Journal of Micromechanics and Microengineering

Article	Citations
Adherable Temperature Sensor to a Porous Structure of Fiber via Reduced Graphene Oxide and Poly(diallyldimethylammonium chloride) Complex	372
Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout	69
Wearable microfluidic sweat collection platform with a calorimetric flow rate sensor for realtime and long-term sweat rate measurements	61
Measurement and control of stiction force in in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts	57
Flow-insensitive micro-thermal conductivity detector with semi-diffusion gas channel	54
Experimental and numerical study of gas flow through microchannel with 90° bends	38
Wafer level hermetic bonding and packaging using recrystallized parylene	37
Pattern transferring of Prolift-100 polymer sacrificial layers with controlled sidewall profile	27
Fabrication of P(100) silicon macro-pore and pillar array by wet electrochemical etching	26
Ultra-small high‐temperature pressure sensor chips fabricated in single‐layer (111) SOI wafers	26
Irreversible, self-aligned microfluidic packaging for chronic implant applications	23
Design and fabrication of non-resonant PZT MEMS micromirror with buried piezoresistors for closed loop position control	23
Miniature and tunable high voltage-driven soft electroactive biconvex lenses for optical visual identification	23
Research on high temperature performance of pressure sensor	22
Preparation of robust superhydrophobic surface on PET substrate using Box-Behnken design and facile sanding method with PTFE powder	21
Micromachining of polymers using atmospheric pressure inductively coupled helium plasma localized by a scanning nanopipette probe microscope	20
Induced flow inside a droplet by static electrical charge	18
High-density stretchable microelectrode array based on multilayer serpentine interconnections	18
Numerical simulation of particle deposition patterns in evaporating droplets	17
RF MEMS capacitive shunt switch for low loss applications	17
A non-invasive and high precision sensor for in-situ temperature monitoring of cells	16
Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces	15
Conventional surface micromachining process for the fabrication of a linear optical phased array based on piston micromirrors	14
An SOI-based post-fabrication process for compliant MEMS devices	14
Low cost, contamination-free, and damage-free fabrication of PZT MEMS on SOI substrate	14

Study of notched MEMS specimen: elasto-plastic modeling and experimental testing	13
Development of droplet microfluidics capable of quantitative estimation of single-cell multiplex proteins	13
An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators	13
Impact of support material deformation in MEMS bulk micromachined diaphragm pressure sensors	13
An on-chip test structure to measure the Seebeck coefficient of thermopile sensors	13
Flexible pressure and temperature dual-modality sensor based on stretchable electrode for human–machine interaction	13
Recent advances in power supply strategies for untethered neural implants	13
Automatic calibration and nonlinearity optimization for scale factor of micro-electromechanical system gyroscopes under force rebalanced operation	13
Photothermal liquid release from arrayed Au nanorod/hydrogel composites for chemical stimulation	13
Development of a piezoelectric pump with unfixed valve	13
Fabrication of high-aspect-ratio metallic microstructures by microelectroforming using silver-coated polydimethylsiloxane molds with controllable wettability	12
Design, analysis and fabrication of the CPW resonator loaded by DGS and MEMS capacitors	11
Single-side micromachined ultra-small thermopile IR detecting pixels for dense-array integration	11
PDMS micro check valve with 3D valve disk for reducing fluid resistance	10
Loss mechanisms of multi-frequency whispering gallery mode RF-MEMS resonators	10
Novel 3D printed single electrode-based portable and miniaturized electrochemiluminescence platform to detect lactate from human serum	10
Large-area patterning for broadband, quasi-omnidirectional low-reflectance glass	10
Influence of source electrode metal work function on polar gate prompted source hole plasma in arsenide/antimonide tunneling interfaced junctionless TFET	10
Micromechanical resonant cantilever sensors actuated by fringing electrostatic fields	10
Design and fabrication of a sensors-integrated silicon electrode for gap status monitoring in micro electrochemical machining	10
An electromagnetically actuated ball and socket joint for applications in 3D metrology	9
Atmospheric micro-sized cold plasma jet created by a long and ultra-flexible generator with sputtered gold thin film electrode	9
A review of geometric and structural design for reliable flexible electronics	9
