Journal of Micromechanics and Microengineering

(The median citation count of Journal of Micromechanics and Microengineering is 2. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 500 papers]. The publications cover those that have been published in the past four years, i.e., from 2019-11-01 to 2023-11-01.)
Silicon electro-optic micro-modulator fabricated in standard CMOS technology as components for all silicon monolithic integrated optoelectronic systems *236
Design and engineering of Mn conical sculptured thin films as both electrodes for a gas sensor: ionization and field emission studies57
MEMS actuators for biomedical applications: a review52
Technology evolution from micro-scale energy harvesters to nanogenerators51
Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era41
RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook40
Silicon MEMS inertial sensors evolution over a quarter century34
Development of in vitro 2D and 3D microelectrode arrays and their role in advancing biomedical research34
Advances in precision micro/nano-electroforming: a state-of-the-art review31
Highly sensitive, reliable and flexible piezoresistive pressure sensors based on graphene-PDMS @ sponge31
Fabrication and characterization of a fully conventionally machined, high-performance porous-media electrospray thruster30
Terahertz MEMS metadevices25
Optimization and characterization of direct UV laser writing system for microscale applications25
Real-time physiological sensor-based liver-on-chip device for monitoring drug toxicity25
Suspended micro/nano channel resonators: a review25
Direct printing of sub-30 μ m liquid metal patterns on three-dimensional surfaces for stretchable electronics24
Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators24
Ultra-low power signal conditioning system for effective biopotential signal recording19
Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators18
Highly sensitive ionic pressure sensor based on concave meniscus for electronic skin18
Development of high-sensitivity piezoresistive pressure sensors for −0.5…+0.5 kPa18
Recent advances on fabrication of microneedles on the flexible substrate18
Inlaid microfluidic optics: absorbance cells in clear devices applied to nitrite and phosphate detection17
A rotating permanent magnetic actuator for micropumping devices with magnetic nanofluids17
CMOS-MEMS technologies for the applications of environment sensors and environment sensing hubs16
Induced-charge electrokinetics in microfluidics: a review on recent advancements15
RF MEMS electrostatically actuated tunable capacitors and their applications: a review15
Frequency tunable resonant magnetoelectric sensors for the detection of weak magnetic field14
Monitoring of physiological sounds with wearable device based on piezoelectric MEMS acoustic sensor14
Linear parametric amplification/attenuation for MEMS vibratory gyroscopes based on triangular area-varying capacitors14
A high-stability triboelectric nanogenerator with mechanical transmission module and efficient power management system14
High-sensitivity liquid-metal-based contact lens sensor for continuous intraocular pressure monitoring14
A review of MEMS-based metal oxide semiconductors gas sensor in Mainland China13
Integrated 3D printed microfluidic circuitry and soft microrobotic actuators via in situ direct laser writing13
Highly responsive screen-printed asymmetric pressure sensor based on laser-induced graphene12
Evaluation of the impact of abnormal grains on the performance of Sc0.15Al0.85N-based BAW resonators and filters12
Modeling and fabrication of electrostatically actuated diaphragms for on-chip valving of MEMS-compatible microfluidic systems12
Numerical simulations of 22% efficient all-perovskite tandem solar cell utilizing lead-free and low lead content halide perovskites12
Power enhancement of MEMS vibrational electrostatic energy harvester by stray capacitance reduction12
A novel capacitive micro-accelerometer made of steel using micro wire electrical discharge machining method11
Bistable Micro Caps Fabricated by Sheet Metal Forming11
Ultra-small pressure sensors fabricated using a scar-free microhole inter-etch and sealing (MIS) process11
The limits of edge bead planarization and surface levelling in spin-coated liquid films11
Experimental study on two-phase boiling in wavy copper microchannels fabricated with ultrafast laser micromachining11
Development of high-sensitivity pressure sensor with on-chip differential transistor amplifier11
A 350 °C piezoresistive n-type 4H-SiC pressure sensor for hydraulic and pneumatic pressure tests11
Large oscillation of electrostatically actuated curved beams11
An Integrative 3D printing method for rapid additive manufacturing of a capacitive force sensor11
