Semiconductor Science and Technology

Article	Citations
The effect of Si ion implantation on the electrical properties of InP thin film on Si(100) substrate fabricated by ion-cutting technique	117
Tunnel hole injection in unipolar HgCdTe-based laser diode	66
Si–Sn codoped n-GaN film sputtering grown on an amorphous glass substrate	63
MISHEMT intrinsic voltage gain under multiple channel output characteristics	52
A recurrence model capturing interface traps for non-zero bandgap GFETs towards dynamic mimicking of synaptic plasticity	50
A TCAD-based study on the design and performance of VOFET-based CMOS-like inverters	49
Numerical analysis on the performance enhancement in AlGaN/GaN vertical CAVET with InGaN/AlN/InGaN hybrid current blocking layer	44
Orbital-free approach for large-scale electrostatic simulations of quantum nanoelectronics devices	37
Impact of deep and tail trap states on the electrical performance of double-gate ZnO thin film transistors	36
The surface tension of Ga2O3 melt measured by a drop-weight method in an optical floating-zone furnace	34
Microscopic electroluminescence images of 850 nm oxide-confined VCSELs during burn-in	30
Corrigendum: Importance of shallow hydrogenic dopants and material purity of ultra-wide bandgap semiconductors for vertical power electron devices (2020 Semicond. Sci. Technol.<	27
III-V material-based junction-free L-shaped gate normal line tunneling FET for improved performance	27
Performance investigation of a charge plasma tunnel FET with SiGe source pocket as a photosensor	26
Role of temperature on linearity and analog/RF performance merits of a negative capacitance FinFET	24
Estimation of the melting threshold of Ti supersaturated Si using time resolved reflectometry and haze measurements	23
A novel SiC superjunction trench MOSFET with integrated heterojunction diode for reduced power loss and saturation current	21
The ab initio study of n-type nitrogen and gallium co-doped diamond	20
First-principles study on the design and performance optimization of MoS ₂ - and SnS 2 -based RRAM	20
High ultraviolet stability red phosphorescent organic light-emitting diode based on fluorinated copper phthalocyanine interface modification	19
Exploration and optimization of novel replacement and prefetching strategies for inefficiencies of advanced MRAM-based hybrid cache systems	19
Trench super junction power device by plasma doping: a structural, chemical-physical, and profiling investigation	19
Low-power double-gate MoS2 negative capacitance transistors with near-zero DIBL	19
Enhanced breakdown voltage in GaN vertical trench MOSFETs through mesa-trench field balancing and mesa shielding ring structure	18
Degradation mechanism of static and capacitance characteristics of 700 V p-GaN gate HEMT under repetitive unclamped inductive switching stress	17

Investigation of maximum gain amplifier using a split-stacked recessed gate design on β-Ga2O3 MOSFET for S-band applications	16
Design of step-graded AlGaN buffers for GaN-on-Si heterostructures grown by MOCVD	16
The effect of temperature on the electrical characteristics of zigzag and armchair black phosphorus based 2D MOSFET	15
Influence of anti-reflection coatings on double GaAs/Si heterojunction layers in Si solar cells	15
Accurate band alignment of sputtered Sc2O3 on GaN for high electron mobility transistor applications	15
Straightforward synthesis and mechanism insight of TiO2/α′-AgVO3 heterostructure with enhanced photocatalytic activity	15
Power spectral density-based fractal analyses of sputtered yttria-stabilized zirconia thin films	15
Atomic layer etching of InGaAs using sequential exposures of atomic hydrogen and oxygen gas	14
Polarization-doped n-p-i-p-n GaN-based parallel phototransistor with thick GaN absorption layer for achieving high responsivity	14
Enhancing light trapping for improved efficiency of perovskite solar cells: design and analysis	14
Optical characterization of deep-level defects in n-type Al x In	14
In2O3 decorated TiO2 for broadband photosensing applications	14
Comparative performance analysis and material exploration of ECO-friendly highly efficient perovskite solar cells	14
Negative differential resistance in glutathione-functionalized MoS 2 quantum dot-based resistive switching devices	13
Impact of mercury vacancy states on Shockley–Read–Hall recombination in narrow gap HgCdTe	13
