OOIR: Observatory of International Research

Papers

(The TQCC of IEEE Transactions on Semiconductor Manufacturing is 3. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2020-11-01 to 2024-11-01.)

Article	Citations
Deformable Convolutional Networks for Efficient Mixed-Type Wafer Defect Pattern Recognition	108
A Light-Weight Neural Network for Wafer Map Classification Based on Data Augmentation	60
Self-Supervised Representation Learning for Wafer Bin Map Defect Pattern Classification	47
Semi-Supervised Multi-Label Learning for Classification of Wafer Bin Maps With Mixed-Type Defect Patterns	41
Model-Free Adaptive Iterative Learning Control Method for the Czochralski Silicon Monocrystalline Batch Process	37
Machine Learning-Based Detection Method for Wafer Test Induced Defects	34
SMT2020—A Semiconductor Manufacturing Testbed	32
Memory-Augmented Convolutional Neural Networks With Triplet Loss for Imbalanced Wafer Defect Pattern Classification	31
Data-Driven Framework for Tool Health Monitoring and Maintenance Strategy for Smart Manufacturing	30
Applying Data Augmentation and Mask R-CNN-Based Instance Segmentation Method for Mixed-Type Wafer Maps Defect Patterns Classification	27
Temporal Convolution-Based Long-Short Term Memory Network With Attention Mechanism for Remaining Useful Life Prediction	27
Support Weighted Ensemble Model for Open Set Recognition of Wafer Map Defects	27
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching	25
Advanced Quality Control (AQC) of Silicon Wafer Specifications for Yield Enhancement for Smart Manufacturing	23
Adversarial Defect Detection in Semiconductor Manufacturing Process	22
CNNs Combined With a Conditional GAN for Mura Defect Classification in TFT-LCDs	22
Optimal Feature Selection for Defect Classification in Semiconductor Wafers	21
Deep Learning Approach to Inverse Grain Pattern of Nanosized Metal Gate for Multichannel Gate-All-Around Silicon Nanosheet MOSFETs	21
Redefining Monitoring Rules for Intelligent Fault Detection and Classification via CNN Transfer Learning for Smart Manufacturing	20
Use of Plasma Information in Machine-Learning-Based Fault Detection and Classification for Advanced Equipment Control	19
An Improved Capsule Network (WaferCaps) for Wafer Bin Map Classification Based on DCGAN Data Upsampling	18
Mixed-Type Wafer Defect Recognition With Multi-Scale Information Fusion Transformer	17
Methodology for Important Sensor Screening for Fault Detection and Classification in Semiconductor Manufacturing	17
The Environmental Footprint of IC Production: Review, Analysis, and Lessons From Historical Trends	17
Wafer Defect Pattern Labeling and Recognition Using Semi-Supervised Learning	16

