Microelectronic Engineering

Article	Citations
Neural network for in-sensor time series recognition based on optoelectronic memristor	77
A simulation study of grayscale ice lithography for spiral phase plates in near infrared wavelengths	68
Editorial Board	64
Evolution of etch profile of <111> silicon in HNA solution	52
Plasma surface treatment of GeSn layers and its subsequent impact on Ni / GeSn solid-state reaction	41
CMOS-compatible GaN-based high electron mobility transistors with gate-first technology	39
Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration	39
The effect of switching and cycle-to-cycle variations of RRAM on 4-bit encryption/decryption process	38
Advanced gallium nitride high electron mobility transistors for biosensing applications: Progress, challenges, and future perspectives	37
A dual-mass fully decoupled MEMS gyroscope with optimized structural design for minimizing mechanical quadrature coupling	37
Optimizing dose parameters for enhanced maskless lithography in MoS2-based devices	35
A 10 kHz bandwidth low-power active negative feedback front-end amplifier based on unipolar IZO TFT technology	34
Stress measurement based on magnetic Barkhausen noise for thin films	34
Humidity-dependent synaptic characteristics in gelatin-based organic transistors	33
Optimization of edge bead removal (EBR) process to enhance defect reduction in optical lithography	29
Strategies and approaches for RFID tag integration in textiles	29
The role of etching gas purity in C4F8/Ar plasma to optimize SiO2 etching process	27
Simulation and optimization of reactor airflow and magnetic field for enhanced thin film uniformity in physical vapor deposition	26
Research on stress mutation of fiber optic gyroscope	26
A novel and reliable approach for controlling silicon membrane thickness with smooth surface	24
Selective functionalization of silicon nitride with a water-soluble etch-resistant polymer	24
Stable electrospray signal on a microfabricated glass chip with three-dimensional open edge and tiered depth geometries	23
Experimental and theoretical insights into electronic properties of oxygen-doped MoTe2 field effect transistor	23
A multi-user wearable waistband system for real-time health monitoring of respiration, ECG, and body temperature	23
Spin coating in semiconductor lithography: Advances in modeling and future prospects	22

Neural networks based on in-sensor computing of optoelectronic memristor	22
Local strain modification effects on global properties of AlGaN/GaN high electron mobility transistors	22
Using water structuring by ions to address pattern loading in wet HF-based oxide recess etch	21
On the influence of Ni(Pt)Si thin film formation on agglomeration threshold temperature and its impact on 3D imaging technology integration	21
Hierarchical CuO nanostructured materials for acetaldehyde sensor application	21
Etch characteristics of cobalt thin films using high density plasma of CH3COCH3/Ar gas mixture	20
Performance enhancement of WS2 transistors via double annealing	20
New concept of two-cascade energy compression systems based on drift step recovery diodes	20
Static and dynamic interaction between polyvinyl acetal brushes and flat surfaces—Measuring near-surface brush volume ratio and nodule volume change for moving brushes	20
Micro-Raman evaluation of 200 mm SiC material	20
Influence of AlN spacer and GaN cap layer in GaN heterostructure for RF HEMT applications	19
Reliability challenges in CMOS technology: A manufacturing process perspective	19
Dependence of frequency-temperature stability on support tethers in dual-beam piezoresistive sensing MEMS resonators	18
Fully CMOS-compatible passive TiO2-based memristor crossbars for in-memory computing	18
Comprehensive physics-based RRAM compact model including the effect of variability and multi-level random telegraph noise	18
Exploring statistical approaches for accessing the reliability of Y2O3-based memristive devices	18
Editorial Board	17
Optical, morphological and electrical studies of fully doctor bladed CsPbBr2Cl-based perovskite thin films	17
A study of gate recess-width control of InP-based HEMTs by a Si3N4 passivation layer	17
A 0.324-THz transmitter based on individual 2.65 % efficiency x16 frequency multiplier chiplets for phased-array and PMF applications	17
