Journal of Vacuum Science & Technology A

Article	Citations
Implementation of an artificial spiking neuron with photoreceptor functionality using gas discharge tubes	85
Plasma enhanced atomic layer etching of high-k layers on WS2	67
Correlating chemical and electronic states from quantitative photoemission electron microscopy of transition-metal dichalcogenide heterostructures	44
Extreme atomic-scale surface roughening: Amino acids on Ag on Au(111)	41
Role of nanoscale surface defects on Sn adsorption and diffusion behavior on oxidized Nb(100)	37
Study of synthesis strategies to improve the electrical properties of magnetron sputtered copper oxide thin films	36
Use of in situ electrical conductance measurements to understand the chemical mechanisms and chamber wall effects during vapor phase infiltration doping of poly(aniline) with TiCl4 + H2O	35
Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition	32
Deposition of sputtered NiO as a p-type layer for heterojunction diodes with Ga2O3	31
Applications and mechanisms of anisotropic two-step Si3N4 etching with hydrogen plasma conditioning	27
Size distribution of clusters and nucleation preference of trimers during SiC (0001) surface epitaxial growth under low coverage	27
Comparing sputter rates, depth resolution, and ion yields for different gas cluster ion beams (GCIB): A practical guide to choosing the best GCIB for every application	26
Effects of duty cycle and nitrogen flow rate on the mechanical properties of (V,Mo)N coatings deposited by high-power pulsed magnetron sputtering	26
Core-shell metallic nanotube arrays for highly sensitive surface-enhanced Raman scattering (SERS) detection	25
Conformal coating of macroscopic nanoparticle compacts with ZnO via atomic layer deposition	24
Hardness, adhesion, and wear behavior of magnetron cosputtered Ti:Zr-O-N thin films	24
Peak intensities in Auger electron spectroscopy for quantification: Relationship between differentiated spectral intensities and direct peak areas	23
Transport and trap states in proton irradiated ultra-thick κ-Ga2O3	23
Tailoring structure, morphology, and tribo-mechanical properties of HiPIMS-deposited CrxNy coatings for enhanced performance in wear and corrosion protection	22
Friction and wear behavior of C implanted copper via ion beam-assisted bombardment	22
Nitrogen-incorporated tetrahedral amorphous carbon optically transparent thin film electrode	22
Kinetic Monte Carlo study on the effect of growth conditions on the epitaxial growth of 3C–SiC (0001) vicinal surface	22
Erratum: “MoS2-assisted growth of highly-oriented AlN thin films by low-temperature van der Waals epitaxy” [J. Vac. Sci. Technol. A 42, 050401 (2024)]	22
Zirconia-titania-doped tantala optical coatings for low mechanical loss Bragg mirrors	22
Enhancing chemical vapor deposition growth and fabrication techniques to maximize hole conduction in tungsten diselenide for monolithic CMOS integration	20

Erratum: “Microscopic origins of radiative performance losses in thin-film solar cells at the example of (Ag,Cu)(In,Ga)Se2 devices” [J. Vac. Sci. Technol. A 42, 022803 (2024)]	19
Self-powered solar blind ultraviolet photodetector based on amorphous (In0.23Ga0.77)2O3/bixbyite (In0.67Ga0.33)2O3 heterojunction	18
Understanding the unique optical and vibrational signatures of sequential infiltration synthesis derived indium oxyhydroxide clusters for CO2 absorption	18
On the interplay between a novel iron and iron-carbide atomic layer deposition process, the carbon nanotube growth, and the metal–carbon nanotube coating properties on silica substrates	17
Retarded solid state dewetting of thin bismuth films with oxide capping layer	17
High crystalline quality homoepitaxial Si-doped β-Ga2O3(010) layers with reduced structural anisotropy grown by hot-wall MOCVD	17
Using auxiliary electrochemical working electrodes as probe during contact glow discharge electrolysis: A proof of concept study	16
Analysis of pulsed direct current reactive magnetron sputtering on a silicon target	16
Novel principal component analysis tool based on python for analysis of complex spectra of time-of-flight secondary ion mass spectrometry	16
Spin- and time-resolved photoelectron spectroscopy and diffraction studies using time-of-flight momentum microscopes	15
Enhancing minority carrier lifetime in Ge: Insights from HF and HCl cleaning procedures	15
Approaching ultrathin VO2 films on sapphire (001) substrates by biased reactive sputtering: Characteristic morphology and its effect on the infrared-light switching	15
