IEEE Transactions on Semiconductor Manufacturing

Article	Citations
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"	48
IEEE Transactions on Semiconductor Manufacturing Publication Information	41
Investigations of Fast Vacuum Pump-Down Processes Between Parallel Isothermal Disks	40
Minimization of Particle Deposition on Wafers Caused by the Pressure Change in the Vacuum Chamber Through a Pressure Control Regulation Process	33
Fabrication of Porous Cu-Sn Microbumps for Low Temperature Cu-Cu Bonding	33
Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference	33
Call for Papers for IEEE Transactions on Materials for Electron Devices	28
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning	28
Defect Reduction And Line Width Roughness Improvement By Using A Post Precoat Treatment In Waferless Chamber Conditioning	28
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment	28
Table of contents	27
IEEE Transactions on Semiconductor Manufacturing publication information	25
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	21
Nondestructive Detection of Buried and Latent Defects by Negative Mode E-Beam Inspection	20
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)	19
A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge	19
A Yield Prediction Method Based on Nonparametric Statistical and Comparison With a Networks Method	18
Level Set Simulation on Single Wafer Wet Processing Improvement	18
TCAD-Enabled Machine Learning—An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication	17
Advanced Process Control System for Trench Shape of Power Devices	16
Semi-Supervised Learning for Simultaneous Location Detection and Classification of Mixed-Type Defect Patterns in Wafer Bin Maps	16
Hotspot Prediction: SEM Image Generation With Potential Lithography Hotspots	15
Single-Mask Fabrication of Sharp SiOx Nanocones	15
The Mechanism of an Etching-Back to Reduce the Density of Cone Defect in STI During the Manufacturing	14
Editorial	14

Computational Study of Chemical Uniformity Impacts on Electrodeposition	13
TestDNA-E: Wafer Defect Signature for Pattern Recognition by Ensemble Learning	13
In-Situ Plasma Monitoring Using Multiple Plasma Information in SiO2 Etch Process	12
IEEE Transactions on Semiconductor Manufacturing Publication Information	12
Machine Learning-Based Detection Method for Wafer Test Induced Defects	12
Test Structure for Measuring the Selectivity in XeF2 and HF Vapour Etch Processes	12
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DPFEE-Net: Enhancing Wafer Defect Classification Through Dual-Path Neural Architecture	11
Wafer Bin Map Recognition With Autoencoder-Based Data Augmentation in Semiconductor Assembly Process	10
Correlation Between Trench Angle and Wafer Warpage in Trench Field Plate Power MOSFETs and its Application to Quality Control	10
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A Warpage Prediction Model for Trench Field-Plate Power MOSFET in 300mm-Diameter Process	9
2021 Index IEEE Transactions on Semiconductor Manufacturing Vol. 34	9
Automatic Classification of C-SAM Voids for Root Cause Identification of Bonding Yield Degradation	9
IEEE Transactions on Semiconductor Manufacturing Publication Information	9
Source Pad Design Tradeoffs for a Power TrenchFET	9
Deep Learning Approach to Inverse Grain Pattern of Nanosized Metal Gate for Multichannel Gate-All-Around Silicon Nanosheet MOSFETs	8
Optimization and Application of TiO2 Hollow Microsphere Modified Scattering Layer for the Photovoltaic Conversion Efficiency of Dye-Sensitized Solar Cell	8
Streamlining Semiconductor Manufacturing of 200 mm and 300 mm Wafers: A Longitudinal Case Study on the Lot-to-Order-Matching Process	8
2023 Index IEEE Transactions on Semiconductor Manufacturing Vol. 36	8
Commonality Analysis for Detecting Failures Caused by Inspection Tools in Semiconductor Manufacturing Processes	8
IEEE Transactions on Semiconductor Manufacturing Publication Information	8
Systematic Search for Stabilizing Dopants in ZrO₂ and HfO₂ Using First-Principles Calculations	8
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching	7
Research Toward Wafer-Scale 3D Integration of InP Membrane Photonics With InP Electronics	7
IEEE Transactions on Semiconductor Manufacturing CALL FOR PAPERS for Special Issue on "Process-Level Machine Learning Applications in Semiconductor Manufacturing"	7