Development of an emulator of the sustainable energy harvesting pad system on a bike lane for charging lithium batteries	16
Chemical structure characteristics of flexible low-k SiCOH thin films etched by inductively coupled plasma-reactive ion etching process using FTIR and XPS spectra analysis	16
Silicon microresonator arrays: A comprehensive study on fabrication techniques and pH-controlled stress-induced variations in cantilever stiffness	16
Microscale white light emitters fabricated by two-photon polymerization lithography on functional resist	16
A tensile test for freestanding low-k thin films using a lift-off technique	16
Strategies for avoiding delamination in system-in-packaging devices	15
A perovskite-based artificial photonic synapse with visible light modulation and ultralow current for neuromorphic computing	15
Etching mechanism of high-aspect-ratio array structure	15
Improvement in long-term stability of field effect transistor biosensor in aqueous environments using a combination of silane and reduced graphene oxide coating	15
A new tunable floating memristor emulator circuit with long-term memory	15
Evolution of 2D materials conducive to the wearable physical sensors for structural health assessment	15
Epitaxial growth of AlGaN/GaN HEMTs on patterned Si substrate for high voltage power switching applications	15
A triboelectric nanogenerator for mechanical energy harvesting and as self-powered pressure sensor	15
Effect of the oxygen dependent device parameters on the electrical properties of a-Si-Zn-Sn-O thin film transistors	14
A novel time-domain in-memory computing unit using STT-MRAM	14
Advanced approach of bulk (111) 3C-SiC epitaxial growth	14
Thermal management of through-silicon vias and back-end-of-line layers in 3D ICs: A comprehensive review	14
Editorial Board	14
A novel high-Q Lamé mode bulk acoustic resonator	14
Editorial Board	14
Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors	13
Deep-level traps in as-grown and electron-irradiated homo-epitaxial n-GaN layers grown by MOVPE	13
Editorial Board	13
Editorial Board	13
Theoretical insights into the impact of border and interface traps on hysteresis in monolayer MoS2 FETs	13
Study of ion charging effect to improve reactive-ion-etching profile of PbSe grating structures	13
Preventing oxide precipitation in selective wet etching of Si3N4 for 3D-NAND structure fabrication: The role of bubbles	13
Review of the pressure sensor based on graphene and its derivatives	13
Wide scan angle multibeam conformal antenna array with novel feeding for mm-wave 5G applications	12
The current transport mechanism of Al/Beetroot/Cu used as an organic semiconductor Schottky diode is superior than natural dye-based thin film devices	12

Improved positive bias temperature instability of n-type vertical C-shaped-channel nanosheet FET by forming gas annealing	12
Finite element modeling analysis of misalignment impact on simulated electrical RC in scaling hybrid bonding pairs	12
Synthesis and analysis of TiO2 nanotubes by electrochemical anodization and machine learning method for hydrogen sensors	11
Use of a hybrid metrology approach to develop holistic filtration solutions in hydrogen peroxide	11
Editorial Board	11
Study of nonlinear vibration of resonant gyroscope based on uncertainty analysis method	11
Amorphous indium gallium zinc oxide thin film transistors (a-IGZO-TFTs): Exciting prospects and fabrication challenges	11
Optimization of read operation for low power consumption in 3D NAND flash memory	11
Editorial Board	11
Analysis and compensation for nonlinearity of sandwich MEMS capacitive accelerometer induced by fabrication process error	10
Machine learning algorithm for the structural design of MEMS resonators	10
Novel methods for locating and matching IC cells based on standard cell libraries	10
Influence of fluorine implantation on the physical and electrical characteristics of GaN-on-GaN vertical Schottky diode	10
A one-step pattern transferring process for freestanding diffractive spiral photon sieves in extreme ultraviolet	10
Large-scale growth of MoS2 hybrid layer by chemical vapor deposition with nanosheet promoter	10
A new characterization model of FinFET self-heating effect based on FinFET characteristic parameter	10
Editorial Board	9
Thermal stability, work function and Fermi level analysis of 2D multi-layered hexagonal boron nitride films	9
