IEEE Transactions on Semiconductor Manufacturing

Article	Citations
Deformable Convolutional Networks for Efficient Mixed-Type Wafer Defect Pattern Recognition	108
A Light-Weight Neural Network for Wafer Map Classification Based on Data Augmentation	60
Self-Supervised Representation Learning for Wafer Bin Map Defect Pattern Classification	47
Semi-Supervised Multi-Label Learning for Classification of Wafer Bin Maps With Mixed-Type Defect Patterns	41
Model-Free Adaptive Iterative Learning Control Method for the Czochralski Silicon Monocrystalline Batch Process	37
Machine Learning-Based Detection Method for Wafer Test Induced Defects	34
SMT2020—A Semiconductor Manufacturing Testbed	32
Memory-Augmented Convolutional Neural Networks With Triplet Loss for Imbalanced Wafer Defect Pattern Classification	31
Data-Driven Framework for Tool Health Monitoring and Maintenance Strategy for Smart Manufacturing	30
Support Weighted Ensemble Model for Open Set Recognition of Wafer Map Defects	27
Applying Data Augmentation and Mask R-CNN-Based Instance Segmentation Method for Mixed-Type Wafer Maps Defect Patterns Classification	27
Temporal Convolution-Based Long-Short Term Memory Network With Attention Mechanism for Remaining Useful Life Prediction	27
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching	25
Advanced Quality Control (AQC) of Silicon Wafer Specifications for Yield Enhancement for Smart Manufacturing	23
CNNs Combined With a Conditional GAN for Mura Defect Classification in TFT-LCDs	22
Adversarial Defect Detection in Semiconductor Manufacturing Process	22
Deep Learning Approach to Inverse Grain Pattern of Nanosized Metal Gate for Multichannel Gate-All-Around Silicon Nanosheet MOSFETs	21
Optimal Feature Selection for Defect Classification in Semiconductor Wafers	21
Redefining Monitoring Rules for Intelligent Fault Detection and Classification via CNN Transfer Learning for Smart Manufacturing	20
Use of Plasma Information in Machine-Learning-Based Fault Detection and Classification for Advanced Equipment Control	19
An Improved Capsule Network (WaferCaps) for Wafer Bin Map Classification Based on DCGAN Data Upsampling	18
The Environmental Footprint of IC Production: Review, Analysis, and Lessons From Historical Trends	17
Mixed-Type Wafer Defect Recognition With Multi-Scale Information Fusion Transformer	17
Methodology for Important Sensor Screening for Fault Detection and Classification in Semiconductor Manufacturing	17
Wafer Defect Pattern Labeling and Recognition Using Semi-Supervised Learning	16

Integration of 650 V GaN Power ICs on 200 mm Engineered Substrates	15
Two-Stage Transfer Learning for Fault Prognosis of Ion Mill Etching Process	15
Qualitative and Quantitative Analysis of Multi-Pattern Wafer Bin Maps	15
Development of a World Class Silicon Carbide Substrate Manufacturing Capability	15
Data-Driven Model Predictive Control of Cz Silicon Single Crystal Growth Process With V/G Value Soft Measurement Model	14
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment	14
Wafer Bin Map Recognition With Autoencoder-Based Data Augmentation in Semiconductor Assembly Process	13
Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma	12
Dynamic Clustering for Wafer Map Patterns Using Self-Supervised Learning on Convolutional Autoencoders	12
CMP Process Optimization Engineering by Machine Learning	12
Similarity Search on Wafer Bin Map Through Nonparametric and Hierarchical Clustering	11
Semi-Supervised Learning for Simultaneous Location Detection and Classification of Mixed-Type Defect Patterns in Wafer Bin Maps	11
Detection and Recognition of Mixed-Type Defect Patterns in Wafer Bin Maps via Tensor Voting	11
Fuzzy Selection Model for Quality-Based IC Packaging Process Outsourcers	11
A Graph-Theoretic Approach for Spatial Filtering and Its Impact on Mixed-Type Spatial Pattern Recognition in Wafer Bin Maps	11
