Microelectronic Engineering

Article	Citations
Wind energy harvesting using piezoelectric macro fiber composites based on flutter mode	47
Synthesis, characterization and electrochemical investigation of physical vapor deposited barium sulphide doped iron sulphide dithiocarbamate thin films	39
Multi-parameter paper sensor fabricated by inkjet-printed silver nanoparticle ink and PEDOT:PSS	38
Mini-review: Recent progress in the development of MoSe2 based chemical sensors and biosensors	37
Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques	32
Study on effect of complexing agents on Co oxidation/dissolution for chemical-mechanical polishing and cleaning process	27
A novel triboelectric nanogenerator based on carbon fiber reinforced composite lamina and as a self-powered displacement sensor	25
Design, fabrication, and characterization of an SLA 3D printed nanocomposite electromagnetic microactuator	24
Temperature compensated diaphragm based Fiber Bragg Grating (FBG) sensor for high pressure measurement for space applications	24
Fabrication of robust PDMS micro-structure with hydrophobic and antifouling properties	23
Enhancing the synaptic properties of low-power and forming-free HfOx/TaOy/HfOx resistive switching devices	22
Compact and flexible meander antenna for Surface Acoustic Wave sensors	22
An integrated electro-optical biosensor system for rapid, low-cost detection of bacteria	21
Superhydrophobic and superoleophobic properties enhancement on PDMS micro-structure using simple flame treatment method	20
Impact of serum concentration in cell culture media on tight junction proteins within a multiorgan microphysiological system	20
A review of polymethyl methacrylate (PMMA) as a versatile lithographic resist – With emphasis on UV exposure	19
Fabrication of a micropatterned composite electrode for solid oxide fuel cells via ultraviolet nanoimprint lithography	19
Additive manufacturing of titanium alloys – Enabling re-manufacturing of aerospace and biomedical components	18
Self-powered ultra-sensitive millijoule impact sensor using room temperature cured PDMS based triboelectric nanogenerator	18
Comparative study of antibiofilm activity and physicochemical properties of microelectrode arrays	18
Characterization of AlN and AlScN film ICP etching for micro/nano fabrication	18
The electrical characteristic of an MIS structure with biocompatible minerals doped (Brushite+Monetite: PVC) interface layer	18
Grayscale e-beam lithography: Effects of a delayed development for well-controlled 3D patterning	17
Progress in SiC nanowire field-effect-transistors for integrated circuits and sensing applications	15
Variability estimation in resistive switching devices, a numerical and kinetic Monte Carlo perspective	15

Design, fabrication and test of a bulk SiC MEMS accelerometer	15
Electrodeposited spruce leaf-like structured copper bismuth oxide electrode for supercapacitor application	15
The role of the AC signal on the dielectrophoretic assembly of carbon nanotubes across indium tin oxide electrodes	15
Rapid fabrication of NiO/porous Si film for ultra-violate photodetector: The effect of laser energy	15
Non-volatile resistive switching memory device based on ZnO-graphene oxide embedded in a polymer matrix fabricated on a flexible PET substrate	14
Micropillar based active microfluidic mixer for the detection of glucose concentration	14
Improving sensing properties of entangled carbon nanotube-based gas sensors by atmospheric plasma surface treatment	14
Hierarchical CuO nanostructured materials for acetaldehyde sensor application	14
Realization of ppb-level acetone detection using noble metals (Au, Pd, Pt) nanoparticles loaded GO FET sensors with simultaneous back-gate effect	14
A triboelectric nanogenerator based on human fingernail to harvest and sense body energy	14
4D printing: A detailed review of materials, techniques, and applications	14
Reusability of a single-walled carbon nanotube-based biosensor for detecting peanut allergens and Y. enterocolitica	13
The investigation and DFT calculation on the gas sensing properties of nanostructured SnO2	13
2DEG transport properties over temperature for AlGaN/GaN HEMT and AlGaN/InGaN/GaN pHEMT	13
A self-supported structure hybrid triboelectric/piezoelectric nanogenerator for bio-mechanical energy harvesting and pressure sensing	13
Physics-based simulation of stress-induced and electromigration-induced voiding and their interactions in on-chip interconnects	13
