Journal of Micromechanics and Microengineering

Article	Citations
A comprehensive review on non-active micro-pumps for microfluidic platforms	80
Regulating the electrical performance of contact-separation mode triboelectric nanogenerators based on double-sided groove textures	72
A long-stroke planar linear actuator equipped with magnetic guide	68
Miniature and tunable high voltage-driven soft electroactive biconvex lenses for optical visual identification	68
Fabrication of an X-shaped micro-copper structure containing a merging joint based on localized electrochemical deposition	48
An SOI-based post-fabrication process for compliant MEMS devices	37
Design and fabrication of a low-cost microfluidic cartridge with integrated pressure-driven check valve for molecular diagnostics platforms	34
PDMS-polyimide transcutaneous blood gas collector with self-folding out-of-plane heater elements	29
RF MEMS capacitive shunt switch for low loss applications	28
Performance evaluation of a 3D split-and-recombination micromixer with asymmetric structures	28
On the PZT/Si unimorph cantilever design for the signal-to-noise ratio enhancement of piezoelectric MEMS microphone	26
Conventional surface micromachining process for the fabrication of a linear optical phased array based on piston micromirrors	24
The radial point interpolation method (RPIM) for analyzing a V-shaped electrothermal actuator	22
Passive communication for low power distributed sensors using MEMS optical cavities	22
Magnetically maneuverable micromixer using acoustically excited bubbles	20
Measurement and control of stiction force in in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts	19
Recent advances in power supply strategies for untethered neural implants	19
Bistable liquid shutter operated by DEW actuation for multifunctional miniature cameras	19
Wearable microfluidic sweat collection platform with a calorimetric flow rate sensor for realtime and long-term sweat rate measurements	18
High density cleanroom-free microneedle arrays for pain-free drug delivery	17
Fractional order zero phase error tracking control of a novel decoupled 2-DOF compliant micro-positioning stage	16
Graphene resonant pressure sensor with ultrahigh responsivity-range product	16
Development of microneedle based blood extraction device	16
Micromechanics for energy generation	16
A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design	16

A high-sensitivity MEMS fluxgate sensor with double-layer induction coils fabricated by micro-casting	16
Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics	16
PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation	15
Distance sensor with a tunable aperture actuated by thermal expansion of silicon chevron beams	14
Fabrication of grooved LGS resonators based high temperature SAW sensors and analysis with FEM simulation	14
Electric field sensing characteristics of ZnO/SiO2/Si surface acoustic wave devices	13
Experimental study on acoustic-induced microbubbles fusion	13
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization	13
A preparation technology of micro-structure glass based on mixed micro and nano powders	13
Manufacturing and assembly of an all-glass OCT microendoscope	13
Bioinspired drag reduction surfaces via triple lithography method based on three-layer hybrid masks	12
Etch the borosilicate glass to form a straight through-glass-via based on the FLACE technology	12
Shape deviations of DLW microstructures in dependency of fabrication parameters	11
A quantitative study of the dynamic response of compliant microfluidic chips in a microfluidics context	11
RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook	11
Edge smoothness enhancement of digital lithography based on the DMDs collaborative modulation	11
Sub-miniature rolling thrust micro-bearing	11
Producing micro impressions on Al6061 under alumina-mixed deionized water as dielectric during electric discharge machining	11
The effect of quaternary ammonium salts with different chain lengths on copper filling behavior in blind holes of printed circuit board	11
Near thermal-electric field controlled electrohydrodynamic 3D printing of high aspect ratio microstructures	11
Micromachined threshold inertial switches: a review	11
Numerical simulation of a nebulizer with multiple orifices	11
Three-dimensional AC electroosmotic micropump with high power density	10
Effects of rolled fibrous microstructure on fatigue properties of extruded Cu-5Al planar micro springs	10
Reflective x-ray masks for x-ray lithography	10
Corrigendum: Fabrication of FP-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process (2019 J. Micromech. Microeng. 29 025008)	10