One Class Process Anomaly Detection Using Kernel Density Estimation Methods	11
Adaptive Cautious Regularized Run-to-Run Controller for Lithography Process	11
Flow Analysis and Relative Humidity (RH) Measurement in the Horizontal Plane of a Front Opening Unified Pod (FOUP)	10
Hidden Wafer Scratch Defects Projection for Diagnosis and Quality Enhancement	10
Deep Learning-Based Positioning Error Fault Diagnosis of Wire Bonding Equipment and an Empirical Study for IC Packaging	10
Effective Variational-Autoencoder-Based Generative Models for Highly Imbalanced Fault Detection Data in Semiconductor Manufacturing	10
Development of Diaphragm and Microtunnel Structures for MEMS Piezoelectric Sensors	10
Efficient and Refined Deep Convolutional Features Network for the Crack Segmentation of Solar Cell Electroluminescence Images	9
Optimizing the Isotropic Etching Nature and Etch Profile of Si, Ge and Si0.8Ge0.2 by Controlling CF4 Atmosphere With Ar and O2 Additives in ICP	9
Influence and Suppression of Harmful Effects Due to By-Product in CVD Reactor for 4H-SiC Epitaxy	9
Atomic Layer Processes for Material Growth and Etching—A Review	9
Planned Maintenance Schedule Update Method for Predictive Maintenance of Semiconductor Plasma Etcher	9
A Sequential Search Method of Dispatching Rules for Scheduling of LCD Manufacturing Systems	8
Machine Learning Models for Edge Placement Error Based Etch Bias	8
Wafer Reflectance Prediction for Complex Etching Process Based on K-Means Clustering and Neural Network	8
Discovery of Resource-Oriented Transition Systems for Yield Enhancement in Semiconductor Manufacturing	8
A Real-Time Monitoring Framework for Wafer Fabrication Processes With Run-to-Run Variations	7
An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study	7
Data Visualization of Anomaly Detection in Semiconductor Processing Tools	7
Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement	7
A Fine-Grained, End-to-End Feature-Scale CMP Modeling Paradigm Based on Fully Convolutional Neural Networks	7
Synthesis of Lithography Test Patterns Using Machine Learning Model	7
Attention Mechanism-Based Root Cause Analysis for Semiconductor Yield Enhancement Considering the Order of Manufacturing Processes	7
Data-Driven and Mechanism-Based Hybrid Model for Semiconductor Silicon Monocrystalline Quality Prediction in the Czochralski Process	7
Optical Proximity Correction Using Bidirectional Recurrent Neural Network With Attention Mechanism	6
Unrelated Parallel Machine Photolithography Scheduling Problem With Dual Resource Constraints	6
A Study on the Impact of Mid-Gap Defects on Vertical GaN Diodes	6
Decrease in Particles by Substituting Conductive Magnesium-Oxide Based Ceramics for Conventional Electrode Materials Used in Process Chamber of Plasma Etching	6
Edge Effects of an Eddy-Current Thickness Sensor During Chemical Mechanical Polishing	6
Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Robot Waiting Time	5
Customer Order Behavior Classification Via Convolutional Neural Networks in the Semiconductor Industry	5
Feature Selection for Waiting Time Predictions in Semiconductor Wafer Fabs	5
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning	5
A One-Shot Learning Approach for Similarity Retrieval of Wafer Bin Maps With Unknown Failure Pattern	5
Prediction of Highly Imbalanced Semiconductor Chip-Level Defects in Module Tests Using Multimodal Fusion and Logit Adjustment	5

Improved Color Defect Detection With Machine Learning for After Develop Inspections in Lithography	5
A New Stage-Wise Control Release Policy for Semiconductor Wafer Fabrication Systems	5
Nano-Scale Depth Profiles of Electrical Properties of Phosphorus Doped Silicon for Ultra-Shallow Junction Evaluation	5
Improvement of Multi-Lines Bridge Defect Classification by Hierarchical Architecture in Artificial Intelligence Automatic Defect Classification	5
A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge	5