Mix-and-match lithography and cryogenic etching for NIL template fabrication	13
Thermosonic fine-pitch flipchip bonding of silicon chips on screen printed paper and PET substrates	12
Fully CMOS-compatible passive TiO2-based memristor crossbars for in-memory computing	12
Microscale analysis and gas sensing characteristics based on SnO2 hollow spheres	12
CVD graphene-based flexible and transparent SERS substrate towards L-tyrosine detection	12
Cost-effective technique to fabricate a tubular through-hole anodic aluminum oxide membrane using one-step anodization	12
Design, analysis and fabrication of a novel hybrid electrothermal microgripper in microassembly cell	12
Synthesis and analysis of TiO2 nanotubes by electrochemical anodization and machine learning method for hydrogen sensors	12
Stable dropwise condensation observed on a hierarchically structured superhydrophobic surface incorporating micro-domes	12
Demolding force dependence on mold surface modifications in UV nanoimprint lithography	12
Flexible pressure sensor with a wide pressure measurement range and an agile response based on multiscale carbon fibers/carbon nanotubes composite	12
Effects of change of oxygen vacancy on hysteresis voltage and stability under time-temperature dependence positive bias stress in amorphous SZTO transistors	12
Electrical characterization of flexible hafnium oxide capacitors on deformable softening polymer substrate	11
Laser-induced graphene electrode based flexible heterojunction photovoltaic cells	11
Synthesis and binder-free assembly of SrFe12O19 nano-platelets for wafer-scale patterning of magnetic components	11
Synthesis and optimum temperature determination of highly sensitive MoO3-based heterojunction Schottky sensor for hydrogen detection	11
Application of thin Au/Ti double-layered films as both low-temperature bonding layer and residual gas gettering material for MEMS encapsulation	11
High-performance and wearable strain sensors based on graphene microfluidics and serpentine microchannels for human motion detection	11
Ultrasound-induced deformation of PLGA-microPlates for on-command drug release	11
XPS study of a selective GaN etching process using self-limiting cyclic approach for power devices application	11
Polymeric seed layer as a simple approach for nanostructuring of Ga-doped ZnO films for flexible piezoelectric energy harvesting	11
Bio-mimetic synaptic plasticity and learning in a sub-500 mV Cu/SiO2/W memristor	11
Numerical simulation of stable electrohydrodynamic cone-jet formation and printing on flexible substrate	11
Ultrathin encapsulated rGO strain sensor for gesture recognition	10
Development of an in-situ nanofabrication instrument for ice lithography	10
The investigation of electrothermal response and reliability of flexible graphene micro-heaters	10
Multi-layered BTO/PVDF nanogenerator with highly enhanced performance induced by interlaminar electric field	10
Facile fabrication of flexible and conductive AuNP/DWCNT fabric with enhanced Joule heating efficiency via spray coating route	10
Tunable flexible pressure sensor based on bioinspired capillary-driven method	10
Ultra miniaturized InterDigitated electrodes platform for sensing applications	10
Surface plasmon resonance sensor based on MXene coated PCF for detecting the cancer cells with machine learning approach	10
A wearable graphene transistor-based biosensor for monitoring IL-6 biomarker	10
Single step electron-beam lithography archiving lift-off for T-gate in high electron mobility transistor fabrication	10
Influence of alkyl chain length of boronic acid self-assembled monolayers on indium tin oxide and their organic solar cell performance	10

Fabrication of modifier-free superhydrophobic surfaces with anti-icing and self-cleaning properties on Ti substrate by anodization method	10
Development of low cost screen-printed piezoresistive strain sensor for facial expressions recognition systems	10
Microchannel fabrication via ultraviolet-nanoimprint lithography and electron-beam lithography using an ultraviolet-curable positive-tone electron-beam resist	10
Microelectronic materials, microfabrication processes, micromechanical structural configuration based stiffness evaluation in MEMS: A review	10
An optical fiber electric field sensor based on polarization-maintaining photonic crystal fiber selectively filled with liquid crystal	10
