Journal of Micromechanics and Microengineering

Article	Citations
Regulating the electrical performance of contact-separation mode triboelectric nanogenerators based on double-sided groove textures	97
Wearable microfluidic sweat collection platform with a calorimetric flow rate sensor for realtime and long-term sweat rate measurements	45
Magnetically maneuverable micromixer using acoustically excited bubbles	34
PDMS-polyimide transcutaneous blood gas collector with self-folding out-of-plane heater elements	27
The radial point interpolation method (RPIM) for analyzing a V-shaped electrothermal actuator	27
High density cleanroom-free microneedle arrays for pain-free drug delivery	25
Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics	22
Miniature and tunable high voltage-driven soft electroactive biconvex lenses for optical visual identification	22
An SOI-based post-fabrication process for compliant MEMS devices	21
Enabling water-based EVA adhesives for solvent-free aerosol jet printing in microfabrication	20
A long-stroke planar linear actuator equipped with magnetic guide	20
Fabrication of an X-shaped micro-copper structure containing a merging joint based on localized electrochemical deposition	20
Design and fabrication of a low-cost microfluidic cartridge with integrated pressure-driven check valve for molecular diagnostics platforms	19
Measurement and control of stiction force in in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts	19
Performance evaluation of a 3D split-and-recombination micromixer with asymmetric structures	19
Passive communication for low power distributed sensors using MEMS optical cavities	18
RF MEMS capacitive shunt switch for low loss applications	18
Deep silicon etching technology and applications: a review	17
Bistable liquid shutter operated by DEW actuation for multifunctional miniature cameras	17
Experimental study on acoustic-induced microbubbles fusion	17
Microfluidic cells for the 1–102 MPa pressure range	16
A high-sensitivity MEMS fluxgate sensor with double-layer induction coils fabricated by micro-casting	16
Near thermal-electric field controlled electrohydrodynamic 3D printing of high aspect ratio microstructures	16
Optical polymer aligner fabricated by 2pp for connecting angled fiber to an optical chip	15
A preparation technology of micro-structure glass based on mixed micro and nano powders	15

Sub-miniature rolling thrust micro-bearing	15
PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation	15
Graphene resonant pressure sensor with ultrahigh responsivity-range product	15
Electric field sensing characteristics of ZnO/SiO 2 /Si surface acoustic wave devices	15
Etch the borosilicate glass to form a straight through-glass-via based on the FLACE technology	15
Micromachined threshold inertial switches: a review	14
Bioinspired drag reduction surfaces via triple lithography method based on three-layer hybrid masks	14
A quantitative study of the dynamic response of compliant microfluidic chips in a microfluidics context	14
Development of microneedle based blood extraction device	14
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization	13
Controllable fabrication of microstructure arrays on electrospun fibers via mold-assisted self-assembly of beaded fibers	13
Development of an original compact multigas detection system based on MEMS components	13
A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design	13
Research on the measurement of wet etching rates and Level Set simulation of patterned sapphire substrates	12
A review of research on RF MEMS for metaverse interactions	12
Effects of rolled fibrous microstructure on fatigue properties of extruded Cu-5Al planar micro springs	12
Producing micro impressions on Al6061 under alumina-mixed deionized water as dielectric during electric discharge machining	12
Variational-based data-driven model identification of micro resonator systems	12
Reflective x-ray masks for x-ray lithography	12
In-situ measurement of anisotropic Young’s modulus in fused deposition modeling printed cantilevers	12
Fabrication of grooved LGS resonators based high temperature SAW sensors and analysis with FEM simulation	12
A rapid method for fabricating and replicating microlens array structures	12
Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors	12
High throughput microfluidic drug screening system for corneal epithelial wound healing	11
Support-free fabrication of elastic silicone microstructures via direct ink writing for soft robotic applications	11
Research on acoustic sensing device based on microfiber knot resonator	11
Comparative analysis and tests for an improved frequency tuning area-varying electrode considering the influence of fringe capacitance	11
Temperature and pressure effects on microchannels dimensions in hot embossing	11
