IEEE Transactions on Semiconductor Manufacturing

Article	Citations
A Deep Convolutional Neural Network for Wafer Defect Identification on an Imbalanced Dataset in Semiconductor Manufacturing Processes	107
Deformable Convolutional Networks for Efficient Mixed-Type Wafer Defect Pattern Recognition	81
A Light-Weight Neural Network for Wafer Map Classification Based on Data Augmentation	52
Deep Learning-Based Domain Adaptation Method for Fault Diagnosis in Semiconductor Manufacturing	46
Active Learning of Convolutional Neural Network for Cost-Effective Wafer Map Pattern Classification	36
Self-Supervised Representation Learning for Wafer Bin Map Defect Pattern Classification	34
Semi-Supervised Multi-Label Learning for Classification of Wafer Bin Maps With Mixed-Type Defect Patterns	33
SMT2020—A Semiconductor Manufacturing Testbed	31
Memory-Augmented Convolutional Neural Networks With Triplet Loss for Imbalanced Wafer Defect Pattern Classification	28
Machine Learning-Based Detection Method for Wafer Test Induced Defects	27
Model-Free Adaptive Iterative Learning Control Method for the Czochralski Silicon Monocrystalline Batch Process	27
Variational Deep Clustering of Wafer Map Patterns	26
Data-Driven Framework for Tool Health Monitoring and Maintenance Strategy for Smart Manufacturing	26
Applying Data Augmentation and Mask R-CNN-Based Instance Segmentation Method for Mixed-Type Wafer Maps Defect Patterns Classification	22
Support Weighted Ensemble Model for Open Set Recognition of Wafer Map Defects	21
Advanced Quality Control (AQC) of Silicon Wafer Specifications for Yield Enhancement for Smart Manufacturing	21
CNNs Combined With a Conditional GAN for Mura Defect Classification in TFT-LCDs	18
Deep Learning Approach to Inverse Grain Pattern of Nanosized Metal Gate for Multichannel Gate-All-Around Silicon Nanosheet MOSFETs	18
Adversarial Defect Detection in Semiconductor Manufacturing Process	17
Optimal Feature Selection for Defect Classification in Semiconductor Wafers	17
Use of Plasma Information in Machine-Learning-Based Fault Detection and Classification for Advanced Equipment Control	16
Run-to-Run Control of Chemical Mechanical Polishing Process Based on Deep Reinforcement Learning	16
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching	16
Temporal Convolution-Based Long-Short Term Memory Network With Attention Mechanism for Remaining Useful Life Prediction	16
Integration of 650 V GaN Power ICs on 200 mm Engineered Substrates	15

Qualitative and Quantitative Analysis of Multi-Pattern Wafer Bin Maps	15
Two-Stage Transfer Learning for Fault Prognosis of Ion Mill Etching Process	14
Redefining Monitoring Rules for Intelligent Fault Detection and Classification via CNN Transfer Learning for Smart Manufacturing	14
Methodology for Important Sensor Screening for Fault Detection and Classification in Semiconductor Manufacturing	14
Mixed-Type Wafer Defect Recognition With Multi-Scale Information Fusion Transformer	12
Investigation of Dye-Sensitized Solar Cell With Photoanode Modified by TiO₂-ZnO Nanofibers	12
Development of a World Class Silicon Carbide Substrate Manufacturing Capability	12
Performance of Different Front-Opening Unified Pod (FOUP) Moisture Removal Techniques With Local Exhaust Ventilation System	11
Application of ANN for Fault Detection in Overhead Transport Systems for Semiconductor Fab	11
Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma	11
An Improved Capsule Network (WaferCaps) for Wafer Bin Map Classification Based on DCGAN Data Upsampling	11
Extracting Voltage Dependence of BTI-induced Degradation Without Temporal Factors by Using BTI-Sensitive and BTI-Insensitive Ring Oscillators	11
Development of Diaphragm and Microtunnel Structures for MEMS Piezoelectric Sensors	10