Surface ablation thresholds of femtosecond laser micropatterning silver nanowires network on flexible substrate	10
Fast fabrication of silicon nanopillar array using electron beam lithography with two-layer exposure method	9
Fabrication technology and electrophysical properties of a composite memristor-diode crossbar used as a basis for hardware implementation of a biomorphic neuroprocessor	9
Metal-based asymmetric field emission diodes operated in the air	9
Parameter extraction techniques for the analysis and modeling of resistive memories	9
A study of nano-structural effect on the polarization characteristics of metallic sub-wavelength grating polarizers in visible wavelengths	9
Mixed dimensional Transition Metal Dichalcogenides (TMDs) vdW Heterostructure based Photodetectors: A review	9
Experimental and computational investigation of low temperature Cu Sn solid-state-diffusion bonding for 3D integration	9
A silicon membrane-silver nanoparticles SERS chip for trace molecules detection	9
Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors	9
Effect of GaN cap layer on the performance of AlInN/GaN-based HEMTs	9
Fabrication and nanoindentation characterization of nickel micro-pillar mold for nanoimprint lithography	9
PMMA sacrificial layer based reliable debonding of ultra-thin chips after lapping	9
Phase field simulation of electrohydrodynamic jet droplets and printing microstructures on insulating substrates	9
Mechanisms of colloidal ceria contamination and cleaning during oxide post CMP cleaning	9
Analysis and compensation for nonlinearity of sandwich MEMS capacitive accelerometer induced by fabrication process error	9
Electrodeposition of FeCoP nanoglass films	9
Design and characterization of RF MEMS capacitive shunt switch for X, Ku, K and Ka band applications	9
Fabrication of micro-cages and caged tumor spheroids for microfluidic chip-based assays	9
Dropout neuronal unit with tunable probability based on NbOx stochastic memristor for efficient suppression of overfitting	9
Investigation on asymmetric resistive switching (RS) characteristics in p-NiO/n-ZnO heterojunctions	9
Development of capacitive temperature sensors with high sensitivity using a multiuser polycrystalline silicon process	9
Influence of abrasive morphology and size dispersity of Cu barrier metal slurry on removal rates and wafer surface quality in chemical mechanical planarization	8
InAs/InGaAs quantum dots confined by InAlAs barriers for enhanced room temperature light emission: Photoelectric properties and deep levels	8
CSRR loaded high gained 28/38GHz printed MIMO patch antenna array for 5G millimeter wave wireless devices	8
Well-balanced high permittivity and low dielectric loss obtained in PVDF/graphite/BN ternary composites by depressing interfacial leakage conduction	8
Direct micropatterning on a titanium surface through electrochemical imprint lithography with a polymer electrolyte membrane stamp	8
Review on fabrication, characterization, and applications of porous anodic aluminum oxide films with tunable pore sizes for emerging technologies	8
A single-step fabrication of Ag nanoparticles and CVD graphene hybrid nanostructure as SERS substrate	8
Fabrication of ultrathin artificial basement membrane for epithelial cell culture	8
A triboelectric nanogenerator for mechanical energy harvesting and as self-powered pressure sensor	8
PCRAM electronic synapse measurements based on pulse programming engineering	8
Development of an automated system for obstructive sleep apnea treatment based on machine learning and breath effort monitoring	8
A study of greyscale electron beam lithography for a 3D round shape Kinoform lens for hard X-ray optics	8
Hyperchaotic circuit design based on memristor and its application in image encryption	8
Rotatory microgripper based on a linear electrostatic driving scheme	8
Fabrication of high frequency SAW devices using tri-layer lift-off photolithography	8
Nanofabrication of 30 nm Au zone plates by e-beam lithography and pulse voltage electroplating for soft x-ray imaging	8
An automatic cell culture platform for differentiation of human induced pluripotent stem cells	8
Synthesis of boron-doped CQDs and its use as an additive in P3HT:PCBM layer for efficiency improvement of organic solar cell	8
Crystallization behavior of N -doped Ge-rich GST thin films and nanostructures: An in-situ synchrotron X-ray diffraction study	8
