Journal of Micromechanics and Microengineering

Article	Citations
Regulating the electrical performance of contact-separation mode triboelectric nanogenerators based on double-sided groove textures	45
Wearable microfluidic sweat collection platform with a calorimetric flow rate sensor for realtime and long-term sweat rate measurements	28
Magnetically maneuverable micromixer using acoustically excited bubbles	27
The radial point interpolation method (RPIM) for analyzing a V-shaped electrothermal actuator	23
PDMS-polyimide transcutaneous blood gas collector with self-folding out-of-plane heater elements	22
High density cleanroom-free microneedle arrays for pain-free drug delivery	21
RF MEMS capacitive shunt switch for low loss applications	21
Measurement and control of stiction force in in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts	20
Enabling water-based EVA adhesives for solvent-free aerosol jet printing in microfabrication	20
An SOI-based post-fabrication process for compliant MEMS devices	19
Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics	19
A long-stroke planar linear actuator equipped with magnetic guide	19
Design and fabrication of a low-cost microfluidic cartridge with integrated pressure-driven check valve for molecular diagnostics platforms	19
Miniature and tunable high voltage-driven soft electroactive biconvex lenses for optical visual identification	19
Deep silicon etching technology and applications: a review	17
Performance evaluation of a 3D split-and-recombination micromixer with asymmetric structures	17
Fabrication of an X-shaped micro-copper structure containing a merging joint based on localized electrochemical deposition	17
Near thermal-electric field controlled electrohydrodynamic 3D printing of high aspect ratio microstructures	16
Bistable liquid shutter operated by DEW actuation for multifunctional miniature cameras	16
Experimental study on acoustic-induced microbubbles fusion	16
Passive communication for low power distributed sensors using MEMS optical cavities	16
Electric field sensing characteristics of ZnO/SiO 2 /Si surface acoustic wave devices	15
Microfluidic cells for the 1–102 MPa pressure range	15
A preparation technology of micro-structure glass based on mixed micro and nano powders	15
Sub-miniature rolling thrust micro-bearing	15

PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation	15
Development of microneedle based blood extraction device	14
Graphene resonant pressure sensor with ultrahigh responsivity-range product	14
Optical polymer aligner fabricated by 2pp for connecting angled fiber to an optical chip	14
Controllable fabrication of microstructure arrays on electrospun fibers via mold-assisted self-assembly of beaded fibers	13
Fabrication of grooved LGS resonators based high temperature SAW sensors and analysis with FEM simulation	13
Micromachined threshold inertial switches: a review	13
A quantitative study of the dynamic response of compliant microfluidic chips in a microfluidics context	13
Development of an original compact multigas detection system based on MEMS components	13
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization	13
Etch the borosilicate glass to form a straight through-glass-via based on the FLACE technology	12
In-situ measurement of anisotropic Young’s modulus in fused deposition modeling printed cantilevers	12
A review of research on RF MEMS for metaverse interactions	12
Effects of rolled fibrous microstructure on fatigue properties of extruded Cu-5Al planar micro springs	12
Bioinspired drag reduction surfaces via triple lithography method based on three-layer hybrid masks	12
A high-sensitivity MEMS fluxgate sensor with double-layer induction coils fabricated by micro-casting	12
A rapid method for fabricating and replicating microlens array structures	12
Research on the measurement of wet etching rates and Level Set simulation of patterned sapphire substrates	12
A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design	12
Reflective x-ray masks for x-ray lithography	12
Variational-based data-driven model identification of micro resonator systems	12
Numerical simulation of a nebulizer with multiple orifices	11
Study of super flexible mixed phase piezoresistive pressure sensor	11
Support-free fabrication of elastic silicone microstructures via direct ink writing for soft robotic applications	11
Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures	11
Flexible pressure/temperature sensors with heterogeneous integration of ultra-thin silicon and polymer	11
Edge smoothness enhancement of digital lithography based on the DMDs collaborative modulation	11
Quadrant kirigami-type electrothermal MEMS actuator with multi-degree-of-freedom morphing capability	11
Low-voltage electrostatic manipulation of microparticles using a single carbon fiber probe	10
Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors	10
Direct current triboelectric nanogenerators: a review	10
Research on acoustic sensing device based on microfiber knot resonator	10
