Journal of Micromechanics and Microengineering

Article	Citations
Silicon electro-optic micro-modulator fabricated in standard CMOS technology as components for all silicon monolithic integrated optoelectronic systems *	236
Design and engineering of Mn conical sculptured thin films as both electrodes for a gas sensor: ionization and field emission studies	57
MEMS actuators for biomedical applications: a review	52
Technology evolution from micro-scale energy harvesters to nanogenerators	51
Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era	41
RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook	40
Silicon MEMS inertial sensors evolution over a quarter century	34
Development of in vitro 2D and 3D microelectrode arrays and their role in advancing biomedical research	34
Advances in precision micro/nano-electroforming: a state-of-the-art review	31
Highly sensitive, reliable and flexible piezoresistive pressure sensors based on graphene-PDMS @ sponge	31
Fabrication and characterization of a fully conventionally machined, high-performance porous-media electrospray thruster	30
Terahertz MEMS metadevices	25
Optimization and characterization of direct UV laser writing system for microscale applications	25
Real-time physiological sensor-based liver-on-chip device for monitoring drug toxicity	25
Suspended micro/nano channel resonators: a review	25
Direct printing of sub-30 μ m liquid metal patterns on three-dimensional surfaces for stretchable electronics	24
Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators	24
Ultra-low power signal conditioning system for effective biopotential signal recording	19
Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators	18
Highly sensitive ionic pressure sensor based on concave meniscus for electronic skin	18
Development of high-sensitivity piezoresistive pressure sensors for −0.5…+0.5 kPa	18
Recent advances on fabrication of microneedles on the flexible substrate	18
Inlaid microfluidic optics: absorbance cells in clear devices applied to nitrite and phosphate detection	17
A rotating permanent magnetic actuator for micropumping devices with magnetic nanofluids	17
CMOS-MEMS technologies for the applications of environment sensors and environment sensing hubs	16

Induced-charge electrokinetics in microfluidics: a review on recent advancements	15
RF MEMS electrostatically actuated tunable capacitors and their applications: a review	15
Frequency tunable resonant magnetoelectric sensors for the detection of weak magnetic field	14
Monitoring of physiological sounds with wearable device based on piezoelectric MEMS acoustic sensor	14
Linear parametric amplification/attenuation for MEMS vibratory gyroscopes based on triangular area-varying capacitors	14
A high-stability triboelectric nanogenerator with mechanical transmission module and efficient power management system	14
High-sensitivity liquid-metal-based contact lens sensor for continuous intraocular pressure monitoring	14
A review of MEMS-based metal oxide semiconductors gas sensor in Mainland China	13
Integrated 3D printed microfluidic circuitry and soft microrobotic actuators via in situ direct laser writing	13
Highly responsive screen-printed asymmetric pressure sensor based on laser-induced graphene	12
Evaluation of the impact of abnormal grains on the performance of Sc0.15Al0.85N-based BAW resonators and filters	12
Modeling and fabrication of electrostatically actuated diaphragms for on-chip valving of MEMS-compatible microfluidic systems	12
Numerical simulations of 22% efficient all-perovskite tandem solar cell utilizing lead-free and low lead content halide perovskites	12
Power enhancement of MEMS vibrational electrostatic energy harvester by stray capacitance reduction	12
A novel capacitive micro-accelerometer made of steel using micro wire electrical discharge machining method	11
Bistable Micro Caps Fabricated by Sheet Metal Forming	11
Ultra-small pressure sensors fabricated using a scar-free microhole inter-etch and sealing (MIS) process	11
The limits of edge bead planarization and surface levelling in spin-coated liquid films	11
Experimental study on two-phase boiling in wavy copper microchannels fabricated with ultrafast laser micromachining	11
Development of high-sensitivity pressure sensor with on-chip differential transistor amplifier	11
A 350 °C piezoresistive n-type 4H-SiC pressure sensor for hydraulic and pneumatic pressure tests	11
Large oscillation of electrostatically actuated curved beams	11
An Integrative 3D printing method for rapid additive manufacturing of a capacitive force sensor	11
Micro-cantilever sensors for monitoring carbon monoxide concentration in fuel cells	11
A novel rare cell sorting microfluidic chip based on magnetic nanoparticle labels	10