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)	4
TestDNA-E: Wafer Defect Signature for Pattern Recognition by Ensemble Learning	4
Quality-Oriented Statistical Process Control Utilizing Bayesian Modeling	4
Anomaly Detection in Batch Manufacturing Processes Using Localized Reconstruction Errors From 1-D Convolutional AutoEncoders	4
Minimizing Convolutional Neural Network Training Data With Proper Data Augmentation for Inline Defect Classification	4
Practical Q-Learning-Based Route-Guidance and Vehicle Assignment for OHT Systems in Semiconductor Fabs	4
High Accuracy Simulation of Silicon Oxynitride Film Grown by Plasma Enhanced Chemical Vapor Deposition	4
Thermal and Electrical Analysis of the Electrostatic Chuck for the Etch Equipment	4
Improvement of Virtual Diagnostics Performance for Plasma Density in Semiconductor Etch Equipment Using Variational Auto-Encoder	4
Automatic Defect Classification Using Semi-Supervised Learning With Defect Localization	4
Shear Force Classification Before Wire Bonding Based on Probe Mark 2-D Images Using Machine Learning Methods	4
CNN-Based Layout Segment Classification for Analysis of Layout-Induced Failures	4
RoIA: Region of Interest Attention Network for Surface Defect Detection	4
Study on Mechanical Cleavage Mechanism of GaAs via Anisotropic Stress Field and Experiments	4
Understanding and Improving Virtual Metrology Systems Using Bayesian Methods	4
Improving Liquid Film Thickness Uniformity of Semiconductor Etching Equipment Using Flow Field Visualization and CFD Simulation	4
An Advanced Finite Element Model for BiCMOS Process Oriented Ultra-Thin Wafer Deformation	4
Wafer Scratch Pattern Reconstruction for High Diagnosis Accuracy and Yield Optimization	4
On the Fly Ellipsometry Imaging for Process Deviation Detection	4
Which Spare Parts Service Measure to Choose for a Front-End Wafer Fab?	4
A Deep Learning Analysis Framework for Complex Wafer Bin Map Classification	4
Exploiting 2D Coordinates as Bayesian Priors for Deep Learning Defect Classification of SEM Images	4
Semiconductor Defect Pattern Classification by Self-Proliferation-and-Attention Neural Network	3
A Practical Approach for Managing End-of-Life Systems in Semiconductor Manufacturing Using Health Index	3
Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process	3
SWaCo: Safe Wafer Bin Map Classification With Self-Supervised Contrastive Learning	3
Chamber and Recipe-Independent FDC Indicator in High-Mix Semiconductor Manufacturing	3
Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging	3
Fast and Precise Temperature Control for a Semiconductor Vertical Furnace via Heater-Cooler Integration	3
Precise Pattern Alignment for Die-to-Database Inspection Based on the Generative Adversarial Network	3
Optimization and Application of TiO2 Hollow Microsphere Modified Scattering Layer for the Photovoltaic Conversion Efficiency of Dye-Sensitized Solar Cell	3
Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review	3
Modeling and Optimizing the Impact of Process and Equipment Parameters in Sputtering Deposition Systems Using a Gaussian Process Machine Learning Framework	3
A Modified Lasso Model for Yield Analysis Considering the Interaction Effect in a Multistage Manufacturing Line	3
Process Optimization and Modeling of the Silicon Growth in Trichlorosilane-Hydrogen Gas Mixture in a Planetary CVD Reactor	3
Self-Assured Deep Learning With Minimum Pre-Labeled Data for Wafer Pattern Classification	3
Improvement of ZnO/Si Heterojunctions With a Coaxial Circular Transmission Line Model Applicable to Both Ohmic and Schottky	3
A Self-Test Method of Structural Failures of Uncooled Infrared Focal Plane Array	3
Correlated Bayesian Co-Training for Virtual Metrology	3
Matheuristics for Qualification Management Decisions in Wafer Fabs	3
Investigation of the HfON Tunneling Layer of MONOS Device for Low-Voltage and High-Speed Operation Nonvolatile Memory Application	3
