OOIR: Observatory of International Research

Papers

(The median citation count of IEEE Transactions on Semiconductor Manufacturing is 0. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2022-01-01 to 2026-01-01.)

Article	Citations
Minimization of Particle Deposition on Wafers Caused by the Pressure Change in the Vacuum Chamber Through a Pressure Control Regulation Process	45
Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference	43
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"	38
IEEE Transactions on Semiconductor Manufacturing Publication Information	38
Call for Nominations for Editor-in-Chief: IEEE Electron Device Letters	36
Fast and High-Precision Temperature Control in Semiconductor Vertical Furnace via Iterative Experiments	36
Fabrication of Porous Cu–Sn Microbumps for Low-Temperature Cu–Cu Bonding	36
Defect Reduction and Line Width Roughness Improvement by Using a Post Precoat Treatment in Waferless Chamber Conditioning	35
Investigations of Fast Vacuum Pump-Down Processes Between Parallel Isothermal Disks	29
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment	28
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning	26
Scalable Multi-Site Test Architecture for Chiplet-based Systems on ATE Platforms	25
Call for Papers for IEEE Transactions on Materials for Electron Devices	22
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	22
Level Set Simulation on Single Wafer Wet Processing Improvement	21
Advanced Process Control System for Trench Shape of Power Devices	20
Editorial	18
The Mechanism of an Etching-Back to Reduce the Density of Cone Defect in STI During the Manufacturing	17
Computational Study of Chemical Uniformity Impacts on Electrodeposition	17
Grain Morphology Effects on Void Formation and Electromigration-Induced Failure in Copper Interconnects	15
Synthesis of Critical Patterns for Lithography Optimizations Through Machine Learning	15
Nondestructive Detection of Buried and Latent Defects by Negative Mode E-Beam Inspection	15
Improving RF Magnetron Sputter Parameters for a Piezoelectric AlN Thin Film Deposition	15
Hotspot Prediction: SEM Image Generation With Potential Lithography Hotspots	15
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)	14

Semi-Supervised Learning for Simultaneous Location Detection and Classification of Mixed-Type Defect Patterns in Wafer Bin Maps	13
A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge	13
TestDNA-E: Wafer Defect Signature for Pattern Recognition by Ensemble Learning	12
A Yield Prediction Method Based on Nonparametric Statistical and Comparison With a Networks Method	11
Single-Mask Fabrication of Sharp SiO_x Nanocones	11
Analyzing the Impact of Inclined Airflow Within the EFEM on the Lateral Flow Around the FOUP Using Flow Visualization Techniques	11
TCAD-Enabled Machine Learning—An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication	11
In-Situ Plasma Monitoring Using Multiple Plasma Information in SiO₂ Etch Process	10
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Source Pad Design Tradeoffs for a Power TrenchFET	10
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Automatic Classification of C-SAM Voids for Root Cause Identification of Bonding Yield Degradation	10
IEEE Transactions on Semiconductor Manufacturing Publication Information	10
Wafer Bin Map Recognition With Autoencoder-Based Data Augmentation in Semiconductor Assembly Process	9
Physics-Informed Machine Learning-Based Edge Detection for SEM Images	9
2023 Index IEEE Transactions on Semiconductor Manufacturing Vol. 36	9
A Self-Powered Wireless Sensing Circuitry for On-Wafer In-Situ EUV Detection	9
Integration Challenges on 300-mm High Resistivity Silicon Substrates	9
IEEE Transactions on Semiconductor Manufacturing Publication Information	9
A Warpage Prediction Model for Trench Field-Plate Power MOSFET in 300mm-Diameter Process	9
IEEE Transactions on Semiconductor Manufacturing Publication Information	9
DPFEE-Net: Enhancing Wafer Defect Classification Through Dual-Path Neural Architecture	9
IEEE EDS Robert Bosch Micro and Nano Electro Mechanical Systems Award: Call for Nominations	8
IEEE Transactions on Semiconductor Manufacturing Publication Information	8
Optimization and Application of TiO₂ Hollow Microsphere Modified Scattering Layer for the Photovoltaic Conversion Efficiency of Dye-Sensitized Solar Cell	8
Research Toward Wafer-Scale 3D Integration of InP Membrane Photonics With InP Electronics	8
Systematic Search for Stabilizing Dopants in ZrO₂ and HfO₂ Using First-Principles Calculations	8