Double p-base structure for 1.2-kV SiC trench MOSFETs with the suppression of electric-field crowding at gate oxide	7
Ion-beam-etching based lift-off for reliable patterning of dense and inverse metallic nanostructures towards 10-nm scale	7
Reactive ion etching of Ge-Sb-Se ternary chalcogenide glass films in fluorine plasma	7
Temperature dependant high output voltage generation via mechanical transducer by using surface modified (O2, CO2, NO2) ZnO nanowires	7
On-chip real-time detection and quantification of reactive oxygen species in MCF-7 cells through an in-house built fluorescence microscope	7
Room temperature photon induced electrical tuning of intersubband transition in GaN HEMT for terahertz applications	7
Mechanisms of GaAs surface passivation by a one-step dry process using low-frequency plasma enhanced chemical deposition of silicon nitride	7
Improving the electrical performance of vertical thin-film transistor by engineering its back-channel interface	7
Fabrication of serpentine and I structured graphene-CNT based highly sensitive and flexible strain sensors	7
Fabrication and characterization of metal insulator semiconductor Ag/PVA/GO/PVA/n-Si/Ag device	7
A stochastic model of particulate matters with AI-enabled technique-based IoT gas detectors for air quality assessment	7
Effects of series resistance and interface state on electrical properties of Al/Er2O3/Eu2O3/SiO2/n-Si/Al MOS capacitors	7
Fabrication of bifocal lenses using resin that can be processed by electron beam lithography after ultraviolet-nanoimprint lithography	6
Vapour-assisted roll-to-roll nanoimprinting of micropillars on nanocellulose films	6
A perovskite-based artificial photonic synapse with visible light modulation and ultralow current for neuromorphic computing	6
Graphene as the ultra-transparent conductive layer in developing the nanotechnology-based flexible smart touchscreens	6
A sub-cm3 energy harvester for in-vivo biosensors	6
Smart wearable triboelectric nanogenerator for self-powered bioelectronics and therapeutics	6
Effect of zinc oxide nucleation on flexible bio based carbon nanotube cotton via chemical bath deposition method	6
Fabrication and characterization of SMA film actuator array with bias spring for high-power MEMS tactile display	6
Overview of printable nanoparticles through inkjet process: Their application towards medical use	6
A low-g omnidirectional MEMS inertial switch with load direction identification	6
Influence of AlN spacer and GaN cap layer in GaN heterostructure for RF HEMT applications	6
Soft and flexible gold microelectrodes by supersonic cluster beam deposition and femtosecond laser processing	6
Cryogenic etching for pattern transfer into silicon of Mix-and-Match structured resist layers	6
Replication of plastic microlens arrays using electroforming and precision compression molding	6
Effects of BOX thickness, silicon thickness, and backgate bias on SCE of ET-SOI MOSFETs	6
Burr- and etch-free direct machining of shape-controlled micro- and nanopatterns on polyimide films by continuous nanoinscribing for durable flexible devices	6
The effect of the top electrode on the switching behavior of bipolar Al2O3/ZnO RRAM	6
Effects of heavy ion irradiation on Cu/Al2O3/Pt CBRAM devices	6
Theoretical validation of inhibition mechanisms of benzotriazole with copper and cobalt for CMP and post-CMP cleaning applications	6
The influence of thermal loads on the physical properties of carbon nanotubes forests	6
Cyclic voltammetric biosensing of cellular ionic secretion based on silicon nanowires to detect the effect of paclitaxel on breast normal and cancer cells	5
Experimental and theoretical insights into electronic properties of oxygen-doped MoTe2 field effect transistor	5

Passivated electrode side walls by atomic layer deposition on flexible polyimide based samples	5
Swimming force characterizations of multistaged bi-helical microswimmer and 3D vortex trap manipulation	5
Direct writing of individual micro/nanofiber patterns suitable for flexible electronics using MEMS-based microneedle	5
Temperature characteristics testing and modifying of piezoelectric composites	5
Simulation-based optimization of out-of-plane, variable-height, convoluted quartz micro needle arrays via single-step anisotropic wet etching	5
Low-loss through silicon Vias (TSVs) and transmission lines for 3D optoelectronic integration	5
