OOIR: Observatory of International Research

Papers

(The TQCC of IEEE Transactions on Semiconductor Manufacturing is 3. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2020-04-01 to 2024-04-01.)

Article	Citations
A Deep Convolutional Neural Network for Wafer Defect Identification on an Imbalanced Dataset in Semiconductor Manufacturing Processes	108
Deformable Convolutional Networks for Efficient Mixed-Type Wafer Defect Pattern Recognition	82
A Light-Weight Neural Network for Wafer Map Classification Based on Data Augmentation	53
Deep Learning-Based Domain Adaptation Method for Fault Diagnosis in Semiconductor Manufacturing	48
Active Learning of Convolutional Neural Network for Cost-Effective Wafer Map Pattern Classification	38
Self-Supervised Representation Learning for Wafer Bin Map Defect Pattern Classification	37
Semi-Supervised Multi-Label Learning for Classification of Wafer Bin Maps With Mixed-Type Defect Patterns	33
SMT2020—A Semiconductor Manufacturing Testbed	31
Model-Free Adaptive Iterative Learning Control Method for the Czochralski Silicon Monocrystalline Batch Process	29
Memory-Augmented Convolutional Neural Networks With Triplet Loss for Imbalanced Wafer Defect Pattern Classification	28
Machine Learning-Based Detection Method for Wafer Test Induced Defects	28
Data-Driven Framework for Tool Health Monitoring and Maintenance Strategy for Smart Manufacturing	27
Variational Deep Clustering of Wafer Map Patterns	26
Applying Data Augmentation and Mask R-CNN-Based Instance Segmentation Method for Mixed-Type Wafer Maps Defect Patterns Classification	23
Advanced Quality Control (AQC) of Silicon Wafer Specifications for Yield Enhancement for Smart Manufacturing	22
Support Weighted Ensemble Model for Open Set Recognition of Wafer Map Defects	22
CNNs Combined With a Conditional GAN for Mura Defect Classification in TFT-LCDs	19
Run-to-Run Control of Chemical Mechanical Polishing Process Based on Deep Reinforcement Learning	19
Deep Learning Approach to Inverse Grain Pattern of Nanosized Metal Gate for Multichannel Gate-All-Around Silicon Nanosheet MOSFETs	18
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching	18
Adversarial Defect Detection in Semiconductor Manufacturing Process	18
Optimal Feature Selection for Defect Classification in Semiconductor Wafers	17
Temporal Convolution-Based Long-Short Term Memory Network With Attention Mechanism for Remaining Useful Life Prediction	17
Use of Plasma Information in Machine-Learning-Based Fault Detection and Classification for Advanced Equipment Control	16
Redefining Monitoring Rules for Intelligent Fault Detection and Classification via CNN Transfer Learning for Smart Manufacturing	16

