Journal of Micromechanics and Microengineering

Article	Citations
Wearable microfluidic sweat collection platform with a calorimetric flow rate sensor for realtime and long-term sweat rate measurements	31
The radial point interpolation method (RPIM) for analyzing a V-shaped electrothermal actuator	30
Enabling water-based EVA adhesives for solvent-free aerosol jet printing in microfabrication	27
PDMS-polyimide transcutaneous blood gas collector with self-folding out-of-plane heater elements	27
Miniature and tunable high voltage-driven soft electroactive biconvex lenses for optical visual identification	24
High density cleanroom-free microneedle arrays for pain-free drug delivery	23
A long-stroke planar linear actuator equipped with magnetic guide	23
RF MEMS capacitive shunt switch for low loss applications	23
Measurement and control of stiction force in in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts	23
Fabrication of an X-shaped micro-copper structure containing a merging joint based on localized electrochemical deposition	22
Magnetically maneuverable micromixer using acoustically excited bubbles	22
Co 3 O 4 nanoparticle decorated ZnO nanorods for high-sensitivity acetone detection	21
Acoustic lens–based actuators for precise and contactless microparticle manipulation	20
An SOI-based post-fabrication process for compliant MEMS devices	18
Design and fabrication of a low-cost microfluidic cartridge with integrated pressure-driven check valve for molecular diagnostics platforms	18
Regulating the electrical performance of contact-separation mode triboelectric nanogenerators based on double-sided groove textures	18
Performance evaluation of a 3D split-and-recombination micromixer with asymmetric structures	18
Fabrication of freestanding metallic microcomponents via microelectroforming using a composite photopolymer/Ag@Cu conductive mold	18
Passive communication for low power distributed sensors using MEMS optical cavities	17
Deep silicon etching technology and applications: a review	16
Thermo-optical Fresnel zone plates with polymer-coated patterned chromium for coma aberration correction	16
Bistable liquid shutter operated by DEW actuation for multifunctional miniature cameras	16
ALD alumina (Al 2 O 3 )-enabled wafer-level anodic bonding of LTCC and SOI for MEMS integration	16
Development of microneedle based blood extraction device	15
Development of an original compact multigas detection system based on MEMS components	15

Sub-miniature rolling thrust micro-bearing	15
Near thermal-electric field controlled electrohydrodynamic 3D printing of high aspect ratio microstructures	15
A quantitative study of the dynamic response of compliant microfluidic chips in a microfluidics context	15
Microfluidic cells for the 1–102 MPa pressure range	15
A high-sensitivity MEMS fluxgate sensor with double-layer induction coils fabricated by micro-casting	15
Experimental study on acoustic-induced microbubbles fusion	15
Optical polymer aligner fabricated by 2pp for connecting angled fiber to an optical chip	14
Graphene resonant pressure sensor with ultrahigh responsivity-range product	14
A preparation technology of micro-structure glass based on mixed micro and nano powders	14
Fabrication of grooved LGS resonators based high temperature SAW sensors and analysis with FEM simulation	13
A self-tuning resonance-locking method for polymer MEMS microscanners	13
Research on the measurement of wet etching rates and Level Set simulation of patterned sapphire substrates	13
Reflective x-ray masks for x-ray lithography	13
Controllable fabrication of microstructure arrays on electrospun fibers via mold-assisted self-assembly of beaded fibers	13
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization	13
In-situ measurement of anisotropic Young’s modulus in fused deposition modeling printed cantilevers	13
Research on femtosecond laser direct writing-based thermally induced shrinkage process	13
PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation	13
A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design	13
Effects of rolled fibrous microstructure on fatigue properties of extruded Cu-5Al planar micro springs	13
Support-free fabrication of elastic silicone microstructures via direct ink writing for soft robotic applications	12
The multimodal motion along a solid–liquid interface of a soft microrobot driven by compound magnetic fields	12
Variational-based data-driven model identification of micro resonator systems	12
High throughput microfluidic drug screening system for corneal epithelial wound healing	12
A review of research on RF MEMS for metaverse interactions	12
Three-dimensional AC electroosmotic micropump with high power density	11
Study of super flexible mixed phase piezoresistive pressure sensor	11
Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures	11
Direct current triboelectric nanogenerators: a review	11
Quadrant kirigami-type electrothermal MEMS actuator with multi-degree-of-freedom morphing capability	11
Acoustically driven MEMS mirror enhanced by a parallel Helmholtz resonator array	11
Numerical simulation of a nebulizer with multiple orifices	11
Ultra-high sensitive SAW pressure sensor based on anisotropic LiNbO 3 film	11
The effect of quaternary ammonium salts with different chain lengths on copper filling behavior in blind holes of printed circuit board	10
Corrigendum: Fabrication of FP-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process (2019 J. Micromech. Microeng.	10
Edge smoothness enhancement of digital lithography based on the DMDs collaborative modulation	10
Temperature and pressure effects on microchannels dimensions in hot embossing	10
A rapid method for fabricating and replicating microlens array structures	10
Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors	10
Research on acoustic sensing device based on microfiber knot resonator	10
Producing micro impressions on Al6061 under alumina-mixed deionized water as dielectric during electric discharge machining	10
Efficient heat dissipation with hybrid composite-based microfluidic heat sinks in flexible electronics	9
Semi-reflective visor-based compact head-worn light field display	9
Dual-diaphragm structural design and validation for overload protection in MEMS piezoresistive absolute pressure sensors	9
Nonlinear design, analysis, and testing of a single-stage compliant orthogonal displacement amplifier with a single input force for microgrippers	9
A novel approach to determining the hydrodynamic resistance of droplets in microchannels using active control and grey-box system identification	9
Noninvasive measurement of temperature for simulated tissue based on piezoelectric micromachined ultrasonic transducers	9
Flexible flow sensors-enabled intelligent life	9
Non-faradaic electrochemical impedance spectroscopy analysis of C-MEMS derived bio-modified glassy carbon electrode	9
Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer	9

Low-voltage electrostatic manipulation of microparticles using a single carbon fiber probe	9
Flexible pressure/temperature sensors with heterogeneous integration of ultra-thin silicon and polymer	9
Efficient annular aperture array (AAA) filter for thermophotovoltaic by sidewall lithography	9
Fast analysis of MEMS micromirror based on multi-physical electro-mechanical-damping coupling method	9
Design, development, and testing of active valve piezo-hydraulic pump	8
Nanofluidic gas/liquid switching utilizing a nanochannel open/close valve based on glass deformation	8
Carbon dioxide reduction utilizing a bismuth halide perovskite as immobilized photocatalyst in a 3D printed microreactor	8
Additive biofabrication of silicone scaffolds for tissue engineering: from mold casting to direct ink writing	8
Unsealed piezoelectric MEMS speaker with rigid-flexible composite membrane	8
Micro- and nanoscale patterning of fluorescent materials via coaxial electrohydrodynamic jet printing	8
Performance analysis of synthetic jet micropump based on double piezoelectric actuators	8
Precise in-situ fabrication of perovskite single crystal arrays via cosolvent based electrohydrodynamic printing	8
A penetration efficiency model for the optimization of solid conical microneedles’ geometry	8
Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer	8
Evaluation of Bosch processing and C4F8 plasma deposition at cryogenic temperatures	8
Formation of silver wires embedded in hydrogels using femtosecond laser ablation and electroplating for strain sensing	8
A highly accurate analytical method for determination of the vibrational frequency of N/MEMS with electrostatic and van der Waals interaction forces	8
Knudsen force based double beam MEMS vacuum pressure sensor	8
Topology optimization of compact micromixers driven by localized velocity objectives	8
Position-insensitive mass estimation in cantilever MEMS via Fejér-weighted mode averaging	8
Manufacturing of hydraulically steerable actuator using closed molding and core template for vascular intervention guidewires	7
Design and performance evaluation of a single piezoelectric stacked drive jet dispensing valve	7
Micromechanical piezoelectric micromachined ultrasonic transducer array package enhancement with integrated frontliners	7
Hierarchical integration of nanopillars and nanochannels in a nanofluidic device for single-nanoparticle detection	7
Investigating capacitive flexible tactile sensor with a wide measuring range using PVDF and conductive sponge	7
Design optimization and experimental verification of ultrasonic stack for micro hot embossing of polymers	7
Review of scaling effects on physical properties and practicalities of cantilever sensors	7
