Journal of Micromechanics and Microengineering

Article	Citations
Silicon electro-optic micro-modulator fabricated in standard CMOS technology as components for all silicon monolithic integrated optoelectronic systems *	280
Design and engineering of Mn conical sculptured thin films as both electrodes for a gas sensor: ionization and field emission studies	63
MEMS actuators for biomedical applications: a review	54
RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook	53
Technology evolution from micro-scale energy harvesters to nanogenerators	53
Silicon MEMS inertial sensors evolution over a quarter century	43
Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era	42
Highly sensitive, reliable and flexible piezoresistive pressure sensors based on graphene-PDMS @ sponge	36
Development of in vitro 2D and 3D microelectrode arrays and their role in advancing biomedical research	35
Advances in precision micro/nano-electroforming: a state-of-the-art review	35
Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators	32
Fabrication and characterization of a fully conventionally machined, high-performance porous-media electrospray thruster	31
Terahertz MEMS metadevices	28
Optimization and characterization of direct UV laser writing system for microscale applications	28
Real-time physiological sensor-based liver-on-chip device for monitoring drug toxicity	28
Recent advances on fabrication of microneedles on the flexible substrate	23
Development of high-sensitivity piezoresistive pressure sensors for −0.5…+0.5 kPa	22
CMOS-MEMS technologies for the applications of environment sensors and environment sensing hubs	20
Ultra-low power signal conditioning system for effective biopotential signal recording	20
A rotating permanent magnetic actuator for micropumping devices with magnetic nanofluids	19
Monitoring of physiological sounds with wearable device based on piezoelectric MEMS acoustic sensor	18
A review of MEMS-based metal oxide semiconductors gas sensor in Mainland China	17
Inlaid microfluidic optics: absorbance cells in clear devices applied to nitrite and phosphate detection	17
Induced-charge electrokinetics in microfluidics: a review on recent advancements	17
A high-stability triboelectric nanogenerator with mechanical transmission module and efficient power management system	16

Evaluation of the impact of abnormal grains on the performance of Sc0.15Al0.85N-based BAW resonators and filters	16
RF MEMS electrostatically actuated tunable capacitors and their applications: a review	16
An ultrasonic flowmeter for liquid flow measurement in small pipes using AlN piezoelectric micromachined ultrasonic transducer arrays	15
Linear parametric amplification/attenuation for MEMS vibratory gyroscopes based on triangular area-varying capacitors	15
Highly responsive screen-printed asymmetric pressure sensor based on laser-induced graphene	15
Integrated 3D printed microfluidic circuitry and soft microrobotic actuators via in situ direct laser writing	15
High-sensitivity liquid-metal-based contact lens sensor for continuous intraocular pressure monitoring	15
The impact of laser energy on the photoresponsive characteristics of CdO/Si visible light photodetector	14
Numerical simulations of 22% efficient all-perovskite tandem solar cell utilizing lead-free and low lead content halide perovskites	14
Frequency tunable resonant magnetoelectric sensors for the detection of weak magnetic field	14
Ultra-small pressure sensors fabricated using a scar-free microhole inter-etch and sealing (MIS) process	14
Experimental study on two-phase boiling in wavy copper microchannels fabricated with ultrafast laser micromachining	13
A 350 °C piezoresistive n-type 4H-SiC pressure sensor for hydraulic and pneumatic pressure tests	13
Programmable droplet actuating platform using liquid dielectrophoresis	13
Advances in micro lithium-ion batteries for on-chip and wearable applications	12
Modeling and fabrication of electrostatically actuated diaphragms for on-chip valving of MEMS-compatible microfluidic systems	12
A stiffness-tunable MEMS accelerometer	12
Power enhancement of MEMS vibrational electrostatic energy harvester by stray capacitance reduction	12
Non-intrusive DC voltage measurement based on resonant electric field microsensors	11
An Integrative 3D printing method for rapid additive manufacturing of a capacitive force sensor	11
Development of high-sensitivity pressure sensor with on-chip differential transistor amplifier	11
A reconfigurable and portable acoustofluidic system based on flexible printed circuit board for the manipulation of microspheres	11
Development of MEMS composite sensor with temperature compensation for tire pressure monitoring system	11
Bistable Micro Caps Fabricated by Sheet Metal Forming	11
Large oscillation of electrostatically actuated curved beams	11
Development of 4D-printed shape memory polymer large-stroke XY micropositioning stages	11