Hot corrosion behavior of NiCoCrAlY laser cladding coating on 17-4PH stainless steel before and after high-current pulsed electron beam irradiation	15
Amorphous carbon thin films: Mechanisms of hydrogen incorporation during magnetron sputtering and consequences for the secondary electron emission	15
Aminosilane small molecule inhibitors for area-selective deposition: Study of substrate-inhibitor interfacial interactions	15
Nonpyrophoric alternative to trimethylaluminum for the atomic layer deposition of Al2O3	15
Novel high-efficiency plasma nitriding process utilizing a high power impulse magnetron sputtering discharge	15
Surface temperature of a 2 in. Ti target during DC magnetron sputtering	14
In situ studies on atomic layer etching of aluminum oxide using sequential reactions with trimethylaluminum and hydrogen fluoride	14
Preparation of stable and highly hydrophobic coatings via one-step spray method and study of their anti-icing performance	14
Enhanced plasma resistance of uniform ALD-Y2O3 thin films for chamber components’ coatings	14
Anisotropic magnetoresistance and planar Hall effect in correlated and topological materials	14
Surface characterization of ultrathin atomic layer deposited molybdenum oxide films using high-sensitivity low-energy ion scattering	13
Improved growth quality of epitaxial ZnTe thin films on Si (111) wafer with ZnSe buffer layer	13
Depth profile reconstruction of YCrO3/CaMnO3 superlattices by near total reflection hard x-ray photoelectron spectroscopy	13
Silicon-ion implantation induced doping and nanoporosity in molecular beam epitaxy grown GaSb epitaxial films	13
Detection of H2 facilitated by ionic liquid gating of tungsten oxide films	13
Methyl-methacrylate based aluminum hybrid film grown via three-precursor molecular layer deposition	12
Ordered deficient perovskite La2/3TiO3 films grown via molecular beam epitaxy	12
Stability investigation of Eu3+ doped CaF2 thin film with ZnO coating under electron beam irradiation	12
Dependence of persistent photoconductivity on the thickness of β-Ga2O3 thin film photodetectors on c-plane sapphire via magnetron sputtering	12
Design and fabrication of color-generating nitride based thin-film optical filters for photovoltaic applications	12
Modeling scale-up of particle coating by atomic layer deposition	12
Evaluation of stress and elastic energy relief efficiency in a hard coating with a metal interlayer—Using TiN/Ti as a model system	12
Ga+-focused ion beam damage in n-type Ga2O3	12
Band offsets at metalorganic chemical vapor deposited β-(AlxGa1−x)2O3/β-Ga2O3 interfaces—Crystalline orientation dependence	12
Effects of thickness and interlayer on optical properties of AlN films at room and high temperature	12
Significance of plasma-surface interactions in the etch behavior of low-k materials	12
Method for extracting the intrinsic diffusion coefficient from grain boundary diffusion depth profile	12
Structure and corrosion resistance of electron-beam-strengthened and micro-arc oxidized coatings on magnesium alloy AZ31	12
Enhancement of CrN-polyetherimide adhesion by hardening substrate’s surface	12
Polydimethylsiloxane surface irradiated by nitrogen ions: Influence of low molecular fractions	11
Deposition of tungsten oxide films by reactive magnetron sputtering on different substrates	11
Comprehensive ion-molecule reactive collision model for processing plasmas	11
Origin of enhanced thermal atomic layer etching of amorphous HfO2	11
Room-temperature and high-quality HfO2/SiO2 gate stacked film grown by neutral beam enhanced atomic layer deposition	11
Metalorganic chemical vapor deposition of (100) β-Ga2O3 on on-axis Ga2O3 substrates	11
Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride	11
Engineering ordered arrangements of oxygen vacancies at the surface of superconducting La2CuO4 thin films	11
Effect of anti-reflection coating on the performance of silicon solar cells with nanocrystalline quantum dots downshifting film	11

Effect of atomic layer annealing in plasma-enhanced atomic layer deposition of aluminum nitride on silicon	11
Comparison of triethylgallium and diethylgallium ethoxide for β-Ga2O3 growth by metalorganic vapor phase epitaxy	10
Correlation of interfacial and dielectric characteristics in atomic layer deposited Al2O3/TiO2 nanolaminates grown with different precursor purge times	10
Radiation damage effects on electronic and optical properties of β-Ga2O3 from first-principles	10
Enhancing laser-driven flyer velocity by optimizing of modulation period of Al/Ti reactive multilayer films	10
Nucleation and quantum confinement of nano-platelet Bi2–Bi2Se3	10