Micro-cantilever sensors for monitoring carbon monoxide concentration in fuel cells11
A novel rare cell sorting microfluidic chip based on magnetic nanoparticle labels10
Non-intrusive DC voltage measurement based on resonant electric field microsensors10
Three-dimensional Fabry–Pérot cavities sculpted on fiber tips using a multiphoton polymerization process10
Flexible ZnO thin film acoustic wave device for gas flow rate measurement10
The impact of laser energy on the photoresponsive characteristics of CdO/Si visible light photodetector10
Mechanical characterization of polydimethylsiloxane (PDMS) exposed to thermal histories up to 300 °C in a vacuum environment10
Experimental comparison of surface chemistries for biomolecule immobilization on paper-based microfluidic devices10
Extracting white blood cells from blood on microfluidics platform: a review of isolation techniques and working mechanisms10
Programmable droplet actuating platform using liquid dielectrophoresis10
An ultrasonic flowmeter for liquid flow measurement in small pipes using AlN piezoelectric micromachined ultrasonic transducer arrays10
Development of 4D-printed shape memory polymer large-stroke XY micropositioning stages10
Experimental and simulation study of flow patterns in the combined flow focusing and T-junction device10
A stiffness-tunable MEMS accelerometer10
Sensing performance of room temperature operated MEMS gas sensor for ppb level detection of hydrogen sulfide: a review9
A dual-frequency piezoelectric micromachined ultrasound transducer array with low inter-element coupling effects9
Effect of film deposition rate on the thermoelectric output of tungsten-rhenium thin film thermocouples by DC magnetron sputtering9
Development of mechanically-robust piezoelectric micromachined ultrasonic transducer based on island-shaped monocrystalline PZT thin film partially covered with polyimide9
From CAD to microfluidic chip within one day: rapid prototyping of lab-on-chip cartridges using generic polymer parts9
Development of an active high-density transverse intrafascicular micro-electrode probe9
Nanoindentation behavior of UV-curable resist and its correlation with patterning defect in nanoimprint lithography9
Oscillation FPCB micromirror based triangulation laser rangefinder9
Advances in micro lithium-ion batteries for on-chip and wearable applications9
Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement9
A reconfigurable and portable acoustofluidic system based on flexible printed circuit board for the manipulation of microspheres9
Development of MEMS composite sensor with temperature compensation for tire pressure monitoring system9
Ultrafast laser in fabrication of micro hemispherical resonators with quality factor over millions9
Localized modulus-controlled PDMS substrate for 2D and 3D stretchable electronics8
Fabrication of a microcantilever-based aerosol detector with integrated electrostatic on-chip ultrafine particle separation and collection8
Nanomanufacturing of biopolymers using electron and ion beams8
Micro ultrasonic machining hemispherical mold for MEMS resonator gyroscope using a novel ultraprecise ceramic entire-ball tool8
Curved passive mixing structures: a robust design to obtain efficient mixing and mass transfer in microfluidic channels8
Analysis of mechanical deformation effect on the voltage generation of a vertical contact mode triboelectric generator8
Nanofluidic peristaltic pumps made from silica thin films8
Enhancement of passive mixing via arc microchannel with sharp corner structure8
An implantable microelectrode array for chronic in vivo epiretinal stimulation of the rat retina8
Second flexural and torsional modes of vibration in suspended microfluidic resonator for liquid density measurements8
A pulsed freestanding triboelectric nanogenerator and power management circuit to harvest rotation energy from an automobile brake8
Multi-step microfludic reactor for the synthesis of hybrid nanoparticles8
Sound dissipation from plate-type resonators excited in non-conventional transversal modes in liquids8
Fabrication and characterization of micro electromagnetic linear actuators8
Process and device simulations aimed at improving the emitter region performance of silicon PERC solar cells7
Surface activation of poly(methyl methacrylate) for microfluidic device bonding through a H2O plasma treatment linked with a low-temperature annealing7
Hybrid electrical and optical neural interfaces7
Channel integrated optoelectronic tweezer chip for microfluidic particle manipulation7
Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics7
Microfluidic chip fabrication and performance analysis of 3D printed material for use in microfluidic nucleic acid amplification applications7