Recent advances in 2D-based semiconductor catalysts for hydrogen evolution reactions	13
Low-resistive gate module for RF GaN-HFETs by electroplating	13
Study of Ge-on-Si avalanche photodiodes for short-wave infrared applications	13
Enhanced photodetector performance of SnO2/NiO heterojunction via Au incorporation	13
Classification of different post-hyperdoping treatments for enhanced crystallinity of IR-sensitive femtosecond-laser processed silicon	13
A novel V-grooved vertical GaN-based HEMT on silicon utilizing 2DEG for enhanced performance	12
GaN-based power high-electron-mobility transistors on Si substrates: from materials to devices	12
The impact of composite defects Vi O(Ga) on the electrical properties of β-Ga2O3/AlN heterojunctions	12
High performance AlGaN/GaN MISHEMTs using N2O treated TiO2 as the gate dielectric	11
Design and investigation of a label-free biosensor based on dual material gate heterostructure pocket tunneling field-effect transistor	11
A high-speed avalanche photodiode with large coupling tolerance	11
The impact of charges at the dielectric/channel interface on performance degradation in negative capacitance ferroelectric FETs	11
Efficacy of π -gate in LDMOS for improved safe operating area and figure of merits	11
Shallow donor states and interlevel transitions in gapped graphene bilayers	11
Optimizing photocurrent intensity in layered SiGe heterostructures	11
Paper-based multi-gate EDL transistors with differentiated bottom and lateral gate coupling for multi-input neuromorphic integration	11
Effect of dual-channel structures on DC characteristics of vertical trench GaN-based MOSFETs	11
Structural and optical evolution of compressively strained Ge0.965Sn0.035 films on silicon undergoing microwave annealing	11
Low-temperature preparation and characteristics of top-gate thin-film transistors with La-ZTO active layers and polymethylmethacrylate dielectric layers	11
Simultaneous derivation of carrier mobility through admittance spectroscopy on MBE grown GaAs/AlₓGa₁₋ₓAs based solar cell device	11
Stacked ferroelectric heterojunction tunnel field effect transistor on a buried oxide substrate for enhanced electrical performance *	10
The effect of selenium ion concentration on zinc selenide thin films prepared by a photo-assisted chemical bath deposition method	10
Intersection of 4H-SiC Schottky diodes I–V curves due to temperature dependent series resistance	10
Modeling and characterization of low frequency noise in self-aligned top-gate coplanar IGZO thin-film transistors	10
Paralleled multi-GaN MIS–HEMTs integrated cascode switch for power electronic applications	10
A surface-potential-based compact model for cryogenic MOSFETs including the band tail effects	10
Multi-stage infrared detectors	10
Monolithically integrated GaN hysteresis comparator based on complementary logic	10
Semiconductor laser design with an asymmetric large optical cavity waveguide and a bulk active layer near p-cladding for efficient high-power red light emission	10
Perovskite solar cells: a comprehensive review of material design, device structure, and commercialization prospects	10
Diamond/SiC heterojunction GTO for nanosecond switching enabled by super-injection effect	9
Resistor-to-Schottky barrier analytical model for ohmic contact test structures	9
Effect of annealing temperature on the optoelectronic properties of quinary amorphous oxide semiconductor IGZTO thin films	9
7 kV/16.5 mΩ·cm 2 E-mode active-passivation p-GaN gate HEMT exceeding SiC unipolar limit	9
Investigation on performance degradation due to induced interface trapped charges on HSO based FDSOI NCFET and sustaining it through back-gate bias	9

Estimation of performance degradation due to interface traps in the gate and spacer stack of NC-FinFET	9
Enhancing light absorption of deep ultraviolet photodiodes through intelligent algorithm-guided design of resonant nano-optical structures	9
Two-waveguide approach for monolithic active/passive photonic integration on GaAs	9
Recent advances and optoelectronic applications of Cu–Ag–Bi–I quaternary lead-free perovskites	9
Effects of microwave plasma treatment on β-Ga2O3 Schottky barrier diodes	9
Annealing-dependent changes in the structural and electrical properties of NiO epitaxial films	9
Enhancements of electrical properties and positive bias instability in self-aligned top-gate a-IGZO TFTs by hydrogen incorporation	9