Methodology for Important Sensor Screening for Fault Detection and Classification in Semiconductor Manufacturing	15
Integration of 650 V GaN Power ICs on 200 mm Engineered Substrates	15
Qualitative and Quantitative Analysis of Multi-Pattern Wafer Bin Maps	15
Two-Stage Transfer Learning for Fault Prognosis of Ion Mill Etching Process	14
Mixed-Type Wafer Defect Recognition With Multi-Scale Information Fusion Transformer	12
Investigation of Dye-Sensitized Solar Cell With Photoanode Modified by TiO₂-ZnO Nanofibers	12
Development of a World Class Silicon Carbide Substrate Manufacturing Capability	12
Data-Driven Model Predictive Control of Cz Silicon Single Crystal Growth Process With V/G Value Soft Measurement Model	11
Extracting Voltage Dependence of BTI-induced Degradation Without Temporal Factors by Using BTI-Sensitive and BTI-Insensitive Ring Oscillators	11
Performance of Different Front-Opening Unified Pod (FOUP) Moisture Removal Techniques With Local Exhaust Ventilation System	11
An Improved Capsule Network (WaferCaps) for Wafer Bin Map Classification Based on DCGAN Data Upsampling	11
Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma	11
Application of ANN for Fault Detection in Overhead Transport Systems for Semiconductor Fab	11
Wafer Bin Map Recognition With Autoencoder-Based Data Augmentation in Semiconductor Assembly Process	10
Wafer Defect Pattern Labeling and Recognition Using Semi-Supervised Learning	10
Sensitivity Enhancement of SiO₂Plasma Etching Endpoint Detection Using Modified Gaussian Mixture Model	10
Development of Diaphragm and Microtunnel Structures for MEMS Piezoelectric Sensors	10
Adaptive Cautious Regularized Run-to-Run Controller for Lithography Process	10
Locally Adaptive Statistical Background Modeling With Deep Learning-Based False Positive Rejection for Defect Detection in Semiconductor Units	9
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment	9
Hidden Wafer Scratch Defects Projection for Diagnosis and Quality Enhancement	9
Flow Analysis and Relative Humidity (RH) Measurement in the Horizontal Plane of a Front Opening Unified Pod (FOUP)	9
Noncyclic Scheduling of Multi-Cluster Tools With Residency Constraints Based on Pareto Optimization	9
Combination of Convolutional and Generative Adversarial Networks for Defect Image Demoiréing of Thin-Film Transistor Liquid-Crystal Display Image	8
TestDNA: Novel Wafer Defect Signature for Diagnosis and Pattern Recognition	8
A Sequential Search Method of Dispatching Rules for Scheduling of LCD Manufacturing Systems	8
Dynamic Clustering for Wafer Map Patterns Using Self-Supervised Learning on Convolutional Autoencoders	8
Deep Learning-Based Positioning Error Fault Diagnosis of Wire Bonding Equipment and an Empirical Study for IC Packaging	8
Machine Learning Models for Edge Placement Error Based Etch Bias	8
Detection and Recognition of Mixed-Type Defect Patterns in Wafer Bin Maps via Tensor Voting	7
Atomic Layer Processes for Material Growth and Etching—A Review	7
CMP Process Optimization Engineering by Machine Learning	7
Dependability Assessment of Transfer Length Method to Extract the Metal–Graphene Contact Resistance	7
The Environmental Footprint of IC Production: Review, Analysis, and Lessons From Historical Trends	7
Similarity Search on Wafer Bin Map Through Nonparametric and Hierarchical Clustering	7
Optimizing the Isotropic Etching Nature and Etch Profile of Si, Ge and Si_0.8Ge_0.2 by Controlling CF₄ Atmosphere With Ar and O₂ Additives in ICP	7
An On-Chip Micromachined Test Structure to Study the Tribological Behavior of Deep-RIE MEMS Sidewall Surfaces	7
Data Visualization of Anomaly Detection in Semiconductor Processing Tools	7
A Graph-Theoretic Approach for Spatial Filtering and Its Impact on Mixed-Type Spatial Pattern Recognition in Wafer Bin Maps	7
Discovery of Resource-Oriented Transition Systems for Yield Enhancement in Semiconductor Manufacturing	7
Planned Maintenance Schedule Update Method for Predictive Maintenance of Semiconductor Plasma Etcher	7
Measurement and Modeling of Ambient-Air-Induced Degradation in Organic Thin-Film Transistor	6
Optical Proximity Correction Using Bidirectional Recurrent Neural Network With Attention Mechanism	6
A Study on the Impact of Mid-Gap Defects on Vertical GaN Diodes	6
Synthesis of Lithography Test Patterns Using Machine Learning Model	6
One Class Process Anomaly Detection Using Kernel Density Estimation Methods	6
Unrelated Parallel Machine Photolithography Scheduling Problem With Dual Resource Constraints	6
Wafer Reflectance Prediction for Complex Etching Process Based on K-Means Clustering and Neural Network	6
Fuzzy Selection Model for Quality-Based IC Packaging Process Outsourcers	6
Efficient and Refined Deep Convolutional Features Network for the Crack Segmentation of Solar Cell Electroluminescence Images	5