Deep Clustering and Regression Ensemble Network for Lot Cycle Time Prediction in Semiconductor Wafer Fabrication	7
IEEE EDS Robert Bosch Micro and Nano Electro Mechanical Systems Award: Call for Nominations	7
A Graph-Theoretic Approach for Spatial Filtering and Its Impact on Mixed-Type Spatial Pattern Recognition in Wafer Bin Maps	7
Table of Contents	7
Rapid Resolution of Parametric Failures in the Process Development Period by Integrating Device Physics and Big Data	7
Wafer Dicing Vibration Investigation on Novel Wafer Mounting Techniques	7
IEEE Transactions on Semiconductor Manufacturing Publication Information	7
Recognition and Classification of Mixed Defect Pattern Wafer Map Based on Multi-Path DCNN	7
Wafer Reflectance Prediction for Complex Etching Process Based on K-Means Clustering and Neural Network	7
Front Cover	7
Table of Contents	6
A Real-Time Monitoring Framework for Wafer Fabrication Processes With Run-to-Run Variations	6
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	6
Defect Detection of Photovoltaic Panels to Suppress Endogenous Shift Phenomenon	6
Nitrogen-Doped Czochralski Silicon Wafers as Materials for Conventional and Scaled Insulated Gate Bipolar Transistors	6
Data-Driven Production Planning Models for Wafer Fabs: An Exploratory Study	6
Advances in the Thermal Study of Polymers for Microelectronics Using the Thermally Induced Curvature Approach	6
Guest Editorial Process-Level Machine Learning Applications in Semiconductor Manufacturing	6
RA-UNet: A New Deep Learning Segmentation Method for Semiconductor Wafer Defect Analysis on Fine-Grained Scanning Electron Microscope (SEM) Images	6
Minimizing Convolutional Neural Network Training Data With Proper Data Augmentation for Inline Defect Classification	5
Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices Based on Image Recognition	5
Unrelated Parallel Machine Photolithography Scheduling Problem With Dual Resource Constraints	5
New Process Integration of Sequential Phosphorus-Doped Silicon for Trench Field Plate Power MOSFETs	5
Call for Nominations: 2024 EDS Early Career Award	5

Editorial	5
Anomaly Detection in Batch Manufacturing Processes Using Localized Reconstruction Errors From 1-D Convolutional AutoEncoders	5
IEEE Transactions on Semiconductor Manufacturing Publication Information	5
BCICTS 2023 Call for Papers	5
Call for Papers 6th IEEE Electron Devices Technology and Manufacturing (EDTM) Conference	5
Fabrication of On-Silicon Aperture Coupled Patch Antenna Through Micromachining and Cu-Cu Thermocompression Bonding	5
Semantic Context Information Modeling With Neural Networks in Customer Order Behavior Classification	5
Manufacturing of 3D Helical Microswimmer by AFM Micromanipulation for Microfluidic Applications	5
Adaptive Cautious Regularized Run-to-Run Controller for Lithography Process	5
Quantitative 3-D Flow Visualization of Conventional Purge Flow Within a Front Opening Unified Pod (FOUP)	4
A Novel Foundry Yield Model Using Critical Area Analysis	4
Multiobjective Order Promising for Outsourcing Supply Network of IC Design Houses	4
Guest Editorial Special Section on Sustainability	4
IEEE Transactions on Semiconductor Manufacturing Information for Authors	4
Table of contents	4
Why Contour Averaging Works for SEM Metrology: Analysis and Validation	4
Shear Force Classification Before Wire Bonding Based on Probe Mark 2-D Images Using Machine Learning Methods	4
Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples	4
Prevention of Moisture Invasion by Flow Isolation Device (FID) for Mask Automatic Storage System (Stocker Room) in a Semiconductor Fabrication Plant (Fab)	4
Integrated Electrochemical Technology for Efficient Metal Recovery in Semiconductor Wastewater	4
Table of Contents	4
Deep Learning-Based Multi-Horizon Forecasting for Automated Material Handling System Throughput in Semiconductor Fab	4
Double Coating Process Using the Single Photoresist and the Thickness Prediction	4
Defect Localization Approach for Wafer-to-Wafer Hybrid Bonding Interconnects	4
A Modified Lasso Model for Yield Analysis Considering the Interaction Effect in a Multistage Manufacturing Line	4
DSH to Extend-DSH: Chip-Level Chemical Mechanical Planarization (CMP) Model Upgrade Based on Decoupling Regression Strategy	4
Overlay Measurement Algorithm for Moiré Targets Using Frequency Analysis	4
Editorial	4
Comparative Study of Nondestructive Mapping of Conformal-Coating Thickness on Microelectronics by Terahertz Time-of-Flight Tomography	3