Sol–gel-derived nanoparticles coated liquid entities: liquid marbles, liquid plasticine, and flat interface	9
PDMS-polyimide transcutaneous blood gas collector with self-folding out-of-plane heater elements	9
Efficient system-level simulations of thermal wind sensors considering environmental factors	9
Displacement of PAMAM-Au via acoustic streaming on an electrochemical immunosensing platform	9
Technology evolution from micro-scale energy harvesters to nanogenerators	9
MXene (Ti3C2T x )/TMD (ReSe2) nanohybrid-based flexible electromechanical sensors for cervical collar strain and shoulder l	9
Design, modeling and experimental validation of a micro cantilever beam with an electro-controllable twisting ability	9
An analytical model of three-hot-wire acoustic particle velocity sensors	8
One-to-two internal resonance in a micro-mechanical resonator with strong Duffing nonlinearity	8
Fluid control with hydrophobic pillars in paper-based microfluidics	8
Three-dimensional carbon interdigitated ring array nanofibers for electrochemical detection of dopamine neurotransmitter	8
A review of assembly techniques for fabricating twisted bilayer graphene	8
MEMS audio speakers *	8
A wireless passive pressure sensor using microstructured ferromagnetic films with tunable effective permeability	8
Microfluidic carbon cloth-based enzymatic glucose biofuel cell for sustainably powering a microelectronic circuit *	8
Splashing of droplet under the vibration effect of flexible membrane	8
Analytical modeling of a MEMS beam resonator with release-etch holes	8
A comprehensive review on non-active micro-pumps for microfluidic platforms	8
First multiplexed electrochemical wax-on-plastic chip: PNA/GO interface integration for DNA detection	8
Picoliter liquid operations in nanofluidic channel utilizing an open/close valve with nanoscale curved structure mimicking glass deflection	8
Surface micromachining of chip-edge silicon microcantilevers using xenon difluoride etching of silicon-on-insulator	8
Effect of SiO2 protective layer on LiNbO3 structured SAW resonators and temperature characteristics study	8
Data-driven model-free adaptive sliding mode control for electromagnetic linear actuator	8
Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control	8
Investigating WBC margination in different microfluidic geometries: influence of RBC shape and size	7
Inkjet printing of pixel arrays: droplet formation and pattern uniformity of a non-aqueous ink with tunable viscosity	7
Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics	7

Ultra-low power signal conditioning system for effective biopotential signal recording	7
Regulating the electrical performance of contact-separation mode triboelectric nanogenerators based on double-sided groove textures	7
Fabrication of an X-shaped micro-copper structure containing a merging joint based on localized electrochemical deposition	7
Anisotropic wet etching of a novel micro-texture structure for an Al/n-Si/Al metal–semiconductor–metal photodetector fabrication	7
Bandwidth enhancement of piezoelectric MEMS microspeaker via central diaphragm actuation and filter integration	7
High density cleanroom-free microneedle arrays for pain-free drug delivery	7
Optimization of x-ray lithography conditions for fabrication of large arrays of high-aspect-ratio submicron pores	7
Lithographically patternable SU-8/Graphene nanocomposite based strain sensors for soft-MEMS applications	7
Hydrodynamic characteristics of an evaporation-based micro-synthetic jet for micro-propulsion	7
Displacement-controlled coining of large arrays of gold stud bumps	7
Rapid fabrication of microfluidic mixer chip by non-isothermal molding method based on resistance heating principle and its application in pesticide residue detection	7
Design and performance analysis of an embedded amplified piezoelectric jetting dispensing valve	7
Derivation of analytical expressions for the stress/strain distributions, bending plane and curvature radius in multilayer thin-film composites	7
Fabrication of large scale bi-layer microstructures through electrochemical nanoimprinting	7
Surface acoustic wave bound state in the continuum for 1200 °C high temperature sensing	7
Microfluidics in cardiac microphysiological systems: a review	7
Evaluation of the impact of abnormal grains on the performance of Sc0.15Al0.85N-based BAW resonators and filters	7
Research on fabrication method for floating structures using general photolithography with high versatility	7
Towards tilt-free in plasma etching	7
Passive communication for low power distributed sensors using MEMS optical cavities	7
A long-stroke planar linear actuator equipped with magnetic guide	7
Characteristics of an antistatic semiconductor bridge based on micro/nano processing techniques	7