Efficient heat dissipation with hybrid composite-based microfluidic heat sinks in flexible electronics	10
Three-dimensional AC electroosmotic micropump with high power density	10
The multimodal motion along a solid–liquid interface of a soft microrobot driven by compound magnetic fields	10
Ultra-high sensitive SAW pressure sensor based on anisotropic LiNbO 3 film	10
Noninvasive measurement of temperature for simulated tissue based on piezoelectric micromachined ultrasonic transducers	10
The effect of quaternary ammonium salts with different chain lengths on copper filling behavior in blind holes of printed circuit board	10
High throughput microfluidic drug screening system for corneal epithelial wound healing	10
Comparative analysis and tests for an improved frequency tuning area-varying electrode considering the influence of fringe capacitance	10
Corrigendum: Fabrication of FP-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process (2019 J. Micromech. Microeng.	10
Producing micro impressions on Al6061 under alumina-mixed deionized water as dielectric during electric discharge machining	9
Nonlinear design, analysis, and testing of a single-stage compliant orthogonal displacement amplifier with a single input force for microgrippers	9
Flexible flow sensors-enabled intelligent life	9
Evaluation of Bosch processing and C4F8 plasma deposition at cryogenic temperatures	9
Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer	9
Micro- and nanoscale patterning of fluorescent materials via coaxial electrohydrodynamic jet printing	9
Temperature and pressure effects on microchannels dimensions in hot embossing	9
Semi-reflective visor-based compact head-worn light field display	9
Efficient annular aperture array (AAA) filter for thermophotovoltaic by sidewall lithography	9

Unsealed piezoelectric MEMS speaker with rigid-flexible composite membrane	9
Manufacturing of hydraulically steerable actuator using closed molding and core template for vascular intervention guidewires	9
A penetration efficiency model for the optimization of solid conical microneedles’ geometry	9
Fast analysis of MEMS micromirror based on multi-physical electro-mechanical-damping coupling method	9
A novel approach to determining the hydrodynamic resistance of droplets in microchannels using active control and grey-box system identification	9
Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer	9
Non-faradaic electrochemical impedance spectroscopy analysis of C-MEMS derived bio-modified glassy carbon electrode	9
Nanofluidic gas/liquid switching utilizing a nanochannel open/close valve based on glass deformation	9
Low-cost and sensitive thermal microflow sensor with replaceable capillary tube for microfluidic application	8
Diversified plasmonic metallic nanostructures with high aspect ratio based on templated electrochemical deposition	8
Precise in-situ fabrication of perovskite single crystal arrays via cosolvent based electrohydrodynamic printing	8
Formation of silver wires embedded in hydrogels using femtosecond laser ablation and electroplating for strain sensing	8
Design optimization and experimental verification of ultrasonic stack for micro hot embossing of polymers	8
Studies on drug delivery from dissolving microneedle and its uptake in tissue	8
A highly accurate analytical method for determination of the vibrational frequency of N/MEMS with electrostatic and van der Waals interaction forces	8
Carbon dioxide reduction utilizing a bismuth halide perovskite as immobilized photocatalyst in a 3D printed microreactor	8
Hierarchical integration of nanopillars and nanochannels in a nanofluidic device for single-nanoparticle detection	8
Micromechanical piezoelectric micromachined ultrasonic transducer array package enhancement with integrated frontliners	8
Knudsen force based double beam MEMS vacuum pressure sensor	8
Design, development, and testing of active valve piezo-hydraulic pump	8
Influence of process parameters on the characteristics of electrohydrodynamic-printed UV-curing conductive lines on the fabric	8
Performance analysis of synthetic jet micropump based on double piezoelectric actuators	8
Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation	7
Micromachining of nickel and nickel-based alloy surfaces using composite signal	7
Thermal and hydraulic performance of Al alloy-based 3D printed triangular microchannel heatsink governed by rough walls with graphene and alumina nanofluids as working liquid	7
Development of piezoresistive flexible sensor with dual-height cylindrical microstructure surfaces to achieve vehicle vibration monitoring	7
Phase noise modelling of MEMS resonant accelerometer with non-AGC-driven circuit	7
Design and performance evaluation of a single piezoelectric stacked drive jet dispensing valve	7
Damping of 3D-printed polymer microbeam resonators	7
Review of scaling effects on physical properties and practicalities of cantilever sensors	7
Design, fabrication and test of electrothermal microgripper based on 304 stainless steel	7