Oscillation FPCB micromirror based triangulation laser rangefinder	11
Experimental and simulation study of flow patterns in the combined flow focusing and T-junction device	11
From CAD to microfluidic chip within one day: rapid prototyping of lab-on-chip cartridges using generic polymer parts	10
Mechanical characterization of polydimethylsiloxane (PDMS) exposed to thermal histories up to 300 °C in a vacuum environment	10
Piezoelectric approaches for wearable continuous blood pressure monitoring: a review	10
SAW-driven self-cleaning drop free glass for automotive sensors	10
Flexible ZnO thin film acoustic wave device for gas flow rate measurement	10
Sensing performance of room temperature operated MEMS gas sensor for ppb level detection of hydrogen sulfide: a review	10
Multi-step microfludic reactor for the synthesis of hybrid nanoparticles	10
Nanoindentation behavior of UV-curable resist and its correlation with patterning defect in nanoimprint lithography	10
Three-dimensional Fabry–Pérot cavities sculpted on fiber tips using a multiphoton polymerization process	10
Extracting white blood cells from blood on microfluidics platform: a review of isolation techniques and working mechanisms	10
A novel rare cell sorting microfluidic chip based on magnetic nanoparticle labels	10
Effect of film deposition rate on the thermoelectric output of tungsten-rhenium thin film thermocouples by DC magnetron sputtering	10
Micro ultrasonic machining hemispherical mold for MEMS resonator gyroscope using a novel ultraprecise ceramic entire-ball tool	10
Ultrafast laser in fabrication of micro hemispherical resonators with quality factor over millions	10
Direct current triboelectric nanogenerators: a review	9
Design and experimental investigation of a parallel flexure hinge-based 3D elliptical vibration-assisted cutting mechanism	9
MEMS piezoelectric resonant microphone array for lung sound classification	9
Development of mechanically-robust piezoelectric micromachined ultrasonic transducer based on island-shaped monocrystalline PZT thin film partially covered with polyimide	9
Imaging of simulated muscle based on single chip of AlN piezoelectric micromachined ultrasonic transducer	9
A dielectrophoresis-based microfluidic chip for trapping circulating tumor cells using a porous membrane	9
Fabrication and characterization of micro electromagnetic linear actuators	9
Hybrid electrical and optical neural interfaces	9

Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics	9
A dual-frequency piezoelectric micromachined ultrasound transducer array with low inter-element coupling effects	9
Sound dissipation from plate-type resonators excited in non-conventional transversal modes in liquids	8
Surface activation of poly(methyl methacrylate) for microfluidic device bonding through a H2O plasma treatment linked with a low-temperature annealing	8
An implantable microelectrode array for chronic in vivo epiretinal stimulation of the rat retina	8
Second flexural and torsional modes of vibration in suspended microfluidic resonator for liquid density measurements	8
Design and investigation of dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal pocket TFET device as a label-free biosensor	8
Bipolar resistive switching properties of TiO x /graphene oxide doped PVP based bilayer ReRAM	8
Vibration analysis of MEMS vibrating mesh atomizer	8
Curved passive mixing structures: a robust design to obtain efficient mixing and mass transfer in microfluidic channels	8
Application of the evolutionary kinetic Monte Carlo method for the simulation of anisotropic wet etching of sapphire	8
Microfluidic chip fabrication and performance analysis of 3D printed material for use in microfluidic nucleic acid amplification applications	8
A pulsed freestanding triboelectric nanogenerator and power management circuit to harvest rotation energy from an automobile brake	8
Microelectroforming of freestanding metallic microcomponents using silver-coated poly(dimethylsiloxane) molds	8
Enhancement of passive mixing via arc microchannel with sharp corner structure	8
Analysis of mechanical deformation effect on the voltage generation of a vertical contact mode triboelectric generator	8
A review of geometric and structural design for reliable flexible electronics	8
Noise model considering electrical feed-through under force rebalance closed-loop detection of MEMS gyroscope	7
Design and manufacture of a micro-tensile testing machine for in situ optical observation and DIC analysis: application to 3D-printed and compression-molded ABS	7
Liquid metal droplet-enabled electrocapillary flow in biased alternating electric fields: a theoretical analysis from the perspective of induced-charge electrokinetics	7
An on-chip test structure to measure the Seebeck coefficient of thermopile sensors	7
Low cost technology for the fabrication of anti-counterfeiting microtaggants	7