Series resonance effects of a variable inductor termination on the nonpowered electrode in capacitively coupled plasmas	10
Photoemission study of plutonium oxycarbide	10
Molybdenum erosion in iodine plasma at hollow cathode conditions	10
Plasma induced damage on AlGaN/GaN heterostructure during gate opening for power devices	10
Preparation and hot corrosion properties of the AlCrFeCoNi0.5Si high-entropy alloy coating deposited by the air plasma spraying	10
Micromechanical properties of micro- and nanocrystalline CVD diamond thin films with gradient microstructures and stresses	10
Selective vapor sensors with thin-film MoS2-coated optical fibers	10
XPS investigation of monoatomic and cluster argon sputtering of zirconium dioxide	9
Two step synthesis of ultrathin transition metal tellurides	9
Influence of annealing temperature of nickel oxide as hole transport layer applied for inverted perovskite solar cells	9
Quantifying the resonant photoemission of radiation damaged Pu	9
Stoichiometry tuning of TaN films through ion treatment: Molecular dynamics study	9
Optical emission spectroscopy and Langmuir probe studies of an intermediate pressure, supersonic microplasma jet deposition source	9
Experimental study of transport properties of Weyl semimetal LaAlGe thin films grown by molecular beam epitaxy	9
Disclosing the response of the surface electronic structure in SrTiO3 (001) to strain	9
Substrate induced composition change during Ge2Sb2Te5 atomic layer deposition and study of initial reactions on SiO2 surface	9
Spatial atomic layer deposition: Transport-reaction modeling and experimental validation of film geometry	9
Nitrogen ion-implanted resistive regions for edge termination of vertical Ga2O3 rectifiers	9
My times with Bill Wolfer	9
Plasma enhanced atomic layer deposition of manganese nitride thin film from manganese amidinate and ammonia plasma	9
Probing copper-boron interactions in the Cu2B8− bimetallic cluster	9
Gliding arc discharge plasma treatment for promoting germination of wheat seed at low ambient temperature	9
Surface plasmon resonance is possible in an optical fiber tapered to a point	9
Quantification in high-energy resolution Auger electron spectroscopy; Proposal of a reference target convolution technique for direct spectra	8
Erratum: “Ion beam assisted chemical vapor deposition of hybrid coatings—Process diagnostics and mechanisms” [J. Vac. Sci. Technol. A 39, 063003 (2021)]	8
Investigations on Ba diffusion and SiO evaporation during BaSi2 film formation on Si substrates by thermal evaporation	8
In situ diagnostics of the Si etching structures profile in ICP SF6/C4F8 plasma: Macrostructures	8
Bottom angle control mechanism and optimization of slanted gratings for optical applications	8
Effect of additive type and amount on structural and mechanical properties of ZrO2/B4C/Al2O3/SiC added Al 1050 based composite structures produced by vacuum infiltration—Comparative study	8
Shake loss intensities in x-ray photoelectron spectroscopy: Theory, experiment, and atomic composition accuracy for MgO and related compounds	8
Precise control of time-varying effusion cell flux in molecular beam epitaxy	8
Study of microstructure and mechanical properties of cBN coatings on nanocrystalline diamond transition layer prepared by magnetron sputtering	8
Moisture barrier coating of AlN and Al2O3 multilayer film prepared by low-temperature atomic layer deposition	8
Insight into the effect of coexistence of CO2 and H2 on stoichiometric and defective PuO2 surfaces hydriding from first-principles study	8
Scanning electron microscopy imaging of multilayer-doped GaN: Effects of surface band bending, surface roughness, and contamination layers on doping contrast	8
Continuous wave laser-assisted evaporation of halide perovskite thin films from a single stoichiometric source	8
Bio-tribocorrosion resistance of CoB–Co2B and Co2B layers on CoCrMo alloy	8
Room-temperature atomic layer deposition of iron oxide using plasma excited humidified argon	8
Deposition rate and optical emissions in niobium oxide processes by reactive sputtering	8
Plasma-enhanced atomic layer deposition of crystalline GaN thin films on quartz substrates with sharp interfaces	8
Chemical mechanism for nucleation enhancement in atomic layer deposition of Pt by surface functionalization	8
Photoelectron diffraction: Early demonstrations and alternative modes	8
Microstructure and properties of laser cladding NiFeCrCoMo high entropy alloy coating on the surface of TP347 steel	8
Spin-related negative magnetoresistance in germanium films	8
