OOIR: Observatory of International Research

Papers

(The TQCC of IEEE Transactions on Semiconductor Manufacturing is 3. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-09-01 to 2025-09-01.)

Article	Citations
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"	43
IEEE Transactions on Semiconductor Manufacturing Publication Information	39
Investigations of Fast Vacuum Pump-Down Processes Between Parallel Isothermal Disks	38
Minimization of Particle Deposition on Wafers Caused by the Pressure Change in the Vacuum Chamber Through a Pressure Control Regulation Process	34
Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference	33
Call for Nominations for Editor-in-Chief: IEEE Electron Device Letters	32
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning	31
Fabrication of Porous Cu–Sn Microbumps for Low-Temperature Cu–Cu Bonding	31
Fast and High-Precision Temperature Control in Semiconductor Vertical Furnace via Iterative Experiments	27
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment	23
Defect Reduction and Line Width Roughness Improvement by Using a Post Precoat Treatment in Waferless Chamber Conditioning	23
Call for Papers for IEEE Transactions on Materials for Electron Devices	22
Nondestructive Detection of Buried and Latent Defects by Negative Mode E-Beam Inspection	22
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	22
Computational Study of Chemical Uniformity Impacts on Electrodeposition	20
TCAD-Enabled Machine Learning—An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication	19
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)	18
Level Set Simulation on Single Wafer Wet Processing Improvement	16
A Yield Prediction Method Based on Nonparametric Statistical and Comparison With a Networks Method	16
Advanced Process Control System for Trench Shape of Power Devices	15
Single-Mask Fabrication of Sharp SiO_x Nanocones	14
Editorial	14
TestDNA-E: Wafer Defect Signature for Pattern Recognition by Ensemble Learning	13
Grain Morphology Effects on Void Formation and Electromigration-Induced Failure in Copper Interconnects	13
A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge	13

The Mechanism of an Etching-Back to Reduce the Density of Cone Defect in STI During the Manufacturing	12
Synthesis of Critical Patterns for Lithography Optimizations through Machine Learning	12
Hotspot Prediction: SEM Image Generation With Potential Lithography Hotspots	12
IEEE Transactions on Semiconductor Manufacturing Publication Information	10
Semi-Supervised Learning for Simultaneous Location Detection and Classification of Mixed-Type Defect Patterns in Wafer Bin Maps	10
A Warpage Prediction Model for Trench Field-Plate Power MOSFET in 300mm-Diameter Process	9
Blank Page	9
DPFEE-Net: Enhancing Wafer Defect Classification Through Dual-Path Neural Architecture	9
Automatic Classification of C-SAM Voids for Root Cause Identification of Bonding Yield Degradation	9
Blank Page	9
Source Pad Design Tradeoffs for a Power TrenchFET	9
Wafer Bin Map Recognition With Autoencoder-Based Data Augmentation in Semiconductor Assembly Process	9
A Self-Powered Wireless Sensing Circuitry for On-Wafer In-Situ EUV Detection	8
IEEE Transactions on Semiconductor Manufacturing Publication Information	8
Integration Challenges on 300-mm High Resistivity Silicon Substrates	8
Physics-Informed Machine Learning-Based Edge Detection for SEM Images	8
In-Situ Plasma Monitoring Using Multiple Plasma Information in SiO₂ Etch Process	8
2021 Index IEEE Transactions on Semiconductor Manufacturing Vol. 34	8
IEEE Transactions on Semiconductor Manufacturing Publication Information	7
Systematic Search for Stabilizing Dopants in ZrO₂ and HfO₂ Using First-Principles Calculations	7
IEEE Transactions on Semiconductor Manufacturing Publication Information	7
IEEE EDS Robert Bosch Micro and Nano Electro Mechanical Systems Award: Call for Nominations	7
2023 Index IEEE Transactions on Semiconductor Manufacturing Vol. 36	7
Wafer Dicing Vibration Investigation on Novel Wafer Mounting Techniques	7
Deep Learning Approach to Inverse Grain Pattern of Nanosized Metal Gate for Multichannel Gate-All-Around Silicon Nanosheet MOSFETs	7
Streamlining Semiconductor Manufacturing of 200 mm and 300 mm Wafers: A Longitudinal Case Study on the Lot-to-Order-Matching Process	7
Journal of Lightwave Technology Special Issue on: OFS-29	7
Optimization and Application of TiO₂ Hollow Microsphere Modified Scattering Layer for the Photovoltaic Conversion Efficiency of Dye-Sensitized Solar Cell	7
Commonality Analysis for Detecting Failures Caused by Inspection Tools in Semiconductor Manufacturing Processes	6
Evaluation of Thick Silicon Nitride Film Properties at 300 mm Scale for High-Q Photonic Devices	6
Guest Editorial Process-Level Machine Learning Applications in Semiconductor Manufacturing	6
A Real-Time Monitoring Framework for Wafer Fabrication Processes With Run-to-Run Variations	6
Data-Driven Production Planning Models for Wafer Fabs: An Exploratory Study	6
Table of Contents	6
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching	6
Research Toward Wafer-Scale 3D Integration of InP Membrane Photonics With InP Electronics	6
Advances in the Thermal Study of Polymers for Microelectronics Using the Thermally Induced Curvature Approach	6
RA-UNet: A New Deep Learning Segmentation Method for Semiconductor Wafer Defect Analysis on Fine-Grained Scanning Electron Microscope (SEM) Images	6
Defect Detection of Photovoltaic Panels to Suppress Endogenous Shift Phenomenon	6
Front Cover	6
Recognition and Classification of Mixed Defect Pattern Wafer Map Based on Multi-Path DCNN	6
Nitrogen-Doped Czochralski Silicon Wafers as Materials for Conventional and Scaled Insulated Gate Bipolar Transistors	6
Deep Clustering and Regression Ensemble Network for Lot Cycle Time Prediction in Semiconductor Wafer Fabrication	6
Characterizing Capacitor Top Plate Bias for More Accurate Electromagnetic Simulations	6
Table of Contents	5
Unrelated Parallel Machine Photolithography Scheduling Problem With Dual Resource Constraints	5
Quantitative 3-D Flow Visualization of Conventional Purge Flow Within a Front Opening Unified Pod (FOUP)	5
A Modified Lasso Model for Yield Analysis Considering the Interaction Effect in a Multistage Manufacturing Line	5
Overlay Measurement Algorithm for Moiré Targets Using Frequency Analysis	5
Anomaly Detection in Batch Manufacturing Processes Using Localized Reconstruction Errors From 1-D Convolutional AutoEncoders	5

