Microelectronic Engineering

Article	Citations
Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques	47
Temperature compensated diaphragm based Fiber Bragg Grating (FBG) sensor for high pressure measurement for space applications	33
Additive manufacturing of titanium alloys – Enabling re-manufacturing of aerospace and biomedical components	32
An integrated electro-optical biosensor system for rapid, low-cost detection of bacteria	27
Design, fabrication, and characterization of an SLA 3D printed nanocomposite electromagnetic microactuator	26
2DEG transport properties over temperature for AlGaN/GaN HEMT and AlGaN/InGaN/GaN pHEMT	24
Characterization of AlN and AlScN film ICP etching for micro/nano fabrication	23
Review on fabrication, characterization, and applications of porous anodic aluminum oxide films with tunable pore sizes for emerging technologies	22
The electrical characteristic of an MIS structure with biocompatible minerals doped (Brushite+Monetite: PVC) interface layer	22
4D printing: A detailed review of materials, techniques, and applications	22
Design, fabrication and test of a bulk SiC MEMS accelerometer	21
Fully CMOS-compatible passive TiO2-based memristor crossbars for in-memory computing	20
Self-powered ultra-sensitive millijoule impact sensor using room temperature cured PDMS based triboelectric nanogenerator	20
Surface plasmon resonance sensor based on MXene coated PCF for detecting the cancer cells with machine learning approach	20
A self-supported structure hybrid triboelectric/piezoelectric nanogenerator for bio-mechanical energy harvesting and pressure sensing	19
Variability estimation in resistive switching devices, a numerical and kinetic Monte Carlo perspective	18
Rapid fabrication of NiO/porous Si film for ultra-violate photodetector: The effect of laser energy	18
Progress in SiC nanowire field-effect-transistors for integrated circuits and sensing applications	17
Synthesis and analysis of TiO2 nanotubes by electrochemical anodization and machine learning method for hydrogen sensors	17
Hierarchical CuO nanostructured materials for acetaldehyde sensor application	17
Mixed dimensional Transition Metal Dichalcogenides (TMDs) vdW Heterostructure based Photodetectors: A review	17
The role of the AC signal on the dielectrophoretic assembly of carbon nanotubes across indium tin oxide electrodes	16
Realization of ppb-level acetone detection using noble metals (Au, Pd, Pt) nanoparticles loaded GO FET sensors with simultaneous back-gate effect	16
A wearable graphene transistor-based biosensor for monitoring IL-6 biomarker	16
Microelectronic materials, microfabrication processes, micromechanical structural configuration based stiffness evaluation in MEMS: A review	16

Numerical simulation of stable electrohydrodynamic cone-jet formation and printing on flexible substrate	15
The investigation and DFT calculation on the gas sensing properties of nanostructured SnO2	15
Physics-based simulation of stress-induced and electromigration-induced voiding and their interactions in on-chip interconnects	15
Chip-level thermal management in GaN HEMT: Critical review on recent patents and inventions	15
Cost-effective technique to fabricate a tubular through-hole anodic aluminum oxide membrane using one-step anodization	14
Facile fabrication of flexible and conductive AuNP/DWCNT fabric with enhanced Joule heating efficiency via spray coating route	14
Parameter extraction techniques for the analysis and modeling of resistive memories	14
Flexible pressure sensor with a wide pressure measurement range and an agile response based on multiscale carbon fibers/carbon nanotubes composite	14
Effects of change of oxygen vacancy on hysteresis voltage and stability under time-temperature dependence positive bias stress in amorphous SZTO transistors	14
Multi-layered BTO/PVDF nanogenerator with highly enhanced performance induced by interlaminar electric field	14
CVD graphene-based flexible and transparent SERS substrate towards L-tyrosine detection	13
Demolding force dependence on mold surface modifications in UV nanoimprint lithography	13
Hyperchaotic circuit design based on memristor and its application in image encryption	13
Mechanisms of colloidal ceria contamination and cleaning during oxide post CMP cleaning	13
Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors	13