Comparative analysis and tests for an improved frequency tuning area-varying electrode considering the influence of fringe capacitance	10
Research on acoustic sensing device based on microfiber knot resonator	10
High throughput microfluidic drug screening system for corneal epithelial wound healing	10
Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors	10
Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures	10
In-situ measurement of anisotropic Young’s modulus in fused deposition modeling printed cantilevers	9
Direct current triboelectric nanogenerators: a review	9
A rapid method for fabricating and replicating microlens array structures	9
Temperature and pressure effects on microchannels dimensions in hot embossing	9
Highly responsive screen-printed asymmetric pressure sensor based on laser-induced graphene	9
Flexible pressure/temperature sensors with heterogeneous integration of ultra-thin silicon and polymer	9
The multimodal motion along a solid–liquid interface of a soft microrobot driven by compound magnetic fields	9
Hermetic chip-scale packaging using Au:Sn eutectic bonding for implantable devices	9
Fast analysis of MEMS micromirror based on multi-physical electro-mechanical-damping coupling method	9
A review of research on RF MEMS for metaverse interactions	9
Noninvasive measurement of temperature for simulated tissue based on piezoelectric micromachined ultrasonic transducers	9
Quadrant kirigami-type electrothermal MEMS actuator with multi-degree-of-freedom morphing capability	9
Study of super flexible mixed phase piezoresistive pressure sensor	9
Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer	9
Performance of aluminum nitride-based piezoelectric micromachined ultrasonic transducers under different readout configurations	8
Efficient annular aperture array (AAA) filter for thermophotovoltaic by sidewall lithography	8
A penetration efficiency model for the optimization of solid conical microneedles’ geometry	8
Fabrication and characterization of annular-shaped piezoelectric micromachined ultrasonic transducer mounted with Pb(Zr,Ti)O3-based monocrystalline thin film	8
Performance analysis of synthetic jet micropump based on double piezoelectric actuators	8

Semi-reflective visor-based compact head-worn light field display	8
A novel approach to determining the hydrodynamic resistance of droplets in microchannels using active control and grey-box system identification	8
Evaluation of Bosch processing and C4F8 plasma deposition at cryogenic temperatures	8
Carbon dioxide reduction utilizing a bismuth halide perovskite as immobilized photocatalyst in a 3D printed microreactor	8
A highly accurate analytical method for determination of the vibrational frequency of N/MEMS with electrostatic and van der Waals interaction forces	8
Fabrication of high-aspect-ratio polydimethylsiloxane microstructures by reducing the interfacial adhesion in soft lithography	8
Nonlinear design, analysis, and testing of a single-stage compliant orthogonal displacement amplifier with a single input force for microgrippers	8
Non-faradaic electrochemical impedance spectroscopy analysis of C-MEMS derived bio-modified glassy carbon electrode	8
Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer	8
Knudsen force based double beam MEMS vacuum pressure sensor	8
Unsealed piezoelectric MEMS speaker with rigid-flexible composite membrane	8
Design, development, and testing of active valve piezo-hydraulic pump	8
Flexible flow sensors-enabled intelligent life	8
Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application	8
Thermal and hydraulic performance of Al alloy-based 3D printed triangular microchannel heatsink governed by rough walls with graphene and alumina nanofluids as working liquid	7
Mixed particles separation based on a cylindrical microfluidic centrifuge	7
Investigating capacitive flexible tactile sensor with a wide measuring range using PVDF and conductive sponge	7
Hierarchical integration of nanopillars and nanochannels in a nanofluidic device for single-nanoparticle detection	7
Influence of process parameters on the characteristics of electrohydrodynamic-printed UV-curing conductive lines on the fabric	7
Formation of silver wires embedded in hydrogels using femtosecond laser ablation and electroplating for strain sensing	7
Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application	7
Micromachining of nickel and nickel-based alloy surfaces using composite signal	7
RF MEMS electrostatically actuated tunable capacitors and their applications: a review	7
Micromechanical piezoelectric micromachined ultrasonic transducer array package enhancement with integrated frontliners	7
Review of scaling effects on physical properties and practicalities of cantilever sensors	7