Optimization of tin-based inverted perovskite solar cell with MoS2 interlayer by one-dimensional simulation	9
Sub-bandgap photoresponse and leakage current analysis in gold thin film-hyperdoped silicon photodiodes	9
Accurate analytical models of hot carrier degradation in nMOSFET and nFinFET considering saturation effect	9
Characterization of traps in GaN-based HEMTs by drain voltage transient and capacitance deep-level transient spectroscopy	9
Temperature- and gate voltage-dependent I–V modeling of GaN HEMTs based on ASM-HEMT	9
Structural and thermodynamic stability in hexagonal-diamond	9
A novel double-channel sic trench MOSFET realized by integrating n-PolySi/sic heterojunction tunneling transistor	9
Unveiling the potential of photonic crystal surface emitting lasers: a concise review	9
Applications of time-resolved photoluminescence for characterizing silicon photovoltaic materials	9
Influence of aluminium incorporation on the semiconducting properties of p-type tin monoxide	9
Influence of the nature of the distribution of recombination centers in the space charge region of the p–n junction on the parameters of the current–voltage characteristics within the classical Shockl	9
Enhanced resistive switching performance of TiO2 based RRAM device with graphene oxide inserting layer	8
Impact of CMP surface quality and pre-epitaxial H 2 treatment on the surface defect mitigation and electrical characteristics of 6.5 kV SiC MOSFET	8
Investigation of LVTSCR ESD protection devices with RC-INV triggering circuits	8
Hetero-dielectric step-shaped double-gate TFET on SELBOX substrate with SiGe pocket: suppressed ambipolarity, comprehensive DC, RF, and noise performance evaluation under thermal variation	8
Theoretical investigation to study the influence of strain on the band lineups of core/shell nanostructures	8
A 35 V–5 V monolithic integrated GaN-based DC–DC floating buck converter	8
Ellipsometric study of TlInS 2 chalcogenide crystals: exploring their potential in nonlinear optics and optoelectronics	8
Improving CZTS/ZTO solar cell efficiency with inorganic BSF layers	8
Low-frequency noise in AlTiO/AlGaN/GaN metal-insulator-semiconductor field-effect transistors with non-gate-recessed or partially-gate-recessed structures	8
DFT study of the structural, electronic and optoelectronic properties of PDAPb(I1−x Br x )4 pero	8
Silicon ultrafast recovery diode with leakage current reduced via the combined lifetime process of gold diffusion and electron-beam irradiation	8
Characterization of PECVD Si3N4 thin film in multiple oxide–nitride stack for 3D-NAND flash memory	8
Sub-bandgap excited photoluminescence probing of deep defect complexes in GaN doped by Si, Ge and C impurities	8
Investigation of a minority carrier trap in a NiO/β-Ga2O3 p–n heterojunction via deep-level transient spectroscopy	8
Effect of two-dimensional nonlocal screening on mobility of electrons in transition-metal dichalcogenide monolayers	8
Low-voltage-triggered SCR with resistor-capacitance detection circuit for ESD protection of SPAD readout circuits	8
Structural investigation of ultra-low resistance deeply recessed sidewall ohmic contacts for AlGaN/GaN HEMTs based on Ti/Al/Ti-metallization	8
Domain boundaries in ScAlMgO4 single crystal observed by synchrotron radiation x-ray topography and reticulography	8
Comprehensive empirical modeling of ScAlN/AlGaN/GaN ferroelectric HEMT	7
3D simulation study of decoupled dual-gate p-GaN power HEMT with high forward threshold voltage and low reverse conduction loss	7
A BP-Smith combined temperature control method for thin film preparation processing	7
Broadband photodetectors based on PbS quantum dots synthesized using the multiple injection growth method	7
Low-voltage operating, high mobility top-gate structural flexible organic thin-film transistor with a one-step spin-coated binary polymer gate dielectric	7
A novel dual-gate negative capacitance TFET for highly sensitive label free biosensing	7
Design and defect study of Cs2AgBiBr6 double perovskite solar cell using suitable charge transport layers	7
Strain relaxation and self-heating effects of fin AlGaN/GaN HEMTs	7
Highly efficient stable blue organic light-emitting diodes based on a novel anthracene[2,3-b]benzofuran framework	7
The effect of the barrier thickness on DC and RF performances of AlGaN/GaN HEMTs on silicon	7