CSRR loaded high gained 28/38GHz printed MIMO patch antenna array for 5G millimeter wave wireless devices	13
Synthesis and optimum temperature determination of highly sensitive MoO3-based heterojunction Schottky sensor for hydrogen detection	13
Electrical characterization of flexible hafnium oxide capacitors on deformable softening polymer substrate	13
Laser-induced graphene electrode based flexible heterojunction photovoltaic cells	13
Effect of GaN cap layer on the performance of AlInN/GaN-based HEMTs	13
A triboelectric nanogenerator for mechanical energy harvesting and as self-powered pressure sensor	12
Organotin bearing polymeric resists for electron beam lithography	12
SAR assessment of miniaturized wideband MIMO antenna structure for millimeter wave 5G smartphones	12
Application of thin Au/Ti double-layered films as both low-temperature bonding layer and residual gas gettering material for MEMS encapsulation	12
Phase field simulation of electrohydrodynamic jet droplets and printing microstructures on insulating substrates	12
Ultrathin encapsulated rGO strain sensor for gesture recognition	11
Synthesis and binder-free assembly of SrFe12O19 nano-platelets for wafer-scale patterning of magnetic components	11
Synthesis of boron-doped CQDs and its use as an additive in P3HT:PCBM layer for efficiency improvement of organic solar cell	11
Analysis and compensation for nonlinearity of sandwich MEMS capacitive accelerometer induced by fabrication process error	11
Graphene as the ultra-transparent conductive layer in developing the nanotechnology-based flexible smart touchscreens	11
PMMA sacrificial layer based reliable debonding of ultra-thin chips after lapping	11
Dropout neuronal unit with tunable probability based on NbOx stochastic memristor for efficient suppression of overfitting	11
Rotatory microgripper based on a linear electrostatic driving scheme	11
An optical fiber electric field sensor based on polarization-maintaining photonic crystal fiber selectively filled with liquid crystal	11
PCRAM electronic synapse measurements based on pulse programming engineering	11
Crystallization behavior of N -doped Ge-rich GST thin films and nanostructures: An in-situ synchrotron X-ray diffraction study	11
Investigation on asymmetric resistive switching (RS) characteristics in p-NiO/n-ZnO heterojunctions	10
Experimental and computational investigation of low temperature Cu Sn solid-state-diffusion bonding for 3D integration	10
Low-loss through silicon Vias (TSVs) and transmission lines for 3D optoelectronic integration	10
Smart wearable triboelectric nanogenerator for self-powered bioelectronics and therapeutics	10
InAs/InGaAs quantum dots confined by InAlAs barriers for enhanced room temperature light emission: Photoelectric properties and deep levels	10
UV-curable polyimide/layered silicate films with improved barrier properties for the protection of semiconductor chips	10
The effect of the top electrode on the switching behavior of bipolar Al2O3/ZnO RRAM	9
Fabrication and nanoindentation characterization of nickel micro-pillar mold for nanoimprint lithography	9
Improving the electrical performance of vertical thin-film transistor by engineering its back-channel interface	9
In-situ characterization of thermomechanical behavior of copper nano-interconnect for 3D integration	9
A low-g omnidirectional MEMS inertial switch with load direction identification	9
Fabrication of SiC concave microlens array mold based on microspheres self-assembly	9
Direct micropatterning on a titanium surface through electrochemical imprint lithography with a polymer electrolyte membrane stamp	9
Fabrication of high frequency SAW devices using tri-layer lift-off photolithography	9

A review of graphene-based temperature sensors	9
Reliability challenges in CMOS technology: A manufacturing process perspective	9
Soft and flexible gold microelectrodes by supersonic cluster beam deposition and femtosecond laser processing	9
Fabrication technology and electrophysical properties of a composite memristor-diode crossbar used as a basis for hardware implementation of a biomorphic neuroprocessor	9
A methodology for mechanical stress and wafer warpage minimization during 3D NAND fabrication	8
Effect of the deposition method and substrate on an ultra-stable CoV2O6 hydrogen gas sensor, operating at room temperature	8