Nanofluidic gas/liquid switching utilizing a nanochannel open/close valve based on glass deformation	7
Diversified plasmonic metallic nanostructures with high aspect ratio based on templated electrochemical deposition	7
Microfluidic multicolor display by juxtapositional color mixing with a pattern of primary color pixels	7
Phase noise modelling of MEMS resonant accelerometer with non-AGC-driven circuit	7
Highly sensitive flexible capacitive pressure sensor with structured elastomeric dielectric layers	7
Dynamic behaviours of double-ended tuning fork based comb-driven microelectromechanical resonators for modulating magnetic flux synchronously	7
Development of piezoresistive flexible sensor with dual-height cylindrical microstructure surfaces to achieve vehicle vibration monitoring	7
Manufacturing of hydraulically steerable actuator using closed molding and core template for vascular intervention guidewires	7
Precise in-situ fabrication of perovskite single crystal arrays via cosolvent based electrohydrodynamic printing	7
Design optimization and experimental verification of ultrasonic stack for micro hot embossing of polymers	7
Efficient strategy for frequency design and bandwidth extension of curved piezoelectric ultrasonic micromachined transducers	7
Advances in micro lithium-ion batteries for on-chip and wearable applications	6
Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application	6
Electrohydrodynamic jet printed templates for hot embossing of microfluidic devices	6
A novel electromagnetic microactuator with a stainless steel mas-spring structure	6
Fabrication and characterization of suspended La0.7Sr0.3MnO3 nanofibers for high-sensitive and fast-responsive infrared bolometer	6
Wafer level hermetic bonding and packaging using recrystallized parylene	6
Splashing of droplet under the vibration effect of flexible membrane	6
Micromachining of polymers using atmospheric pressure inductively coupled helium plasma localized by a scanning nanopipette probe microscope	6
A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance	6
Damping of 3D-printed polymer microbeam resonators	6
Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation	6
Ultra-low power signal conditioning system for effective biopotential signal recording	6
Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001)	6
Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system	6
A multi-scale E-jet 3D printing regulated by structured multi-physics field	6
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection	6
Effect of SiO2 protective layer on LiNbO3 structured SAW resonators and temperature characteristics study	6
Surface micromachining of chip-edge silicon microcantilevers using xenon difluoride etching of silicon-on-insulator	6
A Si-based suspended tunnel structure with trapezoidal section by two-step etching	6
Studies on drug delivery from dissolving microneedle and its uptake in tissue	6
A review of geometric and structural design for reliable flexible electronics	6
Micro/nano-transfer printing of gold thin films via atomic diffusion bonding: effects of air-exposure time and stamp modulus	6
A simple way to predict the flip–chip gap	6
A compact and reconfigurable C-band DGS-based power divider using RF MEMS capacitive switch	6
The effect of DRIE notching on field emission enhanced breakdown in SOI based MEMS electrodes	6
PDMS micro check valve with 3D valve disk for reducing fluid resistance	6
Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout	6
An analytical model of three-hot-wire acoustic particle velocity sensors	6
Displacement-controlled coining of large arrays of gold stud bumps	6
Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding	6
A low-cost 3D-printing based rapid fabrication procedure for modular microfluidic platform	5
Nanoscale directional etching features and mechanism of HF/HNO3etchant	5
Micromachined piezoelectric Lamb wave resonators: a review	5
A numerical modeling approach to estimate the piezoresistance of diffused resistors with experimental validation	5
Integrated cooling system for microfluidic PDMS devices used in biological microscopy studies	5
Experimental and simulation investigation for imprinting and buckling of V-groove/wrinkles hierarchical array	5
Fabrication of microneedles using wire electric discharge machining and improving surface quality by electrochemical polishing	5
Heterogeneous micro-architectonic integration of SU-8 and highly entangled polyacrylamide hydrogel to realize cut-resistant soft superhydrophobic surfaces	5
Design, analysis, and experimental performance of a novel micro-nozzle based liquid metal direct writing system	5
Large area nanoscale patterning of functional materials using organosilicate ink based nanotransfer printing	5