Wafer Bin Map Recognition With Autoencoder-Based Data Augmentation in Semiconductor Assembly Process	10
Data-Driven Model Predictive Control of Cz Silicon Single Crystal Growth Process With V/G Value Soft Measurement Model	10
Adaptive Cautious Regularized Run-to-Run Controller for Lithography Process	10
Locally Adaptive Statistical Background Modeling With Deep Learning-Based False Positive Rejection for Defect Detection in Semiconductor Units	9
Sensitivity Enhancement of SiO2Plasma Etching Endpoint Detection Using Modified Gaussian Mixture Model	9
Wafer Defect Pattern Labeling and Recognition Using Semi-Supervised Learning	9
Hidden Wafer Scratch Defects Projection for Diagnosis and Quality Enhancement	9
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment	9
Flow Analysis and Relative Humidity (RH) Measurement in the Horizontal Plane of a Front Opening Unified Pod (FOUP)	9
Noncyclic Scheduling of Multi-Cluster Tools With Residency Constraints Based on Pareto Optimization	9
Combination of Convolutional and Generative Adversarial Networks for Defect Image Demoiréing of Thin-Film Transistor Liquid-Crystal Display Image	8
TestDNA: Novel Wafer Defect Signature for Diagnosis and Pattern Recognition	8
Dynamic Clustering for Wafer Map Patterns Using Self-Supervised Learning on Convolutional Autoencoders	8
Machine Learning Models for Edge Placement Error Based Etch Bias	8
A Sequential Search Method of Dispatching Rules for Scheduling of LCD Manufacturing Systems	7
A Graph-Theoretic Approach for Spatial Filtering and Its Impact on Mixed-Type Spatial Pattern Recognition in Wafer Bin Maps	7
An On-Chip Micromachined Test Structure to Study the Tribological Behavior of Deep-RIE MEMS Sidewall Surfaces	7
Detection and Recognition of Mixed-Type Defect Patterns in Wafer Bin Maps via Tensor Voting	7
Discovery of Resource-Oriented Transition Systems for Yield Enhancement in Semiconductor Manufacturing	7
Planned Maintenance Schedule Update Method for Predictive Maintenance of Semiconductor Plasma Etcher	7
Similarity Search on Wafer Bin Map Through Nonparametric and Hierarchical Clustering	7
Optimizing the Isotropic Etching Nature and Etch Profile of Si, Ge and Si0.8Ge0.2 by Controlling CF4 Atmosphere With Ar and O2 Additives in ICP	7
Dependability Assessment of Transfer Length Method to Extract the Metal–Graphene Contact Resistance	7
Wafer Reflectance Prediction for Complex Etching Process Based on K-Means Clustering and Neural Network	6
Deep Learning-Based Positioning Error Fault Diagnosis of Wire Bonding Equipment and an Empirical Study for IC Packaging	6
One Class Process Anomaly Detection Using Kernel Density Estimation Methods	6
Synthesis of Lithography Test Patterns Using Machine Learning Model	6
Optical Proximity Correction Using Bidirectional Recurrent Neural Network With Attention Mechanism	6
Fuzzy Selection Model for Quality-Based IC Packaging Process Outsourcers	6
Unrelated Parallel Machine Photolithography Scheduling Problem With Dual Resource Constraints	6
Data Visualization of Anomaly Detection in Semiconductor Processing Tools	6
Atomic Layer Processes for Material Growth and Etching—A Review	6
Performance-Based Active Wafer Clamp Design for Wafer Heating Effects in EUV Lithography	5
A Study on the Impact of Mid-Gap Defects on Vertical GaN Diodes	5
Layout Pattern Synthesis for Lithography Optimizations	5
A Simple Model of Capacity Contention During New Product Introductions	5
Attention Mechanism-Based Root Cause Analysis for Semiconductor Yield Enhancement Considering the Order of Manufacturing Processes	5

Influence and Suppression of Harmful Effects Due to By-Product in CVD Reactor for 4H-SiC Epitaxy	5
The Environmental Footprint of IC Production: Review, Analysis, and Lessons From Historical Trends	5
Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement	5