Investigating capacitive flexible tactile sensor with a wide measuring range using PVDF and conductive sponge	7
Highly sensitive flexible capacitive pressure sensor with structured elastomeric dielectric layers	7
Efficient strategy for frequency design and bandwidth extension of curved piezoelectric ultrasonic micromachined transducers	7
A Si-based suspended tunnel structure with trapezoidal section by two-step etching	7
A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance	7
Mixed particles separation based on a cylindrical microfluidic centrifuge	7
PDMS micro check valve with 3D valve disk for reducing fluid resistance	6
Splashing of droplet under the vibration effect of flexible membrane	6
Displacement-controlled coining of large arrays of gold stud bumps	6
An analytical model of three-hot-wire acoustic particle velocity sensors	6
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection	6
Electrohydrodynamic jet printed templates for hot embossing of microfluidic devices	6
High-performance transparent heater with Ag paste-based nanomesh electrodes	6
A novel electromagnetic microactuator with a stainless steel mas-spring structure	6
CMOS microsensor packaging for use in aqueous media	6
Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout	6
Numerical simulation of wet etching for R angle of fine metal mask	6
Effect of SiO2 protective layer on LiNbO3 structured SAW resonators and temperature characteristics study	6
A compact and reconfigurable C-band DGS-based power divider using RF MEMS capacitive switch	6
Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001)	6
Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure	6
Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application	6
Micro/nano-transfer printing of gold thin films via atomic diffusion bonding: effects of air-exposure time and stamp modulus	6
Design and analysis of a dual-actuator force-balanced MEMS pressure sensor	6
Wafer level hermetic bonding and packaging using recrystallized parylene	6
The effect of DRIE notching on field emission enhanced breakdown in SOI based MEMS electrodes	6
A simple way to predict the flip–chip gap	6
Flow behaviors and transmission characteristics of Knudsen pump with blocked microchannels	6
Sub-10 nm metal nanogaps with high SERS performance via a novel conformal coating process	5
Fabrication of microneedles using wire electric discharge machining and improving surface quality by electrochemical polishing	5
Large stroke electromagnetic redundant actuated six degrees-of-freedom parallel compliant micropositioning stage	5
Improvement on the uniformity of deep reactive ion etch for electrically isolated silicon-based substrates	5
Active vibration reduction of tool holder in hole turning process using machine learning with the assistance of magnetic force	5
Diamond ICP-DRIE etching technology with PECVD SiO 2 as mask	5
CMUT modeling—extension to soft boundaries and thick plates	5
Heterogeneous micro-architectonic integration of SU-8 and highly entangled polyacrylamide hydrogel to realize cut-resistant soft superhydrophobic surfaces	5
Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation	5
Investigation on drag reduction of micro-structured PDMS film with self-replenishing bubble using water electrolysis	5
Nanosecond pulsed laser transmission welding of cyclic olefin copolymer	5
Micromachined piezoelectric Lamb wave resonators: a review	5
Large area nanoscale patterning of functional materials using organosilicate ink based nanotransfer printing	5
Fabrication and integration of diffraction gratings on electrostatic stepper motor for imaging spectrometer applications	5
High-frequency and low-loss SAW devices based on LiTaO3/Sapphire hetero-structure	5
A high-quality dual-port surface acoustic wave intermediate frequency filter	5
Fabrication and characterization of suspended La0.7Sr0.3MnO3 nanofibers for high-sensitive and fast-responsive infrared bolometer	5
Ultra-high precision passive particle sorting chip coupling inertial microfluidics and single row micropillar arrays	5
Fabrication of micro-ultrasonic phased array electrode via electric field-driven printing method	5
Accurate holographic cytometry using three-dimensional hydrodynamic focusing	5
Fused silica microchannel fabrication with smooth surface and high etching selectivity	5

Surface reaction between immobilized magnetic microbead-tagged antibodies and electroosmotic flow-driven antigens in a microfluidic device for a realistic higher Damkohler number – a numerical approac	5
Noncontact MEMS thermal flow sensors integrated in glass microfluidic chemical chip	5
RF MEMS filter based on dual liquid variations	5
Microfabricated electrochemical oxygen sensors with hydrogel electrolytes for in vivo applications	5
Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system	5
A low-cost 3D-printing based rapid fabrication procedure for modular microfluidic platform	5
Self-calibration of micro-components based on manipulator guidance	5
Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study	5
3D printing-based microfluidic devices in fabric	5