Underwater anechoic layer with parallel metallic plate insertions: theoretical modelling7
SAW-driven self-cleaning drop free glass for automotive sensors7
Design and material for a patternable polysiloxane acrylate-based penetrating intracortical neural probe7
Liquid metal droplet-enabled electrocapillary flow in biased alternating electric fields: a theoretical analysis from the perspective of induced-charge electrokinetics7
Application of the evolutionary kinetic Monte Carlo method for the simulation of anisotropic wet etching of sapphire7
A dielectrophoresis-based microfluidic chip for trapping circulating tumor cells using a porous membrane7
Surface characterization of patterning on MgO single crystals using wet chemical etching process to advance MEMS devices7
Vibration analysis of MEMS vibrating mesh atomizer7
Design and manufacture of a micro-tensile testing machine for in situ optical observation and DIC analysis: application to 3D-printed and compression-molded ABS7
Underwater laser micro-milling of fine-grained aluminium and the process modelling by machine learning7
Crystal plasticity finite element simulation and experimental investigation of the micro-upsetting process of OFHC copper6
Micro-wrinkle strategy for stable soft neural interface with optimized electroplated PEDOT:PSS6
Design and investigation of dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal pocket TFET device as a label-free biosensor6
A review of geometric and structural design for reliable flexible electronics6
Laser pyrolysis for controlled morphing and chemical modification on 3D microlattices6
Characterization of manufacturability of microstructures for micro-injection moulding of micro devices using star patterns6
Microfluidic fabrication of stable collagen microgels with aligned microstructure using flow-driven co-deposition and ionic gelation6
A novel piezoelectric RF-MEMS resonator with enhanced quality factor6
Design, modeling and experimental validation of a micro cantilever beam with an electro-controllable twisting ability6
Self-aligned fabrication process for active membrane in magnetically driven micropump using photosensitive composite6
Noise model considering electrical feed-through under force rebalance closed-loop detection of MEMS gyroscope6
Direct current triboelectric nanogenerators: a review6
Integration of buried piezoresistive sensors and PZT thin film for dynamic and static position sensing of MEMS actuator6
Micromechanics for energy generation6
Development of a piezoelectric pump with unfixed valve6
Design and experimental investigation of a parallel flexure hinge-based 3D elliptical vibration-assisted cutting mechanism6
Low cost technology for the fabrication of anti-counterfeiting microtaggants6
Microelectroforming of freestanding metallic microcomponents using silver-coated poly(dimethylsiloxane) molds6
Fabrication and characterization of thin-film silicon resonators on 10 $\boldsymbol{{\mu}}$m-thick polyimide substrates6
A dual-driven biomimetic microrobot based on optical and magnetic propulsion5
Compact tunable mid-infrared Fabry–Pérot filters actuated by liquid crystal elastomers5
Burr removal from high-aspect-ratio micro-pillars using ultrasonic-assisted abrasive micro-deburring5
Fractional order zero phase error tracking control of a novel decoupled 2-DOF compliant micro-positioning stage5
A review of assembly techniques for fabricating twisted bilayer graphene5
Solving curing-protocol-dependent shape errors in PDMS replication5
On the PZT/Si unimorph cantilever design for the signal-to-noise ratio enhancement of piezoelectric MEMS microphone5
Basic concepts of biological microparticles isolation by inertia spiral microchannels in simple terms: a review5
Development of droplet microfluidics capable of quantitative estimation of single-cell multiplex proteins5
Capillary rheometer for magnetic fluids5
Analysis of the dynamic behavior of a V-shaped electrothermal microactuator5
Fabrication of ultra-high-aspect-ratio nano-walls and nano-structures on silicon substrates5
Frequency characteristics and thermal compensation of MEMS devices based on geometric anti-spring5
Volume-preserving strategies to improve the mixing efficiency of serpentine micromixers5
Direct polymer microcantilever fabrication from free-standing dry film photoresists5
Decomposition of pattern distortions by the Spread polynomial model in roll-to-sheet reverse offset printing5
A cantilever-based resonator for reconfigurable nanomechanical computing5
PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation5
Conventional surface micromachining process for the fabrication of a linear optical phased array based on piston micromirrors5
