Journal of Micromechanics and Microengineering

Article	Citations
Silicon electro-optic micro-modulator fabricated in standard CMOS technology as components for all silicon monolithic integrated optoelectronic systems *	295
Design and engineering of Mn conical sculptured thin films as both electrodes for a gas sensor: ionization and field emission studies	66
RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook	57
MEMS actuators for biomedical applications: a review	54
Technology evolution from micro-scale energy harvesters to nanogenerators	53
Silicon MEMS inertial sensors evolution over a quarter century	44
Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era	43
Highly sensitive, reliable and flexible piezoresistive pressure sensors based on graphene-PDMS @ sponge	38
Advances in precision micro/nano-electroforming: a state-of-the-art review	37
Development of in vitro 2D and 3D microelectrode arrays and their role in advancing biomedical research	35
Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators	33
Fabrication and characterization of a fully conventionally machined, high-performance porous-media electrospray thruster	32
Terahertz MEMS metadevices	29
Optimization and characterization of direct UV laser writing system for microscale applications	28
Real-time physiological sensor-based liver-on-chip device for monitoring drug toxicity	28
Development of high-sensitivity piezoresistive pressure sensors for −0.5…+0.5 kPa	24
Recent advances on fabrication of microneedles on the flexible substrate	23
Ultra-low power signal conditioning system for effective biopotential signal recording	22
CMOS-MEMS technologies for the applications of environment sensors and environment sensing hubs	21
A rotating permanent magnetic actuator for micropumping devices with magnetic nanofluids	20
Induced-charge electrokinetics in microfluidics: a review on recent advancements	18
A review of MEMS-based metal oxide semiconductors gas sensor in Mainland China	18
Monitoring of physiological sounds with wearable device based on piezoelectric MEMS acoustic sensor	18
Evaluation of the impact of abnormal grains on the performance of Sc0.15Al0.85N-based BAW resonators and filters	17
Inlaid microfluidic optics: absorbance cells in clear devices applied to nitrite and phosphate detection	17

A high-stability triboelectric nanogenerator with mechanical transmission module and efficient power management system	16
RF MEMS electrostatically actuated tunable capacitors and their applications: a review	16
High-sensitivity liquid-metal-based contact lens sensor for continuous intraocular pressure monitoring	15
An ultrasonic flowmeter for liquid flow measurement in small pipes using AlN piezoelectric micromachined ultrasonic transducer arrays	15
Integrated 3D printed microfluidic circuitry and soft microrobotic actuators via in situ direct laser writing	15
Highly responsive screen-printed asymmetric pressure sensor based on laser-induced graphene	15
Numerical simulations of 22% efficient all-perovskite tandem solar cell utilizing lead-free and low lead content halide perovskites	14
A stiffness-tunable MEMS accelerometer	14
Frequency tunable resonant magnetoelectric sensors for the detection of weak magnetic field	14
Experimental study on two-phase boiling in wavy copper microchannels fabricated with ultrafast laser micromachining	14
The impact of laser energy on the photoresponsive characteristics of CdO/Si visible light photodetector	14
Ultra-small pressure sensors fabricated using a scar-free microhole inter-etch and sealing (MIS) process	14
Sensing performance of room temperature operated MEMS gas sensor for ppb level detection of hydrogen sulfide: a review	13
A 350 °C piezoresistive n-type 4H-SiC pressure sensor for hydraulic and pneumatic pressure tests	13
Programmable droplet actuating platform using liquid dielectrophoresis	13
Advances in micro lithium-ion batteries for on-chip and wearable applications	13
Large oscillation of electrostatically actuated curved beams	12
Modeling and fabrication of electrostatically actuated diaphragms for on-chip valving of MEMS-compatible microfluidic systems	12
Non-intrusive DC voltage measurement based on resonant electric field microsensors	12
Power enhancement of MEMS vibrational electrostatic energy harvester by stray capacitance reduction	12
An Integrative 3D printing method for rapid additive manufacturing of a capacitive force sensor	12
Piezoelectric approaches for wearable continuous blood pressure monitoring: a review	11
Ultrafast laser in fabrication of micro hemispherical resonators with quality factor over millions	11
Bistable Micro Caps Fabricated by Sheet Metal Forming	11