Nested 4-/8- spokes architecture for mode matching in (100) silicon disk resonator	6
Development of piezoresistive flexible sensor with dual-height cylindrical microstructure surfaces to achieve vehicle vibration monitoring	6
Efficient strategy for frequency design and bandwidth extension of curved piezoelectric ultrasonic micromachined transducers	6
Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation	6
Damping of 3D-printed polymer microbeam resonators	6
Design, fabrication and test of electrothermal microgripper based on 304 stainless steel	6
An analytical model of three-hot-wire acoustic particle velocity sensors	6
CMOS microsensor packaging for use in aqueous media	6
Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout	6
Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application	6
Splashing of droplet under the vibration effect of flexible membrane	6
Numerical simulation and structural optimization of serpentine curved micromixer	6
Thermal and hydraulic performance of Al alloy-based 3D printed triangular microchannel heatsink governed by rough walls with graphene and alumina nanofluids as working liquid	6
Mixed particles separation based on a cylindrical microfluidic centrifuge	6
Low-cost and sensitive thermal microflow sensor with replaceable capillary tube for microfluidic application	6
Design and analysis of a dual-actuator force-balanced MEMS pressure sensor	6
Micro/nano-transfer printing of gold thin films via atomic diffusion bonding: effects of air-exposure time and stamp modulus	6
Printable cobalt–nickel vanadate-based ozone gas sensors, operating at low temperatures	6
Displacement-controlled coining of large arrays of gold stud bumps	6
Effect of SiO2 protective layer on LiNbO3 structured SAW resonators and temperature characteristics study	6
PDMS micro check valve with 3D valve disk for reducing fluid resistance	6
Studies on drug delivery from dissolving microneedle and its uptake in tissue	6
Near-zero stiffness MEMS accelerometer utilizing electrothermal buckling in a closed loop configuration	6
Wet Spinning Manufacturing and mechanical-electrical properties investigation for thermoplastic polyurethane-carbon black flexible fibers	6
A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance	6
Micromachining of nickel and nickel-based alloy surfaces using composite signal	6
Numerical simulation of wet etching for R angle of fine metal mask	6
Wafer level hermetic bonding and packaging using recrystallized parylene	6
Highly sensitive flexible capacitive pressure sensor with structured elastomeric dielectric layers	6
Large area nanoscale patterning of functional materials using organosilicate ink based nanotransfer printing	5
Microfabricated electrochemical oxygen sensors with hydrogel electrolytes for in vivo applications	5
Fabrication and characterization of suspended La0.7Sr0.3MnO3 nanofibers for high-sensitive and fast-responsive infrared bolometer	5
High-performance transparent heater with Ag paste-based nanomesh electrodes	5
A compact and reconfigurable C-band DGS-based power divider using RF MEMS capacitive switch	5
Electrohydrodynamic jet printed templates for hot embossing of microfluidic devices	5
Flow behaviors and transmission characteristics of Knudsen pump with blocked microchannels	5
Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study	5
Fused silica microchannel fabrication with smooth surface and high etching selectivity	5
Self-calibration of micro-components based on manipulator guidance	5
Micromachined piezoelectric Lamb wave resonators: a review	5
Active vibration reduction of tool holder in hole turning process using machine learning with the assistance of magnetic force	5
CMUT modeling—extension to soft boundaries and thick plates	5
A simple way to predict the flip–chip gap	5
A high-quality dual-port surface acoustic wave intermediate frequency filter	5
Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001)	5
Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure	5
Fabrication of microneedles using wire electric discharge machining and improving surface quality by electrochemical polishing	5
Large stroke electromagnetic redundant actuated six degrees-of-freedom parallel compliant micropositioning stage	5
Heterogeneous micro-architectonic integration of SU-8 and highly entangled polyacrylamide hydrogel to realize cut-resistant soft superhydrophobic surfaces	5
Fabrication and integration of diffraction gratings on electrostatic stepper motor for imaging spectrometer applications	5
Surface reaction between immobilized magnetic microbead-tagged antibodies and electroosmotic flow-driven antigens in a microfluidic device for a realistic higher Damkohler number – a numerical approac	5
A novel electromagnetic microactuator with a stainless steel mas-spring structure	5