Row hammer-induced D0 failure improvement in sub-20 nm DRAM using an air gap	7
Optimization of p-type contact for electrical injection and light extraction for 365 nm UV-A LEDs	7
Study on the series resistance of betavoltaic batteries	7
The thermo-E.M.F. of an n-type silicon: assessment of the contribution due to the presence of minority carriers	7
Self-compensation by silicon DX centers in ultrawide-bandgap nitrides	7
Retraction: Potential application of AlP nanosheet semiconductor in the detection of toxic phosgene, thiophosgene, and formaldehyde gases (2022 Semicond. Sci. Technol.	7
The impacts of SiO2 atomic-layer-deposited passivation layer thickness on GaN-based green micro-LEDs	7
Electronic transport properties of WS2 using ensemble Monte Carlo method	7
Tailoring Al2O3 deposition temperature for enhanced electrical performance and reliability of IGZO thin-film transistors	7
Cathode shorts design and its effects on the device characteristics of small-size light-triggered thyristors	7
Sustainable magnesiothermic reduction of rice husk ash–derived silica: comparative effects of NaCl and KCl molten salts on silicon microstructure and electrical properties	7
The conductivity and electrophysical characteristics of Janus-like TaSi2/Si nanoparticles	7
Optimization of a novel β -Ga 2 O 3 vertical FinFET	7
Role of graphene nanoparticles on the electrophysical processes in PVP and PVP:ZnTiO3 polymer layers at Schottky diode (SD)	7
Synergistic enhancement of threshold voltage in AlGaN/GaN HEMTs using ferroelectric HfO 2 /ZrO 2 g	7
Quantitative characterization of self-heating effects in GaN-on-diamond HEMTs with 3C-SiC interfacial layer	6
Terahertz monolithic integrated narrow-band filter based on the silicon carbide substrate	6
Recent advances in heterojunction engineering of β -Ga 2 O 3	6
Optimizing CuInSe2 solar cells with kesterite-based upper absorber and back surface field layers for enhanced efficiency: a numerical study	6
Electro-thermal analysis of device geometry dependence on the amorphous cap size in phase change memory devices	6
Demonstration of p-GaN/AlGaN/GaN-based ultraviolet phototransistors with sub-saturated transfer characteristics	6
Nanoindentation mechanical studies of bulk AlN single crystals with different orientations	6
The compression deformation and particles removal of PVA brushes during the post-CMP cleaning process	6
A novel double RESURF SOI-LIGBT with dynamic avalanche immunity and low losses	6
A facile method of deriving solar selective nickel-cobalt oxide thin films via spraying process	6
Effective control of active interface traps in GaN HEMT epitaxial layers by stress tuning of SiN x passivation layers	6
Proton irradiation influence on gate-channel low-field carrier mobility of AlGaN/GaN HEMTs	6
High mobility Ge 2DHG based MODFETs for low-temperature applications	6
Frequency-dependent threshold voltage instability in hydrogen-terminated diamond MOSFETs under dynamic gate-bias stress	6
Experimental study of the effect of neutron radiation on a super-junction IGBT	6
First-principles study on the physical properties of Al-based wide-bandgap perovskites Cs3AlIxBr6-x for optoelectronic applications	6
A fast extraction method of negative bias temperature instability (NBTI) generated permanent defects activation energy using temperature step stress	6
Design and simulation of a III-Nitride light emitting transistor	6
The Franz–Keldysh effect in the optical absorption spectrum of a TlGaSe2 layered semiconductor caused by charged native defects	6

High performance solar-blind photodetectors based on MOCVD grown β	6
Advanced trench junction barrier Schottky integrated SiC trench MOSFET with improved switching oscillation suppression	6
Carrier Capture-Recombination Competition Governs Non-Monotonic Photoluminescence in InGaN/GaN Quantum Dots	6
Influence of swift heavy ion irradiation on electrical characteristics of β-Ga2O3 Schottky barrier diode	6
Channeling step shielding MOSFET design for improved short-circuit withstand time and UIS energy in 1200 V SiC devices	6
CMOS compatible manufacturing of a hybrid SET-FET circuit	6
Cryogenic coating technique for performance recovery in silicon solar cells	6
Optimizing deposition parameters for CBD-grown CdS thin films: insights into morphology, optical, and electrical properties for optoelectronic applications	6