Gas source molecular epitaxy of Ge1−ySny materials and devices using high order Ge4H10 and Ge5H12 hydrides	8
High throughput multiplexing reactor design for rapid screening of atomic/molecular layer deposition processes	8
Atomic step disorder on polycrystalline surfaces leads to spatially inhomogeneous work functions	7
Low-temperature ALD of metallic cobalt using the CoCOhept precursor: Simulation-assisted process development for deposition on temperature sensitive 3D-structures	7
High-quality GaN thin film deposition at low temperature by ECR plasma-assisted sputter deposition method and its dependence of sapphire substrate misorientation angle	7
Improved properties of atomic layer deposited ruthenium via postdeposition annealing	7
Effect of interface roughness on the tribo-corrosion behavior of diamond like carbon coatings on titanium alloy	7
Thermal atomic layer etching of cobalt using sulfuryl chloride for chlorination and tetramethylethylenediamine or trimethylphosphine for ligand addition	7
Effect of vacuum heat treatment on tribological properties of metal-doped CuS/MoS2 coating	7
Transparent conductive properties of TiON thin films	7
Wear and corrosion resistance of zinc-oxide and zirconium-oxide coated WE43 magnesium alloy	7
Comparison of three titanium-precursors for atomic-layer-deposited TiO2 for passivating contacts on silicon	7
Superconformal chemical vapor deposition using plasma-generated atomic species as a consumable growth inhibitor	7
Conformal and superconformal chemical vapor deposition of silicon carbide coatings	7
Uppsala and Berkeley: Two essential laboratories in the development of modern photoelectron spectroscopy	7
On the growth kinetics, texture, microstructure, and mechanical properties of tungsten carbonitride deposited by chemical vapor deposition	7
Spatiotemporal evolution of excitation temperature of vacuum arcs by tomography	7
MOS structure with as-deposited ALD Al2O3/4H-SiC heterostructure with high electrical performance: Investigation of the interfacial region	7
Revealing the mechanism of interfacial adhesion enhancement between the SiO2 film and the GaAs substrate via plasma pre-treatments	7
The growth of self-intercalated Nb1+xSe2 by molecular beam epitaxy: The effect of processing conditions on the structure and electrical resistivity	7
Synthesis and electrical behavior of VO2 thin films grown on SrRuO3 electrode layers	7
Role of SiCl4 addition in CH3F/O2 based chemistry for Si3N4 etching selectively to SiO2, SiCO, and Si	7
Zn:DLC films via PECVD-HIPIMS: Evaluation of antimicrobial activity and cytotoxicity to mammalian cells	7
Effect of magnetic field on capacitively coupled plasma modulated by electron beam injection	7
Effect of data preprocessing and machine learning hyperparameters on mass spectrometry imaging models	7
Influence of HfO2 and SiO2 interfacial layers on the characteristics of n-GaN/HfSiOx capacitors using plasma-enhanced atomic layer deposition	7
In situ growth of ultrathin Y2O3 capping layers for Eu-organic thin films via atomic/molecular layer deposition	7
Highly selective and vertical etch of silicon dioxide using ruthenium films as an etch mask	7
Atomic layer deposition of transition metal chalcogenide TaSx using Ta[N(CH3)2]3[NC(CH3)3] precursor and H2S plasma	7
Empirical analysis of a hollow cathode’s intensity distribution in the vacuum ultraviolet range	7

Preface for the special topic collection Honoring Dr. Art Gossard’s 85th Birthday and his Leadership in the Science and Technology of Molecular Beam Epitaxy	7
Surface treatment of TaN for sub-2 nm, smooth, and conducting atomic layer deposition Ru films	7
Large redshift in photoluminescence of InAs/AlAs short-period superlattices due to highly ordered lateral composition modulation	7
Optoelectronic properties of transparent oxide semiconductor ASnO3 (A = Ba, Sr, and Ca) epitaxial films and thin film transistors	7
Operando study of the preferential growth of SiO2 during the dry thermal oxidation of Si0.60Ge0.40(001) by ambient pressure x-ray photoelectron spectroscopy	7
Polarized photoluminescence from Sn, Fe, and unintentionally doped β-Ga2O3	7
Self-assembled oligomeric structures of an asymmetric molecular linker; 4-isocyanophenyl disulfide on Au(111)	7
Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition	7
Numerical ellipsometry: Artificial intelligence for rapid analysis of indium tin oxide films on silicon	7
Insight into the mechanism of lattice damage in ground and polished InAs substrates	6