Chip-level thermal management in GaN HEMT: Critical review on recent patents and inventions	9
Optimization of pattern quality in DMD scanning maskless lithography: A parametric study of the OS3L exposure algorithm	9
Al3Sc thin films for advanced interconnect applications	9
Significant improvement in the performance of well-aligned ZnO nanowire arrays ultraviolet photodetector by Ga doping	9
Cryo-CMOS design-technology co-optimization of low noise amplifier for silicon qubit readout	9
Effect of GaN cap layer on the performance of AlInN/GaN-based HEMTs	8
Editorial Board	8
An optimized Ni P seed layer coating method for through glass via (TGV)	8
Recent advancement in β-Ga2O3 MOSFETs: From material growth to device architectures for high-power electronics	8
Facile and direct 3D printing of smart glove for gesture monitoring	8
TCAD simulations of radiation damage in 4H-SiC	8
Improving performance of cathode NMC-811 by CeO2-coating for Li-ion battery	8
A self-supported structure hybrid triboelectric/piezoelectric nanogenerator for bio-mechanical energy harvesting and pressure sensing	8
First steps towards interlocking modular microfluidic cooling substrates (i-MμCS) for future silicon tracking detectors in High Energy Physics (HEP)	8
Editorial Board	8
Hybrid integrated Si nanosheet GAA-FET and stacked SiGe/Si FinFET using selective channel release strategy	8
Effect of temperature on joint quality in wave soldering of Sn-9Zn-2.5Bi-1.5In lead-free solder alloy	8
Facile fabrication of flexible and conductive AuNP/DWCNT fabric with enhanced Joule heating efficiency via spray coating route	8
Editorial Board	8
Design of multi-scroll chaotic attractor based on a novel multi-segmented memristor and its application in medical image encryption	8
Effect of the deposition method and substrate on an ultra-stable CoV2O6 hydrogen gas sensor, operating at room temperature	8
Quantitative assessment of adhesion strength in hybrid bonded interfaces with varying metal contact density	8
Dropout neuronal unit with tunable probability based on NbOx stochastic memristor for efficient suppression of overfitting	8
A synoptic review of nanoscale vacuum channel transistor: Fabrication to electrical performance	8
Recent advances in micro- and bio- electromechanical system architectures for energy efficient chemiresistors	7
Improved performance of near UV-blue n-ZnO/p-GaN heterostructure LED with an AlN electron blocking layer	7
Editorial Board	7
Impact of annealing on electric and elastic properties of 10-nm Hf0.5Zr0.5O2 films prepared on Si by sputtering	7
Electrical characteristics of Si0.7Ge0.3/Si heterostructure-based n-type GAA MOSFETs	7
Capacitive immunosensor for COVID-19 diagnosis	7
Impact of low-temperature and low-pressure mild oxidation after plasma solidification on electrical properties and reliability in ultra-thin SiON MOSFETs	7
Simulation study of zone-height limit by electron beam lithography for 30 nm Fresnel zone plates in X ray optics	7
Overview of printable nanoparticles through inkjet process: Their application towards medical use	7
Design and optimization of variable gain LNA for IoT applications using meta-heuristics search algorithms	7
Effect of accelerated hydrothermal aging on the durability of Si-based dielectric thin films	7
A low-g omnidirectional MEMS inertial switch with load direction identification	7
Photoelectron spectroscopy study of GeSn epitaxial layers for photonic applications	7
In-situ characterization of thermomechanical behavior of copper nano-interconnect for 3D integration	7
A laboratory system for X-ray assisted device alteration (XADA)	7
Tuning of interface quality of Al/CeO2/Si device by post-annealing of sol-gel grown high-k CeO2 layers	6
Laser induced reverse transfer of bulk Cu with a fs-pulsed UV laser for microelectronics applications	6
Stepping electron-beam lithography for Y-gate in high electron mobility transistors fabrication	6
An enhanced triboelectric nanogenerator with micro-grid patterned PDMS for self-powered sensing and music playback	6
Fabrication of microchannel and diaphragm for a MEMS acoustic sensor using wet etching technique	6
Editorial Board	6
High density nanofluidic channels by self-sealing for metallic nanoparticles detection	6
Ta/Al/CuW low temperature ohmic contacts for GaN-on-Si HEMT	6
Development of n-type epitaxial growth on 200 mm 4H-SiC wafers for the next generation of power devices	6
