liquid interface of a soft microrobot driven by compound magnetic fields11
Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures10
Flexible pressure/temperature sensors with heterogeneous integration of ultra-thin silicon and polymer10
Edge smoothness enhancement of digital lithography based on the DMDs collaborative modulation10
Quadrant kirigami-type electrothermal MEMS actuator with multi-degree-of-freedom morphing capability10
Research on acoustic sensing device based on microfiber knot resonator10
Nonlinear design, analysis, and testing of a single-stage compliant orthogonal displacement amplifier with a single input force for microgrippers9
A penetration efficiency model for the optimization of solid conical microneedles’ geometry9
Evaluation of Bosch processing and C4F8 plasma deposition at cryogenic temperatures9
Highly responsive screen-printed asymmetric pressure sensor based on laser-induced graphene9
Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer9
A novel approach to determining the hydrodynamic resistance of droplets in microchannels using active control and grey-box system identification9
Efficient annular aperture array (AAA) filter for thermophotovoltaic by sidewall lithography9
Noninvasive measurement of temperature for simulated tissue based on piezoelectric micromachined ultrasonic transducers9
Semi-reflective visor-based compact head-worn light field display9
Performance of aluminum nitride-based piezoelectric micromachined ultrasonic transducers under different readout configurations9
A highly accurate analytical method for determination of the vibrational frequency of N/MEMS with electrostatic and van der Waals interaction forces9
Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application9
Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer9
Direct current triboelectric nanogenerators: a review9
Fast analysis of MEMS micromirror based on multi-physical electro-mechanical-damping coupling method9
Non-faradaic electrochemical impedance spectroscopy analysis of C-MEMS derived bio-modified glassy carbon electrode9
The effect of quaternary ammonium salts with different chain lengths on copper filling behavior in blind holes of printed circuit board9
Knudsen force based double beam MEMS vacuum pressure sensor9
Flexible flow sensors-enabled intelligent life9
Unsealed piezoelectric MEMS speaker with rigid-flexible composite membrane9
Three-dimensional AC electroosmotic micropump with high power density9
Microfluidic multicolor display by juxtapositional color mixing with a pattern of primary color pixels8
Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application8
Precise in-situ fabrication of perovskite single crystal arrays via cosolvent based electrohydrodynamic printing8
Formation of silver wires embedded in hydrogels using femtosecond laser ablation and electroplating for strain sensing8
Influence of process parameters on the characteristics of electrohydrodynamic-printed UV-curing conductive lines on the fabric8
Carbon dioxide reduction utilizing a bismuth halide perovskite as immobilized photocatalyst in a 3D printed microreactor8
Diversified plasmonic metallic nanostructures with high aspect ratio based on templated electrochemical deposition8
Manufacturing of hydraulically steerable actuator using closed molding and core template for vascular intervention guidewires8
Fabrication and characterization of annular-shaped piezoelectric micromachined ultrasonic transducer mounted with Pb(Zr,Ti)O3-based monocrystalline thin film8
Design, development, and testing of active valve piezo-hydraulic pump8
Efficient strategy for frequency design and bandwidth extension of curved piezoelectric ultrasonic micromachined transducers7
Investigating capacitive flexible tactile sensor with a wide measuring range using PVDF and conductive sponge7
Development of piezoresistive flexible sensor with dual-height cylindrical microstructure surfaces to achieve vehicle vibration monitoring7
Performance analysis of synthetic jet micropump based on double piezoelectric actuators7
Hierarchical integration of nanopillars and nanochannels in a nanofluidic device for single-nanoparticle detection7
Phase noise modelling of MEMS resonant accelerometer with non-AGC-driven circuit7
A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance7
Design optimization and experimental verification of ultrasonic stack for micro hot embossing of polymers7
Micromachining of nickel and nickel-based alloy surfaces using composite signal7
Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation7
Nanofluidic gas/liquid switching utilizing a nanochannel open/close valve based on glass deformation7
Review of scaling effects on physical properties and practicalities of cantilever sensors7
A Si-based suspended tunnel structure with trapezoidal section by two-step etching7
Micromechanical piezoelectric micromachined ultrasonic transducer array package enhancement with integrated frontliners7
Thermal and hydraulic performance of Al alloy-based 3D printed triangular microchannel heatsink governed by rough walls with graphene and alumina nanofluids as working liquid7
RF MEMS electrostatically actuated tunable capacitors and their applications: a review7
Highly sensitive flexible capacitive pressure sensor with structured elastomeric dielectric layers7
Studies on drug delivery from dissolving microneedle and its uptake in tissue7