CMP Process Optimization Engineering by Machine Learning	5
Minimizing Convolutional Neural Network Training Data With Proper Data Augmentation for Inline Defect Classification	4
Customer Order Behavior Classification Via Convolutional Neural Networks in the Semiconductor Industry	4
Statistical Extraction of Normally and Lognormally Distributed Model Parameters for Power MOSFETs	4
An Advanced Finite Element Model for BiCMOS Process Oriented Ultra-Thin Wafer Deformation	4
Decrease in Particles by Substituting Conductive Magnesium-Oxide Based Ceramics for Conventional Electrode Materials Used in Process Chamber of Plasma Etching	4
Edge Effects of an Eddy-Current Thickness Sensor During Chemical Mechanical Polishing	4
Nano-Scale Depth Profiles of Electrical Properties of Phosphorus Doped Silicon for Ultra-Shallow Junction Evaluation	4
Plasma Induced Damage Reduction of Ultra Low-k Dielectric by Using Source Pulsed Plasma Etching for Next BEOL Interconnect Manufacturing	4
Feature Selection for Waiting Time Predictions in Semiconductor Wafer Fabs	4
A Real-Time Monitoring Framework for Wafer Fabrication Processes With Run-to-Run Variations	4
Efficient and Refined Deep Convolutional Features Network for the Crack Segmentation of Solar Cell Electroluminescence Images	4
Measurement and Modeling of Ambient-Air-Induced Degradation in Organic Thin-Film Transistor	4
Optimization of Nafion Polymer Electrolyte Membrane Design and Microfabrication	4
Improvement of Multi-Lines Bridge Defect Classification by Hierarchical Architecture in Artificial Intelligence Automatic Defect Classification	4
CNN-Based Layout Segment Classification for Analysis of Layout-Induced Failures	4
Exploiting 2D Coordinates as Bayesian Priors for Deep Learning Defect Classification of SEM Images	4
Data-Driven and Mechanism-Based Hybrid Model for Semiconductor Silicon Monocrystalline Quality Prediction in the Czochralski Process	4
A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge	4
An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study	4
Shear Force Classification Before Wire Bonding Based on Probe Mark 2-D Images Using Machine Learning Methods	3
A New Stage-Wise Control Release Policy for Semiconductor Wafer Fabrication Systems	3
Which Spare Parts Service Measure to Choose for a Front-End Wafer Fab?	3
Study on Mechanical Cleavage Mechanism of GaAs via Anisotropic Stress Field and Experiments	3
Semiconductor Defect Pattern Classification by Self-Proliferation-and-Attention Neural Network	3
Prediction of Highly Imbalanced Semiconductor Chip-Level Defects in Module Tests Using Multimodal Fusion and Logit Adjustment	3
Improvement of Virtual Diagnostics Performance for Plasma Density in Semiconductor Etch Equipment Using Variational Auto-Encoder	3
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)	3
Test Structures for Developing Packaging for Implantable Sensors	3
Advanced Low Pin Count Test Architecture for Efficient Multi-Site Testing	3
Improvement of ZnO/Si Heterojunctions With a Coaxial Circular Transmission Line Model Applicable to Both Ohmic and Schottky	3
A Method to Determine the Electret Charge Potential of MEMS Vibrational Energy Harvester Using Pure-White Noise	3
Precise Pattern Alignment for Die-to-Database Inspection Based on the Generative Adversarial Network	3
Optimization and Application of TiO2 Hollow Microsphere Modified Scattering Layer for the Photovoltaic Conversion Efficiency of Dye-Sensitized Solar Cell	3
Understanding and Improving Virtual Metrology Systems Using Bayesian Methods	3
Investigation of the HfON Tunneling Layer of MONOS Device for Low-Voltage and High-Speed Operation Nonvolatile Memory Application	3
Quality-Oriented Statistical Process Control Utilizing Bayesian Modeling	3