Battery anode design: From 1D nanostructure to 3D nanoarchitecture – Enabling next-generation energy storage technology	6
Fabrication of bifocal lenses using resin that can be processed by electron beam lithography after ultraviolet-nanoimprint lithography	6
Design of Ag/PDMS electrodes with a pillar structure for stretchable electronics	6
Fabrication of high frequency SAW devices using tri-layer lift-off photolithography	6
Origin of charges in bulk Si:HfO2 FeFET probed by nanosecond polarization measurements	6
Self-powered motion state monitoring system based on combined triboelectric nanogenerators for human physiological signal monitoring and energy collection	6
Study on different failure mechanisms of MOSFET caused by different oxide defects in 14 nm FinFET IC	6
Detailed review on c-Si/a-Si:H heterojunction solar cells in perspective of experimental and simulation	6
Editorial Board	6
Nanobeam electron diffraction strain mapping in monocrystalline silicon of modern trench power MOSFETs	6
Sustainable solvent metal lift-off for compound semiconductor fabrication with improved manufacturability	5
Smart wearable triboelectric nanogenerator for self-powered bioelectronics and therapeutics	5
Editorial Board	5
Microelectronic Engineering: Publisher's note	5

Feasibility study of fabricating 20 nm resolution dielectric Fresnel zone plates with ultrahigh aspect ratio for EUV optics	5
Ni-based metallization of GeSn layers: A review and recent advances	5
Micrometer-size crystalline monolayer MoS2 domains obtained by sulfurization of molybdenum oxide ultrathin films	5
Particle dispersion and mixing characteristics on the surface of a closed microchamber with magnetic artificial cilia	5
Direct micropatterning on a titanium surface through electrochemical imprint lithography with a polymer electrolyte membrane stamp	5
Wheelchair control system with hand movement using accelerometer sensor	5
GaN radiofrequency components and power amplifiers for next-generation 5G communications	5
Structural and electrical correlation in aluminum nitride thin films grown by plasma enhanced atomic layer deposition as interface insulating layers on silicon carbide (4H-SiC)	5
Graphene-based physical sensors for humidity, temperature and strain detections	5
Effect of hydrogen plasma treatment on the electrical properties for SiC-based power MOSFETs	5
Importance of layer distribution in Ni and Au based ohmic contacts to p-type GaN	5
Improving the electrical performance of vertical thin-film transistor by engineering its back-channel interface	5
Fabrication of uniform, periodic arrays of exotic AlN nanoholes by combining dry etching and hot selective wet etching, accessing geometries unrealisable from wet etching of planar AlN	5
Developing a micro-thermography system for thermal characterization of LED packages	5
Phase field simulation of electrohydrodynamic jet droplets and printing microstructures on insulating substrates	5
Redefining microelectronics	5
Technology review of CNTs TSV in 3D IC and 2.5D packaging: Progress and challenges from an electrical viewpoint	5
A micromachined Joule-Thomson cryocooler for ice lithography	4
Investigation of thermal stress effects during annealing of hafnia-made thin film using molecular dynamics simulations	4
A novel second generation current conveyor (CCII)-based high frequency memristor model	4
Rapid fabrication of NiO/porous Si film for ultra-violate photodetector: The effect of laser energy	4
Highly thermostable ultrathin planar Ag transparent heaters	4
Unveiling strain in future generation transistor technology by Bessel beam electron diffraction method	4
Impact of Sn on the Ti/Ge solid-state reaction: Phase formation sequence, morphological and electrical properties	4
Field-free magnetization switching in SOT-MRAM devices with noncollinear antiferromagnets	4
Reactive ion etching of tantalum in silicon tetrachloride	4
The insight and evaluation of ultra-scaled sub-1 nm gate length transistors	4
Potential of ultrahigh-vacuum based surface treatments in silicon technology	4
Extreme silicon thinning for back side power delivery network: Si thinning stopping on scaled SiGe etch stop layer	4
Editorial Board	4
Fabrication of high aspect ratio atomic force microscope probes using focused ion beam milled etch mask	4
Editorial Board	4