Tri-layer contact photolithography process for high-resolution lift-off	5
SAR assessment of miniaturized wideband MIMO antenna structure for millimeter wave 5G smartphones	5
Optimization of corner compensations in wet etching of silicon for a MEMS Z-axis accelerometer	5
Improved rectification characteristics by engineering energy barrier height in TiOx-based RRAM	5
Precise measurement of junction temperature by thermal analysis of light-emitting diode operated at high environmental temperature	5
Large scanning range optical phased array with a compact and simple optical antenna	5
In-situ characterization of thermomechanical behavior of copper nano-interconnect for 3D integration	5
Image analysis algorithm for the verification of hexagonal symmetry in spherical nanostructures	5
A review of high-voltage integrated power device for AC/DC switching application	5
A study of catalyst particles encapsulated inside multiwalled carbon nanotubes on zeolite and montmorillonite	5
Organotin bearing polymeric resists for electron beam lithography	5
A numerical study on slurry flow with CMP pad grooves	5
Implementation of hybrid PDMS-graphite/Ag conductive material for flexible electronic devices and microfluidic applications	5
A novel room temperature SO2 gas sensor based on TiO2/rGO buried-gate FET	5
Ultrasensitive WSe2/MoSe2 heterojunction photodetector enhanced by photogating effect	5
Chip-level thermal management in GaN HEMT: Critical review on recent patents and inventions	5
Etching of sub-10 nm half-pitch high chi block copolymers for directed self-assembly (DSA) application	5
Mechanical reinforcement of UV-curable polymer nanocomposite for nanopatterned mold	5
A review of graphene-based temperature sensors	5
Investigating the effect of electrolyte types with various ionic liquids on the electrochromic performance of PEDOT:PSS based LbL multilayers	5
Achieving nano-patterned features by micro-EDM process using vertically aligned ZnO nanorods grown on microprobe tip: A scaling approach	4
Development and co-integration of a SMA/Si bimorph nanoactuator for Si photonic circuits	4
Fabrication of high aspect ratio microfluidic devices for long term in vitro culture of 3D tumor models	4
Impact of Sn on the Ti/Ge solid-state reaction: Phase formation sequence, morphological and electrical properties	4
Low-temperature (≤550 °C) p-channel Schottky barrier SOI FinFETs for monolithic 3D integration	4
Effect of the deposition method and substrate on an ultra-stable CoV2O6 hydrogen gas sensor, operating at room temperature	4
Reversible chemocapacitor system based on PDMAEMA polymers for fast sensing of VOCs mixtures	4
Developing a micro-thermography system for thermal characterization of LED packages	4
Fabrication of SiC concave microlens array mold based on microspheres self-assembly	4
Technology and optimization of hafnium oxynitride (HfOxNy) thin-films formed by pulsed-DC reactive magnetron sputtering for MIS devices	4
Soybean-based memristor for multilevel data storage and emulation of synaptic behavior	4
Effect of the oxygen dependent device parameters on the electrical properties of a-Si-Zn-Sn-O thin film transistors	4
Study on three-dimensional dielectrophoresis microfluidic chip for separation and enrichment of circulating tumor cells	4
Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication	4
Drying process of an ink-dot analyzed using both digital holographic microscopy and tackiness measurement	4
Comprehensive physics-based RRAM compact model including the effect of variability and multi-level random telegraph noise	4
Magnetic field strength improvement for Lorentz actuation of a μ-Coriolis mass flow sensor	4
Nanosilver dumbbell electronic sheet for cyanide and glucose detection	4
Descumming fluorous solution for photolithographic patterning of organic light-emitting diodes	4
Characterization of AlGaN/GaN degradations during plasma etching for power devices	4
Evaluation of RE-650 as a positive tone resist for electron beam lithography with high plasma etch durability	4
Performance improvement of Al0.3Ga0.7N/AlN/GaN HEMTs using Nitrogen pre-treated Si3N4 passivation	4
Microfluidic channel with embedded monolayer nanofibers for cell culture and co-culture	4
Improved performance of near UV-blue n-ZnO/p-GaN heterostructure LED with an AlN electron blocking layer	4
Highly thermostable ultrathin planar Ag transparent heaters	4
