Journal of Micromechanics and Microengineering

Article	Citations
A long-stroke planar linear actuator equipped with magnetic guide	94
Regulating the electrical performance of contact-separation mode triboelectric nanogenerators based on double-sided groove textures	44
Wearable microfluidic sweat collection platform with a calorimetric flow rate sensor for realtime and long-term sweat rate measurements	35
An SOI-based post-fabrication process for compliant MEMS devices	34
Bistable liquid shutter operated by DEW actuation for multifunctional miniature cameras	27
Magnetically maneuverable micromixer using acoustically excited bubbles	27
The radial point interpolation method (RPIM) for analyzing a V-shaped electrothermal actuator	25
Design and fabrication of a low-cost microfluidic cartridge with integrated pressure-driven check valve for molecular diagnostics platforms	24
PDMS-polyimide transcutaneous blood gas collector with self-folding out-of-plane heater elements	24
High density cleanroom-free microneedle arrays for pain-free drug delivery	22
Passive communication for low power distributed sensors using MEMS optical cavities	21
Deep silicon etching technology and applications: a review	21
RF MEMS capacitive shunt switch for low loss applications	20
Fabrication of an X-shaped micro-copper structure containing a merging joint based on localized electrochemical deposition	20
Measurement and control of stiction force in in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts	19
Miniature and tunable high voltage-driven soft electroactive biconvex lenses for optical visual identification	19
Enabling water-based EVA adhesives for solvent-free aerosol jet printing in microfabrication	19
Performance evaluation of a 3D split-and-recombination micromixer with asymmetric structures	19
PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation	18
Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics	18
Experimental study on acoustic-induced microbubbles fusion	17
Near thermal-electric field controlled electrohydrodynamic 3D printing of high aspect ratio microstructures	17
A high-sensitivity MEMS fluxgate sensor with double-layer induction coils fabricated by micro-casting	16
Graphene resonant pressure sensor with ultrahigh responsivity-range product	16
Microfluidic cells for the 1–102 MPa pressure range	16

A quantitative study of the dynamic response of compliant microfluidic chips in a microfluidics context	16
Etch the borosilicate glass to form a straight through-glass-via based on the FLACE technology	16
Sub-miniature rolling thrust micro-bearing	15
A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design	15
A preparation technology of micro-structure glass based on mixed micro and nano powders	15
Fabrication of grooved LGS resonators based high temperature SAW sensors and analysis with FEM simulation	14
Electric field sensing characteristics of ZnO/SiO2/Si surface acoustic wave devices	14
Producing micro impressions on Al6061 under alumina-mixed deionized water as dielectric during electric discharge machining	14
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization	14
Development of microneedle based blood extraction device	14
Micromachined threshold inertial switches: a review	14
Optical polymer aligner fabricated by 2pp for connecting angled fiber to an optical chip	14
Bioinspired drag reduction surfaces via triple lithography method based on three-layer hybrid masks	14
Temperature and pressure effects on microchannels dimensions in hot embossing	14
In-situ measurement of anisotropic Young’s modulus in fused deposition modeling printed cantilevers	13
Research on the measurement of wet etching rates and Level Set simulation of patterned sapphire substrates	13
Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors	12
A rapid method for fabricating and replicating microlens array structures	12
High throughput microfluidic drug screening system for corneal epithelial wound healing	12
Reflective x-ray masks for x-ray lithography	12
Research on acoustic sensing device based on microfiber knot resonator	12
Direct current triboelectric nanogenerators: a review	12
Effects of rolled fibrous microstructure on fatigue properties of extruded Cu-5Al planar micro springs	12
A review of research on RF MEMS for metaverse interactions	12
Support-free fabrication of elastic silicone microstructures via direct ink writing for soft robotic applications	12
Variational-based data-driven model identification of micro resonator systems	12
Corrigendum: Fabrication of FP-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process (2019 J. Micromech. Microeng. 29 025008)	11
Quadrant kirigami-type electrothermal MEMS actuator with multi-degree-of-freedom morphing capability	11