Non-intrusive DC voltage measurement based on resonant electric field microsensors	10
Three-dimensional Fabry–Pérot cavities sculpted on fiber tips using a multiphoton polymerization process	10
Flexible ZnO thin film acoustic wave device for gas flow rate measurement	10
The impact of laser energy on the photoresponsive characteristics of CdO/Si visible light photodetector	10
Mechanical characterization of polydimethylsiloxane (PDMS) exposed to thermal histories up to 300 °C in a vacuum environment	10
Experimental comparison of surface chemistries for biomolecule immobilization on paper-based microfluidic devices	10
Extracting white blood cells from blood on microfluidics platform: a review of isolation techniques and working mechanisms	10
Programmable droplet actuating platform using liquid dielectrophoresis	10
An ultrasonic flowmeter for liquid flow measurement in small pipes using AlN piezoelectric micromachined ultrasonic transducer arrays	10
Development of 4D-printed shape memory polymer large-stroke XY micropositioning stages	10
Experimental and simulation study of flow patterns in the combined flow focusing and T-junction device	10
A stiffness-tunable MEMS accelerometer	10
Sensing performance of room temperature operated MEMS gas sensor for ppb level detection of hydrogen sulfide: a review	9
A dual-frequency piezoelectric micromachined ultrasound transducer array with low inter-element coupling effects	9
Effect of film deposition rate on the thermoelectric output of tungsten-rhenium thin film thermocouples by DC magnetron sputtering	9
Development of mechanically-robust piezoelectric micromachined ultrasonic transducer based on island-shaped monocrystalline PZT thin film partially covered with polyimide	9
From CAD to microfluidic chip within one day: rapid prototyping of lab-on-chip cartridges using generic polymer parts	9
Development of an active high-density transverse intrafascicular micro-electrode probe	9
Nanoindentation behavior of UV-curable resist and its correlation with patterning defect in nanoimprint lithography	9
Oscillation FPCB micromirror based triangulation laser rangefinder	9
Advances in micro lithium-ion batteries for on-chip and wearable applications	9
Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement	9
A reconfigurable and portable acoustofluidic system based on flexible printed circuit board for the manipulation of microspheres	9
Development of MEMS composite sensor with temperature compensation for tire pressure monitoring system	9
Ultrafast laser in fabrication of micro hemispherical resonators with quality factor over millions	9

Localized modulus-controlled PDMS substrate for 2D and 3D stretchable electronics	8
Fabrication of a microcantilever-based aerosol detector with integrated electrostatic on-chip ultrafine particle separation and collection	8
Nanomanufacturing of biopolymers using electron and ion beams	8
Micro ultrasonic machining hemispherical mold for MEMS resonator gyroscope using a novel ultraprecise ceramic entire-ball tool	8
Curved passive mixing structures: a robust design to obtain efficient mixing and mass transfer in microfluidic channels	8
Analysis of mechanical deformation effect on the voltage generation of a vertical contact mode triboelectric generator	8
Nanofluidic peristaltic pumps made from silica thin films	8
Enhancement of passive mixing via arc microchannel with sharp corner structure	8
An implantable microelectrode array for chronic in vivo epiretinal stimulation of the rat retina	8
Second flexural and torsional modes of vibration in suspended microfluidic resonator for liquid density measurements	8
A pulsed freestanding triboelectric nanogenerator and power management circuit to harvest rotation energy from an automobile brake	8
Multi-step microfludic reactor for the synthesis of hybrid nanoparticles	8
Sound dissipation from plate-type resonators excited in non-conventional transversal modes in liquids	8
Fabrication and characterization of micro electromagnetic linear actuators	8
Process and device simulations aimed at improving the emitter region performance of silicon PERC solar cells	7
Surface activation of poly(methyl methacrylate) for microfluidic device bonding through a H2O plasma treatment linked with a low-temperature annealing	7
Hybrid electrical and optical neural interfaces	7
Channel integrated optoelectronic tweezer chip for microfluidic particle manipulation	7
Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics	7
Microfluidic chip fabrication and performance analysis of 3D printed material for use in microfluidic nucleic acid amplification applications	7
Underwater anechoic layer with parallel metallic plate insertions: theoretical modelling	7
SAW-driven self-cleaning drop free glass for automotive sensors	7