Two-Stage Transfer Learning for Fault Prognosis of Ion Mill Etching Process	15
Qualitative and Quantitative Analysis of Multi-Pattern Wafer Bin Maps	15
Development of a World Class Silicon Carbide Substrate Manufacturing Capability	15
Integration of 650 V GaN Power ICs on 200 mm Engineered Substrates	15
Data-Driven Model Predictive Control of Cz Silicon Single Crystal Growth Process With V/G Value Soft Measurement Model	14
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment	14
Wafer Bin Map Recognition With Autoencoder-Based Data Augmentation in Semiconductor Assembly Process	13
Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma	12
Dynamic Clustering for Wafer Map Patterns Using Self-Supervised Learning on Convolutional Autoencoders	12
CMP Process Optimization Engineering by Machine Learning	12
Detection and Recognition of Mixed-Type Defect Patterns in Wafer Bin Maps via Tensor Voting	11
Fuzzy Selection Model for Quality-Based IC Packaging Process Outsourcers	11
A Graph-Theoretic Approach for Spatial Filtering and Its Impact on Mixed-Type Spatial Pattern Recognition in Wafer Bin Maps	11
One Class Process Anomaly Detection Using Kernel Density Estimation Methods	11
Adaptive Cautious Regularized Run-to-Run Controller for Lithography Process	11
Similarity Search on Wafer Bin Map Through Nonparametric and Hierarchical Clustering	11
Semi-Supervised Learning for Simultaneous Location Detection and Classification of Mixed-Type Defect Patterns in Wafer Bin Maps	11
Deep Learning-Based Positioning Error Fault Diagnosis of Wire Bonding Equipment and an Empirical Study for IC Packaging	10
Effective Variational-Autoencoder-Based Generative Models for Highly Imbalanced Fault Detection Data in Semiconductor Manufacturing	10
Development of Diaphragm and Microtunnel Structures for MEMS Piezoelectric Sensors	10
Flow Analysis and Relative Humidity (RH) Measurement in the Horizontal Plane of a Front Opening Unified Pod (FOUP)	10
Hidden Wafer Scratch Defects Projection for Diagnosis and Quality Enhancement	10
Optimizing the Isotropic Etching Nature and Etch Profile of Si, Ge and Si_0.8Ge_0.2 by Controlling CF₄ Atmosphere With Ar and O₂ Additives in ICP	9
Influence and Suppression of Harmful Effects Due to By-Product in CVD Reactor for 4H-SiC Epitaxy	9
Atomic Layer Processes for Material Growth and Etching—A Review	9
Planned Maintenance Schedule Update Method for Predictive Maintenance of Semiconductor Plasma Etcher	9
Efficient and Refined Deep Convolutional Features Network for the Crack Segmentation of Solar Cell Electroluminescence Images	9
Wafer Reflectance Prediction for Complex Etching Process Based on K-Means Clustering and Neural Network	8
Discovery of Resource-Oriented Transition Systems for Yield Enhancement in Semiconductor Manufacturing	8
A Sequential Search Method of Dispatching Rules for Scheduling of LCD Manufacturing Systems	8
Machine Learning Models for Edge Placement Error Based Etch Bias	8
An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study	7
Data Visualization of Anomaly Detection in Semiconductor Processing Tools	7
Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement	7
A Fine-Grained, End-to-End Feature-Scale CMP Modeling Paradigm Based on Fully Convolutional Neural Networks	7
Synthesis of Lithography Test Patterns Using Machine Learning Model	7
Attention Mechanism-Based Root Cause Analysis for Semiconductor Yield Enhancement Considering the Order of Manufacturing Processes	7
Data-Driven and Mechanism-Based Hybrid Model for Semiconductor Silicon Monocrystalline Quality Prediction in the Czochralski Process	7
A Real-Time Monitoring Framework for Wafer Fabrication Processes With Run-to-Run Variations	7
Optical Proximity Correction Using Bidirectional Recurrent Neural Network With Attention Mechanism	6
Unrelated Parallel Machine Photolithography Scheduling Problem With Dual Resource Constraints	6
A Study on the Impact of Mid-Gap Defects on Vertical GaN Diodes	6
Decrease in Particles by Substituting Conductive Magnesium-Oxide Based Ceramics for Conventional Electrode Materials Used in Process Chamber of Plasma Etching	6
Edge Effects of an Eddy-Current Thickness Sensor During Chemical Mechanical Polishing	6
A One-Shot Learning Approach for Similarity Retrieval of Wafer Bin Maps With Unknown Failure Pattern	5
Prediction of Highly Imbalanced Semiconductor Chip-Level Defects in Module Tests Using Multimodal Fusion and Logit Adjustment	5
Improved Color Defect Detection With Machine Learning for After Develop Inspections in Lithography	5
A New Stage-Wise Control Release Policy for Semiconductor Wafer Fabrication Systems	5
Nano-Scale Depth Profiles of Electrical Properties of Phosphorus Doped Silicon for Ultra-Shallow Junction Evaluation	5
Improvement of Multi-Lines Bridge Defect Classification by Hierarchical Architecture in Artificial Intelligence Automatic Defect Classification	5