The effect of DRIE notching on field emission enhanced breakdown in SOI based MEMS electrodes	5

Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system	5
Diamond ICP-DRIE etching technology with PECVD SiO 2 as mask	5
A low-cost 3D-printing based rapid fabrication procedure for modular microfluidic platform	5
High-frequency and low-loss SAW devices based on LiTaO3/Sapphire hetero-structure	5
Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation	5
Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment	4
Accurate holographic cytometry using three-dimensional hydrodynamic focusing	4
Manufacturing and measurement of CMOS-MEMS-based micro thermoelectric generators with long-length thermocouples	4
Inverse design of MEMS micro-beam resonators using physics-guided machine learning framework	4
Transparent glass force plate with CrN strain gauges featuring a notch structure	4
Nanosecond pulsed laser transmission welding of cyclic olefin copolymer	4
Noncontact MEMS thermal flow sensors integrated in glass microfluidic chemical chip	4
On the design of a two-way piezoelectric MEMS microspeaker based on a multi-shape cantilever array for high-frequency applications	4
Selective metallic reinforcement of silver nanowire junctions for improving the electrical conductivity of transparent electrodes	4
Optimisation of neural network hyperparameters for predictive modelling in laser micromachining of biopolymers	4
Fabrication of micro-ultrasonic phased array electrode via electric field-driven printing method	4
Characterization of crystallized thick, highly doped PECVD a-Si:H layers for fabrication of surface micromachined MEMS inertial sensors	4
A numerical modeling approach to estimate the piezoresistance of diffused resistors with experimental validation	4
High-reliability circular-contact RF MEMS switches in silicon hermetic package	4
A novel integrated stir–ultrasonic–squeeze casting route for fabricating AA6061-based metal matrix hybrid nanocomposites with enhanced tribomechanical properties	4
Study on the mechanism of glass-SiC-glass anodic bonding process	4
Zinc film anodes for air microbatteries: fabrication, approaches, and utilization optimization	4
Micromixing strategies for efficient mixing processes: a comprehensive review	4
Integrated cooling system for microfluidic PDMS devices used in biological microscopy studies	4
Investigation on drag reduction of micro-structured PDMS film with self-replenishing bubble using water electrolysis	4
High-accuracy prediction of microcantilever sensor for fluid detection: simulation to deep learning	4
Design optimization of an electrothermal MEMS microgripper with integrated sensing for enhanced gripping stroke performance	4
Determining frequency-dependent moduli and residual stresses in parylene-C thin films using a microcantilever array	4
Innovating in-situ characterization: a comprehensive measurement system for measuring the ZT and the contact resistance of vertical thermolegs exploiting the vertical transfer length method	4
3D printing-based microfluidic devices in fabric	4
On the design of piezoelectric actuator for 1D MEMS scanning mirror applications	4
Design and fabrication of lithium niobate asymmetrical mode resonators toward C-band and Ku-band	4
A novel electromagnetic micropump with PDMS membrane supported by a stainless-steel microstructure	4
3D simulation estimation and experimental validation of droplet generation in CFD-based flow-focusing microfluidic chips	4
A novel micro-device for simultaneous separation-trapping and double-trapping of particles by using dielectrophoresis: numerical and experimental study	4
Flow-through microfluidic relative permittivity sensor using highly-doped silicon sidewall electrodes	4
Development of an EGFET microsensor with 3D structure for high-specificity cardiac troponin I detection	4
Laser drilling of stainless steel foil with reduced sidelobe ablation using a spatially filtered Bessel–Gauss beam	4
A 3D-printed spiral actuator for focus adjustment in circumferential scanning endomicroscopy	4
Experimental and simulation investigation for imprinting and buckling of V-groove/wrinkles hierarchical array	4
Micro-gas sensor with a suspended micro-heater for ammonia gas detection	4
Combination of anti-miR19a-3p polyplex plus doxorubicin for breast cancer in 2D culture and apoptosis assay in 3D spheroids in a microwell device	4
MEMS—suspended gate field effect transistor (SGFET) accelerometer process integration with parylene flexure and plasma doping	4
Sub-10 nm metal nanogaps with high SERS performance via a novel conformal coating process	4
High thickness material lift-off using multi-layer photoresist	3
A non-invasive and high precision sensor for in-situ temperature monitoring of cells	3
