IEEE Transactions on Semiconductor Manufacturing

Article	Citations
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"	49
Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference	49
IEEE Transactions on Semiconductor Manufacturing Publication Information	48
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning	45
Investigations of Fast Vacuum Pump-Down Processes Between Parallel Isothermal Disks	40
Call for Nominations for Editor-in-Chief: IEEE Electron Device Letters	39
Fabrication of Porous Cu–Sn Microbumps for Low-Temperature Cu–Cu Bonding	37
Defect Reduction and Line Width Roughness Improvement by Using a Post Precoat Treatment in Waferless Chamber Conditioning	37
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment	34
Fast and High-Precision Temperature Control in Semiconductor Vertical Furnace via Iterative Experiments	29
Minimization of Particle Deposition on Wafers Caused by the Pressure Change in the Vacuum Chamber Through a Pressure Control Regulation Process	26
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	24
Scalable Multi-Site Test Architecture for Chiplet-Based Systems on ATE Platforms	24
Call for Papers for IEEE Transactions on Materials for Electron Devices	22
Level Set Simulation on Single Wafer Wet Processing Improvement	22
Editorial	19
Single-Mask Fabrication of Sharp SiOx Nanocones	19
The Mechanism of an Etching-Back to Reduce the Density of Cone Defect in STI During the Manufacturing	19
Advanced Process Control System for Trench Shape of Power Devices	18
Nondestructive Detection of Buried and Latent Defects by Negative Mode E-Beam Inspection	17
A Yield Prediction Method Based on Nonparametric Statistical and Comparison With a Networks Method	16
Grain Morphology Effects on Void Formation and Electromigration-Induced Failure in Copper Interconnects	16
Computational Study of Chemical Uniformity Impacts on Electrodeposition	16
TestDNA-E: Wafer Defect Signature for Pattern Recognition by Ensemble Learning	15
Run-to-run control of chemical mechanical polishing head with adjustable partition pressure based on deep reinforcement learning	15

Semi-Supervised Learning for Simultaneous Location Detection and Classification of Mixed-Type Defect Patterns in Wafer Bin Maps	14
Analyzing the Impact of Inclined Airflow Within the EFEM on the Lateral Flow Around the FOUP Using Flow Visualization Techniques	14
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)	14
Improving RF Magnetron Sputter Parameters for a Piezoelectric AlN Thin Film Deposition	14
TCAD-Enabled Machine Learning—An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication	13
Hotspot Prediction: SEM Image Generation With Potential Lithography Hotspots	13
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IEEE Transactions on Semiconductor Manufacturing Publication Information	12
Synthesis of Critical Patterns for Lithography Optimizations Through Machine Learning	12
Source Pad Design Tradeoffs for a Power TrenchFET	11
Wafer Bin Map Recognition With Autoencoder-Based Data Augmentation in Semiconductor Assembly Process	11
Automatic Classification of C-SAM Voids for Root Cause Identification of Bonding Yield Degradation	11
DPFEE-Net: Enhancing Wafer Defect Classification Through Dual-Path Neural Architecture	11
A Self-Powered Wireless Sensing Circuitry for On-Wafer In-Situ EUV Detection	11
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Integration Challenges on 300-mm High Resistivity Silicon Substrates	11
IEEE Transactions on Semiconductor Manufacturing Publication Information	10
2023 Index IEEE Transactions on Semiconductor Manufacturing Vol. 36	10
In-Situ Plasma Monitoring Using Multiple Plasma Information in SiO₂ Etch Process	10
Physics-Informed Machine Learning-Based Edge Detection for SEM Images	10
