Journal of Vacuum Science & Technology A

Papers
(The H4-Index of Journal of Vacuum Science & Technology A is 22. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-05-01 to 2025-05-01.)
ArticleCitations
Implementation of an artificial spiking neuron with photoreceptor functionality using gas discharge tubes85
Plasma enhanced atomic layer etching of high-k layers on WS267
Correlating chemical and electronic states from quantitative photoemission electron microscopy of transition-metal dichalcogenide heterostructures44
Extreme atomic-scale surface roughening: Amino acids on Ag on Au(111)41
Role of nanoscale surface defects on Sn adsorption and diffusion behavior on oxidized Nb(100)37
Study of synthesis strategies to improve the electrical properties of magnetron sputtered copper oxide thin films36
Use of in situ electrical conductance measurements to understand the chemical mechanisms and chamber wall effects during vapor phase infiltration doping of poly(aniline) with TiCl4 + H2O35
Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition32
Deposition of sputtered NiO as a p-type layer for heterojunction diodes with Ga2O331
Applications and mechanisms of anisotropic two-step Si3N4 etching with hydrogen plasma conditioning27
Size distribution of clusters and nucleation preference of trimers during SiC (0001) surface epitaxial growth under low coverage27
Comparing sputter rates, depth resolution, and ion yields for different gas cluster ion beams (GCIB): A practical guide to choosing the best GCIB for every application26
Effects of duty cycle and nitrogen flow rate on the mechanical properties of (V,Mo)N coatings deposited by high-power pulsed magnetron sputtering26
Core-shell metallic nanotube arrays for highly sensitive surface-enhanced Raman scattering (SERS) detection25
Conformal coating of macroscopic nanoparticle compacts with ZnO via atomic layer deposition24
Hardness, adhesion, and wear behavior of magnetron cosputtered Ti:Zr-O-N thin films24
Transport and trap states in proton irradiated ultra-thick κ-Ga2O323
Peak intensities in Auger electron spectroscopy for quantification: Relationship between differentiated spectral intensities and direct peak areas23
Erratum: “MoS2-assisted growth of highly-oriented AlN thin films by low-temperature van der Waals epitaxy” [J. Vac. Sci. Technol. A 42, 050401 (2024)]22
Zirconia-titania-doped tantala optical coatings for low mechanical loss Bragg mirrors22
Tailoring structure, morphology, and tribo-mechanical properties of HiPIMS-deposited CrxNy coatings for enhanced performance in wear and corrosion protection22
Friction and wear behavior of C implanted copper via ion beam-assisted bombardment22
Nitrogen-incorporated tetrahedral amorphous carbon optically transparent thin film electrode22
Kinetic Monte Carlo study on the effect of growth conditions on the epitaxial growth of 3C–SiC (0001) vicinal surface22
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