IEEE Transactions on Semiconductor Manufacturing

Papers
(The H4-Index of IEEE Transactions on Semiconductor Manufacturing is 18. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-05-01 to 2025-05-01.)
ArticleCitations
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"48
IEEE Transactions on Semiconductor Manufacturing Publication Information41
Investigations of Fast Vacuum Pump-Down Processes Between Parallel Isothermal Disks40
Minimization of Particle Deposition on Wafers Caused by the Pressure Change in the Vacuum Chamber Through a Pressure Control Regulation Process33
Fabrication of Porous Cu-Sn Microbumps for Low Temperature Cu-Cu Bonding33
Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference33
Call for Papers for IEEE Transactions on Materials for Electron Devices28
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning28
Defect Reduction And Line Width Roughness Improvement By Using A Post Precoat Treatment In Waferless Chamber Conditioning28
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment28
Table of contents27
IEEE Transactions on Semiconductor Manufacturing publication information25
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"21
Nondestructive Detection of Buried and Latent Defects by Negative Mode E-Beam Inspection20
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)19
A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge19
A Yield Prediction Method Based on Nonparametric Statistical and Comparison With a Networks Method18
Level Set Simulation on Single Wafer Wet Processing Improvement18
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