Microelectronic Engineering

(The median citation count of Microelectronic Engineering is 2. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2020-06-01 to 2024-06-01.)
Wind energy harvesting using piezoelectric macro fiber composites based on flutter mode52
Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques42
Synthesis, characterization and electrochemical investigation of physical vapor deposited barium sulphide doped iron sulphide dithiocarbamate thin films42
Temperature compensated diaphragm based Fiber Bragg Grating (FBG) sensor for high pressure measurement for space applications29
Design, fabrication, and characterization of an SLA 3D printed nanocomposite electromagnetic microactuator25
Superhydrophobic and superoleophobic properties enhancement on PDMS micro-structure using simple flame treatment method23
Additive manufacturing of titanium alloys – Enabling re-manufacturing of aerospace and biomedical components23
An integrated electro-optical biosensor system for rapid, low-cost detection of bacteria23
Characterization of AlN and AlScN film ICP etching for micro/nano fabrication22
Impact of serum concentration in cell culture media on tight junction proteins within a multiorgan microphysiological system22
The electrical characteristic of an MIS structure with biocompatible minerals doped (Brushite+Monetite: PVC) interface layer21
4D printing: A detailed review of materials, techniques, and applications19
Design, fabrication and test of a bulk SiC MEMS accelerometer18
Surface plasmon resonance sensor based on MXene coated PCF for detecting the cancer cells with machine learning approach18
Rapid fabrication of NiO/porous Si film for ultra-violate photodetector: The effect of laser energy18
A triboelectric nanogenerator based on human fingernail to harvest and sense body energy18
Self-powered ultra-sensitive millijoule impact sensor using room temperature cured PDMS based triboelectric nanogenerator18
2DEG transport properties over temperature for AlGaN/GaN HEMT and AlGaN/InGaN/GaN pHEMT17
Variability estimation in resistive switching devices, a numerical and kinetic Monte Carlo perspective17
Fully CMOS-compatible passive TiO2-based memristor crossbars for in-memory computing17
Hierarchical CuO nanostructured materials for acetaldehyde sensor application17
Progress in SiC nanowire field-effect-transistors for integrated circuits and sensing applications16
A self-supported structure hybrid triboelectric/piezoelectric nanogenerator for bio-mechanical energy harvesting and pressure sensing16
Synthesis and analysis of TiO2 nanotubes by electrochemical anodization and machine learning method for hydrogen sensors15
Realization of ppb-level acetone detection using noble metals (Au, Pd, Pt) nanoparticles loaded GO FET sensors with simultaneous back-gate effect15
The role of the AC signal on the dielectrophoretic assembly of carbon nanotubes across indium tin oxide electrodes15
Non-volatile resistive switching memory device based on ZnO-graphene oxide embedded in a polymer matrix fabricated on a flexible PET substrate15
Physics-based simulation of stress-induced and electromigration-induced voiding and their interactions in on-chip interconnects14
Micropillar based active microfluidic mixer for the detection of glucose concentration14
Polymeric seed layer as a simple approach for nanostructuring of Ga-doped ZnO films for flexible piezoelectric energy harvesting14
The investigation and DFT calculation on the gas sensing properties of nanostructured SnO214
Improving sensing properties of entangled carbon nanotube-based gas sensors by atmospheric plasma surface treatment14
Design, analysis and fabrication of a novel hybrid electrothermal microgripper in microassembly cell14
Effects of change of oxygen vacancy on hysteresis voltage and stability under time-temperature dependence positive bias stress in amorphous SZTO transistors13
Microelectronic materials, microfabrication processes, micromechanical structural configuration based stiffness evaluation in MEMS: A review13
Flexible pressure sensor with a wide pressure measurement range and an agile response based on multiscale carbon fibers/carbon nanotubes composite13
CVD graphene-based flexible and transparent SERS substrate towards L-tyrosine detection13
Multi-layered BTO/PVDF nanogenerator with highly enhanced performance induced by interlaminar electric field13
