OOIR: Observatory of International Research

Papers

(The TQCC of IEEE Transactions on Semiconductor Manufacturing is 2. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-02-01 to 2025-02-01.)

Article	Citations
Table of Contents	47
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on New simulation methodologies for next-generation TCAD tools	37
A Novel Foundry Yield Model Using Critical Area Analysis	34
Leveraging Machine Learning for Capacity and Cost on a Complex Toolset: A Case Study	28
Table of Contents	27
Preparation and Application of Sol-Gel Polishing Pad for Polishing CVD Single Crystal Diamond at High Speed	27
Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference	24
IEEE Transactions on Semiconductor Manufacturing Information for Authors	24
Table of Contents	23
BCICTS 2023 Call for Papers	22
IEEE Transactions on Semiconductor Manufacturing Publication Information	22
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"	21
A Hybrid Method of Frequency and Spatial Domain Techniques for TFT-LCD Circuits Defect Detection	20
Wafer Lot Assignment for Parallel-Producing Tools Based on Heuristic Clustering Algorithm	18
Boundless Engineering for Yield to Cope With the Complexity of High-Volume Manufacturing	17
Multiobjective Order Promising for Outsourcing Supply Network of IC Design Houses	17
Edge Effects of an Eddy-Current Thickness Sensor During Chemical Mechanical Polishing	16
Supply Chain Planning for IC Design House Back-End Production Network With Turnkey Service	15
Watermark Detection in CMOS Image Sensors Using Cosine-Convolutional Semantic Networks	14
Joint Dynamic Dispatching and Preventive Maintenance for Unrelated Parallel Machines With Equipment Health Considerations	14
IEEE Transactions on Semiconductor Manufacturing Publication Information	13
Influence and Suppression of Harmful Effects Due to By-Product in CVD Reactor for 4H-SiC Epitaxy	12
Dynamic Down-Selection of Measurement Markers for Optimized Robust Control of Overlay Errors in Photolithography Processes	12
IEEE Transactions on Semiconductor Manufacturing Information for Authors	12
Call for Papers for RFIC 2023	12

