IEEE Transactions on Semiconductor Manufacturing

Papers
(The H4-Index of IEEE Transactions on Semiconductor Manufacturing is 19. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2020-11-01 to 2024-11-01.)
ArticleCitations
Deformable Convolutional Networks for Efficient Mixed-Type Wafer Defect Pattern Recognition108
A Light-Weight Neural Network for Wafer Map Classification Based on Data Augmentation60
Self-Supervised Representation Learning for Wafer Bin Map Defect Pattern Classification47
Semi-Supervised Multi-Label Learning for Classification of Wafer Bin Maps With Mixed-Type Defect Patterns41
Model-Free Adaptive Iterative Learning Control Method for the Czochralski Silicon Monocrystalline Batch Process37
Machine Learning-Based Detection Method for Wafer Test Induced Defects34
SMT2020—A Semiconductor Manufacturing Testbed32
Memory-Augmented Convolutional Neural Networks With Triplet Loss for Imbalanced Wafer Defect Pattern Classification31
Data-Driven Framework for Tool Health Monitoring and Maintenance Strategy for Smart Manufacturing30
Support Weighted Ensemble Model for Open Set Recognition of Wafer Map Defects27
Applying Data Augmentation and Mask R-CNN-Based Instance Segmentation Method for Mixed-Type Wafer Maps Defect Patterns Classification27
Temporal Convolution-Based Long-Short Term Memory Network With Attention Mechanism for Remaining Useful Life Prediction27
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching25
Advanced Quality Control (AQC) of Silicon Wafer Specifications for Yield Enhancement for Smart Manufacturing23
CNNs Combined With a Conditional GAN for Mura Defect Classification in TFT-LCDs22
Adversarial Defect Detection in Semiconductor Manufacturing Process22
Deep Learning Approach to Inverse Grain Pattern of Nanosized Metal Gate for Multichannel Gate-All-Around Silicon Nanosheet MOSFETs21
Optimal Feature Selection for Defect Classification in Semiconductor Wafers21
Redefining Monitoring Rules for Intelligent Fault Detection and Classification via CNN Transfer Learning for Smart Manufacturing20
Use of Plasma Information in Machine-Learning-Based Fault Detection and Classification for Advanced Equipment Control19
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