A reconfigurable and portable acoustofluidic system based on flexible printed circuit board for the manipulation of microspheres	11
Multi-step microfludic reactor for the synthesis of hybrid nanoparticles	11
Oscillation FPCB micromirror based triangulation laser rangefinder	11
Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics	11
Development of MEMS composite sensor with temperature compensation for tire pressure monitoring system	11
Development of 4D-printed shape memory polymer large-stroke XY micropositioning stages	11
Development of high-sensitivity pressure sensor with on-chip differential transistor amplifier	11
Flexible ZnO thin film acoustic wave device for gas flow rate measurement	11
A dual-frequency piezoelectric micromachined ultrasound transducer array with low inter-element coupling effects	10
Effect of film deposition rate on the thermoelectric output of tungsten-rhenium thin film thermocouples by DC magnetron sputtering	10
SAW-driven self-cleaning drop free glass for automotive sensors	10
Extracting white blood cells from blood on microfluidics platform: a review of isolation techniques and working mechanisms	10
From CAD to microfluidic chip within one day: rapid prototyping of lab-on-chip cartridges using generic polymer parts	10
Mechanical characterization of polydimethylsiloxane (PDMS) exposed to thermal histories up to 300 °C in a vacuum environment	10
Micro ultrasonic machining hemispherical mold for MEMS resonator gyroscope using a novel ultraprecise ceramic entire-ball tool	10
Three-dimensional Fabry–Pérot cavities sculpted on fiber tips using a multiphoton polymerization process	10
A novel rare cell sorting microfluidic chip based on magnetic nanoparticle labels	10
Nanoindentation behavior of UV-curable resist and its correlation with patterning defect in nanoimprint lithography	10
Direct current triboelectric nanogenerators: a review	10
Imaging of simulated muscle based on single chip of AlN piezoelectric micromachined ultrasonic transducer	10
Development of mechanically-robust piezoelectric micromachined ultrasonic transducer based on island-shaped monocrystalline PZT thin film partially covered with polyimide	9
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection	9
MEMS piezoelectric resonant microphone array for lung sound classification	9
Hybrid electrical and optical neural interfaces	9
Fabrication and characterization of micro electromagnetic linear actuators	9
Design and experimental investigation of a parallel flexure hinge-based 3D elliptical vibration-assisted cutting mechanism	9

A dielectrophoresis-based microfluidic chip for trapping circulating tumor cells using a porous membrane	9
A pulsed freestanding triboelectric nanogenerator and power management circuit to harvest rotation energy from an automobile brake	8
Vibration analysis of MEMS vibrating mesh atomizer	8
Sound dissipation from plate-type resonators excited in non-conventional transversal modes in liquids	8
Liquid metal droplet-enabled electrocapillary flow in biased alternating electric fields: a theoretical analysis from the perspective of induced-charge electrokinetics	8
Application of the evolutionary kinetic Monte Carlo method for the simulation of anisotropic wet etching of sapphire	8
Surface activation of poly(methyl methacrylate) for microfluidic device bonding through a H2O plasma treatment linked with a low-temperature annealing	8
Enhancement of passive mixing via arc microchannel with sharp corner structure	8
Bipolar resistive switching properties of TiO x /graphene oxide doped PVP based bilayer ReRAM	8
Second flexural and torsional modes of vibration in suspended microfluidic resonator for liquid density measurements	8
Design and investigation of dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal pocket TFET device as a label-free biosensor	8
High-performance transparent electromagnetic interference shielding film based on metal meshes	8
Curved passive mixing structures: a robust design to obtain efficient mixing and mass transfer in microfluidic channels	8
Microfluidic chip fabrication and performance analysis of 3D printed material for use in microfluidic nucleic acid amplification applications	8
An implantable microelectrode array for chronic in vivo epiretinal stimulation of the rat retina	8
A review of geometric and structural design for reliable flexible electronics	8
Process and device simulations aimed at improving the emitter region performance of silicon PERC solar cells	7
High-accuracy differential resonant pressure sensor with linear fitting method	7
Microfluidic fabrication of stable collagen microgels with aligned microstructure using flow-driven co-deposition and ionic gelation	7