Motion of generated dumbbell-shaped satellite droplets during liquid dielectrophoresis	5
Ultra-high precision passive particle sorting chip coupling inertial microfluidics and single row micropillar arrays	5
Fused silica microchannel fabrication with smooth surface and high etching selectivity	5
Fabrication of micro-ultrasonic phased array electrode via electric field-driven printing method	5

Sub-10 nm metal nanogaps with high SERS performance via a novel conformal coating process	5
A microchannel device for root hair isolation and behavior analysis	5
Accurate holographic cytometry using three-dimensional hydrodynamic focusing	5
Self-calibration of micro-components based on manipulator guidance	5
RF MEMS filter based on dual liquid variations	5
High-performance transparent heater with Ag paste-based nanomesh electrodes	5
Improvement on the uniformity of deep reactive ion etch for electrically isolated silicon-based substrates	5
Large stroke electromagnetic redundant actuated six degrees-of-freedom parallel compliant micropositioning stage	5
Nanosecond pulsed laser transmission welding of cyclic olefin copolymer	5
A 3D-printed spiral actuator for focus adjustment in circumferential scanning endomicroscopy	5
Laser drilling of stainless steel foil with reduced sidelobe ablation using a spatially filtered Bessel–Gauss beam	5
Design and fabrication of lithium niobate asymmetrical mode resonators toward C-band and Ku-band	5
Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study	5
Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation	5
Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure	5
Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique	4
A programmable 3D printing method for magnetically driven micro soft robots based on surface tension	4
A novel microfluidic viscometer for measuring viscosity of ultrasmall volumes of Newtonian and non-Newtonian liquids	4
A novel micro-device for simultaneous separation-trapping and double-trapping of particles by using dielectrophoresis: numerical and experimental study	4
A resonant high-pressure sensor based on dual cavities	4
A novel electromagnetic micropump with PDMS membrane supported by a stainless-steel microstructure	4
Recent trends in structures and applications of valveless piezoelectric pump—a review	4
3D printing-based microfluidic devices in fabric	4
Geometry effects on flow characteristics of micro-scale planar nozzles	4
Numerical study of enhanced Rayleigh streaming in resonant cylindrical shells	4
Innovating in-situ characterization: a comprehensive measurement system for measuring the ZT and the contact resistance of vertical thermolegs exploiting the vertical transfer length method	4
Micro electric discharge machining (μ-EDM) of polymer nanocomposites modified by graphene nanoplatelets/carbon using rotating electrode tool	4
Design and optimization of electrode-integrated microfluidic chips for enhanced electrochemical impedance spectroscopy assessments	4
Flow-insensitive micro-thermal conductivity detector with semi-diffusion gas channel	4
Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces	4
Picoliter liquid handling at gas/liquid interface by surface and geometry control in a micro-nanofluidic device	4
Study on the cause of pore defects processed by focused ion beam milling on high roughness surface	4
Research on dynamics of bouncing ball in triboelectric nanogenerator	4
Study on the mechanism of glass-SiC-glass anodic bonding process	4
Micro-gas sensor with a suspended micro-heater for ammonia gas detection	4
On the design of piezoelectric actuator for 1D MEMS scanning mirror applications	4
On the design of a two-way piezoelectric MEMS microspeaker based on a multi-shape cantilever array for high-frequency applications	4
Development of an EGFET microsensor with 3D structure for high-specificity cardiac troponin I detection	4
Zinc film anodes for air microbatteries: fabrication, approaches, and utilization optimization	4
A perspective of active microfluidic platforms as an enabling tool for applications in other fields	4
A grade 1 titanium capacitive microsensor for continuous pressure monitoring of intracorporal pressures	4
High-density stretchable microelectrode array based on multilayer serpentine interconnections	4
Characteristics of an antistatic semiconductor bridge based on micro/nano processing techniques	4
A two-channel ultrasonic flowmeter based on AlN piezoelectric micromachined ultrasonic transducers arrays with improved cross-correlation method	4
Surface acoustic wave bound state in the continuum for 1200 °C high temperature sensing	4
Flow-through microfluidic relative permittivity sensor using highly-doped silicon sidewall electrodes	4