TechRxiv: Share Your Preprint Research With the World!	3
IEEE Transactions on Semiconductor Manufacturing Information for Authors	3
Quality-Oriented Statistical Process Control Utilizing Bayesian Modeling	3
Geometry-Based Curvilinear Mask Process Correction for Enhanced Pattern Fidelity, Contrast, and Manufacturability	3
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on New simulation methodologies for next-generation TCAD tools	3
Real-Time Change Detection for Automated Test Socket Inspection Using Advanced Computer Vision and Machine Learning	3
Performance Evaluation of Supervised Learning Model Based on Functional Data Analysis and Summary Statistics	3
Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement	3
Editorial	3
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A Self-Test Method of Structural Failures of Uncooled Infrared Focal Plane Array	3
A Diffusion-Model-Based Methodology for Virtual Silicon Data Generation	3
Practical Reinforcement Learning for Adaptive Photolithography Scheduler in Mass Production	3
Understanding and Improving Virtual Metrology Systems Using Bayesian Methods	3
Efficient and Refined Deep Convolutional Features Network for the Crack Segmentation of Solar Cell Electroluminescence Images	3
Chemical Mechanical Polishing of Single-Crystalline Diamond Epitaxial Layers for Electronics Applications	3
Density-Based Spatial Clustering of Applications With Noise (DBSCAN) for Probe Card Production for Advanced Quality Control of Wafer Probing Test	3
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Table of Contents	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
Simulations of Modified Shallow Water Equation and Reaction Kinetics of Poly Etching on Single Wafer Process	2
Imaging of Metal Ions and Nanoparticles on Structured Silicon Surface Using Laser Ablation-Inductively Coupled Plasma-Mass Spectrometer for Contamination Control in Semiconductor Manufacturing Process	2
Analysis of Image Hashing in Wafer Map Failure Pattern Recognition	2
Editorial	2
Data Visualization of Anomaly Detection in Semiconductor Processing Tools	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
Sustainable Technologies for Responsible Products and a More Sustainable Future	2
Vacancy-Type Defects in HfO2 Layers and Their Role in Amorphous-to-Crystalline Transition Studied by Monoenergetic Positron Beams	2
BCICTS 2022 CALL FOR PAPERS	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
Product Design Enhancement With Test Structures for Non-Contact Detection of Yield Detractors	2
Editorial	2
Low-Destructive Processing of Single Crystal Aluminum Nitride Based on Sol-Gel Polishing Tool	2
Comprehensive Study of the Impact of LWR on Device Performance in VLSI Technology	2
Enhancing Current Gain in Polysilicon Emitter Bipolar Transistors Through Emitter-Base Interface Engineering	2
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Front Cover	2
Production-Level Artificial Intelligence Applications in Semiconductor Supply Chains	2
Fast Optical Proximity Correction Using Graph Convolutional Network With Autoencoders	2
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing	2
IEEE Transactions on Semiconductor Manufacturing publication information	2
An Alternative PECVD Chamber Cleaning Gas of COF2 for Low-GWP Consideration	2
Wafer Scratch Pattern Reconstruction for High Diagnosis Accuracy and Yield Optimization	2
Efficient Dual-Attention-Based Knowledge Distillation Network for Unsupervised Wafer Map Anomaly Detection	2
Group-Exclusive Feature Group Lasso and Applications to Automatic Sensor Selection for Virtual Metrology in Semiconductor Manufacturing	2
Study on Mechanical Cleavage Mechanism of GaAs via Anisotropic Stress Field and Experiments	2
Guest Editorial Special Section on the IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS)	2
Model-Based OPC With Adaptive PID Control Through Reinforcement Learning	2
An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study	2
A Novel Multiscale Residual Aggregation Network-Based Image Super-Resolution Algorithm for Semiconductor Defect Inspection	1

Application of Plasma Information-Based Virtual Metrology (PI-VM) for Etching in C₄F₈/Ar/O₂ Plasma	1
Chamber and Recipe-Independent FDC Indicator in High-Mix Semiconductor Manufacturing	1
ML-Guided Curvilinear OPC: Fast, Accurate, and Manufacturable Curve Correction	1