Graphene-based physical sensors for humidity, temperature and strain detections	8
Polyimide moth-eye nanostructures formed by oxygen ion beam etching for anti-reflection layers	8
Burr- and etch-free direct machining of shape-controlled micro- and nanopatterns on polyimide films by continuous nanoinscribing for durable flexible devices	8
A novel room temperature SO2 gas sensor based on TiO2/rGO buried-gate FET	8
Influence of AlN spacer and GaN cap layer in GaN heterostructure for RF HEMT applications	8
Using a triblock copolymer as a single additive in high aspect ratio through silicon via (TSV) copper filling	8
A perovskite-based artificial photonic synapse with visible light modulation and ultralow current for neuromorphic computing	8
Fabrication of bifocal lenses using resin that can be processed by electron beam lithography after ultraviolet-nanoimprint lithography	8
Comprehensive physics-based RRAM compact model including the effect of variability and multi-level random telegraph noise	8
Characterization of AlGaN/GaN degradations during plasma etching for power devices	8
Fabrication of serpentine and I structured graphene-CNT based highly sensitive and flexible strain sensors	7
Effect of the oxygen dependent device parameters on the electrical properties of a-Si-Zn-Sn-O thin film transistors	7
Highly thermostable ultrathin planar Ag transparent heaters	7
Temperature dependant high output voltage generation via mechanical transducer by using surface modified (O2, CO2, NO2) ZnO nanowires	7
Replication of plastic microlens arrays using electroforming and precision compression molding	7
Image analysis algorithm for the verification of hexagonal symmetry in spherical nanostructures	7
Effects of heavy ion irradiation on Cu/Al2O3/Pt CBRAM devices	7
Theoretical validation of inhibition mechanisms of benzotriazole with copper and cobalt for CMP and post-CMP cleaning applications	7
Optimization of corner compensations in wet etching of silicon for a MEMS Z-axis accelerometer	7
Effects of BOX thickness, silicon thickness, and backgate bias on SCE of ET-SOI MOSFETs	7
Improved rectification characteristics by engineering energy barrier height in TiOx-based RRAM	7
The influence of thermal loads on the physical properties of carbon nanotubes forests	7
Low-temperature (≤550 °C) p-channel Schottky barrier SOI FinFETs for monolithic 3D integration	6
Precise measurement of junction temperature by thermal analysis of light-emitting diode operated at high environmental temperature	6
Study on three-dimensional dielectrophoresis microfluidic chip for separation and enrichment of circulating tumor cells	6
Transition between resistive switching modes in asymmetric HfO2-based structures	6
Experimental and theoretical insights into electronic properties of oxygen-doped MoTe2 field effect transistor	6
Swimming force characterizations of multistaged bi-helical microswimmer and 3D vortex trap manipulation	6
Soybean-based memristor for multilevel data storage and emulation of synaptic behavior	6
Overview of printable nanoparticles through inkjet process: Their application towards medical use	6
FEA study on the TSV copper filling influenced by the additives and electroplating process	6
Implementation of hybrid PDMS-graphite/Ag conductive material for flexible electronic devices and microfluidic applications	6
Ultrasensitive WSe2/MoSe2 heterojunction photodetector enhanced by photogating effect	6
Cyclic voltammetric biosensing of cellular ionic secretion based on silicon nanowires to detect the effect of paclitaxel on breast normal and cancer cells	6
Fabrication of high aspect ratio microfluidic devices for long term in vitro culture of 3D tumor models	6
Achieving nano-patterned features by micro-EDM process using vertically aligned ZnO nanorods grown on microprobe tip: A scaling approach	5
Flexible and disposable ultrasensitive liquid sensors based on CNTs and CNTs/ZnO-NPs spray-coated cellulose fiber frameworks	5
Temperature characteristics testing and modifying of piezoelectric composites	5
Enhancement of polarization response in UVA and UVC wavelength with integrated sub-wavelength metal-grids	5
Mechanical reinforcement of UV-curable polymer nanocomposite for nanopatterned mold	5
Metamorphic InAs/InGaAs quantum dots for optoelectronic devices: A review	5