Numerical simulation of a nebulizer with multiple orifices	11
The multimodal motion along a solid–liquid interface of a soft microrobot driven by compound magnetic fields	11
Edge smoothness enhancement of digital lithography based on the DMDs collaborative modulation	11
Comparative analysis and tests for an improved frequency tuning area-varying electrode considering the influence of fringe capacitance	11
Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures	11
Study of super flexible mixed phase piezoresistive pressure sensor	10
Efficient heat dissipation with hybrid composite-based microfluidic heat sinks in flexible electronics	10
Nonlinear design, analysis, and testing of a single-stage compliant orthogonal displacement amplifier with a single input force for microgrippers	10
The effect of quaternary ammonium salts with different chain lengths on copper filling behavior in blind holes of printed circuit board	10
Fast analysis of MEMS micromirror based on multi-physical electro-mechanical-damping coupling method	10
Semi-reflective visor-based compact head-worn light field display	10
Low-voltage electrostatic manipulation of microparticles using a single carbon fiber probe	10
Flexible pressure/temperature sensors with heterogeneous integration of ultra-thin silicon and polymer	10
Noninvasive measurement of temperature for simulated tissue based on piezoelectric micromachined ultrasonic transducers	10
Three-dimensional AC electroosmotic micropump with high power density	10
Performance of aluminum nitride-based piezoelectric micromachined ultrasonic transducers under different readout configurations	9
Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer	9
Highly responsive screen-printed asymmetric pressure sensor based on laser-induced graphene	9
A highly accurate analytical method for determination of the vibrational frequency of N/MEMS with electrostatic and van der Waals interaction forces	9
Formation of silver wires embedded in hydrogels using femtosecond laser ablation and electroplating for strain sensing	9
Carbon dioxide reduction utilizing a bismuth halide perovskite as immobilized photocatalyst in a 3D printed microreactor	9
Unsealed piezoelectric MEMS speaker with rigid-flexible composite membrane	9

Flexible flow sensors-enabled intelligent life	9
A penetration efficiency model for the optimization of solid conical microneedles’ geometry	9
Efficient annular aperture array (AAA) filter for thermophotovoltaic by sidewall lithography	9
Manufacturing of hydraulically steerable actuator using closed molding and core template for vascular intervention guidewires	9
Diversified plasmonic metallic nanostructures with high aspect ratio based on templated electrochemical deposition	9
Evaluation of Bosch processing and C4F8 plasma deposition at cryogenic temperatures	9
A novel approach to determining the hydrodynamic resistance of droplets in microchannels using active control and grey-box system identification	9
Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application	9
Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer	9
Knudsen force based double beam MEMS vacuum pressure sensor	9
Microfluidic multicolor display by juxtapositional color mixing with a pattern of primary color pixels	9
Influence of process parameters on the characteristics of electrohydrodynamic-printed UV-curing conductive lines on the fabric	9
Non-faradaic electrochemical impedance spectroscopy analysis of C-MEMS derived bio-modified glassy carbon electrode	9
Precise in-situ fabrication of perovskite single crystal arrays via cosolvent based electrohydrodynamic printing	8
Phase noise modelling of MEMS resonant accelerometer with non-AGC-driven circuit	8
Design optimization and experimental verification of ultrasonic stack for micro hot embossing of polymers	8
Nanofluidic gas/liquid switching utilizing a nanochannel open/close valve based on glass deformation	8
Performance analysis of synthetic jet micropump based on double piezoelectric actuators	8
Hierarchical integration of nanopillars and nanochannels in a nanofluidic device for single-nanoparticle detection	8
Thermal and hydraulic performance of Al alloy-based 3D printed triangular microchannel heatsink governed by rough walls with graphene and alumina nanofluids as working liquid	8
Micro- and nanoscale patterning of fluorescent materials via coaxial electrohydrodynamic jet printing	8
Fabrication and characterization of annular-shaped piezoelectric micromachined ultrasonic transducer mounted with Pb(Zr,Ti)O3-based monocrystalline thin film	8
Dynamic behaviours of double-ended tuning fork based comb-driven microelectromechanical resonators for modulating magnetic flux synchronously	8