Design and material for a patternable polysiloxane acrylate-based penetrating intracortical neural probe	7
Liquid metal droplet-enabled electrocapillary flow in biased alternating electric fields: a theoretical analysis from the perspective of induced-charge electrokinetics	7
Application of the evolutionary kinetic Monte Carlo method for the simulation of anisotropic wet etching of sapphire	7
A dielectrophoresis-based microfluidic chip for trapping circulating tumor cells using a porous membrane	7
Surface characterization of patterning on MgO single crystals using wet chemical etching process to advance MEMS devices	7
Vibration analysis of MEMS vibrating mesh atomizer	7
Design and manufacture of a micro-tensile testing machine for in situ optical observation and DIC analysis: application to 3D-printed and compression-molded ABS	7
Underwater laser micro-milling of fine-grained aluminium and the process modelling by machine learning	7
Crystal plasticity finite element simulation and experimental investigation of the micro-upsetting process of OFHC copper	6
Micro-wrinkle strategy for stable soft neural interface with optimized electroplated PEDOT:PSS	6
Design and investigation of dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal pocket TFET device as a label-free biosensor	6
A review of geometric and structural design for reliable flexible electronics	6
Laser pyrolysis for controlled morphing and chemical modification on 3D microlattices	6
Characterization of manufacturability of microstructures for micro-injection moulding of micro devices using star patterns	6
Microfluidic fabrication of stable collagen microgels with aligned microstructure using flow-driven co-deposition and ionic gelation	6
A novel piezoelectric RF-MEMS resonator with enhanced quality factor	6
Design, modeling and experimental validation of a micro cantilever beam with an electro-controllable twisting ability	6
Self-aligned fabrication process for active membrane in magnetically driven micropump using photosensitive composite	6
Noise model considering electrical feed-through under force rebalance closed-loop detection of MEMS gyroscope	6
Direct current triboelectric nanogenerators: a review	6
Integration of buried piezoresistive sensors and PZT thin film for dynamic and static position sensing of MEMS actuator	6
Micromechanics for energy generation	6
Development of a piezoelectric pump with unfixed valve	6
Design and experimental investigation of a parallel flexure hinge-based 3D elliptical vibration-assisted cutting mechanism	6
Low cost technology for the fabrication of anti-counterfeiting microtaggants	6
Microelectroforming of freestanding metallic microcomponents using silver-coated poly(dimethylsiloxane) molds	6
Fabrication and characterization of thin-film silicon resonators on 10 $\boldsymbol{{\mu}}$m-thick polyimide substrates	6
A dual-driven biomimetic microrobot based on optical and magnetic propulsion	5
Compact tunable mid-infrared Fabry–Pérot filters actuated by liquid crystal elastomers	5
Burr removal from high-aspect-ratio micro-pillars using ultrasonic-assisted abrasive micro-deburring	5
Fractional order zero phase error tracking control of a novel decoupled 2-DOF compliant micro-positioning stage	5
A review of assembly techniques for fabricating twisted bilayer graphene	5
Solving curing-protocol-dependent shape errors in PDMS replication	5
On the PZT/Si unimorph cantilever design for the signal-to-noise ratio enhancement of piezoelectric MEMS microphone	5
Basic concepts of biological microparticles isolation by inertia spiral microchannels in simple terms: a review	5
Development of droplet microfluidics capable of quantitative estimation of single-cell multiplex proteins	5
Capillary rheometer for magnetic fluids	5
Analysis of the dynamic behavior of a V-shaped electrothermal microactuator	5
Fabrication of ultra-high-aspect-ratio nano-walls and nano-structures on silicon substrates	5
Frequency characteristics and thermal compensation of MEMS devices based on geometric anti-spring	5
Volume-preserving strategies to improve the mixing efficiency of serpentine micromixers	5
Direct polymer microcantilever fabrication from free-standing dry film photoresists	5
Decomposition of pattern distortions by the Spread polynomial model in roll-to-sheet reverse offset printing	5
A cantilever-based resonator for reconfigurable nanomechanical computing	5
PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation	5
Conventional surface micromachining process for the fabrication of a linear optical phased array based on piston micromirrors	5
Investigations on piezo actuated micro XY stage for vibration-assisted micro milling	5
Atmospheric micro-sized cold plasma jet created by a long and ultra-flexible generator with sputtered gold thin film electrode	5