Semantic Context Information Modeling With Neural Networks in Customer Order Behavior Classification	5
Call for Papers 6th IEEE Electron Devices Technology and Manufacturing (EDTM) Conference	5
Editorial	5
BCICTS 2023 Call for Papers	5
Shear Force Classification Before Wire Bonding Based on Probe Mark 2-D Images Using Machine Learning Methods	5
Why Contour Averaging Works for SEM Metrology: Analysis and Validation	5
IEEE Transactions on Semiconductor Manufacturing Publication Information	5
Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices Based on Image Recognition	5
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	5
Fabrication of On-Silicon Aperture Coupled Patch Antenna Through Micromachining and Cu-Cu Thermocompression Bonding	5
Double Coating Process Using the Single Photoresist and the Thickness Prediction	5
Multiobjective Order Promising for Outsourcing Supply Network of IC Design Houses	5
Prevention of Moisture Invasion by Flow Isolation Device (FID) for Mask Automatic Storage System (Stocker Room) in a Semiconductor Fabrication Plant (Fab)	5
Call for Nominations: 2024 EDS Early Career Award	5
Editorial	4
Current Status of Bulk β-Ga2O3 and β-(AlxGa1-x)2O3 Crystal Growth	4
Defect Localization Approach for Wafer-to-Wafer Hybrid Bonding Interconnects	4
Table of contents	4
Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples	4
Efficient and Refined Deep Convolutional Features Network for the Crack Segmentation of Solar Cell Electroluminescence Images	4
Guest Editorial Special Section on Sustainability	4
Table of Contents	4
Integrated Electrochemical Technology for Efficient Metal Recovery in Semiconductor Wastewater	4
Unsupervised Representation Learning and Explainable Clustering for Wafer Map Pattern Analysis	4
Guest Editorial Introduction to the Joint Special Issue on Semiconductor Design for Manufacturing (DFM)	4
Chemical Mechanical Polishing of Single-Crystalline Diamond Epitaxial Layers for Electronics Applications	4
IEEE Transactions on Semiconductor Manufacturing Information for Authors	4
IEEE Transactions on Semiconductor Manufacturing Information for Authors	4
Improving Endpoint Detection Sensitivity in Plasma Etching With Small Openings	4
DSH to Extend-DSH: Chip-Level Chemical Mechanical Planarization (CMP) Model Upgrade Based on Decoupling Regression Strategy	4
Deep Learning-Based Multi-Horizon Forecasting for Automated Material Handling System Throughput in Semiconductor Fab	4
Surface Reconstruction for Enhancing the Overlay Modeling Optimization Procedure in Photolithography Processes	4
TechRxiv: Share Your Preprint Research With the World!	4
IEEE Transactions on Semiconductor Manufacturing Information for Authors	3
Geometry-Based Curvilinear Mask Process Correction for Enhanced Pattern Fidelity, Contrast, and Manufacturability	3
Performance Evaluation of Supervised Learning Model Based on Functional Data Analysis and Summary Statistics	3
Blank Page	3
Real-Time Change Detection for Automated Test Socket Inspection Using Advanced Computer Vision and Machine Learning	3
Effects of the Applied Power of Remote Plasma System With Green Alternative Chamber Cleaning Gas of Carbonyl Fluoride	3
Editorial	3
Understanding and Improving Virtual Metrology Systems Using Bayesian Methods	3
Density-Based Spatial Clustering of Applications With Noise (DBSCAN) for Probe Card Production for Advanced Quality Control of Wafer Probing Test	3
A Diffusion-Model-Based Methodology for Virtual Silicon Data Generation	3
Model-Based OPC With Adaptive PID Control Through Reinforcement Learning	3
Front Cover	3
Practical Reinforcement Learning for Adaptive Photolithography Scheduler in Mass Production	3
Comparative Study of Nondestructive Mapping of Conformal-Coating Thickness on Microelectronics by Terahertz Time-of-Flight Tomography	3
Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement	3
Editorial	3
Blank page	3
Sustainable Technologies for Responsible Products and a More Sustainable Future	3