Investigations on piezo actuated micro XY stage for vibration-assisted micro milling5
Atmospheric micro-sized cold plasma jet created by a long and ultra-flexible generator with sputtered gold thin film electrode5
Micro electric discharge machining (μ-EDM) of polymer nanocomposites modified by graphene nanoplatelets/carbon using rotating electrode tool5
Electrofluidic displays based on inkjet printing and phase change filling5
Shoulder fillet effects in strength distributions of microelectromechanical system components5
Fluid control with hydrophobic pillars in paper-based microfluidics5
Experimental amplitude and frequency control of a self-excited microcantilever by linear and nonlinear feedback5
Picoliter liquid handling at gas/liquid interface by surface and geometry control in a micro-nanofluidic device5
Recent trends in structures and applications of valveless piezoelectric pump—a review5
Mode localized artificial hair sensor with enhanced linearity applied for dual-axis air flow sensing5
High-throughput acoustofluidic microchannels for single cell rotation5
In-plane air damping of micro- and nano- mechanical resonators5
Feasibility study of a micro-electro-mechanical-systems threshold-pressure sensor based on parametric resonance: experimental and theoretical investigations5
MEMS triaxial gyroscope using surface and sidewall doping piezoresistors5
On-chip micro pressure sensor for microfluidic pressure monitoring5
Facile fabrication of sensitivity-tunable strain sensors based on laser-patterned micro-nano structures5
Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control5
A microfluidic platform enabling real-time control of dynamic biochemical stimuli to biological cells5
A comprehensive review on non-active micro-pumps for microfluidic platforms5
Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application5
Investigations into planar splitting and recombining micromixers with asymmetric structures5
A predictive model for electrostatic energy harvesters with impact-based frequency up-conversion5
A perspective of active microfluidic platforms as an enabling tool for applications in other fields4
Hermetic chip-scale packaging using Au:Sn eutectic bonding for implantable devices4
Distortion mechanism of patterning positions in the soft roller printing process for realizing large-area overlay printing4
A position sensing method for 2D scanning mirrors4
A multi-scale E-jet 3D printing regulated by structured multi-physics field4
Measurement of the electric permittivity using Bleustein–Gulyaev wave sensor4
An efficient macro model for CMOS-MEMS thermal wind speed sensor4
An ultrafast response and precisely controllable soft electromagnet actuator based on Ecoflex rubber film filled with neodymium-iron-boron4
Micromachining of polymers using atmospheric pressure inductively coupled helium plasma localized by a scanning nanopipette probe microscope4
Fabrication and characterization of annular-shaped piezoelectric micromachined ultrasonic transducer mounted with Pb(Zr,Ti)O3-based monocrystalline thin film4
Impact of support material deformation in MEMS bulk micromachined diaphragm pressure sensors4
Utilizing a coil to realize 3D electrodes for dielectrophoresis-based particle concentration4
The development of a pressure sensor using a technique for patterning silver nanowires on 3-dimensional curved PDMS membranes4
Sub-micrometer plasma-enhanced chemical vapor deposition using an atmospheric pressure plasma jet localized by a nanopipette scanning probe microscope4
Droplet spreading nanoimprinting method for micro-/nano-fabrication4
Strain engineering of graphene nano-resonator4
Micro-machined stent flow sensor for detecting breathing and heartbeat from airflow in airway of rat4
Elastic-plastic properties of mesoscale electrodeposited LIGA nickel alloy films: microscopy and mechanics4
MEMS device for applying shear and tension to an epithelium combined with fluorescent live cell imaging4
Multimode excitations for complex multifunctional logic device4
Direct macro-to-micro interface method for microfluidics4
Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding4
Wafer-bonded surface plasmon waveguide sensors with in-plane microfluidic interfaces4
Motion of generated dumbbell-shaped satellite droplets during liquid dielectrophoresis4
Optimization of the co-axial dispensing nozzle of a 3D bioprinter for the fabrication of tubular structures with micro-channel encapsulation4
Surface roughness improvement of 3D printed microchannel4
An on-chip test structure to measure the Seebeck coefficient of thermopile sensors4
Sol–gel-derived nanoparticles coated liquid entities: liquid marbles, liquid plasticine, and flat interface4
Bipolar resistive switching properties of TiO x /graphene oxide doped PVP based bilayer ReRAM4