Journal of Lightwave Technology Special Issue on: OFS-29	8
Recognition and Classification of Mixed Defect Pattern Wafer Map Based on Multi-Path DCNN	8
Front Cover	8
Wafer Dicing Vibration Investigation on Novel Wafer Mounting Techniques	8
Streamlining Semiconductor Manufacturing of 200 mm and 300 mm Wafers: A Longitudinal Case Study on the Lot-to-Order-Matching Process	8
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching	8
Commonality Analysis for Detecting Failures Caused by Inspection Tools in Semiconductor Manufacturing Processes	8
Characterizing Capacitor Top Plate Bias for More Accurate Electromagnetic Simulations	7
Editorial	7
New Quality Index to Improve Overlay Measurement Accuracy Based on Moiré Marks: Method for Quantifying Moiré Pattern Quality Using the Signal Shape Index	7
Data-Driven Production Planning Models for Wafer Fabs: An Exploratory Study	7
Deep Clustering and Regression Ensemble Network for Lot Cycle Time Prediction in Semiconductor Wafer Fabrication	7
Table of Contents	7
Defect Detection of Photovoltaic Panels to Suppress Endogenous Shift Phenomenon	7
Evaluation of Thick Silicon Nitride Film Properties at 300 mm Scale for High-Q Photonic Devices	6
Table of Contents	6
IEEE Transactions on Semiconductor Manufacturing Publication Information	6
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	6
Nitrogen-Doped Czochralski Silicon Wafers as Materials for Conventional and Scaled Insulated Gate Bipolar Transistors	6
Advances in the Thermal Study of Polymers for Microelectronics Using the Thermally Induced Curvature Approach	6
Semantic Context Information Modeling With Neural Networks in Customer Order Behavior Classification	6
Unrelated Parallel Machine Photolithography Scheduling Problem With Dual Resource Constraints	6
Guest Editorial Process-Level Machine Learning Applications in Semiconductor Manufacturing	6

RA-UNet: A New Deep Learning Segmentation Method for Semiconductor Wafer Defect Analysis on Fine-Grained Scanning Electron Microscope (SEM) Images	6
Call for Nominations: 2024 EDS Early Career Award	6
Fabrication of On-Silicon Aperture Coupled Patch Antenna Through Micromachining and Cu-Cu Thermocompression Bonding	6
Prevention of Moisture Invasion by Flow Isolation Device (FID) for Mask Automatic Storage System (Stocker Room) in a Semiconductor Fabrication Plant (Fab)	5
Macro and Micro-Scale Non-Contact Imaging of Electrically Active Extended Defects in 4H-SiC Merged PiN Schottky Diode Devices	5
Anomaly Detection in Batch Manufacturing Processes Using Localized Reconstruction Errors From 1-D Convolutional AutoEncoders	5
Current Status of Bulk β-Ga₂O₃ and β-(AlxGa₁-ₓ)₂O₃ Crystal Growth	5
Guest Editorial Special Section on Sustainability	5
IEEE Transactions on Semiconductor Manufacturing Information for Authors	5
Table of Contents	5
Defect Localization Approach for Wafer-to-Wafer Hybrid Bonding Interconnects	5
Shear Force Classification Before Wire Bonding Based on Probe Mark 2-D Images Using Machine Learning Methods	5
BCICTS 2023 Call for Papers	5
Guest Editorial Introduction to the Joint Special Issue on Semiconductor Design for Manufacturing (DFM)	5
Overlay Measurement Algorithm for Moiré Targets Using Frequency Analysis	5
DSH to Extend-DSH: Chip-Level Chemical Mechanical Planarization (CMP) Model Upgrade Based on Decoupling Regression Strategy	5
Improving Endpoint Detection Sensitivity in Plasma Etching With Small Openings	5
Quantitative 3-D Flow Visualization of Conventional Purge Flow Within a Front Opening Unified Pod (FOUP)	5
Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices Based on Image Recognition	5
Unsupervised Representation Learning and Explainable Clustering for Wafer Map Pattern Analysis	5
Editorial	5
A Modified Lasso Model for Yield Analysis Considering the Interaction Effect in a Multistage Manufacturing Line	5
Deep Learning-Based Multi-Horizon Forecasting for Automated Material Handling System Throughput in Semiconductor Fab	5
Why Contour Averaging Works for SEM Metrology: Analysis and Validation	5
Integrated Electrochemical Technology for Efficient Metal Recovery in Semiconductor Wastewater	5
Multiobjective Order Promising for Outsourcing Supply Network of IC Design Houses	5
Guest Editorial Special Section on the 2025 International Conference on Compound Semiconductor Manufacturing Technology (CS-MANTECH)	4
IEEE Transactions on Semiconductor Manufacturing Information for Authors	4