A Warpage Prediction Model for Trench Field-Plate Power MOSFET in 300mm-Diameter Process	10
IEEE Transactions on Semiconductor Manufacturing Publication Information	10
Journal of Lightwave Technology Special Issue on: OFS-29	9
IEEE EDS Robert Bosch Micro and Nano Electro Mechanical Systems Award: Call for Nominations	9
IEEE Transactions on Semiconductor Manufacturing Publication Information	9
Systematic Search for Stabilizing Dopants in ZrO₂ and HfO₂ Using First-Principles Calculations	9
Research Toward Wafer-Scale 3D Integration of InP Membrane Photonics With InP Electronics	8
Commonality Analysis for Detecting Failures Caused by Inspection Tools in Semiconductor Manufacturing Processes	8
Characterizing Capacitor Top Plate Bias for More Accurate Electromagnetic Simulations	8
New Quality Index to Improve Overlay Measurement Accuracy Based on Moiré Marks: Method for Quantifying Moiré Pattern Quality Using the Signal Shape Index	8
Recognition and Classification of Mixed Defect Pattern Wafer Map Based on Multi-Path DCNN	8
Optimization and Application of TiO2 Hollow Microsphere Modified Scattering Layer for the Photovoltaic Conversion Efficiency of Dye-Sensitized Solar Cell	8
Front Cover	8
Advances in the Thermal Study of Polymers for Microelectronics Using the Thermally Induced Curvature Approach	8
Evaluation of Thick Silicon Nitride Film Properties at 300 mm Scale for High-Q Photonic Devices	8
Streamlining Semiconductor Manufacturing of 200 mm and 300 mm Wafers: A Longitudinal Case Study on the Lot-to-Order-Matching Process	8
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching	8
Wafer Dicing Vibration Investigation on Novel Wafer Mounting Techniques	8
Editorial	8
Table of Contents	8
Suppressing Hexagonal Defects in Ex Situ Remote Plasma Dry Etch Processing	7
IEEE Transactions on Semiconductor Manufacturing Publication Information	7
Nitrogen-Doped Czochralski Silicon Wafers as Materials for Conventional and Scaled Insulated Gate Bipolar Transistors	7
RA-UNet: A New Deep Learning Segmentation Method for Semiconductor Wafer Defect Analysis on Fine-Grained Scanning Electron Microscope (SEM) Images	7
Table of Contents	7
Semantic Context Information Modeling With Neural Networks in Customer Order Behavior Classification	7
Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices Based on Image Recognition	7
Guest Editorial Process-Level Machine Learning Applications in Semiconductor Manufacturing	7
Deep Clustering and Regression Ensemble Network for Lot Cycle Time Prediction in Semiconductor Wafer Fabrication	7
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	7

Fabrication of On-Silicon Aperture Coupled Patch Antenna Through Micromachining and Cu-Cu Thermocompression Bonding	7
Unrelated Parallel Machine Photolithography Scheduling Problem With Dual Resource Constraints	7
Data-Driven Production Planning Models for Wafer Fabs: An Exploratory Study	7
Defect Detection of Photovoltaic Panels to Suppress Endogenous Shift Phenomenon	7
Call for Nominations: 2024 EDS Early Career Award	7
Shear Force Classification Before Wire Bonding Based on Probe Mark 2-D Images Using Machine Learning Methods	6
Anomaly Detection in Batch Manufacturing Processes Using Localized Reconstruction Errors From 1-D Convolutional AutoEncoders	6
Table of Contents	6
Integrated Electrochemical Technology for Efficient Metal Recovery in Semiconductor Wastewater	6
Why Contour Averaging Works for SEM Metrology: Analysis and Validation	6
Current Status of Bulk β-Ga₂O₃ and β-(AlxGa₁-ₓ)₂O₃ Crystal Growth	6
Quantitative 3-D Flow Visualization of Conventional Purge Flow Within a Front Opening Unified Pod (FOUP)	6
BCICTS 2023 Call for Papers	6
DSH to Extend-DSH: Chip-Level Chemical Mechanical Planarization (CMP) Model Upgrade Based on Decoupling Regression Strategy	6
