Journal of Micromechanics and Microengineering

Article	Citations
Silicon electro-optic micro-modulator fabricated in standard CMOS technology as components for all silicon monolithic integrated optoelectronic systems *	354
Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era	63
RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook	61
Technology evolution from micro-scale energy harvesters to nanogenerators	57
Silicon MEMS inertial sensors evolution over a quarter century	54
Terahertz MEMS metadevices	38
Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators	37
A review of MEMS-based metal oxide semiconductors gas sensor in Mainland China	26
CMOS-MEMS technologies for the applications of environment sensors and environment sensing hubs	25
Ultra-low power signal conditioning system for effective biopotential signal recording	23
Recent advances on fabrication of microneedles on the flexible substrate	23
Monitoring of physiological sounds with wearable device based on piezoelectric MEMS acoustic sensor	23
RF MEMS electrostatically actuated tunable capacitors and their applications: a review	22
High-sensitivity liquid-metal-based contact lens sensor for continuous intraocular pressure monitoring	21
Integrated 3D printed microfluidic circuitry and soft microrobotic actuators via in situ direct laser writing	20
An ultrasonic flowmeter for liquid flow measurement in small pipes using AlN piezoelectric micromachined ultrasonic transducer arrays	19
Numerical simulations of 22% efficient all-perovskite tandem solar cell utilizing lead-free and low lead content halide perovskites	18
Highly responsive screen-printed asymmetric pressure sensor based on laser-induced graphene	18
Advances in micro lithium-ion batteries for on-chip and wearable applications	18
The impact of laser energy on the photoresponsive characteristics of CdO/Si visible light photodetector	17
Evaluation of the impact of abnormal grains on the performance of Sc0.15Al0.85N-based BAW resonators and filters	17
Development of MEMS composite sensor with temperature compensation for tire pressure monitoring system	16
Programmable droplet actuating platform using liquid dielectrophoresis	15
A stiffness-tunable MEMS accelerometer	15
Sensing performance of room temperature operated MEMS gas sensor for ppb level detection of hydrogen sulfide: a review	14

Power enhancement of MEMS vibrational electrostatic energy harvester by stray capacitance reduction	14
Design and investigation of dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal pocket TFET device as a label-free biosensor	14
Microfluidic chip fabrication and performance analysis of 3D printed material for use in microfluidic nucleic acid amplification applications	13
An Integrative 3D printing method for rapid additive manufacturing of a capacitive force sensor	13
Non-intrusive DC voltage measurement based on resonant electric field microsensors	13
Development of 4D-printed shape memory polymer large-stroke XY micropositioning stages	13
A dielectrophoresis-based microfluidic chip for trapping circulating tumor cells using a porous membrane	13
Piezoelectric approaches for wearable continuous blood pressure monitoring: a review	13
Ultrafast laser in fabrication of micro hemispherical resonators with quality factor over millions	13
Extracting white blood cells from blood on microfluidics platform: a review of isolation techniques and working mechanisms	12
A reconfigurable and portable acoustofluidic system based on flexible printed circuit board for the manipulation of microspheres	12
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection	12
Fabrication and characterization of micro electromagnetic linear actuators	12
Curved passive mixing structures: a robust design to obtain efficient mixing and mass transfer in microfluidic channels	11
Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics	11
Direct current triboelectric nanogenerators: a review	11
Imaging of simulated muscle based on single chip of AlN piezoelectric micromachined ultrasonic transducer	11
A dual-frequency piezoelectric micromachined ultrasound transducer array with low inter-element coupling effects	10
Vibration analysis of MEMS vibrating mesh atomizer	10
Material strategies to enhance the performance of piezoelectric energy harvesters based on lead-free materials	10
MEMS piezoelectric resonant microphone array for lung sound classification	10
SAW-driven self-cleaning drop free glass for automotive sensors	10
A novel rare cell sorting microfluidic chip based on magnetic nanoparticle labels	10
Development of mechanically-robust piezoelectric micromachined ultrasonic transducer based on island-shaped monocrystalline PZT thin film partially covered with polyimide	10
Hybrid electrical and optical neural interfaces	10
Application of the evolutionary kinetic Monte Carlo method for the simulation of anisotropic wet etching of sapphire	9