Corrigendum: Fabrication of FP-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process (2019 J. Micromech. Microeng.	11
The multimodal motion along a solid–liquid interface of a soft microrobot driven by compound magnetic fields	11
Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures	10
Three-dimensional AC electroosmotic micropump with high power density	10
The effect of quaternary ammonium salts with different chain lengths on copper filling behavior in blind holes of printed circuit board	10
Direct current triboelectric nanogenerators: a review	10
Quadrant kirigami-type electrothermal MEMS actuator with multi-degree-of-freedom morphing capability	10
Noninvasive measurement of temperature for simulated tissue based on piezoelectric micromachined ultrasonic transducers	10
Efficient heat dissipation with hybrid composite-based microfluidic heat sinks in flexible electronics	10
Numerical simulation of a nebulizer with multiple orifices	10
Flexible pressure/temperature sensors with heterogeneous integration of ultra-thin silicon and polymer	10
Low-voltage electrostatic manipulation of microparticles using a single carbon fiber probe	10
Study of super flexible mixed phase piezoresistive pressure sensor	10
Unsealed piezoelectric MEMS speaker with rigid-flexible composite membrane	9
Nanofluidic gas/liquid switching utilizing a nanochannel open/close valve based on glass deformation	9
Flexible flow sensors-enabled intelligent life	9
Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer	9
A novel approach to determining the hydrodynamic resistance of droplets in microchannels using active control and grey-box system identification	9
Non-faradaic electrochemical impedance spectroscopy analysis of C-MEMS derived bio-modified glassy carbon electrode	9
Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application	9
A penetration efficiency model for the optimization of solid conical microneedles’ geometry	9
Micro- and nanoscale patterning of fluorescent materials via coaxial electrohydrodynamic jet printing	9

Edge smoothness enhancement of digital lithography based on the DMDs collaborative modulation	9
Fast analysis of MEMS micromirror based on multi-physical electro-mechanical-damping coupling method	9
Semi-reflective visor-based compact head-worn light field display	9
Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer	9
Manufacturing of hydraulically steerable actuator using closed molding and core template for vascular intervention guidewires	9
Precise in-situ fabrication of perovskite single crystal arrays via cosolvent based electrohydrodynamic printing	9
Efficient annular aperture array (AAA) filter for thermophotovoltaic by sidewall lithography	9
Nonlinear design, analysis, and testing of a single-stage compliant orthogonal displacement amplifier with a single input force for microgrippers	9
Evaluation of Bosch processing and C4F8 plasma deposition at cryogenic temperatures	9
Influence of process parameters on the characteristics of electrohydrodynamic-printed UV-curing conductive lines on the fabric	8
Efficient strategy for frequency design and bandwidth extension of curved piezoelectric ultrasonic micromachined transducers	8
Carbon dioxide reduction utilizing a bismuth halide perovskite as immobilized photocatalyst in a 3D printed microreactor	8
Hierarchical integration of nanopillars and nanochannels in a nanofluidic device for single-nanoparticle detection	8
Studies on drug delivery from dissolving microneedle and its uptake in tissue	8
Design, development, and testing of active valve piezo-hydraulic pump	8
Microfluidic multicolor display by juxtapositional color mixing with a pattern of primary color pixels	8
Micromachining of nickel and nickel-based alloy surfaces using composite signal	8
Diversified plasmonic metallic nanostructures with high aspect ratio based on templated electrochemical deposition	8
A highly accurate analytical method for determination of the vibrational frequency of N/MEMS with electrostatic and van der Waals interaction forces	8
Damping of 3D-printed polymer microbeam resonators	8
Performance analysis of synthetic jet micropump based on double piezoelectric actuators	8
Design and performance evaluation of a single piezoelectric stacked drive jet dispensing valve	8
Formation of silver wires embedded in hydrogels using femtosecond laser ablation and electroplating for strain sensing	8
Design optimization and experimental verification of ultrasonic stack for micro hot embossing of polymers	8
Knudsen force based double beam MEMS vacuum pressure sensor	8
Micromechanical piezoelectric micromachined ultrasonic transducer array package enhancement with integrated frontliners	8
Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation	8