Overlay Measurement Algorithm for Moiré Targets Using Frequency Analysis	6
Fast Global Sparse Principal Component Analysis for Sensor Reduction in Virtual Metrology	6
Defect Localization Approach for Wafer-to-Wafer Hybrid Bonding Interconnects	6
Improving Endpoint Detection Sensitivity in Plasma Etching With Small Openings	6
IEEE Transactions on Semiconductor Manufacturing Information for Authors	6
Multiobjective Order Promising for Outsourcing Supply Network of IC Design Houses	6
Unsupervised Representation Learning and Explainable Clustering for Wafer Map Pattern Analysis	6
Macro and Micro-Scale Non-Contact Imaging of Electrically Active Extended Defects in 4H-SiC Merged PiN Schottky Diode Devices	6
Prevention of Moisture Invasion by Flow Isolation Device (FID) for Mask Automatic Storage System (Stocker Room) in a Semiconductor Fabrication Plant (Fab)	6
Surface Reconstruction for Enhancing the Overlay Modeling Optimization Procedure in Photolithography Processes	5
Editorial	5
TechRxiv: Share Your Preprint Research With the World!	5
Performance Evaluation of Supervised Learning Model Based on Functional Data Analysis and Summary Statistics	5
Automating Root Cause Analysis in Semiconductor Manufacturing Using Transformer Models with Explainable AI	5
IEEE Transactions on Semiconductor Manufacturing Publication Information	5
Deep Learning-Based Multi-Horizon Forecasting for Automated Material Handling System Throughput in Semiconductor Fab	5
Efficient and Refined Deep Convolutional Features Network for the Crack Segmentation of Solar Cell Electroluminescence Images	5
IEEE Transactions on Semiconductor Manufacturing Information for Authors	5
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices: Reliability of Advanced Nodes	5
Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement	5
Geometry-Based Curvilinear Mask Process Correction for Enhanced Pattern Fidelity, Contrast, and Manufacturability	5
Understanding and Improving Virtual Metrology Systems Using Bayesian Methods	5
Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples	5
Chemical Mechanical Polishing of Single-Crystalline Diamond Epitaxial Layers for Electronics Applications	5
Guest Editorial Introduction to the Joint Special Issue on Semiconductor Design for Manufacturing (DFM)	5
Guest Editorial Special Section on the 2025 International Conference on Compound Semiconductor Manufacturing Technology (CS-MANTECH)	5
Table of Contents	5
Density-Based Spatial Clustering of Applications With Noise (DBSCAN) for Probe Card Production for Advanced Quality Control of Wafer Probing Test	5
A Transformer-based Sequence Prediction Architecture for Etch Profile Evolution in Semiconductor Manufacturing	5
Guest Editorial Special Section on Sustainability	5
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Multi-Scale Content-Aware Enhancement Dual-Branch CNN for LED-Chip Defect Classification	4
Comparative Study of Nondestructive Mapping of Conformal-Coating Thickness on Microelectronics by Terahertz Time-of-Flight Tomography	4
Editorial	4
Avalanche Capability Improvement by Optimizing p+ Contact Resistance for N-Channel Trench Power MOSFETs	4
Front Cover	4
Effects of the Applied Power of Remote Plasma System With Green Alternative Chamber Cleaning Gas of Carbonyl Fluoride	4
Sustainable Technologies for Responsible Products and a More Sustainable Future	4
Practical Reinforcement Learning for Adaptive Photolithography Scheduler in Mass Production	4
Model-Based OPC With Adaptive PID Control Through Reinforcement Learning	4
Comprehensive Study of the Impact of LWR on Device Performance in VLSI Technology	4
Multi-Scale Adaptive Inspection Framework for Voids in MOSFETs	4
Editorial	4
A Diffusion-Model-Based Methodology for Virtual Silicon Data Generation	4