Micro electric discharge machining (μ-EDM) of polymer nanocomposites modified by graphene nanoplatelets/carbon using rotating electrode tool	5
Electrofluidic displays based on inkjet printing and phase change filling	5
Shoulder fillet effects in strength distributions of microelectromechanical system components	5
Fluid control with hydrophobic pillars in paper-based microfluidics	5
Experimental amplitude and frequency control of a self-excited microcantilever by linear and nonlinear feedback	5
Picoliter liquid handling at gas/liquid interface by surface and geometry control in a micro-nanofluidic device	5
Recent trends in structures and applications of valveless piezoelectric pump—a review	5
Mode localized artificial hair sensor with enhanced linearity applied for dual-axis air flow sensing	5
High-throughput acoustofluidic microchannels for single cell rotation	5
In-plane air damping of micro- and nano- mechanical resonators	5

Feasibility study of a micro-electro-mechanical-systems threshold-pressure sensor based on parametric resonance: experimental and theoretical investigations	5
MEMS triaxial gyroscope using surface and sidewall doping piezoresistors	5
On-chip micro pressure sensor for microfluidic pressure monitoring	5
Facile fabrication of sensitivity-tunable strain sensors based on laser-patterned micro-nano structures	5
Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control	5
A microfluidic platform enabling real-time control of dynamic biochemical stimuli to biological cells	5
A comprehensive review on non-active micro-pumps for microfluidic platforms	5
Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application	5
Investigations into planar splitting and recombining micromixers with asymmetric structures	5
A predictive model for electrostatic energy harvesters with impact-based frequency up-conversion	5
A perspective of active microfluidic platforms as an enabling tool for applications in other fields	4
Hermetic chip-scale packaging using Au:Sn eutectic bonding for implantable devices	4
Distortion mechanism of patterning positions in the soft roller printing process for realizing large-area overlay printing	4
A position sensing method for 2D scanning mirrors	4
A multi-scale E-jet 3D printing regulated by structured multi-physics field	4
Measurement of the electric permittivity using Bleustein–Gulyaev wave sensor	4
An efficient macro model for CMOS-MEMS thermal wind speed sensor	4
An ultrafast response and precisely controllable soft electromagnet actuator based on Ecoflex rubber film filled with neodymium-iron-boron	4
Micromachining of polymers using atmospheric pressure inductively coupled helium plasma localized by a scanning nanopipette probe microscope	4
Fabrication and characterization of annular-shaped piezoelectric micromachined ultrasonic transducer mounted with Pb(Zr,Ti)O3-based monocrystalline thin film	4
Impact of support material deformation in MEMS bulk micromachined diaphragm pressure sensors	4
Utilizing a coil to realize 3D electrodes for dielectrophoresis-based particle concentration	4
The development of a pressure sensor using a technique for patterning silver nanowires on 3-dimensional curved PDMS membranes	4
Sub-micrometer plasma-enhanced chemical vapor deposition using an atmospheric pressure plasma jet localized by a nanopipette scanning probe microscope	4
Droplet spreading nanoimprinting method for micro-/nano-fabrication	4
Strain engineering of graphene nano-resonator	4
Micro-machined stent flow sensor for detecting breathing and heartbeat from airflow in airway of rat	4
Elastic-plastic properties of mesoscale electrodeposited LIGA nickel alloy films: microscopy and mechanics	4
MEMS device for applying shear and tension to an epithelium combined with fluorescent live cell imaging	4
Multimode excitations for complex multifunctional logic device	4
Direct macro-to-micro interface method for microfluidics	4
Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding	4
Wafer-bonded surface plasmon waveguide sensors with in-plane microfluidic interfaces	4
Motion of generated dumbbell-shaped satellite droplets during liquid dielectrophoresis	4
Optimization of the co-axial dispensing nozzle of a 3D bioprinter for the fabrication of tubular structures with micro-channel encapsulation	4
Surface roughness improvement of 3D printed microchannel	4
An on-chip test structure to measure the Seebeck coefficient of thermopile sensors	4
Sol–gel-derived nanoparticles coated liquid entities: liquid marbles, liquid plasticine, and flat interface	4
Bipolar resistive switching properties of TiO x /graphene oxide doped PVP based bilayer ReRAM	4
Stable 3D inertial focusing by high aspect ratio curved microfluidics	4
Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films	4
Leak-free integrated microfluidic channel fabrication for surface plasmon resonance applications	4
Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application	4
MEMS piezoelectric resonant microphone array for lung sound classification	4
Adhesion of Flk1-expressing cells under shear flow in phospholipid polymer-coated immunoaffinity channels	4
Development of MEMS-based piezoresistive 3D stress/strain sensor using strain technology and smart temperature compensation	4
A monolithic Si-micromachined four-stage Knudsen pump for µGC applications	4
Development of microfluidic cartridge for culture-free detection of Staphylococcus aureus in blood	4
High-accuracy differential resonant pressure sensor with linear fitting method	4
Magnetically propelled soft micromachines with multipatterned fabrications	4
Geometry effects on flow characteristics of micro-scale planar nozzles	4
Efficient and improved qualification method for patterns with irregular edges in printed electronics	4
Micromachined threshold inertial switches: a review	4
Temperature stable rare earth magnetic powder Sm-Fe-N based micro magnets with remanence enhanced by easy axis alignment and its application in MEMS actuator	4
Implantable double-layer pump chamber piezoelectric valveless micropump with adjustable flow rate function	4
Tactile samples with variable surface textures to investigate tactile perception characteristic	4
An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators	4
A programmable 3D printing method for magnetically driven micro soft robots based on surface tension	4
A resonant high-pressure sensor based on dual cavities	4
Fully-transparent resistance switching memristor based on indium-tin-oxide material	4
Unapodization: a method to produce laterally uniform surface acoustic waves for acoustofluidics	4
Fabrication of oil–water separation copper filter by spatial light modulated femtosecond laser	4
Continuous elasto-inertial separation of microparticles using a co-flowing Newtonian-viscoelastic fluid system	4
Fabrication of silicon electrodes used for micro electrochemical machining	4
Self-supporting 3D printed flexible liquid metal electrodes for electrostatically microfluidic valves	3
Machine learning-based off-line electrical characteristic prediction through in-line pattern integrity inspection	3
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization	3
Low-cost and low-topography fabrication of multilayer interconnections for microfluidic devices	3
An A0 mode Lamb-wave AlN resonator on SOI substrate with vertically arranged double-electrodes	3
Micro/nanofiber fabrication technologies for wearable sensors: a review	3
Facile fabrication of binary wettability patterned microstructure for microfluidics	3
Energy action model of spark assisted chemical engraving (SACE) for improving surface quality of micro cavities in ZrO2 ceramics	3
Propulsion reversal in oscillating-bubble powered micro swimmer	3
A pneumatically controlled microfluidic rectifier enabling zero backflow under pulsatile flow regime	3
Microfluidic system manufacturing by direct laser writing for the generation and characterization of microdroplets	3
Irreversible, self-aligned microfluidic packaging for chronic implant applications	3
Fully differential higher order transverse mode piezoelectric membrane resonators for enhanced liquid-phase quality factors	3
Junction gap breakdown-based fabrication of polydimethylsiloxane ionic rectifiers	3
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection	3
Design and characterization of compact digital RF MEMS capacitors and phase shifters in CMOS 0.35 µm technology	3
Super-wetting enabled by an array of SU-8 micro-pillars etched with ion-beam	3
Imaging of simulated muscle based on single chip of AlN piezoelectric micromachined ultrasonic transducer	3
Fabrication of high-aspect-ratio polydimethylsiloxane microstructures by reducing the interfacial adhesion in soft lithography	3
Temperature-compensated CMOS-MEMS resonators via electrical stiffness frequency pulling	3
A simplified quasi-2D model for gas flow in microchannels and microtubes	3
Rotational UV-lithography using flexible chromium-coated polymer masks for the fabrication of microstructured dental implant surfaces: a proof of concept	3
Implementation and assessment of a low-cost 3D laser platform controlled by open software for printing polymeric micro-structures	3
Micro hole drilling of high frequency printed circuit board containing hard fillers	3
Design and testing of a novel multipath-actuation compliant manipulator	3
Analysis of DefeXtiles: a 3D printed textile towards garments and accessories	3
Active microvalve driven by electro-conjugate fluid jet flow with a hydraulic power source on a chip	3