Absorbance-based detection of arsenic in a microfluidic system with push-and-pull pumping	5
Processing, property modulation and application of one-dimensional SiC nanostructure field emitters	5
Nanobeam electron diffraction strain mapping in monocrystalline silicon of modern trench power MOSFETs	5
Fabrication of microchannel and diaphragm for a MEMS acoustic sensor using wet etching technique	5
New insights on Ni-Si system for microelectronics applications	5
An optimized Ni P seed layer coating method for through glass via (TGV)	5
Improved performance of near UV-blue n-ZnO/p-GaN heterostructure LED with an AlN electron blocking layer	5
Developing a micro-thermography system for thermal characterization of LED packages	5
Hybrid integrated Si nanosheet GAA-FET and stacked SiGe/Si FinFET using selective channel release strategy	5
Tri-layer contact photolithography process for high-resolution lift-off	5
PDMS micro-dewy spider-web-like metal nanofiber films for fabrication of high-performance transparent flexible electrode with improved mechanical strength	5
Reliability evaluation of ultra thin 3D-IC package under the coupling load effects of the manufacturing process and temperature cycling test	5
Microscale white light emitters fabricated by two-photon polymerization lithography on functional resist	5
Electrochemically functionalized single-walled carbon nanotubes for ultrasensitive detection of BTEX vapors	5
Reduced graphene oxide functionalized Ag:ZnO nanocomposites for real time monitoring of NO2 gas	5
Significant improvement in the performance of well-aligned ZnO nanowire arrays ultraviolet photodetector by Ga doping	5
The current transport mechanism of Al/Beetroot/Cu used as an organic semiconductor Schottky diode is superior than natural dye-based thin film devices	4
Characterization of silane based ultra-thin barrier deposited at elevated temperature	4
Fabrication of integrated silicon PIN detector based on Al-Sn-Al bonding for ΔE-E telescope application	4
Detailed review on c-Si/a-Si:H heterojunction solar cells in perspective of experimental and simulation	4
Drying process of an ink-dot analyzed using both digital holographic microscopy and tackiness measurement	4
Printed resistive switching memory operated by screen-printed microbattery via shared electrode	4
Robust shear strength of Cu–Au joint on Au surface-finished Cu disks by solid-state nanoporous Cu bonding	4
A study of catalyst particles encapsulated inside multiwalled carbon nanotubes on zeolite and montmorillonite	4
Ultra-low power logic in memory with commercial grade memristors and FPGA-based smart-IMPLY architecture	4
Ni-based metallization of GeSn layers: A review and recent advances	4
Capacitance-voltage measurements of monolayer MoS2 metal-oxide-semiconductor capacitors	4
Effects of polyethyleneimine, applied potential and the initial gap on the localized electrochemical deposition of silver microcolumns	4
An enhanced triboelectric nanogenerator with micro-grid patterned PDMS for self-powered sensing and music playback	4
A one-step pattern transferring process for freestanding diffractive spiral photon sieves in extreme ultraviolet	4
Eggshell-inspired high-deformation MXene biocomposite for flexible device	4
Performance improvement of Al0.3Ga0.7N/AlN/GaN HEMTs using Nitrogen pre-treated Si3N4 passivation	4
Parametric investigation on Laser-Induced Forward Transfer of ZnO nanostructure on flexible PET sheet for optoelectronic application	4

Evolution of 2D materials conducive to the wearable physical sensors for structural health assessment	4
Characterization of unintentional doping in localized epitaxial GaN layers on Si wafers by scanning spreading resistance microscopy	4
The insight and evaluation of ultra-scaled sub-1 nm gate length transistors	4
Microstructuring technology for large and cylindrical receivers for concentrated solar plants (CSP)	4
Design and fabrication of integrated superconducting isolator-circulator-isolator chip	4
Impact of interfacial trap states on achieving bias stability in polymer field-effect transistors	4
An advanced Bragg diffraction imaging technique to characterize defects: The examples of GaN and AlN	4
Stress measurement based on magnetic Barkhausen noise for thin films	4