Real-Time Change Detection for Automated Test Socket Inspection Using Advanced Computer Vision and Machine Learning	4
IEEE Transactions on Semiconductor Manufacturing Information for Authors	4
Mechanistic Analysis of the Effect of Gap on Convex Curves of Wafer in Double-Sided Polishing	4
Study on Mechanical Cleavage Mechanism of GaAs via Anisotropic Stress Field and Experiments	4
An Alternative PECVD Chamber Cleaning Gas of COF2 for Low-GWP Consideration	3
A Condition Monitoring Method via a New Signal Expansion Strategy for the Crystal Lifting and Rotating Mechanism	3
Vacancy-Type Defects in HfO2 Layers and Their Role in Amorphous-to-Crystalline Transition Studied by Monoenergetic Positron Beams	3
Wafer Scratch Pattern Reconstruction for High Diagnosis Accuracy and Yield Optimization	3
Data Visualization of Anomaly Detection in Semiconductor Processing Tools	3
Group-Exclusive Feature Group Lasso and Applications to Automatic Sensor Selection for Virtual Metrology in Semiconductor Manufacturing	3
Production-Level Artificial Intelligence Applications in Semiconductor Supply Chains	3
Analysis of Image Hashing in Wafer Map Failure Pattern Recognition	3
Simulations of Modified Shallow Water Equation and Reaction Kinetics of Poly Etching on Single Wafer Process	3
Efficient Dual-Attention-Based Knowledge Distillation Network for Unsupervised Wafer Map Anomaly Detection	3
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing	3
IEEE Transactions on Semiconductor Manufacturing Information for Authors	3
The Modeling of Post-Annealing and Etching Processes of ALD SiO₂ Using Intermediate Variables Considering Digital Twin Model Reusability	3
Enhancing Current Gain in Polysilicon Emitter Bipolar Transistors Through Emitter-Base Interface Engineering	3
Fast Optical Proximity Correction Using Graph Convolutional Network With Autoencoders	3
Product Design Enhancement With Test Structures for Non-Contact Detection of Yield Detractors	3
Buckling and Stress-Controlled RF MEMS Structures Using Annealing	3
LSTM-Based Automated Analysis of Laser-Groove Profiles in Wafer Dicing Using White-Light Interferometry Data	3

Data-Driven Coordinated Control of Czochralski Silicon Single Crystal Growth Operation Process Based on Indirect Control Strategy	3
Editorial	3
An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study	3
BCICTS 2022 CALL FOR PAPERS	3
Front Cover	3
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing	2
TAFF-YOLO: An Enhanced YOLO Model With Transformer and Attention Feature Fusion for Chip Internal Defect Detection	2
3-D NAND Oxide/Nitride Tier Stack Thickness and Zonal Measurements With Infrared Metrology	2
A Practical Approach for Managing End-of-Life Systems in Semiconductor Manufacturing Using Health Index	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
Customer Order Behavior Classification Via Convolutional Neural Networks in the Semiconductor Industry	2
Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process	2
Front Cover	2
Pioneering Fast and Safe Low-k Silicon Dioxide Synthesis for Modern Integrated Circuits	2
Image-Based Defect Classification for TFT-LCD Array via Convolutional Neural Network	2
Improved Color Defect Detection With Machine Learning for After Develop Inspections in Lithography	2
Optimization of Void Defects at TiN/Si:HfO2 Interface for 3-D Ferroelectric Memory	2
Quantitative Comparison of Simulation and Experiment Enabling a Lithography Digital Twin	2
Effectiveness of a High-Velocity-Type Laminar Air Curtain Device for Moisture Isolation under EFEM Airflow Deflection during FOUP Door Opening	2
Observation and Suppression of Growth Pits Formed on 4H-SiC Epitaxial Films Grown Using Halide Chemical Vapor Deposition Process	2