Stable 3D inertial focusing by high aspect ratio curved microfluidics4
Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films4
Leak-free integrated microfluidic channel fabrication for surface plasmon resonance applications4
Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application4
MEMS piezoelectric resonant microphone array for lung sound classification4
Adhesion of Flk1-expressing cells under shear flow in phospholipid polymer-coated immunoaffinity channels4
Development of MEMS-based piezoresistive 3D stress/strain sensor using strain technology and smart temperature compensation4
A monolithic Si-micromachined four-stage Knudsen pump for µGC applications4
Development of microfluidic cartridge for culture-free detection of Staphylococcus aureus in blood4
High-accuracy differential resonant pressure sensor with linear fitting method4
Magnetically propelled soft micromachines with multipatterned fabrications4
Geometry effects on flow characteristics of micro-scale planar nozzles4
Efficient and improved qualification method for patterns with irregular edges in printed electronics4
Micromachined threshold inertial switches: a review4
Temperature stable rare earth magnetic powder Sm-Fe-N based micro magnets with remanence enhanced by easy axis alignment and its application in MEMS actuator4
Implantable double-layer pump chamber piezoelectric valveless micropump with adjustable flow rate function4
Tactile samples with variable surface textures to investigate tactile perception characteristic4
An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators4
A programmable 3D printing method for magnetically driven micro soft robots based on surface tension4
A resonant high-pressure sensor based on dual cavities4
Fully-transparent resistance switching memristor based on indium-tin-oxide material4
Unapodization: a method to produce laterally uniform surface acoustic waves for acoustofluidics4
Fabrication of oil–water separation copper filter by spatial light modulated femtosecond laser4
Continuous elasto-inertial separation of microparticles using a co-flowing Newtonian-viscoelastic fluid system4
Fabrication of silicon electrodes used for micro electrochemical machining4
Self-supporting 3D printed flexible liquid metal electrodes for electrostatically microfluidic valves3
Machine learning-based off-line electrical characteristic prediction through in-line pattern integrity inspection3
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization3
Low-cost and low-topography fabrication of multilayer interconnections for microfluidic devices3
An A0 mode Lamb-wave AlN resonator on SOI substrate with vertically arranged double-electrodes3
Micro/nanofiber fabrication technologies for wearable sensors: a review3
Facile fabrication of binary wettability patterned microstructure for microfluidics3
Energy action model of spark assisted chemical engraving (SACE) for improving surface quality of micro cavities in ZrO2 ceramics3
Propulsion reversal in oscillating-bubble powered micro swimmer3
A pneumatically controlled microfluidic rectifier enabling zero backflow under pulsatile flow regime3
Microfluidic system manufacturing by direct laser writing for the generation and characterization of microdroplets3
Irreversible, self-aligned microfluidic packaging for chronic implant applications3
Fully differential higher order transverse mode piezoelectric membrane resonators for enhanced liquid-phase quality factors3
Junction gap breakdown-based fabrication of polydimethylsiloxane ionic rectifiers3
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection3
Design and characterization of compact digital RF MEMS capacitors and phase shifters in CMOS 0.35 µm technology3
Super-wetting enabled by an array of SU-8 micro-pillars etched with ion-beam3
Imaging of simulated muscle based on single chip of AlN piezoelectric micromachined ultrasonic transducer3
Fabrication of high-aspect-ratio polydimethylsiloxane microstructures by reducing the interfacial adhesion in soft lithography3
Temperature-compensated CMOS-MEMS resonators via electrical stiffness frequency pulling3
A simplified quasi-2D model for gas flow in microchannels and microtubes3
Rotational UV-lithography using flexible chromium-coated polymer masks for the fabrication of microstructured dental implant surfaces: a proof of concept3
Implementation and assessment of a low-cost 3D laser platform controlled by open software for printing polymeric micro-structures3
Micro hole drilling of high frequency printed circuit board containing hard fillers3
Design and testing of a novel multipath-actuation compliant manipulator3
Analysis of DefeXtiles: a 3D printed textile towards garments and accessories3