Performance evaluation of a 3D split-and-recombination micromixer with asymmetric structures	7
Data-driven estimation of battery state-of-health with formation features	7
Design and fabrication of a low-cost microfluidic cartridge with integrated pressure-driven check valve for molecular diagnostics platforms	7
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection	6
Electromicrofluidic device with integrated PDMS microchannel and laser-induced graphene electrodes for electrochemical detection of cardiac biomarker in a point-of-care platform	6
Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application	6
Design and investigation of dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal pocket TFET device as a label-free biosensor	6
An A0 mode Lamb-wave AlN resonator on SOI substrate with vertically arranged double-electrodes	6
Wafer-level chip-scale packaging of MEMS environmental sensors by functionalized porous PowderMEMS® micro-filters	6
Closed-form solution of the deflection of a prestressed multilayer cantilever	6
Integrated 3D printed microfluidic circuitry and soft microrobotic actuators via in situ direct laser writing	6
Extracting white blood cells from blood on microfluidics platform: a review of isolation techniques and working mechanisms	6
Imaging of simulated muscle based on single chip of AlN piezoelectric micromachined ultrasonic transducer	6
On-chip micro pressure sensor for microfluidic pressure monitoring	6
Equivalent electrical circuits for electroacoustic MEMS design: a review	6
The radial point interpolation method (RPIM) for analyzing a V-shaped electrothermal actuator	6
Study on the cause of pore defects processed by focused ion beam milling on high roughness surface	6
Modeling and characterization of AlN-Based piezoelectric micromachined ultrasonic transducers	6
Advances in micro lithium-ion batteries for on-chip and wearable applications	6
Application of the evolutionary kinetic Monte Carlo method for the simulation of anisotropic wet etching of sapphire	6
On the PZT/Si unimorph cantilever design for the signal-to-noise ratio enhancement of piezoelectric MEMS microphone	6
Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique	6
On overtravel and skate in cantilever-based probes for on-wafer measurements	6
Research on the influence of conical micro array chip parameters on fog water collection	6
Bistable Liquid Shutter Operated by DEW Actuation for Multifunctional Miniature Cameras	6
Magnetically maneuverable micromixer using acoustically excited bubbles	6
A novel electromagnetic microactuator with a stainless steel mas-spring structure	5
A simple way to predict the flip–chip gap	5
Cooling high heat flux with flow boiling in 2D-structured radial microchannel heat sink	5
Micromechanics for energy generation	5
Metrology and characterization of SU-8 microstructures using autofluorescence emission	5
Study on soft hot embossing process for making microstructures in a cyclo-olefin polymeric (COP) film	5
Microscale surface texturing on nonplanar surface of diffusion lens for anti-glare LED light	5
Deep isotropic chemical etching (DICE) process for fabricating highly symmetric hemispherical silicon molds	5
Manufacturing and assembly of an all-glass OCT microendoscope	5
A preparation technology of micro-structure glass based on mixed micro and nano powders	5
Rotational speed measurements of small spherical particles driven by acoustic viscous torques utilizing an optical trap	5
Hybrid electrical and optical neural interfaces	5
Sub-miniature rolling thrust micro-bearing	5
Double-objective optimization of electro-thermal (E-T) micro-actuator for fiber switch	5
Etch the borosilicate glass to form a straight through-glass-via based on the FLACE technology	5
Electrohydrodynamic jet printed templates for hot embossing of microfluidic devices	5
Propulsion reversal in oscillating-bubble powered micro swimmer	5
Systematic variation of design aspects for a significant increase in thermal fracture resistance of alumina microthrusters	5
Distance sensor with a tunable aperture actuated by thermal expansion of silicon chevron beams	5
Developing a multi-sample acoustofluidic device for high-throughput cell aggregation	5
The effect of DRIE notching on field emission enhanced breakdown in SOI based MEMS electrodes	5
A sheathless high precise particle separation chip integrated contraction–expansion channel and deterministic lateral displacement	5
Adaptive frequency-stabilization of MEMS oscillators using mode coupling	5
Shape deviations of DLW microstructures in dependency of fabrication parameters	5
Effects of die top system and trenches on large thin die mechanical robustness	5
Liquid-immersion inclined-rotated exposure system for fabricating three-dimensional microstructures with large inclination angles	5