Impact of the pre amorphization by Ge implantation on Ni0.9Pt0.1 silicide	4
A novel high-performance junctionless 4H-SiC trench MOSFET with improved switching characteristics	4
Mobility improvement of LTPS thin film transistor using stacked capping layer	4
Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication	4
Impact of Sn on the Ti/Ge solid-state reaction: Phase formation sequence, morphological and electrical properties	4
Novel wafer-scale adhesive bonding with improved alignment accuracy and bond uniformity	4
Exploring statistical approaches for accessing the reliability of Y2O3-based memristive devices	4
Flexible transparent conductive electrode of Au/PDMS prepared by electrochemical-assisted peeling	4
A simple figure of merit to identify the first layer to degrade and fail in dual layer SiOx/HfO2 gate dielectric stacks	4
Study on the effect of residual ceria slurry on chemical mechanical planarization (CMP)	4
Cryo-CMOS design-technology co-optimization of low noise amplifier for silicon qubit readout	4
Effect of accelerated hydrothermal aging on the durability of Si-based dielectric thin films	3
Critical solder joint in insulated gate bipolar transistors (IGBT) power module for improved mechanical reliability	3
Design of memristor hyperchaotic circuit with burst oscillation and infinite attractor coexistence and its application	3
Local strain modification effects on global properties of AlGaN/GaN high electron mobility transistors	3
Nucleation-controlled growth of Cu thin films electrodeposited directly on ALD Ru diffusion barrier in additive-free electrolyte for Cu interconnect	3
High consistency VO2 memristor for artificial auditory neuron	3
La-doped BiFeO3 junction based random access multilevel nonvolatile memory	3
Simulation and optimization of microlens hot-melting fabricating process based on finite element method	3
The role of the polyelectrolyte composition in kinetic behaviour of organic memristive device	3
Pre-deposition growth of interfacial SiO2 layer by low-oxygen-partial-pressure oxidation in the Al2O3/4H-SiC MOS structure	3
Development of n-type epitaxial growth on 200 mm 4H-SiC wafers for the next generation of power devices	3
Design and analysis of Cu circuit for stretchable electronic circuits using finite element analysis	3
Nanolitography based on electrospun and etched nanofibers	3
Influence of fluorine implantation on the physical and electrical characteristics of GaN-on-GaN vertical Schottky diode	3
Fabrication of hybrid fine metal mask through micro/nano-photolithography and electroforming	3
A dual-mass fully decoupled MEMS gyroscope with optimized structural design for minimizing mechanical quadrature coupling	3
Small signal analysis of ultra-wide bandgap Al0.7Ga0.3N channel MESFETs	3
Effect of hydrogen plasma treatment on the electrical properties for SiC-based power MOSFETs	3
Improvement in long-term stability of field effect transistor biosensor in aqueous environments using a combination of silane and reduced graphene oxide coating	3
Static and dynamic interaction between polyvinyl acetal brushes and flat surfaces—Measuring near-surface brush volume ratio and nodule volume change for moving brushes	3
Fabrication of ultra-thin laser induced graphene electrodes over negative photoresist on glass for various electronic applications	3
Water-soluble polyethylene-oxide polymer based memristive devices	3
Patterning a cellulose based dual-tone photoresist via deep X-ray lithography	3
Current transport in Ni Schottky barrier on GaN epilayer grown on free standing substrates	3
Effect of annealing process parameters on N-GaAs ohmic contacts	3
A method to increase line-density of grating based on PDMS stretching and PUA replication process	3
Soft photomask lithography and droplet spreading nano-imprinting for manufacturing patterned sapphire substrates	3
Humidity-dependent synaptic characteristics in gelatin-based organic transistors	3
Investigation of trapping/de-trapping dynamics of surface states in AlGaN/GaN high-electron mobility transistors based on dual-gate structures	3
Inspecting and classifying physical failures in MEMS substrates during fabrication using computer vision	3
Dynamical analysis, circuit implementation, and simultaneous application of a novel four-dimensional hyperchaotic system based on cosine functions	3