Design method for generating multiple colors with thickness-modulated thin-film optical filters for silicon solar cells	6
Near-surface electronic structure in strained Ni-ferrite films: An x-ray absorption spectroscopy study	6
Foldable electrochromic NiO films	6
Variability of band alignment between WS2 and SiO2: Intrinsic versus extrinsic contributions	6
Optical properties of La1−xSrxVO3 (0 ≤ x ≤ 1) films grown on LSAT substrates using radio frequency sputtering deposition	6
Characterization of a broad beam Kaufman-type ion source operated with CHF3 and O2	6
Challenges in porosity characterization of thin films: Cross-evaluation of different techniques	6
Electroconductive and photoelectric properties of Pt/(100) β-Ga2O3 Schottky barrier diode based on Czochralski grown crystal	6
Benchmarking large language models for materials synthesis: The case of atomic layer deposition	6
Growth and optical properties of NiO thin films deposited by pulsed dc reactive magnetron sputtering	6
Improved optical efficiency of GaAs-based infrared vertical-cavity surface-emitting laser enabled by combining a metallic reflector and a Bragg reflector	6
Fabrication of antireflective coatings with self-cleaning function using Si–Ti modified hollow silicon mixed sol	6
A high-power impulse magnetron sputtering global model for argon plasma–chromium target interactions	6
X-ray photoelectron spectroscopy study of Pt-cluster-induced electronic-state change of CeO2(111) surfaces	6
Influence of magnetic field strength on plasma, microstructure, and mechanical properties of Cr thin films deposited by MPPMS and DOMS	6
Chemical significance of x-ray photoelectron spectroscopy binding energy shifts: A Perspective	6
Probing trade-off between critical size and velocity in cold-pray: An atomistic simulation	6
Effects of N2 and O2 plasma treatments of quartz surfaces exposed to H2 plasmas	6
Effect of ozone and humidity addition on hydrogen peroxide generation characteristics of plasmas in oxygen bubbles	6
Comparison of BCl3, TiCl4, and SOCl2 chlorinating agents for atomic layer etching of TiO2 and ZrO2 using tungsten hexafluoride	6
Plasma-enhanced atomic layer deposition of crystalline Ga2S3 thin films	6
An examination of the performance of molecular dynamics force fields: Silicon and silicon dioxide reactive ion etching	6
Oxygen incorporation in AlN films grown by plasma-enhanced atomic layer deposition	6
Microkinetic based growth and property modeling of plasma enhanced atomic layer deposition silicon nitride thin film	6
Bacterial and corrosion resistance of polytetrafluoroethylene-silver composite coatings by magnetron sputtering	6
Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering	6
Interaction of Mg with the ionic liquid 1-butyl-1-methylpyrrolidinium bis(trifluoromethylsulfonyl)imide—An experimental and computational model study of the electrode–electrolyte interface in post-lit	6
Theoretical analysis of thermal spikes during ion bombardment of amorphous silicon nitride surfaces	6
Effect of O2 plasma exposure time during atomic layer deposition of amorphous gallium oxide	6
Enhancing biocompatibility, mechanical properties, and corrosion resistance of laser cladding β-TiNb coatings	6
Cu2O/ZnO heterojunction self-powered photodetector performance regulation	6
Investigation of arc spot splitting behavior on aluminum, titanium, and their alloy cathodes under different gas flows	6
XPS guide for insulators: Electron flood gun operation and optimization, surface charging, controlled charging, differential charging, useful FWHMs, problems and solutions, and advice	6
Sn-doping concentration dependence of electrical, optical, and magnetic properties in epitaxial Mn-doped indium tin oxide films deposited by RF magnetron sputtering	6
Atomic layer deposition of nanofilms on porous polymer substrates: Strategies for success	6
Effect of focus ring with external circuit on cathode edge sheath dynamics in a capacitively coupled plasma	6
Conduction band nonparabolicity, chemical potential, and carrier concentration of intrinsic InSb as a function of temperature	6
Evolution of β-Ga2O3 to γ -Ga2O3 solid-solution epitaxial films after high-temperature annealing	6
Link between cracking mechanisms of trilayer films on flexible substrates and electro-mechanical reliability under biaxial loading	6
Half-century old Berkeley idea now finding missing links of nuclear quadrupole moments	6
Insufficient reporting of x-ray photoelectron spectroscopy instrumental and peak fitting parameters (metadata) in the scientific literature	6
Machine learning-based prediction of the electron energy distribution function and electron density of argon plasma from the optical emission spectra	6