Review of scaling effects on physical properties and practicalities of cantilever sensors	8
Design, development, and testing of active valve piezo-hydraulic pump	8
Damping of 3D-printed polymer microbeam resonators	7
Highly sensitive flexible capacitive pressure sensor with structured elastomeric dielectric layers	7
Development of piezoresistive flexible sensor with dual-height cylindrical microstructure surfaces to achieve vehicle vibration monitoring	7
Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation	7
Efficient strategy for frequency design and bandwidth extension of curved piezoelectric ultrasonic micromachined transducers	7
Investigating capacitive flexible tactile sensor with a wide measuring range using PVDF and conductive sponge	7
Micromechanical piezoelectric micromachined ultrasonic transducer array package enhancement with integrated frontliners	7
Design and performance evaluation of a single piezoelectric stacked drive jet dispensing valve	7
Mixed particles separation based on a cylindrical microfluidic centrifuge	7
Micromachining of nickel and nickel-based alloy surfaces using composite signal	7
A Si-based suspended tunnel structure with trapezoidal section by two-step etching	7
Studies on drug delivery from dissolving microneedle and its uptake in tissue	7
RF MEMS electrostatically actuated tunable capacitors and their applications: a review	7
A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance	7
Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001)	6
RF MEMS filter based on dual liquid variations	6
A low-cost 3D-printing based rapid fabrication procedure for modular microfluidic platform	6
Diamond ICP-DRIE etching technology with PECVD SiO2 as mask	6
Design and analysis of a dual-actuator force-balanced MEMS pressure sensor	6
The effect of DRIE notching on field emission enhanced breakdown in SOI based MEMS electrodes	6
Displacement-controlled coining of large arrays of gold stud bumps	6
Ultra-low power signal conditioning system for effective biopotential signal recording	6
Splashing of droplet under the vibration effect of flexible membrane	6
Effect of SiO2 protective layer on LiNbO3 structured SAW resonators and temperature characteristics study	6
A compact and reconfigurable C-band DGS-based power divider using RF MEMS capacitive switch	6
CMUT modeling—extension to soft boundaries and thick plates	6
Active vibration reduction of tool holder in hole turning process using machine learning with the assistance of magnetic force	6
Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study	6
Self-calibration of micro-components based on manipulator guidance	6
High-performance transparent heater with Ag paste-based nanomesh electrodes	6
A novel electromagnetic microactuator with a stainless steel mas-spring structure	6
Electrohydrodynamic jet printed templates for hot embossing of microfluidic devices	6
PDMS micro check valve with 3D valve disk for reducing fluid resistance	6
CMOS microsensor packaging for use in aqueous media	6
Wafer level hermetic bonding and packaging using recrystallized parylene	6
Micro/nano-transfer printing of gold thin films via atomic diffusion bonding: effects of air-exposure time and stamp modulus	6
Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application	6
Fabrication and characterization of suspended La0.7Sr0.3MnO3 nanofibers for high-sensitive and fast-responsive infrared bolometer	6
High-frequency and low-loss SAW devices based on LiTaO3/Sapphire hetero-structure	6
Heterogeneous micro-architectonic integration of SU-8 and highly entangled polyacrylamide hydrogel to realize cut-resistant soft superhydrophobic surfaces	6
A multi-scale E-jet 3D printing regulated by structured multi-physics field	6
A simple way to predict the flip–chip gap	6
Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system	6
Flow behaviors and transmission characteristics of Knudsen pump with blocked microchannels	6
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection	6
An analytical model of three-hot-wire acoustic particle velocity sensors	6
Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout	6
Numerical simulation of wet etching for R angle of fine metal mask	6
Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure	6
Sub-10 nm metal nanogaps with high SERS performance via a novel conformal coating process	5
Fabrication of micro-ultrasonic phased array electrode via electric field-driven printing method	5
Combination of anti-miR19a-3p polyplex plus doxorubicin for breast cancer in 2D culture and apoptosis assay in 3D spheroids in a microwell device	5
Accurate holographic cytometry using three-dimensional hydrodynamic focusing	5
Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation	5