Corrigendum: Adherable temperature sensor to a porous structure of fiber via reduced graphene oxide and poly(diallyldimethylammonium chloride) complex (2022 J. Micromech. Microe	3
Characteristics of an antistatic semiconductor bridge based on micro/nano processing techniques	3
Development of crystallized thick, highly doped a-Si:H layers for surface micromachining of MEMS inertial sensors	3
Preparation of robust superhydrophobic surface on PET substrate using Box-Behnken design and facile sanding method with PTFE powder	3
A novel MEMS inertial switch with frictional electrode	3
A novel microfluidic viscometer for measuring viscosity of ultrasmall volumes of Newtonian and non-Newtonian liquids	3
An A 0 mode Lamb-wave AlN resonator on SOI substrate with vertically arranged double-electrodes	3
Improved ultra-precision machining of free-curve V-groove arrays via C -axis rotating diamond cutting and look-ahead acceleration control	3
A two-channel ultrasonic flowmeter based on AlN piezoelectric micromachined ultrasonic transducers arrays with improved cross-correlation method	3
Design and optimization of electrode-integrated microfluidic chips for enhanced electrochemical impedance spectroscopy assessments	3
Microfluidics in cardiac microphysiological systems: a review	3
Topology optimization design of compliant amplification mechanisms with low parasitic displacement	3
Physics-guided machine-learning enhanced electrostatic actuated method for in-situ measurement of Young’s modulus	3
A thermal microfluidic actuator based on a novel microheater	3
Enhanced automatic sorting of liquid crystal droplets via a rotating radial light pattern in an optoelectronic tweezers system	3
Quantifying and correcting tilt-related positioning errors in microcantilever-based microelectromechanical systems probes	3
Flow-insensitive micro-thermal conductivity detector with semi-diffusion gas channel	3
Cooling high heat flux with flow boiling in 2D-structured radial microchannel heat sink	3
Study on the cause of pore defects processed by focused ion beam milling on high roughness surface	3
Programmable intelligent liquid matter: material, science and technology	3
Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces	3
Modeling simulation and experimental study of electromagnetic microvibration energy capture systems	3
An improved Bi-LSTM framework based on DWT-MTF-2DCNN for multi-condition temperature prediction in microchannel heat exchanger	3
Corrigendum: Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique (2024 J.	3
Surface acoustic wave bound state in the continuum for 1200 °C high temperature sensing	3
Evaluation of solvent releases from microfluidic devices made of cycloolefin polymer by temperature-desorption mass spectrometry	3
Vapor etching to avoid micro-masking by gas-bubbles in wet release of MEMS	3
Applications of capacitive micromachined ultrasonic transducers combined with micro- and nanomaterials: a review	3
Fabrication of Cu/SiC composite microgears by microelectroforming using PDMS-Cu conductive molds	3
Adaptive frequency-stabilization of MEMS oscillators using mode coupling	3
Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique	3
Rapid 3D micro-fabrication using freestanding hybrid mask-assisted electrospray	3
High-density stretchable microelectrode array based on multilayer serpentine interconnections	3
Ultra-precision diamond grinding of vapour cells in silicon for quantum technology	3
Precision optimization of femtosecond laser micromachining for endovascular neural interfaces based on RSM and machine learning	3
The lifetime prediction and enhancement of RF MEMS switches	3
A nested cantilever piezoelectric MEMS speaker	3
On-wafer compression test method with endogenous mechanical compensation mechanism for buckling behaviour and etching quality characterization	3
Development of a magnetoelectric microgenerator to harvest electrical energy based on electromagnetic effect	3
MEMS audio speakers *	3
High-Q terahertz bandstop filter via cuboid frame structure	3
Capillary enhanced phase change in a microfabricated self-oscillating fluidic heat engine (SOFHE)	3
An universal microfluidic dual-mode shear droplet preparation structure	2
Fabrication of a piezoelectric micromachined ultrasonic transducer (PMUT) with dual heterogeneous piezoelectric thin film stacking	2
Microparticle trapping at the focal spot using a dual-focus annular CMUT array on a free surface	2
Considering microtexture geometry to improve micro-injection molding fidelity	2
Inline microfluidic thermal conductivity sensor using a suspended highly-doped silicon heater	2
Numerical simulation and performance optimization of underwater piezoelectric artificial lateral line sensor for flow velocity sensing	2
DMD maskless digital lithography based on stepwise rotary stitching	2