Review on fabrication, characterization, and applications of porous anodic aluminum oxide films with tunable pore sizes for emerging technologies13
A wearable graphene transistor-based biosensor for monitoring IL-6 biomarker13
Demolding force dependence on mold surface modifications in UV nanoimprint lithography13
A triboelectric nanogenerator for mechanical energy harvesting and as self-powered pressure sensor12
Effect of GaN cap layer on the performance of AlInN/GaN-based HEMTs12
Fabrication of modifier-free superhydrophobic surfaces with anti-icing and self-cleaning properties on Ti substrate by anodization method12
Cost-effective technique to fabricate a tubular through-hole anodic aluminum oxide membrane using one-step anodization12
CSRR loaded high gained 28/38GHz printed MIMO patch antenna array for 5G millimeter wave wireless devices12
Synthesis and optimum temperature determination of highly sensitive MoO3-based heterojunction Schottky sensor for hydrogen detection12
Mixed dimensional Transition Metal Dichalcogenides (TMDs) vdW Heterostructure based Photodetectors: A review12
Parameter extraction techniques for the analysis and modeling of resistive memories12
Microscale analysis and gas sensing characteristics based on SnO2 hollow spheres12
Numerical simulation of stable electrohydrodynamic cone-jet formation and printing on flexible substrate12
High-performance and wearable strain sensors based on graphene microfluidics and serpentine microchannels for human motion detection11
Facile fabrication of flexible and conductive AuNP/DWCNT fabric with enhanced Joule heating efficiency via spray coating route11
Hyperchaotic circuit design based on memristor and its application in image encryption11
Ultrathin encapsulated rGO strain sensor for gesture recognition11
Electrical characterization of flexible hafnium oxide capacitors on deformable softening polymer substrate11
Synthesis and binder-free assembly of SrFe12O19 nano-platelets for wafer-scale patterning of magnetic components11
Influence of alkyl chain length of boronic acid self-assembled monolayers on indium tin oxide and their organic solar cell performance11
Tunable flexible pressure sensor based on bioinspired capillary-driven method11
Application of thin Au/Ti double-layered films as both low-temperature bonding layer and residual gas gettering material for MEMS encapsulation11
Laser-induced graphene electrode based flexible heterojunction photovoltaic cells11
PCRAM electronic synapse measurements based on pulse programming engineering11
Synthesis of boron-doped CQDs and its use as an additive in P3HT:PCBM layer for efficiency improvement of organic solar cell11
Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors11
Rotatory microgripper based on a linear electrostatic driving scheme10
An optical fiber electric field sensor based on polarization-maintaining photonic crystal fiber selectively filled with liquid crystal10
Dropout neuronal unit with tunable probability based on NbOx stochastic memristor for efficient suppression of overfitting10
Development of low cost screen-printed piezoresistive strain sensor for facial expressions recognition systems10
Phase field simulation of electrohydrodynamic jet droplets and printing microstructures on insulating substrates10
Experimental and computational investigation of low temperature Cu Sn solid-state-diffusion bonding for 3D integration10
Mechanisms of colloidal ceria contamination and cleaning during oxide post CMP cleaning10
Low-loss through silicon Vias (TSVs) and transmission lines for 3D optoelectronic integration10
Surface ablation thresholds of femtosecond laser micropatterning silver nanowires network on flexible substrate10
Analysis and compensation for nonlinearity of sandwich MEMS capacitive accelerometer induced by fabrication process error10
Fabrication of ultrathin artificial basement membrane for epithelial cell culture9
Fabrication technology and electrophysical properties of a composite memristor-diode crossbar used as a basis for hardware implementation of a biomorphic neuroprocessor9
Fabrication and nanoindentation characterization of nickel micro-pillar mold for nanoimprint lithography9
SAR assessment of miniaturized wideband MIMO antenna structure for millimeter wave 5G smartphones9