Investigations on piezo actuated micro XY stage for vibration-assisted micro milling	9
A novel piezoelectric RF-MEMS resonator with enhanced quality factor	9
A review of geometric and structural design for reliable flexible electronics	9
High-accuracy differential resonant pressure sensor with linear fitting method	9
On the PZT/Si unimorph cantilever design for the signal-to-noise ratio enhancement of piezoelectric MEMS microphone	9
Development of a piezoelectric pump with unfixed valve	9
Room temperature operated flexible La-ZnO/MWCNTs sensor for ppb level carbon monoxide detection	9
Research on acoustic sensing device based on microfiber knot resonator	9
An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators	9
Review of scaling effects on physical properties and practicalities of cantilever sensors	8
Bipolar resistive switching properties of TiO x /graphene oxide doped PVP based bilayer ReRAM	8
A pulsed freestanding triboelectric nanogenerator and power management circuit to harvest rotation energy from an automobile brake	8
Removal of recast layer in the laser drilled film cooling holes by a two-step inner streaming electrochemical technique	8
Enhancement of passive mixing via arc microchannel with sharp corner structure	8
Micromachined threshold inertial switches: a review	8
A comprehensive review on non-active micro-pumps for microfluidic platforms	8
Process and device simulations aimed at improving the emitter region performance of silicon PERC solar cells	8
An ultra-thin transparent multi-functional sensor based on silk hydrogel for health monitoring	8
A microfluidic chip integrated with 3D sidewall electrodes and wavy microchannel for cell focusing and separation	8
A dual-driven biomimetic microrobot based on optical and magnetic propulsion	8
Mode localized artificial hair sensor with enhanced linearity applied for dual-axis air flow sensing	8
PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation	8
On-chip micro pressure sensor for microfluidic pressure monitoring	8
A perspective of active microfluidic platforms as an enabling tool for applications in other fields	8

High-performance transparent electromagnetic interference shielding film based on metal meshes	8
Surface activation of poly(methyl methacrylate) for microfluidic device bonding through a H2O plasma treatment linked with a low-temperature annealing	8
Fused silica microchannel fabrication with smooth surface and high etching selectivity	8
Implantable double-layer pump chamber piezoelectric valveless micropump with adjustable flow rate function	8
Derivation of analytical expressions for the stress/strain distributions, bending plane and curvature radius in multilayer thin-film composites	8
Micro electric discharge machining (μ-EDM) of polymer nanocomposites modified by graphene nanoplatelets/carbon using rotating electrode tool	7
Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control	7
Underwater anechoic layer with parallel metallic plate insertions: theoretical modelling	7
A resonant high-pressure sensor based on dual cavities	7
Recent trends in structures and applications of valveless piezoelectric pump—a review	7
Micromechanics for energy generation	7
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization	7
An on-chip test structure to measure the Seebeck coefficient of thermopile sensors	7
Basic concepts of biological microparticles isolation by inertia spiral microchannels in simple terms: a review	7
Electromicrofluidic device with integrated PDMS microchannel and laser-induced graphene electrodes for electrochemical detection of cardiac biomarker in a point-of-care platform	7
Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding	7
Micromechanical resonant cantilever sensors actuated by fringing electrostatic fields	7
Temperature stable rare earth magnetic powder Sm-Fe-N based micro magnets with remanence enhanced by easy axis alignment and its application in MEMS actuator	7
Xurography as a tool for fabrication of microfluidic devices	7
High-throughput acoustofluidic microchannels for single cell rotation	7
Design and material for a patternable polysiloxane acrylate-based penetrating intracortical neural probe	7
A flexible and highly sensitive capacitive pressure sensor with fast response based on a hierarchically micro-structured PDMS dielectric layer	7
Facile fabrication of sensitivity-tunable strain sensors based on laser-patterned micro-nano structures	7
A wireless passive pressure sensor using microstructured ferromagnetic films with tunable effective permeability	7
Effects of both the drive- and sense-mode circuit phase delay on MEMS gyroscope performance and real-time suppression of the residual fluctuation phase error	7
Optimization of x-ray lithography conditions for fabrication of large arrays of high-aspect-ratio submicron pores	7
Microfluidic biochip platform sensitized by AgNPs for SERS based rapid detection of uric acid	7
Design, modeling and experimental validation of a micro cantilever beam with an electro-controllable twisting ability	7