A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance	7
A Si-based suspended tunnel structure with trapezoidal section by two-step etching	7
An analytical model of three-hot-wire acoustic particle velocity sensors	7
Numerical simulation of wet etching for R angle of fine metal mask	7
Highly sensitive flexible capacitive pressure sensor with structured elastomeric dielectric layers	7
Review of scaling effects on physical properties and practicalities of cantilever sensors	7
Investigating capacitive flexible tactile sensor with a wide measuring range using PVDF and conductive sponge	7
Development of piezoresistive flexible sensor with dual-height cylindrical microstructure surfaces to achieve vehicle vibration monitoring	7
Mixed particles separation based on a cylindrical microfluidic centrifuge	7
Micro/nano-transfer printing of gold thin films via atomic diffusion bonding: effects of air-exposure time and stamp modulus	7
Phase noise modelling of MEMS resonant accelerometer with non-AGC-driven circuit	7
Thermal and hydraulic performance of Al alloy-based 3D printed triangular microchannel heatsink governed by rough walls with graphene and alumina nanofluids as working liquid	7
RF MEMS electrostatically actuated tunable capacitors and their applications: a review	7
Design and analysis of a dual-actuator force-balanced MEMS pressure sensor	7
Wafer level hermetic bonding and packaging using recrystallized parylene	7
Fabrication and characterization of suspended La0.7Sr0.3MnO3 nanofibers for high-sensitive and fast-responsive infrared bolometer	6
CMUT modeling—extension to soft boundaries and thick plates	6
PDMS micro check valve with 3D valve disk for reducing fluid resistance	6
Diamond ICP-DRIE etching technology with PECVD SiO 2 as mask	6
Flow behaviors and transmission characteristics of Knudsen pump with blocked microchannels	6
The effect of DRIE notching on field emission enhanced breakdown in SOI based MEMS electrodes	6
High-performance transparent heater with Ag paste-based nanomesh electrodes	6
A high-quality dual-port surface acoustic wave intermediate frequency filter	6
Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001)	6
A compact and reconfigurable C-band DGS-based power divider using RF MEMS capacitive switch	6
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection	6
CMOS microsensor packaging for use in aqueous media	6
Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout	6
Electrohydrodynamic jet printed templates for hot embossing of microfluidic devices	6
A simple way to predict the flip–chip gap	6
A multi-scale E-jet 3D printing regulated by structured multi-physics field	6
A low-cost 3D-printing based rapid fabrication procedure for modular microfluidic platform	6
High-frequency and low-loss SAW devices based on LiTaO3/Sapphire hetero-structure	6
Effect of SiO2 protective layer on LiNbO3 structured SAW resonators and temperature characteristics study	6
Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system	6
Splashing of droplet under the vibration effect of flexible membrane	6
Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application	6
Displacement-controlled coining of large arrays of gold stud bumps	6
Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study	6
Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure	6
A novel electromagnetic microactuator with a stainless steel mas-spring structure	6
Heterogeneous micro-architectonic integration of SU-8 and highly entangled polyacrylamide hydrogel to realize cut-resistant soft superhydrophobic surfaces	6
Active vibration reduction of tool holder in hole turning process using machine learning with the assistance of magnetic force	6
Accurate holographic cytometry using three-dimensional hydrodynamic focusing	5
Fabrication of microneedles using wire electric discharge machining and improving surface quality by electrochemical polishing	5
RF MEMS filter based on dual liquid variations	5
Fabrication and integration of diffraction gratings on electrostatic stepper motor for imaging spectrometer applications	5
Noncontact MEMS thermal flow sensors integrated in glass microfluidic chemical chip	5
Nanosecond pulsed laser transmission welding of cyclic olefin copolymer	5
Design and fabrication of lithium niobate asymmetrical mode resonators toward C-band and Ku-band	5
3D printing-based microfluidic devices in fabric	5
Fabrication of micro-ultrasonic phased array electrode via electric field-driven printing method	5
Surface reaction between immobilized magnetic microbead-tagged antibodies and electroosmotic flow-driven antigens in a microfluidic device for a realistic higher Damkohler number – a numerical approac	5

Large area nanoscale patterning of functional materials using organosilicate ink based nanotransfer printing	5
