OOIR: Observatory of International Research

Papers

(The H4-Index of IEEE Transactions on Semiconductor Manufacturing is 18. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-11-01 to 2025-11-01.)

Article	Citations
Minimization of Particle Deposition on Wafers Caused by the Pressure Change in the Vacuum Chamber Through a Pressure Control Regulation Process	46
Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference	41
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"	40
Fast and High-Precision Temperature Control in Semiconductor Vertical Furnace via Iterative Experiments	36
IEEE Transactions on Semiconductor Manufacturing Publication Information	36
Call for Nominations for Editor-in-Chief: IEEE Electron Device Letters	35
Fabrication of Porous Cu–Sn Microbumps for Low-Temperature Cu–Cu Bonding	35
Investigations of Fast Vacuum Pump-Down Processes Between Parallel Isothermal Disks	32
Defect Reduction and Line Width Roughness Improvement by Using a Post Precoat Treatment in Waferless Chamber Conditioning	32
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning	26
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment	25
Call for Papers for IEEE Transactions on Materials for Electron Devices	23
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	23
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)	23
Level Set Simulation on Single Wafer Wet Processing Improvement	21
Advanced Process Control System for Trench Shape of Power Devices	20
Single-Mask Fabrication of Sharp SiO_x Nanocones	19
Editorial	19
Hotspot Prediction: SEM Image Generation With Potential Lithography Hotspots	18