Active microvalve driven by electro-conjugate fluid jet flow with a hydraulic power source on a chip3
Enhancing the performance of dielectric elastomer actuators through the approach of distributed electrode array with fractal interconnects architecture3
Bioinspired drag reduction surfaces via triple lithography method based on three-layer hybrid masks3
Configurations of triangular prism and slit electrode pairs to enhance the performance of electro-conjugate fluid micropumps3
Implanted microelectrode arrays for evaluating inhibited seizure modulated by light-responsive hydrogel3
Adhesion enhancement strategy for Parylene C substrate by nanograss technique3
Flexible pressure and temperature dual-modality sensor based on stretchable electrode for human–machine interaction3
Active real-time electric field control of the e-jet in near-field electrospinning using an auxiliary electrode3
Removal of recast layer in the laser drilled film cooling holes by a two-step inner streaming electrochemical technique3
Micromechanical resonant cantilever sensors actuated by fringing electrostatic fields3
Effects of both the drive- and sense-mode circuit phase delay on MEMS gyroscope performance and real-time suppression of the residual fluctuation phase error3
Effect of magnetic field intensity on deposition of copper tool in electro discharge deposition3
Recent advances in power supply strategies for untethered neural implants3
Generation of micro-droplet on demand with reduced sizes by a hybrid pneumatic electrohydrodynamic method3
Performance of aluminum nitride-based piezoelectric micromachined ultrasonic transducers under different readout configurations3
Efficient system-level simulations of thermal wind sensors considering environmental factors3
Microfluidic biochip platform sensitized by AgNPs for SERS based rapid detection of uric acid3
A MEMS dynamic mechanical analyzer for in situ viscoelastic characterization of 3D printed nanostructures3
Detection of cardiac biomarkers in serum using a micro-electromechanical film electroacoustic resonator3
Compression and decompression of structural tantalum films exposed to buffered hydrofluoric acid3
Research on dynamics of bouncing ball in triboelectric nanogenerator3
A comparison of pad metallization in miniaturized microfabricated silicon microcantilever-based wafer probes for low contact force low skate on-wafer measurements3
A piezoelectric micromachined ultrasonic transducer with mechanical grooves3
2D FPCB micromirror for scanning LIDAR3
Electric field sensing characteristics of ZnO/SiO2/Si surface acoustic wave devices3
Rotational speed measurements of small spherical particles driven by acoustic viscous torques utilizing an optical trap3
Etch-less microfabrication of structured TiO2 implant coatings on bulk titanium grade 23 by direct lithographic anodic oxidation3
Highly sensitive biosensor based on a microcantilever and alternating current electrothermal technology3
Mechanically flexible microfluidics for microparticle dispensing based on traveling wave dielectrophoresis3
Fast fabrication of a 3D prototyping microfluidic device for liquid cross-flow and droplet high-throughput generation3
A review of rarefied gas flow in irregular micro/nanochannels3
Derivation of analytical expressions for the stress/strain distributions, bending plane and curvature radius in multilayer thin-film composites3
Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumes3
A silicone based piezoelectric and electromagnetic hybrid vibration energy harvester3
A wireless passive pressure sensor using microstructured ferromagnetic films with tunable effective permeability3
Dynamic behaviours of double-ended tuning fork based comb-driven microelectromechanical resonators for modulating magnetic flux synchronously3
Piezoelectric approaches for wearable continuous blood pressure monitoring: a review3
Electromicrofluidic device with integrated PDMS microchannel and laser-induced graphene electrodes for electrochemical detection of cardiac biomarker in a point-of-care platform3
Employing fluorescence analysis for real-time determination of the volume displacement of a pneumatically driven diaphragm micropump3
Novel fabrication for vertically stacked inverted triangular and diamond-shaped silicon nanowires on (1 0 0) single crystal silicon wafer3
Miniature and tunable high voltage-driven soft electroactive biconvex lenses for optical visual identification3
Progress of biomechanical energy harvesters for wearable electronic applications3
Optimization of x-ray lithography conditions for fabrication of large arrays of high-aspect-ratio submicron pores3
Fabrication and flow rate characterization of a DRIE process based valveless piezoelectric micropump3