Double Coating Process Using the Single Photoresist and the Thickness Prediction	3
Joint Dynamic Dispatching and Preventive Maintenance for Unrelated Parallel Machines With Equipment Health Considerations	3
Vehicle Look-Ahead Dispatching for Overhead Hoist Transport System in Semiconductor Manufacturing	3
EveSyncIAI: Event Synchronization Industrial Augmented Intelligence for Fault Diagnosis	3
Production-Level Artificial Intelligence Applications in Semiconductor Supply Chains	2
Photovoltaic Measurement Under Different Illumination of the Dye-Sensitized Solar Cell With the Photoanode Modified by Fe2O3/g-C3N4/TiO2 Heteroge	2
Practical Queueing Models for Preventive Maintenance Plan Optimization: Multiple Maintenance Types and Numerical Studies	2
Regression Model for the Specific Contact Resistance of SiC Ohmic Contacts	2
Cross-Chamber Data Transferability Evaluation for Fault Detection and Classification in Semiconductor Manufacturing	2
Impact of Water Content in NMP on Ohmic Contacts in GaN HEMT Technologies	2
TCAD-Enabled Machine Learning—An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication	2
Parametric Optimization for Moisture Infiltration Prevention Into a FOUP (Front Opening Unified Pod)	2
New Process Integration of Sequential Phosphorus-Doped Silicon for Trench Field Plate Power MOSFETs	2
Watermark Detection in CMOS Image Sensors Using Cosine-Convolutional Semantic Networks	2
Imaging of Metal Ions and Nanoparticles on Structured Silicon Surface Using Laser Ablation-Inductively Coupled Plasma-Mass Spectrometer for Contamination Control in Semiconductor Manufacturing Process	2
Numerical Modeling and Control of the Dynamic Single Silicon Crystal Growth Process	2
Analysis of Image Hashing in Wafer Map Failure Pattern Recognition	2
Sequential Residual Learning for Multistep Processes in Semiconductor Manufacturing	2
Practical Reinforcement Learning for Adaptive Photolithography Scheduler in Mass Production	2
An Investigation of Edge Bead Removal Width Variability, Effects and Process Control in Photolithographic Manufacturing	2
Change Qualification Framework in Semiconductor Manufacturing	2
Image-Based Defect Classification for TFT-LCD Array via Convolutional Neural Network	2
A Numerical Study on the Effects of Purge and Air Curtain Flow Rates on Humidity Invasion Into a Front Opening Unified Pod (FOUP)	2
Dynamic Down-Selection of Measurement Markers for Optimized Robust Control of Overlay Errors in Photolithography Processes	2
Shape and Roughness Extraction of Line Gratings by Small Angle X-Ray Scattering: Statistics and Simulations	2
A Hybrid Method of Frequency and Spatial Domain Techniques for TFT-LCD Circuits Defect Detection	2
Low-Destructive Processing of Single Crystal Aluminum Nitride Based on Sol-Gel Polishing Tool	2
Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices Based on Image Recognition	2
Investigation Into Low Frequency Response of Acoustic MEMS for Determination of Failure Modes	2
Commonality Analysis for Detecting Failures Caused by Inspection Tools in Semiconductor Manufacturing Processes	2
Improvement of Plasma Etching Endpoint Detection With Data-Driven Wavelength Selection and Gaussian Mixture Model	2
Test Structure for Measuring the Selectivity in XeF2 and HF Vapour Etch Processes	2
Hotspot Prediction: SEM Image Generation With Potential Lithography Hotspots	2
Investigation of Variation in On-Si On-Wafer TRL Calibration in Sub-THz	2

Modular Fluid Delivery System Architectures Drive Configurability Options, Enhance Semiconductor Manufacturing Equipment Productivity, and Improve Process Performance	2
Effect of SiO2 Interfacial Layer Reduction on MFSFET With 5 nm-Thick Ferroelectric Nondoped HfO2 by Deposition Rate Control	2
A Novel Automatic Probe-to-Pad Alignment Error Correction Approach	2
FDC Based on Neural Network With Harmonic Sensor to Prevent Error of Robot	2