ℓ₁ Trend Filtering-Based Change Point Detection for Pumping Line Balance of Deposition Equipment	11
IEEE Transactions on Semiconductor Manufacturing publication information	11
IEEE Transactions on Semiconductor Manufacturing Information for Authors	11
2021 EDS Education Award Call for Nominations	11
Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging	11
Study on Measurement Method of Microscopic ζ Potential	11
IEEE Transactions on Semiconductor Manufacturing Publication Information	10
Minimization of Particle Deposition on Wafers Caused by the Pressure Change in the Vacuum Chamber Through a Pressure Control Regulation Process	10
Front Cover	10
Bayesian Nonparametric Classification for Incomplete Data With a High Missing Rate: an Application to Semiconductor Manufacturing Data	10
3-D NAND Oxide/Nitride Tier Stack Thickness and Zonal Measurements With Infrared Metrology	9
Chamber and Recipe-Independent FDC Indicator in High-Mix Semiconductor Manufacturing	9
Observation and Suppression of Growth Pits Formed on 4H-SiC Epitaxial Films Grown Using Halide Chemical Vapor Deposition Process	9
A Study on the Improvement of Safety and Efficiency of Clean Rooms in Semiconductor Factories Through Real Fire Experiments	9
Defect Localization Approach for Wafer-to-Wafer Hybrid Bonding Interconnects	9
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning	8
Adaptive Cautious Regularized Run-to-Run Controller for Lithography Process	8
Shear Force Classification Before Wire Bonding Based on Probe Mark 2-D Images Using Machine Learning Methods	8
Methodology for Important Sensor Screening for Fault Detection and Classification in Semiconductor Manufacturing	7
Parametric Optimization for Moisture Infiltration Prevention Into a FOUP (Front Opening Unified Pod)	7
A Novel Multiscale Residual Aggregation Network-Based Image Super-Resolution Algorithm for Semiconductor Defect Inspection	7
Investigations of Fast Vacuum Pump-Down Processes Between Parallel Isothermal Disks	7
Process Optimization and Modeling of the Silicon Growth in Trichlorosilane-Hydrogen Gas Mixture in a Planetary CVD Reactor	7
Self-Assured Deep Learning With Minimum Pre-Labeled Data for Wafer Pattern Classification	7
Double Coating Process Using the Single Photoresist and the Thickness Prediction	7
Effect of SiO₂ Interfacial Layer Reduction on MFSFET With 5 nm-Thick Ferroelectric Nondoped HfO₂ by Deposition Rate Control	7
Blank Page	6
Modular Fluid Delivery System Architectures Drive Configurability Options, Enhance Semiconductor Manufacturing Equipment Productivity, and Improve Process Performance	6
Planned Maintenance Schedule Update Method for Predictive Maintenance of Semiconductor Plasma Etcher	6
Table of Contents	6
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment	5
Quantitative Comparison of Simulation and Experiment Enabling a Lithography Digital Twin	5
Improving the Reliability of Through Silicon Vias: Reducing Copper Protrusion by Artificial Defect Manipulation and Annealing	5
Feature Extraction From Diffraction Images Using a Spatial Light Modulator in Scatterometry	5
A Modified Lasso Model for Yield Analysis Considering the Interaction Effect in a Multistage Manufacturing Line	5
Integrated Electrochemical Technology for Efficient Metal Recovery in Semiconductor Wastewater	5
A Lightweight Chip-Scale Chemical Mechanical Polishing Model Based on Polynomial Network	5
Significant Lifetime Improvement of Negative Bias Thermal Instability by Plasma Enhanced Atomic Layer Deposition SiN in Stress Memorization Technique	5
Elimination of Si-C Defect on Wafer Surface in High-Temperature SPM Process Through Nitrogen Purge in 300-mm Single-Wafer Chamber	5
Why Contour Averaging Works for SEM Metrology: Analysis and Validation	5
Quantitative 3-D Flow Visualization of Conventional Purge Flow Within a Front Opening Unified Pod (FOUP)	5
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing	4
Overlay Measurement Algorithm for Moiré Targets Using Frequency Analysis	4
Gas-Delivery Fluid-Mechanical Timescales in Semiconductor Manufacturing	4
Automated Visual Inspection of Defects in Transparent Display Layers Using Light-Field 3-D Imaging	4
IEEE Transactions on Semiconductor Manufacturing Information for Authors	4
IEEE Transactions on Semiconductor Manufacturing Information for Authors	4
Reducing Datacenter Compute Carbon Footprint by Harnessing the Power of Specialization: Principles, Metrics, Challenges and Opportunities	4
Photoresist Spray Coating on Silicon Wafers With Acoustic Resonance Atomization	4
Front Cover	4