Ultra-high precision passive particle sorting chip coupling inertial microfluidics and single row micropillar arrays	5

Micromachined piezoelectric Lamb wave resonators: a review	5
Fused silica microchannel fabrication with smooth surface and high etching selectivity	5
Laser drilling of stainless steel foil with reduced sidelobe ablation using a spatially filtered Bessel–Gauss beam	5
3D printing-based microfluidic devices in fabric	5
A 3D-printed spiral actuator for focus adjustment in circumferential scanning endomicroscopy	5
On the design of a two-way piezoelectric MEMS microspeaker based on a multi-shape cantilever array for high-frequency applications	5
Fabrication and integration of diffraction gratings on electrostatic stepper motor for imaging spectrometer applications	5
Large area nanoscale patterning of functional materials using organosilicate ink based nanotransfer printing	5
Large stroke electromagnetic redundant actuated six degrees-of-freedom parallel compliant micropositioning stage	5
Noncontact MEMS thermal flow sensors integrated in glass microfluidic chemical chip	5
A novel integrated stir–ultrasonic–squeeze casting route for fabricating AA6061-based metal matrix hybrid nanocomposites with enhanced tribomechanical properties	5
Selective metallic reinforcement of silver nanowire junctions for improving the electrical conductivity of transparent electrodes	5
Development of an EGFET microsensor with 3D structure for high-specificity cardiac troponin I detection	5
Investigation on drag reduction of micro-structured PDMS film with self-replenishing bubble using water electrolysis	5
Experimental and simulation investigation for imprinting and buckling of V-groove/wrinkles hierarchical array	5
Improvement on the uniformity of deep reactive ion etch for electrically isolated silicon-based substrates	5
Fabrication of microneedles using wire electric discharge machining and improving surface quality by electrochemical polishing	5
Surface reaction between immobilized magnetic microbead-tagged antibodies and electroosmotic flow-driven antigens in a microfluidic device for a realistic higher Damkohler number – a numerical approac	5
Nanosecond pulsed laser transmission welding of cyclic olefin copolymer	5
Manufacturing and measurement of CMOS-MEMS-based micro thermoelectric generators with long-length thermocouples	4
Recent trends in structures and applications of valveless piezoelectric pump—a review	4
High-accuracy prediction of microcantilever sensor for fluid detection: simulation to deep learning	4
Transparent glass force plate with CrN strain gauges featuring a notch structure	4
Innovating in-situ characterization: a comprehensive measurement system for measuring the ZT and the contact resistance of vertical thermolegs exploiting the vertical transfer length method	4
Characteristics of an antistatic semiconductor bridge based on micro/nano processing techniques	4
Micro-gas sensor with a suspended micro-heater for ammonia gas detection	4
A non-invasive and high precision sensor for in-situ temperature monitoring of cells	4
A perspective of active microfluidic platforms as an enabling tool for applications in other fields	4
Optimisation of neural network hyperparameters for predictive modelling in laser micromachining of biopolymers	4
Picoliter liquid handling at gas/liquid interface by surface and geometry control in a micro-nanofluidic device	4
Flow-through microfluidic relative permittivity sensor using highly-doped silicon sidewall electrodes	4
A numerical modeling approach to estimate the piezoresistance of diffused resistors with experimental validation	4
Micromixing strategies for efficient mixing processes: a comprehensive review	4
Design and fabrication of lithium niobate asymmetrical mode resonators toward C-band and Ku-band	4
A resonant high-pressure sensor based on dual cavities	4
Precision optimization of femtosecond laser micromachining for endovascular neural interfaces based on RSM and machine learning	4
High-density stretchable microelectrode array based on multilayer serpentine interconnections	4
Corrigendum: Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique (2024 J. Micromech. Microeng.	4
Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment	4
A novel micro-device for simultaneous separation-trapping and double-trapping of particles by using dielectrophoresis: numerical and experimental study	4
A two-channel ultrasonic flowmeter based on AlN piezoelectric micromachined ultrasonic transducers arrays with improved cross-correlation method	4
MEMS—suspended gate field effect transistor (SGFET) accelerometer process integration with parylene flexure and plasma doping	4
On the design of piezoelectric actuator for 1D MEMS scanning mirror applications	4