2020 Index IEEE Transactions on Semiconductor Manufacturing Vol. 33	1
GAGAN: Global Attention Generative Adversarial Networks for Semiconductor Advanced Process Control	1
Fast Optical Proximity Correction Using Graph Convolutional Network With Autoencoders	1
Nitrogen-Doped Czochralski Silicon Wafers as Materials for Conventional and Scaled Insulated Gate Bipolar Transistors	1
A Yield Prediction Method Based on Nonparametric Statistical and Comparison With a Networks Method	1
Experts in the Loop: Conditional Variable Selection Based on Deep Learning for Accelerating Post-Silicon Validation	1
Nondestructive Detection of Buried and Latent Defects by Negative Mode E-Beam Inspection	1
Interface Characteristics, Erosion Behavior, and Thermal Shock Resistance of Al–Ta Alloy Coatings Produced by Arc Spraying	1
Data Visualization and Fault Detection Using Bi-Kernel t-Distributed Stochastic Neighbor Embedding in Semiconductor Etching Processes	1
Leveraging Machine Learning for Capacity and Cost on a Complex Toolset: A Case Study	1
A Novel ML Augmented DRC Framework for Identification of Yield Detractor Patterns	1
Multiobjective Order Promising for Outsourcing Supply Network of IC Design Houses	1
Manufacturing of 3D Helical Microswimmer by AFM Micromanipulation for Microfluidic Applications	1
A Threshold Voltage Deviation Monitoring Scheme of Bit Transistors in 6T SRAM for Manufacturing Defects Detection	1
Data-Driven Production Planning Models for Wafer Fabs: An Exploratory Study	1
Intelligent Optimization of Dosing Uniformity in Ion Implantation Systems	1
Integrated Test Pattern Extraction and Generation for Accurate Lithography Modeling	1
Deep Learning-Based Multi-Horizon Forecasting for Automated Material Handling System Throughput in Semiconductor Fab	1
Correlation Between Trench Angle and Wafer Warpage in Trench Field Plate Power MOSFETs and its Application to Quality Control	1
A Hierarchical Spatial-Test Attention Network for Explainable Multiple Wafer Bin Maps Classification	1
Automated Visual Inspection of Defects in Transparent Display Layers Using Light-Field 3-D Imaging	1
Wireless Measurement of the Degradation Rates of Thin Film Bioresorbable Metals Using Reflected Impedance	1
Investigations of Fast Vacuum Pump-Down Processes Between Parallel Isothermal Disks	1
Process Optimization and Microwave Model of GaAs Photodiodes for 50 Gb/s Optical Links	1
Study on Polishing of Polycrystalline AlN Using Sol–Gel Polishing Tool	1
Fabrication of On-Silicon Aperture Coupled Patch Antenna Through Micromachining and Cu-Cu Thermocompression Bonding	1
Layout Feature Extraction Using CNN Classification in Root Cause Analysis of LSI Defects	1
Wafer-to-Wafer Bonding Fabrication Process-Induced Wafer Warpage	1
Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing	1
The Research on Screening Method to Reduce Chip Test Escapes by Using Multi-Correlation Analysis of Parameters	1
Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples	1
Optimizing Process Recipe for Critical Dimensions in Dry Etching Process	1
An Emerging Local Annealing Method for Simultaneous Crystallization and Activation in Xtacking 3-D NAND Flash	1
Elimination of Si-C Defect on Wafer Surface in High-Temperature SPM Process Through Nitrogen Purge in 300-mm Single-Wafer Chamber	1
Drop-In Test Structure to Evaluate Residual Stress in Conformally Grown Films	1
Wafer Lot Assignment for Parallel-Producing Tools Based on Heuristic Clustering Algorithm	1
Preparation and Application of Sol-Gel Polishing Pad for Polishing CVD Single Crystal Diamond at High Speed	1
IEEE Transactions on Semiconductor Manufacturing Publication Information	0
IEEE Transactions on Semiconductor Manufacturing Publication Information	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
Guest Editorial Special Section on Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing	0