IEEE Transactions on Semiconductor Manufacturing Publication Information	4
Performance Evaluation of Supervised Learning Model Based on Functional Data Analysis and Summary Statistics	4
Editorial	4
Comparative Study of Nondestructive Mapping of Conformal-Coating Thickness on Microelectronics by Terahertz Time-of-Flight Tomography	4
Multi-Scale Content-Aware Enhancement Dual-Branch CNN for LED-Chip Defect Classification	4
Surface Reconstruction for Enhancing the Overlay Modeling Optimization Procedure in Photolithography Processes	4
TechRxiv: Share Your Preprint Research With the World!	4
Understanding and Improving Virtual Metrology Systems Using Bayesian Methods	4
Geometry-Based Curvilinear Mask Process Correction for Enhanced Pattern Fidelity, Contrast, and Manufacturability	4
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Sustainable Technologies for Responsible Products and a More Sustainable Future	4
Density-Based Spatial Clustering of Applications With Noise (DBSCAN) for Probe Card Production for Advanced Quality Control of Wafer Probing Test	4
Chemical Mechanical Polishing of Single-Crystalline Diamond Epitaxial Layers for Electronics Applications	4
Efficient and Refined Deep Convolutional Features Network for the Crack Segmentation of Solar Cell Electroluminescence Images	4
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices: Reliability of Advanced Nodes	4
Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples	4
Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement	4
Model-Based OPC With Adaptive PID Control Through Reinforcement Learning	4
Real-Time Change Detection for Automated Test Socket Inspection Using Advanced Computer Vision and Machine Learning	4
Simulations of Modified Shallow Water Equation and Reaction Kinetics of Poly Etching on Single Wafer Process	3
Fast Optical Proximity Correction Using Graph Convolutional Network With Autoencoders	3
Mechanistic Analysis of the Effect of Gap on Convex Curves of Wafer in Double-Sided Polishing	3
Group-Exclusive Feature Group Lasso and Applications to Automatic Sensor Selection for Virtual Metrology in Semiconductor Manufacturing	3
A Diffusion-Model-Based Methodology for Virtual Silicon Data Generation	3
IEEE Transactions on Semiconductor Manufacturing Information for Authors	3
Enhancing Current Gain in Polysilicon Emitter Bipolar Transistors Through Emitter-Base Interface Engineering	3
Product Design Enhancement With Test Structures for Non-Contact Detection of Yield Detractors	3
IEEE Transactions on Semiconductor Manufacturing Information for Authors	3
Editorial	3
Production-Level Artificial Intelligence Applications in Semiconductor Supply Chains	3
The Modeling of Post-Annealing and Etching Processes of ALD SiO₂ Using Intermediate Variables Considering Digital Twin Model Reusability	3
Comprehensive Study of the Impact of LWR on Device Performance in VLSI Technology	3
Front Cover	3
Practical Reinforcement Learning for Adaptive Photolithography Scheduler in Mass Production	3
Analysis of Image Hashing in Wafer Map Failure Pattern Recognition	3
Vacancy-Type Defects in HfO₂ Layers and Their Role in Amorphous-to-Crystalline Transition Studied by Monoenergetic Positron Beams	3
Wafer Scratch Pattern Reconstruction for High Diagnosis Accuracy and Yield Optimization	3
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing	3
Study on Mechanical Cleavage Mechanism of GaAs via Anisotropic Stress Field and Experiments	3
Avalanche Capability Improvement by Optimizing p+ Contact Resistance for N-Channel Trench Power MOSFETs	3
Data Visualization of Anomaly Detection in Semiconductor Processing Tools	3
Effects of the Applied Power of Remote Plasma System With Green Alternative Chamber Cleaning Gas of Carbonyl Fluoride	3
Multi-Scale Adaptive Inspection Framework for Voids in MOSFETs	3
Editorial	3
An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study	3
BCICTS 2022 CALL FOR PAPERS	3
Automatic Defect Classification Using Semi-Supervised Learning With Defect Localization	2
Joint Dynamic Dispatching and Preventive Maintenance for Unrelated Parallel Machines With Equipment Health Considerations	2
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Pioneering Fast and Safe Low-k Silicon Dioxide Synthesis for Modern Integrated Circuits	2
Optimization of Void Defects at TiN/Si:HfO₂ Interface for 3-D Ferroelectric Memory	2
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing	2

Efficient Dual-Attention-Based Knowledge Distillation Network for Unsupervised Wafer Map Anomaly Detection	2