Enhancing the performance of dielectric elastomer actuators through the approach of distributed electrode array with fractal interconnects architecture	3
Bioinspired drag reduction surfaces via triple lithography method based on three-layer hybrid masks	3
Configurations of triangular prism and slit electrode pairs to enhance the performance of electro-conjugate fluid micropumps	3
Implanted microelectrode arrays for evaluating inhibited seizure modulated by light-responsive hydrogel	3
Adhesion enhancement strategy for Parylene C substrate by nanograss technique	3
Flexible pressure and temperature dual-modality sensor based on stretchable electrode for human–machine interaction	3
Active real-time electric field control of the e-jet in near-field electrospinning using an auxiliary electrode	3
Removal of recast layer in the laser drilled film cooling holes by a two-step inner streaming electrochemical technique	3
Micromechanical resonant cantilever sensors actuated by fringing electrostatic fields	3
Effects of both the drive- and sense-mode circuit phase delay on MEMS gyroscope performance and real-time suppression of the residual fluctuation phase error	3
Effect of magnetic field intensity on deposition of copper tool in electro discharge deposition	3
Recent advances in power supply strategies for untethered neural implants	3
Generation of micro-droplet on demand with reduced sizes by a hybrid pneumatic electrohydrodynamic method	3
Performance of aluminum nitride-based piezoelectric micromachined ultrasonic transducers under different readout configurations	3
Efficient system-level simulations of thermal wind sensors considering environmental factors	3
Microfluidic biochip platform sensitized by AgNPs for SERS based rapid detection of uric acid	3
A MEMS dynamic mechanical analyzer for in situ viscoelastic characterization of 3D printed nanostructures	3
Detection of cardiac biomarkers in serum using a micro-electromechanical film electroacoustic resonator	3
Compression and decompression of structural tantalum films exposed to buffered hydrofluoric acid	3
Research on dynamics of bouncing ball in triboelectric nanogenerator	3
A comparison of pad metallization in miniaturized microfabricated silicon microcantilever-based wafer probes for low contact force low skate on-wafer measurements	3
A piezoelectric micromachined ultrasonic transducer with mechanical grooves	3
2D FPCB micromirror for scanning LIDAR	3
Electric field sensing characteristics of ZnO/SiO2/Si surface acoustic wave devices	3
Rotational speed measurements of small spherical particles driven by acoustic viscous torques utilizing an optical trap	3
Etch-less microfabrication of structured TiO2 implant coatings on bulk titanium grade 23 by direct lithographic anodic oxidation	3
Highly sensitive biosensor based on a microcantilever and alternating current electrothermal technology	3
Mechanically flexible microfluidics for microparticle dispensing based on traveling wave dielectrophoresis	3
Fast fabrication of a 3D prototyping microfluidic device for liquid cross-flow and droplet high-throughput generation	3
A review of rarefied gas flow in irregular micro/nanochannels	3
Derivation of analytical expressions for the stress/strain distributions, bending plane and curvature radius in multilayer thin-film composites	3
Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumes	3
A silicone based piezoelectric and electromagnetic hybrid vibration energy harvester	3
A wireless passive pressure sensor using microstructured ferromagnetic films with tunable effective permeability	3
Dynamic behaviours of double-ended tuning fork based comb-driven microelectromechanical resonators for modulating magnetic flux synchronously	3
Piezoelectric approaches for wearable continuous blood pressure monitoring: a review	3
Electromicrofluidic device with integrated PDMS microchannel and laser-induced graphene electrodes for electrochemical detection of cardiac biomarker in a point-of-care platform	3
Employing fluorescence analysis for real-time determination of the volume displacement of a pneumatically driven diaphragm micropump	3
Novel fabrication for vertically stacked inverted triangular and diamond-shaped silicon nanowires on (1 0 0) single crystal silicon wafer	3
Miniature and tunable high voltage-driven soft electroactive biconvex lenses for optical visual identification	3
Progress of biomechanical energy harvesters for wearable electronic applications	3
Optimization of x-ray lithography conditions for fabrication of large arrays of high-aspect-ratio submicron pores	3
Fabrication and flow rate characterization of a DRIE process based valveless piezoelectric micropump	3
Research on acoustic sensing device based on microfiber knot resonator	3