Impact of metal/semiconductor contact layout on the performance of an integrated silicon cavity-free micro thermoelectric generator	4
CSRR loaded high gained 28/38GHz printed MIMO patch antenna array for 5G millimeter wave wireless devices	4
A novel microscale platform for leukemia tumor treating field therapy and electrochemical screening	4
Design of memristor hyperchaotic circuit with burst oscillation and infinite attractor coexistence and its application	4
Simulation-based investigation of junction-controlled narrow-band Si photodetector with vertical structure	4
Bias-stress instabilities in low-temperature thin-film transistors made of Al2O3 and ZnO films deposited by PEALD	4
UV-curable polyimide/layered silicate films with improved barrier properties for the protection of semiconductor chips	4
AlGaN/GaN High electron Mobility Transistor (HEMT) based radio frequency power amplifiers for future wireless communication transmitters: Exciting prospects and challenges	4
Actinic defect inspection and characterization for extreme ultraviolet mask blanks	4
Developing TSV wet cleaning chemistry for quantum computing application	4
4D printing: A detailed review of materials, techniques, and applications	4
Methodology for data retrieval of MRAM: Technological analysis, sample preparation and internal electrical measurements	4
Transition between resistive switching modes in asymmetric HfO2-based structures	3
Bevel contamination management in 3D integration by localized SiO2 deposition	3
An overview of wide and ultra wide bandgap semiconductors for next-generation power electronics applications	3
On the mechanical properties of ultrathin titanium nitride films under different gas ratios of PVD process	3
Electron trapping in HfO2 layer deposited over a HF last treated silicon substrate	3
Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication	3
Photo-conductivity as a transmission phenomenon: Application to the study of β−Ga2O3 thin film	3
Mechanical reinforcement of UV-curable polymer nanocomposite for nanopatterned mold	3
Image analysis algorithm for the verification of hexagonal symmetry in spherical nanostructures	3
Facile fabrication of crescentic ZnO nanorod-based photo-catalytic micro-fluidic reactors	3
Editorial Board	3
A ScAlN-based piezoelectric breathing mode dual-ring resonator with high temperature stability	3
Flexible fabrication of aligned multi-nanowire circuits for on-chip prototyping	3
A novel room temperature SO2 gas sensor based on TiO2/rGO buried-gate FET	3
Comprehensive analysis and investigation of GaN LNA for 3–4 GHz using different gate-drain spacing	3
Shear loading of FCC/BCC Cu/Nb nanolaminates studied by in situ X-ray micro-diffraction	3
Critical solder joint in insulated gate bipolar transistors (IGBT) power module for improved mechanical reliability	3
On the feature accuracy of deep learning mask topography effect models	3
Investigation of trapping/de-trapping dynamics of surface states in AlGaN/GaN high-electron mobility transistors based on dual-gate structures	3
A methodology for mechanical stress and wafer warpage minimization during 3D NAND fabrication	3
Effects of change of oxygen vacancy on hysteresis voltage and stability under time-temperature dependence positive bias stress in amorphous SZTO transistors	3
Vapor deposited thin organic–inorganic capping layers preventing copper line oxidation in polymer-based RDL technologies	3
Impact of Bias temperature instability on reconfigurable field effect transistors and circuits	3
Fabrication of silicon nitride membrane nanoelectromechanical resonator	3
Polycrystalline formamidinium lead bromide (FAPbBr3) perovskite as a self-powered and fast visible-light photodetector	3
Editorial Board	3
A reliability study of the PMMA/Al/UV5 bilayer process for ultra-short T shape gates	3
Burr- and etch-free direct machining of shape-controlled micro- and nanopatterns on polyimide films by continuous nanoinscribing for durable flexible devices	3
Negative capacitance FET based dual-split control 6T-SRAM cell design for energy efficient and robust computing-in memory architectures	3
Editorial Board	3
The effect of Ag atoms diffusion into δ-phase CsPbI3-based memory device	3
Mask defect detection by combining wiener deconvolution and illumination optimization	3
Surface plasmon resonance sensor based on MXene coated PCF for detecting the cancer cells with machine learning approach	3