Nanoscale directional etching features and mechanism of HF/HNO3etchant	5
Electric field sensing characteristics of ZnO/SiO2/Si surface acoustic wave devices	5
Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system	5
Field nonuniformity of limited-aperture planar SAWs and its implications for designing SSAW acoustofluidics	5
Fabrication of grooved LGS resonators based high temperature SAW sensors and analysis with FEM simulation	5
Micromachined threshold inertial switches: a review	5

Analysis of DefeXtiles: a 3D printed textile towards garments and accessories	5
Efficient removal of condensate droplets from the surface with microgroove composite structures	5
A quantitative study of the dynamic response of compliant microfluidic chips in a microfluidics context	4
Design and manufacture of a micro-tensile testing machine for in situ optical observation and DIC analysis: application to 3D-printed and compression-molded ABS	4
Facile fabrication of binary wettability patterned microstructure for microfluidics	4
High-Q terahertz bandstop filter via cuboid frame structure	4
Inverse design of electromagnetic metamaterials: from iterative to deep learning-based methods	4
Monitoring of physiological sounds with wearable device based on piezoelectric MEMS acoustic sensor	4
Wafer-scale silicon microfabrication technology toward realization of low-cost sub-THz waveguide devices	4
Using sugar as a mask material (SAAMM) in micro-nano fabrication: a high-performance, green and simple method	4
A position sensing method for 2D scanning mirrors	4
A novel piezoelectric RF-MEMS resonator with enhanced quality factor	4
Maximizing the rate sensitivity of resonating gyroscopes using nonlinear shape optimization	4
Recent progress in 2D textile-based piezoresistive strain and pressure sensors	4
Development of microneedle based blood extraction device	4
Additive manufactured cardiovascular scaffold integrated with SU-8 based wireless pressure sensor	4
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization	4
Etch-less microfabrication of structured TiO2 implant coatings on bulk titanium grade 23 by direct lithographic anodic oxidation	4
Bioinspired drag reduction surfaces via triple lithography method based on three-layer hybrid masks	4
SEM image-guided manipulation with a feedback assistance system for automated nanohandling of a 4 DOF micromanipulator	4
2D FPCB micromirror for scanning LIDAR	4
A microfabricated semi-packed column coated with porous layer and ionic liquid for the separation of characteristic markers of non-alcoholic fatty liver disease	4
A review of MEMS-based metal oxide semiconductors gas sensor in Mainland China	4
A standalone and portable imaging detection system with embedded computing for automated defect inspection of microfluidic devices	4
Evaluation of solvent releases from microfluidic devices made of cycloolefin polymer by temperature-desorption mass spectrometry	4
Enhancing the performance of dielectric elastomer actuators through the approach of distributed electrode array with fractal interconnects architecture	4
Recoverable self-cleaning surface formed by nanostructured microcapsules encapsulating hydrophobic agent	4
Experimental study on femtosecond laser ablation of 4H–SiC substrate	4
Scotch-tape surface wrinkling based thin-film material properties extraction	4
Experimental study on acoustic-induced microbubbles fusion	4
A flexible and highly sensitive capacitive pressure sensor with fast response based on a hierarchically micro-structured PDMS dielectric layer	4
High Thickness Material Lift-off Using Multi-layer Photoresist	4
A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design	4
High-performance transparent heater with Ag paste-based nanomesh electrodes	4
Effect of simultaneous electrical and mechanical stressing on porosity of Ti3C2T x MXene films	4
PEDOT:PSS stabilized paper-based piezoresistive sensor for wearable electronics	4
Design and material for a patternable polysiloxane acrylate-based penetrating intracortical neural probe	4
A novel MEMS inertial switch with frictional electrode	4
A compact and reconfigurable C-band DGS-based power divider using RF MEMS capacitive switch	4
Experimental and statistical investigation into surface characteristics in micro milling of bottom pouring/gravity stir cast Al6061 alloy	4
A multi-scale E-jet 3D printing regulated by structured multi-physics field	4
Silicon electro-optic micro-modulator fabricated in standard CMOS technology as components for all silicon monolithic integrated optoelectronic systems *	4
Body-worn Enzymatic Biofuel Cell with Automated Pencil drawn Bioelectrodes for Energy Harvesting from Human Sweat	4
Front-side releasing <110> oriented clamped–clamped beams for piezoresistive sensors	3
Visually clear diffusive light panel with embedded semi-reflective rough-surface planar outcouplers	3