Exploring steep subthreshold characteristics of tunnel field-effect transistors for leaky integrate-and-fire neurons in neuromorphic computing	6
A critique of length and bias dependent constraints for 1T-DRAM operation through RFET	6
Ti supersaturated Si by microwave annealing processes	6
Effect of stress control by growth adjustment on the edge thread dislocation density of AlN grown on the sapphire	6
Multi functional ionic Ru(bpy) 3 (PF 6 ) 2 assi	6
Characterisation, modelling and design of cut-off wavelength of InGaAs/GaAsSb type-II superlattice photodiodes	6
Enhanced selective etching of SiON using low-GWP C 3 F 6 as an alternative to CF	5
Permittivity modulation in Si-based PIN diode by electron irradiation	5
Undoped vertical dual-bilayer TFET with a super-steep sub-threshold swing: proposal and performance comparative analysis	5
Demonstrating the electron blocking effect of AlGaN/GaN superlattice cladding layers in GaN-based laser diodes	5
Modeling and optimal design of silicon superjunctions considering charge imbalance	5
Superjunction IGBT with split carrier storage layer	5
Zinc oxide-based sensor prepared by modified sol–gel route for detection of low concentrations of ethanol, methanol, acetone, and formaldehyde	5
Effective mobility in N-MOSFET: comparison of McLarty and split C – V methods, and the mobility degradatio	5
Gallium oxide Schottky diode defects and control	5
a -plane GaN-based fully vertical FinFETs with normally-off operation	5
A surface plasmonic coupled mid-long-infrared quantum well detector	5
Study on the regulation factors and mechanism of self-heating effects in non-rectangular 14 nm bulk FinFET*	5
Insights into dynamic switching behavior and electric field distribution of depletion-mode GaN HEMT with bonding pad over active layout	5
Lateral GeSn waveguide-based homojunction phototransistor for next-generation 2000 nm communication and sensing applications	5
Investigation on the ESD characteristics of LVTSCR with embedded PNP on the anode side	5
Simulation study of a novel GaN on Si quasi-vertical reverse-conducting insulated gate bipolar transistor	5
Surface defects in 4H-SiC: properties, characterizations and passivation schemes	5
Improved electrical properties of AlGaN/GaN MIS-HEMTs with thermal and plasma-enhanced ALD Al2O3 gate dielectric	5
Charge-plasma based symmetrical-gate complementary electron–hole bilayer TFET with improved performance for sub-0.5 V operation	5
Preparation and operating characteristics analysis of high-speed iron phthalocyanine organic phototriode	5
Impact of pyrolysis temperature on physicochemical properties of carbon nitride photocatalyst	5
Optimized design and simulation of memristive silicon nanowire for resistive switching applications	5
Dual-gate material H-channel vertical DGTFET: design, simulation and optimisation study	5
A flexible and ultra-highly sensitive tactile sensor based on Mg-doped ZnO nanorods for human vital signs and activity monitoring	5
Stress analysis and characterization of TEOS-based PECVD fabricated SiO2 solid films after thermal annealing	5
Flexible 3C-SiC strain-sensing layers transferred from silicon substrates by mechanical exfoliation	5
Characterizations of two-photon absorption process induced by defects in aluminum nitride using Z-scan method	5
Study on low-temperature evaporation of Ag2O-based Ag electrode and electron injection layer and their application in OLEDs	5
Bias-selectable three-color InAs/GaSb superlattice infrared detectors based on a resonant tunneling barrier	5
Impact of active area and gate line width roughness on SRAM stability: role of low-frequency noise and process variability in advanced IC manufacturing	5
Metallisation-associated degradation of silicon coated with thin dielectric layers	4
Anti-reflective MX (M = Sc and Y; X = N, P, As, Sb and Bi) monolayers: structural, electronic and optical study	4
TCAD analysis of SiC trench MOSFET structures with improved frequency figure of merit	4
The photoelectric and defect properties in B-sites doped α -CsPbI 3 by first-principles	4
Analysis and simulation of bulk polarization mechanism in p-GaN HEMT with AI component gradient buffer layer	4
Studying the impact of intrinsic layer shape on the performance of p–i–n photodiodes in standard SiPh processes	4
On the photoresponse regulations by deep-level traps in CsPbBr3 single crystal photodetectors	4