A study of greyscale electron beam lithography for a 3D round shape Kinoform lens for hard X-ray optics9
Fabrication of high frequency SAW devices using tri-layer lift-off photolithography9
Graphene as the ultra-transparent conductive layer in developing the nanotechnology-based flexible smart touchscreens9
PMMA sacrificial layer based reliable debonding of ultra-thin chips after lapping9
Development of an automated system for obstructive sleep apnea treatment based on machine learning and breath effort monitoring9
Crystallization behavior of N -doped Ge-rich GST thin films and nanostructures: An in-situ synchrotron X-ray diffraction study9
Investigation on asymmetric resistive switching (RS) characteristics in p-NiO/n-ZnO heterojunctions9
A low-g omnidirectional MEMS inertial switch with load direction identification9
Metal-based asymmetric field emission diodes operated in the air9
Direct micropatterning on a titanium surface through electrochemical imprint lithography with a polymer electrolyte membrane stamp9
InAs/InGaAs quantum dots confined by InAlAs barriers for enhanced room temperature light emission: Photoelectric properties and deep levels8
A single-step fabrication of Ag nanoparticles and CVD graphene hybrid nanostructure as SERS substrate8
Well-balanced high permittivity and low dielectric loss obtained in PVDF/graphite/BN ternary composites by depressing interfacial leakage conduction8
Effects of series resistance and interface state on electrical properties of Al/Er2O3/Eu2O3/SiO2/n-Si/Al MOS capacitors8
Influence of abrasive morphology and size dispersity of Cu barrier metal slurry on removal rates and wafer surface quality in chemical mechanical planarization8
Fabrication of bifocal lenses using resin that can be processed by electron beam lithography after ultraviolet-nanoimprint lithography8
An automatic cell culture platform for differentiation of human induced pluripotent stem cells8
Improving the electrical performance of vertical thin-film transistor by engineering its back-channel interface8
Organotin bearing polymeric resists for electron beam lithography8
The effect of the top electrode on the switching behavior of bipolar Al2O3/ZnO RRAM8
Soft and flexible gold microelectrodes by supersonic cluster beam deposition and femtosecond laser processing8
On-chip real-time detection and quantification of reactive oxygen species in MCF-7 cells through an in-house built fluorescence microscope7
Effect of the oxygen dependent device parameters on the electrical properties of a-Si-Zn-Sn-O thin film transistors7
Room temperature photon induced electrical tuning of intersubband transition in GaN HEMT for terahertz applications7
Mechanisms of GaAs surface passivation by a one-step dry process using low-frequency plasma enhanced chemical deposition of silicon nitride7
A perovskite-based artificial photonic synapse with visible light modulation and ultralow current for neuromorphic computing7
Improved rectification characteristics by engineering energy barrier height in TiOx-based RRAM7
Using a triblock copolymer as a single additive in high aspect ratio through silicon via (TSV) copper filling7
Chip-level thermal management in GaN HEMT: Critical review on recent patents and inventions7
The influence of thermal loads on the physical properties of carbon nanotubes forests7
Optimization of corner compensations in wet etching of silicon for a MEMS Z-axis accelerometer7
Effects of BOX thickness, silicon thickness, and backgate bias on SCE of ET-SOI MOSFETs7
In-situ characterization of thermomechanical behavior of copper nano-interconnect for 3D integration7
Fabrication and characterization of metal insulator semiconductor Ag/PVA/GO/PVA/n-Si/Ag device7
Influence of AlN spacer and GaN cap layer in GaN heterostructure for RF HEMT applications7
UV-curable polyimide/layered silicate films with improved barrier properties for the protection of semiconductor chips7
Polyimide moth-eye nanostructures formed by oxygen ion beam etching for anti-reflection layers7
Theoretical validation of inhibition mechanisms of benzotriazole with copper and cobalt for CMP and post-CMP cleaning applications7
Temperature dependant high output voltage generation via mechanical transducer by using surface modified (O2, CO2, NO2) ZnO nanowires7