Bridged resonator based on assembled Si thin wire	2
Establishment of cell patterning method utilising nanopore structure with cell non-adhesive effect	2
Fabrication of a 3D carbon electrode for potential dielectrophoresis-based hepatic cell patterning application using carbon micro-electrical-mechanical system (CMEMS)	2
Toward the development of a label-free multiple immunosensor based on thin film transistor microelectrode arrays	2
Fabricating transparent nanomesh-structured hydrophobic films by nanoimprinting UV-curable fluorinated polyurethane acrylates	2
Ultrasensitive detection of antigen–antibody interaction and triglycerides in liquid ambient using polysilicon cantilevers	2
Use of liquid lithography to form in vitro intestinal crypts with varying microcurvature surrounding the stem cell niche	2
Chaotic ultrasound generation using a nonlinear piezoelectric microtransducer	2
A convenient plug-and-play coaxial microfluidic device and quantitative prediction of monodisperse droplets generation	2
Adherable temperature sensor to a porous structure of fiber via reduced graphene oxide and poly(diallyldimethylammonium chloride) complex	2

Design and implementation of differential MEMS microphones using the two polysilicon processes for SNR enhancement	2
Fabrication, modeling, and characterization of soft twisting electrothermal actuators with directly printed oblique heater	2
Programmable intelligent liquid matter: material, science and technology	2
Meso scale component manufacturing: a comparative analysis of non-lithography and lithography-based processes	2
An electrochemical biosensor with integrated microheater to improve the sensitivity of electrochemical nucleic acid biosensors	2
Scotch-tape surface wrinkling based thin-film material properties extraction	2
High-performance transparent electromagnetic interference shielding film based on metal meshes	2
Design and development of a piezoelectric driven micropump integrated with hollow microneedles for precise insulin delivery	2
Flow modeling and experimental verification of flow resistors used in microfluidic chips driven by capillary force	2
Investigation of drift phenomena in closed-loop capacitive micro accelerometers	2
Lithographically patterned polypyrrole multilayer microstructures via sidewall-controlled electropolymerization	2
Mechanical characteristics of laminated film vibrator using an ultra-thin MEMS actuator	2
Manufacturing conductive patterns on polymeric substrates: development of a microcontact printing process	2
A hollow microlattice based ultralight active thermal control device and its fabrication techniques and thermal performances	2
Accurate holographic cytometry using three-dimensional hydrodynamic focusing	2
Ultra-high precision passive particle sorting chip coupling inertial microfluidics and single row micropillar arrays	2
Influence of source electrode metal work function on polar gate prompted source hole plasma in arsenide/antimonide tunneling interfaced junctionless TFET	2
Development of microfluidic flow cytometry capable of characterization of single-cell intrinsic structural and electrical parameters	2
Analytical and experimental study of the dynamics of a micro-electromechanical resonator based digital-to-analog converter	2
High-density stretchable microelectrode array based on multilayer serpentine interconnections	2
Electrochemical detection of baicalein based on a three-dimensional micromixer	2
Fabrication and design rules of three dimensional pyrolytic carbon suspended microstructures	2
Eccentric reflective optical fiber MEMS micro-pressure sensor	2
Performance enhancement of piezoelectric bulk mode MEMS mode-matched gyroscopes based on a secondary phase feedback loop	2
A self-attachable and self-alignable micro electromagnetic linear actuator	2
Self-calibration of micro-components based on manipulator guidance	2
Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation	2
On overtravel and skate in cantilever-based probes for on-wafer measurements	2
Rapid prototyping of noncontact microwave microfluidic devices for sensing applications	2
A grade 1 titanium capacitive microsensor for continuous pressure monitoring of intracorporal pressures	2
Scanning digital oil immersion lithography providing high-speed large area patterning with diffraction limited sub-micron resolution	2
Efficient removal of condensate droplets from the surface with microgroove composite structures	2
Microfluidic multicolor display by juxtapositional color mixing with a pattern of primary color pixels	2
Experimental investigation for roll-to-plate embossing of ordered micro-pyramid array on the silver sheet	2
A novel electromagnetic microactuator with a stainless steel mas-spring structure	2
An ultra-thin transparent multi-functional sensor based on silk hydrogel for health monitoring	2