Automatic Defect Classification Using Semi-Supervised Learning With Defect Localization	1
On Uses of Noise Analysis for the Uncertainty Quantification of Line Edge Roughness Estimation	1
Wireless Measurement of the Degradation Rates of Thin Film Bioresorbable Metals Using Reflected Impedance	1
A Real-Time Automatic Structural-Loss Detection and Stopping Rule of Semiconductor Single-Crystal-Silicon-Growth <100> and <111>	1
Prediction of Highly Imbalanced Semiconductor Chip-Level Defects in Module Tests Using Multimodal Fusion and Logit Adjustment	1
Call for Papers for a Special Issue of IEEE Journal of the Electron Devices Society on "Materials, Processing and Integration for Neuromorphic Devices and In-Memory Computing"	1
Image-Based Defect Classification for TFT-LCD Array via Convolutional Neural Network	1
Pioneering Fast and Safe Low-k Silicon Dioxide Synthesis for Modern Integrated Circuits	1
Significant Lifetime Improvement of Negative Bias Thermal Instability by Plasma Enhanced Atomic Layer Deposition SiN in Stress Memorization Technique	1
A Case Study on Sputtered Chromium Sacrificial Layer for Ti2O3 Microstructure Fabrication	1
Quantitative Comparison of Simulation and Experiment Enabling a Lithography Digital Twin	1
Nano-Scale Depth Profiles of Electrical Properties of Phosphorus Doped Silicon for Ultra-Shallow Junction Evaluation	1
Joint Dynamic Dispatching and Preventive Maintenance for Unrelated Parallel Machines With Equipment Health Considerations	1
Fabrication of the Highly Ordered Silicon Nanocone Array With Sub-5 nm Tip Apex by Tapered Silicon Oxide Mask	1
Wafer Lot Assignment for Parallel-Producing Tools Based on Heuristic Clustering Algorithm	1
High Accuracy Simulation of Silicon Oxynitride Film Grown by Plasma Enhanced Chemical Vapor Deposition	1
Atomic Layer Processes for Material Growth and Etching—A Review	1
A Practical Approach for Managing End-of-Life Systems in Semiconductor Manufacturing Using Health Index	1
Customer Order Behavior Classification Via Convolutional Neural Networks in the Semiconductor Industry	1
Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing	1
Applying Data Augmentation and Mask R-CNN-Based Instance Segmentation Method for Mixed-Type Wafer Maps Defect Patterns Classification	1
Improvement of Multi-Lines Bridge Defect Classification by Hierarchical Architecture in Artificial Intelligence Automatic Defect Classification	1
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Improved Color Defect Detection With Machine Learning for After Develop Inspections in Lithography	1
IEEE Transactions on Semiconductor Manufacturing Information for Authors	1
Call for Papers for a Special Issue of IEEE Journal of the Electron Devices Society on "Materials, Processing and Integration for Neuromorphic Devices and In-Memory Computing"	1
IEEE Transactions on Semiconductor Manufacturing Information for Authors	1
Process Control in Semiconductor Manufacturing Based on Deep Distributional Soft Actor–Critic Reinforcement Learning	1
Observation and Suppression of Growth Pits Formed on 4H-SiC Epitaxial Films Grown Using Halide Chemical Vapor Deposition Process	1
Eco-Friendly Dry-Cleaning and Diagnostics of Silicon Dioxide Deposition Chamber	1
Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging	1
E-Test Validation of Space Error Budget and Metrology	1
Optical Proximity Correction Using Bidirectional Recurrent Neural Network With Attention Mechanism	1
Correlated Bayesian Co-Training for Virtual Metrology	1
3-D NAND Oxide/Nitride Tier Stack Thickness and Zonal Measurements With Infrared Metrology	1
Integrated Scheduling of Jobs, Tools, Machines, and Two Different Set of Transbots	1
Front Cover	1
The Research on Screening Method to Reduce Chip Test Escapes by Using Multi-Correlation Analysis of Parameters	1
A Hierarchical Spatial-Test Attention Network for Explainable Multiple Wafer Bin Maps Classification	1
Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process	1
Modeling and Designing a GaN-Growth Reactor With Halogen-Free Vapor Phase Epitaxy: NH3 Decomposition at the Catalytic Surface of Components to Replicate Parasitic Polycrystal Formation	1
Optimization of Void Defects at TiN/Si:HfO2 Interface for 3-D Ferroelectric Memory	1
Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma	1
Table of Contents	1
Integrated Test Pattern Extraction and Generation for Accurate Lithography Modeling	1