Front Cover	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
Table of Contents	2
Quantitative Comparison of Simulation and Experiment Enabling a Lithography Digital Twin	2
Front Cover	2
Metal Contamination Behavior on Silicon Dioxide Surface Rinsed With Deionized Water Containing Ultra-Trace Metal During Single-Wafer Cleaning	2
Modeling and Designing a GaN-Growth Reactor With Halogen-Free Vapor Phase Epitaxy: NH₃ Decomposition at the Catalytic Surface of Components to Replicate Parasitic Polycrystal Formation	2
Ar/N₂ Gas Flow Rate Dependence on the Ferroelectric HfNₓ Thin Film Formation by ECR-Plasma Sputtering	2
A Hierarchical Spatial-Test Attention Network for Explainable Multiple Wafer Bin Maps Classification	2
Table of Contents	2
Wafer Lot Assignment for Parallel-Producing Tools Based on Heuristic Clustering Algorithm	2
A Condition Monitoring Method via a New Signal Expansion Strategy for the Crystal Lifting and Rotating Mechanism	2
Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging	2
A Novel Multiscale Residual Aggregation Network-Based Image Super-Resolution Algorithm for Semiconductor Defect Inspection	2
Significant Lifetime Improvement of Negative Bias Thermal Instability by Plasma Enhanced Atomic Layer Deposition SiN in Stress Memorization Technique	2
A Real-Time Automatic Structural-Loss Detection and Stopping Rule of Semiconductor Single-Crystal-Silicon-Growth <100> and <111>	2
Observation and Suppression of Growth Pits Formed on 4H-SiC Epitaxial Films Grown Using Halide Chemical Vapor Deposition Process	2
Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process	2
Improved Color Defect Detection With Machine Learning for After Develop Inspections in Lithography	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
Buckling and Stress Controlled RF MEMS Structures Using Annealing	2
An Alternative PECVD Chamber Cleaning Gas of COF₂ for Low-GWP Consideration	2
Data-Driven Coordinated Control of Czochralski Silicon Single Crystal Growth Operation Process Based on Indirect Control Strategy	2
Image-Based Defect Classification for TFT-LCD Array via Convolutional Neural Network	2
Call for Papers for a Special Issue of IEEE Journal of the Electron Devices Society on "Materials, Processing and Integration for Neuromorphic Devices and In-Memory Computing"	2
3-D NAND Oxide/Nitride Tier Stack Thickness and Zonal Measurements With Infrared Metrology	2
Feature Extraction From Diffraction Images Using a Spatial Light Modulator in Scatterometry	1
A Study on Particle Emission Efficiency of a Plasma Enhanced Chemical Vapor Deposition Chamber During Periodic Cycle Purge Process Using an Improved Single Particle Light Scattering Method	1
Call for Papers for RFIC 2023	1
A Fine-Grained, End-to-End Feature-Scale CMP Modeling Paradigm Based on Fully Convolutional Neural Networks	1
Boundless Engineering for Yield to Cope With the Complexity of High-Volume Manufacturing	1
Fabrication of the Highly Ordered Silicon Nanocone Array With Sub-5 nm Tip Apex by Tapered Silicon Oxide Mask	1
DeePattern: Layout Pattern Generation With Transforming Convolutional Auto-Encoder	1
Eco-Friendly Dry-Cleaning and Diagnostics of Silicon Dioxide Deposition Chamber	1
Manufacturing of g-C₃N₄-ZnS-Doped TiO₂ Nanofibers by Electrospinning and Their Application to Dye-Sensitized Solar Cell as an Additional Layer in Photoanode	1
SnS₂ and ZnO Nanocomposite Prepared by Dispersion Method for Photodetector Application	1
Prediction of Highly Imbalanced Semiconductor Chip-Level Defects in Module Tests Using Multimodal Fusion and Logit Adjustment	1
Fast and Precise Temperature Control for a Semiconductor Vertical Furnace via Heater-Cooler Integration	1
E-Test Validation of Space Error Budget and Metrology	1
Sequential Residual Learning for Multistep Processes in Semiconductor Manufacturing	1
On Uses of Noise Analysis for the Uncertainty Quantification of Line Edge Roughness Estimation	1
Leading Sustainability Applications for More Responsible Logic Technology Development	1
Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing	1
ML-Guided Curvilinear OPC: Fast, Accurate, and Manufacturable Curve Correction	1
Optimizing Scanning Acoustic Tomography Image Segmentation With Segment Anything Model for Semiconductor Devices	1
Autonomous Robot Orchestration Solution for OHT With Active Q Routing and Digital Twin FA: Factory Automation	1
Table of Contents	1
A Computational Method for Screening Low-GWP Fluorinated Gases in Semiconductor Manufacturing	1
