IEEE Transactions on Semiconductor Manufacturing

Papers
(The H4-Index of IEEE Transactions on Semiconductor Manufacturing is 16. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2022-08-01 to 2026-08-01.)
ArticleCitations
Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference59
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"48
IEEE Transactions on Semiconductor Manufacturing Publication Information41
Call for Nominations for Editor-in-Chief: IEEE Electron Device Letters37
Fabrication of Porous Cu–Sn Microbumps for Low-Temperature Cu–Cu Bonding31
Investigations of Fast Vacuum Pump-Down Processes Between Parallel Isothermal Disks29
Scalable Multi-Site Test Architecture for Chiplet-Based Systems on ATE Platforms25
Minimization of Particle Deposition on Wafers Caused by the Pressure Change in the Vacuum Chamber Through a Pressure Control Regulation Process24
Fast and High-Precision Temperature Control in Semiconductor Vertical Furnace via Iterative Experiments23
High-precision Acoustic Image Reconstruction for Uneven Surfaces using a YOLO-based Approach21
Defect Reduction and Line Width Roughness Improvement by Using a Post Precoat Treatment in Waferless Chamber Conditioning20
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning20
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"17
Editorial17
Call for Papers for IEEE Transactions on Materials for Electron Devices17
Mitigation of Dopant Deactivation in Heavily Phosphorus-doped Silicon via Nitrogen Co-implantation17
Grain Morphology Effects on Void Formation and Electromigration-Induced Failure in Copper Interconnects16
Run-to-run control of chemical mechanical polishing head with adjustable partition pressure based on deep reinforcement learning16
Nondestructive Detection of Buried and Latent Defects by Negative Mode E-Beam Inspection16
Single-Mask Fabrication of Sharp SiOx Nanocones16
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