Underwater anechoic layer with parallel metallic plate insertions: theoretical modelling	7
Design and material for a patternable polysiloxane acrylate-based penetrating intracortical neural probe	7
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection	7
Underwater laser micro-milling of fine-grained aluminium and the process modelling by machine learning	7
Process and device simulations aimed at improving the emitter region performance of silicon PERC solar cells	7
High-accuracy differential resonant pressure sensor with linear fitting method	7
Microfluidic fabrication of stable collagen microgels with aligned microstructure using flow-driven co-deposition and ionic gelation	7
A novel piezoelectric RF-MEMS resonator with enhanced quality factor	7
Design, modeling and experimental validation of a micro cantilever beam with an electro-controllable twisting ability	7
Investigations on piezo actuated micro XY stage for vibration-assisted micro milling	7
Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding	6
High-performance transparent electromagnetic interference shielding film based on metal meshes	6
Temperature stable rare earth magnetic powder Sm-Fe-N based micro magnets with remanence enhanced by easy axis alignment and its application in MEMS actuator	6
Recent trends in structures and applications of valveless piezoelectric pump—a review	6
Integration of buried piezoresistive sensors and PZT thin film for dynamic and static position sensing of MEMS actuator	6
Micromechanics for energy generation	6
Micro-wrinkle strategy for stable soft neural interface with optimized electroplated PEDOT:PSS	6
Atmospheric micro-sized cold plasma jet created by a long and ultra-flexible generator with sputtered gold thin film electrode	6
On-chip micro pressure sensor for microfluidic pressure monitoring	6
Development of a piezoelectric pump with unfixed valve	6
Basic concepts of biological microparticles isolation by inertia spiral microchannels in simple terms: a review	6
A resonant high-pressure sensor based on dual cavities	6
Laser pyrolysis for controlled morphing and chemical modification on 3D microlattices	6
Research on acoustic sensing device based on microfiber knot resonator	6
PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation	6
Crystal plasticity finite element simulation and experimental investigation of the micro-upsetting process of OFHC copper	6
On the PZT/Si unimorph cantilever design for the signal-to-noise ratio enhancement of piezoelectric MEMS microphone	6
Micromechanical resonant cantilever sensors actuated by fringing electrostatic fields	6
Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control	6
Effects of both the drive- and sense-mode circuit phase delay on MEMS gyroscope performance and real-time suppression of the residual fluctuation phase error	6
Solving curing-protocol-dependent shape errors in PDMS replication	6
Frequency characteristics and thermal compensation of MEMS devices based on geometric anti-spring	6
A microfluidic chip integrated with 3D sidewall electrodes and wavy microchannel for cell focusing and separation	6
Hermetic chip-scale packaging using Au:Sn eutectic bonding for implantable devices	6
Micromachined threshold inertial switches: a review	6
Motion of generated dumbbell-shaped satellite droplets during liquid dielectrophoresis	6
Electrofluidic displays based on inkjet printing and phase change filling	6
A comprehensive review on non-active micro-pumps for microfluidic platforms	6
Analysis of the dynamic behavior of a V-shaped electrothermal microactuator	6
Shoulder fillet effects in strength distributions of microelectromechanical system components	5
Acoustic wave amplification with thin film silicon bonded on lithium niobate	5
Elastic-plastic properties of mesoscale electrodeposited LIGA nickel alloy films: microscopy and mechanics	5
Unapodization: a method to produce laterally uniform surface acoustic waves for acoustofluidics	5
A dual-driven biomimetic microrobot based on optical and magnetic propulsion	5
Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application	5
High-throughput acoustofluidic microchannels for single cell rotation	5
Mode localized artificial hair sensor with enhanced linearity applied for dual-axis air flow sensing	5
A cantilever-based resonator for reconfigurable nanomechanical computing	5
Decomposition of pattern distortions by the Spread polynomial model in roll-to-sheet reverse offset printing	5
Fractional order zero phase error tracking control of a novel decoupled 2-DOF compliant micro-positioning stage	5
Impact of support material deformation in MEMS bulk micromachined diaphragm pressure sensors	5
Experimental amplitude and frequency control of a self-excited microcantilever by linear and nonlinear feedback	5
Derivation of analytical expressions for the stress/strain distributions, bending plane and curvature radius in multilayer thin-film composites	5