Research on acoustic sensing device based on microfiber knot resonator3
Bridged resonator based on assembled Si thin wire2
Establishment of cell patterning method utilising nanopore structure with cell non-adhesive effect2
Fabrication of a 3D carbon electrode for potential dielectrophoresis-based hepatic cell patterning application using carbon micro-electrical-mechanical system (CMEMS)2
Toward the development of a label-free multiple immunosensor based on thin film transistor microelectrode arrays2
Fabricating transparent nanomesh-structured hydrophobic films by nanoimprinting UV-curable fluorinated polyurethane acrylates2
Ultrasensitive detection of antigen–antibody interaction and triglycerides in liquid ambient using polysilicon cantilevers2
Use of liquid lithography to form in vitro intestinal crypts with varying microcurvature surrounding the stem cell niche2
Chaotic ultrasound generation using a nonlinear piezoelectric microtransducer2
A convenient plug-and-play coaxial microfluidic device and quantitative prediction of monodisperse droplets generation2
Adherable temperature sensor to a porous structure of fiber via reduced graphene oxide and poly(diallyldimethylammonium chloride) complex2
Design and implementation of differential MEMS microphones using the two polysilicon processes for SNR enhancement2
Fabrication, modeling, and characterization of soft twisting electrothermal actuators with directly printed oblique heater2
Programmable intelligent liquid matter: material, science and technology2
Meso scale component manufacturing: a comparative analysis of non-lithography and lithography-based processes2
An electrochemical biosensor with integrated microheater to improve the sensitivity of electrochemical nucleic acid biosensors2
Scotch-tape surface wrinkling based thin-film material properties extraction2
High-performance transparent electromagnetic interference shielding film based on metal meshes2
Design and development of a piezoelectric driven micropump integrated with hollow microneedles for precise insulin delivery2
Flow modeling and experimental verification of flow resistors used in microfluidic chips driven by capillary force2
Investigation of drift phenomena in closed-loop capacitive micro accelerometers2
Lithographically patterned polypyrrole multilayer microstructures via sidewall-controlled electropolymerization2
Mechanical characteristics of laminated film vibrator using an ultra-thin MEMS actuator2
Manufacturing conductive patterns on polymeric substrates: development of a microcontact printing process2
A hollow microlattice based ultralight active thermal control device and its fabrication techniques and thermal performances2
Accurate holographic cytometry using three-dimensional hydrodynamic focusing2
Ultra-high precision passive particle sorting chip coupling inertial microfluidics and single row micropillar arrays2
Influence of source electrode metal work function on polar gate prompted source hole plasma in arsenide/antimonide tunneling interfaced junctionless TFET2
Development of microfluidic flow cytometry capable of characterization of single-cell intrinsic structural and electrical parameters2
Analytical and experimental study of the dynamics of a micro-electromechanical resonator based digital-to-analog converter2
High-density stretchable microelectrode array based on multilayer serpentine interconnections2
Electrochemical detection of baicalein based on a three-dimensional micromixer2
Fabrication and design rules of three dimensional pyrolytic carbon suspended microstructures2
Eccentric reflective optical fiber MEMS micro-pressure sensor2
Performance enhancement of piezoelectric bulk mode MEMS mode-matched gyroscopes based on a secondary phase feedback loop2
A self-attachable and self-alignable micro electromagnetic linear actuator2
Self-calibration of micro-components based on manipulator guidance2
Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation2
On overtravel and skate in cantilever-based probes for on-wafer measurements2
Rapid prototyping of noncontact microwave microfluidic devices for sensing applications2
A grade 1 titanium capacitive microsensor for continuous pressure monitoring of intracorporal pressures2
Scanning digital oil immersion lithography providing high-speed large area patterning with diffraction limited sub-micron resolution2
Efficient removal of condensate droplets from the surface with microgroove composite structures2
Microfluidic multicolor display by juxtapositional color mixing with a pattern of primary color pixels2
Experimental investigation for roll-to-plate embossing of ordered micro-pyramid array on the silver sheet2
A novel electromagnetic microactuator with a stainless steel mas-spring structure2