Homogeneous high In content InxGa1−x N films by supercycle atomic layer deposition	6
Microstructure and properties of Mg/Ti joint welded by resistance spot welding with an aluminum interlayer	6
Neutral transport during etching of high aspect ratio features	6
Crystallization kinetics during layer exchange of 28Si implanted Al films for fabrication of quantum computers: A theoretical model	6
In situ and ex situ quantification of nanoparticle fluxes in magnetron sputter inert gas condensation: A Cu nanoparticle case study	6
Effect of fabrication processes before atomic layer deposition on β-Ga2O3/HfO2/Cr/Au metal–oxide–semiconductor capacitors	6
Hollow cathode plasma electron source for low temperature deposition of cobalt films by electron-enhanced atomic layer deposition	6
David Shirley: Pioneer, teacher, mentor, and visionary scientific leader	5
Influence of the carrier wafer during GaN etching in Cl2 plasma	5
Spherical-periodic order and relevant short-range structural units in simple crystal structures	5
Correlating surface stoichiometry and termination in SrTiO3 films grown by hybrid molecular beam epitaxy	5
Crystallinity degradation and defect development in (AlxGa1−x)2O3 thin films with increased Al composition	5
Interface-mediated ferroelectricity in PMN-PT/PZT flexible bilayer via pulsed laser deposition	5
Practical guides for x-ray photoelectron spectroscopy: Use of argon ion beams for sputter depth profiling and cleaning	5
Computational modeling of a surfatron mode microwave plasma in NH3/N2 for remote radical generation in a silicon native oxide cleaning process	5
Dynamical reverse folding and residual gas expansion models of flexible thin films	5
Growth of topological insulator Bi2Se3 particles on GaAs via droplet epitaxy	5
Type II band alignment of NiO/α-Ga2O3 for annealing temperatures up to 600 °C	5
Cut-and-pasting ligands: The structure/function relationships of a thermally robust Mo(VI) precursor	5
Performance evaluation of GaN etching using Cl2-based plasma with bias pulsing	5
Low temperature Topographically Selective Deposition by Plasma Enhanced Atomic Layer Deposition with ion bombardment assistance	5
Titanium infiltration into ultrathin PMMA brushes	5
Stabilizing far-from-equilibrium (Mo,Ti)S2 thin films by metal sulfurization at reduced temperature	5
Investigation of the dielectric recovery process of vacuum arc in double breaks by planar laser-induced fluorescence	5
Atomic layer deposition of GdF3 thin films	5
In-cycle evolution of thickness and roughness parameters during oxygen plasma enhanced ZnO atomic layer deposition using in situ spectroscopic ellipsometry	5
Epitaxial film growth by thermal laser evaporation	5
Growth of conformal TiN thin film with low resistivity and impurity via hollow cathode plasma atomic layer deposition	5
Mechanism of residue formation on Ge-rich germanium antimony tellurium alloys after plasma etching	5
Effect of annealing on the magnetic anisotropy of GaMnAsP layers with graded P concentration	5
Nucleation and growth of molybdenum disulfide grown by thermal atomic layer deposition on metal oxides	5
Effect of SiO2 buffer layer on phase transition properties of VO2 films fabricated by low-pressure chemical vapor deposition	5
Materials’ properties of low temperature deposited Cu/W and Cu/Cr multilayer thin films using high power impulse magnetron sputtering	5
Ultraviolet photo-enhanced atomic layer deposition for improving dielectric properties of low temperature deposited Al2O3	5
Proton irradiation effect on InAs/GaAs quantum dot solar cells	5
Effect of drift layer doping and NiO parameters in achieving 8.9 kV breakdown in 100 μm diameter and 4 kV/4 A in 1 mm diameter NiO/β-Ga2O3 rectifiers	5
Low temperature, area-selective atomic layer deposition of NiO and Ni	5
Measurements of atomic hydrogen recombination coefficients and the reduction of Al2O3 using a heat flux sensor	5
Enhancing the photo-response characteristics of graphene/n-Si based Schottky barrier photodiodes by increasing the number of graphene layers	5
Optical studies of pure and (Cu, Co) doped nickel zinc ferrite films deposited on quartz substrate	5
Erratum: “Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?” [J. Vac. Sci. Technol. B 41, 030803 (2023)]	5
CF4 plasma-based atomic layer etching of Al2O3 and surface smoothing effect	5
6p valence relativistic effects in 5d photoemission spectrum of Pb atom and bonding properties of Pb-dimer using Dirac–Hartree–Fock formalism including many-body effects	5