Fabrication of ultra-high-aspect-ratio nano-walls and nano-structures on silicon substrates	5
Development of droplet microfluidics capable of quantitative estimation of single-cell multiplex proteins	5
MEMS triaxial gyroscope using surface and sidewall doping piezoresistors	5
Picoliter liquid handling at gas/liquid interface by surface and geometry control in a micro-nanofluidic device	5
Facile fabrication of sensitivity-tunable strain sensors based on laser-patterned micro-nano structures	5

Removal of recast layer in the laser drilled film cooling holes by a two-step inner streaming electrochemical technique	5
Volume-preserving strategies to improve the mixing efficiency of serpentine micromixers	5
Micro electric discharge machining (μ-EDM) of polymer nanocomposites modified by graphene nanoplatelets/carbon using rotating electrode tool	5
Direct polymer microcantilever fabrication from free-standing dry film photoresists	5
A programmable 3D printing method for magnetically driven micro soft robots based on surface tension	5
MEMS device for applying shear and tension to an epithelium combined with fluorescent live cell imaging	5
Mechanical reliability of silicon microstructures	5
Development of microfluidic cartridge for culture-free detection of Staphylococcus aureus in blood	5
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization	5
An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators	5
A review of assembly techniques for fabricating twisted bilayer graphene	5
Geometry effects on flow characteristics of micro-scale planar nozzles	5
Stable 3D inertial focusing by high aspect ratio curved microfluidics	5
Material strategies to enhance the performance of piezoelectric energy harvesters based on lead-free materials	5
An ultra-thin transparent multi-functional sensor based on silk hydrogel for health monitoring	5
A monolithic Si-micromachined four-stage Knudsen pump for µGC applications	5
Detection of cardiac biomarkers in serum using a micro-electromechanical film electroacoustic resonator	5
A perspective of active microfluidic platforms as an enabling tool for applications in other fields	5
Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application	5
Fabrication of oil–water separation copper filter by spatial light modulated femtosecond laser	5
A microfluidic platform enabling real-time control of dynamic biochemical stimuli to biological cells	5
Fabrication of silicon electrodes used for micro electrochemical machining	5
The development of a pressure sensor using a technique for patterning silver nanowires on 3-dimensional curved PDMS membranes	5
Fused silica microchannel fabrication with smooth surface and high etching selectivity	5
Burr removal from high-aspect-ratio micro-pillars using ultrasonic-assisted abrasive micro-deburring	5
Compact tunable mid-infrared Fabry–Pérot filters actuated by liquid crystal elastomers	5
Feasibility study of a micro-electro-mechanical-systems threshold-pressure sensor based on parametric resonance: experimental and theoretical investigations	5
A wireless passive pressure sensor using microstructured ferromagnetic films with tunable effective permeability	5
Sub-micrometer plasma-enhanced chemical vapor deposition using an atmospheric pressure plasma jet localized by a nanopipette scanning probe microscope	5
Fluid control with hydrophobic pillars in paper-based microfluidics	5
A predictive model for electrostatic energy harvesters with impact-based frequency up-conversion	5
Conventional surface micromachining process for the fabrication of a linear optical phased array based on piston micromirrors	5
Energy action model of spark assisted chemical engraving (SACE) for improving surface quality of micro cavities in ZrO2 ceramics	5
Leak-free integrated microfluidic channel fabrication for surface plasmon resonance applications	5
Shock-free ion transmission in a skimmer-based MEMS mass spectrometer vacuum interface	4
Micro-machined stent flow sensor for detecting breathing and heartbeat from airflow in airway of rat	4
Direct macro-to-micro interface method for microfluidics	4
Surface roughness improvement of 3D printed microchannel	4
A position sensing method for 2D scanning mirrors	4
Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation	4
Magnetically propelled soft micromachines with multipatterned fabrications	4
Distortion mechanism of patterning positions in the soft roller printing process for realizing large-area overlay printing	4
Programmable intelligent liquid matter: material, science and technology	4
Progress of biomechanical energy harvesters for wearable electronic applications	4
Electromicrofluidic device with integrated PDMS microchannel and laser-induced graphene electrodes for electrochemical detection of cardiac biomarker in a point-of-care platform	4