A novel piezoelectric RF-MEMS resonator with enhanced quality factor	7
An on-chip test structure to measure the Seebeck coefficient of thermopile sensors	7
Analysis of the dynamic behavior of a V-shaped electrothermal microactuator	7
A perspective of active microfluidic platforms as an enabling tool for applications in other fields	7
Noise model considering electrical feed-through under force rebalance closed-loop detection of MEMS gyroscope	7
Design and manufacture of a micro-tensile testing machine for in situ optical observation and DIC analysis: application to 3D-printed and compression-molded ABS	7
Micromachined threshold inertial switches: a review	7
On the PZT/Si unimorph cantilever design for the signal-to-noise ratio enhancement of piezoelectric MEMS microphone	7
Design, modeling and experimental validation of a micro cantilever beam with an electro-controllable twisting ability	7
Low cost technology for the fabrication of anti-counterfeiting microtaggants	7
Investigations on piezo actuated micro XY stage for vibration-assisted micro milling	7
Underwater anechoic layer with parallel metallic plate insertions: theoretical modelling	7
Design and material for a patternable polysiloxane acrylate-based penetrating intracortical neural probe	7
On-chip micro pressure sensor for microfluidic pressure monitoring	7
Development of a piezoelectric pump with unfixed valve	7
Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control	6
Material strategies to enhance the performance of piezoelectric energy harvesters based on lead-free materials	6
Basic concepts of biological microparticles isolation by inertia spiral microchannels in simple terms: a review	6
Microfluidic biochip platform sensitized by AgNPs for SERS based rapid detection of uric acid	6
Frequency characteristics and thermal compensation of MEMS devices based on geometric anti-spring	6
Acoustic wave amplification with thin film silicon bonded on lithium niobate	6
Recent trends in structures and applications of valveless piezoelectric pump—a review	6
Hermetic chip-scale packaging using Au:Sn eutectic bonding for implantable devices	6
PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation	6
Motion of generated dumbbell-shaped satellite droplets during liquid dielectrophoresis	6
Micromechanical resonant cantilever sensors actuated by fringing electrostatic fields	6
A comprehensive review on non-active micro-pumps for microfluidic platforms	6
Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding	6
Effects of both the drive- and sense-mode circuit phase delay on MEMS gyroscope performance and real-time suppression of the residual fluctuation phase error	6
Mechanical characteristics of laminated film vibrator using an ultra-thin MEMS actuator	6
Temperature stable rare earth magnetic powder Sm-Fe-N based micro magnets with remanence enhanced by easy axis alignment and its application in MEMS actuator	6
Direct polymer microcantilever fabrication from free-standing dry film photoresists	6
Compact tunable mid-infrared Fabry–Pérot filters actuated by liquid crystal elastomers	6
Integration of buried piezoresistive sensors and PZT thin film for dynamic and static position sensing of MEMS actuator	6
Micromechanics for energy generation	6
Micro-wrinkle strategy for stable soft neural interface with optimized electroplated PEDOT:PSS	6
Atmospheric micro-sized cold plasma jet created by a long and ultra-flexible generator with sputtered gold thin film electrode	6
Solving curing-protocol-dependent shape errors in PDMS replication	6
A resonant high-pressure sensor based on dual cavities	6
Detection of cardiac biomarkers in serum using a micro-electromechanical film electroacoustic resonator	6
Laser pyrolysis for controlled morphing and chemical modification on 3D microlattices	6
A microfluidic chip integrated with 3D sidewall electrodes and wavy microchannel for cell focusing and separation	6
Fabrication of silicon electrodes used for micro electrochemical machining	6
Research on acoustic sensing device based on microfiber knot resonator	6
Crystal plasticity finite element simulation and experimental investigation of the micro-upsetting process of OFHC copper	6
Electrofluidic displays based on inkjet printing and phase change filling	6
A monolithic Si-micromachined four-stage Knudsen pump for µGC applications	5
Experimental amplitude and frequency control of a self-excited microcantilever by linear and nonlinear feedback	5
An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators	5
Elastic-plastic properties of mesoscale electrodeposited LIGA nickel alloy films: microscopy and mechanics	5