Preparation of robust superhydrophobic surface on PET substrate using Box-Behnken design and facile sanding method with PTFE powder	4
Transparent glass force plate with CrN strain gauges featuring a notch structure	4
A non-invasive and high precision sensor for in-situ temperature monitoring of cells	4
High-reliability circular-contact RF MEMS switches in silicon hermetic package	4
Design and testing of a novel multipath-actuation compliant manipulator	4
Manufacturing and measurement of CMOS-MEMS-based micro thermoelectric generators with long-length thermocouples	4
Combination of anti-miR19a-3p polyplex plus doxorubicin for breast cancer in 2D culture and apoptosis assay in 3D spheroids in a microwell device	4
Micromixing strategies for efficient mixing processes: a comprehensive review	4
Utilization of n-dodecane as coupling layer for reusable acoustofluidic microchips	4
Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment	4
Corrigendum: Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique (2024 J. Micromech. Microeng.	4
Fully differential higher order transverse mode piezoelectric membrane resonators for enhanced liquid-phase quality factors	4
Technology evolution from micro-scale energy harvesters to nanogenerators	4
On overtravel and skate in cantilever-based probes for on-wafer measurements	4
Microfluidics in cardiac microphysiological systems: a review	4
3D simulation estimation and experimental validation of droplet generation in CFD-based flow-focusing microfluidic chips	4
Capillary enhanced phase change in a microfabricated self-oscillating fluidic heat engine (SOFHE)	3
An A0 mode Lamb-wave AlN resonator on SOI substrate with vertically arranged double-electrodes	3
Fabrication of a piezoelectric micromachined ultrasonic transducer (PMUT) with dual heterogeneous piezoelectric thin film stacking	3
Performance comparison of x-ray absorption gratings fabricated by free deposition and centrifugal filling methods	3
An Integrative 3D printing method for rapid additive manufacturing of a capacitive force sensor	3
Development of MEMS composite sensor with temperature compensation for tire pressure monitoring system	3
Optimization of plotter printing for sub-terahertz metallic metasurfaces fabrication on ultra-thin substrate	3
Development of microfluidic flow cytometry capable of characterization of single-cell intrinsic structural and electrical parameters	3
High-throughput particle focusing and separation in split-recombination channel	3
Field nonuniformity of limited-aperture planar SAWs and its implications for designing SSAW acoustofluidics	3
Vapor etching to avoid micro-masking by gas-bubbles in wet release of MEMS	3
MEMS audio speakers *	3
High-Q terahertz bandstop filter via cuboid frame structure	3
An one-drive-four wireless high voltage high speed controller system used in 100°/8 ms MEMS rotary actuator for antenna array	3
Experimental investigation of micro-machining of borosilicate glass using an ultrasonic assisted rotary electrochemical discharge machining (UA-RECDM) process	3
Two-layered microwell-array device for preparation of single-neuron culture samples	3
A sensing material-free and simple readout MEMS sensor for detecting helium	3
DMD maskless digital lithography based on stepwise rotary stitching	3
MEMS piezoelectric resonant microphone array for lung sound classification	3
Accessible, large-area, uniform dose photolithography using a moving light source	3
Quantifying and correcting tilt-related positioning errors in microcantilever-based microelectromechanical systems probes	3
High thickness material lift-off using multi-layer photoresist	3
Extracting white blood cells from blood on microfluidics platform: a review of isolation techniques and working mechanisms	3
Power enhancement of MEMS vibrational electrostatic energy harvester by stray capacitance reduction	3
Modeling and analysis of sulfur hexafluoride plasma etching for silicon microcavity resonators	3
Energy and cost efficient manufacturing of uniform periodic nanostructures enabled by an adaptable beam flattening device	3
Physics-informed neural networks with data-driven in modeling and characterizing piezoelectric micro-bender	3
Advancements in mathematical modeling and design configurations of piezoelectric energy harvesters: a comprehensive review	3
Micromechanical valve-operated needle-on-a-chip microinjection module for microfluidic large-scale integration	3
A combined MEMS thermal vacuum sensor with a wide pressure range	3
Mechanical reliability of silicon microstructures	3
Manufacturing and characterization of CMOS-MEMS magnetic field microsensors with isolated cavities	3
Scotch-tape surface wrinkling based thin-film material properties extraction	3