An ultra-thin transparent multi-functional sensor based on silk hydrogel for health monitoring2
Acoustic wave amplification with thin film silicon bonded on lithium niobate2
Ti/Si interface enabling complementary metal oxide semiconductor compatible, high reliable bonding for inter-die micro-fluidic cooling for future advanced 3D integrated circuit integration2
Study of laser surface texturing of 6061 aluminium with thermal assistance2
Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer2
Silicon monolithic microflow sensors: a review2
Biocompatible bonding of a rigid off-stoichiometry thiol-ene-epoxy polymer microfluidic cartridge to a biofunctionalized silicon biosensor2
On-chip generation of microcapsules in the presence of applied electric fields2
Modeling of anodic bonding with SiO2 dielectric as interlayer2
A serial flexible humidity sensor based on graphene oxide fibers and quartz crystal resonator2
Surface tension—based ultra-micro precision dispensing method for micro—scale manufacturing and its key influence factors analysis2
Utilization of n-dodecane as coupling layer for reusable acoustofluidic microchips2
The effect of quaternary ammonium salts with different chain lengths on copper filling behavior in blind holes of printed circuit board2
Design and fabrication of non-resonant PZT MEMS micromirror with buried piezoresistors for closed loop position control2
Efficient annular aperture array (AAA) filter for thermophotovoltaic by sidewall lithography2
Shear force measurement of actuated, gecko-inspired adhesion elements with hierarchical polydimethylsiloxane pattern2
Precise stepping control of a piezoelectric traveling wave micromotor through embedded in-situ detection2
RF MEMS filter based on dual liquid variations2
A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance2
Modeling and analysis of sulfur hexafluoride plasma etching for silicon microcavity resonators2
Remote actuation based on magnetically responsive pillar arrays2
Wire mask assisted rolling as a cost-effective method for high-throughput surface micro-texturing2
Mechanical reliability of silicon microstructures2
Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO3 membrane-based laterally-excited bulk acoustic resonator2
Numerical simulation of particle deposition patterns in evaporating droplets2
A new improved vertical comb type differential capacitive sensing micro accelerometer using silicon-on-insulator wafer technology2
An intubation catheter integrated with flow sensors and smart actuators for characterizing airflow patterns in stenosed trachea: an objective guide for CAO management2
Study on combustion stability of a miniature reciprocating piston internal combustion engine2
A microfluidic chip integrated with 3D sidewall electrodes and wavy microchannel for cell focusing and separation2
A sheathless high precise particle separation chip integrated contraction–expansion channel and deterministic lateral displacement2
Body-worn enzymatic biofuel cell with automated pencil drawn bioelectrodes for energy harvesting from human sweat2
Shock-free ion transmission in a skimmer-based MEMS mass spectrometer vacuum interface2
Mechanical–thermal response of brittle titanium films on polymer substrates: in-situ observations and FE modelling2
Performance analysis of synthetic jet micropump based on double piezoelectric actuators2
Experimental studies on micro powder hot embossing for high-aspect-ratio microstructures with ultra-high molecular weight polyethylene powders2
A thermal microfluidic actuator based on a novel microheater2
Exploring nanowire regrowth for the integration of bottom-up grown silicon nanowires into AFM scanning probes2
A quantitative study of the dynamic response of compliant microfluidic chips in a microfluidics context2
Self-transformed parallel structures in strain sensitive Au thin film micropattern embedded on soft elastomer2
Scaling effects and brittle fracture mechanisms in laser punching of PECVD SiO2 films2
Transient flow behavior in serpentine curved microchannel of inertial microfluidic devices2
Laser drilling of stainless steel foil with reduced sidelobe ablation using a spatially filtered Bessel–Gauss beam2
Fused silica microchannel fabrication with smooth surface and high etching selectivity2
SEM image-guided manipulation with a feedback assistance system for automated nanohandling of a 4 DOF micromanipulator2
Optimization of plotter printing for sub-terahertz metallic metasurfaces fabrication on ultra-thin substrate2
An experimental study of recovery in embossing of polycarbonate below the glass transition temperature2
Hydrodynamic characteristics of an evaporation-based micro-synthetic jet for micro-propulsion2
Bonding Methods for Chip Integration with Parylene Devices2