3D simulation estimation and experimental validation of droplet generation in CFD-based flow-focusing microfluidic chips	4
Integrated cooling system for microfluidic PDMS devices used in biological microscopy studies	4
A novel electromagnetic micropump with PDMS membrane supported by a stainless-steel microstructure	4
Microfluidics in cardiac microphysiological systems: a review	4
Surface acoustic wave bound state in the continuum for 1200 °C high temperature sensing	4
A novel microfluidic viscometer for measuring viscosity of ultrasmall volumes of Newtonian and non-Newtonian liquids	4
Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces	4
Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique	4
Zinc film anodes for air microbatteries: fabrication, approaches, and utilization optimization	4
Design and testing of a novel multipath-actuation compliant manipulator	4
Study on the mechanism of glass-SiC-glass anodic bonding process	4
High-reliability circular-contact RF MEMS switches in silicon hermetic package	4
Fabrication of Cu/SiC composite microgears by microelectroforming using PDMS-Cu conductive molds	3
Monitoring of physiological sounds with wearable device based on piezoelectric MEMS acoustic sensor	3
Modelling simulation and experimental study of electromagnetic microvibration energy capture systems	3
Micromechanical valve-operated needle-on-a-chip microinjection module for microfluidic large-scale integration	3
Quantifying and correcting tilt-related positioning errors in microcantilever-based microelectromechanical systems probes	3
Mechanical reliability of silicon microstructures	3
Microscale nuclear magnetic resonance gradient chip	3
A thermal microfluidic actuator based on a novel microheater	3
Programmable intelligent liquid matter: material, science and technology	3
Capillary enhanced phase change in a microfabricated self-oscillating fluidic heat engine (SOFHE)	3
A novel piezoelectric RF-MEMS resonator with enhanced quality factor	3
Extracting white blood cells from blood on microfluidics platform: a review of isolation techniques and working mechanisms	3
Flow-insensitive micro-thermal conductivity detector with semi-diffusion gas channel	3
Enhanced automatic sorting of liquid crystal droplets via a rotating radial light pattern in an optoelectronic tweezers system	3
Preparation of robust superhydrophobic surface on PET substrate using Box-Behnken design and facile sanding method with PTFE powder	3
High thickness material lift-off using multi-layer photoresist	3
Accessible, large-area, uniform dose photolithography using a moving light source	3
Topology optimization design of compliant amplification mechanisms with low parasitic displacement	3
Vapor etching to avoid micro-masking by gas-bubbles in wet release of MEMS	3
A novel MEMS inertial switch with frictional electrode	3
Physics-guided machine-learning enhanced electrostatic actuated method for in-situ measurement of Young’s modulus	3
Development of crystallized thick, highly doped a-Si:H layers for surface micromachining of MEMS inertial sensors	3
Evaluation of solvent releases from microfluidic devices made of cycloolefin polymer by temperature-desorption mass spectrometry	3
An A0 mode Lamb-wave AlN resonator on SOI substrate with vertically arranged double-electrodes	3
On overtravel and skate in cantilever-based probes for on-wafer measurements	3
Design and optimization of electrode-integrated microfluidic chips for enhanced electrochemical impedance spectroscopy assessments	3
MEMS audio speakers *	3
Applications of capacitive micromachined ultrasonic transducers combined with micro- and nanomaterials: a review	3
Cooling high heat flux with flow boiling in 2D-structured radial microchannel heat sink	3
Design and evaluation of a linear nozzle array with double auxiliary electrodes for restraining cross-talk effect in parallel electrohydrodynamic jet printing	3
High-throughput particle focusing and separation in split-recombination channel	3
Nanometer-thick ultraflat cantilever resonators	3
Scotch-tape surface wrinkling based thin-film material properties extraction	3
The Lifetime Prediction and Enhancement of RF MEMS Switches	3
Adaptive frequency-stabilization of MEMS oscillators using mode coupling	3
High-Q terahertz bandstop filter via cuboid frame structure	3
Corrigendum: Adherable temperature sensor to a porous structure of fiber via reduced graphene oxide and poly(diallyldimethylammonium chloride) complex (2022 J. Micromech. Microeng. 32	3
Study on the cause of pore defects processed by focused ion beam milling on high roughness surface	3
An universal microfluidic dual-mode shear droplet preparation structure	2
Bottom-up micromachined PZT film-based ultrasonic microphone with compressible parylene tube	2