Fabrication of serpentine and I structured graphene-CNT based highly sensitive and flexible strain sensors7
A novel room temperature SO2 gas sensor based on TiO2/rGO buried-gate FET7
Burr- and etch-free direct machining of shape-controlled micro- and nanopatterns on polyimide films by continuous nanoinscribing for durable flexible devices7
Ion-beam-etching based lift-off for reliable patterning of dense and inverse metallic nanostructures towards 10-nm scale7
Effects of heavy ion irradiation on Cu/Al2O3/Pt CBRAM devices7
A numerical study on slurry flow with CMP pad grooves7
Characterization of AlGaN/GaN degradations during plasma etching for power devices7
Smart wearable triboelectric nanogenerator for self-powered bioelectronics and therapeutics7
Replication of plastic microlens arrays using electroforming and precision compression molding6
Comprehensive physics-based RRAM compact model including the effect of variability and multi-level random telegraph noise6
Overview of printable nanoparticles through inkjet process: Their application towards medical use6
Effect of the deposition method and substrate on an ultra-stable CoV2O6 hydrogen gas sensor, operating at room temperature6
Effect of zinc oxide nucleation on flexible bio based carbon nanotube cotton via chemical bath deposition method6
A review of high-voltage integrated power device for AC/DC switching application6
Ultrasensitive WSe2/MoSe2 heterojunction photodetector enhanced by photogating effect6
Cyclic voltammetric biosensing of cellular ionic secretion based on silicon nanowires to detect the effect of paclitaxel on breast normal and cancer cells5
Enhancement of polarization response in UVA and UVC wavelength with integrated sub-wavelength metal-grids5
Fabrication of high aspect ratio microfluidic devices for long term in vitro culture of 3D tumor models5
Simulation-based optimization of out-of-plane, variable-height, convoluted quartz micro needle arrays via single-step anisotropic wet etching5
Mechanical reinforcement of UV-curable polymer nanocomposite for nanopatterned mold5
Investigating the effect of electrolyte types with various ionic liquids on the electrochromic performance of PEDOT:PSS based LbL multilayers5
Experimental and theoretical insights into electronic properties of oxygen-doped MoTe2 field effect transistor5
Nanosilver dumbbell electronic sheet for cyanide and glucose detection5
Fabrication of gold nanostructures using wet lift-off without adhesion promotion5
A methodology for mechanical stress and wafer warpage minimization during 3D NAND fabrication5
Tri-layer contact photolithography process for high-resolution lift-off5
Temperature characteristics testing and modifying of piezoelectric composites5
Etching of sub-10 nm half-pitch high chi block copolymers for directed self-assembly (DSA) application5
Microscale white light emitters fabricated by two-photon polymerization lithography on functional resist5
Highly thermostable ultrathin planar Ag transparent heaters5
Fabrication of SiC concave microlens array mold based on microspheres self-assembly5
Implementation of hybrid PDMS-graphite/Ag conductive material for flexible electronic devices and microfluidic applications5
Precise measurement of junction temperature by thermal analysis of light-emitting diode operated at high environmental temperature5
Soybean-based memristor for multilevel data storage and emulation of synaptic behavior5
Achieving nano-patterned features by micro-EDM process using vertically aligned ZnO nanorods grown on microprobe tip: A scaling approach5
Image analysis algorithm for the verification of hexagonal symmetry in spherical nanostructures5
Low-temperature (≤550 °C) p-channel Schottky barrier SOI FinFETs for monolithic 3D integration5
A review of graphene-based temperature sensors5
A study of catalyst particles encapsulated inside multiwalled carbon nanotubes on zeolite and montmorillonite5
Absorbance-based detection of arsenic in a microfluidic system with push-and-pull pumping5
Hybrid integrated Si nanosheet GAA-FET and stacked SiGe/Si FinFET using selective channel release strategy5
Swimming force characterizations of multistaged bi-helical microswimmer and 3D vortex trap manipulation5
Significant improvement in the performance of well-aligned ZnO nanowire arrays ultraviolet photodetector by Ga doping4
A novel high-performance junctionless 4H-SiC trench MOSFET with improved switching characteristics4