Picoliter liquid handling at gas/liquid interface by surface and geometry control in a micro-nanofluidic device	5
Unapodization: a method to produce laterally uniform surface acoustic waves for acoustofluidics	5
The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification	5
A dual-driven biomimetic microrobot based on optical and magnetic propulsion	5
Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application	5
A predictive model for electrostatic energy harvesters with impact-based frequency up-conversion	5
Development of microfluidic cartridge for culture-free detection of Staphylococcus aureus in blood	5
Fused silica microchannel fabrication with smooth surface and high etching selectivity	5
Mode localized artificial hair sensor with enhanced linearity applied for dual-axis air flow sensing	5
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization	5
Fractional order zero phase error tracking control of a novel decoupled 2-DOF compliant micro-positioning stage	5

Impact of support material deformation in MEMS bulk micromachined diaphragm pressure sensors	5
A microfluidic platform enabling real-time control of dynamic biochemical stimuli to biological cells	5
Development of droplet microfluidics capable of quantitative estimation of single-cell multiplex proteins	5
Facile fabrication of sensitivity-tunable strain sensors based on laser-patterned micro-nano structures	5
Fabrication of ultra-high-aspect-ratio nano-walls and nano-structures on silicon substrates	5
Fluid control with hydrophobic pillars in paper-based microfluidics	5
Micro electric discharge machining (μ-EDM) of polymer nanocomposites modified by graphene nanoplatelets/carbon using rotating electrode tool	5
Removal of recast layer in the laser drilled film cooling holes by a two-step inner streaming electrochemical technique	5
Volume-preserving strategies to improve the mixing efficiency of serpentine micromixers	5
The development of a pressure sensor using a technique for patterning silver nanowires on 3-dimensional curved PDMS membranes	5
Development of MEMS-based piezoresistive 3D stress/strain sensor using strain technology and smart temperature compensation	5
Sub-micrometer plasma-enhanced chemical vapor deposition using an atmospheric pressure plasma jet localized by a nanopipette scanning probe microscope	5
Burr removal from high-aspect-ratio micro-pillars using ultrasonic-assisted abrasive micro-deburring	5
MEMS device for applying shear and tension to an epithelium combined with fluorescent live cell imaging	5
Decomposition of pattern distortions by the Spread polynomial model in roll-to-sheet reverse offset printing	5
An efficient macro model for CMOS-MEMS thermal wind speed sensor	5
A wireless passive pressure sensor using microstructured ferromagnetic films with tunable effective permeability	5
A review of assembly techniques for fabricating twisted bilayer graphene	5
MEMS triaxial gyroscope using surface and sidewall doping piezoresistors	5
Geometry effects on flow characteristics of micro-scale planar nozzles	5
Conventional surface micromachining process for the fabrication of a linear optical phased array based on piston micromirrors	5
Shoulder fillet effects in strength distributions of microelectromechanical system components	5
Leak-free integrated microfluidic channel fabrication for surface plasmon resonance applications	5
Electromicrofluidic device with integrated PDMS microchannel and laser-induced graphene electrodes for electrochemical detection of cardiac biomarker in a point-of-care platform	5
Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application	5
Energy action model of spark assisted chemical engraving (SACE) for improving surface quality of micro cavities in ZrO2 ceramics	5
Fabrication of oil–water separation copper filter by spatial light modulated femtosecond laser	5
A programmable 3D printing method for magnetically driven micro soft robots based on surface tension	5
An ultra-thin transparent multi-functional sensor based on silk hydrogel for health monitoring	5
High-throughput acoustofluidic microchannels for single cell rotation	5
Mechanical reliability of silicon microstructures	5
A cantilever-based resonator for reconfigurable nanomechanical computing	5
Magnetically propelled soft micromachines with multipatterned fabrications	5
Feasibility study of a micro-electro-mechanical-systems threshold-pressure sensor based on parametric resonance: experimental and theoretical investigations	5
Derivation of analytical expressions for the stress/strain distributions, bending plane and curvature radius in multilayer thin-film composites	5
Stable 3D inertial focusing by high aspect ratio curved microfluidics	5