Defect levels and interface space charge area responsible for negative photovoltage component in InAs/GaAs quantum dot photodetector structure	4
Direct Monte-Carlo simulation of dry e-beam etching of resist	4
Using a triblock copolymer as a single additive in high aspect ratio through silicon via (TSV) copper filling	4
Capacitance-voltage measurements of monolayer MoS2 metal-oxide-semiconductor capacitors	4
Optimisation of the droplet split design for high acoustic particle enrichment in droplet microfluidics	4
Capacitive immunosensor for COVID-19 diagnosis	3
Optimization of MoCl5 intercalation for low-resistance and low-damage exfoliated highly-oriented pyrolytic graphite	3
Study of physisorption phenomena of chemical species on 300 mm Si wafers during controlled mini-environment transfers between microelectronic equipments	3
Electrochemically functionalized single-walled carbon nanotubes for ultrasensitive detection of BTEX vapors	3
Study of electrical attributes of molybdenum ditelluride (MoTe2) FET using experimental and theoretical evidences	3
Cryo-CMOS design-technology co-optimization of low noise amplifier for silicon qubit readout	3
Impact of interfacial trap states on achieving bias stability in polymer field-effect transistors	3
Absorbance-based detection of arsenic in a microfluidic system with push-and-pull pumping	3
Effect of hydrogen plasma treatment on the electrical properties for SiC-based power MOSFETs	3
An enhanced triboelectric nanogenerator with micro-grid patterned PDMS for self-powered sensing and music playback	3
Fabrication of gold nanostructures using wet lift-off without adhesion promotion	3
Fabrication of hybrid fine metal mask through micro/nano-photolithography and electroforming	3
Machine learning based technique towards smart laser fabrication of CGH	3
Achromatic Talbot lithography with nano-ring masks for high-throughput periodic patterning	3
Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel	3
Water-soluble polyethylene-oxide polymer based memristive devices	3
Patterning a cellulose based dual-tone photoresist via deep X-ray lithography	3
Charge transport properties of semiconducting natural rubber (Cis 1,4-polyisoprene)	3
A study of the ultra-short T-shaped gate profile controlled by the sensitivity difference in bilayer resists	3
Study on the effect of residual ceria slurry on chemical mechanical planarization (CMP)	3
Pre-deposition growth of interfacial SiO2 layer by low-oxygen-partial-pressure oxidation in the Al2O3/4H-SiC MOS structure	3
Enhancement of polarization response in UVA and UVC wavelength with integrated sub-wavelength metal-grids	3
Investigation of hybrid InSb and GaSb quantum nanostructures	3
Fabrication of integrated silicon PIN detector based on Al-Sn-Al bonding for ΔE-E telescope application	3
Significant improvement in the performance of well-aligned ZnO nanowire arrays ultraviolet photodetector by Ga doping	3
Fabrication of holographic optical elements on silver by nanosecond IR laser source	3
Characterization of silane based ultra-thin barrier deposited at elevated temperature	3
FEA study on the TSV copper filling influenced by the additives and electroplating process	3
Parametric investigation on Laser-Induced Forward Transfer of ZnO nanostructure on flexible PET sheet for optoelectronic application	3
Nucleation-controlled growth of Cu thin films electrodeposited directly on ALD Ru diffusion barrier in additive-free electrolyte for Cu interconnect	3
Dramatically enhanced ambient effects in a multi-layer MoS2 transistor with channel thickness near maximum depletion width	3
Flexible transparent conductive electrode of Au/PDMS prepared by electrochemical-assisted peeling	3
UV-curable polyimide/layered silicate films with improved barrier properties for the protection of semiconductor chips	3
Effects of polyethyleneimine, applied potential and the initial gap on the localized electrochemical deposition of silver microcolumns	3
Low-cost coagulation treatment of dye sensitizer for improved time immersion of dye-sensitized solar cells (DSSC)	3
Nanolitography based on electrospun and etched nanofibers	3
Polyimide moth-eye nanostructures formed by oxygen ion beam etching for anti-reflection layers	3
Printed resistive switching memory operated by screen-printed microbattery via shared electrode	3
A one-step pattern transferring process for freestanding diffractive spiral photon sieves in extreme ultraviolet	3