Process Optimization and Modeling of the Silicon Growth in Trichlorosilane-Hydrogen Gas Mixture in a Planetary CVD Reactor	3
Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging	3
Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Robot Waiting Time	3
EveSyncIAI: Event Synchronization Industrial Augmented Intelligence for Fault Diagnosis	3
Color Difference Detection of Polysilicon Wafers Using Optimized Support Vector Machine by Magnetic Bacteria Optimization Algorithm With Elitist Strategy	3
Abnormal Silicon-Germanium (SiGe) Epitaxial Growth in FinFETs	3
Matheuristics for Qualification Management Decisions in Wafer Fabs	3
Semi-Supervised Learning for Simultaneous Location Detection and Classification of Mixed-Type Defect Patterns in Wafer Bin Maps	3
Improved Color Defect Detection With Machine Learning for After Develop Inspections in Lithography	3
Effective Variational-Autoencoder-Based Generative Models for Highly Imbalanced Fault Detection Data in Semiconductor Manufacturing	2
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning	2
A Hybrid Method of Frequency and Spatial Domain Techniques for TFT-LCD Circuits Defect Detection	2
Vehicle Look-Ahead Dispatching for Overhead Hoist Transport System in Semiconductor Manufacturing	2
Low-Destructive Processing of Single Crystal Aluminum Nitride Based on Sol-Gel Polishing Tool	2
Investigation Into Low Frequency Response of Acoustic MEMS for Determination of Failure Modes	2
A One-Shot Learning Approach for Similarity Retrieval of Wafer Bin Maps With Unknown Failure Pattern	2
A Self-Test Method of Structural Failures of Uncooled Infrared Focal Plane Array	2
A Practical Approach for Managing End-of-Life Systems in Semiconductor Manufacturing Using Health Index	2
Enhancement of Diffraction-Based Overlay Model for Overlay Target With Asymmetric Sidewall	2
Impact of Water Content in NMP on Ohmic Contacts in GaN HEMT Technologies	2
Investigation of Variation in On-Si On-Wafer TRL Calibration in Sub-THz	2
Increasing the Utilization of Deep Neural Networks for SEM Measurements Through Multiple Task Formulation and Visualization	2
Double Coating Process Using the Single Photoresist and the Thickness Prediction	2
A Novel Automatic Probe-to-Pad Alignment Error Correction Approach	2
Anomaly Detection in Batch Manufacturing Processes Using Localized Reconstruction Errors From 1-D Convolutional AutoEncoders	2
Photovoltaic Measurement Under Different Illumination of the Dye-Sensitized Solar Cell With the Photoanode Modified by Fe2O3/g-C3N4/TiO2 Heteroge	2
Practical Queueing Models for Preventive Maintenance Plan Optimization: Multiple Maintenance Types and Numerical Studies	2
Regression Model for the Specific Contact Resistance of SiC Ohmic Contacts	2
Test Structure for Measuring the Selectivity in XeF2 and HF Vapour Etch Processes	2
Modeling and Optimizing the Impact of Process and Equipment Parameters in Sputtering Deposition Systems Using a Gaussian Process Machine Learning Framework	2
TestDNA-E: Wafer Defect Signature for Pattern Recognition by Ensemble Learning	2
Dynamic Down-Selection of Measurement Markers for Optimized Robust Control of Overlay Errors in Photolithography Processes	2
Chamber and Recipe-Independent FDC Indicator in High-Mix Semiconductor Manufacturing	2
Numerical Modeling and Control of the Dynamic Single Silicon Crystal Growth Process	2
Joint Dynamic Dispatching and Preventive Maintenance for Unrelated Parallel Machines With Equipment Health Considerations	2
Imaging of Metal Ions and Nanoparticles on Structured Silicon Surface Using Laser Ablation-Inductively Coupled Plasma-Mass Spectrometer for Contamination Control in Semiconductor Manufacturing Process	2
Sequential Residual Learning for Multistep Processes in Semiconductor Manufacturing	2