Ultra-high precision passive particle sorting chip coupling inertial microfluidics and single row micropillar arrays	5
Micromachined piezoelectric Lamb wave resonators: a review	5
Improvement on the uniformity of deep reactive ion etch for electrically isolated silicon-based substrates	5
Selective metallic reinforcement of silver nanowire junctions for improving the electrical conductivity of transparent electrodes	5
Combination of anti-miR19a-3p polyplex plus doxorubicin for breast cancer in 2D culture and apoptosis assay in 3D spheroids in a microwell device	5
Investigation on drag reduction of micro-structured PDMS film with self-replenishing bubble using water electrolysis	5
Large stroke electromagnetic redundant actuated six degrees-of-freedom parallel compliant micropositioning stage	5
Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation	5
Self-calibration of micro-components based on manipulator guidance	5
Fused silica microchannel fabrication with smooth surface and high etching selectivity	5
Sub-10 nm metal nanogaps with high SERS performance via a novel conformal coating process	5
High-accuracy prediction of microcantilever sensor for fluid detection: simulation to deep learning	5
Integrated cooling system for microfluidic PDMS devices used in biological microscopy studies	5
Picoliter liquid handling at gas/liquid interface by surface and geometry control in a micro-nanofluidic device	4
A non-invasive and high precision sensor for in-situ temperature monitoring of cells	4
MEMS—suspended gate field effect transistor (SGFET) accelerometer process integration with parylene flexure and plasma doping	4
Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces	4
Manufacturing and measurement of CMOS-MEMS-based micro thermoelectric generators with long-length thermocouples	4
Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment	4
A novel integrated stir–ultrasonic–squeeze casting route for fabricating AA6061-based metal matrix hybrid nanocomposites with enhanced tribomechanical properties	4
Surface acoustic wave bound state in the continuum for 1200 °C high temperature sensing	4
Recent trends in structures and applications of valveless piezoelectric pump—a review	4
Development of an EGFET microsensor with 3D structure for high-specificity cardiac troponin I detection	4
3D simulation estimation and experimental validation of droplet generation in CFD-based flow-focusing microfluidic chips	4
Optimisation of neural network hyperparameters for predictive modelling in laser micromachining of biopolymers	4
Flow-insensitive micro-thermal conductivity detector with semi-diffusion gas channel	4
On overtravel and skate in cantilever-based probes for on-wafer measurements	4
Study on the mechanism of glass-SiC-glass anodic bonding process	4
Enhanced automatic sorting of liquid crystal droplets via a rotating radial light pattern in an optoelectronic tweezers system	4
Design and testing of a novel multipath-actuation compliant manipulator	4
Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique	4
A novel micro-device for simultaneous separation-trapping and double-trapping of particles by using dielectrophoresis: numerical and experimental study	4
A novel microfluidic viscometer for measuring viscosity of ultrasmall volumes of Newtonian and non-Newtonian liquids	4
Transparent glass force plate with CrN strain gauges featuring a notch structure	4
A perspective of active microfluidic platforms as an enabling tool for applications in other fields	4
Micromixing strategies for efficient mixing processes: a comprehensive review	4
A numerical modeling approach to estimate the piezoresistance of diffused resistors with experimental validation	4
On the design of a two-way piezoelectric MEMS microspeaker based on a multi-shape cantilever array for high-frequency applications	4
Innovating in-situ characterization: a comprehensive measurement system for measuring the ZT and the contact resistance of vertical thermolegs exploiting the vertical transfer length method	4
Characteristics of an antistatic semiconductor bridge based on micro/nano processing techniques	4
Zinc film anodes for air microbatteries: fabrication, approaches, and utilization optimization	4
Design and optimization of electrode-integrated microfluidic chips for enhanced electrochemical impedance spectroscopy assessments	4
A novel electromagnetic micropump with PDMS membrane supported by a stainless-steel microstructure	4
Precision optimization of femtosecond laser micromachining for endovascular neural interfaces based on RSM and machine learning	4
Flow-through microfluidic relative permittivity sensor using highly-doped silicon sidewall electrodes	4
Microfluidics in cardiac microphysiological systems: a review	4