Edge Effects of an Eddy-Current Thickness Sensor During Chemical Mechanical Polishing	5
Performance-Based Active Wafer Clamp Design for Wafer Heating Effects in EUV Lithography	5
Improvement of Multi-Lines Bridge Defect Classification by Hierarchical Architecture in Artificial Intelligence Automatic Defect Classification	5
Layout Pattern Synthesis for Lithography Optimizations	5
Influence and Suppression of Harmful Effects Due to By-Product in CVD Reactor for 4H-SiC Epitaxy	5
A Real-Time Monitoring Framework for Wafer Fabrication Processes With Run-to-Run Variations	5
Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement	5
Attention Mechanism-Based Root Cause Analysis for Semiconductor Yield Enhancement Considering the Order of Manufacturing Processes	5
Plasma Induced Damage Reduction of Ultra Low-k Dielectric by Using Source Pulsed Plasma Etching for Next BEOL Interconnect Manufacturing	5
A Simple Model of Capacity Contention During New Product Introductions	5
A New Stage-Wise Control Release Policy for Semiconductor Wafer Fabrication Systems	4
Statistical Extraction of Normally and Lognormally Distributed Model Parameters for Power MOSFETs	4
An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study	4
Abnormal Silicon-Germanium (SiGe) Epitaxial Growth in FinFETs	4
Quality-Oriented Statistical Process Control Utilizing Bayesian Modeling	4
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning	4
CNN-Based Layout Segment Classification for Analysis of Layout-Induced Failures	4
Data-Driven and Mechanism-Based Hybrid Model for Semiconductor Silicon Monocrystalline Quality Prediction in the Czochralski Process	4
Nano-Scale Depth Profiles of Electrical Properties of Phosphorus Doped Silicon for Ultra-Shallow Junction Evaluation	4
Feature Selection for Waiting Time Predictions in Semiconductor Wafer Fabs	4
Semi-Supervised Learning for Simultaneous Location Detection and Classification of Mixed-Type Defect Patterns in Wafer Bin Maps	4
Optimization of Nafion Polymer Electrolyte Membrane Design and Microfabrication	4
Minimizing Convolutional Neural Network Training Data With Proper Data Augmentation for Inline Defect Classification	4
Decrease in Particles by Substituting Conductive Magnesium-Oxide Based Ceramics for Conventional Electrode Materials Used in Process Chamber of Plasma Etching	4
Customer Order Behavior Classification Via Convolutional Neural Networks in the Semiconductor Industry	4
Exploiting 2D Coordinates as Bayesian Priors for Deep Learning Defect Classification of SEM Images	4
An Advanced Finite Element Model for BiCMOS Process Oriented Ultra-Thin Wafer Deformation	4
A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge	4
Joint Dynamic Dispatching and Preventive Maintenance for Unrelated Parallel Machines With Equipment Health Considerations	3
Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging	3
Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Robot Waiting Time	3
EveSyncIAI: Event Synchronization Industrial Augmented Intelligence for Fault Diagnosis	3
Precise Pattern Alignment for Die-to-Database Inspection Based on the Generative Adversarial Network	3
A One-Shot Learning Approach for Similarity Retrieval of Wafer Bin Maps With Unknown Failure Pattern	3
Understanding and Improving Virtual Metrology Systems Using Bayesian Methods	3
Modeling and Optimizing the Impact of Process and Equipment Parameters in Sputtering Deposition Systems Using a Gaussian Process Machine Learning Framework	3
Improved Color Defect Detection With Machine Learning for After Develop Inspections in Lithography	3
Increasing the Utilization of Deep Neural Networks for SEM Measurements Through Multiple Task Formulation and Visualization	3
Advanced Low Pin Count Test Architecture for Efficient Multi-Site Testing	3
Anomaly Detection in Batch Manufacturing Processes Using Localized Reconstruction Errors From 1-D Convolutional AutoEncoders	3
Which Spare Parts Service Measure to Choose for a Front-End Wafer Fab?	3
Study on Mechanical Cleavage Mechanism of GaAs via Anisotropic Stress Field and Experiments	3
Color Difference Detection of Polysilicon Wafers Using Optimized Support Vector Machine by Magnetic Bacteria Optimization Algorithm With Elitist Strategy	3
Semiconductor Defect Pattern Classification by Self-Proliferation-and-Attention Neural Network	3
Matheuristics for Qualification Management Decisions in Wafer Fabs	3
Investigation of the HfON Tunneling Layer of MONOS Device for Low-Voltage and High-Speed Operation Nonvolatile Memory Application	3
Test Structures for Developing Packaging for Implantable Sensors	3
Shear Force Classification Before Wire Bonding Based on Probe Mark 2-D Images Using Machine Learning Methods	3
Process Optimization and Modeling of the Silicon Growth in Trichlorosilane-Hydrogen Gas Mixture in a Planetary CVD Reactor	3
Improvement of ZnO/Si Heterojunctions With a Coaxial Circular Transmission Line Model Applicable to Both Ohmic and Schottky	3
A Method to Determine the Electret Charge Potential of MEMS Vibrational Energy Harvester Using Pure-White Noise	3
A Self-Test Method of Structural Failures of Uncooled Infrared Focal Plane Array	3
Optimization and Application of TiO₂ Hollow Microsphere Modified Scattering Layer for the Photovoltaic Conversion Efficiency of Dye-Sensitized Solar Cell	3
Prediction of Highly Imbalanced Semiconductor Chip-Level Defects in Module Tests Using Multimodal Fusion and Logit Adjustment	3
Improvement of Virtual Diagnostics Performance for Plasma Density in Semiconductor Etch Equipment Using Variational Auto-Encoder	3
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)	3