PDMS micro-dewy spider-web-like metal nanofiber films for fabrication of high-performance transparent flexible electrode with improved mechanical strength4
Flexible and disposable ultrasensitive liquid sensors based on CNTs and CNTs/ZnO-NPs spray-coated cellulose fiber frameworks4
New insights on Ni-Si system for microelectronics applications4
FEA study on the TSV copper filling influenced by the additives and electroplating process4
Parametric investigation on Laser-Induced Forward Transfer of ZnO nanostructure on flexible PET sheet for optoelectronic application4
Drying process of an ink-dot analyzed using both digital holographic microscopy and tackiness measurement4
Electrochemically functionalized single-walled carbon nanotubes for ultrasensitive detection of BTEX vapors4
Cryo-CMOS design-technology co-optimization of low noise amplifier for silicon qubit readout4
Graphene-based physical sensors for humidity, temperature and strain detections4
A one-step pattern transferring process for freestanding diffractive spiral photon sieves in extreme ultraviolet4
The current transport mechanism of Al/Beetroot/Cu used as an organic semiconductor Schottky diode is superior than natural dye-based thin film devices4
Transition between resistive switching modes in asymmetric HfO2-based structures4
Fabrication of integrated silicon PIN detector based on Al-Sn-Al bonding for ΔE-E telescope application4
Impact of Sn on the Ti/Ge solid-state reaction: Phase formation sequence, morphological and electrical properties4
Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication4
Flexible transparent conductive electrode of Au/PDMS prepared by electrochemical-assisted peeling4
Effects of polyethyleneimine, applied potential and the initial gap on the localized electrochemical deposition of silver microcolumns4
Reduced graphene oxide functionalized Ag:ZnO nanocomposites for real time monitoring of NO2 gas4
Capacitance-voltage measurements of monolayer MoS2 metal-oxide-semiconductor capacitors4
Processing, property modulation and application of one-dimensional SiC nanostructure field emitters4
Nanobeam electron diffraction strain mapping in monocrystalline silicon of modern trench power MOSFETs4
Fabrication of microchannel and diaphragm for a MEMS acoustic sensor using wet etching technique4
Performance improvement of Al0.3Ga0.7N/AlN/GaN HEMTs using Nitrogen pre-treated Si3N4 passivation4
Study on three-dimensional dielectrophoresis microfluidic chip for separation and enrichment of circulating tumor cells4
Improved performance of near UV-blue n-ZnO/p-GaN heterostructure LED with an AlN electron blocking layer4
An optimized Ni P seed layer coating method for through glass via (TGV)4
Defect levels and interface space charge area responsible for negative photovoltage component in InAs/GaAs quantum dot photodetector structure4
Impact of interfacial trap states on achieving bias stability in polymer field-effect transistors4
Developing a micro-thermography system for thermal characterization of LED packages4
Detailed review on c-Si/a-Si:H heterojunction solar cells in perspective of experimental and simulation3
Effect of hydrogen plasma treatment on the electrical properties for SiC-based power MOSFETs3
An enhanced triboelectric nanogenerator with micro-grid patterned PDMS for self-powered sensing and music playback3
Inspecting and classifying physical failures in MEMS substrates during fabrication using computer vision3
Capacitive immunosensor for COVID-19 diagnosis3
Printed resistive switching memory operated by screen-printed microbattery via shared electrode3
Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel3
Local strain modification effects on global properties of AlGaN/GaN high electron mobility transistors3
Nucleation-controlled growth of Cu thin films electrodeposited directly on ALD Ru diffusion barrier in additive-free electrolyte for Cu interconnect3
Patterning a cellulose based dual-tone photoresist via deep X-ray lithography3
The role of the polyelectrolyte composition in kinetic behaviour of organic memristive device3
Charge transport properties of semiconducting natural rubber (Cis 1,4-polyisoprene)3
Mobility improvement of LTPS thin film transistor using stacked capping layer3