Prediction of Highly Imbalanced Semiconductor Chip-Level Defects in Module Tests Using Multimodal Fusion and Logit Adjustment	2
Joint Dynamic Dispatching and Preventive Maintenance for Unrelated Parallel Machines With Equipment Health Considerations	2
Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing	2
Modeling and Designing a GaN-Growth Reactor With Halogen-Free Vapor Phase Epitaxy: NH3 Decomposition at the Catalytic Surface of Components to Replicate Parasitic Polycrystal Formation	2
On Uses of Noise Analysis for the Uncertainty Quantification of Line Edge Roughness Estimation	2
Wafer Lot Assignment for Parallel-Producing Tools Based on Heuristic Clustering Algorithm	2
A Real-Time Automatic Structural-Loss Detection and Stopping Rule of Semiconductor Single-Crystal-Silicon-Growth <100> and <111>	2
Ar/N₂ Gas Flow Rate Dependence on the Ferroelectric HfNₓ Thin Film Formation by ECR-Plasma Sputtering	2
Significant Lifetime Improvement of Negative Bias Thermal Instability by Plasma Enhanced Atomic Layer Deposition SiN in Stress Memorization Technique	2
Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging	2
A Novel Multiscale Residual Aggregation Network-Based Image Super-Resolution Algorithm for Semiconductor Defect Inspection	2
Metal Contamination Behavior on Silicon Dioxide Surface Rinsed With Deionized Water Containing Ultra-Trace Metal During Single-Wafer Cleaning	2
Integrated Scheduling of Jobs, Tools, Machines, and Two Different Set of Transbots	2
Table of Contents	2
Wireless Measurement of the Degradation Rates of Thin Film Bioresorbable Metals Using Reflected Impedance	2
Sample-Efficient Modeling and Optimization of High-Dimensional Semiconductor Processes Using Output-Augmented Gaussian Process Regression and Dynamic Bayesian Optimization	2
Call for Papers for a Special Issue of IEEE Journal of the Electron Devices Society on "Materials, Processing and Integration for Neuromorphic Devices and In-Memory Computing"	2
Uncertainty-Aware Neurosymbolic Root-Cause Analysis for Surface-Mount Assembly	2
Automatic Defect Classification Using Semi-Supervised Learning With Defect Localization	2
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Table of Contents	2
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices: Ultrawide Band Gap Semiconductor Devices for RF, Power and Optoelectronic Applications	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	1
Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Robot Waiting Time	1
Photoresist Spray Coating on Silicon Wafers With Acoustic Resonance Atomization	1
Sequential Residual Learning for Multistep Processes in Semiconductor Manufacturing	1
Preparation and Application of Sol-Gel Polishing Pad for Polishing CVD Single Crystal Diamond at High Speed	1
Novel Structure of a Deep Neural Network-Based Material Removal Rate Prediction Model for Multizone Chemical Mechanical Planarization Process Control	1
Leading Sustainability Applications for More Responsible Logic Technology Development	1
A Fine-Grained, End-to-End Feature-Scale CMP Modeling Paradigm Based on Fully Convolutional Neural Networks	1
Fully Automated Wafer-Level Edge Coupling Measurement System for Silicon Photonics Integrated Circuits	1
Plasma Pretreatment System for the Reduction of By-Product Particles in Semiconductor Manufacturing	1
ML-Guided Curvilinear OPC: Fast, Accurate, and Manufacturable Curve Correction	1
Advancing Condition-Based Maintenance in the Semiconductor Industry: Innovations, Challenges and Future Directions for Predictive Maintenance	1
Eco-Friendly Dry-Cleaning and Diagnostics of Silicon Dioxide Deposition Chamber	1
A Novel Health Index Framework for Semiconductor Equipment using Multi-View Data	1
Fabrication of the Highly Ordered Silicon Nanocone Array With Sub-5 nm Tip Apex by Tapered Silicon Oxide Mask	1