Geometry effects on flow characteristics of micro-scale planar nozzles	7
On the design of a two-way piezoelectric MEMS microspeaker based on a multi-shape cantilever array for high-frequency applications	7
Motion of generated dumbbell-shaped satellite droplets during liquid dielectrophoresis	7
Design and manufacture of a micro-tensile testing machine for in situ optical observation and DIC analysis: application to 3D-printed and compression-molded ABS	7
Low cost technology for the fabrication of anti-counterfeiting microtaggants	7
Stable 3D inertial focusing by high aspect ratio curved microfluidics	7
Adhesion enhancement strategy for Parylene C substrate by nanograss technique	6
A piezoelectric micromachined ultrasonic transducer with mechanical grooves	6
Self-supporting 3D printed flexible liquid metal electrodes for electrostatically microfluidic valves	6
Acoustic wave amplification with thin film silicon bonded on lithium niobate	6
Hermetic chip-scale packaging using Au:Sn eutectic bonding for implantable devices	6
A thermal microfluidic actuator based on a novel microheater	6
Atmospheric micro-sized cold plasma jet created by a long and ultra-flexible generator with sputtered gold thin film electrode	6
Conventional surface micromachining process for the fabrication of a linear optical phased array based on piston micromirrors	6
Solving curing-protocol-dependent shape errors in PDMS replication	6
A programmable 3D printing method for magnetically driven micro soft robots based on surface tension	6
Mechanical characteristics of laminated film vibrator using an ultra-thin MEMS actuator	6
Mechanical reliability of silicon microstructures	6
A cantilever-based resonator for reconfigurable nanomechanical computing	6
A multi-scale E-jet 3D printing regulated by structured multi-physics field	6
Recent advances in power supply strategies for untethered neural implants	6
A pneumatically controlled microfluidic rectifier enabling zero backflow under pulsatile flow regime	6
Micro/nanofiber fabrication technologies for wearable sensors: a review	6
A predictive model for electrostatic energy harvesters with impact-based frequency up-conversion	6
Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application	6
Development of microfluidic cartridge for culture-free detection of Staphylococcus aureus in blood	6
Silicon monolithic microflow sensors: a review	6
A review of assembly techniques for fabricating twisted bilayer graphene	6
Flexible pressure and temperature dual-modality sensor based on stretchable electrode for human–machine interaction	6
Mechanically coupled cantilever beam structure for piezoelectric energy harvesting	5
An ultrafast response and precisely controllable soft electromagnet actuator based on Ecoflex rubber film filled with neodymium-iron-boron	5
Performance enhancement of piezoelectric bulk mode MEMS mode-matched gyroscopes based on a secondary phase feedback loop	5
Development of droplet microfluidics capable of quantitative estimation of single-cell multiplex proteins	5
Progress of biomechanical energy harvesters for wearable electronic applications	5
Sub-micrometer plasma-enhanced chemical vapor deposition using an atmospheric pressure plasma jet localized by a nanopipette scanning probe microscope	5
The quality factor of quartz DETF for resonant sensors: simulation, analysis and verification	5
Strain engineering of graphene nano-resonator	5
Micro hole drilling of high frequency printed circuit board containing hard fillers	5
Rapid prototyping of noncontact microwave microfluidic devices for sensing applications	5
Programmable intelligent liquid matter: material, science and technology	5
2D FPCB micromirror for scanning LIDAR	5
Parameter uncertainty and noise effects on the global dynamics of an electrically actuated microarch	5
High density cleanroom-free microneedle arrays for pain-free drug delivery	5
Elastic-plastic properties of mesoscale electrodeposited LIGA nickel alloy films: microscopy and mechanics	5
Miniature and tunable high voltage-driven soft electroactive biconvex lenses for optical visual identification	5
Active real-time electric field control of the e-jet in near-field electrospinning using an auxiliary electrode	5
Impact of support material deformation in MEMS bulk micromachined diaphragm pressure sensors	5
Optimization of the co-axial dispensing nozzle of a 3D bioprinter for the fabrication of tubular structures with micro-channel encapsulation	5
Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application	5
Picoliter liquid handling at gas/liquid interface by surface and geometry control in a micro-nanofluidic device	5
Fabrication, modeling, and characterization of soft twisting electrothermal actuators with directly printed oblique heater	5
Development of MEMS-based piezoresistive 3D stress/strain sensor using strain technology and smart temperature compensation	5