A method to increase line-density of grating based on PDMS stretching and PUA replication process3
Reliability evaluation of ultra thin 3D-IC package under the coupling load effects of the manufacturing process and temperature cycling test3
Pre-deposition growth of interfacial SiO2 layer by low-oxygen-partial-pressure oxidation in the Al2O3/4H-SiC MOS structure3
Nanolitography based on electrospun and etched nanofibers3
Investigation of hybrid InSb and GaSb quantum nanostructures3
Small signal analysis of ultra-wide bandgap Al0.7Ga0.3N channel MESFETs3
Low-cost coagulation treatment of dye sensitizer for improved time immersion of dye-sensitized solar cells (DSSC)3
Effect of accelerated hydrothermal aging on the durability of Si-based dielectric thin films3
Fabrication of hybrid fine metal mask through micro/nano-photolithography and electroforming3
Study of physisorption phenomena of chemical species on 300 mm Si wafers during controlled mini-environment transfers between microelectronic equipments3
Reliability challenges in CMOS technology: A manufacturing process perspective3
Exploring statistical approaches for accessing the reliability of Y2O3-based memristive devices3
Microfluidic Fredkin gate: A novel control unit for integrated microfluidic systems3
Effect of annealing process parameters on N-GaAs ohmic contacts3
Water-soluble polyethylene-oxide polymer based memristive devices3
Impact of the pre amorphization by Ge implantation on Ni0.9Pt0.1 silicide3
Study on the effect of residual ceria slurry on chemical mechanical planarization (CMP)3
Parametric study of pulsed laser deposited (PLD) WSe2 2D transistors3
Design and analysis of Cu circuit for stretchable electronic circuits using finite element analysis3
A multi-physics approach to condition monitoring of SiC power module3
Characterization of silane based ultra-thin barrier deposited at elevated temperature3
Estimation of channel temperature and thermal sensitivity for a 0.15 μm GaN HEMT3
Improvement in long-term stability of field effect transistor biosensor in aqueous environments using a combination of silane and reduced graphene oxide coating3
Optimization of MoCl5 intercalation for low-resistance and low-damage exfoliated highly-oriented pyrolytic graphite3
Bias-stress instabilities in low-temperature thin-film transistors made of Al2O3 and ZnO films deposited by PEALD3
The insight and evaluation of ultra-scaled sub-1 nm gate length transistors3
Dramatically enhanced ambient effects in a multi-layer MoS2 transistor with channel thickness near maximum depletion width3
The effect of Ag atoms diffusion into δ-phase CsPbI3-based memory device3
Study of electrical attributes of molybdenum ditelluride (MoTe2) FET using experimental and theoretical evidences3
Soft photomask lithography and droplet spreading nano-imprinting for manufacturing patterned sapphire substrates3
Microstructuring technology for large and cylindrical receivers for concentrated solar plants (CSP)3
Effects of high energy heavy ion irradiation on resistive switches3
Simulation and optimization of microlens hot-melting fabricating process based on finite element method3
Design and fabrication of integrated superconducting isolator-circulator-isolator chip2
Superconducting V3Si for quantum circuit applications2
Thermal reflow of plasma-polymerized fluorocarbon for nanochannels and particle encapsulation2
Humidity-dependent synaptic characteristics in gelatin-based organic transistors2
CMOS-compatible GaN-based high electron mobility transistors with gate-first technology2
Ni-based metallization of GeSn layers: A review and recent advances2
A novel self-aligned double patterning integrated with Ga+ focused ion beam milling for silicon nanowire definition2
A dual-mass fully decoupled MEMS gyroscope with optimized structural design for minimizing mechanical quadrature coupling2
Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration2
Study of nonlinear vibration of resonant gyroscope based on uncertainty analysis method2
Microelectronic Engineering: Publisher's note2
Metamorphic InAs/InGaAs quantum dots for optoelectronic devices: A review2
Influence of fluorine implantation on the physical and electrical characteristics of GaN-on-GaN vertical Schottky diode2
Observation of different transport behaviors in a two-dimensional MoTe2 field-effect transistor with engineered gate stack2