Gas-compensated thermal flow sensor using an integrated velocity-independent gas properties meter	3
Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors	3
Modeling and analysis of sulfur hexafluoride plasma etching for silicon microcavity resonators	3
Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure	3
Silicon-chip based electromagnetic vibration energy harvesters fabricated using wafer-level micro-casting technique	3
Wafer acceptance test structures for characterization of thermoelectric materials’ thermal conductivity of thermopile sensors	3
Silicon monolithic microflow sensors: a review	3
Self-calibration of micro-components based on manipulator guidance	3
A thermal microfluidic actuator based on a novel microheater	3
Reflective x-ray masks for x-ray lithography	3
Fatigue life evaluation of gold wire bonding solder joints in MEMS pressure sensors	3
Capillary enhanced phase change in a microfabricated self-oscillating fluidic heat engine (SOFHE)	3
The multimodal motion along a solid–liquid interface of a soft microrobot driven by compound magnetic fields	3
Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001)	3
Flexible pressure/temperature sensors with heterogeneous integration of ultra-thin silicon and polymer	3
Pulsed power supply of Tr-RC and Tr-RLC topologies for improvement of micro electrical discharge machining	3
Triaxial piezoresistive force sensor probe with high sensitivity and stiffness using 3D notch structure	3
Quantifying and correcting tilt-related positioning errors in microcantilever-based microelectromechanical systems probes	3
Effect of frequency on droplet actuation in reverse electrowetting	3
A hollow microlattice based ultralight active thermal control device and its fabrication techniques and thermal performances	3
A cantilever-based resonator for reconfigurable nanomechanical computing	3
Implantable double-layer pump chamber piezoelectric valveless micropump with adjustable flow rate function	3
Fabrication and characterization of suspended La0.7Sr0.3MnO3 nanofibers for high-sensitive and fast-responsive infrared bolometer	3
Micro gas chromatography column coated with ionic liquid/metal–organic framework composites as the stationary phase	3
Near thermal-electric field controlled electrohydrodynamic 3D printing of high aspect ratio microstructures	3
Burr removal from high-aspect-ratio micro-pillars using ultrasonic-assisted abrasive micro-deburring	3
Corrigendum: Adherable temperature sensor to a porous structure of fiber via reduced graphene oxide and poly(diallyldimethylammonium chloride) complex (2022 J. Micromech. Microeng. 32	3
A comparison of pad metallization in miniaturized microfabricated silicon microcantilever-based wafer probes for low contact force low skate on-wafer measurements	3
Design and evaluation of a linear nozzle array with double auxiliary electrodes for restraining cross-talk effect in parallel electrohydrodynamic jet printing	3
Comparative analysis and tests for an improved frequency tuning area-varying electrode considering the influence of fringe capacitance	3
Piezoelectric MEMS—evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era	3
SAW-driven self-cleaning drop free glass for automotive sensors	3
RF MEMS filter based on dual liquid variations	3
Large area nanoscale patterning of functional materials using organosilicate ink based nanotransfer printing	3
High-throughput particle focusing and separation in split-recombination channel	3
Ultra-high precision passive particle sorting chip coupling inertial microfluidics and single row micropillar arrays	3
Motion of generated dumbbell-shaped satellite droplets during liquid dielectrophoresis	3
Programmable intelligent liquid matter: material, science and technology	3
Mechanical reliability of silicon microstructures	3
Fractional order zero phase error tracking control of a novel decoupled 2-DOF compliant micro-positioning stage	3
Bonding Methods for Chip Integration with Parylene Devices	3
Graphene resonant pressure sensor with ultrahigh responsivity-range product	3
Implanted microelectrode arrays for evaluating inhibited seizure modulated by light-responsive hydrogel	3
Some considerations for designing a pneumatic micro-droplet generator	3
Microscale nuclear magnetic resonance gradient chip	3
Edge smoothness enhancement of digital lithography based on the DMDs collaborative modulation	3
Adherable temperature sensor to a porous structure of fiber via reduced graphene oxide and poly(diallyldimethylammonium chloride) complex	3
Three-dimensional AC electroosmotic micropump with high power density	3
PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation	3
Three-dimensional FSI simulation of cell entrapment utilizing acoustic interparticle force in a standing acoustic field	2