Micromachined piezoelectric Lamb wave resonators: a review	5
Fractional order zero phase error tracking control of a novel decoupled 2-DOF compliant micro-positioning stage	5
A position sensing method for 2D scanning mirrors	5
A monolithic Si-micromachined four-stage Knudsen pump for µGC applications	5
Novel 3D printed single electrode-based portable and miniaturized electrochemiluminescence platform to detect lactate from human serum	5
Shoulder fillet effects in strength distributions of microelectromechanical system components	5
Fluid control with hydrophobic pillars in paper-based microfluidics	5
Dynamic behaviours of double-ended tuning fork based comb-driven microelectromechanical resonators for modulating magnetic flux synchronously	5
Experimental amplitude and frequency control of a self-excited microcantilever by linear and nonlinear feedback	5
A review of rarefied gas flow in irregular micro/nanochannels	5
Unapodization: a method to produce laterally uniform surface acoustic waves for acoustofluidics	5
Shock-free ion transmission in a skimmer-based MEMS mass spectrometer vacuum interface	5
Burr removal from high-aspect-ratio micro-pillars using ultrasonic-assisted abrasive micro-deburring	5
Study on soft hot embossing process for making microstructures in a cyclo-olefin polymeric (COP) film	5
Feasibility study of a micro-electro-mechanical-systems threshold-pressure sensor based on parametric resonance: experimental and theoretical investigations	5
Design and fabrication of non-resonant PZT MEMS micromirror with buried piezoresistors for closed loop position control	5
Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation	4
A sheathless high precise particle separation chip integrated contraction–expansion channel and deterministic lateral displacement	4
High-reliability circular-contact RF MEMS switches in silicon hermetic package	4
A self-attachable and self-alignable micro electromagnetic linear actuator	4
Measurement of the electric permittivity using Bleustein–Gulyaev wave sensor	4
Performance of aluminum nitride-based piezoelectric micromachined ultrasonic transducers under different readout configurations	4
Inexpensive and rapid fabrication of PDMS microfluidic devices for biological testing applications using low cost commercially available 3D printers	4
Design and development of a piezoelectric driven micropump integrated with hollow microneedles for precise insulin delivery	4
Microfluidic system manufacturing by direct laser writing for the generation and characterization of microdroplets	4
Toward the development of a label-free multiple immunosensor based on thin film transistor microelectrode arrays	4
A comparison of pad metallization in miniaturized microfabricated silicon microcantilever-based wafer probes for low contact force low skate on-wafer measurements	4
A grade 1 titanium capacitive microsensor for continuous pressure monitoring of intracorporal pressures	4
Enhancing the performance of dielectric elastomer actuators through the approach of distributed electrode array with fractal interconnects architecture	4
Low cost, contamination-free, and damage-free fabrication of PZT MEMS on SOI substrate	4
Employing fluorescence analysis for real-time determination of the volume displacement of a pneumatically driven diaphragm micropump	4
Scotch-tape surface wrinkling based thin-film material properties extraction	4
Fully differential higher order transverse mode piezoelectric membrane resonators for enhanced liquid-phase quality factors	4
Sol–gel-derived nanoparticles coated liquid entities: liquid marbles, liquid plasticine, and flat interface	4
Fabrication of high-aspect-ratio polydimethylsiloxane microstructures by reducing the interfacial adhesion in soft lithography	4
High-density stretchable microelectrode array based on multilayer serpentine interconnections	4
Fabrication and characterization of annular-shaped piezoelectric micromachined ultrasonic transducer mounted with Pb(Zr,Ti)O3-based monocrystalline thin film	4
Development of microfluidic flow cytometry capable of characterization of single-cell intrinsic structural and electrical parameters	4
Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer	4
Adhesion of Flk1-expressing cells under shear flow in phospholipid polymer-coated immunoaffinity channels	4
Micro-machined stent flow sensor for detecting breathing and heartbeat from airflow in airway of rat	4
The effect of quaternary ammonium salts with different chain lengths on copper filling behavior in blind holes of printed circuit board	4
Design and evaluation of a linear nozzle array with double auxiliary electrodes for restraining cross-talk effect in parallel electrohydrodynamic jet printing	4
MEMS audio speakers *	4
Fabrication of microgrooves with secondary microstructures by electrical discharge machining using a functionally graded laminated electrode	4
A novel electromagnetic microactuator with a stainless steel mas-spring structure	4