Acoustic wave amplification with thin film silicon bonded on lithium niobate	2
Ti/Si interface enabling complementary metal oxide semiconductor compatible, high reliable bonding for inter-die micro-fluidic cooling for future advanced 3D integrated circuit integration	2
Study of laser surface texturing of 6061 aluminium with thermal assistance	2
Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer	2
Silicon monolithic microflow sensors: a review	2
Biocompatible bonding of a rigid off-stoichiometry thiol-ene-epoxy polymer microfluidic cartridge to a biofunctionalized silicon biosensor	2
On-chip generation of microcapsules in the presence of applied electric fields	2
Modeling of anodic bonding with SiO2 dielectric as interlayer	2
A serial flexible humidity sensor based on graphene oxide fibers and quartz crystal resonator	2
Surface tension—based ultra-micro precision dispensing method for micro—scale manufacturing and its key influence factors analysis	2
Utilization of n-dodecane as coupling layer for reusable acoustofluidic microchips	2
The effect of quaternary ammonium salts with different chain lengths on copper filling behavior in blind holes of printed circuit board	2
Design and fabrication of non-resonant PZT MEMS micromirror with buried piezoresistors for closed loop position control	2
Efficient annular aperture array (AAA) filter for thermophotovoltaic by sidewall lithography	2
Shear force measurement of actuated, gecko-inspired adhesion elements with hierarchical polydimethylsiloxane pattern	2
Precise stepping control of a piezoelectric traveling wave micromotor through embedded in-situ detection	2
RF MEMS filter based on dual liquid variations	2
A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance	2
Modeling and analysis of sulfur hexafluoride plasma etching for silicon microcavity resonators	2
Remote actuation based on magnetically responsive pillar arrays	2
Wire mask assisted rolling as a cost-effective method for high-throughput surface micro-texturing	2
Mechanical reliability of silicon microstructures	2
Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO3 membrane-based laterally-excited bulk acoustic resonator	2
Numerical simulation of particle deposition patterns in evaporating droplets	2
A new improved vertical comb type differential capacitive sensing micro accelerometer using silicon-on-insulator wafer technology	2
An intubation catheter integrated with flow sensors and smart actuators for characterizing airflow patterns in stenosed trachea: an objective guide for CAO management	2
Study on combustion stability of a miniature reciprocating piston internal combustion engine	2
A microfluidic chip integrated with 3D sidewall electrodes and wavy microchannel for cell focusing and separation	2
A sheathless high precise particle separation chip integrated contraction–expansion channel and deterministic lateral displacement	2
Body-worn enzymatic biofuel cell with automated pencil drawn bioelectrodes for energy harvesting from human sweat	2
Shock-free ion transmission in a skimmer-based MEMS mass spectrometer vacuum interface	2
Mechanical–thermal response of brittle titanium films on polymer substrates: in-situ observations and FE modelling	2
Performance analysis of synthetic jet micropump based on double piezoelectric actuators	2
Experimental studies on micro powder hot embossing for high-aspect-ratio microstructures with ultra-high molecular weight polyethylene powders	2
A thermal microfluidic actuator based on a novel microheater	2
Exploring nanowire regrowth for the integration of bottom-up grown silicon nanowires into AFM scanning probes	2
A quantitative study of the dynamic response of compliant microfluidic chips in a microfluidics context	2
Self-transformed parallel structures in strain sensitive Au thin film micropattern embedded on soft elastomer	2
Scaling effects and brittle fracture mechanisms in laser punching of PECVD SiO2 films	2
Transient flow behavior in serpentine curved microchannel of inertial microfluidic devices	2
Laser drilling of stainless steel foil with reduced sidelobe ablation using a spatially filtered Bessel–Gauss beam	2
Fused silica microchannel fabrication with smooth surface and high etching selectivity	2
SEM image-guided manipulation with a feedback assistance system for automated nanohandling of a 4 DOF micromanipulator	2
Optimization of plotter printing for sub-terahertz metallic metasurfaces fabrication on ultra-thin substrate	2
An experimental study of recovery in embossing of polycarbonate below the glass transition temperature	2
Hydrodynamic characteristics of an evaporation-based micro-synthetic jet for micro-propulsion	2
Bonding Methods for Chip Integration with Parylene Devices	2