Micromachining of polymers using atmospheric pressure inductively coupled helium plasma localized by a scanning nanopipette probe microscope	4
Self-supporting 3D printed flexible liquid metal electrodes for electrostatically microfluidic valves	4
An ultrafast response and precisely controllable soft electromagnet actuator based on Ecoflex rubber film filled with neodymium-iron-boron	4
Fabrication and characterization of annular-shaped piezoelectric micromachined ultrasonic transducer mounted with Pb(Zr,Ti)O3-based monocrystalline thin film	4
Droplet spreading nanoimprinting method for micro-/nano-fabrication	4
Strain engineering of graphene nano-resonator	4
Bonding Methods for Chip Integration with Parylene Devices	4
Study on soft hot embossing process for making microstructures in a cyclo-olefin polymeric (COP) film	4
A multi-scale E-jet 3D printing regulated by structured multi-physics field	4
A sheathless high precise particle separation chip integrated contraction–expansion channel and deterministic lateral displacement	4
Dynamic behaviours of double-ended tuning fork based comb-driven microelectromechanical resonators for modulating magnetic flux synchronously	4
Implantable double-layer pump chamber piezoelectric valveless micropump with adjustable flow rate function	4
Active real-time electric field control of the e-jet in near-field electrospinning using an auxiliary electrode	4
Recent advances in power supply strategies for untethered neural implants	4
Microfluidic biochip platform sensitized by AgNPs for SERS based rapid detection of uric acid	4
Sol–gel-derived nanoparticles coated liquid entities: liquid marbles, liquid plasticine, and flat interface	4
Tactile samples with variable surface textures to investigate tactile perception characteristic	4
The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification	4
Measurement of the electric permittivity using Bleustein–Gulyaev wave sensor	4
Super-wetting enabled by an array of SU-8 micro-pillars etched with ion-beam	4
Adhesion of Flk1-expressing cells under shear flow in phospholipid polymer-coated immunoaffinity channels	4
Development of MEMS-based piezoresistive 3D stress/strain sensor using strain technology and smart temperature compensation	4
Enhancing the performance of dielectric elastomer actuators through the approach of distributed electrode array with fractal interconnects architecture	4
2D FPCB micromirror for scanning LIDAR	4
Performance enhancement of piezoelectric bulk mode MEMS mode-matched gyroscopes based on a secondary phase feedback loop	4
Wafer-bonded surface plasmon waveguide sensors with in-plane microfluidic interfaces	4
Review of scaling effects on physical properties and practicalities of cantilever sensors	4
An efficient macro model for CMOS-MEMS thermal wind speed sensor	4
Mechanical characteristics of laminated film vibrator using an ultra-thin MEMS actuator	4
Optimization of x-ray lithography conditions for fabrication of large arrays of high-aspect-ratio submicron pores	4
Miniature and tunable high voltage-driven soft electroactive biconvex lenses for optical visual identification	4
A review of rarefied gas flow in irregular micro/nanochannels	4
A MEMS dynamic mechanical analyzer for in situ viscoelastic characterization of 3D printed nanostructures	4
Optimization of the co-axial dispensing nozzle of a 3D bioprinter for the fabrication of tubular structures with micro-channel encapsulation	4
A piezoelectric micromachined ultrasonic transducer with mechanical grooves	4
Facile fabrication of binary wettability patterned microstructure for microfluidics	3
Propulsion reversal in oscillating-bubble powered micro swimmer	3
Efficient system-level simulations of thermal wind sensors considering environmental factors	3
3D integrated coreless microtransformer processed by femtosecond laser micro/nano fabrication	3
Flexible pressure and temperature dual-modality sensor based on stretchable electrode for human–machine interaction	3
Implanted microelectrode arrays for evaluating inhibited seizure modulated by light-responsive hydrogel	3
Low-cost and low-topography fabrication of multilayer interconnections for microfluidic devices	3
High-density stretchable microelectrode array based on multilayer serpentine interconnections	3
A simplified quasi-2D model for gas flow in microchannels and microtubes	3
Irreversible, self-aligned microfluidic packaging for chronic implant applications	3
Etch-less microfabrication of structured TiO2 implant coatings on bulk titanium grade 23 by direct lithographic anodic oxidation	3
Electric field sensing characteristics of ZnO/SiO2/Si surface acoustic wave devices	3
An A0 mode Lamb-wave AlN resonator on SOI substrate with vertically arranged double-electrodes	3
Scanning digital oil immersion lithography providing high-speed large area patterning with diffraction limited sub-micron resolution	3
On overtravel and skate in cantilever-based probes for on-wafer measurements	3