A Fine-Grained, End-to-End Feature-Scale CMP Modeling Paradigm Based on Fully Convolutional Neural Networks	2
High Accuracy Simulation of Silicon Oxynitride Film Grown by Plasma Enhanced Chemical Vapor Deposition	2
Conduction and Electric Field Effect in Ultra-Thin Tungsten Films	2

An Investigation of Edge Bead Removal Width Variability, Effects and Process Control in Photolithographic Manufacturing	2
Image-Based Defect Classification for TFT-LCD Array via Convolutional Neural Network	2
Self-Assured Deep Learning With Minimum Pre-Labeled Data for Wafer Pattern Classification	1
Investigations of Fast Vacuum Pump-Down Processes Between Parallel Isothermal Disks	1
Resistance Measurement Platform for Statistical Analysis of Emerging Memory Materials	1
Wafer Scratch Pattern Reconstruction for High Diagnosis Accuracy and Yield Optimization	1
On the Fly Ellipsometry Imaging for Process Deviation Detection	1
Study on Polishing of Polycrystalline AlN Using Sol–Gel Polishing Tool	1
A Deep Learning Analysis Framework for Complex Wafer Bin Map Classification	1
Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review	1
Layout Feature Extraction Using CNN Classification in Root Cause Analysis of LSI Defects	1
Two Transistors Voltage-Measurement-Based Test Structure for Fast MOSFET Device Mismatch Characterization	1
Commonality Analysis for Detecting Failures Caused by Inspection Tools in Semiconductor Manufacturing Processes	1
Optimizing Process Recipe for Critical Dimensions in Dry Etching Process	1
Wireless Measurement of the Degradation Rates of Thin Film Bioresorbable Metals Using Reflected Impedance	1
Interface Characteristics, Erosion Behavior, and Thermal Shock Resistance of Al–Ta Alloy Coatings Produced by Arc Spraying	1
Modular Fluid Delivery System Architectures Drive Configurability Options, Enhance Semiconductor Manufacturing Equipment Productivity, and Improve Process Performance	1
Wafer Lot Assignment for Parallel-Producing Tools Based on Heuristic Clustering Algorithm	1
A Modified Lasso Model for Yield Analysis Considering the Interaction Effect in a Multistage Manufacturing Line	1
2020 Index IEEE Transactions on Semiconductor Manufacturing Vol. 33	1
Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices Based on Image Recognition	1
New Process Integration of Sequential Phosphorus-Doped Silicon for Trench Field Plate Power MOSFETs	1
RoIA: Region of Interest Attention Network for Surface Defect Detection	1
Change Qualification Framework in Semiconductor Manufacturing	1
Data-Driven Production Planning Models for Wafer Fabs: An Exploratory Study	1
Experimental Extraction of Impact of Depletion Capacitance on Low Frequency Noise in Sub-Micron nMOSFETs With Reverse Body Bias	1
2020 IEEE BiCMOS and Compound Semiconductor Integrated Circuits and Technology Symposium (BCICTS)	1
Improving Liquid Film Thickness Uniformity of Semiconductor Etching Equipment Using Flow Field Visualization and CFD Simulation	1
Automated Visual Inspection of Defects in Transparent Display Layers Using Light-Field 3-D Imaging	1
Multiobjective Order Promising for Outsourcing Supply Network of IC Design Houses	1
Extension of CD-TEM Towards 3D Elemental Mapping	1
Fabrication of On-Silicon Aperture Coupled Patch Antenna Through Micromachining and Cu-Cu Thermocompression Bonding	1
FDC Based on Neural Network With Harmonic Sensor to Prevent Error of Robot	1
Manufacturing of 3D Helical Microswimmer by AFM Micromanipulation for Microfluidic Applications	1
Fast and Precise Temperature Control for a Semiconductor Vertical Furnace via Heater-Cooler Integration	1
A Novel ML Augmented DRC Framework for Identification of Yield Detractor Patterns	1
Correlated Bayesian Co-Training for Virtual Metrology	1
Nondestructive Detection of Buried and Latent Defects by Negative Mode E-Beam Inspection	1