Bayesian Nonparametric Classification for Incomplete Data With a High Missing Rate: an Application to Semiconductor Manufacturing Data	0
Call for Papers for a Special Issue of IEEE Transactions on Materials for Electron Devices: "Exploration of the Exciting World of Multifunctional Oxide-Based Electronic Devices: From Material to Syste	0
Comparison of Semiconductor Reverse Osmosis System Performance With Conventional and 3D Printed Feed Channels	0
The Environmental Footprint of IC Production: Review, Analysis, and Lessons From Historical Trends	0
Cross-Chamber Data Transferability Evaluation for Fault Detection and Classification in Semiconductor Manufacturing	0
Two-Stage Transfer Learning for Fault Prognosis of Ion Mill Etching Process	0
Novel Control Method and Applications for Negative Mode E-Beam Inspection	0
A Novel Automatic Probe-to-Pad Alignment Error Correction Approach	0
Impact of Annealing Temperature on MnO2 Thin Films: Morphological, Structural, and Electrical Properties	0
Editorial	0
An Emerging Local Annealing Method for Simultaneous Crystallization and Activation in Xtacking 3-D NAND Flash	0
Equipment Condition Monitoring of Multiple Oxide-Nitride Stack Layer Deposition Process	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "From Mega to nano: Beyond one Century of Vacuum Electronics"	0
A Data-Driven Approach for Improving Energy Efficiency in a Semiconductor Manufacturing Plant	0
Self-Assured Deep Learning With Minimum Pre-Labeled Data for Wafer Pattern Classification	0
A Lightweight Chip-Scale Chemical Mechanical Polishing Model Based on Polynomial Network	0
Capacity Estimation for Semiconductor Wafer Fabrication Facilities via an Optimization Model based on Flexible Lead Times	0
Parametric Optimization for Moisture Infiltration Prevention Into a FOUP (Front Opening Unified Pod)	0
A Dry Etch Approach To Reduce Roughness and Eliminate Visible Grind Marks in Silicon Wafers Post Back-Grind	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "From Mega to nano: Beyond one Century of Vacuum Electronics"	0
Identifying Good-Dice-in-Bad-Neighborhoods Using Artificial Neural Networks	0
One Class Process Anomaly Detection Using Kernel Density Estimation Methods	0
Adversarial Defect Detection in Semiconductor Manufacturing Process	0
Characterization of Multimodal Spot Scanning Imaging System for Wafer Defect Inspection	0
Shape and Roughness Extraction of Line Gratings by Small Angle X-Ray Scattering: Statistics and Simulations	0
Improvement of Plasma Etching Endpoint Detection With Data-Driven Wavelength Selection and Gaussian Mixture Model	0
Drop-In Test Structure to Evaluate Residual Stress in Conformally Grown Films	0
Visualization and Analysis of Temporal and Steady-State Gas Concentration in Process Chamber Using 70-dB SNR 1000 fps Absorption Imaging System	0
Reducing Datacenter Compute Carbon Footprint by Harnessing the Power of Specialization: Principles, Metrics, Challenges and Opportunities	0
Simulation and Experimental Analysis of Contactless Chip Pickup Process Based on a Vortex Flow Gripper	0
Table of Contents	0
A Numerical Study on the Effects of Purge and Air Curtain Flow Rates on Humidity Invasion Into a Front Opening Unified Pod (FOUP)	0
Call for Papers: Role of Solar Cells in Global Energy Transformation	0
Study on Measurement Method of Microscopic ζ Potential	0
On the Fly Ellipsometry Imaging for Process Deviation Detection	0
Optimal Feature Selection for Defect Classification in Semiconductor Wafers	0
Guest Editorial Special section on the 2023 SEMI Advanced Semiconductor Manufacturing Conference	0
A Comparative Study of Semiconductor Virtual Metrology Methods and Novel Algorithmic Framework for Dynamic Sampling	0
Table of contents	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide Band Gap Semiconductors for Automotive Applications"	0
Optimization of RF Frequencies in Dual-Frequency Capacitively Coupled Plasma Apparatus Using Genetic Algorithm (GA) and Plasma Simulation	0
An Investigation of Edge Bead Removal Width Variability, Effects and Process Control in Photolithographic Manufacturing	0
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Centering Sustainability in Process Development Through Improved Characterization of HFC-PFC Byproducts	0
Planned Maintenance Schedule Update Method for Predictive Maintenance of Semiconductor Plasma Etcher	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
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