A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge	5
Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Robot Waiting Time	5
Customer Order Behavior Classification Via Convolutional Neural Networks in the Semiconductor Industry	5
Feature Selection for Waiting Time Predictions in Semiconductor Wafer Fabs	5
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning	5
RoIA: Region of Interest Attention Network for Surface Defect Detection	4
Study on Mechanical Cleavage Mechanism of GaAs via Anisotropic Stress Field and Experiments	4
Understanding and Improving Virtual Metrology Systems Using Bayesian Methods	4
Improvement of Virtual Diagnostics Performance for Plasma Density in Semiconductor Etch Equipment Using Variational Auto-Encoder	4
Automatic Defect Classification Using Semi-Supervised Learning With Defect Localization	4
Shear Force Classification Before Wire Bonding Based on Probe Mark 2-D Images Using Machine Learning Methods	4
Wafer Scratch Pattern Reconstruction for High Diagnosis Accuracy and Yield Optimization	4
On the Fly Ellipsometry Imaging for Process Deviation Detection	4
Which Spare Parts Service Measure to Choose for a Front-End Wafer Fab?	4
A Deep Learning Analysis Framework for Complex Wafer Bin Map Classification	4
Exploiting 2D Coordinates as Bayesian Priors for Deep Learning Defect Classification of SEM Images	4
Improving Liquid Film Thickness Uniformity of Semiconductor Etching Equipment Using Flow Field Visualization and CFD Simulation	4
An Advanced Finite Element Model for BiCMOS Process Oriented Ultra-Thin Wafer Deformation	4
Anomaly Detection in Batch Manufacturing Processes Using Localized Reconstruction Errors From 1-D Convolutional AutoEncoders	4
Minimizing Convolutional Neural Network Training Data With Proper Data Augmentation for Inline Defect Classification	4
Practical Q-Learning-Based Route-Guidance and Vehicle Assignment for OHT Systems in Semiconductor Fabs	4
High Accuracy Simulation of Silicon Oxynitride Film Grown by Plasma Enhanced Chemical Vapor Deposition	4
Thermal and Electrical Analysis of the Electrostatic Chuck for the Etch Equipment	4
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)	4
TestDNA-E: Wafer Defect Signature for Pattern Recognition by Ensemble Learning	4
Quality-Oriented Statistical Process Control Utilizing Bayesian Modeling	4
CNN-Based Layout Segment Classification for Analysis of Layout-Induced Failures	4
Improvement of ZnO/Si Heterojunctions With a Coaxial Circular Transmission Line Model Applicable to Both Ohmic and Schottky	3
A Self-Test Method of Structural Failures of Uncooled Infrared Focal Plane Array	3
Correlated Bayesian Co-Training for Virtual Metrology	3
Matheuristics for Qualification Management Decisions in Wafer Fabs	3
Investigation of the HfON Tunneling Layer of MONOS Device for Low-Voltage and High-Speed Operation Nonvolatile Memory Application	3
Double Coating Process Using the Single Photoresist and the Thickness Prediction	3
Joint Dynamic Dispatching and Preventive Maintenance for Unrelated Parallel Machines With Equipment Health Considerations	3
Vehicle Look-Ahead Dispatching for Overhead Hoist Transport System in Semiconductor Manufacturing	3
EveSyncIAI: Event Synchronization Industrial Augmented Intelligence for Fault Diagnosis	3
Semiconductor Defect Pattern Classification by Self-Proliferation-and-Attention Neural Network	3
A Practical Approach for Managing End-of-Life Systems in Semiconductor Manufacturing Using Health Index	3
Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process	3
SWaCo: Safe Wafer Bin Map Classification With Self-Supervised Contrastive Learning	3
Chamber and Recipe-Independent FDC Indicator in High-Mix Semiconductor Manufacturing	3
Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging	3
Fast and Precise Temperature Control for a Semiconductor Vertical Furnace via Heater-Cooler Integration	3
Precise Pattern Alignment for Die-to-Database Inspection Based on the Generative Adversarial Network	3
Optimization and Application of TiO₂ Hollow Microsphere Modified Scattering Layer for the Photovoltaic Conversion Efficiency of Dye-Sensitized Solar Cell	3
Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review	3
Modeling and Optimizing the Impact of Process and Equipment Parameters in Sputtering Deposition Systems Using a Gaussian Process Machine Learning Framework	3
A Modified Lasso Model for Yield Analysis Considering the Interaction Effect in a Multistage Manufacturing Line	3
Process Optimization and Modeling of the Silicon Growth in Trichlorosilane-Hydrogen Gas Mixture in a Planetary CVD Reactor	3
Self-Assured Deep Learning With Minimum Pre-Labeled Data for Wafer Pattern Classification	3