Micro- and nanoscale patterning of fluorescent materials via coaxial electrohydrodynamic jet printing7
Dynamic behaviours of double-ended tuning fork based comb-driven microelectromechanical resonators for modulating magnetic flux synchronously7
Damping of 3D-printed polymer microbeam resonators7
Ultra-low power signal conditioning system for effective biopotential signal recording6
Mixed particles separation based on a cylindrical microfluidic centrifuge6
Numerical simulation of wet etching for R angle of fine metal mask6
Displacement-controlled coining of large arrays of gold stud bumps6
Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001)6
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection6
Advances in micro lithium-ion batteries for on-chip and wearable applications6
Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout6
CMOS microsensor packaging for use in aqueous media6
Micro/nano-transfer printing of gold thin films via atomic diffusion bonding: effects of air-exposure time and stamp modulus6
PDMS micro check valve with 3D valve disk for reducing fluid resistance6
Effect of SiO2 protective layer on LiNbO3 structured SAW resonators and temperature characteristics study6
A multi-scale E-jet 3D printing regulated by structured multi-physics field6
A simple way to predict the flip–chip gap6
Electrohydrodynamic jet printed templates for hot embossing of microfluidic devices6
A low-cost 3D-printing based rapid fabrication procedure for modular microfluidic platform6
Splashing of droplet under the vibration effect of flexible membrane6
Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application6
Design and analysis of a dual-actuator force-balanced MEMS pressure sensor6
An analytical model of three-hot-wire acoustic particle velocity sensors6
A novel electromagnetic microactuator with a stainless steel mas-spring structure6
Fabrication and characterization of suspended La0.7Sr0.3MnO3 nanofibers for high-sensitive and fast-responsive infrared bolometer6
The effect of DRIE notching on field emission enhanced breakdown in SOI based MEMS electrodes6
High-performance transparent heater with Ag paste-based nanomesh electrodes6
Wafer level hermetic bonding and packaging using recrystallized parylene6
Improvement on the uniformity of deep reactive ion etch for electrically isolated silicon-based substrates5
Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study5
RF MEMS filter based on dual liquid variations5
High-frequency and low-loss SAW devices based on LiTaO3/Sapphire hetero-structure5
Design and fabrication of lithium niobate asymmetrical mode resonators toward C-band and Ku-band5
Experimental and simulation investigation for imprinting and buckling of V-groove/wrinkles hierarchical array5
Laser drilling of stainless steel foil with reduced sidelobe ablation using a spatially filtered Bessel–Gauss beam5
Noncontact MEMS thermal flow sensors integrated in glass microfluidic chemical chip5
A numerical modeling approach to estimate the piezoresistance of diffused resistors with experimental validation5
Large area nanoscale patterning of functional materials using organosilicate ink based nanotransfer printing5
Surface reaction between immobilized magnetic microbead-tagged antibodies and electroosmotic flow-driven antigens in a microfluidic device for a realistic higher Damkohler number – a numerical approac5
Active vibration reduction of tool holder in hole turning process using machine learning with the assistance of magnetic force5
Heterogeneous micro-architectonic integration of SU-8 and highly entangled polyacrylamide hydrogel to realize cut-resistant soft superhydrophobic surfaces5
Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure5
Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation5
Large stroke electromagnetic redundant actuated six degrees-of-freedom parallel compliant micropositioning stage5
A 3D-printed spiral actuator for focus adjustment in circumferential scanning endomicroscopy5
Recent trends in structures and applications of valveless piezoelectric pump—a review5
Utilization of n-dodecane as coupling layer for reusable acoustofluidic microchips5
A microchannel device for root hair isolation and behavior analysis5
Fabrication of microneedles using wire electric discharge machining and improving surface quality by electrochemical polishing5
Fabrication and integration of diffraction gratings on electrostatic stepper motor for imaging spectrometer applications5
A compact and reconfigurable C-band DGS-based power divider using RF MEMS capacitive switch5
Self-calibration of micro-components based on manipulator guidance5
Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system5
Micromachined piezoelectric Lamb wave resonators: a review5
Development of an EGFET microsensor with 3D structure for high-specificity cardiac troponin I detection5
Investigation on drag reduction of micro-structured PDMS film with self-replenishing bubble using water electrolysis5
3D printing-based microfluidic devices in fabric5
Nanosecond pulsed laser transmission welding of cyclic olefin copolymer5
Ultra-high precision passive particle sorting chip coupling inertial microfluidics and single row micropillar arrays5
Micromixing strategies for efficient mixing processes: a comprehensive review5
Fused silica microchannel fabrication with smooth surface and high etching selectivity5
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