Micromachining of polymers using atmospheric pressure inductively coupled helium plasma localized by a scanning nanopipette probe microscope	4
A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance	4
Novel narrowband radio frequency microelectromechanical systems filters	4
Biocompatible bonding of a rigid off-stoichiometry thiol-ene-epoxy polymer microfluidic cartridge to a biofunctionalized silicon biosensor	4
Investigating WBC margination in different microfluidic geometries: influence of RBC shape and size	4
Design and testing of a novel multipath-actuation compliant manipulator	4
Development of multi-depth probing 3D microelectrode array to record electrophysiological activity within neural cultures	4
Recent progress in stretchable and self-healable supercapacitors: active materials, mechanism, and device construction	4
Micromechanical vibro-impact systems: a review	4
Development of an EGFET microsensor with 3D structure for high-specificity cardiac troponin I detection	4
Analytical and experimental study of the dynamics of a micro-electromechanical resonator based digital-to-analog converter	4
Bonding Methods for Chip Integration with Parylene Devices	4
Efficient removal of condensate droplets from the surface with microgroove composite structures	4
On overtravel and skate in cantilever-based probes for on-wafer measurements	4
Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumes	4
Facile fabrication of binary wettability patterned microstructure for microfluidics	4
Measurement and control of stiction force in in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts	4
Laser drilling of stainless steel foil with reduced sidelobe ablation using a spatially filtered Bessel–Gauss beam	3
Topology optimization design of compliant amplification mechanisms with low parasitic displacement	3
A bi-stable mechanism actuated by patterned permanent magnet and Cu-Ni integrated micro-coil	3
A hollow microlattice based ultralight active thermal control device and its fabrication techniques and thermal performances	3
Bioinspired drag reduction surfaces via triple lithography method based on three-layer hybrid masks	3
Rotational speed measurements of small spherical particles driven by acoustic viscous torques utilizing an optical trap	3
Electric field sensing characteristics of ZnO/SiO2/Si surface acoustic wave devices	3
A non-invasive and high precision sensor for in-situ temperature monitoring of cells	3
Efficient system-level simulations of thermal wind sensors considering environmental factors	3
An electrochemical biosensor with integrated microheater to improve the sensitivity of electrochemical nucleic acid biosensors	3
Integrated cooling system for microfluidic PDMS devices used in biological microscopy studies	3
Use of liquid lithography to form in vitro intestinal crypts with varying microcurvature surrounding the stem cell niche	3
Temperature and pressure effects on microchannels dimensions in hot embossing	3
Machine learning-based off-line electrical characteristic prediction through in-line pattern integrity inspection	3
SEM image-guided manipulation with a feedback assistance system for automated nanohandling of a 4 DOF micromanipulator	3
Etch the borosilicate glass to form a straight through-glass-via based on the FLACE technology	3
Manufacturing and assembly of an all-glass OCT microendoscope	3
Propulsion reversal in oscillating-bubble powered micro swimmer	3
Data-driven model-free adaptive sliding mode control for electromagnetic linear actuator	3
Scanning digital oil immersion lithography providing high-speed large area patterning with diffraction limited sub-micron resolution	3
Optimization of plotter printing for sub-terahertz metallic metasurfaces fabrication on ultra-thin substrate	3
A silicone based piezoelectric and electromagnetic hybrid vibration energy harvester	3
RF MEMS filter based on dual liquid variations	3
Textile handicraft for equipment-free fabrication of wearable low-cost diagnostic sensors for body-fluid based pathology	3
Implanted microelectrode arrays for evaluating inhibited seizure modulated by light-responsive hydrogel	3
Fabrication and characterization of suspended La0.7Sr0.3MnO3 nanofibers for high-sensitive and fast-responsive infrared bolometer	3
Analysis of DefeXtiles: a 3D printed textile towards garments and accessories	3
Etch-less microfabrication of structured TiO2 implant coatings on bulk titanium grade 23 by direct lithographic anodic oxidation	3
An A0 mode Lamb-wave AlN resonator on SOI substrate with vertically arranged double-electrodes	3
Irreversible, self-aligned microfluidic packaging for chronic implant applications	3
Influence of source electrode metal work function on polar gate prompted source hole plasma in arsenide/antimonide tunneling interfaced junctionless TFET	3
Fabrication of low-cost MEMS microfluidic devices using metal embossing technique on glass for lab-on-chip applications	3