Virtual Metrology of Critical Dimensions in Plasma Etch Processes Using Entire Optical Emission Spectrum	1
Call for Papers for a Special Issue of IEEE Journal of the Electron Devices Society on "Materials, Processing and Integration for Neuromorphic Devices and In-Memory Computing"	1
Plasma Pretreatment System for the Reduction of By-Product Particles in Semiconductor Manufacturing	1
Correlated Bayesian Co-Training for Virtual Metrology	1
Spatial and Channel-Wise Co-Attention-Based Twin Network System for Inspecting Integrated Circuit Substrate	1
Application of Plasma Information-Based Virtual Metrology (PI-VM) for Etching in C₄F₈/Ar/O₂ Plasma	1
Integrated Test Pattern Extraction and Generation for Accurate Lithography Modeling	1
Practical Q-Learning-Based Route-Guidance and Vehicle Assignment for OHT Systems in Semiconductor Fabs	1
The Research on Screening Method to Reduce Chip Test Escapes by Using Multi-Correlation Analysis of Parameters	1
Table of Contents	1
TAFF-YOLO: An Enhanced YOLO Model With Transformer and Attention Feature Fusion for Chip Internal Defect Detection	1
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on Wide Band Gap Semiconductors for Automotive Applications	1
Wireless Measurement of the Degradation Rates of Thin Film Bioresorbable Metals Using Reflected Impedance	1
Three-Dimensional Flow Analysis and Humidity Level Evaluation for a FOUP During Open Door Operation Conditions	1
Watermark Detection in CMOS Image Sensors Using Cosine-Convolutional Semantic Networks	1
Use of E-Beam Lithography to Optimize Lithography Patterning on SiC Wafers	1
A Case Study on Sputtered Chromium Sacrificial Layer for Ti₂O₃ Microstructure Fabrication	1
Fully Automated Wafer-Level Edge Coupling Measurement System for Silicon Photonics Integrated Circuits	1
Process-Aware Digital Twins by Deep Learning for DUV Photolithography and Plasma Etch	1
Sustainable Semiconductor Manufacturing: The Role of Lithography	1
Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma	1
Optimizing Polysilicon Resistor Fabrication via BF₂ + F Co-Implantation: A Manufacturing-Compatible Approach for Low Resistance and High Reliability in MOS Devices	1
High Accuracy Simulation of Silicon Oxynitride Film Grown by Plasma Enhanced Chemical Vapor Deposition	1
Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Robot Waiting Time	1
High Voltage Design Strategies for Gallium Oxide Power Devices	1
Process Control in Semiconductor Manufacturing Based on Deep Distributional Soft Actor-Critic Reinforcement Learning	1
IEEE Transactions on Semiconductor Manufacturing Information for Authors	1
Integrated Scheduling of Jobs, Tools, Machines, and Two Different Set of Transbots	1
Advancing Condition-Based Maintenance in the Semiconductor Industry: Innovations, Challenges and Future Directions for Predictive Maintenance	1
A Practical Approach for Managing End-of-Life Systems in Semiconductor Manufacturing Using Health Index	1
CPDD: A Cross-Scenario Photovoltaic Defect Detector Based on Fine-Grained Feature Autoencoding and Pseudo-Box Contrastive Learning	1
Customer Order Behavior Classification Via Convolutional Neural Networks in the Semiconductor Industry	1
Identifying Good-Dice-in-Bad-Neighborhoods Using Artificial Neural Networks	0
Simulation and Experimental Analysis of Contactless Chip Pickup Process Based on a Vortex Flow Gripper	0
Guest Editorial Special Section on the 2024 SEMI Advanced Semiconductor Manufacturing Conference	0
Call for Papers for a Special Issue of IEEE Transactions on Materials for Electron Devices: "Exploration of the Exciting World of Multifunctional Oxide-Based Electronic Devices: From Material to Syste	0
Parametric Optimization for Moisture Infiltration Prevention Into a FOUP (Front Opening Unified Pod)	0
A Dry Etch Approach To Reduce Roughness and Eliminate Visible Grind Marks in Silicon Wafers Post Back-Grind	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
The Environmental Footprint of IC Production: Review, Analysis, and Lessons From Historical Trends	0
Table of Contents	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
Shape and Roughness Extraction of Line Gratings by Small Angle X-Ray Scattering: Statistics and Simulations	0
A Lightweight Chip-Scale Chemical Mechanical Polishing Model Based on Polynomial Network	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on Ultrawide Band Gap Semiconductor Devices for RF, Power and Optoelectronic Applications	0
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