First demonstration of rapid deuterium annealing for interface trap reduction in HKMG MOSFETs	4
Simulation and modeling of a new CsSnI3 solar cell structure: a numerical study	4
Micro-textured In ₂ O ₃ /IGZO heterostructure thin-film transistors with enhanced field-effect mob	4
Efficiency enhancement of triple absorber layer perovskite solar cells with the best materials for electron and hole transport layers: numerical study	4
Low thermal boundary resistance and reduced junction temperature in GaN HEMTs via AlN-mediated top-side diamond integration	4
Rapid hydrogen annealing for enhanced device performance and reduced thermal budget	4
A computational analysis of the impact of thin undoped channels in surface-related current collapse of AlGaN/GaN HEMTs	4
The FinFET effect in lateral 4H-SiC and Silicon multi-gate MOSFETs	4
Influence of power ramps on the physical properties of AZO thin films deposited at room temperature by RF magnetron sputtering technique	4
A junctionless dual-gate MOSFET-based programmable inverter for secured hardware applications using nitride charge trapping	4
Effects of AlN/GaN superlattice buffer layer on performances of AlGaN/GaN HEMT grown on silicon for sub-6 GHz applications	4
Band alignment of heterojunctions formed by different polar GaN and two of two-dimensional materials: h-BN and MoSe 2	4
Phosphorus vacancy as a dominant donor in n-InP single crystals grown by VGF method	4
Strain engineering and strain measurement by spring tethers on suspended epitaxial GaN-on-Si photonic crystal devices	4
Bismuth surfactant-enhanced III-As epitaxy on GaAs(111)A	4
Fabrication of Al doped α-GaOOH nanorod arrays on FTO for self-powered photoelectrochemical solar-blind UV photodetectors	4
Non-ideal program-time conservation in charge trap flash for deep learning	4
Evaluation of vibrational properties and local structure change during phase transition in Ge2Sb2Te5 and In3SbTe2 phase change materials	4
Fully-vertical GaN-on-SiC Schottky barrier diode with ultrathin AlGaN buffer layer	4
Design and performance analysis of GaN vertical JFETs with ion-implanted gates	4
Enhanced photocatalytic degradation of methylene blue using DEA-modified TiO2 thin films	4
Over 1.2 GW cm−2 β-Ga2O3 SBD with V br of 1.93 kV realized by O2 plasma and annealing	4
The effect of Ar:O2 gas ratios on the structural and optical properties of RF sputter-deposited La2O3-doped ZnO thin films	4
Impact of ion implantation and laser processing parameters on carrier lifetimes in gold-hyperdoped silicon	4
Effect of high temperature annealing on cryogenic transport properties of silicon MOSFETs with a thin SiO2/HfO2 stacked dielectric	4
Modified photodiode equivalent circuit model considering coplanar waveguide electrodes	4
High-performance AlGaN ultraviolet light-emitting diode with a tunnel junction based on inverted architecture	4
Electrical properties of CuO/ZnO heterojunctions prepared by spray pyrolysis	4
Atmospheric neutron-induced single event burnout characterization of 4.5 kV Si IGBTs with spallation neutron irradiation	4
Biexcitons and quadrons in self-assembled quantum dots	4
Negative capacitance gate-all-around PZT silicon nanowire with high-K/metal gate MFIS structure for low SS and high I on/I off<	4
Review on fabrication and applications of GaN nanorods	4
Effect of gas pre-decomposition device on the growth of GaN epitaxial layer	4
Improved reverse-bias breakdown behavior in fully-vertical GaN-on-Si Schottky barrier diodes with a thin AlN layer within the GaN drift layer	4
High-responsivity silicon p–i–n mesa-photodiode	4
Room temperature interband cascade lasers near 7.7 µm and dependence on structural quality	4
Numerical optimization of hybrid 2D/3D and tandem perovskite/silicon HTJ solar cells, based on an experimentally validated MAPbI 3 cell: influence of	4
Cellular breakdown and carrier lifetimes in gold-hyperdoped silicon	4
C-band InAs/InP quantum dots: alternative growth versus indium-flush for self-assembled growth	4
The effect of series stacking on fast interruption for drift step recovery diode	4
A unified optimization theory for 3D HKMOS: from circular to polygonal cell design	3
Effect of distributed Bragg reflectors on optoelectronic characteristics of GaN-based flip-chip light-emitting diodes	3
Perovskite/silicon tandem solar cells: a comprehensive review of recent strategies and progress	3
Suppression of charges within an Al 2 O 3 high- κ d	3