On the design of piezoelectric actuator for 1D MEMS scanning mirror applications	4
Corrigendum: Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique (2024 J. Micromech. Microeng.	4
Experimental and simulation investigation for imprinting and buckling of V-groove/wrinkles hierarchical array	4
A two-channel ultrasonic flowmeter based on AlN piezoelectric micromachined ultrasonic transducers arrays with improved cross-correlation method	4
A 3D-printed spiral actuator for focus adjustment in circumferential scanning endomicroscopy	4
Laser drilling of stainless steel foil with reduced sidelobe ablation using a spatially filtered Bessel–Gauss beam	4
High-reliability circular-contact RF MEMS switches in silicon hermetic package	4
Micro-gas sensor with a suspended micro-heater for ammonia gas detection	4
Study on the cause of pore defects processed by focused ion beam milling on high roughness surface	4
Extracting white blood cells from blood on microfluidics platform: a review of isolation techniques and working mechanisms	4
Fabrication of Cu/SiC composite microgears by microelectroforming using PDMS-Cu conductive molds	4
High-density stretchable microelectrode array based on multilayer serpentine interconnections	3
A novel piezoelectric RF-MEMS resonator with enhanced quality factor	3
Design and evaluation of a linear nozzle array with double auxiliary electrodes for restraining cross-talk effect in parallel electrohydrodynamic jet printing	3
Two-layered microwell-array device for preparation of single-neuron culture samples	3
Inline microfluidic thermal conductivity sensor using a suspended highly-doped silicon heater	3
Manufacturing and characterization of CMOS-MEMS magnetic field microsensors with isolated cavities	3
Optimization of plotter printing for sub-terahertz metallic metasurfaces fabrication on ultra-thin substrate	3
High-throughput particle focusing and separation in split-recombination channel	3
Physics-informed neural networks with data-driven in modeling and characterizing piezoelectric micro-bender	3
Corrigendum: Adherable temperature sensor to a porous structure of fiber via reduced graphene oxide and poly(diallyldimethylammonium chloride) complex (2022 J. Micromech. Microe	3
Development of microfluidic flow cytometry capable of characterization of single-cell intrinsic structural and electrical parameters	3
High-Q terahertz bandstop filter via cuboid frame structure	3
MEMS audio speakers *	3
Quantifying and correcting tilt-related positioning errors in microcantilever-based microelectromechanical systems probes	3
Mechanical reliability of silicon microstructures	3
Fabrication of a piezoelectric micromachined ultrasonic transducer (PMUT) with dual heterogeneous piezoelectric thin film stacking	3
Innovative ultra-high-density microelectrode arrays based on CMOS and MEMS technology	3
Advancements in mathematical modeling and design configurations of piezoelectric energy harvesters: a comprehensive review	3
A vision sensor for simultaneous imaging and distance sensing in real-time	3
Numerical investigation on heat transfer and thermal stress developed during the microlaser joining of glass sheets	3
Applications of capacitive micromachined ultrasonic transducers combined with micro- and nanomaterials: a review	3
Nanometer-thick ultraflat cantilever resonators	3
Scotch-tape surface wrinkling based thin-film material properties extraction	3
Accessible, large-area, uniform dose photolithography using a moving light source	3
Preparation of robust superhydrophobic surface on PET substrate using Box-Behnken design and facile sanding method with PTFE powder	3
Topology optimization design of compliant amplification mechanisms with low parasitic displacement	3
Development of crystallized thick, highly doped a-Si:H layers for surface micromachining of MEMS inertial sensors	3
Energy and cost efficient manufacturing of uniform periodic nanostructures enabled by an adaptable beam flattening device	3
A single-axis and three-electrode MEMS accelerometer with linear output and zero-stiffness	3
Investigating bacterial behavior through finite element analysis on nanostructured surfaces	3
A combined MEMS thermal vacuum sensor with a wide pressure range	3
Micromechanical valve-operated needle-on-a-chip microinjection module for microfluidic large-scale integration	3
MEMS piezoelectric resonant microphone array for lung sound classification	3
An A 0 mode Lamb-wave AlN resonator on SOI substrate with vertically arranged double-electrodes	3
A sensing material-free and simple readout MEMS sensor for detecting helium	3
Modeling simulation and experimental study of electromagnetic microvibration energy capture systems	3
Black silicon microstructuring via plasma cryogenic etching for microfluidic applications in geoscience	3