Effect of brush cleaning on defect generation in post copper CMP	3
Design of multi-scroll chaotic attractor based on a novel multi-segmented memristor and its application in medical image encryption	3
Optimization of MoCl5 intercalation for low-resistance and low-damage exfoliated highly-oriented pyrolytic graphite	3
Capacitive immunosensor for COVID-19 diagnosis	3
Microfluidic Fredkin gate: A novel control unit for integrated microfluidic systems	3
Bias-stress instabilities in low-temperature thin-film transistors made of Al2O3 and ZnO films deposited by PEALD	3
Dramatically enhanced ambient effects in a multi-layer MoS2 transistor with channel thickness near maximum depletion width	3
Fabrication of high aspect ratio atomic force microscope probes using focused ion beam milled etch mask	3
A novel self-aligned double patterning integrated with Ga+ focused ion beam milling for silicon nanowire definition	3
Analysis of warpage of a flip-chip BGA package under thermal loading: Finite element modelling and experimental validation	3
Al3Sc thin films for advanced interconnect applications	3
The effect of Ag atoms diffusion into δ-phase CsPbI3-based memory device	3
Investigation of hybrid InSb and GaSb quantum nanostructures	3
A multi-physics approach to condition monitoring of SiC power module	3
Study of nonlinear vibration of resonant gyroscope based on uncertainty analysis method	3
An intensive study on effects of lateral scaling and gate metals on the RF/DC performance of recessed T-gated Fe-doped AlN/GaN/SiC HEMTs for future RF and microwave power applications	3
8 A, 200 V normally-off cascode GaN-on-Si HEMT: From epitaxy to double pulse testing	3
Estimation of channel temperature and thermal sensitivity for a 0.15 μm GaN HEMT	3
Low-cost coagulation treatment of dye sensitizer for improved time immersion of dye-sensitized solar cells (DSSC)	3
A novel microscale platform for leukemia tumor treating field therapy and electrochemical screening	2
A novel second generation current conveyor (CCII)-based high frequency memristor model	2
Thermal reflow of plasma-polymerized fluorocarbon for nanochannels and particle encapsulation	2
Thermal stability, work function and Fermi level analysis of 2D multi-layered hexagonal boron nitride films	2
Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration	2
A tensile test for freestanding low-k thin films using a lift-off technique	2
Pentacene organic thin-film transistor based on Archimedean interdigitated spiral pattern	2
Influence of dual Ge/C pre-amorphization implantation on the Ni1−Pt Si phase nucleation and growth mechanisms	2
Performance enhancement of WS2 transistors via double annealing	2
Superconducting V3Si for quantum circuit applications	2
Performance analysis of SnS photodetector using strained SnO2 stacked layer: Numerical simulation and DFT calculations	2
Microelectronic Engineering: Publisher's note	2
An improved scanning probe-based lithography: Site-controlled formation of self-assembled film as an etch mask	2
Micrometer-size crystalline monolayer MoS2 domains obtained by sulfurization of molybdenum oxide ultrathin films	2
A study of gate recess-width control of InP-based HEMTs by a Si3N4 passivation layer	2
A micromachined Joule-Thomson cryocooler for ice lithography	2
A sensitive conductivity sensor for arsenic detection in environmental samples	2
Comparison of ratio of gate length to gate-drain distance influences on source access resistance of AlGaN/AlN/GaN HFETs at different temperatures	2
Effect of potassium persulfate on chemical mechanical planarization of Cu/Ni microstructures for MEMS	2
Selective functionalization of silicon nitride with a water-soluble etch-resistant polymer	2
Structural and electrical correlation in aluminum nitride thin films grown by plasma enhanced atomic layer deposition as interface insulating layers on silicon carbide (4H-SiC)	2
Observation of different transport behaviors in a two-dimensional MoTe2 field-effect transistor with engineered gate stack	2
Wheelchair control system with hand movement using accelerometer sensor	2
A study of structural effect on the spectral property of metallic cross-hole array in mid-infrared wavelengths	2
Generation of inverse assist features using generative adversarial networks	2
Low temperature, highly stable ZnO thin-film transistors	2