Process-Aware Digital Twins by Deep Learning for DUV Photolithography and Plasma Etch	1
Process Control in Semiconductor Manufacturing Based on Deep Distributional Soft Actor-Critic Reinforcement Learning	1
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on Wide Band Gap Semiconductors for Automotive Applications	1
IEEE Transactions on Semiconductor Manufacturing Publication Information	1
Three-Dimensional Flow Analysis and Humidity Level Evaluation for a FOUP During Open Door Operation Conditions	1
A Study on Particle Emission Efficiency of a Plasma Enhanced Chemical Vapor Deposition Chamber During Periodic Cycle Purge Process Using an Improved Single Particle Light Scattering Method	1
IEEE Transactions on Semiconductor Manufacturing Information for Authors	1
Watermark Detection in CMOS Image Sensors Using Cosine-Convolutional Semantic Networks	1
Fast and Precise Temperature Control for a Semiconductor Vertical Furnace via Heater-Cooler Integration	1
Table of Contents	1
Correlated Bayesian Co-Training for Virtual Metrology	1
Feature Extraction From Diffraction Images Using a Spatial Light Modulator in Scatterometry	1
Virtual Metrology of Critical Dimensions in Plasma Etch Processes Using Entire Optical Emission Spectrum	1
Integrated Test Pattern Extraction and Generation for Accurate Lithography Modeling	1
Comprehensive Framework for Identifying and Visualizing Key Yield Factors in Semiconductor Manufacturing	1
Application of Plasma Information-Based Virtual Metrology (PI-VM) for Etching in C₄F₈/Ar/O₂ Plasma	1
Boundless Engineering for Yield to Cope With the Complexity of High-Volume Manufacturing	1
A Case Study on Sputtered Chromium Sacrificial Layer for Ti2O3 Microstructure Fabrication	1
The Research on Screening Method to Reduce Chip Test Escapes by Using Multi-Correlation Analysis of Parameters	1
Table of Contents	1
Automated Visual Inspection of Defects in Transparent Display Layers Using Light-Field 3-D Imaging	1
Autonomous Robot Orchestration Solution for OHT With Active Q Routing and Digital Twin FA: Factory Automation	1
SnS₂ and ZnO Nanocomposite Prepared by Dispersion Method for Photodetector Application	1
Dynamic Down-Selection of Measurement Markers for Optimized Robust Control of Overlay Errors in Photolithography Processes	1
Practical Q-Learning-Based Route-Guidance and Vehicle Assignment for OHT Systems in Semiconductor Fabs	1
Leveraging Machine Learning for Capacity and Cost on a Complex Toolset: A Case Study	1
Call for Papers for a Special Issue of IEEE Journal of the Electron Devices Society on "Materials, Processing and Integration for Neuromorphic Devices and In-Memory Computing"	1
Optimizing Polysilicon Resistor Fabrication via BF2 + F Co-Implantation: A Manufacturing-Compatible Approach for Low Resistance and High Reliability in MOS Devices	1
Spatial and Channel-Wise Co-Attention-Based Twin Network System for Inspecting Integrated Circuit Substrate	1
E-Test Validation of Space Error Budget and Metrology	1
Investigating the Influence of Different Diverter Pipes on the Humidity for FOUP by Using Computational Fluid Dynamics	1
A Computational Method for Screening Low-GWP Fluorinated Gases in Semiconductor Manufacturing	1
Sustainable Semiconductor Manufacturing: The Role of Lithography	1
High Accuracy Simulation of Silicon Oxynitride Film Grown by Plasma Enhanced Chemical Vapor Deposition	1
Manufacturing of g-C3N4-ZnS-Doped TiO2 Nanofibers by Electrospinning and Their Application to Dye-Sensitized Solar Cell as an Additional Layer in Photoanode	1
High Voltage Design Strategies for Gallium Oxide Power Devices	1
CPDD: A Cross-Scenario Photovoltaic Defect Detector Based on Fine-Grained Feature Autoencoding and Pseudo-Box Contrastive Learning	1
Call for Papers for RFIC 2023	1