Characterization of eFuse Programming for Varying RF BiCMOS Technology Silicides	1
Applying Taguchi’s Method, Artificial Neural Network and Genetic Algorithm to Reduce the CoSi₂ Resistance Deviation of DRAM Products	1
Table of contents	0
Surface Copper Voids in BEOL Copper Metal Layers	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
Parametric Optimization for Moisture Infiltration Prevention Into a FOUP (Front Opening Unified Pod)	0
A Novel Multiscale Residual Aggregation Network-Based Image Super-Resolution Algorithm for Semiconductor Defect Inspection	0
Table of Contents	0
Table of Contents	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
BCICTS 2023 Call for Papers	0
Table of Contents	0
Front cover	0
Front Cover	0
Editorial	0
Study on Measurement Method of Microscopic ζ Potential	0
IEEE Transactions on Semiconductor Manufacturing publication information	0
Call for Papers for RFIC 2023	0
Editorial	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on New simulation methodologies for next-generation TCAD tools	0
Effect of SiO2 Interfacial Layer Reduction on MFSFET With 5 nm-Thick Ferroelectric Nondoped HfO2 by Deposition Rate Control	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
Front cover	0
Front Cover	0
A Novel Foundry Yield Model Using Critical Area Analysis	0
A Numerical Study on the Effects of Purge and Air Curtain Flow Rates on Humidity Invasion Into a Front Opening Unified Pod (FOUP)	0
Watermark Detection in CMOS Image Sensors Using Cosine-Convolutional Semantic Networks	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"	0
Leveraging Machine Learning for Capacity and Cost on a Complex Toolset: A Case Study	0
IEEE Transactions on Semiconductor Manufacturing Publication Information	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
Process Optimization and Microwave Model of GaAs Photodiodes for 50 Gb/s Optical Links	0
2021 EDS Education Award Call for Nominations	0
Table of contents	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
Table of contents	0
Table of Contents	0
IEEE Transactions on Semiconductor Manufacturing Publication Information	0
IEEE Transactions on Semiconductor Manufacturing publication information	0
Editorial	0
TCAD-Enabled Machine Learning—An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication	0
ℓ₁ Trend Filtering-Based Change Point Detection for Pumping Line Balance of Deposition Equipment	0
Advanced Process Control System for Trench Shape of Power Devices	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on New simulation methodologies for next-generation TCAD tools	0
A Lightweight Chip-Scale Chemical Mechanical Polishing Model Based On Polynomial Network	0
Bayesian Nonparametric Classification for Incomplete Data With a High Missing Rate: an Application to Semiconductor Manufacturing Data	0
IEEE Transactions on Semiconductor Manufacturing Publication Information	0
Defect Localization Approach for Wafer-to-Wafer Hybrid Bonding Interconnects	0
Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference	0
Table of contents	0
A Novel Method to Quantify Conditioner-to-Conditioner Variation and Predict Conditioner Lifetime and Process Failure Mode in Chemical Mechanical Planarization (CMP) Environment	0
IEEE Transactions on Semiconductor Manufacturing publication information	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Solid-State Image Sensors"	0
Preparation and Application of Sol-Gel Polishing Pad for Polishing CVD Single Crystal Diamond at High Speed	0
The Effect of Si Surface Flattening Process on the MISFET With High-k HfNx Multilayer Gate Dielectrics	0
Regularized Recursive Solutions for Prediction of Aberrations Associated With Projection Optics	0
Supply Chain Planning for IC Design House Back-End Production Network With Turnkey Service	0