Efficient and Refined Deep Convolutional Features Network for the Crack Segmentation of Solar Cell Electroluminescence Images	4
An Advanced Finite Element Model for BiCMOS Process Oriented Ultra-Thin Wafer Deformation	4
Machine Learning on Multiplexed Optical Metrology Pattern Shift Response Targets to Predict Electrical Properties	4
SWaCo: Safe Wafer Bin Map Classification With Self-Supervised Contrastive Learning	4
Advanced Process Control System for Trench Shape of Power Devices	4
Front Cover	4
A Numerical Study on the Effects of Purge and Air Curtain Flow Rates on Humidity Invasion Into a Front Opening Unified Pod (FOUP)	4
Prevention of Moisture Invasion by Flow Isolation Device (FID) for Mask Automatic Storage System (Stocker Room) in a Semiconductor Fabrication Plant (Fab)	4
Quality-Oriented Statistical Process Control Utilizing Bayesian Modeling	4
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "From Mega to nano: Beyond one Century of Vacuum Electronics"	4
IEEE Transactions on Semiconductor Manufacturing Information for Authors	4
Fabrication of Porous Cu-Sn Microbumps for Low Temperature Cu-Cu Bonding	4
Table of Contents	3
Effective Variational-Autoencoder-Based Generative Models for Highly Imbalanced Fault Detection Data in Semiconductor Manufacturing	3
TCAD-Enabled Machine Learning—An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication	3
Editorial	3
Call for Papers for IEEE Transactions on Materials for Electron Devices	3
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	3
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Solid-State Image Sensors"	3
The Effect of Si Surface Flattening Process on the MISFET With High-k HfN_x Multilayer Gate Dielectrics	3
Regularized Recursive Solutions for Prediction of Aberrations Associated With Projection Optics	3
Guest Editorial Special Section on Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing	3
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on New simulation methodologies for next-generation TCAD tools	3
Table of contents	3
Editorial	3
Table of Contents	3
Editorial	3
Automatic Defect Classification Using Semi-Supervised Learning With Defect Localization	3
Table of contents	3
IEEE Transactions on Semiconductor Manufacturing publication information	3
Interface Characteristics, Erosion Behavior, and Thermal Shock Resistance of Al–Ta Alloy Coatings Produced by Arc Spraying	3
IEEE Transactions on Semiconductor Manufacturing Publication Information	3
Investigation of Variation in On-Si On-Wafer TRL Calibration in Sub-THz	3
Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process	2
Controlling Speckle Contrast Using Existing Lithographic Scanner Knobs to Explore the Impact on Line Width Roughness	2
Virtual Metrology Modeling for Wafer Edges via Graph Attention Networks	2
Machine Learning Models for Edge Placement Error Based Etch Bias	2
Level Set Simulation on Single Wafer Wet Processing Improvement	2
CMP Process Optimization Engineering by Machine Learning	2
Table of Contents	2
Optimization of Void Defects at TiN/Si:HfO₂ Interface for 3-D Ferroelectric Memory	2
Semi-Supervised Learning for Simultaneous Location Detection and Classification of Mixed-Type Defect Patterns in Wafer Bin Maps	2
Hotspot Prediction: SEM Image Generation With Potential Lithography Hotspots	2
A Yield Prediction Method Based on Nonparametric Statistical and Comparison With a Networks Method	2
Fuzzy Selection Model for Quality-Based IC Packaging Process Outsourcers	2
Improving Liquid Film Thickness Uniformity of Semiconductor Etching Equipment Using Flow Field Visualization and CFD Simulation	2
Deep Learning-Based Multi-Horizon Forecasting for Automated Material Handling System Throughput in Semiconductor Fab	2
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	2
Nondestructive Detection of Buried and Latent Defects by Negative Mode E-Beam Inspection	2
TestDNA-E: Wafer Defect Signature for Pattern Recognition by Ensemble Learning	2
Image-Based Defect Classification for TFT-LCD Array via Convolutional Neural Network	2
Improvement of Virtual Diagnostics Performance for Plasma Density in Semiconductor Etch Equipment Using Variational Auto-Encoder	2
Model-Free Adaptive Iterative Learning Control Method for the Czochralski Silicon Monocrystalline Batch Process	2
DSH to Extend-DSH: Chip-Level Chemical Mechanical Planarization (CMP) Model Upgrade Based on Decoupling Regression Strategy	2
The Mechanism of an Etching-Back to Reduce the Density of Cone Defect in STI During the Manufacturing	2
Attention Mechanism-Based Root Cause Analysis for Semiconductor Yield Enhancement Considering the Order of Manufacturing Processes	2
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)	2
A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge	2
Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples	2
Investigation of the HfON Tunneling Layer of MONOS Device for Low-Voltage and High-Speed Operation Nonvolatile Memory Application	2
A Hierarchical Spatial-Test Attention Network for Explainable Multiple Wafer Bin Maps Classification	2
Single-Mask Fabrication of Sharp SiO_x Nanocones	2
Improved Color Defect Detection With Machine Learning for After Develop Inspections in Lithography	2
Modeling and Optimizing the Impact of Process and Equipment Parameters in Sputtering Deposition Systems Using a Gaussian Process Machine Learning Framework	2
CNNs Combined With a Conditional GAN for Mura Defect Classification in TFT-LCDs	2
Computational Study of Chemical Uniformity Impacts on Electrodeposition	2
Thermal and Electrical Analysis of the Electrostatic Chuck for the Etch Equipment	2
Temporal Convolution-Based Long-Short Term Memory Network With Attention Mechanism for Remaining Useful Life Prediction	2