Front Cover	0
A Novel Multi-Modal Learning Approach for Cross-Process Defect Classification in TFT-LCD Array Manufacturing	0
Study on Measurement Method of Microscopic ζ Potential	0
Machine Learning on Multiplexed Optical Metrology Pattern Shift Response Targets to Predict Electrical Properties	0
Improving the Reliability of Through Silicon Vias: Reducing Copper Protrusion by Artificial Defect Manipulation and Annealing	0
Front Cover	0
Why Contour Averaging Works for SEM Metrology: Analysis and Validation	0
Minimization of Particle Deposition on Wafers Caused by the Pressure Change in the Vacuum Chamber Through a Pressure Control Regulation Process	0
IEEE Transactions on Semiconductor Manufacturing Publication Information	0
A Study on the Improvement of Safety and Efficiency of Clean Rooms in Semiconductor Factories Through Real Fire Experiments	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on New simulation methodologies for next-generation TCAD tools	0
Table of Contents	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
Table of Contents	0
Defect Localization Approach for Wafer-to-Wafer Hybrid Bonding Interconnects	0
BCICTS 2023 Call for Papers	0
Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference	0
Table of contents	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "From Mega to nano: Beyond one Century of Vacuum Electronics"	0
2021 EDS Education Award Call for Nominations	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
Gas-Delivery Fluid-Mechanical Timescales in Semiconductor Manufacturing	0
Quantitative 3D Flow Visualization of Conventional Purge Flow Within a Front Opening Unified Pod (FOUP)	0
Advanced Process Control System for Trench Shape of Power Devices	0
Supply Chain Planning for IC Design House Back-End Production Network With Turnkey Service	0
3-D NAND Oxide/Nitride Tier Stack Thickness and Zonal Measurements With Infrared Metrology	0
ℓ₁ Trend Filtering-Based Change Point Detection for Pumping Line Balance of Deposition Equipment	0
Bayesian Nonparametric Classification for Incomplete Data With a High Missing Rate: an Application to Semiconductor Manufacturing Data	0
Table of Contents	0
Blank Page	0
Overlay Measurement Algorithm for Moirè Targets Using Frequency Analysis	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"	0
A Novel Multiscale Residual Aggregation Network-Based Image Super-Resolution Algorithm for Semiconductor Defect Inspection	0
Table of Contents	0
A Novel Method to Quantify Conditioner-to-Conditioner Variation and Predict Conditioner Lifetime and Process Failure Mode in Chemical Mechanical Planarization (CMP) Environment	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
IEEE Transactions on Semiconductor Manufacturing publication information	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
A Lightweight Chip-Scale Chemical Mechanical Polishing Model Based on Polynomial Network	0
Improving Doping Efficiency of Mist-CVD Epitaxy for Tin-Doped α-Ga2O3 Using Tin Chloride Pentahydrate	0
Photoresist Spray Coating on Silicon Wafers With Acoustic Resonate Atomization	0
Significant Lifetime Improvement of Negative Bias Thermal Instability by Plasma Enhanced Atomic Layer Deposition SiN in Stress Memorization Technique	0
Call for Papers for RFIC 2023	0
Observation and Suppression of Growth Pits Formed on 4H-SiC Epitaxial Films Grown Using Halide Chemical Vapor Deposition Process	0
A Novel Foundry Yield Model Using Critical Area Analysis	0
Feature Extraction From Diffraction Images Using a Spatial Light Modulator in Scatterometry	0
Quantitative Comparison of Simulation and Experiment Enabling a Lithography Digital Twin	0
Reducing Datacenter Compute Carbon Footprint by Harnessing the Power of Specialization: Principles, Metrics, Challenges and Opportunities	0
Boundless Engineering for Yield to Cope With the Complexity of High-Volume Manufacturing	0